CN109580179B - 基于波前技术的非球面透镜偏心检测装置及其检测方法 - Google Patents
基于波前技术的非球面透镜偏心检测装置及其检测方法 Download PDFInfo
- Publication number
- CN109580179B CN109580179B CN201811399344.9A CN201811399344A CN109580179B CN 109580179 B CN109580179 B CN 109580179B CN 201811399344 A CN201811399344 A CN 201811399344A CN 109580179 B CN109580179 B CN 109580179B
- Authority
- CN
- China
- Prior art keywords
- lens
- image
- light source
- measured
- wavefront
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 45
- 238000005516 engineering process Methods 0.000 title claims abstract description 22
- 238000003384 imaging method Methods 0.000 claims abstract description 124
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 239000013307 optical fiber Substances 0.000 claims abstract description 25
- 239000000835 fiber Substances 0.000 claims abstract description 12
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims description 60
- 210000001747 pupil Anatomy 0.000 claims description 36
- 238000012545 processing Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 28
- 238000005259 measurement Methods 0.000 claims description 17
- 238000004364 calculation method Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 5
- 238000010008 shearing Methods 0.000 claims description 2
- 238000012634 optical imaging Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811399344.9A CN109580179B (zh) | 2018-11-22 | 2018-11-22 | 基于波前技术的非球面透镜偏心检测装置及其检测方法 |
| EP18919386.5A EP3677893B1 (en) | 2018-11-22 | 2018-12-12 | Aspheric lens eccentricity detection apparatus and detection method based on wavefront technology |
| US16/616,158 US11506567B2 (en) | 2018-11-22 | 2018-12-12 | Aspheric lens eccentricity detecting device based on wavefront technology and detecting method thereof |
| PCT/CN2018/120449 WO2020103221A1 (zh) | 2018-11-22 | 2018-12-12 | 基于波前技术的非球面透镜偏心检测装置及其检测方法 |
| JP2019565415A JP7105254B2 (ja) | 2018-11-22 | 2018-12-12 | 波面技術に基づく非球面レンズ偏心検出装置及びその検出方法 |
| KR1020197034821A KR102292329B1 (ko) | 2018-11-22 | 2018-12-12 | 파면 기술에 기반한 비구면 렌즈 편심 검출장치 및 그 검출방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811399344.9A CN109580179B (zh) | 2018-11-22 | 2018-11-22 | 基于波前技术的非球面透镜偏心检测装置及其检测方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109580179A CN109580179A (zh) | 2019-04-05 |
| CN109580179B true CN109580179B (zh) | 2021-01-08 |
Family
ID=65923503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811399344.9A Active CN109580179B (zh) | 2018-11-22 | 2018-11-22 | 基于波前技术的非球面透镜偏心检测装置及其检测方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11506567B2 (https=) |
| EP (1) | EP3677893B1 (https=) |
| JP (1) | JP7105254B2 (https=) |
| KR (1) | KR102292329B1 (https=) |
| CN (1) | CN109580179B (https=) |
| WO (1) | WO2020103221A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109990986B (zh) * | 2019-05-09 | 2020-11-24 | 长春理工大学 | 一种用于单轴光学系统光轴的标定方法及装置 |
| CN110736610B (zh) * | 2019-10-22 | 2021-08-20 | 歌尔光学科技有限公司 | 测量光学中心偏移的方法、装置、存储介质及深度相机 |
| CN110793754A (zh) * | 2019-11-01 | 2020-02-14 | 中国科学院光电技术研究所 | 一种基于相移调制的拼接式望远镜系统偏心误差探测方法 |
| CN111044260B (zh) * | 2019-12-27 | 2021-05-18 | 中国科学院长春光学精密机械与物理研究所 | 显微物镜畸变测试装置及测试方法 |
| CN112797961B (zh) * | 2020-12-30 | 2022-03-04 | 中国工程物理研究院激光聚变研究中心 | 光学准直系统 |
| US20250180429A1 (en) * | 2022-02-28 | 2025-06-05 | Engelbert Hofbauer | Method for measuring optical lens surfaces |
| CN114459395B (zh) * | 2022-03-28 | 2023-09-22 | 深圳众庭联合科技有限公司 | 一种平面平晶检定装置及检定方法 |
| CN114778079B (zh) * | 2022-03-31 | 2024-01-23 | 宜宾市极米光电有限公司 | 一种偏心仪及偏心检测方法 |
| CN115638741A (zh) * | 2022-10-11 | 2023-01-24 | 淮安艾利光电仪器有限公司 | 一种非球面镜片面型检测系统 |
| CN115962922B (zh) * | 2023-01-18 | 2025-04-22 | 中国科学院长春光学精密机械与物理研究所 | 基于光纤互联的高精度大行程光学间隔测量装置及方法 |
| CN116295096B (zh) * | 2023-02-10 | 2025-08-26 | 北京华卓精科科技股份有限公司 | 器件面形检测方法、装置及系统 |
| CN116399561A (zh) * | 2023-03-31 | 2023-07-07 | 中国科学院长春光学精密机械与物理研究所 | 子孔径拼接光谱定标检测装置及其检测方法 |
| CN120740775A (zh) * | 2025-08-28 | 2025-10-03 | 中国工程物理研究院应用电子学研究所 | 一种宽光谱波前和光轴探测装置以及使用方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW283201B (https=) * | 1993-08-13 | 1996-08-11 | Ricoh Kk | |
| JP2000193441A (ja) * | 1998-12-25 | 2000-07-14 | Canon Inc | 偏心測定方法及び偏心測定装置 |
| JP2005201703A (ja) | 2004-01-14 | 2005-07-28 | Konica Minolta Opto Inc | 干渉測定方法及び干渉測定システム |
| JP2008096233A (ja) | 2006-10-11 | 2008-04-24 | Pentax Corp | 光学部材検査装置 |
| CN100582715C (zh) * | 2006-12-25 | 2010-01-20 | 鸿富锦精密工业（深圳）有限公司 | 镜片偏心检测系统及方法 |
| JP4880513B2 (ja) | 2007-03-29 | 2012-02-22 | 富士フイルム株式会社 | 非球面レンズの面ずれ測定方法および装置 |
| JP5084327B2 (ja) | 2007-04-04 | 2012-11-28 | オリンパス株式会社 | 偏心検査装置及び偏心調整装置 |
| CN101226344B (zh) * | 2008-01-31 | 2010-06-02 | 上海微电子装备有限公司 | 测量光学系统参数的测量装置及其测量方法 |
| JP5399304B2 (ja) | 2010-03-23 | 2014-01-29 | 富士フイルム株式会社 | 非球面体測定方法および装置 |
| JP2014115077A (ja) | 2011-03-31 | 2014-06-26 | Fujifilm Corp | レンズの面ズレ・面倒れを測定するレンズ測定方法及び装置 |
| JP5988643B2 (ja) * | 2012-03-26 | 2016-09-07 | キヤノン株式会社 | 計測装置、計測方法及び光学部品の製造方法 |
| CN102944194B (zh) * | 2012-11-21 | 2015-04-01 | 中国科学院光电技术研究所 | 一种高精度高次非球面透镜偏心测定系统及方法 |
| JP5925972B2 (ja) | 2012-11-30 | 2016-05-25 | キューイーディー・テクノロジーズ・インターナショナル・インコーポレーテッド | 一体型の波面センサおよび粗面計 |
| CN207540510U (zh) * | 2017-12-13 | 2018-06-26 | 广东技术师范学院 | 一种用于检测透镜中心偏离的装置 |
-
2018
- 2018-11-22 CN CN201811399344.9A patent/CN109580179B/zh active Active
- 2018-12-12 EP EP18919386.5A patent/EP3677893B1/en active Active
- 2018-12-12 US US16/616,158 patent/US11506567B2/en active Active
- 2018-12-12 JP JP2019565415A patent/JP7105254B2/ja active Active
- 2018-12-12 KR KR1020197034821A patent/KR102292329B1/ko not_active Expired - Fee Related
- 2018-12-12 WO PCT/CN2018/120449 patent/WO2020103221A1/zh not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP3677893A4 (en) | 2020-08-19 |
| JP7105254B2 (ja) | 2022-07-22 |
| JP2021510412A (ja) | 2021-04-22 |
| EP3677893B1 (en) | 2021-06-30 |
| US20210270694A1 (en) | 2021-09-02 |
| KR102292329B1 (ko) | 2021-08-25 |
| CN109580179A (zh) | 2019-04-05 |
| US11506567B2 (en) | 2022-11-22 |
| WO2020103221A1 (zh) | 2020-05-28 |
| EP3677893A1 (en) | 2020-07-08 |
| KR20200063099A (ko) | 2020-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109580179B (zh) | 基于波前技术的非球面透镜偏心检测装置及其检测方法 | |
| CN108801178B (zh) | 差动共焦自准直中心偏和曲率半径测量方法与装置 | |
| CN101650157B (zh) | 双曲面凸面反射镜面形误差的检测方法及其装置 | |
| CN104061867B (zh) | 一种光谱共焦式透镜中心厚度测量方法及装置 | |
| CN105758336B (zh) | 反射式激光差动共焦曲率半径测量方法与装置 | |
| CN103123251B (zh) | 差动共焦内调焦法透镜光轴及厚度测量方法 | |
| CN105738078A (zh) | 单透镜或多透镜光学系统的光学表面的曲率中心的位置的测量 | |
| CN101813458B (zh) | 差动共焦内调焦法镜组光轴及间隙测量方法与装置 | |
| CN104537656B (zh) | 光纤扩束准直镜筒出射偏心高斯光束的检测方法 | |
| CN109540474B (zh) | 后置分光瞳激光差动共焦焦距测量方法与装置 | |
| CN114001676B (zh) | 用于刀口仪检测光学元件的光轴自动对准方法 | |
| CN111735613A (zh) | 四象限探测器镜头的光学质量检测系统 | |
| CN110017968B (zh) | 高层析、抗散射激光差动共焦层析定焦方法与装置 | |
| CN109990982A (zh) | 反射式横向相减差动共焦焦距测量方法 | |
| CN109945803B (zh) | 横向相减激光差动共焦柱面曲率半径测量方法 | |
| CN113884505A (zh) | 球面元件表面缺陷散射探测装置和测量方法 | |
| CN109974603B (zh) | 双边错位差动共焦透镜中心厚度测量方法 | |
| CN113295386B (zh) | 一种光学镜片检测系统及检测方法 | |
| CN118067737A (zh) | 一种基于线阵追焦的回转体瑕疵检测方法和装置 | |
| CN215865744U (zh) | 基于相干层析成像的薄膜均匀性检测系统 | |
| CN211504616U (zh) | 光学镜头的间距、偏心和波前像差一体化测量系统 | |
| CN110044414B (zh) | 横向相减差动共焦干涉元件多参数测量方法与装置 | |
| CN109883342B (zh) | 横向相减差动共焦镜组间隙测量方法 | |
| CN109991190B (zh) | 横向相减差动共焦透镜折射率测量方法 | |
| CN115930826A (zh) | 一种瑞奇康芒检测方法及系统 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |