CN110007473A - A kind of multi-wavelength optical system and a kind of laser anneal device - Google Patents
A kind of multi-wavelength optical system and a kind of laser anneal device Download PDFInfo
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- CN110007473A CN110007473A CN201810666925.8A CN201810666925A CN110007473A CN 110007473 A CN110007473 A CN 110007473A CN 201810666925 A CN201810666925 A CN 201810666925A CN 110007473 A CN110007473 A CN 110007473A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 314
- 230000001105 regulatory effect Effects 0.000 claims abstract description 140
- 239000000463 material Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 9
- 230000005499 meniscus Effects 0.000 claims description 9
- 239000000571 coke Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 24
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- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
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Abstract
The invention discloses a kind of multi-wavelength optical system and a kind of laser anneal devices.This multi-wavelength optical system includes: standard optical path unit, at least one optical path unit, focal plane compensating unit and focusing unit to be regulated；A focal plane compensating unit is provided in the optical path of each optical path unit to be regulated；Standard optical path unit and the optical wavelength of optical path unit to be regulated are unequal；Each focal plane compensating unit makes the light beam of optical path unit to be regulated focus on the second focal plane after focusing unit for changing the optical path of correspondence optical path unit to be regulated；The light beam of standard optical path unit focuses on the first focal plane, the second focal plane and the confocal face of the first focal plane after focusing unit.Technical solution of the present invention, change the optical path of optical path unit to be regulated by focal plane compensating unit, it focuses focusing unit to the light beam of standard optical path unit and the confocal face of the light beam of optical path unit to be regulated, the design difficulty of focusing unit is reduced, to reduce the manufacturing cost of focusing unit.
Description
Technical field
The present embodiments relate to integrated circuit equipment manufacturing technical field more particularly to a kind of multi-wavelength optical system and
A kind of laser anneal device.
Background technique
Multi-wavelength close beam technology, be by multiple light sources output multiple and different wavelength light beam be combined into it is a branch of, close beam after
In order to guarantee the hot spot performance of focal plane, focusing unit needs to be compatible with multiple wavelength, makes achromat-design optical system.
It is generally different using a variety of refractive index to realize the compatible multiple wavelength of focusing unit in existing optical system
Material constitutes focusing unit.Specifically, Fig. 1 is the structural schematic diagram of existing multi-wavelength optical system.Referring to Fig. 1, the multi-wavelength
Optical system includes the light source of two wavelength, can be described as first light source 011 and second light source 021, the light that first light source 011 issues
Work stage is irradiated to by the first optics front lens group 012, the first bending reflecting mirror 013, light combination mirror 023 and focusing unit 03
040 surface；The light that second light source 021 issues shines by the second optics front lens group 022, light combination mirror 023 and focusing unit 03
It is mapped to the surface of work stage 040.Wherein, the light issued for the light and second light source 021 that issue first light source 011 passes through above-mentioned
After optical element, finally focused in the confocal face in the surface of work stage 040, it usually needs design focusing unit 03 uses different refractions
The combination of materials of rate forms, and the design difficulty so as to cause focusing unit 03 is larger, higher cost.
Summary of the invention
The present invention provides a kind of multi-wavelength optical system and a kind of laser anneal device, and the design that can reduce focusing unit is difficult
Degree, to reduce the manufacturing cost of focusing unit.
In a first aspect, the embodiment of the present invention proposes a kind of multi-wavelength optical system, which includes: standard
Optical path unit, at least one optical path unit, focal plane compensating unit and focusing unit to be regulated；
The focal plane compensating unit is provided in the optical path of each optical path unit to be regulated；
The optical wavelength of the standard optical path unit and the optical path unit to be regulated is unequal；
The light beam of the standard optical path unit focuses on the first focal plane after the focusing unit；
Each focal plane compensating unit makes described to be regulated for changing the optical path of the correspondence optical path unit to be regulated
The light beam of optical path unit focuses on first focal plane after the focusing unit.
Further, the focal plane compensating unit includes single focal plane compensation lens or focal plane compensation microscope group.
Further, the light beam wavelength of the standard optical path unit is first wave length, the light of the optical path unit to be regulated
When Shu Bochang is second wave length, the focal plane compensating unit includes single focal plane compensation lens.
Further, the light beam wavelength of the standard optical path unit is first threshold wave-length coverage, the optical path to be regulated
When the light beam wavelength of unit is second threshold wave-length coverage, the focal plane compensating unit includes focal plane compensation microscope group.
Further, when the second wave length is less than the first wave length, the single focal plane compensation lens are that convex-concave is saturating
Mirror；When the second wave length is greater than the first wave length, the single focal plane compensation lens are concave-convex lens.
Further, when the second threshold wave-length coverage is less than the first threshold wave-length coverage, the focal plane compensation
Microscope group is meniscus group；When the second threshold wave-length coverage is greater than the first threshold wave-length coverage, the focal plane compensation
Microscope group is concave-convex lens group.
Further, the standard optical path unit includes the standard sources being arranged successively along direction of beam propagation, standard light
Learn front lens group and standard bending reflecting mirror；
The normalized optical front lens group is used to adjust energy, angle and the hot spot ruler for the light beam that the standard sources issues
It is very little；
The standard bending reflecting mirror for changing the direction of propagation through the normalized optical front lens group light beam adjusted,
Light beam is set to be incident on the focusing unit.
Further, the optical path unit to be regulated include the light source to be regulated being arranged successively along direction of beam propagation, to
Adjust optics front lens group and light combination mirror；
The optics front lens group to be regulated is used to adjust energy, angle and the light for the light beam that the light source to be regulated issues
Spot size；
The light combination mirror is for the light beam of the standard optical path unit and the light beam of the optical path unit to be regulated to be combined into
It is a branch of；
The focusing unit is incident on by the light beam of the light combination mirror.
Further, light of the focal plane compensating unit between the optics front lens group to be regulated and the light combination mirror
Lu Zhong.
Further, the focusing unit includes focus lens group；
The focus lens group is used for the light beam of the light beam of the standard optical path unit and the optical path unit to be regulated
It focuses respectively.
Further, the focus lens group includes the identical eyeglass of multiple materials.
Further, the lens materials of the focus lens group are vitreous silica.
Further, the beam exit end of the focus lens group includes optical flat.
Second aspect, the embodiment of the present invention propose a kind of laser anneal device, the multi-wavelength light provided including first aspect
System；
Wherein, the standard optical path unit in the multi-wavelength optical system is with the optical path unit to be regulated for sending out
The unequal two beams laser of optical wavelength range out；The focal plane compensating unit for changing the optical path unit to be regulated light
The light beam of road, the light beam for making the optical path unit to be regulated and the standard optical path unit is total after the focusing unit respectively
Focal plane；
It further include work stage, the work stage is located at the confocal of the standard optical path unit and the optical path unit to be regulated
Face position.
The embodiment of the invention provides a kind of multi-wavelength optical system, including standard optical path unit, at least one is to be regulated
Optical path unit, focal plane compensating unit and focusing unit；Wherein, the optical wavelength of standard optical path unit and optical path unit to be regulated is not
Equal, the light beam of standard optical path unit focuses on the first focal plane after focusing unit；By in each optical path unit to be regulated
Optical path in be arranged focal plane compensating unit, focal plane compensating unit for changing corresponding optical path unit to be regulated optical path, make to
The light beam for adjusting optical path unit focuses on above-mentioned first focal plane after focusing unit.Therefore, it is compensated by setting focal plane single
Member, the light beam of the light beam for the making optical path unit to be regulated and standard optical path unit confocal face after focusing unit respectively.It avoids
Focusing unit is constituted with the confocal face of the light beam for realizing different wave length by the different material of design refractive indices in existing optical system
Caused focusing unit design difficulty is big, and the problem of higher cost, reduces the design difficulty of focusing unit, to reduce
The manufacturing cost of focusing unit.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to do one simply to introduce, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram of existing multi-wavelength optical system；
Fig. 2 is a kind of structural schematic diagram of multi-wavelength optical system provided in an embodiment of the present invention；
Fig. 3 is refractive index-wavelength relationship schematic diagram of vitreous silica；
When Fig. 4 is not set focal plane compensating unit, a kind of focusing principle schematic diagram of optical path unit to be regulated；
When Fig. 5 is setting focal plane compensating unit, a kind of focusing principle schematic diagram of optical path unit to be regulated；
Fig. 6 be in Fig. 4 optical path unit to be regulated in the disc of confusion distribution schematic diagram of the first focal plane；
Fig. 7 is disc of confusion distribution schematic diagram of the optical path unit to be regulated in Fig. 5 in the first focal plane；
Fig. 8 is the structural schematic diagram of another multi-wavelength optical system provided in an embodiment of the present invention；
Fig. 9 is the structural schematic diagram of another multi-wavelength optical system provided in an embodiment of the present invention；
When Figure 10 is not set focal plane compensating unit, the focusing principle schematic diagram of another optical path unit to be regulated；
When Figure 11 is setting focal plane compensating unit, the focusing principle schematic diagram of another optical path unit to be regulated；
Figure 12 be in Figure 11 optical path unit to be regulated in the disc of confusion distribution situation of the first focal plane；
Figure 13 is disc of confusion distribution situation of Fig. 9 Plays optical path unit in the first focal plane；
Figure 14 is a kind of structural schematic diagram of laser anneal device provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Fig. 2 is a kind of structural schematic diagram of multi-wavelength optical system provided in an embodiment of the present invention.Referring to Fig. 2, more waves
Long optical system includes: standard optical path unit 11, at least one optical path unit 12 to be regulated, focal plane compensating unit 141 and poly-
Burnt unit 13；A focal plane compensating unit 141 is provided in the optical path of each optical path unit to be regulated 12；Standard optical path unit
11 is unequal with the optical wavelength of optical path unit 12 to be regulated；The light beam of standard optical path unit 11 focuses on after focusing unit 13
First focal plane F11；Each focal plane compensating unit 141 makes light to be regulated for changing the optical path of correspondence optical path unit 12 to be regulated
The light beam of road unit 12 focuses on the first focal plane F11 after focusing unit 13.
