CN109972208A - Large size silicon-carbide monocrystalline plate cooling device - Google Patents
Large size silicon-carbide monocrystalline plate cooling device Download PDFInfo
- Publication number
- CN109972208A CN109972208A CN201910169685.5A CN201910169685A CN109972208A CN 109972208 A CN109972208 A CN 109972208A CN 201910169685 A CN201910169685 A CN 201910169685A CN 109972208 A CN109972208 A CN 109972208A
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- Prior art keywords
- cold air
- working chamber
- drive rod
- communicating pipe
- collet
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses large size silicon-carbide monocrystalline plate cooling devices, its structure includes fixing seat, working chamber, Cooling fixture, cold air input channel, working chamber is connected with fixing seat, Cooling fixture is equipped in working chamber, cold air input channel is communicated with working chamber, beneficial effects of the present invention: by being equipped with extension edge listrium on the port of one end that communicating pipe is connected with cold air connecting cavity, play the role of limit, communicating pipe separates with cold air connecting cavity during avoiding clamp region from sliding with drive rod, achieve the purpose that ensure that clamp region works normally, by setting up bite block on collet, cold air passes through communicating pipe, and cold air is lower than the height of bite block by the height of communicating pipe, therefore, it may be implemented while clamping monocrystalline plate, due to the effect of difference in height, reach and monocrystalline plate is jammed part cools down, it keeps away The influence that the complete clamping of conventional brace causes localized hyperthermia is exempted from, has solved the problems, such as that inhomogeneous cooling is even.
Description
Technical field
The present invention relates to semiconductor fields, particularly with regard to a kind of large size silicon-carbide monocrystalline plate cooling device.
Background technique
Silicon carbide is with originals such as quartz sand, petroleum coke (or coal tar), sawdusts (needing to add salt when production green silicon carbide)
Material is formed by resistance furnace pyrolytic semlting, and the process of preparation needs to utilize carbonization by shove charge, power supply, cooling, the processes such as come out of the stove
The crystal that silicon is prepared is with forbidden bandwidth is big, thermal conductivity is high, electronics saturation drift velocity is big, critical breakdown electric field is high, is situated between
The features such as electric constant is low, chemical stability is good, current large size silicon-carbide monocrystalline plate cooling device have the disadvantage that
It needs to cool down it after the completion of the preparation of single-crystal silicon carbide plate, traditional type of cooling uses the side of natural cooling
Method, cooling efficiency is slow, and existing improved plan is to be picked up the crystal using fixture, increases the contact surface between crystal and cold air
Product accelerates cooling rate to reach, but nipped part cooling velocity is much smaller than exposed part, causes inhomogeneous cooling
It is even, so that the local temperature of monocrystalline plate is higher.
Summary of the invention
In view of the deficiencies of the prior art, the present invention is to realize by the following technical solutions: large size silicon-carbide monocrystalline
Plate cooling device, structure include fixing seat, working chamber, Cooling fixture, cold air input channel, the working chamber and fixing seat
It is connected, Cooling fixture is equipped in the working chamber, the cold air input channel is communicated with working chamber, the cooling folder
Tool is mounted in two opposed inner walls of working chamber.
It is advanced optimized as of the invention, the Cooling fixture is by communicating pipe, clamp region, collet, U-shaped cavity, company
Column composition is connect, is communicated with clamp region the communicating pipe, the clamp region and collet machinery weld, the communicating pipe
Through U-shaped cavity, the communicating pipe is communicated by U-shaped cavity with working chamber, and the connecting column and U-shaped cavity outer wall machinery weld,
The clamp region is set to be set up relatively there are two and in symmetrical structure.
It is advanced optimized as of the invention, the clamp region is by movable block, cold air connecting cavity, drive rod, gear
It constitutes, there are two the drive rod is set, the drive rod is centrosymmetric structure, the gear and outer machine about gear
Tool power is connected, and is controlled by positive and negative rotation circuit, and the cold air connecting cavity is connected with collet, the collet and activity
Block mechanical connection, the movable block are mounted on the opposite two sides of U-shaped cavity in symmetrical structure, the movable block and U-shaped cavity
Clearance fit, the drive rod and movable block machinery weld, and the gear is located at U-shaped cavity center.
