CN109887861A - 一种匀流装置及其匀流实现方法 - Google Patents
一种匀流装置及其匀流实现方法 Download PDFInfo
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- CN109887861A CN109887861A CN201910032831.XA CN201910032831A CN109887861A CN 109887861 A CN109887861 A CN 109887861A CN 201910032831 A CN201910032831 A CN 201910032831A CN 109887861 A CN109887861 A CN 109887861A
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- 238000000034 method Methods 0.000 title claims description 7
- 238000006243 chemical reaction Methods 0.000 claims abstract description 89
- 239000007788 liquid Substances 0.000 claims abstract description 43
- 238000005086 pumping Methods 0.000 claims abstract description 16
- 238000009825 accumulation Methods 0.000 claims abstract description 7
- 239000012530 fluid Substances 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
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- 238000002347 injection Methods 0.000 claims description 5
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- 230000000694 effects Effects 0.000 claims description 3
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- 239000007795 chemical reaction product Substances 0.000 abstract description 9
- 238000010667 large scale reaction Methods 0.000 abstract description 3
- 239000000376 reactant Substances 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN201910032831.XA CN109887861A (zh) | 2019-01-14 | 2019-01-14 | 一种匀流装置及其匀流实现方法 |
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2480380Y (zh) * | 2001-05-28 | 2002-03-06 | 财团法人工业技术研究院 | 液相沉积生产装置 |
CN201804891U (zh) * | 2010-04-30 | 2011-04-20 | 常州捷佳创精密机械有限公司 | 带循环冷却机构的多晶制绒机 |
CN201864794U (zh) * | 2010-11-23 | 2011-06-15 | 北京七星华创电子股份有限公司 | 多晶硅制绒槽 |
KR20110137996A (ko) * | 2010-06-18 | 2011-12-26 | 주식회사 디엠에스 | 씨비디(cbd) 박막 제조장치 |
CN202308001U (zh) * | 2011-10-18 | 2012-07-04 | 常州捷佳创精密机械有限公司 | 一种设有多腔室的反应槽 |
CN102836842A (zh) * | 2012-08-08 | 2012-12-26 | 晶海洋半导体材料(东海)有限公司 | 一种多槽循环硅片清洗机 |
CN203448356U (zh) * | 2013-08-22 | 2014-02-26 | 常州捷佳创精密机械有限公司 | 一种硅片清洗装置 |
CN107564842A (zh) * | 2017-09-21 | 2018-01-09 | 常州捷佳创精密机械有限公司 | 一种硅片处理设备及其药液槽、药液槽的排放方法 |
CN207760445U (zh) * | 2017-11-03 | 2018-08-24 | 太极能源科技(昆山)有限公司 | 一种单晶槽体的药液循环结构 |
CN109004062A (zh) * | 2018-07-04 | 2018-12-14 | 常州捷佳创精密机械有限公司 | 利用臭氧实现碱性体系对硅片刻蚀抛光的方法及设备 |
CN209328856U (zh) * | 2019-01-14 | 2019-08-30 | 上海釜川自动化设备有限公司 | 一种匀流装置 |
-
2019
- 2019-01-14 CN CN201910032831.XA patent/CN109887861A/zh active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2480380Y (zh) * | 2001-05-28 | 2002-03-06 | 财团法人工业技术研究院 | 液相沉积生产装置 |
CN201804891U (zh) * | 2010-04-30 | 2011-04-20 | 常州捷佳创精密机械有限公司 | 带循环冷却机构的多晶制绒机 |
KR20110137996A (ko) * | 2010-06-18 | 2011-12-26 | 주식회사 디엠에스 | 씨비디(cbd) 박막 제조장치 |
CN201864794U (zh) * | 2010-11-23 | 2011-06-15 | 北京七星华创电子股份有限公司 | 多晶硅制绒槽 |
CN202308001U (zh) * | 2011-10-18 | 2012-07-04 | 常州捷佳创精密机械有限公司 | 一种设有多腔室的反应槽 |
CN102836842A (zh) * | 2012-08-08 | 2012-12-26 | 晶海洋半导体材料(东海)有限公司 | 一种多槽循环硅片清洗机 |
CN203448356U (zh) * | 2013-08-22 | 2014-02-26 | 常州捷佳创精密机械有限公司 | 一种硅片清洗装置 |
CN107564842A (zh) * | 2017-09-21 | 2018-01-09 | 常州捷佳创精密机械有限公司 | 一种硅片处理设备及其药液槽、药液槽的排放方法 |
CN207760445U (zh) * | 2017-11-03 | 2018-08-24 | 太极能源科技(昆山)有限公司 | 一种单晶槽体的药液循环结构 |
CN109004062A (zh) * | 2018-07-04 | 2018-12-14 | 常州捷佳创精密机械有限公司 | 利用臭氧实现碱性体系对硅片刻蚀抛光的方法及设备 |
CN209328856U (zh) * | 2019-01-14 | 2019-08-30 | 上海釜川自动化设备有限公司 | 一种匀流装置 |
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Address after: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant after: Shanghai Fuchuan Intelligent Technology Co.,Ltd. Address before: Room J1078, 2F, Building 39, No. 52, Chengliu Road, Jiading District, Shanghai, 200000 Applicant before: SHANGHAI FUCHUAN AUTOMATION EQUIPMENT Co.,Ltd. Address after: No. 209, Zhangjing East Section, Xigang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214194 Applicant after: Wuxi Fuchuan Technology Co.,Ltd. Address before: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai Applicant before: Shanghai Fuchuan Intelligent Technology Co.,Ltd. |
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