CN110044523A - A kind of texture recognition array of pressure sensors and preparation method thereof - Google Patents
A kind of texture recognition array of pressure sensors and preparation method thereof Download PDFInfo
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- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 62
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 62
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 58
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 58
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 23
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 21
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 16
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Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/021—Measuring pressure in heart or blood vessels
- A61B5/02141—Details of apparatus construction, e.g. pump units or housings therefor, cuff pressurising systems, arrangements of fluid conduits or circuits
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/6802—Sensor mounted on worn items
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Veterinary Medicine (AREA)
- Biophysics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Cardiology (AREA)
- Medical Informatics (AREA)
- Public Health (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Physiology (AREA)
- Vascular Medicine (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
Abstract
A kind of texture recognition array of pressure sensors and preparation method thereof, the sensor array includes pressure sensitive layer, it is separately positioned on two electrode layers of pressure sensitive layer two sides and wraps up the polymer elastomer of pressure sensitive layer and electrode layer, pressure sensitive layer includes induced with laser porous graphene film, polymer elastomer is filled in the hole of induced with laser porous graphene film, induced with laser porous graphene film forms patterned cathode structure, the electrode layer of pressure sensitive layer side includes the transverse electrode array corresponding to patterned cathode structure setting, the electrode layer of the pressure sensitive layer other side includes the longitudinal electrode array corresponding to patterned cathode structure setting, transverse electrode array and longitudinal electrode array electrode are interspersed in the pressure-sensitive area where patterned cathode structure.It is achieved in the array of pressure sensors of micro-dimension, high density, can detect pressure size and distribution, has the function of array pressure tactilely-perceptible ability and texture recognition.
Description
Technical field
The present invention relates to flexible touch sensation sensor field, especially a kind of texture recognition array of pressure sensors and its production
Method.
Background technique
With the development of big data and technology of Internet of things, the requirement of function and detection position to sensor is higher and higher.
Flexible touch sensation sensor array has the ability and flexibility of pressure perception, shape perception and texture recognition, can be used as electronics
Skin is used for robotic actuator or intelligent artificial limb surface, provides tactile data for intelligent robot and disabled person；It can also be used for
Wearable device realizes the functions such as human-computer interaction, bio-signal acquisition.
However, tactile sensor array how to be made to realize the Pressure identification of high density, graphical texture structure and shape, it is
Prior art urgent problem to be solved.
Summary of the invention
It is a primary object of the present invention to overcome the deficiencies of the prior art and provide a kind of texture recognition array of pressure sensors
And preparation method thereof.
To achieve the above object, the invention adopts the following technical scheme:
A kind of texture recognition array of pressure sensors, including pressure sensitive layer, it is separately positioned on the pressure sensitive layer two
Two electrode layers of side and the polymer elastomer of the package pressure sensitive layer and the electrode layer, the pressure sensitive layer packet
Induced with laser porous graphene film is included, polymer elastomer is filled in the hole of the induced with laser porous graphene film
Interior, the induced with laser porous graphene film forms patterned cathode structure, the electrode layer packet of the pressure sensitive layer side
The transverse electrode array corresponding to the patterned cathode structure setting is included, the electrode layer of the pressure sensitive layer other side includes
Corresponding to the longitudinal electrode array of the patterned cathode structure setting, the transverse electrode array and the longitudinal electrode array
Electrode is interspersed in the pressure-sensitive area where the patterned cathode structure.
Further:
The electrode layer includes being printed electrode by what conductive silver paste, conductive carbon paste or PEDOT:PSS conducting polymer were formed,
The transverse electrode array and the longitudinal electrode array are formed by described print electrode.
The electrode layer further includes and the FPC line electrode for printing electrode and being connected.
The polymer elastomer is polydimethylsiloxane elastomer.
The porosity of the induced with laser graphene film 11 is 25%-90%.
The patterned cathode structure includes the multiple rectangular elements arranged in array, the patterned cathode structure
A length of 50-500 μm of element sides, cell spacing is 50-500 μm, with a thickness of 40-200 μm.
The list of the electrode width of the transverse electrode array and the longitudinal electrode array and the patterned cathode structure
First side length is consistent, and electrode spacing is consistent with cell spacing, with a thickness of 8-24 μm.
The polymer elastomer includes middle layer and two sides clad, and the middle layer is to be formed after being diluted by n-hexane
PDMS film, the two sides clad be not diluted PDMS film, the middle layer and the two sides clad layer-forming
It is integrated, the middle layer is distributed between the unit of the patterned cathode structure, and the thickness of the middle layer is less than described
The thickness of the unit of patterned cathode structure but it is not much different in 20 μm.
A kind of production method of the texture recognition array of pressure sensors, comprising the following steps:
S1, prepare Kapton；
S2, it is more to form patterned induced with laser with laser scanning ablation Kapton using patterned mask
Hole graphene film；
S3, PDMS film is formed in induced with laser porous graphene film and Kapton surface；
S4, etching mask, the extra PDMS film of etching removal induced with laser porous graphene film surface are used；
S5, electrode is made on the surface of induced with laser porous graphene film；
S6, one layer of PDMS film is formed in the body structure surface for having made electrode；
S7, Kapton is removed；
S8, the surface of the induced with laser porous graphene film of exposure makes electrode after removing Kapton；
S9, another layer of PDMS film is formed in the body structure surface that step S9 has made electrode.
Further:
The PDMS film of step S3 is formed after being diluted by n-hexane, direct shape that the PDMS film of step S6 and S9 are undiluted
At.
The invention has the following beneficial effects:
The present invention provides a kind of texture recognition array of pressure sensors, and wherein pressure sensitive layer includes that induced with laser is porous
Graphene film, the induced with laser porous graphene film forms patterned cathode structure, and polymer elastomer is filled in
In the hole of the induced with laser porous graphene film, the electrode layer of the pressure sensitive layer two sides corresponds respectively to the figure
Transverse electrode array and longitudinal electrode array is arranged in shape array structure, is interspersed in pressure-sensitive area, single sensing unit
Structure constitutes " sandwich structure " being made of electrode-induced with laser graphene-electrode, and polymer elastomer is simultaneously as sharp
Package material outside the hole packing material (combined with induced with laser graphene and to form sensitive layer) and electrode of photoinduction graphene
Material, the present invention provides a kind of pressure sensings that can be realized micro-dimension, high density, can detect pressure size and distribution as a result,
Device array, the array of pressure sensors have the function of the pressure tactilely-perceptible ability of array and texture recognition, can be by texture
The pressure distribution shifts of structure are that sensor array resistance variations export, it can be achieved that the pressure of graphical texture structure and shape is known
Not, and with induced with laser graphene high pressure sensitivity characteristics, be suitable for electronic skin, touch sensor and wearable device
Deng Dynamic Recognition suitable for bio-signal acquisitions such as heart sound, pulse waves.The sensor can also be achieved the tactile pressure of other forms
Perception.
Specifically, inventive sensor perpendicular to sensor sheet surface pressure when by acting on, polymer elastomer structure
Deformation occurs with induced with laser graphene sensitive material for layer, so that the contact area in porous conductive material increases, spacing subtracts
Small, sensor resistance reduces.The sensor unit pressure-sensitivity of optimization is up to 0.211kPa-1, pressure test range is 0-
Pressure spacing and texture dimensions detection that spatial resolution is 0.5mm may be implemented in 50kPa.Sensor array pressing is being had
There is the body surface of raised textural, according to the resistance variations that array element exports after by pressure, can use pressure distribution and realize
The identification of texture structure and shape.Sensor is pressed into the skin surface at human body wrist radial artery, it can be by detecting pulse
The pressure change that generates when fluctuation detects pulse pressure wave.Sensor unit has preferable resolution ratio, stability and dynamic
Response.
The sensor array can use the height that laser direct-writing processing technology, printed electronics etc. realize unglazed carving technology
Dense sensor arrays production.
Detailed description of the invention
Fig. 1 is the induced with laser graphene texture recognition sensor array configuration schematic diagram of the embodiment of the present invention；
Fig. 2 is the induced with laser graphene texture recognition sensor array sensitizing range diagrammatic cross-section of the embodiment of the present invention；
Fig. 3 is sensitive material signal among the induced with laser graphene texture recognition sensor array of the embodiment of the present invention
Figure；
Fig. 4 is that sensitive material structure is thick among the induced with laser graphene texture recognition sensor array of the embodiment of the present invention
Spend schematic diagram；
Fig. 5 is the flow diagram of the production induced with laser graphene texture recognition sensor array of the embodiment of the present invention.
Specific embodiment
It elaborates below to embodiments of the present invention.It is emphasized that following the description is only exemplary,
The range and its application being not intended to be limiting of the invention.
