CN109686708A - A kind of air-tightness and the radiator structure of non-airtight encapsulation - Google Patents

A kind of air-tightness and the radiator structure of non-airtight encapsulation Download PDF

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Publication number
CN109686708A
CN109686708A CN201811582742.4A CN201811582742A CN109686708A CN 109686708 A CN109686708 A CN 109686708A CN 201811582742 A CN201811582742 A CN 201811582742A CN 109686708 A CN109686708 A CN 109686708A
Authority
CN
China
Prior art keywords
chip
ceramic cartridge
ceramic
radiator structure
heat pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811582742.4A
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Chinese (zh)
Inventor
李守委
袁世伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC 58 Research Institute
Original Assignee
CETC 58 Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 58 Research Institute filed Critical CETC 58 Research Institute
Priority to CN201811582742.4A priority Critical patent/CN109686708A/en
Publication of CN109686708A publication Critical patent/CN109686708A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3675Cooling facilitated by shape of device characterised by the shape of the housing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3731Ceramic materials or glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736Metallic materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

Abstract

The present invention discloses the radiator structure of a kind of air-tightness and non-airtight encapsulation, belongs to integrated antenna package technical field.The radiator structure of air-tight packaging includes ceramic cartridge and metal cover board, and metal cover board is welded as a whole with the ceramic cartridge;Wherein, heat pipe is embedded in the ceramic cartridge and the metal cover board;The heat pipe, which is formed, is filled with coolant liquid in sealed circuit and the heat pipe.The radiator structure of non-airtight encapsulation includes ceramic cartridge, is embedded with heat pipe in the ceramic cartridge;The heat pipe seals and inside is filled with coolant liquid.Accelerate electronic system and extraneous heat transfer, compensate for the drawback of the heat-sinking capability deficiency by high air quantity motor, contemporary electronic systems high density, the growth requirement of high complexity, for the higher system encapsulation of power can be met.

