CN109926711A - A kind of method of automatic acquisition laser spot and the automatic processing unit (plant) for obtaining laser spot - Google Patents
A kind of method of automatic acquisition laser spot and the automatic processing unit (plant) for obtaining laser spot Download PDFInfo
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- CN109926711A CN109926711A CN201910340225.4A CN201910340225A CN109926711A CN 109926711 A CN109926711 A CN 109926711A CN 201910340225 A CN201910340225 A CN 201910340225A CN 109926711 A CN109926711 A CN 109926711A
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Abstract
The present invention relates to laser marking technical fields, and in particular to a method of it is automatic to obtain laser spot.The automatic method for obtaining laser spot, the default one mark figure being made of horizontal line and vertical line and a safety travel range；According to mark figure, laser marking is carried out with step pitch and forms the first mark track；Image Acquisition is carried out to the first mark track, measure the first mark track horizontal line is wide and vertical line is wide, compare and show that horizontal line is wide and the wide the smallest first mark track of vertical line, and obtain the Z axis coordinate of the first mark track, which is bigness scale focal coordinates；An accurate measurement mark section is preset, according to mark figure, laser marking is carried out with step pitch and forms the second mark track；Image Acquisition is carried out to the second mark track, measure the second mark track horizontal line is wide and vertical line is wide, compare and show that horizontal line is wide and the wide the smallest second mark track of vertical line, and obtain the Z axis coordinate of the second mark track, which is the Z axis coordinate of focus.
Description
Technical field
The present invention relates to laser marking technical fields, and in particular to one kind obtains the method for laser spot automatically and obtains automatically
Take the processing unit (plant) of laser spot.
Background technique
It is collimated and after expanding that laser light source in laser marking system is focused afterwards, is irradiated on scanning galvanometer, scanning galvanometer
Lower swing is controlled in the marking control system being connected with computer system, scanning forms flat image in plane X, Y two-dimensional plane.
Laser beam focus is formed into fine one by one, high-energy density hot spot on the surface of processing object by camera lens, each
The laser pulse moment of high-energy makes the molecular scission on machined material surface form label trace.Marking control system according to
The contents such as pre-designed character, figure just for good and all mark on the surface of the material.Laser spot plays processing effect extremely heavy
The effect wanted.Therefore quickly accurately and stably obtain laser marking system focus be laser marking processing key technology it
One.
The existing method for obtaining laser spot mainly has several: the first, on metal aluminium flake or steel disc material
Mark is recycled by certain graphics processing and technological parameter, observation mark acts on the light quantity reflected when material and acoustic artificial determines
Focus, but there is very big laser emission security risk in which, determining focus precision is not high, obtains the stability of focus
Difference.Second, artificial mark lines are measured Quadratic Finite Element measure effect by way of mark lines feature sizes under different height again
Rate is low, need to be equipped with matched Quadratic Finite Element high equipment cost and skilled addressee is needed to manipulate.The third, according to field lens type selecting hand
Volume determines the processing distance of camera lens and determines focus with the distance that gage determines camera lens to processing object, and which is because of lens optical
The nonlinear characteristic and consistency of component are poor, and actual focal spot and depth of focus are often quite different, can not meet practical high manufacturing accuracy
It is required that.
Summary of the invention
The technical problem to be solved in the present invention is that in view of the above drawbacks of the prior art, it is sharp to provide a kind of automatic acquisition
The method of optical focus overcomes the existing method for obtaining laser spot that cannot obtain the defect of focus exact.
The technical solution adopted by the present invention to solve the technical problems is: providing a kind of automatic side for obtaining laser spot
Method, comprising the following steps: S1, a default mark figure being made of horizontal line and vertical line and a safety travel range；S2,
According to mark figure, with step pitch St within the scope of safety travel0Laser marking is carried out, is formed and several is made of horizontal line and vertical line
First mark track；S3, Image Acquisition is carried out to every one first mark track, the horizontal line for measuring the first mark track is wide and perpendicular
Line width compares and show that horizontal line is wide and the wide the smallest first mark track of vertical line, and obtains the Z axis coordinate of the first mark track
Z1, Z axis coordinate Z1For bigness scale focal coordinates；S4, an accurate measurement mark section is preset, the value range in the section is (Z1-
H1)/2 are to (Z1+H1)/2, wherein the amasthenic lens depth of focus equal to twice；According to mark figure, with step in accurate measurement section up to standard
Away from St1Laser marking is carried out, forms several the second mark tracks being made of horizontal line and vertical line, wherein St1Equal to vision collecting system
The resolution ratio of camera lens in system；S5, Image Acquisition is carried out to every one second mark track, the horizontal line for measuring the second mark track is wide
It is wide with vertical line, compare and show that horizontal line is wide and the wide the smallest second mark track of vertical line, and show that the Z axis of the second mark track is sat
Mark Z2, Z axis coordinate Z2The as Z axis coordinate of focus.
