CN109791865A - Axial electron gun - Google Patents
Axial electron gun Download PDFInfo
- Publication number
- CN109791865A CN109791865A CN201780054490.5A CN201780054490A CN109791865A CN 109791865 A CN109791865 A CN 109791865A CN 201780054490 A CN201780054490 A CN 201780054490A CN 109791865 A CN109791865 A CN 109791865A
- Authority
- CN
- China
- Prior art keywords
- cathode
- electron gun
- axial
- clamper
- secondary cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/15—Cathodes heated directly by an electric current
- H01J1/18—Supports; Vibration-damping arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H01J1/26—Supports for the emissive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
It is a kind of axial direction electron gun include main cathode (13) and secondary cathode (20), it is characterized in that, in order to keep settling position of the secondary cathode (20) relative to the electron beam axis of axial rifle, the bracket (21) shaped using one, it is made of polycrystalline tungsten wire, and applies pulsating volage between cathode to bombard the secondary cathode of the cathode having electronic.
Description
Technical field
The invention belongs to the production fields of new material and coating, and are related to the equipment of electron beam technology, especially quilt
It is designed for the electron gun of electron beam heating, the fusing and evaporation of vacuum or the material in reaction gas atmosphere.
Background technique
Electron gun with linear thermionic cathode be it is known, especially in Ukraine patent of invention No.21440A
(B.A.Movchan、V.A.Timashov、Ye.L.Piyuk)、No.43927(B.A.Movchan、O.Ya.Gavrilyuk)、
No.93182 (V.A.Timashov, O.L.Zhdanov, S.I.Ryabenko, A.A.Tsepkalov, S.Berns) and other hairs
Electron gun those of described in bright patent.Its structure is characterized in that beam guidance, accelerating anode and including placement or cathode
Plate, insulator, cathode holder and focusing electrode cathode external member.Focusing electrode and linear thermionic cathode by coaxial placement, and
It is the reason of these electron guns are named as axial rifle.
In addition, axial electron gun is widely used based on ZrO2、Gd2O3Or other oxidations with heat insulating properties
Electron beam deposition processing of the ceramic material of object on the turbo blade of gas turbine.New material in mass production volume
Production with coating assumes to obtain the final products with uniform physics and mechanical attributes and identical performance.Only
When electron gun keeps technical treatment parameter constant within the considerable time of its service life, it can just meet these requirements.
Currently, it may insure that stablizing for the electron gun with Known designs is grasped by using the cathode made of single-crystal tungsten
Make, wherein crystal growth axis is precisely aligned about the working surface of cathode.This is led to rifle itself and is made using such rifle
Product high cost.If some problems will be will appear using the cathode made of cheaper polycrystalline tungsten.In high temperature
Effect under, cathode changes its shape, this causes it to be displaced from the home position in the electron-optical system of rifle, and causes
The change of focusing and the positioning of electron beam.Due to these effects, electron beam may hit the internal part of beam guidance to lead
It causes it then to melt, and leads to the flash of light (flashing) of the accelerating anode of rifle.The parametric stability of axial electron gun and behaviour
Make reliability then significantly to degenerate.
Therefore, the general defect of the Known designs of the electron gun of the linear thermionic cathode with polycrystalline tungsten is the low steady of its operation
It is qualitative, this is because the misalignment of electron beam caused by the high temperature deformation of cathode, and therefore cause it about the light of electron gun
The position change of axis.Therefore, the purpose of present invention disclosed is to improve electron gun and ensuring the stability of its parameter
The reliability of operation.V.A.Timashov and the United States Patent (USP) for transferring United Technologies Corporation
Axial electron gun designed by the common author of No.08159118 has been selected as prototype.
Summary of the invention
The technical assignment of present invention disclosed is using the auxiliary cathode of polycrystalline tungsten in axial electron gun
Wider operating voltage range in ensure stable electron beam.
The invention discloses a kind of electron gun, particularly including main cathode and secondary cathode, and be characterized in that in this way
A kind of design, wherein the clamper using graphics shape (figure-shpaed) keeps secondary cathode relative to the electricity of axial rifle
The settling position of beamlet axis, and pulse voltage is applied between two cathodes for the electron bombardment of secondary cathode.Axial electricity
Sub- rifle (Fig. 1) is made of beam guidance (1), and beam guidance (1) includes deflection system (2) and is used for the water with accelerating anode (3)
The flange that cooling main body is coupled, the accelerating anode (3) include focus coil (4) and replaceable anode (5).Cathode plate (7)
It is placed on accelerating anode (3) by three high voltage insulators (6), and cathode external member (8) is placed in cathode plate (7)
On.