Refering to fig. 1 to Fig. 4, in one embodiment, a kind of texture recognition array of pressure sensors, including pressure sensitive layer
1, two electrode layers 2,3 of 1 two sides of pressure sensitive layer are separately positioned on and wrap up the pressure sensitive layer 1 and the electrode
The polymer elastomer 22,32 of layer 2,3, the pressure sensitive layer 1 include induced with laser porous graphene film 11, polymer bullet
Property body 12 is filled in the hole of the induced with laser porous graphene film 11, the induced with laser porous graphene film 11
Patterned cathode structure is formed, the electrode layer 2 of 1 side of pressure sensitive layer includes corresponding to the patterned cathode structure to set
The transverse electrode array set, the electrode layer 3 of 1 other side of pressure sensitive layer include corresponding to the patterned cathode structure to set
The longitudinal electrode array set, the transverse electrode array and the longitudinal electrode array electrode are in the patterned cathode structure institute
Pressure-sensitive area be interspersed.
In a preferred embodiment, the electrode layer 2,3 includes conductive by conductive silver paste, conductive carbon paste or PEDOT:PSS
What polymer was formed prints electrode 21,31, the transverse electrode array and the longitudinal electrode array by it is described print electrode 21,
31 form.
In a preferred embodiment, the electrode layer 2,3 further includes and 21, the 31 FPC lines being connected that print electrode
Electrode 23,33.
In a preferred embodiment, the polymer elastomer is polydimethylsiloxane elastomer.
In a preferred embodiment, the porosity of the induced with laser graphene film 11 is 25%-90%.
In a preferred embodiment, the patterned cathode structure includes in multiple rectangular elements of array arrangement, institute
A length of 50-500 μm of element sides for stating patterned cathode structure, cell spacing is 50-500 μm, with a thickness of 40-200 μm.
In a preferred embodiment, the electrode width of the transverse electrode array and the longitudinal electrode array and the figure
The unit side length of shape array structure is consistent, and electrode spacing is consistent with cell spacing, and thickness of electrode is 8-24 μm.
In a preferred embodiment, the polymer elastomer includes middle layer and two sides clad, and the middle layer is
The PDMS film formed after being diluted by n-hexane, the two sides clad be not diluted PDMS film, the middle layer and
The two sides clad layer-forming is integrated, and the middle layer is distributed between the unit of the patterned cathode structure, it is described in
The thickness of interbed is less than the thickness of the unit of the patterned cathode structure but is not much different in 20 μm.
Refering to Fig. 5, a kind of production method of the texture recognition array of pressure sensors, comprising the following steps:
S1, prepare Kapton 4；
S2, patterned induced with laser is formed with laser scanning ablation Kapton 4 using patterned mask 5
Porous graphene film 11；
S3, PDMS film 12 is formed in induced with laser porous graphene film 11 and 4 surface of Kapton；
S4, etching mask, the PDMS film of etching removal 11 excess surface of induced with laser porous graphene film are used；
S5, electrode 21,23 is made on the surface of induced with laser porous graphene film 11；
S6, one layer of PDMS film 22 is formed in the body structure surface for having made electrode 21,23；
S7, Kapton 4 is removed；
S8, the surface of the induced with laser porous graphene film 11 of exposure makes electrode after removing Kapton
31,33；
S9, another layer of PDMS film 32 is formed in the body structure surface that step S9 has made electrode 31,33.
In a preferred embodiment, the PDMS film 12 of step S3 is formed after being diluted by n-hexane, step S6's and S9
The undiluted direct formation of PDMS film 22,32.
The feature and advantage of the specific embodiment of the invention are further described below in conjunction with attached drawing.
As shown in Figures 1 to 4, the induced with laser graphene texture recognition sensor array of a kind of specific embodiment, including
Pressure sensitive material, electrode material and polymer elastomer material, pressure sensitive material are induced with laser graphene, induced with laser
Graphene is generated by laser ablation of polymer film, and the material of thin polymer film is polyimides (PI).Pressure sensitive material swashs
Photoinduction graphene is filled and is wrapped up by polymer elastomer such as PDMS.Electrode material can solidify for the conductive silver paste of silk-screen printing
Molding.Single sensing unit structure is conductive silver paste-induced with laser graphene-conductive silver paste composition " sandwich structure ",
PDMS is as the encapsulating material outside the hole packing material and conductive silver paste of induced with laser graphene.
The induced with laser graphene uses dimethyl silicone polymer by laser-ablated polyimide film inductive formation
PDMS filling, solidification package.Can be after PDMS dry etching, polyimides wet etching, induced with laser graphene/PDMS knot
The thermal interface exposure of structure layer, then electrode structure is directly printed on induced with laser graphene film two sides, shape using silk-screen printing
At " sandwich " structure.
As shown in Figures 1 to 4, the sensor of the embodiment includes pressure sensitive layer 1, electrode layer 2,3 and PDMS polymer
Elastomer 12,22,32, pressure sensitive layer 1 include induced with laser graphene 11, and electrode layer 2,3 includes conductive silver paste electrode 21,31
With FPC electrode 23,33, wherein induced with laser graphene 11 forms patterned cathode structure, PDMS polymer elastomer 12 and figure
Shape array structure is located on the same floor face and combines to form pressure-sensitive area.Electrode layer 2,3 is quick by graphic arrow direction and pressure
Feel layer 1 to combine, forms the sensor array of " sandwich " structure.
The cross-sectional view of pressure-sensitive area as shown in Fig. 2, pressure-sensitive area by PDMS polymer elastomer 12 and induced with laser
Graphene 11 forms, and the line of demarcation with electrode layer 2 is the lower surface of conductive silver paste electrode 21, line of demarcation such as Fig. 2 with electrode layer 3
Shown in middle dotted line.Induced with laser graphene 11 is filled by PDMS polymer elastomer 12, and conductive structure is porous structure, and
It is connected in upper and lower surfaces by ag paste electrode, and is wrapped up by PDMS polymer elastomer 22,32 from upper and lower two sides.
As shown in Figure 3, it is shown that figure is 11 array of induced with laser graphene film of rectangle, and has certain thickness.
The cross-sectional view of pressure sensitive layer 1 is as shown in figure 4, preferably, wherein 11 film thickness of induced with laser graphene (t2+t3) is 40-
200 μm, 12 thickness of PDMS polymer elastomer (t1) is differed with t2 less than 20 μm.Separate unit is 50-500 μm of side length (t4),
50-500 μm of cell spacing (t5).
Preferably, the conductive silver paste thickness of electrode of printing is 8-24 μm, width and unit side length (t4) unanimously, spacing
It is consistent with cell spacing (t5).
Preferably, FPC23,33 be the flexible circuit board made by PET substrate.
Refering to Fig. 5, in a kind of more specific embodiment, a kind of side of the porous graphene heart sound detection sensor of production
Method, comprising the following steps:
S1, cleaning and fixed Kapton 4；
S2, use patterned stainless steel metal mask 5 as laser mask, use the CO of continuous scanning ablation2Ablation
Kapton 4 forms patterned induced with laser graphene film 11；
S3, using the diluted PDMS of n-hexane, in the 4 surface spin coating of induced with laser graphene film 11 and Kapton
Form PDMS film 12；
S4, use stainless steel metal mask 5 as etching mask, by alignment mark its hollow out figure is lured with laser
Lead the alignment of graphene film 11.Using coupled plasma etch (ICP), PDMS etching is carried out, removes induced with laser graphene
The PDMS film 12 of 11 excess surface of film, etching gas O2、SF6；Or use CO2Laser in place ICP is directly carried out
PDMS etching；
S5, using screen process press and with the printing screen plate of electrode pattern, conductive silver paste electrode 21 is printed on laser
11 surface of graphene film is induced, and FPC connecting line 23 is bonded in electrode end；
S6, in one layer of PDMS film structure 22 of surface spin coating and solidify, encapsulate remaining structure；
S7, using ethanol amine, the deionized water mixed solution of potassium hydroxide, Kapton 4 is etched and is removed；
S8, using screen process press and with the printing screen plate of electrode pattern, conductive silver paste electrode 31 is printed on laser
11 surface of graphene film is induced, and FPC connecting line 33 is bonded in electrode end；
S9, in one layer of PDMS film structure 32 of surface spin coating and solidify, encapsulate remaining structure, complete sensor production.
Using the graphical ability of the high-precision direct write of laser processing technology, highdensity induced with laser graphene array is realized
The pressure sensitive graphics array production of low cost is realized in graphical processing.
Preferably, the wavelength of laser is 405nm-10.6 μm, power is that 4-10W is adjustable.It is highly preferred that laser is titanium dioxide
Carbon laser (10.6 μm of wavelength).The relative motion rate of laser ablation of polymer film is 50mm/s to 500mm/s.
Preferably, polymer elastomer is polydimethylsiloxane, film is formed using spin-coating method.Spin coating revolving speed is
500-4000rpm.Wherein PDMS film 12 is formed after being diluted by n-hexane, 22,32 undiluted direct formation of PDMS film, heat
Solidification temperature is 60-120 DEG C, time 30-120min.
Preferably, be bonded FPC23,33 with silver paste relative to electrode interface after the printing of conductive silver paste electrode 21,31, Gu
Change silver paste and realizes connection.
As shown in figure 5, cleaning first in specific production and fixing Kapton 4.Use patterned stainless steel
Metal mask 5 is used as laser mask, uses the CO of continuous scanning ablation2Ablation Kapton 4 forms patterned laser
Induce graphene film 11；Using the diluted PDMS (mass ratio 1:1) of n-hexane, in induced with laser graphene film 11 and polyamides
The 4 surface spin coating of imines film forms PDMS film 12；Use stainless steel metal mask 5 as etching mask, passes through alignment mark
So that its hollow out figure is aligned with induced with laser graphene film 11.Using coupled plasma etch (ICP), PDMS quarter is carried out
Erosion removes the PDMS film 12 of 11 excess surface of induced with laser graphene film, etching gas O2、SF6；Use silk-screen printing
Machine and printing screen plate with electrode pattern, are printed on 11 surface of induced with laser graphene film for conductive silver paste electrode 21, and
FPC connecting line 23 is bonded in electrode end, curing conductive silver paste under the conditions of 120 DEG C；One layer of PDMS film of spin coating on surface
Structure 22 simultaneously solidifies, and encapsulates remaining structure；It is using ethanol amine, the deionized water mixed solution of potassium hydroxide, polyimides is thin
The etching removal of film 4；Using screen process press and with the printing screen plate of electrode pattern, conductive silver paste electrode 31 is printed on laser
11 surface of graphene film is induced, and FPC connecting line 33 is bonded in electrode end；One layer of PDMS film structure of spin coating on surface
32 and solidify, encapsulate remaining structure, completes sensor production.
Example of making
It is 250 × 250 μm that unit size has been made in this example2, spacing is 250 μm of sensor array, and array density is
20×20cm-2, as shown in figure 5, the induced with laser graphene texture recognition sensor array manufacturing process is as follows:
S1 is cleaned by ultrasonic the Kapton 4 of 75 μ m-thicks using acetone, isopropanol, deionized water solution, is blown with nitrogen
It is dried after dry.
S2, using the carbon dioxide laser 6 of 10.6 mum wavelengths, according to power 6W, the parameter of Recession rate 225mm/s, thoroughly
Stainless steel metal mask 5 is crossed, ablation generation unit is having a size of 250 × 250 μm2, spacing is 250 μm, and density is 20 × 20cm-2's
Induced with laser graphene is as sensor sensing material.
S3 dilutes PDMS with n-hexane 1:1 in mass ratio, and revolves the PDMS solution after dilution by the revolving speed of 4000rpm
It is coated in sensor surface.30 minutes are stood, in using 80 DEG C of heating 10 minutes on hot plate, then full wafer device is placed in 80 DEG C of baking ovens
Heating 2 hours, makes PDMS be formed by curing PDMS film.
S4, uses stainless steel metal mask 5 as etching mask, by alignment mark its hollow out figure is lured with laser
Lead the alignment of graphene film 11.Using coupled plasma etch (ICP), PDMS etching is carried out, removes induced with laser graphene
The PDMS film 12 of 11 excess surface of film, etching gas O2(40sccm)、SF6(45sccm), upper and lower electrode load power
Respectively 300W, 50W, process chamber pressure 8mTorr etch total duration 2400s.
S5, using screen process press and with the printing screen plate of electrode pattern, conductive silver paste electrode 21 is printed on laser
11 surface of graphene film is induced, and FPC connecting line 23 is bonded in electrode end.Printing position halftone spacing 2.5mm, under scraper
Distance 23.5mm, squeegee speed 60mm/s are pressed, black speed 100mm/s is returned.Conductive silver paste after printing need to be placed in 135 DEG C of baking ovens
Heating 45 minutes to solidify silver paste.
S6, in one layer of PDMS film structure 22 of surface spin coating and solidify for heating 2 hours under the conditions of at 120 DEG C, encapsulate remaining
Structure.
S7, using ethanol amine, the deionized water mixed solution (mass ratio 2:3:5) of potassium hydroxide, in 80 DEG C of water bath conditions
Under, Kapton 4 is etched and is removed.
S8, using screen process press and with the printing screen plate of electrode pattern, conductive silver paste electrode 31 is printed on laser
11 surface of graphene film is induced, and FPC connecting line 33 is bonded in electrode end.Parameter is identical as S5.
S9, in one layer of PDMS film structure 32 of surface spin coating and solidify, encapsulate remaining structure, parameter is identical as S6.It completes
Sensor production.
The above content is combine it is specific/further detailed description of the invention for preferred embodiment, cannot recognize
Fixed specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
Without departing from the inventive concept of the premise, some replacements or modifications can also be made to the embodiment that these have been described,
And these substitutions or variant all shall be regarded as belonging to protection scope of the present invention.
Claims (10)
1. a kind of texture recognition array of pressure sensors, which is characterized in that including pressure sensitive layer, be separately positioned on the pressure
Two electrode layers of sensitive layer two sides and the polymer elastomer of the package pressure sensitive layer and the electrode layer, the pressure
Sensitive layer includes induced with laser porous graphene film, and polymer elastomer is filled in the induced with laser porous graphene film
Hole in, the induced with laser porous graphene film forms patterned cathode structure, the electricity of the pressure sensitive layer side
Pole layer includes the transverse electrode array corresponding to the patterned cathode structure setting, the electrode of the pressure sensitive layer other side
Layer includes the longitudinal electrode array corresponding to the patterned cathode structure setting, the transverse electrode array and longitudinal electricity
Pole array electrode is interspersed in the pressure-sensitive area where the patterned cathode structure.
2. texture recognition array of pressure sensors as described in claim 1, which is characterized in that the electrode layer includes by conduction
What silver paste, conductive carbon paste or PEDOT:PSS conducting polymer were formed prints electrode, the transverse electrode array and longitudinal electricity
Pole array is formed by described print electrode.
3. texture recognition array of pressure sensors as claimed in claim 2, which is characterized in that the electrode layer further includes and institute
State the FPC line electrode for printing electrode connected.
4. texture recognition array of pressure sensors as described in any one of claims 1 to 3, which is characterized in that the polymer
Elastomer is polydimethylsiloxane elastomer.
5. such as the described in any item texture recognition array of pressure sensors of Claims 1-4, which is characterized in that the laser lures
The porosity for leading graphene film 11 is 25%-90%.
6. such as texture recognition array of pressure sensors described in any one of claim 1 to 5, which is characterized in that described graphical
Array structure includes in multiple rectangular elements of array arrangement, a length of 50-500 μ of the element sides of the patterned cathode structure
M, cell spacing is 50-500 μm, with a thickness of 40-200 μm.
7. texture recognition array of pressure sensors as claimed in claim 6, which is characterized in that the transverse electrode array and institute
The electrode width for stating longitudinal electrode array is consistent with the unit side length of the patterned cathode structure, electrode spacing and cell spacing
Unanimously, thickness of electrode is 8-24 μm.
8. texture recognition array of pressure sensors as described in any one of claim 1 to 7, which is characterized in that the polymer
Elastomer includes middle layer and two sides clad, and the middle layer is the PDMS film formed after being diluted by n-hexane, and described two
Side clad is not diluted PDMS film, and the middle layer and the two sides clad layer-forming are integrated, the middle layer
It is distributed between the unit of the patterned cathode structure, the thickness of the middle layer is less than the list of the patterned cathode structure
Member thickness but be not much different in 20 μm.
9. a kind of production method of texture recognition array of pressure sensors as claimed in any one of claims 1 to 8, feature exist
In, comprising the following steps:
S1, prepare Kapton；
S2, patterned induced with laser porous stone is formed with laser scanning ablation Kapton using patterned mask
Black alkene film；
S3, PDMS film is formed in induced with laser porous graphene film and Kapton surface；
S4, etching mask, the extra PDMS film of etching removal induced with laser porous graphene film surface are used；
S5, electrode is made on the surface of induced with laser porous graphene film；
S6, one layer of PDMS film is formed in the body structure surface for having made electrode；
S7, Kapton is removed；
S8, the surface of the induced with laser porous graphene film of exposure makes electrode after removing Kapton；
S9, another layer of PDMS film is formed in the body structure surface that step S9 has made electrode.
10. production method as claimed in claim 9, which is characterized in that wherein the PDMS film of step S3 is diluted by n-hexane
After formed, direct formation that the PDMS film of step S6 and S9 are undiluted.
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