Wherein, since standard optical path unit 11 and the wavelength of optical path unit 12 to be regulated are unequal, so that focusing unit 13
Under the same conditions, focusing unit 13 is incident on light beam therein to by standard optical path unit 11 to the material and radius of curvature of use
Refractive index it is different from the refractive index for being incident on light beam therein by optical path unit 12 to be regulated, to be gone out by focusing unit 13
The optics of the optical focal length of the light beam for the standard optical path unit 11 penetrated and the optical path unit to be regulated 12 being emitted by focusing unit 13
Focal length is different, i.e. two light beams are focused in different focal planes.The light beam of standard optical path unit 11 focuses on after focusing unit 13
First focal plane F11, is correspondingly formed normalized optical focal length, and the light beam of optical path unit 12 to be regulated focuses on after focusing unit 13
Focal plane to be regulated, is correspondingly formed optical focal length to be regulated, and focal plane compensating unit 141 is used to adjust the light of optical path unit 12 to be regulated
Beam makes its light beam after focusing unit 13, and the position of focusing surface is mobile (illustratively, along direction by position of focal plane to be regulated
Z1 is mobile) to the position of the first focal plane F11, i.e., focal plane compensating unit 141 is for compensation standard optical focal length and optics to be regulated
Focal length difference between focal length, the light beam of the light beam and optical path unit 12 to be regulated that make standard optical path unit 11 is by focusing unit
Confocal face after 13.
Illustratively, Fig. 3 is refractive index-wavelength relationship schematic diagram of vitreous silica.Horizontal axis represents wavelength X, and unit is to receive
Rice (nm), the longitudinal axis represent the refractive index n of vitreous silica.Referring to Fig. 3, according to material dispersion relation, the refractive index of vitreous silica with
It is incident on the increase of the wavelength of the light beam of vitreous silica and reduces, be directed to identical focusing unit as a result, i.e., in same curvature
Under the conditions of radius, the wavelength for being incident on the light beam of focusing unit is bigger, and focusing unit is to the refractive index for being incident on light beam therein
Smaller, the optical focal length of corresponding light beam is longer.Multi-wavelength optical system is set in the optical path unit of short wavelength based on this
Focal plane compensating unit is set, moves backward focusing surface (or " focus ") position, it can be achieved that short wavelength's optical path unit and long wavelength
The confocal face of optical path unit；Alternatively, focal plane compensating unit is arranged in the optical path unit of long wavelength, make focusing surface position to Forward
It moves, it can be achieved that long wavelength's optical path unit and the confocal face of short wavelength's optical path unit.
It should be noted that " backward ", " forward " here is opposite concept, it is for focusing surface and focusing unit
For relative position, rather than the restriction to spatial position.Wherein, the side by focusing surface directional focusing unit is represented " backward "
To " forward " represents the direction by focusing unit directional focusing face.
It should be noted that the quantity for showing optical path unit to be regulated merely exemplary in Fig. 2 is 1, but not to this
The restriction for the multi-wavelength optical system that inventive embodiments provide.In other embodiments, the quantity of optical path unit to be regulated can
It is arranged according to the actual demand of multi-wavelength optical system.
Illustratively, when Fig. 4 is not set focal plane compensating unit, a kind of focusing principle signal of optical path unit to be regulated
Figure.Referring to Fig. 4, when not set focal plane compensating unit, focus on after the light beam line focus unit 13 of optical path unit to be regulated wait adjust
The position focal plane F10 is saved, at this point, the position focal plane F10 to be regulated and the first position focal plane F11 of standard optical path unit be not in same position
It sets, therefore there are color difference.
Illustratively, when Fig. 5 is setting focal plane compensating unit, a kind of focusing principle schematic diagram of optical path unit to be regulated.
Referring to Fig. 5, when focal plane compensating unit 141 is arranged, the light beam of optical path unit to be regulated first passes through focal plane compensating unit 141, by
Focus on the first position focal plane F11 after over-focusing unit 13, the first position focal plane F11 relative to the position focal plane F10 to be regulated to
After move, i.e., focal plane F10 to be regulated is moved along far from the direction Z1 of focusing unit 13.Therefore, by the way that focal plane compensating unit is arranged
141, the position of the focusing surface of optical path unit to be regulated and the position of the focusing surface of standard optical path unit can be made in the first focal plane
The position F11, i.e. two optical path units are focused in same position, to eliminate color difference.In this way, avoid design focusing unit 13 include
The problem of focusing unit design difficulty is larger caused by the different material of refractive index and higher cost.
Illustratively, Fig. 6 is that in Fig. 4 optical path unit to be regulated is not set in the disc of confusion distribution schematic diagram of the first focal plane
When setting focal plane compensating unit 141, the disc of confusion distribution schematic diagram of the light beam of optical path unit to be regulated in the focusing surface of standard light beam.
The disc of confusion of optical axis position is represented referring to Fig. 6, P210, P212 represents the disc of confusion of marginal position, and P211 is represented in optical axis and side
The disc of confusion of the position of half among edge.Illustratively, Fig. 7 is disperse of the optical path unit to be regulated in Fig. 5 in the first focal plane
When spot distribution schematic diagram, i.e. setting focal plane compensating unit 141, the focusing surface of the light beam of optical path unit to be regulated in standard light beam
Disc of confusion distribution schematic diagram.The disc of confusion of optical axis position is represented referring to Fig. 7, P220, P222 represents the disperse of marginal position
Spot, P221 represent the disc of confusion of the position of half among optical axis and edge.Focal plane compensating unit is arranged in comparison diagram 6 and Fig. 7
After 141, the convergence degree of the disc of confusion of three positions enhances, and since disc of confusion more converges, represents this plane and light to be regulated
The distance between the focusing surface of road unit is smaller, i.e. the focusing surface of standard optical path unit and the focusing surface of optical path unit to be regulated becomes
In confocal face, thus, by the way that focal plane compensating unit is arranged, eliminated under the premise of not carrying out highly difficult design to focusing unit
Color difference.