Cathode external member (Fig. 2) indicates what two current feeds (11) were adhered to therewith by two plane ceramic insulators (10)
Main body (9), then protection of the main tungsten cathode (13) by heat shielding (14), and main focusing electrode (15) utilizes clamping
(12) it is placed on current feed (11).Secondary (master) focusing electrode (19) is also by coupling nut (16), heat shielding (17)
It is fixed on main body (9) with clamping (18).Secondary (master) cathode (20) has ring-shaped groove on its cylindrical side surface, and
It is placed between secondary focusing electrode (19) and clamping (18) using the clamper of graphics shape, the clamper (21) is by tungsten
Silk is made and is shaped as plane regular triangle (Fig. 3 a), quadrangle (Fig. 4 b), pentagon (Fig. 3 c) or hexagon (figure
3d).The clamper (21) ensures the position of secondary cathode (20) is placed in the middle and is fixed on the hole of secondary focusing electrode (19)
Groove in.
In the prototype electron gun described in United States Patent (USP) No.08159118, secondary cathode is placed in using annulus
Between focusing electrode and clamping (Fig. 4).In the United States Patent (USP) for transferring Westinghouse Electric Corporation
Axial electron gun and similar equipment described in No.3556600 are known.In such devices, secondary cathode utilizes
Three thin tungsten torque arm (torsion) is fixed, the torque arm have diameter reach 1mm bar strip form, and about
It is installed in the corresponding hole in the exterior side surfaces of cathode with 120 ° of angle each other.
With with the placed in the middle of the graphics shape by way of surface ga(u)ge then triangle, quadrangle, pentagon or hexagon
To replace cathode with round placed in the middle ring or with the cathode of torque arm, the technical assignment of defined is understood clamper
Certainly.Secondary cathode has ring-shaped groove on cylindrical side surface.Focusing electrode also have the mounting sheet of cathode respective depth and
The groove of diameter.The clamper of graphics shape is placed on the groove of cathode, and then the cathode with clamper is placed on
In the groove of focusing electrode, and (Fig. 6) is fixed by additional clamping wherein.Choosing for the clamper of specific shape
Select the diameter ratio depending on secondary cathode and focusing electrode.When heated, deformation occurs for the secondary cathode of polycrystalline.But clamper
Face (face) initially as spring works, to the change of compensated cathode shape and keep cathode relative to the electricity of axial rifle
The position (Fig. 7) of beamlet axis.It is that author is implemented studies have shown that new graphics shape clamper compensation due to thermal expansion and
The change of tungsten cathode size caused by being heat-shrinked.This technical solution allows successfully application to pass through powder pressing
The cheaper tungsten cathode that the method for (powder pressing) is produced.
When using there is ring-shaped groove and be shaped the secondary cathode of cyclic fixation electrode (Fig. 4), due to as yin
The result of the deformation of pole and the loss of Electron Beam Focusing occurred, it has been observed that the frequent interruption of production process.Then at certain
In a little situations, cathode can drop out and by HV power supply short circuit, so as to cause the complete stopping of technical treatment, even with spare rifle
It is also impossible.As a result, all components being mounted on inside processing chamber housing must all be directed to reprocessing (remove and
Again apply coating).In addition, at the end of the evaporation process of ceramic coating, observe the fixing clamp holder for being shaped cyclization and
The spurious effect (spurious effect) of the pollution in the gap between secondary cathode in the region of ring-shaped groove.This effect
Should be as work chamber's (deposition chambers) with rifle chamber between remnant oxygen pressure difference and caused by.Usually
For, heat-stable ceramic is dielectric at room temperature.For this reason, between relatively uniform between annular holder and secondary cathode
The formation of dielectric layer in gap leads to such situation, i.e., after axial rifle is turned off and is cooled down completely, for the electricity
The recovery of specified current potential -20kV in the destruction of dielectric layer and secondary cathode needs a very long time.
When using by three torque arms fixed secondary cathode (Fig. 5), due to the deformation of cathode and torque arm itself
The interruption of caused Electron Beam Focusing occurs after the brief operation of electron gun.Then these deformation are opposite with cathode
Change in the position of the optical axis of electron gun.Due to the interruption of focusing, the number of electrons for hitting accelerating anode increases, and causes
The frequent electric discharge of acceleration voltage.Then the evaporation rate of ceramic ingot significantly reduces, and ceramic coating is in the deposition on component
Between increase.
When secondary cathode is fixed by the clamper of ring-shaped groove and plane regular triangle (Fig. 6), for cathode
Entire estimation service life realize the operational stability of axial electron gun and significantly improve.
Until the end of the estimation service life of rifle, due to the physical degradation of cathode, it has been observed that Electron Beam Focusing
It is certain to degenerate.But the frequency of focusing and the electric discharge of acceleration voltage stills remain in acceptable limitation.By using flat
The clamper of face regular triangle allows the geometry in the gap between clamper and cathode to reduce.As a result, realizing gap
On the spurious effect of coating deposition substantially reduce, and compared with circular clamper, in the complete of axial electron gun
Removing look genuine loss of time of layer of dielectric before entering nominal mode after complete cooling is also significantly reduced.
Further research for the optimization of clamper shape has been drawn a conclusion, regular shape (quadrangle, pentagon or six
Side shape) cathode holder application also assure that the service life of cathode is no less than 100 hours.Then the probability of malfunction of electron gun
In all cases without departing from percent 10.It has determined for quadrangle, pentagon or hexagon clamper shape, is clamping
Lack apparent correlation entirely due to the quality and clamper of tungsten wire make between device shape and the probability of malfunction of axial rifle
Manufacturability.In this case, in production plane regular geometric shapes (triangle, quadrangle, pentagon or hexagon)
Clamper when, term " manufacturability " involve ensuring that the tungsten wire with specified diameter occur predetermined angular bending without shape
At the equipment capability of face checking.
Experiment further defines the following contents.Depending on its diameter (and being therefore to depend on its quality), secondary cathode
There are optimum shapes for clamper.It also determines and shows either when starting to process still in the close of ceramic material in practice
It in the steady state process stage for collecting evaporation, in terms of " clamper shape-axial direction electron gun operating reliability " relationship, and considers
In rifle chamber without departing from 0.67Pa (5x10-3Torr between the clamper and secondary cathode under remnant oxygen pressure)
Most effective group of the quantity of the deposition of looking genuine of ceramic layer in gap, cathode diameter and clamper shape is combined into as follows:
Cathode diameter for 8-10mm is triangle；
Cathode diameter for 10-14mm is triangle or quadrangle；
Cathode diameter for 14-16mm is quadrangle；
For 16-18mm cathode diameter when pentagon；
It is hexagon for 18mm and bigger cathode diameter.
For secondary cathode electron bombardment usually using stabilized constant voltage.But due to main cathode (13) with
Small spacing and inadequate vacuum level between secondary cathode (20), may occur between two cathodes it is spontaneous from
Son-plasma discharge.These electric discharge will lead to secondary cathode uncontrolled heating and electron gun beam current not by
The raising of control.This process in order to prevent, it is proposed that for the electron bombardment application pulse voltage of secondary cathode (20).This
One voltage discharges the plasma arc newly initiated is extinguished, and the uncontrolled process that will be prevented in axial electron gun,
And the operation of electron gun will be more stable.Due to the relatively large quality of secondary cathode (20), pulsed bombardment voltage will not
The corresponding pulses of its temperature are caused to change, therefore the pulse of the beam current of axial electron gun will not occur.
Detailed description of the invention
It will become better understood with reference to the accompanying drawings present invention disclosed, but the present invention is not limited by the accompanying figures, wherein attached drawing
The following contents is shown:
Fig. 1 shows the vertical section of the essential building blocks of axial electron gun.
Fig. 2 shows the vertical sections of the structure of cathode external member.
Fig. 3 a-d shows position of the clamper for being shaped as plane regular polygon relative to secondary cathode.
Fig. 4 shows the vertically and horizontally section of the installation profile using the secondary cathode of O-ring.
Fig. 5 shows the vertically and horizontally section of the installation profile using the secondary cathode of torsion rod holder.
Fig. 6 shows vertically and horizontally cuing open for the secondary cathode for utilizing the installation profile for being shaped as plane regular triangle
Face.
Fig. 7 shows using the clamper for being shaped as plane regular triangle the high temperature deformation for compensating secondary cathode.
Fig. 8 shows the relational graph between the runing time of axial electron gun and the fastening method of secondary cathode.
Specific embodiment
Axial electron gun (Fig. 1) including cathode external member (Fig. 2) operates as follows.The alternating voltage of 4-10VAC is applied to
Current feed (11) so that the heated current within the scope of 20 to 80A flow through main tungsten cathode (13) and by its
Heating.Bombarding voltage in -0.5 to -2.5kV range is applied between main cathode (13) and secondary cathode (20).
The secondary cathode of electron bombardment that issues from main cathode and it is heated to about 2800 DEG C of temperature.Secondary cathode (20)
Heating intensity depends on the heated current and bombarding voltage of main cathode (13).Acceleration voltage quilt within the scope of 18-30kV
And being applied to the clamper by being shaped as plane regular polygon between the secondary cathode (20) and anode (5) of fixation.?
Under the effect of this voltage, electronics leaves cathode (20), is focused electrode (15) focusing, and by accelerating anode (5)
Hole advances to the beam guidance of axial electron gun (1).The electron beam formed in this way is focused coil (4) and additionally gathers
Coke, and deflected system (2) deflection is in suitable direction.Deflection system also implements the scanning of electron beam.In this way, by changing
Become the numerical value of the heated current of main cathode (13), it is possible to which controlling the bombarding current of secondary cathode (20), there are also rifle beam currents
Numerical value.
Industrial feasibility
Fig. 8 shows the relationship between the runing time of axial electron gun in hours and the fastening method of secondary cathode
Figure.
1, it is fastened by being shaped the cathode of the clamper of cyclization.
2, it is fastened by the cathode of three separated torque arms.
3, it is fastened by the cathode of the clamper of disclosed regular triangle.
The given disclosed technical solution that illustrates ensures the axial electron gun of operation in the normal mode
Run duration increases three times and more compared with prototype, and increase is about compared with fastening secondary cathode by torque arm
1.5 again.
Claims (according to the 19th article of modification of treaty)
1. it is a kind of axial direction electron gun, including main cathode, secondary cathode, accelerating anode, beam guidance, focus coil, deflection system,
Power supply system and vacuum system, which is characterized in that there is the form of plane regular triangle, quadrangle, pentagon or hexagon
The clamper of the graphics shape made of polycrystalline tungsten wire used and be placed on the annular on the cylindrical side surface of cathode
In groove.
2. axial direction electron gun according to claim 1, wherein for the electron bombardment of secondary cathode, secondary cathode with
Apply pulse voltage between main cathode.
Claims (2)
1. it is a kind of axial direction electron gun, including main cathode, secondary cathode, accelerating anode, beam guidance, focus coil, deflection system,
Power supply system and vacuum system, which is characterized in that there is the form of plane regular triangle, quadrangle, pentagon or hexagon
The clamper of the graphics shape made of polycrystalline tungsten wire be used for the electron beam axis for keeping secondary cathode relative to axial rifle
Settling position, and be placed in the ring-shaped groove on the cylindrical side surface of cathode.
