CN109963820A - The manufacturing device and manufacturing method of glass substrate - Google Patents
The manufacturing device and manufacturing method of glass substrate Download PDFInfo
- Publication number
- CN109963820A CN109963820A CN201780070959.4A CN201780070959A CN109963820A CN 109963820 A CN109963820 A CN 109963820A CN 201780070959 A CN201780070959 A CN 201780070959A CN 109963820 A CN109963820 A CN 109963820A
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- China
- Prior art keywords
- glass substrate
- air supply
- cabinet
- opening portion
- main surface
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- 239000011521 glass Substances 0.000 title claims abstract description 121
- 239000000758 substrate Substances 0.000 title claims abstract description 107
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 65
- 239000005357 flat glass Substances 0.000 claims description 42
- 238000004381 surface treatment Methods 0.000 claims description 35
- 238000009434 installation Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 17
- 238000011282 treatment Methods 0.000 claims description 7
- 230000000903 blocking effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 79
- 239000011148 porous material Substances 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 238000011369 optimal treatment Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 230000008676 import Effects 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000003280 down draw process Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Geochemistry & Mineralogy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The manufacturing device (10) of glass substrate (P) of the invention has glass substrate (P) along defined direction (X1) conveying device (11) conveyed and surface processing device (12).Surface processing device (12) has: cabinet (14)；The opening portion (17) of main surface (P1) side opening in cabinet (14)；It is installed in a manner of it can be dismantled relative to opening portion (17), and there are one or more air supply units (18) for the air supply opening (31) to main surface (P1) supply processing gas (Ga).Here, air supply unit (18) is mounted at multiple positions of the conveying direction (X1) along glass substrate (P) in opening portion (17).
Description
Technical field
The present invention relates to the manufacturing device of glass substrate and manufacturing methods, more particularly, to the plate for becoming glass substrate
One main surface of glass implements the device and method of the surface treatment based on processing gas.
Background technique
It is well known that about image display device in recent years, liquid crystal display (LCD), plasma display (PDP),
Flat-panel monitor (hereinafter referred merely to as FPD representated by Field Emission Display (FED), organic el display (OLED) etc..) become
Mainstream.Lighting is advanced for these FPD, therefore, for the glass substrate for FPD, the requirement to thin plate is also got higher.
Above-mentioned glass substrate is equal in the following way to be obtained: will be for example by plate glass representated by various glass tube down-drawings
The manufacturing process of glass and be configured to band-like plate glass (band-like glass sheet) and cut into defined size, by the plate after cutting
The width direction of glass (refers to the direction parallel and orthogonal with longitudinal direction with the table back side of band-like glass sheet.It is same as below.)
Both ends part is further cut off, and later, as needed, implements attrition process to each section.
However, the electrification of the electrostatic in the manufacturing process becomes problem sometimes when manufacturing this glass substrate.That is, making
There is the property for being very easy to electrification for the glass of insulator, uploaded in the manufacturing process of glass substrate, such as in mounting table
When setting glass substrate and implementing defined processing, sometimes due to contact of the glass substrate with mounting table removes and makes glass substrate band
Such case (is known as stripping charge sometimes by electricity.).Electric discharge is generated when the glass substrate of the object proximity band of electric conductivity electricity,
Due to the electric discharge, the broken of the electrode wires of the various elements of composition or electronic circuit that are formed on the surface of glass substrate may cause
Such case (is known as insulation breakdown or electrostatic breakdown sometimes by the breakage of damage or glass substrate itself.).In addition, with electricity
Glass substrate be easy to be pasted onto mounting table, the glass substrate is removed by brute-force, it is also possible to lead to the broken of glass substrate
Damage.This can become certainly shows therefore bad reason is the case where should avoiding as far as possible.
As the method for avoiding above situation, such as consider following method: by the back side of glass substrate (with load
Set the face of the side of the mounting face contact of platform) it supplies defined processing gas and the back side is implemented to be surface-treated, make the back side as a result,
It is roughened.There are the contact area of glass substrate and mounting table is bigger, therefore the tendency that carried charge when removing more increases is led to
Crossing makes roughened with the back side of the glass substrate of the mounting face contact of mounting table, expects that glass substrate and mounting table can be reduced
Contact area realizes that electrification when removing inhibits.In addition, the contact surface (back side) in view of glass substrate the smooth then easier to be viscous
It is affixed on even surface this point as mounting surface, as described above, making such as back and back side of glass substrate is roughened
The surface roughness in face is greater than the surface roughness of mounting surface, so as to make glass substrate be difficult to be pasted onto mounting surface, by
This, expects the breakage of glass substrate when can prevent removing.
Here, it as the structure for being able to carry out surface treatment as described above, such as describes in following patent documents 1
A kind of surface processing device, has: by glass substrate along the supply unit of defined direction conveying in the state of mounting；And
By the processing gas comprising hydrogen fluoride gas towards a main surface (side as the back side of the glass substrate on transport path
Main surface) supply and injector that the processing gas after supply is discharged to exhaust system.Here, on the injector, with fluorine
The first slit for changing hydrogen body tied to source is set to the conveying direction specified position of glass substrate, also, connect with carrier gas source
Second slit is set to the specified position of the above-mentioned conveying direction two sides of the first slit.In addition, the third being connect with exhaust system
Slit is set to the specified position that above-mentioned conveying direction two sides are more leaned on than the second slit.