Still more preferably scheme of the invention is: second mark track shares N number of, wherein N=H1/St1。
Still more preferably scheme of the invention is: by vision collecting system to the first mark track and the second mark rail
Mark carries out Image Acquisition, and measures that horizontal line is wide and vertical line is wide, compares and show that horizontal line is wide and the wide the smallest first mark track of vertical line
Or the second mark track, obtain the Z axis coordinate Z of the first mark track1Or second mark track Z axis coordinate Z2。
Still more preferably scheme of the invention is: determining safety travel range according to optical focus lens parameters.
Still more preferably scheme of the invention is: wavelength being used to carry out laser marking, safety for the laser of 355nm
Stroke range is 0 millimeter to 30 millimeters, St0=0.5 millimeter.
It further include a kind of automatic method for obtaining laser spot, comprising the following steps: S1, preset one by horizontal line and vertical line
The mark figure of composition and a safety travel range；S2, according to mark figure, with step pitch St within the scope of safety travel0
Laser marking is carried out, several the first mark tracks being made of horizontal line and vertical line are formed；S3, every one first mark track is carried out
Image Acquisition, the horizontal line for measuring the first mark track is wide wide with vertical line, compares and obtains the wide the smallest first mark track of horizontal line
Zx0With the wide the smallest first mark track Z of vertical liney0, work as Zx0Numerical value and Zy0Numerical value it is not identical when, then in Zx0To Zy0Model
A first mark track is looked in enclosing, the horizontal line width values and vertical line width values difference of the first mark track are minimum, and as bigness scale is burnt
Point coordinate；S4, an accurate measurement mark section is preset, the value range in the section is (Z1-H1)/2 are to (Z1+H1)/2, wherein H1Deng
In twice of amasthenic lens depth of focus；According to mark figure, with step pitch St in accurate measurement section up to standard1Laser marking is carried out, is formed
Several the second mark tracks being made of horizontal line and vertical line, wherein St1Equal to the resolution ratio of camera lens in vision collecting system；S5,
Image Acquisition is carried out to every one second mark track, the horizontal line for measuring the second mark track is wide wide with vertical line, compares and obtains cross
Line width the smallest second mark track Zx1With the wide the smallest second mark track Z of vertical liney1, work as Zx1Numerical value and Zy1Numerical value not
When identical, then in Zx1To Zy1In the range of look for a first mark track Z2, first mark track Z2Horizontal line width values and perpendicular
Line width values difference is minimum, Z axis coordinate Z2The as Z axis coordinate of focus.
It further include a kind of automatic processing unit (plant) for obtaining laser spot, comprising: workbench；Motion platform is surveyed for clamping
Test plate (panel) simultaneously drives test board mobile；Marking mechanism carries out laser marking according to mark figure on test board, forms mark rail
Mark；And vision collecting system, for carrying out Image Acquisition to the mark track on test board, and measure that horizontal line is wide and vertical line
Width compares and show that horizontal line is wide and the smallest mark track of vertical line width, obtains the Z axis coordinate of mark track；The motion platform with
The marking mechanism is respectively mounted on the table, and the vision collecting system is mounted on marking mechanism.
Still more preferably scheme of the invention is: the motion platform includes fixture for clamping test board and is used for
Drive fixture three mobile spindle motor platforms, the three spindle motors stage+module on the table, the installation of the fixture sliding
On three spindle motor platforms.
Still more preferably scheme of the invention is: the marking mechanism includes laser, optical delivery component, galvanometer
Head, focus lamp and power part, the power part are installed on the workbench, and are sequentially connected with laser, and laser can be driven
It moves up and down, the optical delivery component, galvanometer head and focus lamp are installed on laser, and the laser transmitting swashs
Light successively passes through optical delivery component and galvanometer head, projects from focus lamp.
