CN109609912A - Vacuum deposition apparatus and vacuum deposition method - Google Patents
Vacuum deposition apparatus and vacuum deposition method Download PDFInfo
- Publication number
- CN109609912A CN109609912A CN201910055300.2A CN201910055300A CN109609912A CN 109609912 A CN109609912 A CN 109609912A CN 201910055300 A CN201910055300 A CN 201910055300A CN 109609912 A CN109609912 A CN 109609912A
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- China
- Prior art keywords
- magnetic sheet
- sheet unit
- periphery
- mask plate
- metal mask
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Abstract
The embodiment of the invention discloses a kind of vacuum deposition apparatus and vacuum deposition methods, the vacuum deposition apparatus includes: the magnetic sheet for adsorbing metal mask plate, magnetic sheet includes center magnetic sheet unit and at least one periphery magnetic sheet unit positioned at center magnetic sheet unit periphery, wherein, center magnetic sheet unit and periphery magnetic sheet unit are separately movably arranged relative to metal mask plate.Technical solution of the present invention utilizes the center magnetic sheet unit and the successive adsorbing metal mask plate of periphery magnetic sheet unit being separately movably arranged, it is ensured that the planarization of metal mask plate, to be conducive to improve vapor deposition yield.
Description
Technical field
The present embodiments relate to the preparation technical field of display panel more particularly to a kind of vacuum deposition apparatus and vacuum
Evaporation coating method.
Background technique
Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) display device is spontaneous due to its
Light, structure are simple, easily realize the features such as lightening design, fast response time, visual angle wide, low in energy consumption, become flat panel display
One of major product direction.In the procedure for producing of Organic Light Emitting Diode, the method for mask evaporation is generallyd use in substrate base
Formed on plate organic light emitting functional layer (including cathode, anode, electron transfer layer, electronic barrier layer, hole transmission layer, hole resistance
Barrier, organic luminous layer or other function film layer).To make good fit between underlay substrate and metal mask plate, usually exist
Magnetic sheet is arranged far from the side of metal mask plate in underlay substrate.When magnetic sheet is close to metal mask plate, pass through the work of magnet absorption
With metal mask plate lifts underlay substrate, to guarantee good fit between metal mask plate and underlay substrate.
However, existing vacuum deposition apparatus is during use, magnetic sheet is bad to metal mask plate adsorption effect, holds
Easily leading to vapor deposition yield reduces.
Summary of the invention
The embodiment of the present invention provides a kind of vacuum deposition apparatus and vacuum deposition method, is conducive to optimize magnetic sheet and cover with metal
The adsorption effect of template, to improve vapor deposition yield.
In a first aspect, the embodiment of the invention provides a kind of vacuum deposition apparatus, the vacuum deposition apparatus and metal mask
Plate is used cooperatively, which includes:
For adsorbing the magnetic sheet of the metal mask plate, magnetic sheet includes center magnetic sheet unit and is located at outside center magnetic sheet unit
At least one periphery magnetic sheet unit in week, wherein center magnetic sheet unit and periphery magnetic sheet unit are distinguished relative to metal mask plate
Independently it is movably arranged.
Further, at least one periphery magnetic sheet unit includes multiple separately moving relative to metal mask plate
The periphery magnetic sheet unit of setting.
Further, at least one periphery magnetic sheet unit includes being arranged in parallel in the center magnetic sheet unit two sides at least
Two periphery magnetic sheet units；The longitudinal direction of main body in the extending direction and metal mask plate of center magnetic sheet unit is hung down
Directly；The periphery magnetic sheet unit for being preferably located at center magnetic sheet unit two sides is symmetrical arranged.
Further, at least one periphery magnetic sheet unit is surrounded around center magnetic sheet unit；Preferably, center magnetic sheet unit
Shape be round or rectangle, the shape of at least one periphery magnetic sheet unit is circle corresponding with the shape of center magnetic sheet unit
Ring or straight-flanked ring；Preferably, at least one periphery magnetic sheet unit includes the multiple weeks successively arranged outward by center magnetic sheet unit
Side magnetic sheet unit.
Further, magnetic sheet includes installation base plate and several magnetic stripes being arranged on installation base plate.
Further, it is provided with the magnetic stripe group that multiple groups are arranged in the same direction on magnetic sheet, includes multiple in every group of magnetic stripe group
Magnetic stripe；
Wherein, one end polarity of the separate installation base plate of the magnetic stripe in two adjacent groups magnetic stripe group is different, and is located at same institute
The polarity for stating the two neighboring magnetic stripe in magnetic stripe group is identical or different.
Further, each magnetic stripe in two neighboring magnetic stripe group is staggered.
Further, magnetic stripe is permanent magnet.
Second aspect, the embodiment of the invention also provides a kind of vacuum deposition method, which includes:
Metal mask plate and the substrate to be deposited on metal mask plate are provided, component to be deposited is formed；
Component to be deposited is placed in vacuum deposition apparatus, includes magnetic sheet in vacuum deposition apparatus, magnetic sheet includes center magnetic
Plate unit and at least one periphery magnetic sheet unit positioned at center magnetic sheet unit periphery；
Drive the center magnetic sheet unit of magnetic sheet prior to periphery magnetic sheet unit and component joint to be deposited.
Further, evaporation coating method further include: the structure of magnetic sheet is pre-adjusted, so that center magnetic sheet unit and at least one
A periphery magnetic sheet unit forms difference in height towards the side of component to be deposited, forms original state；
Driving has the magnetic sheet of original state to component to be deposited movement, so that center magnetic sheet unit and center magnetic sheet unit
Fitting；
Drive magnetic sheet unit in periphery mobile to component to be deposited, until magnetic sheet whole face and component joint to be deposited.
Further, at least one periphery magnetic sheet unit includes multiple periphery magnetic sheet units；In the structure shape of adjustment magnetic sheet
During at original state, so that side of the magnetic sheet towards component to be deposited is from center magnetic sheet unit to the edge direction of magnetic sheet
Form the difference in height successively changed；
During driving magnetic sheet unit in periphery mobile to component to be deposited, so that periphery magnetic sheet unit is by center magnetic sheet
Unit is successively adsorbed with component to be deposited to the edge direction of magnetic sheet, until magnetic sheet whole face and component joint to be deposited.
