CN105117052B - A kind of flexible sensor array - Google Patents
A kind of flexible sensor array Download PDFInfo
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- CN105117052B CN105117052B CN201510454274.2A CN201510454274A CN105117052B CN 105117052 B CN105117052 B CN 105117052B CN 201510454274 A CN201510454274 A CN 201510454274A CN 105117052 B CN105117052 B CN 105117052B
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Abstract
The present invention relates to sensor technical field, the present invention provides a kind of flexible sensor array, including flexible substrate, array electrode, flexible sensitive layer and protective layer；The array electrode is arranged at the surface of the flexible substrate, wherein, the array electrode includes at least one electrod-array；The flexible sensitive layer is provided with the surface of the array electrode；The protective layer is arranged at the top of the flexible sensitive layer, and, the protective layer covers the flexible sensitive layer and the flexible substrate.The present invention includes the array electrode of at least one electrod-array by being set between flexible substrate and flexible sensitive layer, each electrod-array can independent acquisition pressure data, it is achieved thereby that gathering the technique effect of multipoint pressure data simultaneously.Sensor of the invention is a kind of novel flexible electronic sensor for realizing apery class skin sensing function, and the perception to micro-pressure has higher sensitivity.
Description
Technical field
The present invention relates to sensor technical field, more particularly to a kind of flexible sensor array.
Background technology
With the development of flexible electronic, flexible sensing technology has been developing progressively as the high-new intelligence to attract people's attention
Interaction technique, the sense to realizing the touch interaction active force between flexible contact interface, curved surface and irregular shape contact interface
Survey, and the sensing of DYNAMIC DISTRIBUTION information has vital effect.Flexible sensor array based on this technology is measurement
Contact size and the ideal component of distributed intelligence, show between a variety of flexible contact interfaces and ultra-narrow gap contact interface
Great application prospect.
And traditional rigidity or flexible less sensor are difficult to accurately sense the touch interaction between above-mentioned contact interface
Active force and its DYNAMIC DISTRIBUTION information, also, traditional preparation method is also difficult to reach such novel flexible sensor array
Prepare precision and batch prepares speed and low cost.
The content of the invention
The present invention is directed to above-mentioned deficiency, there is provided a kind of flexible sensor array and preparation method thereof.
The embodiments of the invention provide a kind of flexible sensor array, including flexible substrate, array electrode, flexible sensitive layer
And protective layer；
The array electrode is arranged at the surface of the flexible substrate, wherein, the array electrode includes at least one electricity
Pole array；
The flexible sensitive layer is provided with the surface of the array electrode；
The protective layer is arranged at the top of the flexible sensitive layer, and, the protective layer covers the flexible sensitive layer
With the flexible substrate.
Preferably, in addition to lead electrode, wherein, the flexible substrate includes array area and lead district：
The array electrode is arranged at the array area, and the lead electrode is arranged at the lead district, and, the lead
Electrode is arranged at the surface of the flexible substrate.
Preferably, the protective layer covers the flexible sensitive layer and the flexible substrate positioned at the array area.
Preferably, the flexible substrate has the first pattern by ultraviolet stamping.
Preferably, the array electrode is printed in the surface of the flexible substrate by aerosol ink-jetting style.
Preferably, the array electrode is by being arranged at the table of the flexible substrate without glue flexible printed circuit board mode
Face.
Preferably, the electrod-array is metal film electrode array.
Preferably, the flexible substrate be ethylene-vinyl acetate copolymer, polyvinyl alcohol, dimethyl silicone polymer, poly- pair
One kind in polyethylene terephthalate, polymethyl methacrylate, polyimides and polyethylene.
Preferably, the material of the flexible sensitive layer is nano material.
Preferably, the material of the protective layer is the flexible high molecular material with biocompatibility.