Citation
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2014-80331 bulletin
Summary of the invention
Subject to be solved by the invention
Like this using processing gas to implement surface treatment, the result of surface treatment (treated table
Face quality) not only by the conveying speed of supply unit conveying glass substrate, substantially left and right, the type of gas also processed are supplied
Amount, supply position substantially control.Therefore, it when actually implementing above-mentioned surface treatment, needs according to as process object
Material, size, structure of manufacturing line of glass substrate etc. suitably set conveying speed, the kind of processing gas of glass substrate
Class, supply amount and supply position (being the position of the first slit and the second slit in patent document 1) etc..However, in patent document 1
In documented surface processing device, the first slit and the second slit for supplying processing gas are fixed on prespecified position
It sets, therefore, it is impossible to according to the type (material, thickness, conveying direction size etc.) of glass substrate come the supply of exception processes gas
Position.At this point, in the case where changing the glass substrate as manufacturing object, it is difficult to implement surface treatment best in quality.
In view of the above circumstances, the technical task that should be solved through the invention is, independent of the plate for becoming glass substrate
Implement surface treatment best in quality to the plate glass to the type of shape glass.
Solution for solving the problem
The manufacturing device of the solution glass substrate through the invention of the project is realized.That is, the manufacturing device is one
The manufacturing device of kind glass substrate, has: conveying device, and the plate glass that will become glass substrate is defeated along defined direction
It send；And surface processing device, processing gas and reality are supplied to a main surface of the plate glass conveyed by conveying device
Defined surface treatment is applied, the manufacturing device of the glass substrate is characterized in that surface processing device has: cabinet；Opening
Portion, the main surface side opening in cabinet；And one or more air supply units, one or more air supply units
It is installed, and had for the air supply opening to a main surface supply processing gas in a manner of it can be dismantled relative to opening portion,
Air supply unit can be mounted on multiple positions of the conveying direction along plate glass in opening portion.
In this way, in the present invention, can make with the main surface supply processing gas for the plate glass to conveying
The member unit of the air supply opening of body and the multiple positions for being installed on the conveying direction along plate glass.With this configuration,
The conveying direction position of air supply opening can be only easily adjusted by the installation site of change air supply unit.Therefore, even if
In the case where the type for needing to change conveyed plate glass, optimal treatment conditions also can be easily set, as a result, can
It is enough to implement surface treatment best in quality to plate glass.Alternatively, even same kind of plate glass, also there may come a time when root
Conveying speed is changed according to the structure of production status or the other parts of manufacturing line, but in this case, can also pass through change
The installation site of more air supply unit and easily set the supply conditions including the supply position comprising processing gas, can implement
Surface treatment best in quality.
In addition, in the present invention, being provided with opening portion in the cabinet of surface processing device, and be equipped in the opening portion
Therefore air supply unit for example can be configured at case comprising the major part including piping system by the air supply unit of above structure
The inner space of body.Thereby, it is possible to by the not enlarged degree to more than needs of surface processing device and group enters into manufacturing line.
In addition, can make the major part of box house becomes cavity, therefore, even if in the installation site for changing or having added air supply unit
In the case where, become problem without the interference worried with other components.
In addition, the manufacturing device of glass substrate of the invention is also possible to be also equipped with exhaust unit, the exhaust unit is with phase
The mode that can be dismantled for opening portion is installed, and for carrying out the exhaust of processing gas, exhaust unit can be mounted on opening portion
In multiple positions along conveying direction.
According to above structure, only by the installation site of change exhaust unit, thus even about the row of processing gas
Port can also be easily adjusted its conveying direction position.The position of exhaust outlet is to one in the same manner as the position of air supply opening
The factor that the flowing of processing gas in the facing space of a main surface impacts, therefore, by adjusting as described above
The position of exhaust outlet can set optimal treatment conditions.Therefore, processing gas can easily be reset to plate glass
Treatment conditions, can also implement surface treatment best in quality to plate glass as a result,.
In addition, the manufacturing device of glass substrate of the invention is also possible to be also equipped with dummy cell, the dummy cell is with phase
The mode that can be dismantled for opening portion is installed, for blocking opening portion, dummy cell can be mounted in opening portion along
Multiple positions of conveying direction.
According to above structure, one or more air supply units are installed in the opening portion of cabinet and are installed as needed
When having exhaust unit, the remainder of opening portion can be blocked using dummy cell.It is single thereby, it is possible to be easily adjusted gas supply
The installation site of member.In addition, opening portion can fully be blocked using dummy cell, therefore, even if taking in air supply unit etc.
In the case where arbitrary disposition, can not also hinder processing gas fluidly easily implement surface treatment best in quality.
In addition, air supply unit can be made common with size and easily replace air supply unit and dummy cell by carrying out blocking
Position.Therefore, it can promptly be recombinated.
In addition, the manufacturing device of glass substrate of the invention is also possible to air supply unit with gap forming face, supplying
Unit is installed in the state of opening portion, and defined gap is formed between the gap forming face and a main surface.It is being also equipped with
In the case where exhaust unit and dummy cell, about these exhaust units and dummy cell, it is possible to have gap forming face.
It, can be with the installation site of each unit by the way that gap forming face is arranged in each unit for being installed on opening portion like this
Independently, gap as defined in being formed between gap forming face and a main surface.Thereby, it is possible to be adjusted always to processing gas
Flowing size, the shape in gap that impact therefore can more steadily implement surface treatment best in quality.
In addition, the manufacturing device of glass substrate of the invention is also possible to air supply unit with roller, installed in air supply unit
In the state of opening portion, which supports a main surface of the plate glass conveyed by conveying device.It is being also equipped with
In the case where exhaust unit and dummy cell, about these exhaust units and dummy cell, it is possible to have to a main surface
The roller supported.
In this way, by the way that the roller supported to plate glass main surface is set to each unit, so as to incite somebody to action
These rollers as conveying device constituent element and group enters into surface processing device.Even if as a result, in plate glass along conveying
In the case that direction has biggish size, also can reliably it be supported to by the part of surface processing device, thus
Gap as defined in being formed between each unit.Therefore, surface treatment best in quality thus also can steadily be implemented.
It is installed on out in a manner of chimeric in addition, the manufacturing device of glass substrate of the invention is also possible to air supply unit
Oral area, it is as a result, that the inner space of cabinet is closed.In the case where being also equipped with exhaust unit and dummy cell, about these rows
Gas unit and dummy cell can also be installed on opening portion in a manner of chimeric, as a result, that the inner space of cabinet is closed.
With this configuration, even if using the structure for installing each unit in a manner of it can dismantle relative to opening portion
In the case of, it can be reliably closed by the inner space of cabinet.Thereby, it is possible to be avoided as much as hindering the processing gas in gap
The state of affairs of the flowing of body and steadily implement to be surface-treated.In addition, as described later, by the inner space of cabinet and exhaust unit
Be connected and in the case where constituting exhaust system, can be by ensuring required venting quality for the inner space of cabinet is closed
Energy.
In addition, the manufacturing device of glass substrate of the invention is also possible to be vented in the case where having exhaust unit
Unit is provided with first row port, and the first row port is by the inside in a space and cabinet between main surface and exhaust unit
Space is connected, and the inner space of cabinet is connected with the washer of processing gas.
It, can be with row by using the structure that the inner space of cabinet is connected with the washer of processing gas like this
The installation site of gas unit independently, constitutes the exhaust system of processing gas simplerly.In addition, in discharged gas
It also include not only extraneous gas (usually air) comprising processing gas, therefore, even if concentration is also than supplying comprising processing gas
The concentration at gas moment is low.Therefore, the inner space of cabinet can be formed in the case where less considering corrosion proof situation from exhaust
Exhaust system of the unit to washer.
In addition, the manufacturing device of glass substrate of the invention is also possible to the conveying direction of the plate glass in cabinet
Both ends are provided with second exhaust port, and the second exhaust port is empty by the inside in a space and cabinet between main surface and cabinet
Between be connected, the inner space of cabinet is connected with the washer of processing gas.
It is studied for the positional relationship of air supply opening and exhaust outlet, is using one or more as a result, having distinguished
A air supply opening is configured at the conveying direction center side of plate glass and two exhaust outlets are configured at the conveying direction two of plate glass
In the case where the structure of end, at the conveying direction whole region (place on the conveying direction of surface processing device of plate glass
Manage the whole region in region) form the flowing of uniform processing gas.Therefore, pass through the conveying side of the plate glass in cabinet
The second exhaust port that one space between main surface and cabinet is connected with the inner space of cabinet is set to both ends, it can
Outflow of the processing gas to outside device is prevented, while the flowing of good processing gas can be formed between plate glass.
Therefore these second outlets can will not replace (displacement of each unit) to section and make as the state for being fixed on cabinet
At influence.
In addition, the manufacturing device of glass substrate of the invention is also possible to air supply unit and is installed on the communicating pipe of cabinet
One end connection, the another side of communicating pipe via flexible pipe and be located at cabinet outside processing gas generation device connect
It connects.
It with this configuration, in general, can be in the state for securing the processing gas generation device being set near cabinet
Under, easily and rapidly cope with the position replacement of air supply unit.Therefore, it can enjoy and be completed in a short time the excellent of section replacement
Point.
In addition, the solution of the project is realized also by the manufacturing method of glass substrate of the invention.That is, the manufacturer
Method is a kind of manufacturing method of glass substrate, is had: defeated by conveying as the plate glass of glass substrate along defined direction
Send process；And implement at the defined surface being surface-treated to along a main surface of the plate glass that defined direction conveys
The manufacturing method of science and engineering sequence, the glass substrate is characterized in that surface treatment procedure to by surface processing device edge by advising
One main surface of the plate glass of fixed direction conveying supplies processing gas to carry out, and surface processing device has: cabinet；It opens
Oral area, the main surface side opening in cabinet；And one or more air supply units, one or more gas supply are single
Member is installed in a manner of it can dismantle relative to opening portion, and is had for the gas supply to a main surface supply processing gas
Mouthful, air supply unit can be mounted on multiple positions of the conveying direction along plate glass in opening portion.
Manufacturing method according to the invention, it is only single by change gas supply in the same manner as above-mentioned manufacturing device of the invention
The installation site of member can be easily adjusted the conveying direction position of air supply opening.Therefore, even if needing change to be conveyed
In the case where the type of plate glass, optimal treatment conditions also can be easily set, thereby, it is possible to implement to plate glass
Surface treatment best in quality.Alternatively, even same kind of plate glass, also there may come a time when according to production status or manufacture
The structure of the other parts of line and change conveying speed, but in this case, also can easily set comprising processing gas
Supply position including supply conditions, surface treatment best in quality can be implemented.
In addition, in the present invention, being provided with opening portion in the cabinet of surface processing device, and be equipped in the opening portion
Therefore air supply unit for example can be configured at case comprising the major part including piping system by the air supply unit of above structure
The inner space of body.Thereby, it is possible to by the not enlarged degree to more than needs of surface processing device and group enters into manufacturing line.
In addition, can make the major part of box house becomes cavity, therefore, even if in the installation site for changing or having added air supply unit
In the case where, the interference with other components will not become problem.
Invention effect
As previously discussed, in accordance with the invention it is possible to type independent of the plate glass for becoming glass substrate, to this
Plate glass implements surface treatment best in quality.
Detailed description of the invention
Fig. 1 is the cross-sectional view of the manufacturing device of the glass substrate of first embodiment of the invention.
Fig. 2 is the major part top view of surface processing device shown in FIG. 1.
Fig. 3 be after each unit of surface processing device shown in FIG. 1 is dismantled in the state of major part top view.
Fig. 4 is the major part A-A cross-sectional view of surface processing device shown in Fig. 2.
Fig. 5 is the cross-sectional view of the air supply unit shown in Fig. 2 from the direction of arrow B.
Fig. 6 is the C-C cross-sectional view of air supply unit shown in fig. 5.
Fig. 7 is the cross-sectional view of the exhaust unit shown in Fig. 2 from the direction of arrow D.
Fig. 8 is main for being illustrated to an example for the surface treatment for having used surface processing device shown in FIG. 1
Magnified partial view.
Fig. 9 is the cross-sectional view of the manufacturing device of the glass substrate of second embodiment of the present invention.
Specific embodiment
Hereinafter, referring to Fig.1~Fig. 8 is illustrated first embodiment of the invention.It should be noted that in this implementation
In mode, using the back to the glass substrate cut out from the band-like glass sheet after the forming as plate glass according to the size of regulation
Implement to be illustrated in case where surface treatment in face.
Fig. 1 shows an embodiment of the manufacturing device 10 of the glass substrate of first embodiment of the invention.The manufacture
Device 10 has: the conveying device 11 for conveying glass substrate P along defined direction X1；To what is conveyed by conveying device 11
A main surface P1 (being lower surface in Fig. 1) of glass substrate P implements the defined surface processing device 12 being surface-treated；And
Accommodate the treatment trough 13 of conveying device 11 and surface processing device 12.
Wherein, surface processing device 12 is used to supply processing gas Ga to a main surface P1 of glass substrate P and implement
Defined surface treatment, mainly has: cabinet 14；The head in the insert channel 15 of glass substrate P is formed between cabinet 14
16；It is formed in the opening portion 17 of the side (being in the present embodiment upside) towards insert channel 15 in cabinet 14；And
It is installed on the air supply unit 18 of opening portion 17.In the present embodiment, surface processing device 12 is also equipped with and air supply unit 18 1
Act the exhaust unit 19 and dummy cell 20a, 20b for being installed on opening portion 17.Hereinafter, each component is described in detail.
Cabinet 14 is in like that as shown in Figures 1 and 2 box-like, in the upside (side towards glass substrate P) of cabinet 14,
The substantially the entire area of the conveying direction X1 of glass substrate P is provided with opening portion 17.Here, opening portion 17 includes single with gas supply
The bottom 21 that member 18, exhaust unit 19 and dummy cell 20a, 20b are abutted；Width direction positioned at bottom 21 (refers to and glass
The conveying direction X1 of substrate P orthogonal direction.Hereinafter, identical in the present specification.) two sides sidewall portion 22；And it is set to
Bottom 21 and by exterior space 24 (exterior space for cabinet 14 and the place here of the inner space of cabinet 14 23 and cabinet 14
Manage the inner space of slot 13.), especially insert the connected intercommunicating pore 25 in the space of 15 side of channel.In the present embodiment, as schemed
Shown in 3, it is equipped the containment members such as O-ring 26 around intercommunicating pore 25, air supply unit 18, exhaust are placed on bottom 21
In the state of unit 19 and dummy cell 20a, 20b, become intercommunicating pore 25 blocked and the inner space 23 of cabinet 14 relative to
The state that exterior space 24 seals (referring to Fig. 4).
In addition, being equipped with exhaust outlet at the both ends conveying direction X1 of the glass substrate P of cabinet 14 forms component 27, in case
Body 14 and exhaust outlet form the exhaust outlet 28 that the slit-shaped extended in the width direction is formed between component 27 (referring to Fig. 2).It should
Exhaust outlet 28 via the intercommunicating pore 29 (referring to Fig.1) at the both ends conveying direction X1 for being set to cabinet 14 and with 23 phase of inner space
Even, it is able to carry out the exhaust using aftermentioned washer 30 (referring to Fig.1).
Then, the explanation of air supply unit 18, exhaust unit 19 and dummy cell 20a, 20b is carried out.
Air supply unit 18, exhaust unit 19 and dummy cell 20a, 20b are installed as the opening portion relative to cabinet 14 respectively
17 can dismantle.In the present embodiment, two air supply units, 18, exhaust units 19 and five dummy cells 20a, 20b
It is separately mounted to the defined position (referring to Fig.1) along conveying direction X1 of opening portion 17.If detailed description, from opening portion 17
Conveying direction X1 near upstream side rise successively be equipped with dummy cell 20b, air supply unit 18, dummy cell 20a, illusory list
First 20a, dummy cell 20a, air supply unit 18, exhaust unit 19, dummy cell 20a.Here, as shown in Fig. 2, each unit 18~
Conveying direction size C1~C3 (other than the dummy cell 20b near upstream side) of 20a is identical, also, width direction ruler
Very little W1~W3 is also identical.In this case, the conveying direction size L (ginseng of the cabinet 14 other than exhaust outlet forms component 27
According to Fig. 3) and it is installed on the air supply unit 18 of opening portion 17, the conveying direction size of exhaust unit 19 and dummy cell 20a, 20b
The summation (referring to Fig. 2) of C1~C3 is equal.In addition, the shape of 18~20a of each unit, 20b mutually to be abutted on conveying direction X1
State is installed on opening portion 17 (referring to Fig.1).Air supply unit 18, exhaust unit 19 and dummy cell 20a can be relative to opening as a result,
Appoint multiple positions (being seven positions other than near upstream side in illustrated example) along conveying direction X1 of oral area 17
The installation of meaning ground.
In addition, the distance T (ginseng being located between medial surface 22a, 22a of the sidewall portion 22 of the width direction two sides of opening portion 17
According to Fig. 3) equally be installed on the air supply unit 18 of opening portion 17, the width direction of exhaust unit 19 and dummy cell 20a, 20b
Size W1~W3 (referring to Fig. 2) is equal respectively.18~20a of each unit, 20b are in and being for example fitted by inlaying and install as a result,
State in opening portion 17 (referring to Fig. 2 and Fig. 4).By above mounting means, the inner space 23 of cabinet 14 is relative to outer
Portion space 24 is in closed state.
Wherein, as shown in Figures 1 and 5, air supply unit 18 has towards the insert channel 15 of glass substrate P opening and is used for
Towards glass substrate P a main surface P1 supply processing gas Ga air supply opening 31 and will be by processing gas generation device
The introduction part 33 that the processing gas Ga that 32 (referring to Fig.1) generated is imported to air supply opening 31.Such as shown in Fig. 2, air supply opening here,
31 are formed as shape of slit extended in the direction of the width, and introduction part 33 has the introduction channel 34 of regulation form, so that energy
It is enough equably to import processing gas Ga in the width direction whole region for being formed as the air supply opening 31 of shape of slit.Introduction part
The internally positioned space 23 of intercommunicating pore 25 that 33 a part passes through cabinet 14.
Fig. 6 shows a form of the introduction channel 34 of processing gas Ga.Introduction channel 34 shown in the figure is formed as from
32 side of process gases generation device branches into multistage form towards 31 side of air supply opening, and thereby, it is possible in the width side of air supply opening 31
Equably import processing gas Ga as far as possible into (Fig. 6 is left and right directions) whole region.In the present embodiment, there are two settings
Introduction channel 34, the end 34a in the side opposite with air supply opening 31 of each introduction channel 34 are connected with communicating pipe 35 (in Fig. 5
Shown with double dot dash line) one end.It should be noted that at this point, as shown in figure 5, O can also be arranged in the inner circumferential of end 34a
The containment members such as type circle 36.As shown in Figure 1, being only installed on communicating pipe 35 in the portion of the side opposite with opening portion 17 of cabinet 14
Divide the pipe mounting portion 37 of lower section in the multiple pipe mounting portions 37 (referring to Fig. 3) formed, positioned at air supply unit 18.In communicating pipe
35 other end is connected with processing gas generation device 32 via flexible pipe 38.In the pipe mounting portion for not installing communicating pipe 35
37 are equipped with lid 39.Thereby, it is possible to the installation sites with air supply unit 18 independently, in the place that fixed state is set
Air supply unit 18 is connected on process gases generation device 32.
As shown in fig. 7, the processing that there is exhaust unit 19 a main surface P1 for carrying out towards glass substrate P to supply
The exhaust outlet 40 of the exhaust of gas Ga.The exhaust outlet 40 is by a master of the exterior space 24 of cabinet 14, especially glass substrate P
Space between surface P1 and exhaust unit 19 is connected with the inner space 23 of cabinet 14, in the present embodiment, is formed as edge
The shape of slit that width direction extends (referring to Fig. 2).
In addition, the inner space 23 of cabinet 14 via the intercommunicating pore 41 for the lower part for being for example set to cabinet 14 and and washer
30 are connected (referring to Fig.1).As a result, towards the processing gas Ga of the main surface P1 supply of glass substrate P via exhaust unit
19 exhaust outlet 40 and the inner space 23 of cabinet 14 are washed the introducing of device 30.
In addition, in the present embodiment, the conveying direction other than the exhaust outlet 40 of exhaust unit 19, also in cabinet 14
Both ends are provided with exhaust outlet 28, which is connected (referring to Fig.1) with the inner space 23 of cabinet 14.It is logical in insert as a result,
The conveying direction both ends in road 15, processing gas Ga or extraneous gas are washed via the inner space 23 of exhaust outlet 28 and cabinet 14
Device 30 introduces.
Dummy cell 20a, 20b with will be installed on opening portion 17 air supply unit 18 and exhaust unit 19 gap filling and
Block the purpose installation of opening portion 17.Therefore, dummy cell 20a, 20b does not have for a main surface to glass substrate P
The space of the side P1 carries out the function of gas supply exhaust.
It should be noted that in the present embodiment, air supply unit 18, exhaust unit 19 and dummy cell 20a, 20b are equal
With as defined in being formed between a main surface P1 of glass substrate P in the state of being installed on opening portion 17 between gap 42
Gap forming face 43a~43c (referring to Fig. 8).At this point, the gap forming face 43a of air supply unit 18, which is used, to be made near air supply opening 31
Part is compared with surrounding part to insert this side of channel 15 form outstanding.In this case, main surface P1 with
The gap 42 of gap forming face 43a partially becomes minimum near air supply opening 31.
In addition, in the present embodiment, air supply unit 18, exhaust unit 19 and dummy cell 20a, 20b, which all have, to be pacified
Loaded on the branch supported in the state of opening portion 17, to a main surface P1 of the glass substrate P conveyed by conveying device 11
Runner 44a~44c.Glass substrate P by the backing roll 45 (referring to Fig.1) of conveying device 11 and is set to each unit on one side as a result,
18~20a, 20b backing roll 44a~44c support an edge as defined in direction X1 conveying.
In addition, in the present embodiment, air supply unit 18, exhaust unit 19 and dummy cell 20a, 20b all have heating
Device 46a~46c (referring to Fig. 8).As a result, in the state of being installed on opening portion 17, can adjust with the one of glass substrate P
The temperature of the processing gas Ga flowed in gap 42 between main surface P1.
It for the glass substrate P of the object as surface treatment, such as uses following glass substrate: passing through overflow down draw
Method well known to glass tube down-drawing representated by method or float glass process etc. will be shaped to band-like plate glass (band-like glass sheet) cutting established practice
After fixed longitudinal direction size, implements the attrition process on two sides or four edges as needed and obtain.In addition, about glass
The size of substrate P is not particularly restricted, but is for example greater than surface processing device 12 along the size expectation of the direction of conveying direction X1
Conveying direction size (the substantially conveying direction size L of cabinet 14).
According to surface processing device 12 using the above structure, such as the stream of following such processing gas Ga can be made
It is dynamic, and defined surface treatment is implemented to a main surface P1.That is, as shown in figure 8, being led in glass substrate P by conveying device 11
Enter in the state of the inside (insert channel 15) of surface processing device 12, is generated using processing gas generation device 32 defined
Processing gas Ga, such as the processing gas Ga that the carrier gas such as hydrogen fluoride gas and nitrogen are mixed.Then, by the processing gas
Ga is supplied via flexible pipe 38, communicating pipe 35 and introduction channel 34 from air supply opening 31 to the gap 42 between a main surface P1
It gives.Power is introduced in addition, acting on using washer 30 to the inner space of cabinet 14 23, is carried out via being connected with inner space 23
The exhaust of each exhaust outlet 28,40 (referring to Fig. 8) processing gas Ga of the supply to gap 42.The gas Ga processed of gap 42 as a result,
It is full of, and forms the defined flowing of processing gas Ga in gap 42.In addition, the conveying direction using configuration in gap 42
The exhaust outlet 28 (referring to Fig.1) at the both ends X1, prevents processing gas Ga to the outside in gap 42, i.e. surface processing device as much as possible
The leakage in 12 outside.It is of course also possible to arbitrary exhaust unit be arranged in treatment trough 13, to the inner space for the treatment of trough 13
Gas exhaust treatment as defined in implementing, to this illustration omitted.
In this way, one side sustainable supply processing gas Ga, imports glass substrate P to insert channel 15 on one side, as glass substrate P
After insert channel 15, the surface treatment that one main surface P1 is carried out is completed using processing gas Ga.Moreover, by should
Processing, realizes the roughened of a main surface P1, on the other hand, the surface of another main surface P2 (being upper surface in Fig. 8)
Character and surface accuracy are maintained.As an example, when with the variation of surface roughness Ra to it is above-mentioned it is roughened be illustrated when,
The surface treatment condition handled using processing gas Ga a main surface P1 can be set as follows: in above-mentioned table
The surface roughness Ra [nm] of the front and back of surface treatment, a main surface P1 improves in the range of 0.1nm or more and 1.8nm or less
(being herein increase), more preferably improves in the range of 0.1nm or more and 0.8nm or less.By making one within the above range
The surface roughness Ra of main surface P1 improves, to can be avoided glass substrate P production in the manufacturing process after surface treatment
The state of affairs of the raw electrification for essentially becoming problem this rank.It should be noted that surface roughness Ra [nm] mentioned here
Refer to value obtained from being measured by using the method for JIS R 1683:2007.