Description

A kind of air-tightness and the radiator structure of non-airtight encapsulation
Technical field
The present invention relates to integrated antenna package technical field, in particular to the heat dissipation of a kind of air-tightness and non-airtight encapsulation Structure.
Background technique
Ceramic packaging technology meets the miniaturization of electronic system component, the requirement of high integration and high reliability, big at present Amount is used in the Modern Electronics change system such as aviation, military project, medical treatment.The technology is more with its wiring number of plies, shape and ruler Very little customizable makes it become the first choice of system in package, system-level with the promotion of ceramic package internal wiring ability The integrated level of encapsulation improves rapidly, meets the miniaturization of hyundai electronics change system, the urgent need of low cost, high integration.
Wherein, system-level ceramic packaging technology, since integrated level height is higher and higher, power consumption is increasing, in order to meet Radiating requirements then need that high air quantity motor is relied on to realize, this requirement that electronics are minimized is difficult to realize.
In order to meet the radiating requirements of contemporary electronic systems miniaturization and great-power electronic system simultaneously, need to develop one kind The radiator structure of ceramic package.
Summary of the invention
The purpose of the present invention is to provide a kind of passive radiator structures of ceramic package, to solve to be unable to satisfy electronics at present The problem of system compact and great-power electronic system radiating demand.
In order to solve the above technical problems, the present invention provides a kind of radiator structure of air-tight packaging, comprising:
Ceramic cartridge;
Metal cover board is welded as a whole with the ceramic cartridge;Wherein, it is embedded in the ceramic cartridge and the metal cover board There is heat pipe;The heat pipe, which is formed, is filled with coolant liquid in sealed circuit and the heat pipe.
Optionally, chip is posted by packing material upside-down mounting on the ceramic cartridge or chip is posted in non-upside-down mounting.
Optionally, when chip is posted in upside-down mounting on the ceramic cartridge, the front of the chip is mounted by packing material On the ceramic cartridge, the back side of the chip is bonded by heat-conducting glue with the metal cover board.
Optionally, when chip is posted in upside-down mounting non-on the ceramic cartridge, the back side of the chip is pasted by packing material On the ceramic cartridge, the front of the chip is connect by spun gold with ceramic cartridge.
Optionally, the production method of the ceramic cartridge and metal cover board that are embedded with heat pipe includes 3D printing and casting.
The present invention also provides a kind of radiator structures of non-airtight encapsulation, comprising:
Ceramic cartridge is embedded with heat pipe in the ceramic cartridge;The heat pipe seals and inside is filled with coolant liquid.
Optionally, chip is posted by packing material upside-down mounting on the ceramic cartridge or chip is posted in non-upside-down mounting.
Optionally, when chip is posted in upside-down mounting on the ceramic cartridge, the front of the chip is mounted by packing material On the ceramic cartridge, the back side of the chip is fitted with heat sink cover board by heat-conducting glue.
Optionally, when chip is posted in upside-down mounting non-on the ceramic cartridge, the back side of the chip is pasted by packing material On the ceramic cartridge, the front of the chip is connect by spun gold with ceramic cartridge.
Optionally, the production method for being embedded with the ceramic cartridge of heat pipe includes 3D printing and casting.
The radiator structure of a kind of air-tightness and non-airtight encapsulation, the heat dissipation knot of air-tight packaging are provided in the present invention Structure includes ceramic cartridge and metal cover board, and metal cover board is welded as a whole with the ceramic cartridge;Wherein, the ceramic cartridge and Heat pipe is embedded in the metal cover board;The heat pipe, which is formed, is filled with coolant liquid in sealed circuit and the heat pipe.Non- gas The radiator structure of close property encapsulation includes ceramic cartridge, is embedded with heat pipe in the ceramic cartridge;The heat pipe seals and inside is filled out Filled with coolant liquid.
The invention has the following advantages:
(1) using heat pipe to be integrated in inside ceramic cartridge and metal cover board, the integration of cooling system and packaging body is realized Preparation accelerates electronic system and extraneous heat transfer, compensates for the drawback of the heat-sinking capability deficiency by high air quantity motor, can expire Sufficient contemporary electronic systems high density, the growth requirement of high complexity, for the higher system encapsulation of power;
(2) different heat pipe forms is used, realizes the radiator structure in gastight ceramic encapsulation and non-airtight ceramic package In application;
(3) using heat pipe and the integral preparation process of ceramic cartridge, technical process is simplified, the process-cycle is shortened, improved Packaging efficiency.
Detailed description of the invention
Fig. 1 is the radiator structure schematic diagram for the air-tight packaging that the embodiment of the present invention one provides;
The radiator structure schematic diagram of air-tight packaging when Fig. 2 is the flip-chip of the offer of the embodiment of the present invention one;
Fig. 3 be the embodiment of the present invention one provide chip non-upside-down mounting when air-tight packaging radiator structure schematic diagram;
Fig. 4 is the radiator structure schematic diagram of non-airtight encapsulation provided by Embodiment 2 of the present invention;
The radiator structure schematic diagram that non-airtight encapsulates when Fig. 5 is flip-chip provided by Embodiment 2 of the present invention;
The radiator structure schematic diagram of non-airtight encapsulation when Fig. 6 is chip provided by Embodiment 2 of the present invention non-upside-down mounting.
Specific embodiment
Heat dissipation below in conjunction with the drawings and specific embodiments to a kind of air-tightness proposed by the present invention and non-airtight encapsulation Structure is described in further detail.According to following explanation and claims, advantages and features of the invention will be become apparent from.It needs Bright, attached drawing is all made of very simplified form and using non-accurate ratio, only conveniently, lucidly to aid in illustrating The purpose of the embodiment of the present invention.
Embodiment one
The embodiment of the present invention one provides a kind of radiator structure of air-tight packaging, and structure is as shown in Figure 1.The air-tightness envelope The radiator structure of dress includes ceramic cartridge 1 and metal cover board 2, and the ceramic cartridge 1 and the metal cover board 2 are welded as a whole; And the ceramic cartridge 1 and the metal cover board 2 in be embedded with heat pipe 3, the heat pipe 3 forms sealed circuit and the heat pipe Coolant liquid 4 is filled in 3.Preferably, the production method of the ceramic cartridge 1 and metal cover board 2 that are embedded with heat pipe includes 3D printing And casting.
Specifically, posting chip 6 by 5 upside-down mounting of packing material on the ceramic cartridge 1 or chip 6 is posted in non-upside-down mounting.Such as Shown in Fig. 2, when chip 6 is posted in upside-down mounting on the ceramic cartridge 1, the front of the chip is mounted on institute by packing material 5 It states on ceramic cartridge 1, the back side of the chip 6 is bonded by heat-conducting glue 7 with the metal cover board 1.
As shown in figure 3, the back side of the chip 6 passes through filling when chip 6 is posted in non-upside-down mounting on the ceramic cartridge 1 Material 5 is mounted on the ceramic cartridge 1, and the front of the chip is connect by spun gold 8 with ceramic cartridge.
Embodiment two
Second embodiment of the present invention provides a kind of radiator structure of non-airtight encapsulation, structure is as shown in Figure 4.It is described non-hermetically sealed Property encapsulation radiator structure include ceramic cartridge 1, be embedded with heat pipe 3 in the ceramic cartridge 1;The sealing of heat pipe 3 and inside Filled with coolant liquid 4.Preferably, the production method for being embedded with the ceramic cartridge 1 of heat pipe includes 3D printing and casting.
Specifically, posting chip 6 by 5 upside-down mounting of packing material on the ceramic cartridge 1 or chip 6 is posted in non-upside-down mounting.Such as Shown in Fig. 5, when chip 6 is posted in upside-down mounting on the ceramic cartridge 1, the front of the chip 6 is mounted on institute by packing material 5 It states on ceramic cartridge 1, the back side of the chip 6 is fitted with heat sink cover board 9 by heat-conducting glue 7.
As shown in fig. 6, the back side of the chip 6 passes through filling when chip 6 is posted in non-upside-down mounting on the ceramic cartridge 1 Material 5 is mounted on the ceramic cartridge 1, and the front of the chip 6 is connect by spun gold 8 with ceramic cartridge 1.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims Range.