Still more preferably scheme of the invention is: the vision collecting system includes light source, camera and for camera lens,
The camera lens is mounted on camera, and the light source and camera are installed on laser.
The beneficial effects of the present invention are by the way that mark figure is arranged, with step pitch St within the scope of safety travel0It is testing
Laser marking on plate carries out Image Acquisition to the first mark track, compares and show that horizontal line is wide and the smallest mark track of vertical line width
As bigness scale focal coordinates can determine accurate measurement mark section according to bigness scale focal coordinates, with step pitch St1In accurate measurement section up to standard
Interior carry out laser marking carries out Image Acquisition to the second mark track, compares and show that horizontal line is wide and the smallest mark rail of vertical line width
Mark is the Z axis coordinate of focus, finds focal coordinates using bigness scale and thin survey, and the accuracy for obtaining focus is high, while finding
The course of work is completed by apparatus control, is improved work efficiency.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the automatic flow diagram for obtaining laser spot method of the invention；
Fig. 2 is the structural schematic diagram of the automatic processing unit (plant) for obtaining laser spot of the invention；
Fig. 3 is another structural schematic diagram of the automatic processing unit (plant) for obtaining laser spot of the invention.
Specific embodiment
Now in conjunction with attached drawing, elaborate to presently preferred embodiments of the present invention.
As shown in Figure 1, the method for automatic acquisition laser spot of the invention, comprising the following steps:
S1, a default mark figure being made of horizontal line and vertical line and a safety travel range；
S2, according to mark figure, with step pitch St within the scope of safety travel0Laser marking is carried out, is formed several by horizontal line
With the first mark track of vertical line composition；
S3, Image Acquisition being carried out to every one first mark track, the horizontal line for measuring the first mark track is wide wide with vertical line,
Compare and show that horizontal line is wide and the wide the smallest first mark track of vertical line, and obtains the Z axis coordinate Z of the first mark track1, the Z
Axial coordinate Z1For bigness scale focal coordinates；
S4, an accurate measurement mark section is preset, the value range in the section is (Z1-H1)/2 are to (Z1+H1)/2, wherein H1
Amasthenic lens depth of focus equal to twice；According to mark figure, with step pitch St in accurate measurement section up to standard1Carry out laser marking, shape
At several the second mark tracks being made of horizontal line and vertical line, wherein St1Equal to the resolution ratio of camera lens in vision collecting system；
S5, Image Acquisition being carried out to every one second mark track, the horizontal line for measuring the second mark track is wide wide with vertical line,
Compare and show that horizontal line is wide and the wide the smallest second mark track of vertical line, and obtains the Z axis coordinate Z of the second mark track2, the Z
Axial coordinate Z2The as Z axis coordinate of focus.
By the way that mark figure is arranged, with step pitch St within the scope of safety travel0The laser marking on test board, to first dozen
It marks track and carries out Image Acquisition, compare and show that horizontal line is wide and the smallest mark track of vertical line width is bigness scale focal coordinates, according to
Bigness scale focal coordinates can determine accurate measurement mark section, with step pitch St1Laser marking is carried out in accurate measurement section up to standard, to second
Mark track carries out Image Acquisition, compares and show that horizontal line is wide and the smallest mark track of vertical line width is the Z axis coordinate of focus, benefit
Focal coordinates are found with bigness scale and thin survey, the accuracy for obtaining focus is high, while the course of work found is complete by apparatus control
At improving work efficiency.
Further, second mark track shares N number of, wherein N=H1/St1.In the present embodiment, the mark
Figure is cross figure, and it is X that a spacing is arranged on test board, and the dot matrix of Y, the horizontal line of the cross figure is long to be less than X,
Vertical line is long to be less than Y, and when accurate measurement mark section carries out laser marking, focal length head of the number of the second mark track equal to twice is burnt
The deep numerical value divided by resolution ratio, wide minimum and the wide the smallest second mark track of vertical line the coordinate Z of the very horizontal line obtained2It is as burnt
The Z axis coordinate of point.
Further, Image Acquisition is carried out to the first mark track and the second mark track by vision collecting system, and
It measures that horizontal line is wide and vertical line is wide, compares and show that horizontal line is wide and the wide the smallest first mark track of vertical line or the second mark track, obtain
The Z axis coordinate Z of first mark track out1Or second mark track Z axis coordinate Z2.Using vision collecting system to mark track
Image Acquisition is carried out, measures and compares, the accuracy rate of the focal coordinates obtained is high, and improves work efficiency.
Further, safety travel range is determined according to optical focus lens parameters, with step pitch St0In safety travel range
Interior carry out laser marking, determines bigness scale focal coordinates.In the present embodiment, wavelength is used to carry out laser for the laser of 355nm
Mark, safety travel range are 0 millimeter to 30 millimeters, St0=0.5 millimeter, with step pitch St0The laser within the scope of safety travel
Mark.
The present invention also provides a kind of automatic methods for obtaining laser spot, comprising the following steps:
S1, a default mark figure being made of horizontal line and vertical line and a safety travel range；
S2, according to mark figure, with step pitch St within the scope of safety travel0Laser marking is carried out, is formed several by horizontal line
With the first mark track of vertical line composition；
S3, Image Acquisition being carried out to every one first mark track, the horizontal line for measuring the first mark track is wide wide with vertical line,
Compare and obtains the wide the smallest first mark track Z of horizontal linex0With the wide the smallest first mark track Z of vertical liney0, work as Zx0Numerical value with
Zy0Numerical value it is not identical when, then
S4, an accurate measurement mark section is preset, the value range in the section is (Z1-H1)/2 are to (Z1+H1)/2, wherein H1
Amasthenic lens depth of focus equal to twice；According to mark figure, with step pitch St in accurate measurement section up to standard1Carry out laser marking, shape
At several the second mark tracks being made of horizontal line and vertical line, wherein St1Equal to the resolution ratio of camera lens in vision collecting system；
S5, Image Acquisition being carried out to every one second mark track, the horizontal line for measuring the second mark track is wide wide with vertical line,
Compare and obtains the wide the smallest second mark track Z of horizontal linex1With the wide the smallest second mark track Z of vertical liney1, work as Zx1Numerical value with
Zy1Numerical value it is not identical when, then in Zx1To Zy1In the range of look for a first mark track Z2, first mark track Z2Cross
Line width values and vertical line width values difference are minimum, Z axis coordinate Z2The as Z axis coordinate of focus.
In the present embodiment, when the smallest mark trajectory coordinates of horizontal line width are different from the smallest mark trajectory coordinates of vertical line width
When, then it needs to look for a mark track again between the wide the smallest mark track of horizontal line and the wide the smallest mark track of vertical line, it should
The difference that the horizontal line of mark track is wide and vertical line is wide is minimum.
As shown in Figure 2,3, the present invention also provides a kind of automatic processing unit (plant)s for obtaining laser spot, including workbench 1；Fortune
Moving platform 2, for clamping test board and driving test board mobile；Marking mechanism 3 is swashed on test board according to mark figure
Light mark forms mark track；And vision collecting system 4, for carrying out Image Acquisition to the mark track on test board, and
It measures that horizontal line is wide and vertical line is wide, compares and show that horizontal line is wide and the smallest mark track of vertical line width, show that the Z axis of mark track is sat
Mark；The motion platform 2 is installed on workbench 1 with the marking mechanism 3, and the vision collecting system 4 is mounted on mark
In mechanism 3.Motion platform 2 drives test board mobile, and marking mechanism 3 is to test board laser marking, and vision collecting system 4 is to mark
Track carries out Image Acquisition, and it is wide wide with vertical line to measure horizontal line.
The motion platform 2 includes the fixture 21 for clamping test board and three spindle motors for driving fixture 21 movements
Platform 22, the three spindle motors platform 22 are mounted on workbench 1, and the fixture 21 is slidably mounted at three spindle motor platforms 22
On.The three spindle motors platform 22 can drive fixture 21 horizontal movement and numerical value movements in the same plane, and test board is driven to move
Dynamic, mark track is not overlapped when making marking mechanism 3 to test board laser marking, and vision collecting system 4 is facilitated to carry out Image Acquisition.
The marking mechanism 3 includes laser 31, optical delivery component, galvanometer head 32, focus lamp 33 and power part 34,
The power part 34 is mounted on workbench 1, and is sequentially connected with laser 31, and laser 31 can be driven to move up and down, described
Optical delivery component, galvanometer head 32 and focus lamp 33 are installed on laser 31, the laser that the laser 31 emits according to
It is secondary to pass through optical delivery component and galvanometer head 32, it is projected from focus lamp 33.In the present embodiment, the optics conveying assembly includes
Refractive power chamber 35 and beam expanding lens 36, the laser that laser 31 emits carries out beam path alignment through refractive power chamber 35,36 row hot spot of beam expanding lens expands
Be transmitted to galvanometer head 32 after big, then line focus mirror 33 forms focal beam spot in test plate surface, the rotation of control galvanometer head 32 with
It is scanned focal beam spot to the region to be processed of test board.The ultraviolet laser light that wavelength is 355nm can be used in laser 31
Source, since the fuel factor generated in ultraviolet laser process is small, processing lines are wide thin, and the survey of vision collecting system 4 can be improved
Accuracy of measurement.Refractive power chamber 35, beam expanding lens 36 and galvanometer head 32 select the optical device of ultraviolet band, and focus lamp 33 is selected ultraviolet poly-
Zoom lens.
The vision collecting system 4 includes light source 41, camera 42 and is used for camera lens 43, and the camera lens 43 is mounted on camera
On 42, the light source 41 and camera 42 are installed on laser 31.In the present embodiment, the camera lens 43 selects telecentric mirror
Head, camera 42 are CCD camera, and light source 41 is LED light, can reduce the distortion factor using CCD camera, can be obtained using telecentric lens
The edge resolution for obtaining sample to be tested processing lines, helps to improve measurement accuracy, illuminates test using LED light from different perspectives
The surface of plate, it is ensured that the image of 4 acquisition height of vision collecting system comparison.
It should be understood that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations, to ability
It for field technique personnel, can modify to technical solution illustrated in the above embodiments, or special to part of technology
Sign is equivalently replaced；And all such modifications and replacement, it should all belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a kind of automatic method for obtaining laser spot, which comprises the following steps:
S1, a default mark figure being made of horizontal line and vertical line and a safety travel range；
S2, according to mark figure, with step pitch St within the scope of safety travel0Laser marking is carried out, is formed several by horizontal line and vertical line
First mark track of composition；
S3, Image Acquisition is carried out to every one first mark track, the horizontal line for measuring the first mark track is wide wide with vertical line, compares
It show that horizontal line is wide and the wide the smallest first mark track of vertical line, and obtains the Z axis coordinate Z of the first mark track1, Z axis seat
Mark Z1For bigness scale focal coordinates；
S4, an accurate measurement mark section is preset, the value range in the section is (Z1-H1)/2 are to (Z1+H1)/2, wherein H1It is equal to
Twice of amasthenic lens depth of focus；According to mark figure, with step pitch St in accurate measurement section up to standard1Laser marking is carried out, if being formed
The second mark track being made of horizontal line and vertical line is done, wherein St1Equal to the resolution ratio of camera lens in vision collecting system；
S5, Image Acquisition is carried out to every one second mark track, the horizontal line for measuring the second mark track is wide wide with vertical line, compares
It show that horizontal line is wide and the wide the smallest second mark track of vertical line, and obtains the Z axis coordinate Z of the second mark track2, Z axis seat
Mark Z2The as Z axis coordinate of focus.
2. the method for automatic acquisition laser spot according to claim 1, which is characterized in that second mark track is total
Have N number of, wherein N=H1/St1。
3. the method for automatic acquisition laser spot according to claim 1, which is characterized in that pass through vision collecting system pair
First mark track and the second mark track carry out Image Acquisition, and measure that horizontal line is wide and vertical line is wide, compare obtain horizontal line it is wide and
The wide the smallest first mark track of vertical line or the second mark track obtain the Z axis coordinate Z of the first mark track1Or second mark
The Z axis coordinate Z of track2。
4. the method for automatic acquisition laser spot according to claim 1, which is characterized in that joined according to optical focus camera lens
Number determines safety travel range.
5. the method for automatic acquisition laser spot according to claim 1, which is characterized in that use wavelength for 355nm's
Laser carries out laser marking, and safety travel range is 0 millimeter to 30 millimeters, St0=0.5 millimeter.