2. axial direction electron gun according to claim 1, wherein for the electron bombardment of secondary cathode, secondary cathode with
Applying between main cathode ensures to initiate ion-plasma discharge pulse electricity between two cathodes of moment extinguishing at it
Pressure.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| UAA201609313 | 2016-09-07 | ||
| UAA201609313A UA113827C2 (en) | 2016-09-07 | 2016-09-07 | Axial Electron Cannon |
| PCT/UA2017/000064 WO2018048376A1 (en) | 2016-09-07 | 2017-06-09 | Axial electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109791865A true CN109791865A (en) | 2019-05-21 |
| CN109791865B CN109791865B (en) | 2021-02-23 |
Family
ID=58503834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780054490.5A Active CN109791865B (en) | 2016-09-07 | 2017-06-09 | Axial electron gun and method for stabilizing electron beam in axial electron gun |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US10636617B2 (en) |
| EP (1) | EP3474307A4 (en) |
| JP (1) | JP6947436B2 (en) |
| CN (1) | CN109791865B (en) |
| CA (1) | CA3036261C (en) |
| RU (1) | RU2699765C1 (en) |
| SG (1) | SG11201901964UA (en) |
| UA (1) | UA113827C2 (en) |
| WO (1) | WO2018048376A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6636472B2 (en) | 2017-02-28 | 2020-01-29 | 株式会社日立ハイテクノロジーズ | Electron source and electron beam device using the same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1572328A (en) * | 1924-06-11 | 1926-02-09 | E & T Fairbanks And Company | Platform scale |
| US3227303A (en) * | 1961-04-25 | 1966-01-04 | Hans Schwarzkopf | Closing device for bottles and like containers |
| US4057746A (en) * | 1975-06-23 | 1977-11-08 | Sciaky Vitry, S. A. | Demountable high power electron beam gun |
| US6548946B1 (en) * | 2000-11-02 | 2003-04-15 | General Electric Company | Electron beam generator |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1142664B (en) * | 1962-02-17 | 1963-01-24 | Heraeus Gmbh W C | Glow cathode |
| US3556600A (en) | 1968-08-30 | 1971-01-19 | Westinghouse Electric Corp | Distribution and cutting of rocks,glass and the like |
| US4057476A (en) | 1976-05-26 | 1977-11-08 | General Dynamics Corporation | Thin film photovoltaic diodes and method for making same |
| US4084077A (en) | 1977-05-10 | 1978-04-11 | Igor Antonovich Porazhinsky | Cathode assembly of electron beam welding gun |
| JPS6025857B2 (en) | 1979-05-17 | 1985-06-20 | 電気化学工業株式会社 | electron gun |
| JPS57196443A (en) | 1981-05-29 | 1982-12-02 | Denki Kagaku Kogyo Kk | Manufacture of hot cathode |
| DE3534792A1 (en) * | 1985-09-30 | 1987-04-02 | Leybold Heraeus Gmbh & Co Kg | ELECTRONIC RADIATOR WITH A DIRECTLY AND INDIRECTLY HEATABLE CATODE |
| SU1572328A1 (en) | 1988-02-19 | 1995-01-09 | Всесоюзный Электротехнический Институт Им.В.И.Ленина | Electron gun |
| JPH0417247A (en) * | 1990-05-10 | 1992-01-22 | Fujitsu Ltd | Electric field ionization type ion source |
| JPH07335161A (en) * | 1994-06-03 | 1995-12-22 | Hitachi Medical Corp | Electron gun |
| JPH08250056A (en) * | 1995-03-07 | 1996-09-27 | Himu Electro Kk | Ion generating device and cleaning device using this ion generating device |
| UA43927C2 (en) | 2000-12-26 | 2002-01-15 | Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О. Патона Нан України | ELECTRONIC CANNON WITH LINEAR THERMOCATODE FOR ELECTRONIC RADIATION HEATING |
| JP4262002B2 (en) | 2003-06-30 | 2009-05-13 | 株式会社堀場製作所 | Field emission electron gun |
| FR2861215B1 (en) * | 2003-10-20 | 2006-05-19 | Calhene | ELECTRON GUN WITH FOCUSING ANODE, FORMING A WINDOW OF THIS CANON, APPLICATION TO IRRADIATION AND STERILIZATION |
| JP2006331853A (en) * | 2005-05-26 | 2006-12-07 | Jeol Ltd | Filament assembly and electron gun, and electron beam device |
| US8159118B2 (en) * | 2005-11-02 | 2012-04-17 | United Technologies Corporation | Electron gun |
| JP4636082B2 (en) * | 2007-12-27 | 2011-02-23 | 日新イオン機器株式会社 | Cathode holding structure and ion source including the same |
| DE102010049521B3 (en) * | 2010-10-25 | 2012-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for generating an electron beam |