Claims (10)

1. a kind of radiator structure of air-tight packaging characterized by comprising
Ceramic cartridge;
Metal cover board is welded as a whole with the ceramic cartridge;Wherein, it is embedded in the ceramic cartridge and the metal cover board There is heat pipe;The heat pipe, which is formed, is filled with coolant liquid in sealed circuit and the heat pipe.
2. the passive radiator structure of ceramic package as described in claim 1, which is characterized in that by filling out on the ceramic cartridge Fill that chip is posted in material upside-down mounting or chip is posted in non-upside-down mounting.
3. the passive radiator structure of ceramic package as claimed in claim 2, which is characterized in that when upside-down mounting on the ceramic cartridge When posting chip, the front of the chip is mounted on the ceramic cartridge by packing material, and the back side of the chip passes through Heat-conducting glue is bonded with the metal cover board.
4. the passive radiator structure of ceramic package as claimed in claim 2, which is characterized in that when on the ceramic cartridge it is non-fall When dress posts chip, the back side of the chip is mounted on the ceramic cartridge by packing material, and the front of the chip is logical Spun gold is crossed to connect with ceramic cartridge.
5. the passive radiator structure of ceramic package as described in claim 1, which is characterized in that be embedded with the ceramic cartridge of heat pipe Production method with metal cover board includes 3D printing and casting.
6. a kind of radiator structure of non-airtight encapsulation characterized by comprising
Ceramic cartridge is embedded with heat pipe in the ceramic cartridge;The heat pipe seals and inside is filled with coolant liquid.
7. such as the passive radiator structure for the ceramic package that claim 6 is stated, which is characterized in that pass through filling on the ceramic cartridge Chip is posted in material upside-down mounting or chip is posted in non-upside-down mounting.
8. the passive radiator structure of ceramic package as claimed in claim 7, which is characterized in that when upside-down mounting on the ceramic cartridge When posting chip, the front of the chip is mounted on the ceramic cartridge by packing material, and the back side of the chip passes through Heat-conducting glue is fitted with heat sink cover board.
9. the passive radiator structure of ceramic package as claimed in claim 7, which is characterized in that when on the ceramic cartridge it is non-fall When dress posts chip, the back side of the chip is mounted on the ceramic cartridge by packing material, and the front of the chip is logical Spun gold is crossed to connect with ceramic cartridge.
10. the passive radiator structure of ceramic package as claimed in claim 6, which is characterized in that be embedded with the ceramic tube of heat pipe The production method of shell includes 3D printing and casting.
CN201811582742.4A 2018-12-24 2018-12-24 A kind of air-tightness and the radiator structure of non-airtight encapsulation Pending CN109686708A (en)

Priority Applications (1)

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CN201811582742.4A CN109686708A (en) 2018-12-24 2018-12-24 A kind of air-tightness and the radiator structure of non-airtight encapsulation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811582742.4A CN109686708A (en) 2018-12-24 2018-12-24 A kind of air-tightness and the radiator structure of non-airtight encapsulation

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CN109686708A true CN109686708A (en) 2019-04-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111146151A (en) * 2019-12-27 2020-05-12 中国电子科技集团公司第十三研究所 Packaging structure capable of simultaneously realizing heat dissipation and air tightness of flip chip and preparation method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11233698A (en) * 1997-05-30 1999-08-27 Hewlett Packard Co <Hp> Semiconductor package lid with heat pipe
CN2681327Y (en) * 2003-12-29 2005-02-23 威盛电子股份有限公司 Flip-chip heat radiation packaging arrangement
CN101989585A (en) * 2009-07-30 2011-03-23 台湾积体电路制造股份有限公司 Microelectronic package
CN203238029U (en) * 2013-04-22 2013-10-16 安徽北方芯动联科微系统技术有限公司 MEMS element provided with structure reducing packaging stress
CN103489838A (en) * 2013-10-15 2014-01-01 北京大学 Enhanced radiation three-dimensional packaging structure and packaging method for same
US20140126150A1 (en) * 2012-11-08 2014-05-08 David W. Song Heat dissipation lid having direct liquid contact conduits
CN105304577A (en) * 2015-07-28 2016-02-03 中国电子科技集团公司第十研究所 Preparation method for multi-chip module heat dissipation packaging ceramic composite substrate

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11233698A (en) * 1997-05-30 1999-08-27 Hewlett Packard Co <Hp> Semiconductor package lid with heat pipe
CN2681327Y (en) * 2003-12-29 2005-02-23 威盛电子股份有限公司 Flip-chip heat radiation packaging arrangement
CN101989585A (en) * 2009-07-30 2011-03-23 台湾积体电路制造股份有限公司 Microelectronic package
US20140126150A1 (en) * 2012-11-08 2014-05-08 David W. Song Heat dissipation lid having direct liquid contact conduits
CN203238029U (en) * 2013-04-22 2013-10-16 安徽北方芯动联科微系统技术有限公司 MEMS element provided with structure reducing packaging stress
CN103489838A (en) * 2013-10-15 2014-01-01 北京大学 Enhanced radiation three-dimensional packaging structure and packaging method for same
CN105304577A (en) * 2015-07-28 2016-02-03 中国电子科技集团公司第十研究所 Preparation method for multi-chip module heat dissipation packaging ceramic composite substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111146151A (en) * 2019-12-27 2020-05-12 中国电子科技集团公司第十三研究所 Packaging structure capable of simultaneously realizing heat dissipation and air tightness of flip chip and preparation method

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Application publication date: 20190426

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