CN110007473A - 一种多波长光学系统和一种激光退火装置 - Google Patents

一种多波长光学系统和一种激光退火装置 Download PDF

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Publication number
CN110007473A
CN110007473A CN201810666925.8A CN201810666925A CN110007473A CN 110007473 A CN110007473 A CN 110007473A CN 201810666925 A CN201810666925 A CN 201810666925A CN 110007473 A CN110007473 A CN 110007473A
Authority
CN
China
Prior art keywords
optical path
unit
regulated
path unit
focal plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810666925.8A
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English (en)
Chinese (zh)
Inventor
徐建旭
兰艳平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201810666925.8A priority Critical patent/CN110007473A/zh
Priority to TW108122425A priority patent/TW202001347A/zh
Priority to JP2020572844A priority patent/JP2021529437A/ja
Priority to KR1020217002698A priority patent/KR20210027397A/ko
Priority to PCT/CN2019/092965 priority patent/WO2020001467A1/zh
Publication of CN110007473A publication Critical patent/CN110007473A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Microscoopes, Condenser (AREA)
CN201810666925.8A 2018-06-26 2018-06-26 一种多波长光学系统和一种激光退火装置 Pending CN110007473A (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201810666925.8A CN110007473A (zh) 2018-06-26 2018-06-26 一种多波长光学系统和一种激光退火装置
TW108122425A TW202001347A (zh) 2018-06-26 2019-06-26 一種多波長光學系統和一種雷射退火裝置
JP2020572844A JP2021529437A (ja) 2018-06-26 2019-06-26 多波長光学系及びレーザアニール装置
KR1020217002698A KR20210027397A (ko) 2018-06-26 2019-06-26 다파장 광학 시스템 및 레이저 어닐링 장치
PCT/CN2019/092965 WO2020001467A1 (zh) 2018-06-26 2019-06-26 一种多波长光学系统和一种激光退火装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810666925.8A CN110007473A (zh) 2018-06-26 2018-06-26 一种多波长光学系统和一种激光退火装置

Publications (1)

Publication Number Publication Date
CN110007473A true CN110007473A (zh) 2019-07-12

Family

ID=67164806

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810666925.8A Pending CN110007473A (zh) 2018-06-26 2018-06-26 一种多波长光学系统和一种激光退火装置

Country Status (5)

Country Link
JP (1) JP2021529437A (ja)
KR (1) KR20210027397A (ja)
CN (1) CN110007473A (ja)
TW (1) TW202001347A (ja)
WO (1) WO2020001467A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112756775A (zh) * 2020-10-30 2021-05-07 苏州创鑫激光科技有限公司 一种激光加工方法、光学系统及激光加工设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005313195A (ja) * 2004-04-28 2005-11-10 Miyachi Technos Corp 二波長重畳型レーザ出射ユニット及びレーザ加工装置
JP2007027612A (ja) * 2005-07-21 2007-02-01 Sony Corp 照射装置および照射方法
JP2013055111A (ja) * 2011-09-01 2013-03-21 Phoeton Corp レーザ光合成装置、レーザアニール装置およびレーザアニール方法
CN105182523A (zh) * 2015-09-23 2015-12-23 北京大学 一种基于一阶贝塞尔光束的sted超分辨显微镜及调节方法
CN208506382U (zh) * 2018-06-26 2019-02-15 上海微电子装备（集团）股份有限公司 一种多波长光学系统和一种激光退火装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006040949A (ja) * 2004-07-22 2006-02-09 Advanced Lcd Technologies Development Center Co Ltd レーザー結晶化装置及びレーザー結晶化方法
KR20140020816A (ko) * 2011-06-15 2014-02-19 가부시끼가이샤 니혼 세이꼬쇼 레이저 처리 장치 및 레이저 처리 방법
JP6004932B2 (ja) * 2012-12-18 2016-10-12 住友重機械工業株式会社 レーザ装置
CN105108330A (zh) * 2015-08-20 2015-12-02 京东方科技集团股份有限公司 一种分束器、激光发生器及准分子激光退火设备
CN205982851U (zh) * 2016-08-26 2017-02-22 成都理想境界科技有限公司 一种多光束合束结构

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005313195A (ja) * 2004-04-28 2005-11-10 Miyachi Technos Corp 二波長重畳型レーザ出射ユニット及びレーザ加工装置
JP2007027612A (ja) * 2005-07-21 2007-02-01 Sony Corp 照射装置および照射方法
JP2013055111A (ja) * 2011-09-01 2013-03-21 Phoeton Corp レーザ光合成装置、レーザアニール装置およびレーザアニール方法
CN105182523A (zh) * 2015-09-23 2015-12-23 北京大学 一种基于一阶贝塞尔光束的sted超分辨显微镜及调节方法
CN208506382U (zh) * 2018-06-26 2019-02-15 上海微电子装备（集团）股份有限公司 一种多波长光学系统和一种激光退火装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112756775A (zh) * 2020-10-30 2021-05-07 苏州创鑫激光科技有限公司 一种激光加工方法、光学系统及激光加工设备

Also Published As

Publication number Publication date
JP2021529437A (ja) 2021-10-28
WO2020001467A1 (zh) 2020-01-02
TW202001347A (zh) 2020-01-01
KR20210027397A (ko) 2021-03-10

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