CN109913858A - 化学气相沉积非晶硅镀膜均匀性的改善方法 - Google Patents
化学气相沉积非晶硅镀膜均匀性的改善方法 Download PDFInfo
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- CN109913858A CN109913858A CN201910190768.2A CN201910190768A CN109913858A CN 109913858 A CN109913858 A CN 109913858A CN 201910190768 A CN201910190768 A CN 201910190768A CN 109913858 A CN109913858 A CN 109913858A
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- amorphous silicon
- vapor deposition
- chemical vapor
- high speed
- plating film
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- 229910021417 amorphous silicon Inorganic materials 0.000 title claims abstract description 110
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 40
- 238000007747 plating Methods 0.000 title claims abstract description 28
- 238000000151 deposition Methods 0.000 claims abstract description 52
- 230000008021 deposition Effects 0.000 claims abstract description 52
- 239000011248 coating agent Substances 0.000 claims abstract description 13
- 238000000576 coating method Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000013401 experimental design Methods 0.000 claims description 3
- 239000007792 gaseous phase Substances 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
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- Chemical Vapour Deposition (AREA)
- Battery Electrode And Active Subsutance (AREA)
Abstract
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CN201910190768.2A CN109913858B (zh) | 2019-03-13 | 2019-03-13 | 化学气相沉积非晶硅镀膜均匀性的改善方法 |
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CN201910190768.2A CN109913858B (zh) | 2019-03-13 | 2019-03-13 | 化学气相沉积非晶硅镀膜均匀性的改善方法 |
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CN109913858A true CN109913858A (zh) | 2019-06-21 |
CN109913858B CN109913858B (zh) | 2021-03-23 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115376893A (zh) * | 2022-10-24 | 2022-11-22 | 深圳市拉普拉斯能源技术有限公司 | 一种掺杂非晶硅层、制备方法、制备装置和太阳能电池 |
CN115376893B (zh) * | 2022-10-24 | 2024-05-14 | 拉普拉斯新能源科技股份有限公司 | 一种掺杂非晶硅层、制备方法、制备装置和太阳能电池 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101245447A (zh) * | 2007-02-14 | 2008-08-20 | 北京行者多媒体科技有限公司 | 纳米晶硅的等离子体沉积方法 |
CN101283455A (zh) * | 2005-10-03 | 2008-10-08 | 夏普株式会社 | 硅基薄膜光电转换装置、及其制造方法和制造设备 |
CN102652186A (zh) * | 2009-12-22 | 2012-08-29 | 应用材料公司 | 利用持续的等离子体的pecvd多重步骤处理 |
-
2019
- 2019-03-13 CN CN201910190768.2A patent/CN109913858B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101283455A (zh) * | 2005-10-03 | 2008-10-08 | 夏普株式会社 | 硅基薄膜光电转换装置、及其制造方法和制造设备 |
CN101245447A (zh) * | 2007-02-14 | 2008-08-20 | 北京行者多媒体科技有限公司 | 纳米晶硅的等离子体沉积方法 |
CN102652186A (zh) * | 2009-12-22 | 2012-08-29 | 应用材料公司 | 利用持续的等离子体的pecvd多重步骤处理 |
Non-Patent Citations (2)
Title |
---|
于遥: ""PECVD分层结构对氢化非晶硅TFT迁移率的影响"", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
陆利新: ""PECVD非晶硅薄膜制程工艺仿真建模"", 《中国博士学位论文全文数据库 信息科技辑》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115376893A (zh) * | 2022-10-24 | 2022-11-22 | 深圳市拉普拉斯能源技术有限公司 | 一种掺杂非晶硅层、制备方法、制备装置和太阳能电池 |
CN115376893B (zh) * | 2022-10-24 | 2024-05-14 | 拉普拉斯新能源科技股份有限公司 | 一种掺杂非晶硅层、制备方法、制备装置和太阳能电池 |
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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Effective date of registration: 20210528 Address after: No. 338, Fangzhou Road, Suzhou Industrial Park, Suzhou, Jiangsu 215000 Patentee after: Suzhou Huaxing Optoelectronic Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee before: TCL Huaxing Photoelectric Technology Co.,Ltd. |
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Effective date of registration: 20231113 Address after: 9-2 Tangming Avenue, Gongming street, Guangming New District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY Co.,Ltd. Address before: No. 338, Fangzhou Road, Suzhou Industrial Park, Suzhou, Jiangsu 215000 Patentee before: Suzhou Huaxing Optoelectronic Technology Co.,Ltd. |