Vacuum deposition apparatus provided in an embodiment of the present invention is used cooperatively with metal mask plate, in being split as magnetic sheet
Heart magnetic sheet unit and at least one periphery magnetic sheet unit, and center magnetic sheet unit and periphery magnetic sheet unit are covered relative to metal
Template is separately movably arranged.The central area that such magnetic pole structures advantageously allow metal mask plate takes the lead in by
Heart magnetic sheet unit absorption, to hold up the central area of underlay substrate；Then make periphery magnetic sheet unit adsorbing metal mask plate again
Neighboring area, until metal mask plate equals underlay substrate support.During magnetic sheet adsorbing metal mask plate, metal mask
Plate is gradually adsorbed from central area to neighboring area, so that magnetic sheet is more preferable to the metal mask plate adsorption effect deformed,
And then vapor deposition yield can be improved.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to do one simply to introduce, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of structural schematic diagram of vacuum deposition apparatus provided in an embodiment of the present invention；
Fig. 2 is a kind of structural schematic diagram of magnetic sheet provided in an embodiment of the present invention；
Fig. 3 is a kind of status diagram of magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention；
Fig. 4 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention；
Fig. 5 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Fig. 6 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Fig. 7 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention；
Fig. 8 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention；
Fig. 9 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Figure 10 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Figure 11 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention；
Figure 12 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention；
Figure 13 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Figure 14 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Figure 15 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention；
Figure 16 is the structural schematic diagram of another vacuum deposition apparatus provided in an embodiment of the present invention；
Figure 17 is the structural schematic diagram of another vacuum deposition apparatus provided in an embodiment of the present invention；
Figure 18 is a kind of flow diagram of vacuum deposition method provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
In vacuum deposition apparatus use process in the prior art, used magnetic sheet is usually the magnetic sheet of monolith,
During magnetic sheet and metal mask plate are adsorbed, the underlay substrate self gravity as set by above metal mask plate is made
With in the presence of underlay substrate the case where vertical pushing metal mask plate, such case is easy for leading to the center of metal mask plate
Region is sagging, and then causes the edge of metal mask plate closer apart from magnetic sheet, and central area apart from magnetic sheet farther out.Occur
The metal mask plate of deformation will lead to during vapor deposition that vapor deposition is bad, and vapor deposition yield is lower.
Fig. 1 is a kind of structural schematic diagram of vacuum deposition apparatus provided in an embodiment of the present invention, the vacuum deposition apparatus with
Metal mask plate is used cooperatively.Referring to Fig.1, which includes: the magnetic sheet 11 for adsorbing metal mask plate 12,
Magnetic sheet 11 includes center magnetic sheet unit 11E and at least one periphery magnetic sheet unit 11S positioned at the center periphery magnetic sheet unit 11E,
Wherein, center magnetic sheet unit 11E and periphery magnetic sheet unit 11S are separately movably arranged relative to metal mask plate 12.
Wherein, vacuum deposition apparatus 10 can for sputtering equipment, vaporising device or skilled person will appreciate that other classes
The vacuum deposition apparatus of type.The vacuum deposition apparatus 10 may also include vacuum chamber, vacuum pump and those skilled in the art can
The other assemblies known, the embodiment of the present invention are not construed as limiting this.
Wherein, it before executing vacuum evaporation, is adsorbed using magnetic sheet 11 and metal mask plate 13 is pasted to underlay substrate 13
Side, to form predetermined pattern on the surface of underlay substrate 13 using the mask pattern in metal mask plate 12, this is default
Pattern can be arranged according to process requirements, and the embodiment of the present invention is not construed as limiting this.
Wherein, center magnetic sheet unit 11E and periphery magnetic sheet unit 11S, and center magnetic sheet list are included by setting magnetic sheet 11
First 11E and periphery magnetic sheet unit 11S are separately movably arranged relative to metal mask plate 12, can make center magnetic sheet unit
11E adsorbs metal mask plate 12 prior to periphery magnetic sheet unit 11S, to may make metal mask plate 12 and underlay substrate
13 are gradually adsorbed from center to edge, and then advantageously ensure that the planarization of metal mask plate.
Wherein, at least one periphery magnetic sheet unit of magnetic sheet 11 can be a periphery magnetic sheet unit, the periphery magnetic sheet list
Member is arranged around the center magnetic sheet unit；Or at least one periphery magnetic sheet unit can be at least two periphery magnetic sheet lists
Member, the parallel and symmetrical two sides that the center magnetic sheet unit is set of at least two peripheries magnetic sheet unit；Or at least one
A periphery magnetic sheet unit can be at least two periphery magnetic sheet units, and at least two peripheries magnetic sheet unit is by center magnetic sheet unit
The periphery of center magnetic sheet unit is successively circumferentially positioned to periphery magnetic sheet cell orientation.
In the following, illustratively illustrating above-mentioned adsorption process in conjunction with Fig. 2-Fig. 4.
Illustratively, Fig. 2 is a kind of structural schematic diagram of magnetic sheet provided in an embodiment of the present invention.Referring to Fig. 2, the magnetic sheet 11
Include: it is multiple correspond respectively to different zones on metal mask plate 12 (it is illustrative, respectively with first area 12Q1, the in Fig. 2
Two region 12Q2, third region 12Q3, the fourth region 12Q4 and the 5th region 12Q5 show the different zones of metal mask plate 12)
Magnetic sheet unit (it is illustrative, respectively with the first magnetic sheet unit 111, the second magnetic sheet unit 112, third magnetic sheet unit in Fig. 2
113, the 4th magnetic sheet unit 114 and the 5th magnetic sheet unit 115 show multiple magnetic sheet units)；Magnetic sheet 11 passes through the magnetic of magnetic sheet unit
Corresponding region on metal mask plate 12 is adsorbed on a side surface of underlay substrate 13 by power F；Multiple magnetic sheet units include center
Magnetic sheet unit 11E (illustrative, center magnetic sheet unit is shown with the first magnetic sheet unit 111 in Fig. 2) and periphery magnetic sheet unit 11S
(it is illustrative, with the second magnetic sheet unit 112, third magnetic sheet unit 113, the 4th magnetic sheet unit 114 and the 5th magnetic sheet list in Fig. 2
Member 115 shows periphery magnetic sheet unit)；Before 11 adsorbing metal mask plate 12 of magnetic sheet, the adsorption plane of center magnetic sheet unit is located at
The adsorption plane of periphery magnetic sheet unit is close to the side of metal mask plate 12；During 11 adsorbing metal mask plate 12 of magnetic sheet,
The central area 12Q1 of center magnetic sheet unit elder generation adsorbing metal mask plate 12；Then, periphery magnetic sheet unit adsorbing metal mask plate
12 fringe region；After 11 adsorbing metal mask plate 12 of magnetic sheet, the adsorption plane and periphery magnetic sheet unit of center magnetic sheet unit
Adsorption plane be in the same plane.
Wherein, underlay substrate 13 is located at metal mask plate 12 close to the side of magnetic sheet 11.Due to underlay substrate 13 itself
The central area of gravity, underlay substrate 13 is bent downwardly, to be pressed downward metal mask plate 12, therefore, metal mask plate
The position of 12 central area 12Q1 in the vertical direction is lower than the position of the fringe region of metal mask plate 12 in the vertical direction
It sets.Include center magnetic sheet unit 11E and periphery magnetic sheet unit 11S by setting magnetic sheet 11, and is covered in 11 adsorbing metal of magnetic sheet
Before template 12, the adsorption plane of center magnetic sheet unit 11E is located at the adsorption plane of periphery magnetic sheet unit 11S close to metal mask plate 12
Side, can make during magnetic sheet 11 is close to metal mask plate 12, center magnetic sheet unit 11E takes the lead in adsorbing metal mask plate
12 central area 12Q1, the corresponding region of rear perimeter edge magnetic sheet unit 11S adsorbing metal template die plate 12.
Illustratively, Fig. 3 is a kind of status diagram of magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention.Ginseng
According to Fig. 3, since the center magnetic sheet unit 11E of magnetic sheet 11 (illustratively, shows center magnetic sheet in Fig. 3 with the first magnetic sheet unit 111
Unit) closer to metal mask plate 12, correspondingly, the central area 12Q1 of metal mask plate 12 takes the lead in by the center magnetic of magnetic sheet 11
Plate unit absorption, so that the position of the central area 12Q1 of metal mask plate 12 in the vertical direction is higher than edge adjacent thereto
The position of region in the vertical direction.Meanwhile underlay substrate 13 is located at metal mask plate 12 close to the side of magnetic sheet 11, works as metal
When the central area 12Q1 of mask plate 12 is adsorbed by the center magnetic sheet unit of magnetic sheet 11, the central area of underlay substrate 13 is by metal
The central area 12Q1 of mask plate 12 is held up.
Then, the fringe region of the periphery magnetic sheet unit adsorbing metal mask plate 12 of magnetic sheet 11, correspondingly, underlay substrate 13
Fringe region put down by the fringe region support of metal mask plate 12.
Illustratively, Fig. 4 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention.
Referring to Fig. 4, after adsorption process, center magnetic sheet unit 11E (it is illustrative, it is shown with the first magnetic sheet unit 111 in Fig. 4
Heart magnetic sheet unit) adsorption plane and periphery magnetic sheet unit 11S (it is illustrative, with the second magnetic sheet unit 112, third magnetic sheet in Fig. 4
Unit 113, the 4th magnetic sheet unit 114 and the 5th magnetic sheet unit 115 show periphery magnetic sheet unit) adsorption plane be generally aligned in the same plane
It is interior, and it is parallel to the plane where underlay substrate 13, also parallel with the plane where metal mask plate 12.Since magnetic sheet 11 adsorbs
During metal mask plate 12, metal mask plate 12 is gradually adsorbed from central area to fringe region, meanwhile, underlay substrate
13 are gradually put down by 12 support of metal mask plate.Therefore, after adsorption process, metal mask plate 12 (and underlay substrate 13) is flattened
It is adsorbed on the adsorption plane of magnetic sheet 11, improves magnetic sheet 11 to the adsorption effect of metal mask plate 12, therefore, it is good that vapor deposition can be improved
Rate.
It should be noted that the number for showing magnetic sheet unit merely exemplary in Fig. 2-Fig. 4 is five, and each magnetic sheet
Equal in magnitude, this exemplary only explanation of unit, and it is non-limiting.It in other embodiments, can be according to the reality of magnetic sheet
Demand, is arranged the quantity and size of magnetic sheet unit, and the embodiment of the present invention is not construed as limiting this.
In addition, it should be noted that, before metal mask plate 12 is adsorbed by magnetic sheet, the edge of metal mask plate 12 usually quilt
It is fixed on fixed position, since metal mask plate 12 is gradually adsorbed from central area to neighboring area, adsorption process knot
Shu Hou, metal mask plate 12 keep more smooth state, evaporation effect are not influenced, so that vapor deposition yield can be improved.
Optionally, the magnetic field strength of multiple magnetic sheet units is all the same.
Illustratively, it can refer to any figure of Fig. 2-Fig. 4, the magnetic field strength of each magnetic sheet unit is all the same, i.e. central magnetic field list
Member 111, periphery magnetic field units 112, periphery magnetic field units 113, periphery magnetic field units 114, the magnetic field of periphery magnetic field units 115 are strong
It spends all the same.Meanwhile the magnetic field homogeneity of each magnetic sheet unit is identical, the magnetic field strength at each position of each magnetic sheet unit is homogeneous
Together.
So set, can make equal to the magnetic force size of metal mask plate 12 at each position of each magnetic sheet unit of magnetic sheet 11
It is equal, i.e., it is all the same to the suction-operated of metal mask plate 12 at each position of magnetic sheet 11, therefore, after adsorption process,
Uniform force at each position of metal mask plate 12, thus can avoid adsorption process after, metal mask plate 12 due to by
The deformation or stress that power unevenness generates, and then avoidable thus caused vapor deposition is bad, therefore, passes through and multiple magnetic sheet units are arranged
Magnetic field strength it is all the same, the issuable deformation of metal mask plate 12 or stress after adsorption process can be reduced, thus really
Evaporation effect is protected, vapor deposition yield is improved.
Optionally, center magnetic sheet unit 11E and at least one periphery magnetic sheet unit 11S are arranged in parallel, and center magnetic sheet list
The extending direction of first 11E is vertical with the longitudinal direction of main body in metal mask plate 12.
In this way, each magnetic sheet unit in magnetic sheet 11 can be made to be bar shaped, thus, the design of magnetic sheet 11 is simple, can reduce magnetic
The design difficulty and manufacture difficulty of plate 11.
Illustratively, Fig. 5 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention.Referring to Fig. 5, multiple magnetic
Plate unit arranged in parallel；Center magnetic sheet unit (illustrative, center magnetic sheet unit is shown with the first magnetic sheet unit 111 in Fig. 5)
The magnetic sheet unit of two sides is periphery magnetic sheet unit 11S (illustratively, with the second magnetic sheet unit 112, third magnetic sheet unit in Fig. 5
113, the 4th magnetic sheet unit 114 and the 5th magnetic sheet unit 115 show periphery magnetic sheet unit).
Wherein, a center magnetic sheet unit 11E and four periphery magnetic sheet unit 11S are shown in Fig. 5.Close to center magnetic sheet
The absorption of the periphery magnetic sheet unit 11S (illustrative, can be the second magnetic sheet unit 112 and the 4th magnetic sheet unit 114) of unit 11E
The periphery magnetic sheet unit of adsorption plane and separate center magnetic sheet unit 11E that face is located at center magnetic sheet unit 11E (illustratively, can
For third magnetic sheet unit 113 and the 5th magnetic sheet unit 115) adsorption plane between.It is directed toward most along center magnetic sheet unit 11E as a result,
(it should be noted that for same magnetic sheet 11, the direction may include more in the direction of the periphery magnetic sheet unit 11S at edge
It is a, illustratively, using Fig. 5 as example, it may include be directed toward the direction of third magnetic sheet unit 113 by center magnetic sheet unit 11E, may be used also
Direction including being directed toward the 5th magnetic sheet unit 115 by center magnetic sheet unit 11E), each magnetic sheet unit successively adsorbing metal mask plate
12。
Illustratively, in combination with Fig. 2 and Fig. 5, before 11 adsorbing metal mask plate 12 of magnetic sheet, in the vertical direction, in
The adsorption plane of heart magnetic sheet unit is lower than the adsorption plane of the second magnetic sheet unit 112, and is lower than the adsorption plane of the 4th magnetic sheet unit 114；
The adsorption plane of second magnetic sheet unit 112 is lower than the adsorption plane of third magnetic sheet unit 113；The adsorption plane of 4th magnetic sheet unit 114 is low
In the adsorption plane of the 5th magnetic sheet unit 115.The adsorption process of 11 adsorbing metal mask plate 12 of magnetic sheet can be divided into three phases:
One stage, the central area 12Q1 of center magnetic sheet unit 11E adsorbing metal mask plate 12, the central area of underlay substrate 13 are golden
The central area 12Q1 for belonging to mask plate 12 is held up；In second stage, the second of 112 adsorbing metal mask plate 12 of the second magnetic sheet unit
Region 12Q2, the fourth region 12Q4 of 114 adsorbing metal mask plate 12 of the 4th magnetic sheet unit, correspondingly, pair of underlay substrate 13
Region is answered to be held up by the second area 12Q2 of metal mask plate 12 and the fourth region 12Q4；In the phase III, third magnetic sheet unit
The third region 12Q3 of 113 adsorbing metal mask plates 12, the 5th region of 115 adsorbing metal mask plate of the 5th magnetic sheet unit
12Q5, correspondingly, the corresponding region of underlay substrate 13 are held in the palm by the third region 12Q3 of metal mask plate 12 and the 5th region 12Q5
It rises.By the absorption in above three stage, metal mask plate 12 is gradually adsorbed from central area to fringe region, meanwhile, lining
Substrate 13 is gradually put down by 12 support of metal mask plate.Therefore, after adsorption process, metal mask plate 12 (and underlay substrate 13)
It is flattened on the adsorption plane for being adsorbed in magnetic sheet 11, therefore, vapor deposition yield can be improved.
Illustratively, Fig. 6 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention.Referring to Fig. 6, metal is covered
Template 12 includes main body 120, and the extending direction of center magnetic sheet unit 11E and periphery magnetic sheet unit 11S are first direction X,
The longitudinal direction of the main body 120 of metal mask plate 12 is second direction Y.By be arranged the extending direction of each magnetic sheet unit with
The longitudinal direction of main body 120 is vertical, and each main body 120 can be made sequentially to adsorb from central area to fringe region,
Be conducive to each main body 120 and be adsorbed flattening, and then is conducive to improve vapor deposition yield.
Optionally, with continued reference to Fig. 6, magnetic sheet 11 includes a center magnetic sheet unit (illustratively, with the first magnetic sheet unit
111 show) and two periphery magnetic sheet units (illustrative, to be shown with the second magnetic sheet unit 112 and the 4th magnetic sheet unit 114).
So set, the number for the magnetic sheet unit for including in magnetic sheet 11 can be reduced, to simplify the design of magnetic sheet 11, reduce
The design difficulty of magnetic sheet 11.
Wherein, before 11 adsorbing metal mask plate 12 of magnetic sheet, and center magnetic sheet unit (it is illustrative, with the first magnetic sheet unit
111 show) adsorption plane be located at periphery magnetic sheet unit (it is illustrative, with the second magnetic sheet unit 112 and the 4th magnetic sheet unit 114
Show) adsorption plane close to the side of metal mask plate 12.
Illustratively, Fig. 7 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention.
Referring to Fig. 7, on vertical direction Z, the adsorption plane of center magnetic sheet unit (illustrative, to be shown with the first magnetic sheet unit 111) is low
In the adsorption plane of periphery magnetic sheet unit (illustrative, to be shown with the second magnetic sheet unit 112 and the 4th magnetic sheet unit 114), thus
The adsorption plane of center magnetic sheet unit is closer to metal mask plate 12, it can be achieved that center magnetic sheet unit takes the lead in inhaling in adsorption process
The central area of attached metal mask plate 12, so that the central area of metal mask plate 12 holds up the central area of underlay substrate 13；
Then, periphery magnetic sheet unit (illustrative, to be shown with the second magnetic sheet unit 112 and the 4th magnetic sheet unit 114) adsorbing metal is covered
The fringe region of template 12, thus 12 support fFlat substrate substrate 13 of metal mask plate.
Illustratively, Fig. 8 is the status diagram of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention.
Referring to Fig. 8, after adsorption process, the adsorption plane of center magnetic sheet unit (illustrative, to be shown with the first magnetic sheet unit 111) and
The adsorption plane of periphery magnetic sheet unit (illustrative, to be shown with the second magnetic sheet unit 112 and the 4th magnetic sheet unit 114) is located at same
In plane, and it is parallel to the plane where underlay substrate 13, also parallel with the plane where metal mask plate 12.Due to magnetic sheet 11
During adsorbing metal mask plate 12, metal mask plate 12 is gradually adsorbed from central area to fringe region, meanwhile, substrate
Substrate 13 is gradually put down by 12 support of metal mask plate.Therefore, after adsorption process, metal mask plate 12 (and underlay substrate 13) quilt
Flattening is adsorbed on the adsorption plane of magnetic sheet 11, therefore, vapor deposition yield can be improved.
Optionally, it hangs down with continued reference to Fig. 6, the extending direction X of multiple magnetic sheet units and the extending direction Y of metal mask plate 12
Directly；Wherein, the extending direction Y of metal mask plate 12 is the longitudinal direction of main body 120 in metal mask plate 12.
Wherein, metal mask plate 12 includes mask holder (finger, also referred to as mask lift finger), block masks plate
(cover mask), support mask plate (howling mask), main body 120 (sheet mask) and fixation member (are shown
Example property, it may include screw)；Wherein, block masks plate, support mask plate, main body 120 shape generally elongated in shape；
It include preset pattern in main body 120, end is fixed in mask holder by fixation member；Support the long side side of mask plate
To the longitudinal direction perpendicular to main body 120, and the end of mask plate is supported to be fixed in mask holder by fixation member,
Support mask plate is used to support the intermediate position of main body 120；The longitudinal direction of block masks plate and the length of main body 120
Edge direction is parallel, and upright projection of the block masks plate in mask holder blocks adjacent main body 120 in mask holder
Upright projection between gap.
It is vertical with the longitudinal direction Y of main body 120 by the extending direction X that magnetic sheet unit is arranged, magnetic sheet unit can be made
Orientation Y it is consistent with the longitudinal direction Y of main body 120, thus, during 11 adsorbing metal mask plate 12 of magnetic sheet,
The central area of each main body 120 takes the lead in being adsorbed by the center magnetic sheet unit of magnetic sheet 11, realizes each main body 120 by center
Region is gradually adsorbed to fringe region, while holding in the palm fFlat substrate substrate.Therefore, after adsorption process, metal mask plate 12
Each main body 120 (and underlay substrate) is flattened on the adsorption plane for being adsorbed in magnetic sheet 11, alleviates substrate base to a certain extent
The sagging influence to deformation caused by metal mask plate caused by plate self gravitation effect, it can be ensured that evaporation effect, to mention
Height vapor deposition yield.
Optionally, Fig. 9 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention.Reference Fig. 9, at least one
Periphery magnetic sheet unit 11S (illustrative, to be shown with the second magnetic sheet unit 112 and third magnetic sheet unit 113) is surrounded around center
Magnetic sheet unit 11E (illustrative, to be shown with the first magnetic sheet unit 111).
Illustratively, when magnetic sheet unit in periphery is multiple, outer periphery magnetic sheet unit (example can be known as according to its relative position
Property, third magnetic sheet unit 113 can be described as outer periphery magnetic sheet unit) and inner periphery magnetic sheet unit (illustrative, the second magnetic sheet list
Member 112 can be described as inner periphery magnetic sheet unit), outer periphery magnetic sheet unit (third magnetic sheet unit 113) is surrounded around inner periphery magnetic sheet
Unit (the second magnetic sheet unit 112).
It is surrounded by setting periphery magnetic sheet unit around center magnetic sheet unit, can be made by central area points toward edge region
In multiple directions, magnetic sheet 11 is consistent to the adsorption tendency of metal mask plate 12, and it is entire flat to be advantageously implemented metal mask plate 12
Whole property.
It should be noted that merely exemplary in Fig. 9 show 2 periphery magnetic sheet units, this exemplary only explanation,
And it is non-limiting.In other embodiments, the quantity of periphery magnetic sheet unit can be arranged according to the actual demand of magnetic sheet, and the present invention is real
It applies example and this is not construed as limiting.
Optionally, Figure 10 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention, referring to Fig.1 0, magnetic sheet packet
It includes center magnetic sheet unit (illustrative, to show with the first magnetic sheet unit 111) and a periphery magnetic sheet unit is (exemplary
, shown with the second magnetic sheet unit 112).
So set, the number for the magnetic sheet unit for including in magnetic sheet 11 can be reduced, to simplify the design of magnetic sheet 11, reduce
The design difficulty of magnetic sheet 11.
It should be noted that the center magnetic sheet unit and periphery magnetic sheet unit of separation are illustratively shown in Figure 10, this
The two parts for only clearly showing magnetic sheet 11 are lifted, in actual use, center magnetic sheet unit is located at the borehole of periphery magnetic sheet unit
Place.
Wherein, before 11 adsorbing metal mask plate 12 of magnetic sheet, the adsorption plane of center magnetic sheet unit 11 is located at periphery magnetic sheet list
The adsorption plane of member is close to the side of metal mask plate 12.
Illustratively, Figure 11 is the state signal of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention
Figure.Referring to Fig.1 1, on vertical direction Z, the absorption of center magnetic sheet unit (illustrative, to be shown with the first magnetic sheet unit 111)
Face is lower than the adsorption plane of periphery magnetic sheet unit (illustrative, to show with the second magnetic sheet unit 112), thus center magnetic sheet unit
Adsorption plane closer to metal mask plate 12, in adsorption process, it can be achieved that center magnetic sheet unit takes the lead in adsorbing metal mask plate 12
Central area, thus metal mask plate 12 central area hold up underlay substrate 13 central area；Then, periphery magnetic sheet list
The fringe region of first adsorbing metal mask plate 12, since periphery magnetic sheet cell rings are around center magnetic sheet unit, thus periphery magnetic sheet list
Around the fringe region of central area in first adsorbing metal mask plate 12, multiple sides by central area points toward edge region are realized
It is consistent to the trend being adsorbed, so that the absorption flatness of metal mask plate 12 is preferable.Meanwhile the flat lining of 12 support of metal mask plate
Substrate 13.
Illustratively, Figure 12 is the state signal of another magnetic sheet adsorbing metal mask plate provided in an embodiment of the present invention
Figure.Referring to Fig.1 2, after adsorption process, the absorption of center magnetic sheet unit (illustrative, to be shown with the first magnetic sheet unit 111)
The adsorption plane of face and periphery magnetic sheet unit (illustrative, to be shown with the second magnetic sheet unit 112) is in the same plane, and parallel
Plane where underlay substrate 13, also parallel with the plane where metal mask plate 12.Due to 11 adsorbing metal mask of magnetic sheet
During plate 12, metal mask plate 12 is gradually adsorbed from central area to fringe region, and by central area points toward edge
The trend that the multiple directions in region are adsorbed is consistent；Meanwhile underlay substrate 13 is gradually put down by 12 support of metal mask plate.Therefore,
After adsorption process, metal mask plate 12 (and underlay substrate 13) is flattened on the adsorption plane for being adsorbed in magnetic sheet 11, and metal is covered
The flatness of template 12 is preferable, therefore, it can be ensured that evaporation effect, to improve vapor deposition yield.
It should be noted that the intermediate region for showing magnetic sheet 11 merely exemplary in Figure 10 hollows out, intermediate magnetic sheet is formed
The structure of unit, Figure 11 merely exemplary intermediate region for showing magnetic sheet 11, which is not dug, wears, and formation is embedded in periphery magnetic sheet unit
Intermediate groove in center magnetic sheet unit structure, be the illustrative explanation to magnetic sheet provided by the invention, rather than limit
It is fixed.
Secondly, it should be noted that illustratively shown between metal mask plate 12 and underlay substrate 13 in Fig. 7 and 11
There are gaps, this is because the main body of metal mask plate 12 is propped up by spaced support mask plate (howling mask)
Support.Wherein, at the position being supported, the gap between main body and underlay substrate 13 is smaller, with far from support mask plate
Distance increase, the gap between main body and underlay substrate is gradually increased；Since support mask plate is spaced apart, so
Gap between main body and underlay substrate presents descending and arrives big cyclicity variation tendency.
Optionally, Figure 13 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention.Reference Fig. 9 and Figure 13,
Magnetic sheet includes that center magnetic sheet unit (illustrative, to be shown with the first magnetic sheet unit 111) and multiple periphery magnetic sheet units (show
Example property, shown with the second magnetic sheet unit 112).
So set, magnetic sheet 11 can be refined to the adsorption process of metal mask plate 12, after making adsorption process, metal is covered
The absorption flatness of template 12 (and underlay substrate 13) is preferable.Optionally, with continued reference to Figure 13, the shape of center magnetic sheet unit is
The shape of circle, periphery magnetic sheet unit (illustrative, it may include the second magnetic sheet unit 112 and third magnetic sheet unit 113) is circle
Annular.
So set, during 11 adsorbing metal mask plate 12 of magnetic sheet can be made, metal mask plate 12 from central area to
Fringe region is gradually adsorbed, and consistent by the trend that all directions in central area points toward edge region are adsorbed, metal
The absorption flatness of mask plate 12 is preferable.
Optionally, with continued reference to Figure 10, the shape of center magnetic sheet unit is rectangle, and periphery magnetic sheet unit (illustratively, can
Including the second magnetic sheet unit 112 and third magnetic sheet unit 113) shape be straight-flanked ring.
Wherein, due to magnetic sheet by installation base plate and and several magnetic stripes for being installed on installation base plate constitute, and magnetic stripe
In being generally rectangular in shape for adsorption plane, therefore, by setting rectangle or straight-flanked ring for magnetic sheet unit, magnetic sheet unit can be reduced
Design difficulty, simplify the manufacture craft of each magnetic sheet unit.
In the following, illustrating the structure of magnetic sheet in conjunction with installation base plate and magnetic stripe.
Illustratively, with continued reference to Fig. 6 or Fig. 9, magnetic sheet 11 includes installation base plate and is arranged in several on installation base plate
A magnetic stripe.Illustratively, magnetic stripe can be set on installation base plate by magnetic stripe slot, and different magnetic stripes are revealed according in slot
Polarity difference is divided into different magnetic stripe groups out.
In this way, may be provided with the magnetic stripe group that multiple groups are arranged along first direction on the installation base plate of magnetic sheet, in every group of magnetic stripe group
Including multiple magnetic stripes；Wherein, one end polarity of the separate installation base plate of the magnetic stripe in two adjacent groups magnetic stripe group is different, and is located at same
The polarity of two neighboring magnetic stripe in one magnetic stripe group is identical or different.
Illustratively, magnetic sheet can divide as center magnetic sheet unit and at least one periphery magnetic sheet unit, in center magnetic sheet list
The magnetic stripe slot and magnetic stripe group of center magnetic sheet unit are corresponding on the installation base plate of member；In the peace of at least one periphery magnetic sheet unit
The magnetic stripe slot and magnetic stripe group of at least one periphery magnetic sheet unit are corresponding on dress substrate, details are not described herein.
Illustratively, can extend with continued reference to Fig. 6 or Fig. 9, multiple magnetic stripe groups along first direction X, Y replaces in a second direction
It arranges, the polarity of magnetic stripe is different in two adjacent magnetic stripe groups.
Illustratively, using first direction X as line direction, second direction Y is column direction.Every row magnetic stripe forms a magnetic stripe
Group, then one end polarity that the separate installation base plate of the magnetic stripe in two adjacent groups magnetic stripe group is shown in Fig. 6 is different, and is located at same
The identical set-up mode of polarity of two neighboring magnetic stripe in magnetic stripe group.
Illustratively, Figure 14 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention, shows adjacent two
One end polarity of the separate installation base plate of magnetic stripe in group magnetic stripe group two neighboring magnetic stripes that are different, and being located in same magnetic stripe group
The different set-up mode of polarity.
The above-mentioned merely exemplary magnetic stripe shown in column direction (i.e. second direction Y), two neighboring magnetic stripe group at
Column setting, but the restriction not to the magnetic sheet in vacuum deposition apparatus provided in an embodiment of the present invention.
Optionally, Figure 15 is the structural schematic diagram of another magnetic sheet provided in an embodiment of the present invention.Referring to Fig.1 5, it is located at phase
Each magnetic stripe in adjacent two magnetic stripe groups is staggered.
So set, the flexibility of magnetic stripe installation can be increased.
The set-up mode of above-mentioned each magnetic stripe is, it can be achieved that the magnetic field strength and homogeneity of each magnetic sheet unit are all the same, to keep away
Exempt from deformation caused by unbalance stress and stress at each position of metal mask plate 12, to guarantee evaporation effect, improves vapor deposition
Yield.
In addition, for multiple adsorption planes are the magnetic sheet of same magnetic pole, the setting of magnetic stripe provided in this embodiment
Mode can also weaken or longitudinal magnetism is avoided to interfere, to advantageously ensure that metal mask plate is smooth in adsorption process
Property.
It should be noted that merely exemplary in Fig. 6, Fig. 9, Figure 14 and Figure 15 show first direction X and second party
It is mutually perpendicular to Y, this exemplary only explanation.In other embodiments, the angle of the crossing of first direction X and second direction Y
Degree can be arranged according to the actual demand of magnetic sheet 11, and the present invention is not construed as limiting this in implementing.
Secondly, it should be noted that merely exemplary in Fig. 6, Fig. 9, Figure 14 and Figure 15 to show magnetic stripe in first party
The shape in plane determined to X and second direction Y is rectangle, but not fills to vacuum evaporation provided in an embodiment of the present invention
The restriction of magnetic sheet in setting.In other embodiments, the shape can also be set for pros according to the actual demand of magnetic sheet
Shape, circle or other polygons, the embodiment of the present invention are not construed as limiting this.
Optionally, magnetic stripe is permanent magnet, and permanent magnet does not have the differentiation of arctic N Yu South Pole S, and magnetic stripe is arranged to permanent magnet,
Also it can avoid magnetic sheet to interfere the longitudinal magnetism that metal mask plate generates, to advantageously ensure that metal mask plate in adsorption process
In planarization.But since permanent magnet its production technology is difficult, at high cost and limit its extensive use industrially.
In this way, being conducive to the magnetic stability of magnetic sheet entirety, so that it is advantageously ensured that magnetic sheet has longer service life.
Optionally, with continued reference to any figure of Fig. 2-Figure 15, the EDGE CONTACT of adjacent magnetic sheet unit.
Wherein, metal mask plate 12 and underlay substrate 13 are whole face continuously complete planar structure.So set, can be real
Now entire magnetic sheet 11 avoids metal mask plate 12 to there is magnetic force (suction-operated) at each position of metal mask plate 12
Certain positions due to it is not sagging by magneticaction when caused out-of-flatness.
Optionally, upright projection of the magnetic sheet 11 on metal mask plate 12 covers metal mask plate 12.
It is arranged such, it can be achieved that absorption of the magnetic sheet 11 to entire metal mask plate 12, avoids due to metal mask plate 12
Certain positions due to not adsorbed by magnetic sheet 11, cause metal mask plate 12 and underlay substrate 13 attach it is bad caused by vapor deposition it is bad
The problem of.Thus, it can be ensured that evaporation effect improves vapor deposition yield.
Optionally, Figure 16 is the structural schematic diagram of another vacuum deposition apparatus provided in an embodiment of the present invention.Referring to figure
16, which further includes that multiple driving units 13 are (illustrative, it may include the first driving unit 131, second drives
Moving cell 132, third driving unit 133, the 4th driving unit 134 and the 5th driving unit 135)；Each driving unit and one
A magnetic sheet unit is (illustrative, it may include the first magnetic sheet unit 111, the second magnetic sheet unit 112, third magnetic sheet unit 113, the
Four magnetic sheet units 114 and the 5th magnetic sheet unit 115) connection；Driving unit is for driving the magnetic sheet unit connecting with driving unit
It is mobile.
Wherein, the control magnetic sheet unit that driving unit can be relatively independent is mobile, thus the opposite position of adjustable magnetic sheet unit
It sets, realization magnetic sheet is during adsorbing metal mask plate, the variation of the relative position of each magnetic sheet unit.
Illustratively, the first driving unit 131, the second driving unit 132, third driving unit 133, the 4th driving unit
134 and the 5th driving unit 135 respectively with the first magnetic sheet unit 111, the second magnetic sheet unit 112, third magnetic sheet unit 113,
Four magnetic sheet units 114 and the 5th magnetic sheet unit 115 connect one to one, and each driving unit drives a magnetic sheet unit mobile,
This exemplary only explanation.In other embodiments, can also be arranged according to the actual demand of vacuum deposition apparatus each
Driving unit is correspondingly connected with relationship with magnetic sheet unit.
Optionally, Figure 17 is the structural schematic diagram of another vacuum deposition apparatus provided in an embodiment of the present invention.Referring to figure
17, each driving unit (illustrative, it may include the second driving unit 132, third driving unit 133) is with multiple with center magnetic
Plate unit (illustrative, to be shown with the first magnetic sheet unit 111) is connected apart from identical multiple periphery magnetic sheet units.
Illustratively, the first magnetic sheet unit 111 (can be used as center magnetic sheet unit) is connected to the first driving unit 111, the
Two magnetic sheet units 112 and the 4th magnetic sheet unit are connected to the same driving unit and (illustratively, are shown with the second driving unit 132
Out), third magnetic sheet unit 113 and the 5th magnetic sheet unit 115 are connected to the same driving unit and (illustratively, are driven with third
Unit 133 is shown).As a result, by setting and center magnetic sheet unit (being herein the first magnetic sheet unit 111) apart from identical magnetic sheet
Unit is connected to the same driving unit, can reduce the number of driving unit, so as to simplify the design of driving unit.
It should be noted that the connection between driving unit and magnetic sheet unit can also use other skilled in the art
Known connection type, the embodiment of the present invention are not construed as limiting this.
Vacuum deposition apparatus provided in this embodiment drives magnetic sheet unit mobile, in magnetic sheet ADSORPTION OF GOLD by driving unit
Before belonging to mask plate, the adsorption plane of center magnetic sheet unit is located at the adsorption plane of periphery magnetic sheet unit close to the one of metal mask plate
Side；During magnetic sheet adsorbing metal mask plate, the central area of center magnetic sheet unit elder generation adsorbing metal mask plate；And the Later Zhou Dynasty, one of the Five Dynasties
The fringe region of side magnetic sheet unit adsorbing metal mask plate；After magnetic sheet adsorbing metal mask plate, the suction of center magnetic sheet unit
Attached face and the adsorption plane of periphery magnetic sheet unit are in the same plane.The central area of metal mask plate takes the lead in by center as a result,
Magnetic sheet unit absorption, so that metal mask plate holds up the central area of underlay substrate；Then, periphery magnetic sheet unit adsorbing metal is covered
The fringe region of template, metal mask plate equal underlay substrate support.Therefore, during magnetic sheet adsorbing metal mask plate, metal
Mask plate is gradually adsorbed from central area to fringe region, so that metal mask plate keeps preferable after adsorption process
Therefore vapor deposition yield can be improved in planarization.
Based on the same inventive concept, the embodiment of the invention also provides a kind of vacuum deposition methods.The vacuum deposition method
The vacuum deposition apparatus that can be provided by above embodiment executes, and can be applied to magnetic sheet and inhales to underlay substrate and metal mask plate
In attached process.It can refer in above embodiment in place of non-explained in details to vacuum deposition apparatus in the vacuum deposition method
Explanation is understood, is hereinafter repeated no more.
Illustratively, Figure 18 is a kind of flow diagram of vacuum deposition method provided in an embodiment of the present invention.Referring to figure
18, which includes:
Metal mask plate and the substrate to be deposited on metal mask plate are provided, component to be deposited is formed.
Illustratively, it can refer to Fig. 1, underlay substrate 13 (substrate i.e. to be deposited) and metal mask plate 12 form to be deposited group
Part.
Component to be deposited is placed in vacuum deposition apparatus, includes magnetic sheet in vacuum deposition apparatus, magnetic sheet includes center magnetic
Plate unit and at least one periphery magnetic sheet unit positioned at center magnetic sheet unit periphery.
Illustratively, it can refer to the magnetic sheet shown in Fig. 2-Fig. 4 to the adsorption process of metal mask plate.
In this way, at least one periphery magnetic sheet unit of magnetic sheet 11 includes at least two periphery magnetic sheet units, in the embodiment
In be four periphery magnetic sheet units, parallel and symmetrical two that the center magnetic sheet unit is set of this four periphery magnetic sheet units
Side；In promoting adsorption process of the magnetic sheet to metal mask plate, may make metal mask plate 12 and underlay substrate 13 from center to
Edge is gradually adsorbed, and then is advantageously implemented magnetic sheet and is adsorbed planarization effects to metal mask plate.
Optionally, magnetic sheet is specific to the adsorption process of metal mask plate can include:
Magnetic sheet is divided as center magnetic sheet unit 111, the first periphery magnetic sheet unit 112,114, the second periphery magnetic sheet unit
113,115.The structure for pre-adjusting magnetic sheet, makes center magnetic sheet unit 111, the first periphery magnetic sheet unit 112,114, the second periphery
Magnetic sheet unit 113,115 forms difference in height towards the side of component to be deposited, i.e., center magnetic sheet unit 111 and metal mask plate it
Between distance, the distance between the first periphery magnetic sheet unit 112,114 and metal mask plate, the second periphery magnetic sheet unit 113,
These three distances of the distance between 115 and metal mask plate form original state, can refer to Fig. 2 in successively ascendant trend.
Driving has that the magnetic sheet 11 of original state is mobile to component to be deposited so that center magnetic sheet unit 111 with it is to be deposited
The central area 12Q1 of component is bonded；
Drive the first periphery magnetic sheet unit 112,114 and the second periphery magnetic sheet unit 113,115 mobile to component to be deposited,
It is bonded respectively with neighboring area 12Q2,12Q4 of component to be deposited to the first periphery magnetic sheet unit 112,114；
Drive the second periphery magnetic sheet unit 113,115 mobile to component to be deposited, until the second periphery magnetic sheet unit 113,115
It is bonded respectively with neighboring area 12Q3,12Q5 of component to be deposited；Illustratively, it can refer to Fig. 3.
Until 11 whole face of magnetic sheet is bonded with component 12 and 13 to be deposited, reach state shown in Fig. 4.
In this way, metal mask plate 12 and underlay substrate 13 may make gradually to be adsorbed from center to edge, and then be conducive to
The preferable planarization of metal mask plate is realized, to improve vapor deposition yield.
Illustratively, it may further reference absorption of the magnetic sheet shown in Figure 10, Figure 13, Figure 14 and Figure 15 to metal mask plate
Journey.
In this way, at least one periphery magnetic sheet unit of magnetic sheet 11 can be a periphery magnetic sheet unit, the periphery magnetic sheet list
Member is arranged around the center magnetic sheet unit；Or at least one periphery magnetic sheet unit can be at least two periphery magnetic sheet lists
Member, at least two peripheries magnetic sheet unit are successively circumferentially positioned at center magnetic from center magnetic sheet unit to periphery magnetic sheet cell orientation
The periphery of plate unit.
Wherein, at least one periphery magnetic sheet unit of magnetic sheet 11 is a periphery magnetic sheet unit, the periphery magnetic sheet cell rings
It is arranged around the center magnetic sheet unit；In promoting adsorption process of the magnetic sheet to metal mask plate, metal mask plate 12 may make
It is gradually adsorbed with underlay substrate 13 from center to edge, and then is advantageously implemented magnetic sheet and smooth effect is adsorbed to metal mask plate
Fruit can refer to Figure 10, Figure 14 and Figure 15.
Optionally, magnetic sheet is specific to the adsorption process of metal mask plate can include:
Magnetic sheet is divided as center magnetic sheet unit 111 and a periphery magnetic sheet unit 112, the structure of magnetic sheet is pre-adjusted,
Center magnetic sheet unit and periphery magnetic sheet unit is set to form difference in height, i.e. center magnetic sheet unit and gold towards the side of component to be deposited
Belong to the distance between mask plate and be less than the distance between periphery magnetic sheet unit and metal mask plate, forms original state.
Driving has that the magnetic sheet 11 of original state is mobile to component to be deposited so that center magnetic sheet unit 111 with it is to be deposited
The central area of component is bonded；
Drive periphery magnetic sheet unit 112 mobile to component to be deposited, until the week of periphery magnetic sheet unit 112 and component to be deposited
Border region fitting, until magnetic sheet whole face and component joint to be deposited.
In this way, metal mask plate 12 and underlay substrate 13 may make gradually to be adsorbed from center to edge, and then be conducive to
The preferable planarization of metal mask plate is realized, to improve vapor deposition yield.
Wherein, at least one periphery magnetic sheet unit of magnetic sheet can be at least two periphery magnetic sheet units, reference can be made to Figure 13,
The magnetic sheet can divide as center magnetic sheet unit 111, the first periphery magnetic sheet unit 112 and the second periphery magnetic sheet unit 113, and first
Periphery magnetic sheet unit 112 is circumferentially positioned at the periphery of center magnetic sheet unit 111, and the second periphery magnetic sheet unit 113 is circumferentially positioned at
The periphery of first periphery magnetic sheet unit 112.
Optionally, magnetic sheet is specific to the adsorption process of metal mask plate can include:
The structure for pre-adjusting magnetic sheet, makes center magnetic sheet unit 111, the first periphery magnetic sheet unit 112, the second periphery magnetic sheet
Unit 113 towards component to be deposited side formed difference in height, i.e., between center magnetic sheet unit 111 and metal mask plate away from
From the distance between, the first periphery magnetic sheet unit 112 and metal mask plate, the second periphery magnetic sheet unit 113 and metal mask plate
The distance between these three distances in successively ascendant trend, form original state.
Driving has that the magnetic sheet 11 of original state is mobile to component to be deposited so that center magnetic sheet unit 111 with it is to be deposited
The central area of component is bonded；
Drive the first periphery magnetic sheet unit 112 and the second periphery magnetic sheet unit 113 mobile to component to be deposited, until first week
The fitting of first neighboring area of side magnetic sheet unit 112 and corresponding component to be deposited；
Drive the second periphery magnetic sheet unit 113 mobile to component to be deposited, until the second periphery magnetic sheet unit 113 and corresponding
Second neighboring area of component to be deposited is bonded；Until magnetic sheet whole face and component joint to be deposited.
In this way, metal mask plate 12 and underlay substrate 13 may make gradually to be adsorbed from center to edge, and then be conducive to
The preferable planarization of metal mask plate is realized, to improve vapor deposition yield.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts, be combined with each other and substitutes without departing from protection scope of the present invention.Therefore, although by above embodiments to this
Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept
In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (11)
1. a kind of vacuum deposition apparatus, is used cooperatively with metal mask plate, which is characterized in that the vacuum deposition apparatus includes:
For adsorbing the magnetic sheet of the metal mask plate, the magnetic sheet includes center magnetic sheet unit and is located at the center magnetic sheet list
At least one periphery magnetic sheet unit of first periphery, wherein the center magnetic sheet unit and the periphery magnetic sheet unit are relative to institute
Metal mask plate is stated separately to be movably arranged.
2. vacuum deposition apparatus according to claim 1, which is characterized in that at least one described periphery magnetic sheet unit includes
Multiple periphery magnetic sheet units being separately movably arranged relative to the metal mask plate.
3. vacuum deposition apparatus according to claim 1, which is characterized in that at least one described periphery magnetic sheet unit includes
It is arranged in parallel at least two periphery magnetic sheet units of the center magnetic sheet unit two sides；The extension side of the center magnetic sheet unit
To vertical with the longitudinal direction of main body in the metal mask plate；It is preferably located at the center magnetic sheet unit two sides
Periphery magnetic sheet unit be symmetrical arranged.
4. vacuum deposition apparatus according to claim 1, which is characterized in that at least one described periphery magnetic sheet unit surrounds
Around the center magnetic sheet unit；Preferably, the shape of the center magnetic sheet unit is round or rectangle, at least one described week
The shape of side magnetic sheet unit is circular rings corresponding with the shape of the center magnetic sheet unit or straight-flanked ring；Preferably, it is described extremely
A few periphery magnetic sheet unit includes the multiple periphery magnetic sheet units successively arranged outward by center magnetic sheet unit.
5. vacuum deposition apparatus according to claim 1, which is characterized in that the magnetic sheet includes installation base plate and setting
Several magnetic stripes on the installation base plate.
6. vacuum deposition apparatus according to claim 5, which is characterized in that be provided with multiple groups on the magnetic sheet along same side
It include multiple magnetic stripes in magnetic stripe group described in every group to the magnetic stripe group of arrangement；
Wherein, one end polarity far from the installation base plate of the magnetic stripe in magnetic stripe group described in two adjacent groups is different, and position
The polarity of the two neighboring magnetic stripe in the same magnetic stripe group is identical or different.
7. vacuum deposition apparatus according to claim 5, which is characterized in that each in the two neighboring magnetic stripe group
The magnetic stripe is staggered.
8. vacuum deposition apparatus according to claim 5, which is characterized in that the magnetic stripe is permanent magnet.
9. a kind of method of vacuum evaporation characterized by comprising
Metal mask plate and the substrate to be deposited on metal mask plate are provided, component to be deposited is formed；
The component to be deposited is placed in vacuum deposition apparatus, includes magnetic sheet, the magnetic sheet packet in the vacuum deposition apparatus
Include center magnetic sheet unit and at least one periphery magnetic sheet unit positioned at the center magnetic sheet unit periphery；
Drive the center magnetic sheet unit of the magnetic sheet prior to the periphery magnetic sheet unit and the component joint to be deposited.
10. vacuum deposition method according to claim 9, which is characterized in that further include:
Pre-adjust the structure of the magnetic sheet so that the center magnetic sheet unit and at least one described periphery magnetic sheet unit towards
The side of the component to be deposited forms difference in height, forms original state；
Driving has that the magnetic sheet of original state is mobile to the component to be deposited so that the center magnetic sheet unit with it is described
The fitting of center magnetic sheet unit；
Drive the periphery magnetic sheet unit mobile to the component to be deposited, until the magnetic sheet whole face and the component to be deposited paste
It is combined into only.
11. vacuum deposition method according to claim 10, which is characterized in that at least one described periphery magnetic sheet unit packet
Include multiple periphery magnetic sheet units；
During the structure for adjusting the magnetic sheet forms original state, so that the magnetic sheet is towards the component to be deposited
Side forms the difference in height successively changed from center magnetic sheet unit to the edge direction of the magnetic sheet；
During driving the periphery magnetic sheet unit mobile to the component to be deposited so that the periphery magnetic sheet unit by
Center magnetic sheet unit is successively adsorbed with the component to be deposited to the edge direction of the magnetic sheet, until the magnetic sheet whole face with it is described
Until component joint to be deposited.
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| CN201910055300.2A CN109609912A (en) | 2019-01-21 | 2019-01-21 | Vacuum deposition apparatus and vacuum deposition method |
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Application publication date: 20190412 |
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