6. a kind of automatic method for obtaining laser spot, which comprises the following steps:
S1, a default mark figure being made of horizontal line and vertical line and a safety travel range；
S2, according to mark figure, with step pitch St within the scope of safety travel0Laser marking is carried out, is formed several by horizontal line and vertical line
First mark track of composition；
S3, Image Acquisition is carried out to every one first mark track, the horizontal line for measuring the first mark track is wide wide with vertical line, compares
Obtain the wide the smallest first mark track Z of horizontal linex0With the wide the smallest first mark track Z of vertical liney0, work as Zx0Numerical value and Zy0's
When numerical value is not identical, then
S4, an accurate measurement mark section is preset, the value range in the section is (Z1-H1)/2 are to (Z1+H1)/2, wherein H1It is equal to
Twice of amasthenic lens depth of focus；According to mark figure, with step pitch St in accurate measurement section up to standard1Laser marking is carried out, if being formed
The second mark track being made of horizontal line and vertical line is done, wherein St1Equal to the resolution ratio of camera lens in vision collecting system；
S5, Image Acquisition is carried out to every one second mark track, the horizontal line for measuring the second mark track is wide wide with vertical line, compares
Obtain the wide the smallest second mark track Z of horizontal linex1With the wide the smallest second mark track Z of vertical liney1, work as Zx1Numerical value and Zy1's
When numerical value is not identical, then in Zx1To Zy1In the range of look for a first mark track Z2, first mark track Z2Horizontal line it is wide
Value and vertical line width values difference are minimum, Z axis coordinate Z2The as Z axis coordinate of focus.
7. a kind of automatic processing unit (plant) for obtaining laser spot characterized by comprising
Workbench；
Motion platform, for clamping test board and driving test board mobile；
Marking mechanism carries out laser marking according to mark figure on test board, forms mark track；
And vision collecting system, for carrying out Image Acquisition to the mark track on test board, and measure that horizontal line is wide and vertical line
Width compares and show that horizontal line is wide and the smallest mark track of vertical line width, obtains the Z axis coordinate of mark track；
The motion platform and the marking mechanism are respectively mounted on the table, and the vision collecting system is mounted on marking mechanism
On.
8. the processing unit (plant) of automatic acquisition laser spot according to claim 7, which is characterized in that the motion platform packet
It includes the fixture for clamping test board and for driving fixture three mobile spindle motor platforms, the three spindle motors stage+module exists
On workbench, the fixture is slidably mounted on three spindle motor platforms.
9. the processing unit (plant) of automatic acquisition laser spot according to claim 8, which is characterized in that the marking mechanism packet
Include laser, optical delivery component, galvanometer head, focus lamp and power part, the power part is installed on the workbench, and with swash
The transmission connection of light device, can drive laser to move up and down, the optical delivery component, galvanometer head and focus lamp are installed in sharp
On light device, the laser of the laser transmitting successively passes through optical delivery component and galvanometer head, projects from focus lamp.
10. the processing unit (plant) of automatic acquisition laser spot according to claim 9, which is characterized in that the vision collecting
System includes light source, camera and is used for camera lens, and the camera lens is mounted on camera, and the light source and camera are installed in laser
On device.
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| CN110434472A (en) * | 2019-07-11 | 2019-11-12 | 大族激光科技产业集团股份有限公司 | Laser marking device and its focus adjustment method |
| CN111009013A (en) * | 2019-10-12 | 2020-04-14 | 苏州辰正太阳能设备有限公司 | Galvanometer calibration method for scribing machine |
| CN111223075A (en) * | 2019-12-28 | 2020-06-02 | 深圳市诺亚云谷科技有限公司 | Computer vision detection and tracing system and method for laser marking software |
| CN113977071A (en) * | 2021-11-12 | 2022-01-28 | 武汉威士登自动化控制技术有限公司 | Method for automatically searching laser focus |
| CN114235348A (en) * | 2021-11-25 | 2022-03-25 | 大连透平机械技术发展有限公司 | Focal length determining method and device of pulse laser and storage medium |
| CN114769884A (en) * | 2022-04-28 | 2022-07-22 | 深圳泰德激光技术股份有限公司 | Oxide removal apparatus and tuning method |
| CN115488494A (en) * | 2021-06-18 | 2022-12-20 | 中国科学院上海光学精密机械研究所 | Method for confirming focus of ultrafast laser micro-nano processing platform |
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