In this way, can will have and be used for by conveying device in the manufacturing device 10 of first embodiment of the invention
A main surface P1 of the glass substrate P of 11 conveyings supplies the member unit of the air supply opening 31 of processing gas Ga and is installed on edge
Multiple positions of the conveying direction X1 of glass substrate P.With this configuration, only pass through the installation position of change air supply unit 18
It sets, it will be able to be easily adjusted the position of the conveying direction X1 of air supply opening 31.Therefore, even if needing to change conveyed glass
In the case where the type of substrate P, optimal treatment conditions also can be easily set, thereby, it is possible to implement product to glass substrate P
Good surface treatment of fine quality.Alternatively, even same kind of glass substrate P, also there may come a time when according to production status or manufacture
The structure of the other parts of line and the conveying speed for changing conveying device 11, but in this case, also can easily it set
Supply conditions including supply position comprising processing gas Ga can implement surface treatment best in quality.
In addition, in the present embodiment, opening portion 17 is arranged in the cabinet 14, and install above-mentioned knot in the opening portion 17
Therefore air supply unit can be configured at cabinet 14 comprising the major part including introduction channel 34 by the air supply unit 18 of structure
Inner space 23.Thereby, it is possible to by the not enlarged degree to more than needs of surface processing device 12 and group enters into manufacturing line.
In addition, the major part inside cabinet 14 can be made to become cavity, therefore, even if in the installation for changing or having added air supply unit 18
In the case where position, become problem without the interference worried with other components.
In addition, in the present embodiment, exhaust outlet 28,40 is connected with the inner space 23 of cabinet 14, and this is interior
Portion space 23 is connected with washer 30.In this way, it is configured to a part of exhaust system by the inner space 23 by cabinet 14, from
And only easily exhaust outlet 40 can be connected with washer 30 by the installation site of change exhaust unit 19.In addition, logical
A part that inner space 23 is set as to exhaust system is crossed, even if thus the case where changing the installation site of air supply unit 18
Under, air supply system will not be interfered with exhaust system.Therefore, only pass through the installation of change air supply unit 18 and communicating pipe 35
Position, it will be able to easily change the position of air supply opening 31.
More than, the manufacturing device 10 and manufacturing method of the glass substrate P of first embodiment of the invention are illustrated,
But these manufacturing devices 10 and manufacturing method can use arbitrary mode within the scope of the invention certainly.
For example, in the first embodiment, instantiating two air supply units, 18, exhaust units 19 and five are illusory
Unit 20a, 20b are installed on the case where opening portion 17, but can not only change the position of air supply unit 18 certainly, additionally it is possible to change
Quantity.Fig. 9 shows the cross-sectional view of the manufacturing device 50 of the glass substrate P of an example (second embodiment of the present invention).Such as Fig. 9
Shown, which has conveying device 11, surface processing device 51 and treatment trough in the same manner as first embodiment
13, on the other hand, the structure of surface processing device 51 and the surface processing device 12 of first embodiment are different.Specifically,
There are three air supply unit 18 and five dummy cells 20a, 20b in the installation of the opening portion of cabinet 14 17 for the surface processing device 51.
If being compared with first embodiment, using will be from upstream side (Fig. 1 and Fig. 9 in for left side) the 4th dummy cell of number
20a is replaced into air supply unit 18 and will be replaced into the form of dummy cell 20a from the 7th exhaust unit 19 of upstream side number.
In this way, can reduce each air supply unit 18 (air supply opening 31) by the number for increasing air supply unit 18 and be responsible for
A main surface P1 processing area.Thus it is for example possible to avoid generating because handling gas as far as possible between air supply opening 31,31
Body Ga stagnates and makes the region of its concentration decline, can implement greater homogeneity and adequately surface treatment to a main surface P1.
In addition, if the shape of a pair of of exhaust outlet 28 has been arranged using at the both ends of the conveying direction X1 of cabinet 14 as in the present embodiment
State, the then as shown in figure 9, structure that the number even with exhaust unit 19 is zero, can also prevent processing gas as much as possible
Leakage of the Ga to outside surface processing device 51, therefore, not special problem.
In addition, in the above description, as opening portion 17, instantiate on bottom 21 that there are on conveying direction X1
The case where continuous space, but can certainly be using structure in addition to this.Such as embodiment described above, exist
The conveying direction size C1~C3 and width direction size W1~W3 of air supply unit 18, exhaust unit 19 and dummy cell 20a are equal
In the case where equal, naturally it is also possible to which the separation extended in the width direction is set in such a way that a pair of sidewalls portion 22,22 to be connected
Wall (illustration omitted) is matched in multiple unit housing portions (illustration omitted) selection divided by these partition walls with sidewall portion 22,22
Set 18~20a of each unit.
In addition, in the above-described embodiment, each exhaust outlet 28,40 be configured to the inner space 23 via cabinet 14 and with wash
It washs device 30 to be connected, but can certainly be using structure in addition to this.Such as it can also be by that will be arranged using defined piping
Intercommunicating pore 29 in the side of cabinet 14 is connect with the intercommunicating pore 41 for the bottom for being set to cabinet 14, thus by exhaust outlet 28 with wash
Device 30 is washed to be connected.In this case, the inside of cabinet 14 can not also be cavity, as long as can be avoided and 18~20a of each unit
Interference, arbitrary structure can be used.
In addition, in the above description, illustrating a main surface P1 to the glass substrate P cut out from band-like glass sheet
As defined in implementing the case where surface treatment, but certainly also can be to any one main surface of band-like glass sheet application present invention.
Even if that is, only to be configured to it is band-like and in the width direction cut off after wound the glass thin of its longitudinal direction one or both ends
In the case that surface treatment is implemented in the face that film table carries on the back a side, the surface treatment of above structure can also be preferably implemented, to this omission
Diagram.
Claims (10)
1. a kind of manufacturing device of glass substrate, has:
Conveying device conveys the plate glass for becoming glass substrate along defined direction；And
Surface processing device supplies processing gas to a main surface of the plate glass conveyed by the conveying device
And surface treatment as defined in implementing,
The manufacturing device of the glass substrate is characterized in that,
The surface processing device has:
Cabinet；
Opening portion, one main surface side opening in the cabinet；And
One or more air supply units, one or more air supply units relative to the opening portion in a manner of it can dismantle
Installation, and there is the air supply opening for supplying the processing gas to one main surface,
The air supply unit can be mounted on multiple positions of the conveying direction along the plate glass in the opening portion.
2. the manufacturing device of glass substrate according to claim 1, which is characterized in that
The manufacturing device of the glass substrate is also equipped with exhaust unit, and the exhaust unit relative to the opening portion can dismantle
Mode install, for carrying out the exhaust of the processing gas, the exhaust unit can be mounted on the edge in the opening portion
Multiple positions of the conveying direction.
3. the manufacturing device of glass substrate according to claim 2, which is characterized in that
The exhaust unit is provided with first row port, the first row port is by one main surface and the exhaust unit
Between space be connected with the inner space of the cabinet, the washer of the inner space of the cabinet and the processing gas
It is connected.
4. the manufacturing device of glass substrate according to any one of claim 1 to 3, which is characterized in that
The manufacturing device of the glass substrate is also equipped with dummy cell, and the dummy cell relative to the opening portion can dismantle
Mode install, for blocking the opening portion, the dummy cell can be mounted in the opening portion along described defeated
Send multiple positions in direction.
5. the manufacturing device of glass substrate according to any one of claim 1 to 4, which is characterized in that
The air supply unit has gap forming face, in the state that the air supply unit is installed on the opening portion, the gap
Gap as defined in being formed between forming face and one main surface.
6. the manufacturing device of glass substrate according to any one of claim 1 to 5, which is characterized in that
The air supply unit has roller, and in the state that the air supply unit is installed on the opening portion, the roller is to by described defeated
The one main surface for the plate glass for sending device to convey is supported.
7. the manufacturing device of glass substrate according to any one of claim 1 to 6, which is characterized in that
The air supply unit is installed on the opening portion in a manner of chimeric, as a result, that the inner space of the cabinet is closed.
8. the manufacturing device of glass substrate according to any one of claim 1 to 7, which is characterized in that
The conveying direction both ends of the plate glass in the cabinet are provided with second exhaust port, which will
Space between one main surface and the cabinet is connected with the inner space of the cabinet, the inner space of the cabinet
It is connected with the washer of the processing gas.
9. the manufacturing device of glass substrate according to any one of claim 1 to 8, which is characterized in that
The air supply unit is connect with the one end for the communicating pipe for being installed on the cabinet, the another side of the communicating pipe via
Flexible pipe and connect with the processing gas generation device of outside for being located at the cabinet.
10. a kind of manufacturing method of glass substrate, has:
The conveying operation that the plate glass for becoming glass substrate is conveyed along defined direction；And
The defined surface being surface-treated is implemented to a main surface of the plate glass along the defined direction conveying
Treatment process,
The manufacturing method of the glass substrate is characterized in that,
The surface treatment procedure passes through from surface processing device to the plate glass along the defined direction conveying
One main surface supply processing gas carries out,
The surface processing device has:
Cabinet；
Opening portion, one main surface side opening in the cabinet；And
One or more air supply units, one or more air supply units relative to the opening portion in a manner of it can dismantle
Installation, and there is the air supply opening for supplying the processing gas to one main surface,
The air supply unit can be mounted on multiple positions of the conveying direction along the plate glass in the opening portion.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
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| JP2016223248A JP6665760B2 (en) | 2016-11-16 | 2016-11-16 | Glass substrate manufacturing apparatus and manufacturing method |
| JP2016-223248 | 2016-11-16 | ||
| PCT/JP2017/037958 WO2018092506A1 (en) | 2016-11-16 | 2017-10-20 | Production device and production method for glass substrate |
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| CN109963820A true CN109963820A (en) | 2019-07-02 |
| CN109963820B CN109963820B (en) | 2021-12-31 |
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| JP (1) | JP6665760B2 (en) |
| KR (1) | KR102312556B1 (en) |
| CN (1) | CN109963820B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR102312556B1 (en) | 2021-10-14 |
| KR20190084098A (en) | 2019-07-15 |
| JP6665760B2 (en) | 2020-03-13 |
| CN109963820B (en) | 2021-12-31 |
| TWI722251B (en) | 2021-03-21 |
| JP2018080079A (en) | 2018-05-24 |
| TW201829339A (en) | 2018-08-16 |
| WO2018092506A1 (en) | 2018-05-24 |
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