CN109797427A - A kind of KY method Sapphire Crystal Growth suspension type crucible cover and KY method Sapphire Crystal Growth device for adjusting height immediately - Google Patents
A kind of KY method Sapphire Crystal Growth suspension type crucible cover and KY method Sapphire Crystal Growth device for adjusting height immediately Download PDFInfo
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- CN109797427A CN109797427A CN201910235847.0A CN201910235847A CN109797427A CN 109797427 A CN109797427 A CN 109797427A CN 201910235847 A CN201910235847 A CN 201910235847A CN 109797427 A CN109797427 A CN 109797427A
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- lid
- hanger bar
- crucible
- hole
- crucible cover
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- 239000000725 suspension Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 40
- 230000007246 mechanism Effects 0.000 claims abstract description 47
- 238000007789 sealing Methods 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 230000033001 locomotion Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 20
- 238000010586 diagram Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 229910052594 sapphire Inorganic materials 0.000 description 9
- 239000010980 sapphire Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 6
- 229910052571 earthenware Inorganic materials 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 239000011733 molybdenum Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000009987 spinning Methods 0.000 description 6
- 230000009975 flexible effect Effects 0.000 description 5
- 238000005336 cracking Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 238000011081 inoculation Methods 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- GQWNECFJGBQMBO-UHFFFAOYSA-N Molindone hydrochloride Chemical compound Cl.O=C1C=2C(CC)=C(C)NC=2CCC1CN1CCOCC1 GQWNECFJGBQMBO-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 206010044565 Tremor Diseases 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of KY method Sapphire Crystal Growth devices, including at least crucible, suspension mechanism and crucible cover, it is characterized in that, the crucible cover includes lid, lid eaves and nut cap, lid is annular in shape, top surface is equipped with through-hole, the through-hole is hole for hoist, the cylindrical tubulose of lid eaves or tubaeform tubulose, one open end of the lid eaves and the outer circle of lid connect, the other end is free end and extends to crucible direction, nut cap is in horn-like, the connection of the inner circle of the biggish open end of nut cap and lid, the aperture of the other end is free end and extends to the opposite direction of crucible, that is lid eaves and the nut cap two sides that are respectively provided at plane where lid；The suspension mechanism can be connected on crucible cover, and crucible cover is suspended on to the top of crucible opening in working condition by suspension mechanism.
Description
Technical field
The invention belongs to sapphire crystal growth fields, and in particular to a kind of KY method Sapphire Crystal Growth crucible.
Background technique
Domestic at present and foreign countries' growing large-size sapphire is mainly based on KY method and HEM (heat-exchanging method).By long-term
Crystalline material quality verification and client use the verifying repeatedly at end, its is monocrystalline for the sapphire crystal that heat-exchanging method grows out
And brightness is unable to reach customer requirement, the especially application at LED substrate material end.Therefore it is brilliant to become growing sapphire for KY method
The main stream approach of body.
Sapphire crystal material melting point is high, and fusing point is 2050 DEG C, and growth cycle is long and process is more and complicated.Sapphire is long
Brilliant process is mainly by being inoculated with --- shouldering --- control diameter --- isometrical --- mentioning de- --- annealing and etc. completion.Sapphire crystal
Growth technique process it is various and complicated, each process of whole process belong to continuity movement, during which do not allow to interrupt, once its
There is link to interrupt or fail to meet production requirements in as soon as, then entire long crystalline substance will fail, and longer crystal just belongs to underproof
Product.
Therefore just need to provide excellent thermal insulation performance, reasonable in design and hot to obtain the sapphire crystal of high quality
The stable long crystal thermal field in field.Usual thermal field structure is by mainly by thermal fields devices such as heat preservation side screen, upper and lower heat screen, crucible, crucible covers
Part composition.
The quality problem of sapphire crystal material is mainly reflected in polycrystalline, cracking, envelope etc..Wherein polycrystalline and envelope etc. are asked
It inscribes smaller to the value influence of product；And problem of Cracking is then more serious, and the accounting of problem of Cracking is also more, crystal is once
Its value that cracks will be greatly reduced, and seriously affect the performance of enterprises.
Mention that de- technique and inoculation, shouldering gradient is improper is likely to that product is caused problem of Cracking occur.And it causes to mention de-
Failure it is most important the reason is that existing crucible cover unreasonable structural design, after being embodied in the installation of existing crucible cover
There is no enough spaces when spatial design causes crystal to mention de- to make crystal and crucible without departing from finally because of different materials stress
Difference leads to crystal cleavage；Inoculation, shouldering failure be mainly crystal growth at this stage when because the design of crucible cover structure causes
Material solution transverse gradients deficiency, shakiness in crucible crack after leading to the crystallization for growing too fast formation.
Summary of the invention
Technical problem to be solved by the invention is to provide it is a kind of design it is reasonable, convenient to use, using effect is good, improve heat
The crucible that the crucible cover and the crucible cover of field using effect use.
To achieve the above object, the present invention provides technical solution below:
It is an object of the invention to overcome the design problem of existing crucible cover, it can make to propose de- technique and more preferably complete, make earthenware
The cooperation of crucible lid and crucible is closer, reduces energy loss, so that proposing makes on a kind of KY method Sapphire Crystal Growth crucible
Suspension type novel crucible cover.
The invention discloses the crucible cover used on a kind of KY method Sapphire Crystal Growth crucible, i.e. Idiotype crucible cover,
It is characterized in that, comprising lid (4-1), lid eaves (4-2) and nut cap (4-3), the lid (4-1) annularly, lid (4-1) table
Face is equipped with through-hole, which is hole for hoist (4-5), the cylindrical tubulose of the lid eaves (4-2) or tubaeform tubulose, the lid
One open end of eaves (4-2) is connect with the outer circle of lid (4-1), and the other end is free end, and the nut cap (4-3) is in loudspeaker
Shape, the biggish open end nut cap (4-3) are connect with the inner circle of lid (4-1), and the other end is free end, the lid eaves (4-2) and
The two sides of plane where nut cap (4-3) is respectively provided at lid (4-1).
It is additionally provided with suspension mechanism, the suspension mechanism includes hanger bar A (1) and hanger bar B (3), hanger bar A (1) and is hanged
Hanging rod B (3) is in the shape of a rod, and is mutually threadedly coupled, and one end of the hanger bar A (1) is connected to the fixing end of upper end, hanger bar
One end of B (3) is connected on hole for hoist (4-5).
In actual use: hole for hoist (4-5) on lid (4-1) is equipped with 3~8, will be special different using suspension mechanism
Type crucible cover (4) is suspended on above crucible (5), and the suspension mechanism includes multiple groups hanger bar, and every group of hanger bar is divided into two kinds not
The round body of rod of same specification, i.e. hanger bar A (1) and hanger bar B (3), the hanger bar A (1) and hanger bar B (3) pass through screw thread
It is connected with each other, hanger bar A (1) is equipped with internal screw thread, and hanger bar B (3) is equipped with external screw thread, the material of the hanger bar A and hanger bar B
Tungsten or molybdenum are selected, is made using technique is forged, can be adjusted according to the needs the combination of hanger bar A (1) and hanger bar B (3)
Length can shorten the combination of hanger bar A (1) and hanger bar B (3) when needing crucible cover (4) closer apart from crucible (5)
Length；When needing crucible cover (4) remote some apart from crucible (5), the combination of hanger bar A (1) and hanger bar B (3) can be extended
Length.
The quantity of the suspension mechanism is consistent with hole for hoist (4-5) quantity, and hanger bar and hole for hoist (4-5) are corresponded in fact
Now hang crucible cover (4).
Abnormal shape crucible cover (4) material uses molybdenum, and crucible cover (4) entirety spinning is made in conjunction with Sheet Metal Forming Technology,
8 holes for hoist (4-5) are made a call in a circumferential direction simultaneously, hole for hoist (4-5) is preferably opened in use state in the plane of horizontal plane.
Anisotropic crucible cover (4) integral workblank is first screwed out with spinning process by certain angle, then uses high temperature Sheet Metal Forming Technology pair
The region of outer diameter one fixed width carries out punching press with Sheet Metal Forming Technology, and crucible cover outer diameter one fixed width part is made to form certain arc on one side
Degree, another side form a step plane, and several, this interface perforated surfaces are also simultaneously hanger bar and the stationary plane for doing lid, earthenware
Crucible lid finally opens hole at center, which is aperture (4-4).
Compared with prior art, above-mentioned crucible cover has the beneficial effect that:
1, in conjunction with Sheet Metal Forming Technology, spinning process not only ensure that the spinning that the crucible cover uses according to certain angle back-out
The consistency of crucible cover idiosome ensure that the corresponding height space of crucible cover simultaneously.
2, carrying out punching press to crucible cover outer diameter width segments using Sheet Metal Forming Technology makes ragged edge form special angle, the design
Mouth of pot and crucible top melt have been carried out good protection, ensured that the heat insulating ability of mouth of pot liquid level temperature, also really
The stabilization of mouth of pot difference radial temperature is protected, therefore the upper lateral temperature gradient in crucible solution is also guaranteed.
3, special-shaped crucible cover is connected using hanger bar hangs in heat protection screen hanger bar simultaneously with fixation, crucible cover suspension
Above crucible, thoroughly solves the problems, such as crucible cover and crucible adhesion, while hanging on crucible cover, completely may be used as needed
To obtain the space being detached from after crystal growth with crucible, 100% may finally be reached by the de- technique completion rate that mentions of crystal growth.
The links such as inoculation, shouldering and Ti Tuo are most important several links, these links all can be relevant with crucible cover,
The design of crucible cover structure is most important.
Crucible cover is that thermal field device when crystal and crystal growth is closest in entire thermal field structure other than crucible
Part, so the structure design of crucible cover is one of most important link of thermal field.
A kind of KY method Sapphire Crystal Growth device includes at least crucible (5), suspension mechanism and crucible cover (4), feature
Be, the crucible cover (4) includes lid (4-1), lid eaves (4-2) and nut cap (4-3), lid (4-1) annularly, lid (4-
1) surface is equipped with through-hole, which is hole for hoist (4-5), lid eaves (4-2) cylindrical tubulose or tubaeform tubulose, the lid
One open end of eaves (4-2) is connect with the outer circle of lid (4-1), and the other end is free end and extends to crucible (5) direction, lid
In horn-like, the biggish open end nut cap (4-3) connect cap (4-3) with the inner circle of lid (4-1), and the aperture of the other end is freedom
It holds and extends to the opposite direction of crucible (5), i.e., lid eaves (4-2) and nut cap (4-3) are respectively provided at the two of lid (4-1) place plane
Side；The suspension mechanism can be connected on crucible cover (4), and hang crucible cover (4) by suspension mechanism in working condition
In the top of crucible (5) opening.
In actual use: crucible cover (4) are connected by suspension mechanism, crucible cover (4) is suspended on to the top of crucible (5),
When working condition, crucible cover (4) is avoided to contact with crucible (5), it, can be bigger to be provided above crystal when proposing the techniques such as de-
Space, and can be avoided crucible cover and stick on crucible.
As an improvement, being additionally provided with screen support chip (7), upper screen support chip (7) is located at the top of crucible (5) opening, crucible
Lid (4) is located between crucible (5) and upper screen support chip (7), and the suspension mechanism includes hanger bar A (1) and hanger bar B (3), is hanged
Hanging rod A (1) and hanger bar B (3) are in the shape of a rod, and are mutually threadedly coupled, and one end of the hanger bar A (1) is connected to screen branch
In blade (7), one end of hanger bar B (3) is connected on hole for hoist (4-5).
In actual use: can according to need, adjust length after the combination of hanger bar A (1) and hanger bar B (3), pass through rotation
Turn screw thread, realize the pattern length of hanger bar, by changing hanger bar pattern length, thus it is possible to vary crucible cover (4) is apart from crucible
(5) distance being open, use that can be more flexible.
In order to preferably be attached crucible cover (4) with hanger bar, under type such as can be used and be attached:
1., hanger bar B (3) pass through hole for hoist (4-5), the two sides lid (4-1) are separately fixed at by bolt, consolidate
It is fixed.
2., the connecting pin of hanger bar B (3) and lid (4-1) be equipped with block (3-1), the size of block (3-1) compares hole for hoist
(4-5) greatly, when hanging lid (4-1), lid (4-1) is supported on block (3-1), prevents lid (4-1) from hanger bar B (3)
Upper landing.
As further, in order to avoid hanger bar B (3) axial-rotation, gag lever post can be equipped on block (3-1)
(3-2), the lid (4-1) are equipped with limit hole, when lid (4-1) is supported on block (3-1), gag lever post (3-2) energy
Enough across limit hole, to prevent hanger bar B (3) from axially rotating.
As a further improvement, in actual use, there are also bell (8) and furnace body (6), bell (8) is equipped with hole, crucible
(5) it is placed in furnace body (6), bell (8) can cover the opening in furnace body (6), and the suspension mechanism includes hanger bar B (3), hang
One end of hanging rod B (3) can be connected on crucible cover (4), and the other end is pierced by from the hole of bell (8), and hanger bar B (3)
One end on the outside of bell is placed in equipped with pressure cap (9), the size of pressure cap (9) is greater than the size perforated on bell (8), the hanger bar
Sealing ring (10) are equipped at the hole of B (3) and bell (8), and is equipped with water-cooled copper (12) and cools down to sealing ring (10), the suspension
Bar B (3) is able to drive crucible cover (4) up and down motion.
Equipped with cushion block, when hanger bar B (3) is moved upwards, cushion block is placed between pressure cap (9) and bell (8) and is displaced
It is fixed.
In actual use: since hanger bar B (3) has stretched out bell (8), i.e., partial suspension bar B (3) is placed in furnace body (6) outside,
Hanger bar B (3) can be lifted outward, to drive crucible cover (4) to move up, upwards after lifting, position is carried out by cushion block
It is fixed.Adjusted before can not only realizing production, and the adjusting in production process may be implemented, more increase use it is flexible
Property.
Further, it is also possible to which the adjusting in production process is accomplished by the following way: the hanger bar B (3) and bell (8) it
Between be connected through a screw thread, by rotation hanger bar B (3) drive crucible cover (4) move up and down.
The connecting pin of hanger bar B (3) and lid (4-1) are equipped with block (3-1), and the size of block (3-1) is than hole for hoist (4-
5) when greatly, hanging lid (4-1), lid (4-1) is supported on block (3-1), prevents lid (4-1) sliding from hanger bar B (3)
It falls.
Compared with prior art, the invention has the following advantages that
Can facilitate and adjust height of the crucible cover apart from crucible, and can before manufacture be adjusted in production, mention
High applicability.
Detailed description of the invention
Fig. 1 is 1 structural schematic diagram of the embodiment of the present invention.
Fig. 2 is crucible cover schematic cross-sectional view.
Fig. 3 is crucible cover overlooking structure diagram.
Fig. 4 is 2 structural schematic diagram of the embodiment of the present invention.
Fig. 5 is 3 structural schematic diagram of the embodiment of the present invention.
Fig. 6 is 4 structural schematic diagram of the embodiment of the present invention.
Fig. 7 is 5 structural schematic diagram of the embodiment of the present invention.
Fig. 8 is 7 structural schematic diagram of the embodiment of the present invention.
Fig. 9 is 8 structural schematic diagram of the embodiment of the present invention.
Figure 10 is 9 structural schematic diagram of the embodiment of the present invention.
As shown in the figure: 1 is hanger bar A, and 2 be heat protection screen, and 3 be hanger bar B, and 3-1 is block, and 3-2 is gag lever post, and 4 be earthenware
Crucible lid, 4-1 are lids, and 4-2 is lid eaves, and 4-3 is nut cap, and 4-4 is aperture, and 4-5 is hole for hoist, and 5 be crucible, and 6 be furnace body, and 7 are
Upper screen support chip, 7-1 are support chip apertures, and 8 be bell, and 9 be pressure cap, and 10 be sealing ring, and 11 be cushion block, and 12 be water-cooled copper.
Heat preservation side screen, electrode and heater in figure between crucible and furnace body are not illustrated in figure, this is conventional structure.
Specific embodiment
The following detailed description of the preferred embodiment of the present invention.
Embodiment 1: being the structural schematic diagram of the embodiment of the present invention 1 referring to Fig.1~3, a kind of
The crucible cover used on KY method Sapphire Crystal Growth crucible, i.e. Idiotype crucible cover, including lid 4-1, lid eaves
4-2 and nut cap 4-3, the lid 4-1 is annular in shape, and the surface lid 4-1 is equipped with through-hole, which is hole for hoist 4-5, the lid eaves
One open end of 4-2 cylindrical tubulose or tubaeform tubulose, the lid eaves 4-2 is connect with the outer circle of lid 4-1, another
End is free end, and the nut cap 4-3 is in horn-like, and the biggish open end nut cap 4-3 is connect with the inner circle of lid 4-1, the other end
For free end, the two sides of plane where the lid eaves 4-2 and nut cap 4-3 are respectively provided at lid 4-1.
The lid 4-1, lid eaves 4-2 and nut cap 4-3 constitute special-shaped crucible cover, are a cover-shaped body, use when
It waits, the opening closed in crucible can be covered.The small open end of the nut cap 4-3 is that aperture 4-4 facilitates decline bar when mentioning de-
Shape body.
By the way that suspension mechanism, the spacing of adjustable crucible cover and crucible is arranged, the suspension mechanism includes hanger bar A1
It is in the shape of a rod with hanger bar B3, hanger bar A1 and hanger bar B3, and be mutually threadedly coupled, one end of the hanger bar A1 is connected to
The fixing end of upper end, one end of hanger bar B3 are connected on hole for hoist 4-5.
In actual use: hole for hoist 4-5 on lid 4-1 is equipped with 3~8, using suspension mechanism by special special-shaped earthenware
Crucible lid 4 is suspended on 5 top of crucible, and the suspension mechanism includes multiple groups hanger bar, and every group of hanger bar is divided into two kinds of different sizes
The round body of rod, i.e. hanger bar A1 and hanger bar B3, the hanger bar A1 and hanger bar B3 are connected with each other by screw thread, hanger bar A1
Equipped with internal screw thread, hanger bar B3 is equipped with external screw thread, the material selection tungsten or molybdenum of the hanger bar A and hanger bar B, using forging work
Skill is made, and can be adjusted according to the needs the pattern length of hanger bar A1 and hanger bar B3, when need crucible cover 4 apart from crucible
5 it is closer when, the pattern length of hanger bar A1 and hanger bar B3 can be shortened；When needing crucible cover 4 remote apart from crucible 5
When, the pattern length of hanger bar A1 and hanger bar B3 can be extended.
The quantity of the suspension mechanism is consistent with hole for hoist 4-5 quantity, and hanger bar and hole for hoist 4-5 correspond realization and hang
Hang crucible cover 4.
Abnormal shape 4 material of crucible cover uses molybdenum, and the whole spinning of crucible cover 4 is made in conjunction with Sheet Metal Forming Technology, simultaneously
8 hole for hoist 4-5 are made a call in a circumferential direction, hole for hoist 4-5 is preferably opened in use state in the plane of horizontal plane.
Anisotropic 4 integral workblank of crucible cover is first screwed out with spinning process by certain angle, then external with high temperature Sheet Metal Forming Technology
The region of diameter one fixed width carries out punching press with Sheet Metal Forming Technology, and crucible cover outer diameter one fixed width part is made to form certain radian on one side,
Another side forms a step plane, and several, this interface perforated surfaces are also simultaneously hanger bar and the stationary plane for doing lid, crucible
Lid finally opens hole at center, which is aperture 4-4.
Embodiment 2: being the structural schematic diagram of the embodiment of the present invention 2, compared with Example 1, the present embodiment referring to Fig. 4
Difference is: being attached between hanger bar B3 and lid 4-1 by bolt, the bolt is made of tungsten or molybdenum material.
Hanger bar B3 passes through lid 4-1, fixing bolt is distinguished in the two sides lid 4-1, by the bolt of two sides on lid 4-1
It compresses, has reached fixation.
Embodiment 3: being the structural schematic diagram of the embodiment of the present invention 3, compared with Example 1, the present embodiment referring to Fig. 5
Difference is: the connecting pin of hanger bar B3 and lid 4-1 is equipped with block 3-1, and actual working state, hanger bar B3 is in a vertical shape,
Under the effect of gravity, lid is fallen on block 3-1, and block 3-1 is supported lid 4-1, i.e., lid 4-1 is suspended on block 3-
On 1, the block is made of tungsten or molybdenum material.
Embodiment 4: being the structural schematic diagram of the embodiment of the present invention 4, compared with Example 3, the present embodiment referring to Fig. 6
Difference is: block 3-1 is equipped with gag lever post 3-2, and lid 4-1 is equipped with the limit hole that can pass through gag lever post 3-2, lid 4-
1 when falling in block 3-1, and gag lever post 3-2 can pass through limit hole, to prevent hanger bar B3 from axially rotating.
Embodiment 5: referring to Fig. 7, it is the structural schematic diagram of the embodiment of the present invention 5, passes through between hanger bar A and hanger bar B
It is threadedly coupled, by rotation, the pattern length for adjusting hanger bar A and hanger bar B can be facilitated.
Embodiment 6: being the structural schematic diagram of the embodiment of the present invention 6, it is blue that present embodiment discloses a kind of KY methods referring to Fig.1
Jewel single-crystal growing apparatus, includes at least crucible 5, suspension mechanism and crucible cover 4, and the crucible cover 4 includes lid 4-1, lid eaves
4-2 and nut cap 4-3, lid 4-1 is annular in shape, and the surface lid 4-1 is equipped with through-hole, which is hole for hoist 4-5, and lid eaves 4-2 is in column
One open end of the tubulose of shape or tubaeform tubulose, the lid eaves 4-2 is connect with the outer circle of lid 4-1, and the other end is certainly
Extending from end and to 5 direction of crucible, in horn-like, the biggish open end nut cap 4-3 is connect nut cap 4-3 with the inner circle of lid 4-1,
The aperture 4-4 of the other end is free end and extends to the opposite direction of crucible 5 that i.e. lid eaves 4-2 and nut cap 4-3 are respectively provided at lid 4-
The two sides of 1 place plane；The suspension mechanism can be connected on crucible cover 4, and crucible cover 4 is passed through suspension in working condition
Mechanism is suspended on the top of the opening of crucible 5, and keeps crucible cover 4 and crucible for contactless state.
Be additionally provided with screen support chip 7, upper screen support chip 7 is located at the top of the opening of crucible 5, crucible cover 4 be located at crucible 5 with it is upper
Shielding between support chip 7, the suspension mechanism includes hanger bar A1 and hanger bar B3, and hanger bar A1 and hanger bar B3 are in the shape of a rod,
And be mutually threadedly coupled, one end of the hanger bar A1 is connected on screen support chip 7, and one end of hanger bar B3 is connected to lifting
On the 4-5 of hole.
In actual use: crucible cover 4 being connected by suspension mechanism, crucible cover 4 is suspended on to the top of crucible 5, work shape
When state, crucible cover 4 is avoided to contact with crucible 5, when proposing the techniques such as de-, bigger space can be provided for crystal top, and
It can be avoided crucible cover to stick on crucible.
At the same time it can also as needed, length after the combination of adjusting hanger bar A1 and hanger bar B3, by rotating screw thread,
Realize hanger bar pattern length, pass through change hanger bar pattern length, thus it is possible to vary crucible cover 4 apart from crucible 5 be open away from
From use that can be more flexible.
Embodiment 7: being the structural schematic diagram of the embodiment of the present invention 7, present embodiment discloses a kind of KY referring to Fig. 8~10
Method Sapphire Crystal Growth device, including furnace body 6, crucible 5, suspension mechanism, upper screen support chip 7-1, crucible cover 4 and bell 8, furnace
Opening is equipped with above body, bell can cover the opening closed in furnace body, and furnace body inner cavity is formed to the cavity of opposing seal, the earthenware
Crucible is placed in cavity, and the upper screen support chip is located between crucible and bell, and the crucible cover is located at screen support chip and crucible
Between, upper screen support chip is equipped with through-hole, and the suspension mechanism is in the shape of a rod, strip or column, the suspension mechanism can pass through
The through-hole of upper screen support chip, one end of which is fixed on crucible cover, the other end passes through bell and is placed in furnace body lumen outer, the suspension
Mechanism is placed in one end outside furnace body equipped with blocking mechanism, can stop or prevent suspension mechanism from falling into furnace body inner cavity, and
And by lifting suspension mechanism, crucible cover can be driven to move up and down, to change the distance between crucible cover and crucible, the earthenware
Crucible lid 4 includes lid 4-1, lid eaves 4-2 and nut cap 4-3, and lid 4-1 is annular in shape, and the surface lid 4-1 is equipped with through-hole, which is
Hole for hoist 4-5, lid eaves 4-2 cylindrical tubulose or tubaeform tubulose, an open end of the lid eaves 4-2 and lid 4-1
Outer circle connection, the other end be free end and to 5 direction of crucible extend, nut cap 4-3 be in horn-like, the biggish opening of nut cap 4-3
End is connect with the inner circle of lid 4-1, and the aperture 4-4 of the other end is free end and extends to the opposite direction of crucible 5, i.e. lid eaves 4-2
The two sides of plane where being respectively provided at lid 4-1 with nut cap 4-3；The suspension mechanism can be connected on crucible cover 4, and in work
Make state and crucible cover 4 is suspended on the top that crucible 5 is open by suspension mechanism, and it is non-contact for keeping crucible cover 4 and crucible
State.
Embodiment 8: compared with Example 7, the difference of the present embodiment is, the suspension mechanism being placed in outside furnace body is equipped with
The size of pressure cap, pressure cap is beaten than the pore size on bell, and pressure cap can be stuck on the outside of bell, and between suspension mechanism and bell
Equipped with sealing device, it is equipped with water-cooled copper on the outside of sealing device, is cooled down to sealing device.
When lifting suspension mechanism, in order to fix the position of suspension mechanism, cushion block can be set, the effect of cushion block is that pad is being pressed
Between cap and bell, the distance between crucible cover and crucible can be changed immediately in process of production, use is more flexible.
Embodiment 9: compared with Example 7, the difference of the present embodiment is, is threadedly coupled between suspension mechanism and bell,
And it is additionally provided with sealing device between suspension mechanism and bell, water-cooled copper is equipped on the outside of sealing device, cools down to sealing device.
When production, it can be used in production status by the distance between pivoting hitch mechanism realization crucible cover and crucible
It is more flexible convenient.
Above-described is only the present invention/invention preferred embodiment, it is noted that for the ordinary skill of this field
For personnel, without departing from the concept of the premise of the invention, several changes and improvements can also be made, these belong to this
The protection scope of invention.
Claims (10)
1. a kind of KY method Sapphire Crystal Growth device includes at least crucible (5), suspension mechanism and crucible cover (4),
It is characterized in that, the crucible cover (4) includes lid (4-1), lid eaves (4-2) and nut cap (4-3),
Annularly, the lid surface (4-1) is equipped with through-hole to lid (4-1), which is hole for hoist (4-5),
Lid eaves (4-2) cylindrical tubulose or tubaeform tubulose, an open end and lid (4-1) of the lid eaves (4-2)
Outer circle connection, the other end be free end and to crucible (5) direction extend,
Nut cap (4-3) is in horn-like, and the biggish open end nut cap (4-3) is connect with the inner circle of lid (4-1), the aperture of the other end
(4-4) is free end and extends to the opposite direction of crucible (5),
That is lid eaves (4-2) and nut cap (4-3) two sides that are respectively provided at plane where lid (4-1)；
The suspension mechanism can be connected on crucible cover (4), and hang crucible cover (4) by suspension mechanism in working condition
In the top of crucible (5) opening.
2. KY method Sapphire Crystal Growth device as described in claim 1, which is characterized in that screen support chip (7) are additionally provided with,
Upper screen support chip (7) is located at the top of crucible (5) opening, and crucible cover (4) is located between crucible (5) and upper screen support chip (7),
The suspension mechanism includes hanger bar A (1) and hanger bar B (3), and hanger bar A (1) and hanger bar B (3) are in the shape of a rod, and
It is mutually threadedly coupled, one end of the hanger bar A (1) is connected on screen support chip (7), and one end of hanger bar B (3) is connected to
On hole for hoist (4-5).
3. KY method Sapphire Crystal Growth device as claimed in claim 2, which is characterized in that hanger bar B (3) passes through hole for hoist
(4-5) is separately fixed at the two sides lid (4-1) by bolt, is fixed；
Alternatively, the connecting pin of hanger bar B (3) and lid (4-1) are equipped with block (3-1), the size of block (3-1) compares hole for hoist
(4-5) greatly, when hanging lid (4-1), lid (4-1) is supported on block (3-1), prevents lid (4-1) from hanger bar B (3)
Upper landing.
4. KY method Sapphire Crystal Growth device as claimed in claim 3, which is characterized in that block (3-1) is equipped with limit
Bar (3-2), the lid (4-1) are equipped with limit hole, when lid (4-1) is supported on block (3-1), the gag lever post (3-2)
Limit hole can be passed through, to prevent hanger bar B (3) from axially rotating.
5. KY method Sapphire Crystal Growth device as described in claim 1, which is characterized in that
It is additionally provided with bell (8) and furnace body (6), bell (8) is equipped with hole, and crucible (5) is placed in furnace body (6), and bell (8) can cover
Opening in furnace body (6),
The suspension mechanism includes hanger bar B (3), and one end of hanger bar B (3) can be connected on crucible cover (4), the other end from
It is pierced by the hole of bell (8), and hanger bar B (3) is placed in one end on the outside of bell equipped with pressure cap (9), the size of pressure cap (9) is big
In the size perforated on bell (8), sealing ring (10) are equipped at the hole of the hanger bar B (3) and bell (8), and are equipped with water cooling
Copper pipe (12) cools down to sealing ring (10), and the hanger bar B (3) is able to drive crucible cover (4) up and down motion.
6. KY method Sapphire Crystal Growth device as claimed in claim 5, which is characterized in that be equipped with cushion block, hanger bar B (3)
When moving upwards, cushion block is placed between pressure cap (9) and bell (8) and carries out displacement fixation.
7. KY method Sapphire Crystal Growth device as claimed in claim 6, which is characterized in that the hanger bar B (3) and bell
(8) it is connected through a screw thread between, drives crucible cover (4) to move up and down by rotation hanger bar B (3).
8. the KY method Sapphire Crystal Growth device as described in claim 5,6 or 7, which is characterized in that hanger bar B (3) and lid
The connecting pin of body (4-1) be equipped with block (3-1), the size of block (3-1) greatly than hole for hoist (4-5), hang lid (4-1) when,
Lid (4-1) is supported on block (3-1), prevents lid (4-1) from sliding from hanger bar B (3).
9. a kind of KY method Sapphire Crystal Growth suspension type crucible cover for adjusting height immediately, which is characterized in that
Comprising lid (4-1), lid eaves (4-2) and nut cap (4-3),
Annularly, the lid surface (4-1) is equipped with through-hole to the lid (4-1), which is hole for hoist (4-5),
The cylindrical tubulose of the lid eaves (4-2) or tubaeform tubulose, an open end of the lid eaves (4-2) and lid
The outer circle of (4-1) connects, and the other end is free end,
The nut cap (4-3) is in horn-like, and the biggish open end nut cap (4-3) is connect with the inner circle of lid (4-1), and the other end is
The two sides of plane where free end, the lid eaves (4-2) and nut cap (4-3) are respectively provided at lid (4-1).
10. the KY method Sapphire Crystal Growth as claimed in claim 9 suspension type crucible cover for adjusting height immediately, feature
It is, be additionally provided with suspension mechanism, the suspension mechanism includes hanger bar A (1) and hanger bar B (3), hanger bar A (1) and hanger bar
B (3) is in the shape of a rod, and is mutually threadedly coupled, and one end of the hanger bar A (1) is connected to the fixing end of upper end, hanger bar B (3)
One end be connected on hole for hoist (4-5).
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| CN201910235847.0A CN109797427A (en) | 2019-03-27 | 2019-03-27 | A kind of KY method Sapphire Crystal Growth suspension type crucible cover and KY method Sapphire Crystal Growth device for adjusting height immediately |
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| CN201910235847.0A CN109797427A (en) | 2019-03-27 | 2019-03-27 | A kind of KY method Sapphire Crystal Growth suspension type crucible cover and KY method Sapphire Crystal Growth device for adjusting height immediately |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111772367A (en) * | 2019-12-10 | 2020-10-16 | 汨罗市福缘新材料有限公司 | Damp-proof device for graphite crucible |
| CN112410868A (en) * | 2020-12-02 | 2021-02-26 | 福建福晶科技股份有限公司 | High-quality BIBO crystal growth method |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040106816A (en) * | 2003-06-11 | 2004-12-18 | 김형준 | Graphite crucible with the cone shape at the bottom part, which is used in growing SiC single crystal |
| TWM307625U (en) * | 2006-07-19 | 2007-03-11 | Wafer Works Corp | Improved structure of crucible cover for crystal growing furnace |
| JP2007204309A (en) * | 2006-02-01 | 2007-08-16 | Matsushita Electric Ind Co Ltd | Single crystal growth device and single crystal growth method |
| CN101914805A (en) * | 2010-09-07 | 2010-12-15 | 王楚雯 | Directional solidification furnace with improved crucible cover part |
| CN203923451U (en) * | 2014-04-28 | 2014-11-05 | 江苏中电振华晶体技术有限公司 | A kind of mold-hoisting installation of leading embrane method growth for sapphire crystal |
| CN104499045A (en) * | 2014-12-31 | 2015-04-08 | 华中科技大学 | Kyropoulos-method sapphire crystal growth furnace |
| CN204434772U (en) * | 2014-12-23 | 2015-07-01 | 福建鑫晶精密刚玉科技有限公司 | A kind of hundred feather weight above Sapphire Crystal Growth tungsten crucible lid structure |
| CN105040101A (en) * | 2015-07-16 | 2015-11-11 | 中山兆龙光电科技有限公司 | Crucible lid and support ring mechanism for variable gradient sapphire single crystal growth |
| CN204982130U (en) * | 2015-07-21 | 2016-01-20 | 北京世纪金光半导体有限公司 | PVT method growth carborundum crystal enlarges diameter control interface's crucible structure |
| CN205603721U (en) * | 2016-04-06 | 2016-09-28 | 四川鑫通新材料有限责任公司 | Bubble is thought of a way and is avoided device of fuse -element and crucible adhesion |
| CN205659693U (en) * | 2016-06-08 | 2016-10-26 | 国家电网公司 | Novel laboratory is with silver -colored crucible lid |
| CN209669395U (en) * | 2019-03-27 | 2019-11-22 | 石河子市鑫磊光电科技有限公司 | A kind of KY method Sapphire Crystal Growth suspension type crucible cover and KY method Sapphire Crystal Growth device for adjusting height immediately |
-
2019
- 2019-03-27 CN CN201910235847.0A patent/CN109797427A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20040106816A (en) * | 2003-06-11 | 2004-12-18 | 김형준 | Graphite crucible with the cone shape at the bottom part, which is used in growing SiC single crystal |
| JP2007204309A (en) * | 2006-02-01 | 2007-08-16 | Matsushita Electric Ind Co Ltd | Single crystal growth device and single crystal growth method |
| TWM307625U (en) * | 2006-07-19 | 2007-03-11 | Wafer Works Corp | Improved structure of crucible cover for crystal growing furnace |
| CN101914805A (en) * | 2010-09-07 | 2010-12-15 | 王楚雯 | Directional solidification furnace with improved crucible cover part |
| CN203923451U (en) * | 2014-04-28 | 2014-11-05 | 江苏中电振华晶体技术有限公司 | A kind of mold-hoisting installation of leading embrane method growth for sapphire crystal |
| CN204434772U (en) * | 2014-12-23 | 2015-07-01 | 福建鑫晶精密刚玉科技有限公司 | A kind of hundred feather weight above Sapphire Crystal Growth tungsten crucible lid structure |
| CN104499045A (en) * | 2014-12-31 | 2015-04-08 | 华中科技大学 | Kyropoulos-method sapphire crystal growth furnace |
| CN105040101A (en) * | 2015-07-16 | 2015-11-11 | 中山兆龙光电科技有限公司 | Crucible lid and support ring mechanism for variable gradient sapphire single crystal growth |
| CN204982130U (en) * | 2015-07-21 | 2016-01-20 | 北京世纪金光半导体有限公司 | PVT method growth carborundum crystal enlarges diameter control interface's crucible structure |
| CN205603721U (en) * | 2016-04-06 | 2016-09-28 | 四川鑫通新材料有限责任公司 | Bubble is thought of a way and is avoided device of fuse -element and crucible adhesion |
| CN205659693U (en) * | 2016-06-08 | 2016-10-26 | 国家电网公司 | Novel laboratory is with silver -colored crucible lid |
| CN209669395U (en) * | 2019-03-27 | 2019-11-22 | 石河子市鑫磊光电科技有限公司 | A kind of KY method Sapphire Crystal Growth suspension type crucible cover and KY method Sapphire Crystal Growth device for adjusting height immediately |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111772367A (en) * | 2019-12-10 | 2020-10-16 | 汨罗市福缘新材料有限公司 | Damp-proof device for graphite crucible |
| CN112410868A (en) * | 2020-12-02 | 2021-02-26 | 福建福晶科技股份有限公司 | High-quality BIBO crystal growth method |
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