| RU130535U1 (en) | 2013-02-28 | 2013-07-27 | Федеральное государственное унитарное предприятие "Научно-производственный центр газотурбостроения "Салют" (ФГУП "НПЦ газотурбостроения "Салют") | CATHODE ASSEMBLY FOR ELECTRON BEAM (OPTIONS) |
| CN105874554B (en) | 2013-12-30 | 2018-05-08 | 迈普尔平版印刷Ip有限公司 | Cathode arrangement, electron gun and the etching system including this electron gun |
| JP6346034B2 (en) * | 2014-08-29 | 2018-06-20 | 日本電子株式会社 | 3D image construction method, image processing apparatus, and electron microscope |
-
2016
- 2016-09-07 UA UAA201609313A patent/UA113827C2/en unknown
-
2017
- 2017-06-09 US US16/330,140 patent/US10636617B2/en active Active
- 2017-06-09 JP JP2019534631A patent/JP6947436B2/en active Active
- 2017-06-09 CA CA3036261A patent/CA3036261C/en active Active
- 2017-06-09 SG SG11201901964UA patent/SG11201901964UA/en unknown
- 2017-06-09 CN CN201780054490.5A patent/CN109791865B/en active Active
- 2017-06-09 RU RU2018142852A patent/RU2699765C1/en active
- 2017-06-09 WO PCT/UA2017/000064 patent/WO2018048376A1/en unknown
- 2017-06-09 EP EP17849217.9A patent/EP3474307A4/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1572328A (en) * | 1924-06-11 | 1926-02-09 | E & T Fairbanks And Company | Platform scale |
| US3227303A (en) * | 1961-04-25 | 1966-01-04 | Hans Schwarzkopf | Closing device for bottles and like containers |
| US4057746A (en) * | 1975-06-23 | 1977-11-08 | Sciaky Vitry, S. A. | Demountable high power electron beam gun |
| US6548946B1 (en) * | 2000-11-02 | 2003-04-15 | General Electric Company | Electron beam generator |
Also Published As
| Publication number | Publication date |
|---|---|
| UA113827C2 (en) | 2017-03-10 |
| WO2018048376A1 (en) | 2018-03-15 |
| RU2699765C1 (en) | 2019-09-10 |
| CN109791865B (en) | 2021-02-23 |
| CA3036261C (en) | 2024-03-26 |
| SG11201901964UA (en) | 2019-04-29 |
| JP6947436B2 (en) | 2021-10-13 |
| EP3474307A4 (en) | 2020-03-04 |
| EP3474307A1 (en) | 2019-04-24 |
| CA3036261A1 (en) | 2018-03-15 |
| US10636617B2 (en) | 2020-04-28 |
| US20190214220A1 (en) | 2019-07-11 |
| JP2019526922A (en) | 2019-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2557078C2 (en) | Electronic beam generator | |
| US6063245A (en) | Magnetron sputtering method and apparatus utilizing a pulsed energy pattern | |
| TWI489509B (en) | Ion source | |
| TWI489506B (en) | Ion source and method of producing a magnetic field in an ionization chamber using a pair of magnetic field sources | |
| CN108701573B (en) | Improved ion source cathode shield | |
| CN111088479B (en) | E-shaped multi-electron beam evaporation device and electron gun circuit | |
| CN109791865A (en) | Axial electron gun | |
| WO2017131895A1 (en) | Dual material repeller | |
| USRE35024E (en) | Electron beam gun with grounded shield to prevent arc down | |
| US20180233316A1 (en) | Electron beam projector with linear thermal cathode | |
| US3801719A (en) | Emitter block assembly | |
| JP5048538B2 (en) | Coaxial vacuum arc deposition source and vacuum deposition equipment | |
| US20140174920A1 (en) | Evaporation source | |
| JPWO2019054111A1 (en) | Ion source, ion implantation apparatus, and ion source operating method | |
| JP3077697B1 (en) | Ion source | |
| KR101858921B1 (en) | Cathode for ion implanter and ion generation device | |
| US6548946B1 (en) | Electron beam generator | |
| JP5959409B2 (en) | Film forming apparatus and method of operating film forming apparatus | |
| RU2657275C2 (en) | Method of producing films of cadmium telluride by magnetron sputtering at a constant current | |
| JP4704267B2 (en) | Vapor deposition source, vapor deposition equipment | |
| US20020040969A1 (en) | Apparatus and method for preventing the short circuit of a filament of a source head to a cathode | |
| JP2012128970A (en) | Electron beam irradiation device, electron beam irradiation processing apparatus using the same, and collector electrode for use in the same | |
| CN116031124A (en) | Arcing chamber structure of ion source for ion implanter and working method thereof | |
| EP2504853A1 (en) | A flash lamp, a corresponding method of manufacture and apparatus for the same | |
| WO2005038849A1 (en) | Ion source with modified gas delivery |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |