CN109591196A - 机械化学线锯复合切割方法及切割液 - Google Patents

机械化学线锯复合切割方法及切割液 Download PDF

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CN109591196A
CN109591196A CN201811464214.9A CN201811464214A CN109591196A CN 109591196 A CN109591196 A CN 109591196A CN 201811464214 A CN201811464214 A CN 201811464214A CN 109591196 A CN109591196 A CN 109591196A
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赵礼刚
夏国锋
左雪
管小燕
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Jiangsu University of Science and Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/06—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with reciprocating saw-blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/06—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with reciprocating saw-blades
    • B28D1/068—Components, e.g. guiding means, vibrations damping means, frames, driving means, suspension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M173/00—Lubricating compositions containing more than 10% water
    • C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06—Metal compounds
    • C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
    • C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
    • C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
    • C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/04—Detergent property or dispersant property
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/06—Oiliness; Film-strength; Anti-wear; Resistance to extreme pressure
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/12—Inhibition of corrosion, e.g. anti-rust agents or anti-corrosives

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  • Oil, Petroleum & Natural Gas (AREA)
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Abstract

本发明公开了一种机械化学线锯复合切割方法及切割液，该方法包括以下步骤：将锯丝靠近工件，对工件进行切割；通过步进电机完成工件水平进给；喷嘴将切割液喷洒到工件表面；切割液在锯丝往复运动的带动下，进入到切割表面；所述切割液包括反应溶剂、分散剂、有机碱、缓蚀剂、表面活性剂、去离子水。本发明所述切割液具有良好的冷却、润滑、散热、防锈等性能，并且安全无污染；所述切割方法可在蓝宝石晶片切割过程中提高锯丝切割效率以及工件的表面质量。

Description

机械化学线锯复合切割方法及切割液
技术领域
本发明涉及线锯切割领域，特别是涉及一种机械化学线锯复合切割方法及切割液。
背景技术
蓝宝石主要成分是三氧化二铝，其具有耐高温、抗腐蚀、高硬度、熔点高、高透光性等特点，因此大量用于光学元件中；随着光学元件相关产业的迅猛发展，对蓝宝石晶片的需求量也大大增加。现有技术中，产业上大量应用的蓝宝石晶片主要是采用线切割技术，对晶锭进行切割而成的。
在传统线锯切割过程中，切削液采用的大多是水和聚乙二醇的混合物，其被往复运动的锯丝带入切割区域，主要承担润滑、冷却、清洗等作用。然而，传统的切削液仅能起辅助作用，对切割效率的影响并不显著；针对线锯切割效率低的缺点，目前大多数企业采用由切削液和磨粒组成的磨浆来充当线锯切割时的润滑剂，切割时磨粒随锯丝一起运动。而这种切割方式会影响晶片的表面质量，从而降低晶片品质。因此，亟待解决上述问题。
发明内容
发明目的：本发明的目的是提供一种机械化学线锯复合切割方法及切割液，该切割方法及切割液能够提高锯丝切割效率，并保证工件的表面质量。
技术方案：为实现以上目的，本发明所述的机械化学线锯复合切割方法包括以下步骤：
(1)将金刚石线锯切割机的锯丝靠近工件，对工件进行切割；
(2)工件通过步进电机完成水平进给；
(3)启动喷嘴系统，将切割液喷洒到工件表面；
(4)切割液在锯丝往复运动的带动下，进入到切割表面，切割液与切割表面发生微量化学反应。
所述切割液包括反应溶剂、分散剂、有机碱、缓蚀剂、表面活性剂、去离子水，所述反应溶剂为氢氧化钠，所述有机碱为二乙醇胺，有机碱主要用于调节酸碱度，使切割液实际呈碱性。
进一步地，所述分散剂为聚乙二醇，其数均分子量为400。
进一步地，为了避免对金属设备的腐蚀，延长切割设备的使用寿命，所述缓蚀剂选为有机羧酸，起缓蚀防锈的作用。
进一步地，所述表面活性剂由酚醚羧酸及酚醚羧酸盐复配而成，具有优异的洗涤性能和配伍性能。
进一步地，所述反应溶剂占切割液总体的质量分数为5％-10％，所述分散剂占切割液总体的质量分数为25％-40％，所述有机碱占切割液总体的质量分数为6％-10％，所述缓蚀剂占切割液总体的质量分数为2％-6％，所述表面活性剂占切割液总体的质量分数为5％-10％，其余余量为去离子水。
有益效果：与现有技术相比，本发明具有以下显著优点：
(1)本发明所述切割液具有良好的冷却、润滑、散热、防锈等功能，并且安全无污染；本发明所述切割方法可在蓝宝石晶片切割过程中提高锯丝切割效率以及工件的表面质量；
(2)切割液中反应溶剂为氢氧化钠，该反应溶剂与晶锭在切割区域发生微量的化学反应，加快锯丝切割效率；有机碱用于调节切割液的酸碱度，使切割液呈碱性，以促进反应溶剂与晶锭工件切割区域的化学反应；
(3)切割设备主要由金属构成，在切割液中添加缓蚀剂可起到缓蚀防锈的作用，避免对设备的腐蚀，延长切割设备的使用寿命；表面活性剂由酚醚羧酸及其盐复配而成，具有优异的洗涤性能和配伍性能。
附图说明
图1为本发明线锯切割过程示意图。
具体实施方式
下面结合附图对本发明的技术方案作进一步说明。
如图1所示，本发明所述的机械化学线锯复合切割方法包括以下步骤：
(1)将金刚石线锯切割机的锯丝4靠近工件2，对工件2进行切割；
(2)工件2通过步进电机完成水平进给；
(3)启动喷嘴系统1，将切割液3喷洒到工件2表面；
(4)切割液3在锯丝4往复运动的带动下，进入到切割表面，切割液3与切割表面发生微量化学反应，加快切割效率。
该切割方法中所用的切割液3包括反应溶剂、分散剂、有机碱、缓蚀剂、表面活性剂、去离子水。所述反应溶剂为氢氧化钠，其为一种强碱性溶液。蓝宝石的主要成分为三氧化二铝，化学式为Al2O3，其与反应溶剂之间的化学反应为Al2O3+2NaOH＝2NaAlO2+H2O；其中NaAlO2为偏铝酸钠。由于蓝宝石具有较强的抗腐蚀性，该反应溶剂与晶锭在切割区域会发生微量的化学反应，从而加快锯丝切割效率。
所述分散剂为聚乙二醇，其数均分子量为400；所述有机碱为二乙醇胺，有机碱主要用于调节酸碱度，让切割液实际为碱性，以促进反应溶剂与晶锭工件切割区域的化学反应；所述缓蚀剂为有机羧酸，起缓蚀防锈的作用，以避免对金属设备的腐蚀，延长切割设备的使用寿命；所述表面活性剂为酚醚羧酸及其盐复配而成，具有优异的洗涤性能和配伍性能。在切割液中，反应溶剂占切割液总体的质量分数为5％-10％，分散剂占切割液总体的质量分数为25％-40％，有机碱占切割液总体的质量分数为6％-10％，缓蚀剂占切割液总体的质量分数为2％-6％，表面活性剂占切割液总体的质量分数为5％-10％，其余余量为去离子水。

Claims (6)

1.一种机械化学线锯复合切割方法，其特征在于：包括以下步骤：
(1)将金刚石线锯切割机的锯丝靠近工件，对工件进行切割；
(2)工件通过步进电机完成水平进给；
(3)启动喷嘴系统，将切割液喷洒到工件表面；
(4)切割液在锯丝往复运动的带动下，进入到切割表面，切割液与切割表面发生微量化学反应。
2.一种用于权利要求1所述的机械化学线锯复合切割方法的切割液，其特征在于：所述切割液包括反应溶剂、分散剂、有机碱、缓蚀剂、表面活性剂、去离子水，所述反应溶剂为氢氧化钠，所述有机碱为二乙醇胺，使切割液呈碱性。
3.根据权利要求2所述的切割液，其特征在于：所述分散剂为聚乙二醇，其数均分子量为400。
4.根据权利要求2所述的切割液，其特征在于：所述缓蚀剂为有机羧酸。
5.根据权利要求2所述的切割液，其特征在于：所述表面活性剂由酚醚羧酸及酚醚羧酸盐复配而成。
6.根据权利要求2所述的切割液，其特征在于：所述反应溶剂占切割液总体的质量分数为5％-10％，所述分散剂占切割液总体的质量分数为25％-40％，所述有机碱占切割液总体的质量分数为6％-10％，所述缓蚀剂占切割液总体的质量分数为2％-6％，所述表面活性剂占切割液总体的质量分数为5％-10％，其余余量为去离子水。
CN201811464214.9A 2018-11-30 2018-11-30 机械化学线锯复合切割方法及切割液 Pending CN109591196A (zh)

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