CN109750353A - Monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant and its application - Google Patents
Monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant and its application Download PDFInfo
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- CN109750353A CN109750353A CN201910191904.XA CN201910191904A CN109750353A CN 109750353 A CN109750353 A CN 109750353A CN 201910191904 A CN201910191904 A CN 201910191904A CN 109750353 A CN109750353 A CN 109750353A
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Abstract
It includes: poly-aspartate, glycine betaine, polyvinyl alcohol, gelatin, fluorocarbon surfactant and water that the present invention, which provides a kind of monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant and its application, the component of the adjuvant,.The acid Woolen-making liquid containing metal ion can be added in the adjuvant, and auxiliary Woolen-making liquid carries out making herbs into wool to monocrystalline silicon piece；Borehole, the direction of reaming and speed when adjuvant can control making herbs into wool can also improve deaeration effect and solution impregnation, micro-structure be removed, to obtain the inverted pyramid flannelette that appearance is good, structure is uniform, cashmere output rate is high.
Description
Technical field
The present invention relates to monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant and its applications.
Background technique
The making herbs into wool of metal householder method is as solving the effective ways of diamond wire silicon wafer wool making difficulty on polysilicon chip
Using maturation, You Duojia battery manufacturer prepares the black silicon of polycrystalline using the method in the market.But metal householder method is used in monocrystalline
It is ineffective on silicon wafer, the bad orders such as bubble print, stuck point print are commonly present using the monocrystalline silicon piece of metal householder method making herbs into wool,
And the inverted pyramid structure size of preparation is different, cashmere output rate is low.And use the monocrystalline silicon piece of metal householder method preparation that can obtain
Inverted pyramid structure is obtained, compared with the positive pyramid structure that the alkaline etching generallyd use at present obtains, has reflectivity low, electricity
The advantage of pond efficiency and CTM high.Therefore, structure and the problem of appearance for solving inverted pyramid are imperative.
Summary of the invention
The purpose of the present invention is to provide a kind of monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant and its application, the adjuvants
The acid Woolen-making liquid containing metal ion can be added, auxiliary Woolen-making liquid carries out making herbs into wool to monocrystalline silicon piece；Adjuvant can control making herbs into wool
When borehole, the direction of reaming and speed, can also improve deaeration effect and solution impregnation, micro-structure be removed, to obtain appearance
Well, the inverted pyramid flannelette that structure is uniform, cashmere output rate is high.
To achieve the above object, the present invention provides a kind of monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant, each component
Mass percentage are as follows: poly-aspartate 0.5%~1%, glycine betaine 0.2%~0.5%, polyvinyl alcohol 1%~3%, gelatin 1%
~3%, fluorocarbon surfactant 0.2%~0.5%, surplus is water.
Preferably, the water is deionized water.
The present invention also provides a kind of monocrystalline silicon piece inverted pyramid making herbs into wool Woolen-making liquids, contain: acid solution, metal ion,
And above-mentioned adjuvant；The metal ion is one or more of gold, silver, copper, iron, nickel ion.
Preferably, 5%~30% HF aqueous solution and 2%~20% H have been incorporated in the acid solution2O2Aqueous solution, HF are water-soluble
In liquid containing 49% HF, H2O2In aqueous solution containing 30% H2O2；Wherein, percentage composition is mass percentage.
Preferably, the mass ratio of the metal ion and acid solution is 0.5~5:100.
Preferably, the mass ratio of the adjuvant and acid solution is 0.3~1.5:100.
The present invention also provides a kind of inverted pyramid etching method of monocrystalline silicon piece, using above-mentioned Woolen-making liquid to monocrystalline silicon piece into
Row surface wool manufacturing forms inverted pyramid flannelette in monocrystalline silicon sheet surface.
Preferably, the inverted pyramid etching method of above-mentioned monocrystalline silicon piece, specific steps include:
1) formulation aids: by mass percentage be 0.5%~1% poly-aspartate, 0.2%~0.5% glycine betaine, 1%~
3% polyvinyl alcohol, 1%~3% gelatin, 0.2%~0.5% fluorocarbon surfactant are added in the water of surplus, are uniformly mixed
It is made into adjuvant；
2) it configures Woolen-making liquid: adjuvant made from step 1) is added in the acid solution containing metal ion, be uniformly mixed and be made into
Woolen-making liquid；
3) making herbs into wool: monocrystalline silicon piece is immersed in Woolen-making liquid made from step 2 and carries out surface wool manufacturing, is formed in monocrystalline silicon sheet surface
Inverted pyramid flannelette.