One or more of embodiment of the present invention technical scheme, has at least the following technical effects or advantages：
Include the array electrode of at least one electrod-array by being set between flexible substrate and flexible sensitive layer, each
Electrod-array can independent acquisition pressure data, it is achieved thereby that gather the technique effect of multipoint pressure data simultaneously, also,
Three-dimensional cavernous structure based on nano material can ensure that flexible sensor array has high sensitivity and signal to noise ratio, meanwhile, this
The flexible sensor array of application simply, conveniently, can also realize high accuracy, high-volume, the system of low cost in industrial production
It is standby.
Brief description of the drawings
Fig. 1 is the top view of flexible sensor array in an embodiment of the present invention；
Fig. 2 is the top view of flexible sensor array in another embodiment of the present invention.
In figure mark for：1 is electrod-array, and 2 be protective layer, and 3 be flexible substrate, and 4 be lead electrode.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
Part of the embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
The present invention provides a kind of flexible sensor array, as shown in figure 1, the flexible sensor array includes flexible substrate
3rd, array electrode, flexible sensitive layer and protective layer 2, array electrode are arranged at the surface of flexible substrate 3, wherein, array electrode bag
Include at least one electrod-array 1.On the surface of array electrode, flexible sensitive layer is set.Protective layer 2 is arranged at flexible sensitive layer
Top, and, protective layer 2 covers the flexible substrate 3 and flexible sensitive layer.
Further, as shown in Fig. 2 flexible sensor array also includes lead electrode 4, wherein, flexible substrate 3 includes array
Area and lead district, array electrode are arranged at array area, and lead electrode 4 is arranged at lead district, and, lead electrode 4 is arranged at flexibility
The surface of substrate 3.Meanwhile protective layer 2 covers flexible sensitive layer and the flexible substrate 3 positioned at array area.
Wherein, flexible substrate 3 be ethylene-vinyl acetate copolymer, it is polyvinyl alcohol, dimethyl silicone polymer, poly- to benzene two
One kind in formic acid second diester, polymethyl methacrylate, polyimides and polyethylene.Meanwhile flexible substrate 3 passes through ultraviolet pressure
Print has the first pattern.By the ultraviolet stamping in nanometer embossing, different micro structured patterns can be realized in flexible substrate 3
Change the controllable preparation of complex, ultraviolet stamping do not need high temperature, the condition of high pressure, and speed is fast, link is few, cost is low, and can be with
High-resolution pattern is obtained in nanoscale.
In this application, the shape and size of array electrode can be selected according to being actually needed, and electrod-array is metal
Thin film electrode array, such as prong electrod-array or a word electrod-array.Specifically, array electrode can be prong array electricity
Pole, then electrod-array 1 is prong electrod-array, and 6 prong electrodes, 6 prongs can be included in a prong array electrode
Electrode can be arranged in 3 rows 2 and arrange, as shown in figure 1, wherein, the line width of array electrode is 50 μm, and thickness is 20 μm.
Specifically, in a kind of specific embodiment, array electrode is printed in flexible liner by aerosol ink-jetting style
The surface at bottom 3.Aerosol ink-jetting style conveys spray printing in flexible substrate 3 by inert gas, forms the default electrode needed
Array 1.Aerosol ink-jetting style has the characteristics that contactless, no pressure, without printing plate.In this embodiment, array electrode
Material be metal nano conductive ink, carbon nanometer conductive ink and organic conductive ink in one kind, metal nano conductive ink
Can be nano silver conductive ink, nano silver wire ink, nano aluminum ink or tin indium oxide ink, carbon nanometer conductive ink can be with
For high-purity semiconductor single-walled carbon ink or graphene conductive ink, organic conductive ink can be PEDOT:PSS.
In another specific embodiment, array electrode without glue flexible printed circuit board mode by being arranged at flexibility
The surface of substrate 3, it has the advantages that graph thinning, high density, high temperature resistant and reliable.In this embodiment, array electrode
Material is extra-thin copper film electrode or gold film electrode, and corresponding, flexible substrate 3 can be PET or polyamides
Imines.
In this application, the material of flexible sensitive layer is nano material.Such as preferably, graphene, redox graphene,
One or more combinations in graphene oxide, CNT.And it is possible to realized by Ultrasonic spraying technology soft
The controllable film forming of property sensitive layer.Ultrasonic spraying technology can realize the mist of liquid using relatively low ultrasonic vibratory energy
Change, liquid is sent to fog-spray nozzle by self gravitation or low pressure liquid pump and realizes that continuously or discontinuously property is atomized, and there is spraying to imitate for it
The advantages that rate is high, waste of raw materials is few, micro-atomizing particle is uniform, corrosion resistance is strong, precision is high, controllability is good.Based on nanometer
The three-dimensional cavernous structure of material can ensure that it has high sensitivity and high s/n ratio.
In this application, the material of protective layer 2 is the flexible high molecular material with biocompatibility, for example, poly- diformazan
Radical siloxane film, polyethylene, ethylene-vinyl acetate copolymer film or flexible nano coating.Handled by low-voltage plasma
Encapsulation technology realizes sealing and the assembling of the controllable preparation of ultrathin nanometer coating and sensor array, can effective waterproof, anti-salt sweat, resistance to
Friction.
Include the array electrode of at least one electrod-array 1 by being set between flexible substrate 3 and flexible sensitive layer, often
Individual electrod-array 1 can independent acquisition pressure data, forming its mapping figure by rear end software and hardware system processing can
Pressure size and distributed intelligence are reflected it is achieved thereby that gathering the technique effect of multipoint pressure data simultaneously with image, and
And the three-dimensional cavernous structure based on nano material can ensure that flexible sensor array has high sensitivity and signal to noise ratio, meanwhile,
The flexible sensor array of the application is simple in industrial production, conveniently, can also realize high accuracy, high-volume, low cost
Prepare.
Based on flexible bionic cognition technology, and the features such as have high density, high-flexibility, high stickiness, high sensitivity concurrently
Flexible sensor array, be contact size between a variety of flexible flat contact interfaces of measurement and ultra-narrow gap contact interface
And the ideal component of DYNAMIC DISTRIBUTION information, it is indirectly that the flexible sensor array even more senses a variety of flexible on-plane surface contact interfaces
Unique device of touch pressure size and DYNAMIC DISTRIBUTION information.Therefore, flexible sensor array wearable device, medical treatment ＆ health,
The industrial fields such as consumer electronics show great application prospect.
Below in conjunction with a specific embodiment, the preparation to flexible sensor array illustrates：
The polydimethylsiloxanefilm film flexible substrate 3 that thickness is 160 μm is cleaned and dried, using ultraviolet stamping
Technology realizes the complex of high-resolution inverted pyramid pattern structure in flexible substrate 3, and the bottom surface of each centrum is 10 μm
× 10 μm of square, vertebral height are 7.06 μm, and centrum spacing is 20 μm.Pass through further according to the drawing of electrod-array 1 of design
Aerosol ink-jet printing technology prints nano silver conductive ink array electrode, obtains 50 μm of line width, 2 × 3 forks that thickness is 20 μm
Tooth electrod-array.Then, lid last layer designs the mask for meeting to require in advance on prong electrod-array, using ultrasonic atomizatio
Spraying technology forms one layer of flexible sensitive thin film on the prong array electrode exposed.After solidifying a period of time, using low pressure etc.
Ion processing encapsulation technology covers one layer of ultra-thin flexible nano coating with biocompatibility on surface, and then it is carried out
Sealing just prepares completion with assembling, the sensor array of one 2 × 3.
Technical scheme in above-mentioned the embodiment of the present application, at least has the following technical effect that or advantage：
Include the array electrode of at least one electrod-array by being set between flexible substrate and flexible sensitive layer, each
Electrod-array can gather pressure data, it is achieved thereby that gathering the technique effect of multipoint pressure data simultaneously, also, be based on
The three-dimensional cavernous structure of nano material can ensure that flexible sensor array has high sensitivity and signal to noise ratio, meanwhile, the application
Flexible sensor array it is simple in industrial production, conveniently, the preparation of high accuracy, high-volume, low cost can also be realized.
Particular embodiments described above, the purpose of the present invention, technical scheme and beneficial effect are carried out further in detail
Describe in detail it is bright, should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc., it should be included in the guarantor of the present invention
Within the scope of shield.