Optionally, optical path to be regulated can be multiple, and illustratively, Fig. 8 is that another kind provided in an embodiment of the present invention is more
The structural schematic diagram of wavelength optical system.Referring to Fig. 8, multi-wavelength optical system includes that standard optical path unit 11 and 2 is to be regulated
Optical path unit 12 is provided with a focal plane compensating unit 141 in the optical path of each optical path unit 12 to be regulated, so as to make 2
After the light beam of a optical path unit to be regulated 12 and the light beam line focus unit 13 of standard optical path unit 11, in the first focal plane F11
The confocal face in position focuses.
It should be noted that if multi-wavelength optical system includes multiple optical path units to be regulated, multiple optical path lists to be regulated
The wavelength of the light beam of member can be identical, can also be different, and the embodiment of the present invention is not construed as limiting this.
It it should be noted that the quantity for showing optical path unit to be regulated merely exemplary in Fig. 8 is 2, but is not pair
The restriction of multi-wavelength optical system provided in an embodiment of the present invention.It in other embodiments, can be according to multi-wavelength optical system
Actual demand the number of optical path unit to be regulated is set, the embodiment of the present invention is not construed as limiting this.In addition, standard optical path unit
It is that in contrast, i.e., in multi-wavelength system, the focusing surface of one of optical path unit can be selected with optical path unit to be regulated
For the first focal plane, i.e., using this optical path unit as standard optical path unit；By the way that focal plane is arranged in the optical path of other optical path units
Compensating element, makes the focusing surface of other optical path units be adjusted to the first focal plane to adjust the focusing surface of other optical path units
Position realize the confocal face of multi-wavelength system to realize the confocal face of multiple optical path units.
Optionally, with continued reference to Fig. 3 or Fig. 8, standard optical path unit 11 includes the mark being arranged successively along direction of beam propagation
Quasi-optical source 111, normalized optical front lens group 112 and standard bending reflecting mirror 113；Normalized optical front lens group 112 is for adjusting standard
Energy, angle and the spot size for the light beam that light source 111 issues；Standard bending reflecting mirror 113 is for changing through normalized optical
The direction of propagation of the light beam adjusted of front lens group 112, makes light beam be incident on focusing unit 13.
Wherein, normalized optical front lens group 112 may include the optical elements such as collimating mirror, beam expanding lens and even light unit.
It should be noted that the 1 standard optical path unit 11 that shows merely exemplary in Fig. 3 or Fig. 8 includes 1 standard light
Front lens group 112 and 1 standard bending reflecting mirror 113 is learned, but not to multi-wavelength optical system provided in an embodiment of the present invention
It limits.In other embodiments, demand can be arranged according to the practical optical path of multi-wavelength optical system and optics front lens group is set
112 and standard bending reflecting mirror 113 quantity.
Optionally, with continued reference to Fig. 3 or Fig. 8, optical path unit 12 to be regulated includes being arranged successively along direction of beam propagation
Light source 121, optics front lens group 122 to be regulated and light combination mirror 123 to be regulated；Optics front lens group 122 to be regulated is for adjusting wait adjust
Save energy, angle and the spot size of the light beam that light source 121 issues；Light combination mirror 123 is used for the light of standard optical path unit 11
The light beam of beam and optical path unit 12 to be regulated is combined into a branch of；Focusing unit 13 is incident on by the light beam of light combination mirror 123.
Wherein, optics front lens group 122 to be regulated may include the optical elements such as collimating mirror, beam expanding lens and even light unit.
It should be noted that merely exemplary in Fig. 3 or Fig. 8 show 1 optics front lens group 122 to be regulated, but not
Restriction to multi-wavelength optical system provided in an embodiment of the present invention.It in other embodiments, can be according to multi-wavelength optical
The quantity of optics front lens group 122 to be regulated is arranged in the practical optical path setting demand of system.
Optionally, with continued reference to Fig. 3 or Fig. 8, focal plane compensating unit 141 is located at optics front lens group 122 to be regulated and closes beam
In optical path between mirror 123.
So set, can be by angle, energy and spot size through optics front lens group 122 to be regulated light beam adjusted
The light beam for meeting multi-wavelength optical system requirements is incident on focal plane compensating unit 141, carries out optics by focal plane compensating unit 141
The compensation of focal length, without will affect other optical parameters, to simplify optical path and simplify optical path unit to be regulated
The adjustment process of focusing surface.
It should be noted that in other embodiments, can also be arranged according to the actual demand of multi-wavelength optical system
Other positions of the focal plane compensating unit 141 between light source 121 to be regulated and light combination mirror 123.
Optionally, standard sources 111 is used to issue the light beam that wavelength is first wave length, and light source 121 to be regulated is for issuing
Wavelength is the light beam of second wave length, and focal plane compensating unit 141 includes that single focal plane compensates lens.
Wherein, first wave length and second wave length are unequal.
Illustratively, first wave length 808nm, second wave length 527nm.Focal plane compensation lens are for adjusting 527nm's
Optical path, make its after focusing unit 13 with the confocal face of the light beam of 808nm.This exemplary only explanation, and it is non-limiting.
Optionally, standard sources is used to issue the light beam that wavelength is first threshold wave-length coverage；Light source to be regulated is for sending out
Wavelength is the light beam of second threshold wave-length coverage out；Focal plane compensating unit includes the focal plane compensation microscope group being made of multiple lens.
Wherein, first threshold wave-length coverage and second threshold wave-length coverage are unequal.
Illustratively, first threshold wave-length coverage is 300nm-500nm, and second threshold wave-length coverage is 500nm-800nm.
Focal plane compensation microscope group is used to adjust the optical path of 500nm-800nm wave-length coverage, make its after focusing unit 13 with 300nm-
The confocal face of the light beam of 500nm wave-length coverage.This exemplary only explanation, and it is non-limiting.
Optionally, with continued reference to Fig. 4 or Fig. 5, focusing unit 13 includes focus lens group；Focus lens group is used for standard
The light beam of optical path unit and the light beam of optical path unit to be regulated focus respectively.Realization standard optical path unit and optical path unit to be regulated
Confocal face.
Optionally, focus lens group includes the identical eyeglass of multiple materials.
Illustratively, focus lens group may include the first focusing lens 151, second being arranged successively along paths direction
Focusing lens 152, tertiary focusing eyeglass 153, the 4th focusing lens 154 and the 5th focusing lens 155.To realize to standard
The light beam of optical path unit and the light beam of optical path unit to be regulated focus respectively, and confocal face.
Using the identical eyeglass of material, can avoid due to the refractive index difference bring design difficulty increase of lens materials
Problem, therefore the design difficulty of focusing unit can be simplified, to simplify its manufacture craft.
Optionally, the lens materials of focus lens group are vitreous silica.
The eyeglass of focus lens group, technology maturation and cost is relatively low are formed using vitreous silica.
Optionally, the beam exit end of focus lens group includes optical flat.
Illustratively, the 5th focusing lens 155 are optical flat, on the one hand can protect the eyeglass of focusing unit 13, make it
From pollution；On the other hand, it if the 5th focusing lens 155 occur polluting or damage, maintains easily or replaces, and relative to depositing
For the eyeglass of concave-convex design, cost is relatively low.
Optionally, the light beam of optical path unit to be regulated and standard optical path unit be single wavelength light beam in the case where,
When the light beam wavelength of optical path unit to be regulated is less than the light beam wavelength of standard optical path unit, focal plane compensating unit is meniscus；
When the light beam wavelength of optical path unit to be regulated is greater than the light beam wavelength of standard optical path unit, focal plane compensating unit is concave-convex lens.
Wherein, meniscus realizes optical path to be regulated for moving backward the focusing surface position of optical path unit to be regulated
The focusing surface of unit (short wavelength) and the focusing surface of standard optical path unit (long wavelength) are in same position.
Illustratively, referring to Fig. 3, the focusing surface position of optical path unit 12 to be regulated is along the direction Z1 far from focusing unit 13
It is mobile, to realize confocal face with standard optical path unit 11.
Illustratively, table 1 is the lens parameters table of meniscus and focusing unit in Fig. 5.
The lens parameters table of meniscus and focusing unit in 1 Fig. 5 of table
| Surface | Radius (mm) | Thickness (mm) | Refractive index | Effective aperture (mm) |
| The face Stop | - | 50.00 | 1.00 | 60.00 |
| 141 front surfaces | 108.03 | 12.40 | 1.56 | 62.30 |
| 141 rear surfaces | 100.45 | 303.38 | 1.00 | 60.30 |
| 151 front surfaces | 486.97 | 15.00 | 1.56 | 78.92 |
| 151 rear surfaces | -740.00 | 3.00 | 1.00 | 78.70 |
| 152 front surfaces | 153.20 | 15.00 | 1.56 | 78.02 |
| 152 rear surfaces | 1213.96 | 3.00 | 1.00 | 75.76 |
| 153 front surfaces | 85.04 | 15.25 | 1.56 | 72.75 |
| 153 rear surfaces | 199.17 | 3.00 | 1.00 | 67.93 |
| 154 front surfaces | 48.82 | 19.87 | 1.56 | 61.86 |
| 154 rear surfaces | 79.47 | 10.00 | 1.00 | 54.70 |
| 155 front surfaces | - | 6.35 | 1.56 | 45.37 |
| 155 rear surfaces | - | 40.00 | 1.00 | 41.51 |
| The face image | - | 0.00 | 1.00 | 4.30 |
Wherein, front surface represents the surface of light incidence, and back face represents the surface of beam projecting.
The face Stop refers to diaphragm face, and the face image refers to image planes (or optimal focal plane).Radius refers to the radius of curvature on surface,
Refractive index refers to this surface rear (from the point of view of the light direction of propagation, a Fang Weiqian of light incidence, a Fang Weihou of outgoing)
Medium refractive index, illustratively, the refractive index of air is 1, the refractive index of the lens materials of focusing unit and meniscus
It is 1.56.Thickness refer to this surface and next surface (along the light direction of propagation, after light is emitted by this surface, close to
Incident surface) intermediate medium thickness, wherein lens thickness refers to the center mechanical thickness of eyeglass, between eyeglass
Thickness refers to airspace.Effective aperture refers to the diameter on this surface.
Illustratively, correspond to lens parameters shown in table 1, in the optical path unit to be regulated that the first position of focal plane obtains
Disc of confusion distribution situation as shown in fig. 7, corresponding, disc of confusion distribution situation such as Fig. 6 of not set focal plane compensating unit
It is shown.Wherein, the focus level of disc of confusion can be indicated that root-mean-square value RMS is smaller by root-mean-square value RMS, indicate that disc of confusion more converges
Poly-, the color difference of multi-wavelength optical system is smaller.
Illustratively, table 2 is the distribution parameter table of disc of confusion in Fig. 6 and Fig. 7.
The distribution parameter table of disc of confusion in table 2 Fig. 6 and Fig. 7
| Position | RMS value |
| P210 | 0.458000 |
| P211 | 0.464930 |
| P212 | 0.487834 |
| P220 | 0.002777 |
| P221 | 0.002303 |
| P222 | 0.003347 |
Wherein, each numerical value represents the corresponding root-mean-square value RMS of each position.
It can be seen that by the root-mean-square value RMS comparison in table 2, after focal plane compensating unit is set, three different locations (including light
Shaft position P210, P220；Marginal position P211, P221；Position P212, P222 of half among optical axis and edge) disc of confusion
Root-mean-square value RMS reduce, i.e. the convergence degree of disc of confusion increases, i.e., optical path unit to be regulated is in the position of the first focal plane
It focuses, therefore makes optical path unit to be regulated and the confocal face of standard optical path unit, eliminate the color difference of multi-wavelength optical system.
Wherein, concave-convex lens is used to move forward the focusing surface position of optical path unit to be regulated, realizes optical path to be regulated
The focusing surface of unit (long wavelength) and the focusing surface of standard optical path unit (short wavelength) are in same position.
Illustratively, Fig. 9 is the structural schematic diagram of another multi-wavelength optical system provided in an embodiment of the present invention.Reference
The focusing surface position of Fig. 9, optical path unit 12 to be regulated are moved along the direction Z2 close to focusing unit 13, thus with standard optical path list
Member 11 realizes confocal face (position in confocal face is shown with F11).
Illustratively, when Figure 10 is not set focal plane compensating unit, the focusing principle of another optical path unit to be regulated shows
It is intended to.Referring to Fig.1 0, when not set focal plane compensating unit, focused on after the light beam line focus unit 13 of optical path unit to be regulated to
The position focal plane F10 is adjusted, at this point, the first position of focal plane F11 of the position focal plane F10 to be regulated and standard optical path unit is not same
Position, therefore there are color difference.
Illustratively, when Figure 11 is setting focal plane compensating unit, the focusing principle signal of another optical path unit to be regulated
Figure.Referring to Fig.1 1, when focal plane compensating unit (concave-convex lens 142) is arranged, the light beam of optical path unit to be regulated first passes through focal plane benefit
Unit 142 is repaid, by the first position focal plane F11 is focused on after over-focusing unit 13, the first position focal plane F11 is relative to be regulated
The position focal plane F20 moves backward, i.e., moves along the direction Z2 close to focusing unit 13.At this point, passing through setting focal plane compensating unit
142, the focusing surface of the focusing surface and standard optical path unit that can make optical path unit to be regulated is all in the first position focal plane F21, i.e., and two
Optical path unit is focused in same position, to eliminate color difference.In this way, avoiding design focusing unit 13 includes that refractive index is different
The problem of focusing unit design difficulty is larger caused by material and higher cost.
Illustratively, table 3 is the lens parameters table of concave-convex lens and focusing unit in Figure 11.
The lens parameters table of concave-convex lens and focusing unit in 3 Figure 11 of table
| Surface | Radius (mm) | Thickness (mm) | Refractive index | Effective aperture (mm) |
| The face Stop | - | 50.00 | 1.00 | 60.00 |
| 142 front surfaces | -216.19 | 18.00 | 1.56 | 61.95 |
| 142 rear surfaces | -206.978 | 297.78 | 1.00 | 64.05 |
| 161 front surfaces | 579.65 | 18.00 | 1.56 | 76.78 |
| 161 rear surfaces | -559.85 | 1.35 | 1.00 | 76.52 |
| 162 front surfaces | 145.39 | 15.23 | 1.56 | 75.85 |
| 162 rear surfaces | 815.53 | 2.86 | 1.00 | 73.57 |
| 163 front surfaces | 84.41 | 15.51 | 1.56 | 70.73 |
| 163 rear surfaces | 191.86 | 3.19 | 1.00 | 65.89 |
| 164 front surfaces | 47.81 | 18.00 | 1.56 | 60.22 |
| 164 rear surfaces | 78.29 | 10.00 | 1.00 | 52.73 |
| 165 front surfaces | - | 6.35 | 1.56 | 43.68 |
| 165 rear surfaces | - | 40.00 | 1.00 | 39.92 |
| The face image | - | 0.00 | 1.00 | 3.80 |
The physical significance of each parameter can refer in table 3 illustrates to understand to table 1, and details are not described herein.
Illustratively, correspond to lens parameters shown in table 3, Figure 12 is that optical path unit to be regulated is burnt first in Figure 11
The disc of confusion distribution situation in face.2, P320 represents the disc of confusion of optical axis position referring to Fig.1, and P322 represents the disperse of marginal position
Spot, P321 represent the disc of confusion of the position of half among optical axis and edge.Illustratively, Figure 13 is Fig. 9 Plays optical path list
Disc of confusion distribution situation of the member in the first focal plane.3, P410 represents the disc of confusion of optical axis position referring to Fig.1, and P412 represents margin location
The disc of confusion set, P411 represent the disc of confusion of the position of half among optical axis and edge.
Illustratively, table 4 is the distribution parameter table of disc of confusion in Figure 12 and Figure 13.
The distribution parameter table of disc of confusion in table 4 Figure 12 and Figure 13
Wherein, each numerical value represents the corresponding root-mean-square value RMS of each position.
It can be seen that by the root-mean-square value RMS of each position in table 4, the root-mean-square value RMS of the disc of confusion of variant position
It is smaller that (can use the range of root-mean-square value RMS in table 1 is 0.458-0.488 as root-mean-square value in existing optical system
The reference value of RMS), i.e. the convergence degree of disc of confusion is larger, i.e., the light beam and standard optical path unit of optical path unit to be regulated
The confocal face of light beam focus, eliminate the color difference of multi-wavelength optical system.
It should be noted that the parameters numerical value in table 1,2 table 3 of table and table 4 is only to the exemplary of lens parameters
Illustrate, and it is non-limiting.
Optionally, the light beam of optical path unit to be regulated and standard optical path unit be threshold wave-length light beam in the case where,
When the light beam wavelength of optical path unit to be regulated is less than the light beam wavelength of standard optical path unit, focal plane compensating unit is meniscus
Group；When the light beam wavelength of optical path unit to be regulated is greater than the light beam wavelength of standard optical path unit, focal plane compensating unit is concave-convex saturating
Microscope group.
Wherein, it is adjusted by light beam of the lens group to each wavelength within the scope of the threshold wave-length of optical path unit to be regulated
Section, makes the light beam of each wavelength focus on the position with the confocal face of the first focal plane, to realize broadband confocal face optics
System.
The embodiment of the invention also provides a kind of laser anneal devices, and illustratively, Figure 14 is that the embodiment of the present invention provides
A kind of laser anneal device structural schematic diagram.Referring to Fig.1 4, which includes what above embodiment provided
Multi-wavelength optical system, wherein the standard optical path unit 11 in multi-wavelength optical system is with optical path unit 12 to be regulated for issuing
The unequal two beams laser of optical wavelength range；Focal plane compensating unit 141 for changing optical path unit 12 to be regulated optical path, make to
Adjust the light beam of optical path unit 12 and the light beam confocal face after focusing unit respectively of standard optical path unit 11；It further include workpiece
Platform 040, work stage 040 are located at the total position of focal plane of standard optical path unit Yu optical path unit to be regulated.So set, using more
It is burnt that wavelength optical system realizes that the laser beam of different wave length is copolymerized, so that the energy for improving the laser beam on work stage surface is close
Degree improves annealing efficiency.
Laser anneal device provided in an embodiment of the present invention also has the effect of technology possessed by above-mentioned multi-wavelength optical system
Fruit, details are not described herein.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention
It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also
It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (14)
1. a kind of multi-wavelength optical system characterized by comprising standard optical path unit, at least one optical path unit to be regulated,
Focal plane compensating unit and focusing unit；
The focal plane compensating unit is provided in the optical path of each optical path unit to be regulated；
The optical wavelength of the standard optical path unit and the optical path unit to be regulated is unequal；
The light beam of the standard optical path unit focuses on the first focal plane after the focusing unit；
Each focal plane compensating unit makes the optical path to be regulated for changing the optical path of the correspondence optical path unit to be regulated
The light beam of unit focuses on first focal plane after the focusing unit.
2. multi-wavelength optical system according to claim 1, which is characterized in that the focal plane compensating unit includes single burnt
Face compensates lens or focal plane compensates microscope group.
3. multi-wavelength optical system according to claim 2, which is characterized in that the light beam wavelength of the standard optical path unit
For first wave length, when the light beam wavelength of the optical path unit to be regulated is second wave length, the focal plane compensating unit includes single
Focal plane compensates lens.
4. multi-wavelength optical system according to claim 2, which is characterized in that the light beam wavelength of the standard optical path unit
For first threshold wave-length coverage, when the light beam wavelength of the optical path unit to be regulated is second threshold wave-length coverage, the focal plane
Compensating unit includes focal plane compensation microscope group.
5. multi-wavelength optical system according to claim 3, which is characterized in that the second wave length is less than the first wave
When long, the single focal plane compensation lens are meniscus；When the second wave length is greater than the first wave length, the single coke
It is concave-convex lens that face, which compensates lens,.
6. multi-wavelength optical system according to claim 4, which is characterized in that the second threshold wave-length coverage is less than institute
When stating first threshold wave-length coverage, the focal plane compensation microscope group is meniscus group；The second threshold wave-length coverage is greater than institute
When stating first threshold wave-length coverage, the focal plane compensation microscope group is concave-convex lens group.
7. multi-wavelength optical system according to claim 1, which is characterized in that the standard optical path unit includes along light beam
Standard sources, normalized optical front lens group and the standard bending reflecting mirror that the direction of propagation is arranged successively；
The normalized optical front lens group is used to adjust energy, angle and the spot size for the light beam that the standard sources issues；
The standard bending reflecting mirror makes light for changing the direction of propagation through the normalized optical front lens group light beam adjusted
Beam is incident on the focusing unit.
8. multi-wavelength optical system according to claim 7, which is characterized in that the optical path unit to be regulated includes along light
Light source to be regulated, optics front lens group to be regulated and the light combination mirror that the beam direction of propagation is arranged successively；
The optics front lens group to be regulated is used to adjust energy, angle and the hot spot ruler for the light beam that the light source to be regulated issues
It is very little；
The light combination mirror is a branch of for the light beam of the light beam of the standard optical path unit and the optical path unit to be regulated to be combined into；
The focusing unit is incident on by the light beam of the light combination mirror.
9. multi-wavelength optical system according to claim 8, which is characterized in that the focal plane compensating unit be located at it is described to
It adjusts in the optical path between optics front lens group and the light combination mirror.
10. multi-wavelength optical system according to claim 1, which is characterized in that the focusing unit includes condenser lens
Group；
The focus lens group is used to distinguish the light beam of the light beam of the standard optical path unit and the optical path unit to be regulated
It focuses.
11. multi-wavelength optical system according to claim 10, which is characterized in that the focus lens group includes multiple materials
Expect identical eyeglass.
12. multi-wavelength optical system according to claim 11, which is characterized in that the lens materials of the focus lens group
For vitreous silica.
13. multi-wavelength optical system according to claim 11, which is characterized in that the beam exit of the focus lens group
End includes optical flat.
14. a kind of laser anneal device, which is characterized in that including the described in any item multi-wavelength optical systems of claim 1-13
System；
Wherein, the standard optical path unit in the multi-wavelength optical system and the optical path unit to be regulated are for issuing light
The unequal two beams laser of wave-length coverage；The focal plane compensating unit makes for changing the optical path of the optical path unit to be regulated
The light beam of the light beam of the optical path unit to be regulated and the standard optical path unit confocal face after the focusing unit respectively；
It further include work stage, the work stage is located at the confocal face position of the standard optical path unit and the optical path unit to be regulated
It sets.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810666925.8A CN110007473A (en) | 2018-06-26 | 2018-06-26 | A kind of multi-wavelength optical system and a kind of laser anneal device |
| TW108122425A TW202001347A (en) | 2018-06-26 | 2019-06-26 | Multi-wavelength optical system and laser annealing device |
| JP2020572844A JP2021529437A (en) | 2018-06-26 | 2019-06-26 | Multi-wavelength optics and laser annealing equipment |
| KR1020217002698A KR20210027397A (en) | 2018-06-26 | 2019-06-26 | Multi-wavelength optical system and laser annealing device |
| PCT/CN2019/092965 WO2020001467A1 (en) | 2018-06-26 | 2019-06-26 | Multi-wavelength optical system and laser annealing device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810666925.8A CN110007473A (en) | 2018-06-26 | 2018-06-26 | A kind of multi-wavelength optical system and a kind of laser anneal device |
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| JP (1) | JP2021529437A (en) |
| KR (1) | KR20210027397A (en) |
| CN (1) | CN110007473A (en) |
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|---|---|---|---|---|
| CN112756775A (en) * | 2020-10-30 | 2021-05-07 | 苏州创鑫激光科技有限公司 | Laser processing method, optical system and laser processing equipment |
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| JP2006040949A (en) * | 2004-07-22 | 2006-02-09 | Advanced Lcd Technologies Development Center Co Ltd | Laser crystallization device and laser crystallization method |
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| JP6004932B2 (en) * | 2012-12-18 | 2016-10-12 | 住友重機械工業株式会社 | Laser equipment |
| CN105108330A (en) * | 2015-08-20 | 2015-12-02 | 京东方科技集团股份有限公司 | Beam splitter, laser generator and excimer laser annealing device |
| CN205982851U (en) * | 2016-08-26 | 2017-02-22 | 成都理想境界科技有限公司 | Multiple beam closes restraints structure |
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2018
- 2018-06-26 CN CN201810666925.8A patent/CN110007473A/en active Pending
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- 2019-06-26 JP JP2020572844A patent/JP2021529437A/en active Pending
- 2019-06-26 WO PCT/CN2019/092965 patent/WO2020001467A1/en active Application Filing
- 2019-06-26 KR KR1020217002698A patent/KR20210027397A/en not_active Application Discontinuation
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| JP2005313195A (en) * | 2004-04-28 | 2005-11-10 | Miyachi Technos Corp | Double wavelength superposing type laser beam emission unit, and laser beam machining apparatus |
| JP2007027612A (en) * | 2005-07-21 | 2007-02-01 | Sony Corp | Irradiation apparatus and irradiation method |
| JP2013055111A (en) * | 2011-09-01 | 2013-03-21 | Phoeton Corp | Laser beam synthesizer, laser annealing device, and laser annealing method |
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| CN112756775A (en) * | 2020-10-30 | 2021-05-07 | 苏州创鑫激光科技有限公司 | Laser processing method, optical system and laser processing equipment |
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| KR20210027397A (en) | 2021-03-10 |
| JP2021529437A (en) | 2021-10-28 |
| WO2020001467A1 (en) | 2020-01-02 |
| TW202001347A (en) | 2020-01-01 |
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