CN109807003A - A kind of glue spreader - Google Patents
A kind of glue spreader Download PDFInfo
- Publication number
- CN109807003A CN109807003A CN201711155775.6A CN201711155775A CN109807003A CN 109807003 A CN109807003 A CN 109807003A CN 201711155775 A CN201711155775 A CN 201711155775A CN 109807003 A CN109807003 A CN 109807003A
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- China
- Prior art keywords
- disk body
- nozzle
- electric cylinders
- boom
- glue spreader
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Spray Control Apparatus (AREA)
- Coating Apparatus (AREA)
Abstract
The invention belongs to glue spraying technical field in manufacture of semiconductor, in particular to a kind of glue spreader.Including gluing platform, two-dimension moving platform, nozzle I, boom, nozzle II, disk body I and disk body II, wherein two-dimension moving platform, disk body I and disk body II are all set on gluing platform, boom is set on two-dimension moving platform and both ends are connect with nozzle I and nozzle II respectively, and nozzle I and nozzle II are corresponding with disk body I and disk body II respectively.The present invention connects two nozzles by boom, and two nozzles respectively correspond two disk bodies, can start operation after amphidisc is placed wafer, meets while spraying the needs of two wafers, improves production capacity.
Description
Technical field
The invention belongs to glue spraying technical field in manufacture of semiconductor, in particular to a kind of glue spreader.
Background technique
Traditional gluing machine equipment, in unit substantially a set of combination electric cylinders one nozzle of drive to wafer into
Row spraying, since every wafer at least sprays complete four times, and at least four minutes, therefore the gluing machine equipment of existing structure every time
Production efficiency is relatively low.
Summary of the invention
For above-mentioned, the purpose of the present invention is to provide a kind of glue spreaders, are compared with solving existing glue spreader production efficiency
Low problem.
To achieve the goals above, the invention adopts the following technical scheme:
A kind of glue spreader, including gluing platform, two-dimension moving platform, nozzle I, boom, nozzle II, disk body I and disk body II,
Wherein two-dimension moving platform, disk body I and disk body II are all set on gluing platform, and it is flat that the boom is set to the two dimensional motion
On platform and both ends are connect with nozzle I and nozzle II respectively, the nozzle I and the nozzle II respectively with the disk body I and institute
It is corresponding to state disk body II.
Centre distance between the distance between the nozzle I and the nozzle II and the disk body I and the disk body II
It is equal.
The two-dimension moving platform is combination electric cylinders, and the combination electric cylinders include X-axis electric cylinders and Y-axis electric cylinders, and wherein X-axis is electric
Cylinder is set on the gluing platform, and the Y-axis electric cylinders are set in the X-axis electric cylinders, and the boom is set to the Y-axis electricity
It can be moved along X, Y-direction on cylinder and by the driving of the X-axis electric cylinders and the Y-axis electric cylinders.
The boom is to connect respectively across the "door" type structure in the Y-axis electric cylinders, the nozzle I and the nozzle II
It connects in the lower end two sides of the boom.
The vertical frame in the side of the boom is connect by link block with the actuating station of the Y-axis electric cylinders.
The connection height-adjustable of the vertical frame in side of the link block and the boom.
The vertical frame in the side of the boom is equipped with the graduation mark for adjusting the link block height.
The disk body I and disk body II is located at the ipsilateral of the two-dimension moving platform.
The disk body I and disk body II is circular configuration.
The invention has the advantages and beneficial effects that: the present invention improves the production capacity of glue spreader, in the item of the same configuration of equipment
Under part, two nozzles are connected by boom, two nozzles respectively correspond two disk bodies, after amphidisc is placed wafer
Start operation, meet while spraying the needs of two wafers, improves production capacity.
Detailed description of the invention
Fig. 1 is axonometric drawing of the invention；
Fig. 2 is enlarged view at I in Fig. 1；
Fig. 3 is top view of the invention.
In figure: 1 is gluing platform, and 2 be combination electric cylinders, and 21 be X-axis electric cylinders, and 22 be Y-axis electric cylinders, and 3 be nozzle I, and 4 be to hang
Arm, 5 be nozzle II, and 6 be disk body II, and 7 be disk body I, and 8 be link block, and 9 be graduation mark.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, right in the following with reference to the drawings and specific embodiments
The present invention is described in detail.
As shown in Figure 1, Figure 3, a kind of glue spreader provided by the invention, which is characterized in that including gluing platform 1, two maintenance and operations
Moving platform, nozzle I3, boom 4, nozzle II5, disk body I7 and disk body II6, wherein two-dimension moving platform, disk body I7 and disk body II6
It is all set on gluing platform 1, boom 4 is set on two-dimension moving platform and both ends connect with nozzle I3 and nozzle II5 respectively
It connects, nozzle I3 and nozzle II5 are corresponding with disk body I7 and disk body II6 respectively.
Further, the centre distance phase between the distance between nozzle I3 and nozzle II5 and disk body I7 and disk body II6
Deng.
The two-dimension moving platform is combination electric cylinders 2, and combination electric cylinders 2 include X-axis electric cylinders 21 and Y-axis electric cylinders 22, wherein X-axis
Electric cylinders 21 are set on gluing platform 1, and Y-axis electric cylinders 22 are set in X-axis electric cylinders 21, and boom 4 is set in Y-axis electric cylinders 22, simultaneously
And it can be moved along X, Y-direction by the driving of X-axis electric cylinders 21 and Y-axis electric cylinders 22.
Further, boom 4 is across the "door" type structure in Y-axis electric cylinders 22, and the vertical frame in the side of boom 4 passes through
Link block 8 is connect with the actuating station of Y-axis electric cylinders 22, and nozzle I3 and nozzle II5 are connected to the lower end two sides of boom 4, connection
The connection height-adjustable of the vertical frame in side of block 8 and boom 4.
Further, as shown in Fig. 2, the vertical frame in the side of boom 4 is equipped with graduation mark 9, graduation mark 9 is for accurately adjusting
The connection height of whole link block 8, to accurately control the spraying height of nozzle I3 and nozzle II5.
Further, disk body I7 and disk body II6 is circular configuration, and is respectively positioned on the ipsilateral of combination electric cylinders 2.Combination electricity
When the relative position of cylinder 2 and disk body I7 carry out spraying process with nozzle I3, it is standard that wafer, which can be completely covered,.Nozzle I3 and nozzle
The distance between II5 is equal with the centre distance of following two wafers disk body, i.e., nozzle is identical as the relative position of wafer disk body, group
Close the two-dimensional scanning that electric cylinders 2 can drive two nozzles to synchronize on respective wafer.
When carrying out spraying process, wafer is all placed on disk body I7 and disk body II6, combination electric cylinders 2 start operation, drive
Nozzle I3 and nozzle II5 carries out two-dimensional scanning to the wafer on disk body I7 and disk body II6 respectively.After spraying, wafer can be with
It is taken down.Compared to traditional automatic double surface gluer unit, there is no the operation of various complexity for staff, only moved by placement wafer
Work becomes placing two wafers, and quite original production capacity is about doubled.
A kind of glue spreader provided by the invention hangs two nozzles by boom structure in combination electric cylinders 2, guarantees two
The distance between nozzle is equal with the centre distance of following two wafers disk body, i.e., nozzle is identical as the relative position of wafer disk body.
The present invention is used for glue spreader, can spray two wafers simultaneously in a unit, the production capacity of glue spreader is doubled.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the present invention.It is all in the present invention
Spirit and principle within any modification, equivalent replacement, improvement, extension etc., be all contained in protection scope of the present invention
It is interior.
Claims (9)
1. a kind of glue spreader, which is characterized in that including gluing platform (1), two-dimension moving platform, nozzle I (3), boom (4), spray
Mouth II (5), disk body I (7) and disk body II (6), wherein two-dimension moving platform, disk body I (7) and disk body II (6) are all set in gluing
On platform (1), the boom (4) be set on the two-dimension moving platform and both ends respectively with nozzle I (3) and nozzle II
(5) it connects, the nozzle I (3) and the nozzle II (5) are corresponding with the disk body I (7) and disk body II (6) respectively.
2. glue spreader according to claim 1, which is characterized in that between the nozzle I (3) and the nozzle II (5)
Centre distance between distance and the disk body I (7) and the disk body II (6) is equal.
3. glue spreader according to claim 1 or 2, which is characterized in that the two-dimension moving platform is combination electric cylinders (2),
The combination electric cylinders (2) include X-axis electric cylinders (21) and Y-axis electric cylinders (22), and wherein X-axis electric cylinders (21) are set to the gluing platform
(1) on, the Y-axis electric cylinders (22) are set on the X-axis electric cylinders (21), and the boom (4) is set to the Y-axis electric cylinders (22)
It can above and by the driving of the X-axis electric cylinders (21) and the Y-axis electric cylinders (22) be moved along X, Y-direction.
4. glue spreader according to claim 3, which is characterized in that the boom (4) is across in the Y-axis electric cylinders (22)
On "door" type structure, the nozzle I (3) and the nozzle II (5) are connected to the lower end two sides of the boom (4).
5. glue spreader according to claim 4, which is characterized in that the vertical frame in side of the boom (4) passes through connection
Block (8) is connect with the actuating station of the Y-axis electric cylinders (22).
6. glue spreader according to claim 5, which is characterized in that the side of the link block (8) and the boom (4) is perpendicular
The connection height-adjustable of straight edge frame.
7. glue spreader according to claim 6, which is characterized in that the vertical frame in side of the boom (4), which is equipped with, to be used
In the graduation mark (9) for adjusting link block (8) height.
8. glue spreader according to claim 1, which is characterized in that the disk body I (7) and disk body II (6) are located at described two
Maintenance and operation moving platform it is ipsilateral.
9. glue spreader according to claim 1, which is characterized in that the disk body I (7) and disk body II (6) are round knot
Structure.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711155775.6A CN109807003A (en) | 2017-11-20 | 2017-11-20 | A kind of glue spreader |
| TW106145230A TWI656914B (en) | 2017-11-20 | 2017-12-22 | Gluing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711155775.6A CN109807003A (en) | 2017-11-20 | 2017-11-20 | A kind of glue spreader |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109807003A true CN109807003A (en) | 2019-05-28 |
Family
ID=66599115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711155775.6A Pending CN109807003A (en) | 2017-11-20 | 2017-11-20 | A kind of glue spreader |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109807003A (en) |
| TW (1) | TWI656914B (en) |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4850382A (en) * | 1988-09-14 | 1989-07-25 | Barnes Drill Co. | Work booth for a robot |
| CN2617476Y (en) * | 2003-02-09 | 2004-05-26 | 林重在 | Self-controlling biaxial material jetter |
| CN201380132Y (en) * | 2009-02-11 | 2010-01-13 | 李永年 | Numerically controlled spraying machine |
| US20100055324A1 (en) * | 2008-08-28 | 2010-03-04 | Seiko Epson Corporation | Liquid discharge method and liquid discharge device |
| CN103567111A (en) * | 2013-11-01 | 2014-02-12 | 厦门精恒新自动化科技有限公司 | Double-dispensing-head and double-station dispensing device and dispensing method thereof |
| CN203508260U (en) * | 2014-01-28 | 2014-04-02 | 亚智系统科技(苏州)有限公司 | Adjustable type rapid-detachment spray pipe |
| CN203991144U (en) * | 2014-06-30 | 2014-12-10 | 芜湖美智空调设备有限公司 | A kind of double automatic glue dispensing mechanism |
| CN104722437A (en) * | 2015-03-09 | 2015-06-24 | 佛山市锦德机械设备有限公司 | Releasing agent full-automatic spraying mechanism used for automatic shoemaking production line |
| CN105772323A (en) * | 2014-12-18 | 2016-07-20 | 沈阳芯源微电子设备有限公司 | Semiconductor made thick photoresist film coating device and application method thereof |
| CN205570704U (en) * | 2016-05-11 | 2016-09-14 | 长春德联化工有限公司 | Gummer |
| CN106334642A (en) * | 2016-10-09 | 2017-01-18 | 无锡宏纳科技有限公司 | Wafer spraying device with height-adjustable supporting table |
| CN106647171A (en) * | 2015-11-02 | 2017-05-10 | 沈阳芯源微电子设备有限公司 | Sharing nozzle structure for two gumming units |
| CN206262757U (en) * | 2016-10-27 | 2017-06-20 | 黄财福 | A kind of reciprocal paint spraying machine of axle of four disk four |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105032711A (en) * | 2015-07-09 | 2015-11-11 | 北京中电科电子装备有限公司 | Dispensing device |
| CN106583186A (en) * | 2015-10-15 | 2017-04-26 | 沈阳芯源微电子设备有限公司 | Double-nozzle triangle glue-spraying method |
| CN106733468B (en) * | 2017-01-11 | 2018-11-23 | 新沂市瓦窑工业园区有限公司 | A kind of dispensing drying device of electronic component |
-
2017
- 2017-11-20 CN CN201711155775.6A patent/CN109807003A/en active Pending
- 2017-12-22 TW TW106145230A patent/TWI656914B/en active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4850382A (en) * | 1988-09-14 | 1989-07-25 | Barnes Drill Co. | Work booth for a robot |
| CN2617476Y (en) * | 2003-02-09 | 2004-05-26 | 林重在 | Self-controlling biaxial material jetter |
| US20100055324A1 (en) * | 2008-08-28 | 2010-03-04 | Seiko Epson Corporation | Liquid discharge method and liquid discharge device |
| CN201380132Y (en) * | 2009-02-11 | 2010-01-13 | 李永年 | Numerically controlled spraying machine |
| CN103567111A (en) * | 2013-11-01 | 2014-02-12 | 厦门精恒新自动化科技有限公司 | Double-dispensing-head and double-station dispensing device and dispensing method thereof |
| CN203508260U (en) * | 2014-01-28 | 2014-04-02 | 亚智系统科技(苏州)有限公司 | Adjustable type rapid-detachment spray pipe |
| CN203991144U (en) * | 2014-06-30 | 2014-12-10 | 芜湖美智空调设备有限公司 | A kind of double automatic glue dispensing mechanism |
| CN105772323A (en) * | 2014-12-18 | 2016-07-20 | 沈阳芯源微电子设备有限公司 | Semiconductor made thick photoresist film coating device and application method thereof |
| CN104722437A (en) * | 2015-03-09 | 2015-06-24 | 佛山市锦德机械设备有限公司 | Releasing agent full-automatic spraying mechanism used for automatic shoemaking production line |
| CN106647171A (en) * | 2015-11-02 | 2017-05-10 | 沈阳芯源微电子设备有限公司 | Sharing nozzle structure for two gumming units |
| CN205570704U (en) * | 2016-05-11 | 2016-09-14 | 长春德联化工有限公司 | Gummer |
| CN106334642A (en) * | 2016-10-09 | 2017-01-18 | 无锡宏纳科技有限公司 | Wafer spraying device with height-adjustable supporting table |
| CN206262757U (en) * | 2016-10-27 | 2017-06-20 | 黄财福 | A kind of reciprocal paint spraying machine of axle of four disk four |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201922359A (en) | 2019-06-16 |
| TWI656914B (en) | 2019-04-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190528 |
|
| RJ01 | Rejection of invention patent application after publication |