It is advanced optimized as of the invention, the collet is by annular seating, cold air efferent duct, fixed plate layer, bite block
It constitutes, the fixed plate layer is in isosceles trapezoidal structure, and there are three the annular seating is set, the annular seating is equidistantly embedded point
In cloth fixed plate layer, the bite block and annular seating machinery are welded, and the bite block is higher than annular seating, the bite block
Center is equipped with cold air efferent duct, and the cold air efferent duct is communicated through cold air efferent duct and with cold air connecting cavity.
It is advanced optimized as of the invention, the drive rod, which is of an L-shaped structure, to be set up, and the drive rod is close to gear
Side on be fixed with dentation fringe, and be meshed by dentation fringe with gear, reach and two collets are controlled by drive rod
The purpose of relative position.
It advanced optimizes as of the invention, is set on the port of one end that the communicating pipe is connected with cold air connecting cavity
There is extension edge listrium, communicating pipe separates with cold air connecting cavity during avoiding clamp region from sliding with drive rod, plays limit
Effect, ensure clamp region work normally.
Beneficial effect
Large size silicon-carbide monocrystalline plate cooling device of the present invention is completed when prepared by single-crystal silicon carbide plate, is inputted by cold air
Pipeline transporting cold-air into working chamber, under the action of outer mechanical force, two clamp regions are moved toward one another, and collet is transported in the same direction therewith
Dynamic, so that collet picks up monocrystalline plate, so that monocrystalline plate and cold air contact area increase, the cold air in working chamber passes through communicating pipe
It is transported on monocrystalline plate into cold air connecting cavity, and through cold air efferent duct, since cold air efferent duct is built up in bite block
Centre, and height is lower than the height of bite block, therefore may be implemented monocrystalline plate picking up increase itself and cold air contact area
Meanwhile by cold air efferent duct export cold air so that the temperature on the position that collet is connected with monocrystalline plate reduces, solve by
Fixture folder residence cooling effect difference causes the higher problem of local temperature.
Compared with prior art, the invention has the following advantages that
The present invention is played by being equipped with extension edge listrium on the port of one end that communicating pipe is connected with cold air connecting cavity
The effect of limit, communicating pipe separates with cold air connecting cavity during avoiding clamp region from sliding with drive rod, reaches guarantee folder
The purpose that hardened structure works normally；
The present invention on collet by setting up bite block, cold air by communicating pipe, and the height that cold air passes through communicating pipe
Lower than the height of bite block, it is thereby achieved that, due to the effect of difference in height, reaching list while clamping monocrystalline plate
Brilliant plate is jammed part and is cooled down, and avoids the influence that the complete clamping of conventional brace causes localized hyperthermia, solves cooling not
Uniform problem.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is the structural schematic diagram of large size silicon-carbide monocrystalline plate cooling device of the present invention.
Fig. 2 is the Cooling fixture sectional view of large size silicon-carbide monocrystalline plate cooling device of the present invention.
Fig. 3 is the Cooling fixture working condition sectional view of large size silicon-carbide monocrystalline plate cooling device of the present invention.
Fig. 4 is the Cooling fixture three-dimensional structure diagram of large size silicon-carbide monocrystalline plate cooling device of the present invention.
Fig. 5 is the enlarged drawing of A in this Fig. 2.
In figure: fixing seat -1, working chamber -2, Cooling fixture -3, cold air input channel -4, communicating pipe -301, clamp region -
302, collet -303, U-shaped cavity -304, connecting column -305, movable block -3021, cold air connecting cavity -3022, drive rod -3023, tooth
Take turns -3024, annular seating -3031, cold air efferent duct -3032, fixed plate layer -3033, bite block -3034.
Specific embodiment
To be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, below with reference to
Specific embodiment and Detailed description of the invention, the preferred embodiment that the present invention is further explained.