Claims (6)
1. a kind of flexible sensor array, it is characterised in that including flexible substrate, array electrode, flexible sensitive layer and protective layer；
The array electrode is arranged at the surface of the flexible substrate, wherein, the array electrode includes at least one electrode array
Row；
The flexible sensitive layer is provided with the surface of the array electrode；
The protective layer is arranged at the top of the flexible sensitive layer, and, the protective layer covers the flexible sensitive layer and institute
State flexible substrate；
Also include lead electrode, wherein, the flexible substrate includes array area and lead district：
The array electrode is arranged at the array area, and the lead electrode is arranged at the lead district, and, the lead electrode
It is arranged at the surface of the flexible substrate；
The flexible substrate has the first pattern by ultraviolet stamping；
The array electrode is printed in the surface of the flexible substrate by aerosol ink-jetting style；
The array electrode is by being arranged at the surface of the flexible substrate without glue flexible printed circuit board mode.
2. flexible sensor array as claimed in claim 1, it is characterised in that the protective layer covers the flexible sensitive layer
With the flexible substrate positioned at the array area.
3. flexible sensor array as claimed in claim 1, it is characterised in that the electrod-array is metal film electrode battle array
Row.
4. flexible sensor array as claimed in claim 1, it is characterised in that the flexible substrate is ethene-vinyl acetate
Copolymer, polyvinyl alcohol, dimethyl silicone polymer, PET, polymethyl methacrylate, polyimides and
One kind in polyethylene.
5. flexible sensor array as claimed in claim 1, it is characterised in that the material of the flexible sensitive layer is nanometer material
Material.
6. flexible sensor array as claimed in claim 1, it is characterised in that the material of the protective layer is with biofacies
The flexible high molecular material of capacitive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201510454274.2A CN105117052B (en) | 2015-07-29 | 2015-07-29 | A kind of flexible sensor array |
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|---|---|---|---|
| CN201510454274.2A CN105117052B (en) | 2015-07-29 | 2015-07-29 | A kind of flexible sensor array |
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| CN105117052A CN105117052A (en) | 2015-12-02 |
| CN105117052B true CN105117052B (en) | 2018-02-06 |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105482176A (en) * | 2016-01-28 | 2016-04-13 | 深圳市慧瑞电子材料有限公司 | Conductive rubber material for flexible sensor and preparation method and application of conductive rubber material |
| CN105946673A (en) * | 2016-06-07 | 2016-09-21 | 苏州能斯达电子科技有限公司 | Anti-theft automobile seat cushion and anti-theft automobile |
| CN106236015A (en) * | 2016-08-12 | 2016-12-21 | 苏州能斯达电子科技有限公司 | Flexible intelligent fabric sensor and manufacture method, intelligence mattress and monitoring system |
| CN108362404A (en) * | 2018-02-05 | 2018-08-03 | 上海康斐信息技术有限公司 | A kind of vapour-pressure type flexible sensor array and its baroceptor unit |
| CN108490031B (en) * | 2018-04-02 | 2024-03-01 | 中国工程物理研究院激光聚变研究中心 | Flexible gas sensor packaging structure and packaging method thereof |
| CN112205970A (en) * | 2019-07-10 | 2021-01-12 | 天津理工大学 | Array sensor and preparation method and application thereof |
| CN110840405A (en) * | 2019-11-26 | 2020-02-28 | 苏州大学 | Manufacturing method of flexible array sensor and pulse condition detection system based on flexible array sensor |
| CN111657862A (en) * | 2020-06-08 | 2020-09-15 | 浙江理工大学 | Washable integrated flexible fabric array sensor and method thereof and intelligent mattress |
| CN113433299A (en) * | 2021-06-18 | 2021-09-24 | 天津智柔科技有限公司 | Human body simulation device with pressure and temperature regulation and bioelectricity signal output |
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Inventor after: Xiong Zuoping Inventor after: Gu Wen Inventor before: Zhang Ting Inventor before: Xiong Zuoping Inventor before: Gu Wen |