Preferably, the making herbs into wool temperature of surface wool manufacturing is 10~40 DEG C in step 3), and the making herbs into wool time is 50~200s.
Advantages and advantages of the present invention are to provide a kind of monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant and its answering
With the acid Woolen-making liquid containing metal ion can be added in the adjuvant, and auxiliary Woolen-making liquid carries out making herbs into wool to monocrystalline silicon piece；Adjuvant
Borehole, the direction of reaming and speed when controllable making herbs into wool can also improve deaeration effect and solution impregnation, remove micro-structure, from
And obtain the inverted pyramid flannelette that appearance is good, structure is uniform, cashmere output rate is high.
Adjuvant of the present invention has a characteristic that
1) adjuvant can influence making herbs into wool reaction process, and control borehole, the direction of reaming and speed, acquisition is uniform, cashmere output rate is high
Inverted pyramid flannelette.
2) adjuvant can be effectively improved the appearance after fine-hair maring using monocrystalline silicon slice, and bubble occurs in the monocrystalline silicon piece after avoiding making herbs into wool
The bad orders such as print, stuck point print, make that monocrystalline silicon piece overall appearance is uniform, no color differnece, and can reduce reflectivity, improve electric current and electricity
Pond efficiency.It is verified through producing line, the more current positive pyramid of battery efficiency is high by 0.1% or more.
The electrode potential that poly-aspartate and gelatin with metal function, can reduce metal and silicon face is poor, to weaken gold
Belong to the speed of borehole and reaming.Polyvinyl alcohol has peptizaiton to metal simultaneously, the appearance in the company of avoiding hole and deep hole.Above-mentioned three
Kind ingredient combination effect can make inverted pyramid structure uniform, and cashmere output rate is high.Glycine betaine and fluorocarbon surfactant reduce solution
Surface tension, increase solution impregnation, so that the bubble of silicon chip surface is become smaller, be easy fall off from silicon chip surface, so as to avoid
The generation of bubble print and latch print, obtains the uniform good silicon wafer of appearance.
Detailed description of the invention
Fig. 1 is the scanning electron microscope (SEM) photograph of monocrystalline silicon sheet surface flannelette after making herbs into wool；
Fig. 2 is the appearance photo of monocrystalline silicon piece after making herbs into wool.
Specific embodiment
With reference to the accompanying drawings and examples, further description of the specific embodiments of the present invention.Following embodiment is only
For clearly illustrating technical solution of the present invention, and not intended to limit the protection scope of the present invention.
The technical solution that the present invention embodies is:
A kind of inverted pyramid etching method of monocrystalline silicon piece, specific steps include:
1) formulation aids: by mass percentage be 0.5%~1% poly-aspartate, 0.2%~0.5% glycine betaine, 1%~
3% polyvinyl alcohol, 1%~3% gelatin, 0.2%~0.5% fluorocarbon surfactant are added in the water of surplus, are uniformly mixed
It is made into adjuvant；
2) it configures Woolen-making liquid: adjuvant made from step 1) is added in the acid solution containing metal ion, be uniformly mixed and be made into
Woolen-making liquid；
5%~30% HF aqueous solution and 2%~20% H have been incorporated in the acid solution2O2Aqueous solution contains in HF aqueous solution
49% HF, H2O2In aqueous solution containing 30% H2O2；Wherein, percentage composition is mass percentage；
The metal ion is one or more of gold, silver, copper, iron, nickel ion；
The mass ratio of the metal ion and acid solution is 0.5~5:100；
The mass ratio of the adjuvant and acid solution is 0.3~1.5:100；
3) making herbs into wool: monocrystalline silicon piece is immersed in Woolen-making liquid made from step 2 and carries out surface wool manufacturing, is formed in monocrystalline silicon sheet surface
Inverted pyramid flannelette；The making herbs into wool temperature of surface wool manufacturing is 10~40 DEG C, and the making herbs into wool time is 50~200s.
Preferably, the water in step 1) is deionized water.
Fig. 1 is the scanning electron microscope (SEM) photograph of monocrystalline silicon sheet surface flannelette after making herbs into wool；Fig. 2 is that the outer of monocrystalline silicon piece is taken into consideration after making herbs into wool
Piece；The appearance of monocrystalline silicon piece is good (bubble-free print, stuck point print) after it can be seen that making herbs into wool in Fig. 1 and Fig. 2, and has structure
The inverted pyramid flannelette uniform, cashmere output rate is high.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (9)
1. monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant, which is characterized in that the mass percentage of its each component are as follows: poly- asparagus fern
Propylhomoserin 0.5%~1%, glycine betaine 0.2%~0.5%, polyvinyl alcohol 1%~3%, gelatin 1%~3%, fluorocarbon surfactant
0.2%~0.5%, surplus is water.
2. monocrystalline silicon piece inverted pyramid making herbs into wool adjuvant according to claim 1, which is characterized in that the water be go from
Sub- water.
3. monocrystalline silicon piece inverted pyramid making herbs into wool Woolen-making liquid, which is characterized in that it contains: acid solution, metal ion and right
It is required that the adjuvant in 1 or 2；The metal ion is one or more of gold, silver, copper, iron, nickel ion.
4. monocrystalline silicon piece inverted pyramid making herbs into wool Woolen-making liquid according to claim 3, which is characterized in that in the acid solution
It has been incorporated 5%~30% HF aqueous solution and 2%~20% H2O2Aqueous solution, in HF aqueous solution containing 49% HF, H2O2Aqueous solution
In containing 30% H2O2；Wherein, percentage composition is mass percentage.
5. monocrystalline silicon piece inverted pyramid making herbs into wool Woolen-making liquid according to claim 4, which is characterized in that the metal ion
Mass ratio with acid solution is 0.5~5:100.
6. monocrystalline silicon piece inverted pyramid making herbs into wool Woolen-making liquid according to claim 5, which is characterized in that the adjuvant with
The mass ratio of acid solution is 0.3~1.5:100.
7. the inverted pyramid etching method of monocrystalline silicon piece, which is characterized in that using system described in any one of claim 3 to 6
Suede liquid carries out surface wool manufacturing to monocrystalline silicon piece, forms inverted pyramid flannelette in monocrystalline silicon sheet surface.
8. the inverted pyramid etching method of monocrystalline silicon piece according to claim 7, which is characterized in that its specific steps packet
It includes:
1) formulation aids: by mass percentage be 0.5%~1% poly-aspartate, 0.2%~0.5% glycine betaine, 1%~
3% polyvinyl alcohol, 1%~3% gelatin, 0.2%~0.5% fluorocarbon surfactant are added in the water of surplus, are uniformly mixed
It is made into adjuvant；
2) it configures Woolen-making liquid: adjuvant made from step 1) is added in the acid solution containing metal ion, be uniformly mixed and be made into
Woolen-making liquid；
3) making herbs into wool: monocrystalline silicon piece is immersed in Woolen-making liquid made from step 2 and carries out surface wool manufacturing, is formed in monocrystalline silicon sheet surface
Inverted pyramid flannelette.
9. the inverted pyramid etching method of monocrystalline silicon piece according to claim 8, which is characterized in that surface system in step 3)
The making herbs into wool temperature of suede is 10~40 DEG C, and the making herbs into wool time is 50~200s.
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| CN110257072A (en) * | 2019-06-13 | 2019-09-20 | 常州时创能源科技有限公司 | Silicon wafer one texture-etching side and etching edge additive and its application |
| CN111593412A (en) * | 2020-05-25 | 2020-08-28 | 常州时创能源股份有限公司 | Additive for chain type texture surface making of monocrystalline silicon piece and application thereof |
| CN112251817A (en) * | 2019-07-05 | 2021-01-22 | 松山湖材料实验室 | Inverted pyramid auxiliary texturing additive and application thereof |
| CN113913188A (en) * | 2021-12-14 | 2022-01-11 | 绍兴拓邦电子科技有限公司 | Monocrystalline silicon texturing agent and preparation method of textured monocrystalline silicon |
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| CN113913188A (en) * | 2021-12-14 | 2022-01-11 | 绍兴拓邦电子科技有限公司 | Monocrystalline silicon texturing agent and preparation method of textured monocrystalline silicon |
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