Embodiment
Please refer to Fig. 1-Fig. 5, the present invention provides large size silicon-carbide monocrystalline plate cooling device, structure include fixing seat 1,
Working chamber 2, Cooling fixture 3, cold air input channel 4, the working chamber 2 are connected with fixing seat 1, in the working chamber 2
Equipped with Cooling fixture 3, the cold air input channel 4 is communicated with working chamber 2, and the Cooling fixture 3 is mounted on 2 liang of working chamber
In a opposed inner walls.
The Cooling fixture 3 is by communicating pipe 301, clamp region 302, collet 303, U-shaped cavity 304,305 structure of connecting column
At the communicating pipe 301 communicates with clamp region 302, the clamp region 302 and the mechanical welding of collet 303, described
Run through U-shaped cavity 304 communicating pipe 301, is communicated by U-shaped cavity 304 with working chamber 2 communicating pipe 301, the connecting column
305 weld with 304 outer wall machinery of U-shaped cavity, and the clamp region 302 is set to be set up relatively there are two and in symmetrical structure.
The clamp region 302 is made of movable block 3021, cold air connecting cavity 3022, drive rod 3023, gear 3024,
There are two the drive rod 3023 is set, the drive rod 3023 is centrosymmetric structure about gear 3024, the tooth
Wheel 3024 is connected with outer mechanical force, and is controlled by positive and negative rotation circuit, and the cold air connecting cavity 3022 is connected with collet 303
It connects, the collet 303 and movable block 3021 are mechanically connected, and the movable block 3021 is mounted on U-shaped cavity 304 in symmetrical structure
On opposite two sides, the movable block 3021 and 304 clearance fit of U-shaped cavity, the drive rod 3023 and movable block 3021
Machinery welding, the gear 3024 are located at 304 center of U-shaped cavity, and drive rod 3023 is fixedly connected to make with movable block 3021
When obtaining the promotion movement of drive rod 3023 of gear 3024, movable block 3021 may be implemented out of U-shaped cavity 304 to extrapolated or inside
Promote, realize to monocrystalline plate clamp, unclamp between switching.
The collet 303 is made of annular seating 3031, cold air efferent duct 3032, fixed plate layer 3033, bite block 3034,
The fixed plate layer 3033 is in isosceles trapezoidal structure, there are three the annular seating 3031 is set, described annular seating 3031 etc.
Away from embedded distribution fixed plate layer 3033, the bite block 3034 and 3031 machinery of annular seating are welded, the bite block
3034 are higher than annular seating 3031, and 3034 center of bite block is equipped with cold air efferent duct 3032, the cold air efferent duct
3032 run through cold air efferent duct 3032 and communicate with cold air connecting cavity 3022, and the height of the cold air efferent duct 3032, which is lower than, stings
The height of block 3034 is closed, so that the cold air in cold air connecting cavity 3022 passes through cold when realizing that bite block 3034 clamps monocrystalline plate
Gas efferent duct 3032 is transported on monocrystalline plate, realizes that monocrystalline plate more comprehensively cools down.
The drive rod 3023, which is of an L-shaped structure, to be set up, and the drive rod 3023 is solid on the side of gear 3024
Surely it is equipped with dentation fringe, and is meshed by dentation fringe with gear 3024, reaches and two collets 303 is controlled by drive rod 3023
The purpose of relative position.
The port of one end that the communicating pipe 301 is connected with cold air connecting cavity 3022 is equipped with extension edge listrium, keeps away
Exempt to separate with cold air connecting cavity 3022 communicating pipe 301 during clamp region 302 is slided with drive rod 3023, plays limit
Effect ensures that clamp region 302 works normally.
Completed when prepared by single-crystal silicon carbide plate, by cold air input channel 4 into working chamber 2 transporting cold-air, it is mechanical outside
Under the action of power, two clamp regions 302 are moved toward one another, the movement in the same direction therewith of collet 303, so that collet 303 presss from both sides monocrystalline plate
It rises, so that monocrystalline plate and cold air contact area increase, the cold air in working chamber 2 enters cold air connecting cavity by communicating pipe 301
It in 3022, and is transported on monocrystalline plate by cold air efferent duct 3032, since cold air efferent duct 3032 is built up in bite block 3034
Center, and height is lower than the height of bite block 3034, therefore may be implemented that it is contacted with cold air monocrystalline plate is picked up increase
While area, cold air is exported by cold air efferent duct 3032, so that the temperature on the position that collet 303 is connected with monocrystalline plate
It reduces, solves the problems, such as that the local cooling effect difference being clamped causes local temperature higher.
Problems solved by the invention is that the preparation of single-crystal silicon carbide plate needs to cool down it after the completion, traditional type of cooling
Using the method for natural cooling, cooling efficiency is slow, and existing improved plan is to be picked up the crystal using fixture, increase crystal with
Contact area between cold air accelerates cooling rate to reach, but nipped part cooling velocity is much smaller than exposed
Part causes inhomogeneous cooling even, so that the local temperature of monocrystalline plate is higher, the present invention is combined with each other by above-mentioned component, leads to
It crosses and is equipped with extension edge listrium on the port of one end that communicating pipe 301 is connected with cold air connecting cavity 3022, play the work of limit
With communicating pipe 301 separates with cold air connecting cavity 3022 during avoiding clamp region 302 from sliding with drive rod 3023, reaches
Ensure the purpose that clamp region 302 works normally, by setting up bite block 3034 on collet 303, cold air passes through communicating pipe
301, and cold air is lower than the height of bite block 3034 by the height of communicating pipe 301, it is thereby achieved that being pressed from both sides by monocrystalline plate
While firmly, due to the effect of difference in height, reaches and monocrystalline plate is jammed part cools down, avoid conventional brace and press from both sides completely
The influence for causing localized hyperthermia is closed, solves the problems, such as that inhomogeneous cooling is even.
The basic principles, main features and advantages of the present invention have been shown and described above, the technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention can not only be realized in other specific forms under the premise of not departing from spirit of that invention or essential characteristic
The present invention will also have various changes and improvements, these changes and improvements both fall within scope of the claimed invention, therefore this hair
Bright claimed range is defined by appended claims and its equivalent, rather than above description limits.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (6)
1. large size silicon-carbide monocrystalline plate cooling device, structure includes fixing seat (1), working chamber (2), Cooling fixture (3), cold
Gas input channel (4), the working chamber (2) are connected with fixing seat (1), it is characterised in that:
Cooling fixture (3) are equipped in the working chamber (2), the cold air input channel (4) is communicated with working chamber (2), institute
The Cooling fixture (3) stated is mounted in (2) two opposed inner walls of working chamber.
2. large size silicon-carbide monocrystalline plate cooling device according to claim 1, it is characterised in that: the Cooling fixture
(3) it is made of communicating pipe (301), clamp region (302), collet (303), U-shaped cavity (304), connecting column (305), the company
Siphunculus (301) is communicated with clamp region (302), the clamp region (302) and collet (303) mechanical welding, the company
Siphunculus (301) runs through U-shaped cavity (304), and the communicating pipe (301) is communicated by U-shaped cavity (304) with working chamber (2), described
Connecting column (305) and U-shaped cavity (304) outer wall machinery weld, and the clamp region (302) sets there are two and is in symmetrical structure
It is opposite to set up.
3. large size silicon-carbide monocrystalline plate cooling device according to claim 2, it is characterised in that: the clamp region
(302) it is made of movable block (3021), cold air connecting cavity (3022), drive rod (3023), gear (3024), the drive rod
(3023) there are two setting, the drive rod (3023) is centrosymmetric structure about gear (3024), the cold air connection
Chamber (3022) is connected with collet (303), and the collet (303) and movable block (3021) are mechanically connected, the movable block
(3021) it is welded with U-shaped cavity (304) clearance fit, the drive rod (3023) and movable block (3021) machinery.
4. large size silicon-carbide monocrystalline plate cooling device according to claim 2, it is characterised in that: the collet
(303) it is made of annular seating (3031), cold air efferent duct (3032), fixed plate layer (3033), bite block (3034), described stings
Block (3034) and annular seating (3031) mechanical welding is closed, the bite block (3034) is higher than annular seating (3031), and described is cold
Gas efferent duct (3032) is communicated through cold air efferent duct (3032) and with cold air connecting cavity (3022).
5. large size silicon-carbide monocrystalline plate cooling device according to claim 3, it is characterised in that: the drive rod
(3023) it being of an L-shaped structure and sets up, the drive rod (3023) is fixed with dentation fringe on the side of gear (3024), and
And be meshed by dentation fringe with gear (3024), reach and controls two collet (303) relative positions by drive rod (3023)
Purpose.
6. large size silicon-carbide monocrystalline plate cooling device according to claim 2, it is characterised in that: the communicating pipe
(301) port of the one end being connected with cold air connecting cavity (3022) be equipped with extension edge listrium, avoid clamp region (302) with
Drive rod (3023) separates communicating pipe (301) during sliding with cold air connecting cavity (3022), plays the role of limit, ensures
Clamp region (302) works normally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910169685.5A CN109972208A (en) | 2019-03-06 | 2019-03-06 | Large size silicon-carbide monocrystalline plate cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910169685.5A CN109972208A (en) | 2019-03-06 | 2019-03-06 | Large size silicon-carbide monocrystalline plate cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109972208A true CN109972208A (en) | 2019-07-05 |
Family
ID=67078188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910169685.5A Withdrawn CN109972208A (en) | 2019-03-06 | 2019-03-06 | Large size silicon-carbide monocrystalline plate cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109972208A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1453843A (en) * | 2002-04-24 | 2003-11-05 | 华邦电子股份有限公司 | Wafer holding system |
| CN1768413A (en) * | 2003-03-28 | 2006-05-03 | 艾克塞利斯技术公司 | Gas-cooled clamp for rapid thermal processing |
| CN206488988U (en) * | 2017-03-02 | 2017-09-12 | 河北科技大学 | A kind of cryogenic mechanics performance test device |
| CN207682003U (en) * | 2018-01-10 | 2018-08-03 | 无锡工艺职业技术学院 | A kind of Machine Design fixture for processing with cooling function |
| CN208147221U (en) * | 2018-04-12 | 2018-11-27 | 扬州市职业大学 | A kind of welding robot |
| CN109230995A (en) * | 2018-10-18 | 2019-01-18 | 中冶赛迪工程技术股份有限公司 | Intelligent coil of strip fixture cooling system |
| CN208391514U (en) * | 2018-01-25 | 2019-01-18 | 天津玖龙聚鑫科技有限公司 | A kind of fixture unit |
-
2019
- 2019-03-06 CN CN201910169685.5A patent/CN109972208A/en not_active Withdrawn
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1453843A (en) * | 2002-04-24 | 2003-11-05 | 华邦电子股份有限公司 | Wafer holding system |
| CN1768413A (en) * | 2003-03-28 | 2006-05-03 | 艾克塞利斯技术公司 | Gas-cooled clamp for rapid thermal processing |
| CN206488988U (en) * | 2017-03-02 | 2017-09-12 | 河北科技大学 | A kind of cryogenic mechanics performance test device |
| CN207682003U (en) * | 2018-01-10 | 2018-08-03 | 无锡工艺职业技术学院 | A kind of Machine Design fixture for processing with cooling function |
| CN208391514U (en) * | 2018-01-25 | 2019-01-18 | 天津玖龙聚鑫科技有限公司 | A kind of fixture unit |
| CN208147221U (en) * | 2018-04-12 | 2018-11-27 | 扬州市职业大学 | A kind of welding robot |
| CN109230995A (en) * | 2018-10-18 | 2019-01-18 | 中冶赛迪工程技术股份有限公司 | Intelligent coil of strip fixture cooling system |
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