CN109574637A - Ceramic substrate and its manufacturing method with feed through pole - Google Patents

Ceramic substrate and its manufacturing method with feed through pole Download PDF

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Publication number
CN109574637A
CN109574637A CN201811640805.7A CN201811640805A CN109574637A CN 109574637 A CN109574637 A CN 109574637A CN 201811640805 A CN201811640805 A CN 201811640805A CN 109574637 A CN109574637 A CN 109574637A
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Prior art keywords
sheet material
ceramic
ceramic sheet
pole
feed
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Granted
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CN201811640805.7A
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CN109574637B (en
Inventor
韩明松
夏斌
赵瑜
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Shenzhen Silicon Bionics Technology Co ltd
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Shenzhen Sibionics Technology Co Ltd
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N1/00—Electrotherapy; Circuits therefor
    • A61N1/02—Details
    • A61N1/08—Arrangements or circuits for monitoring, protecting, controlling or indicating
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0213—Electrical arrangements not otherwise provided for
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
    • H05K1/0298—Multilayer circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092—Dispersed materials, e.g. conductive pastes or inks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/115—Via connections; Lands around holes or via connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
    • H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
    • C04B2235/3246—Stabilised zirconias, e.g. YSZ or cerium stabilised zirconia

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
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  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Veterinary Medicine (AREA)
  • Composite Materials (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Electrotherapy Devices (AREA)
  • Thermistors And Varistors (AREA)
  • Ceramic Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a kind of ceramic substrate with feed through pole, which includes: ceramic bases, is fired by the stacking of multiple ceramic sheet materials, each ceramic sheet material has multiple through-holes；Feed through pole is fired by the first conductive paste, fills each through-hole；And wiring conductor, it is fired by the second conductive paste, wiring pattern is formed between each ceramic sheet material, and the feed through pole for being located at adjacent ceramic sheet material is connected via wiring conductor, coating, it is fired by third conductive paste, and covers the feed through pole of outermost ceramic sheet material, and each ceramic sheet material is formed with the first conductive paste and the second conductive paste in 1450 DEG C to 1600 DEG C of at a temperature of cofiring.As a result, due to carrying out stacking sintering using multiple ceramic sheet materials, ceramic sheet material is easier to be burnt into, and the binding force between feed through pole, wiring conductor and ceramic bases can be improved, and can either reduce sintering temperature, also can be improved the air-tightness of ceramic substrate.

Description

Ceramic substrate and its manufacturing method with feed through pole
Technical field
The present invention relates to a kind of ceramic substrate and its manufacturing method with feed through pole.
Background technique
Currently, implantable medical devices have been widely used for restoring body function, improve quality of life or saving life The various aspects such as life.Such implantable medical devices be for example implanted into intracorporal pacemaker, deep brain stimulator, Artificial cochlea, artificial retina etc..
Since implantable medical devices needs implant and retain for a long time in vivo, it is implanted to intracorporal implantation Formula medical instrument needs to face intracorporal complex physiologic environment, after being chronically implanted, implantable medical devices and surrounding tissue The part of contact may occur aging, degradation, cracking, be crosslinked etc. and physically or chemically to react again, and it is unfavorable to cause to implantation object Influence the bad biological respinse such as causing inflammation.Therefore, for implantable medical devices, biological safety, long-term plant The requirement for entering reliability etc. is all very high.
In order to ensure implantable medical devices biological safety, be chronically implanted the requirement of reliability, on the one hand need to make With seal casinghousing by abiotic security component in implantable medical devices such as chip, printed circuit board (PCB) etc. and quilt Implant site (such as blood, tissue or bone) isolation；On the other hand, it is also necessary to from the seal casinghousing draw for example with stimulation unit The function conducting wire of part progress signal interaction.
In view of the biological safety and long-term reliability of implantable medical devices, seal casinghousing is usually with biological safety Good glass, ceramics etc. are used as substrate (substrate), and by covering the good metal of biological safety in substrate Lid etc. and be formed together sealing structure.In such sealing structure, substrate usually has multiple through-holes (via), at these Feedthrough (feedthrough) electrode is filled in through-hole.In addition, the electronic component being encapsulated in inside the seal casinghousing is via this A little feed through pole and carry out signal interaction with outside.Therefore, in implantable medical devices, such substrate both have sealing every From effect, it may have with the external world interact be connected to effect.
Summary of the invention
In existing ceramic substrate, bore that open (drill) multiple cylindrical logical usually on the ceramic sheet material as substrate Then hole is filled metal lotion in these through-holes, is then sintered.However, due in metal lotion and ceramic base During sintering (cofiring) processing of plate, ceramic sheet material as ceramic substrate often uneven heating and cause in each through-hole The contraction or expansion degree of metal is different, as a result, the stickiness of the through-hole of metal and ceramic sheet material is bad, leads to existing sealing The air-tightness of structure is bad, influences the long-term reliability that implantable medical devices use.
In addition, the material in implantable medical devices for example usually using aluminium oxide as ceramic sheet material at present.At this In sample ceramic substrate, it is however generally that, the content of aluminium oxide is higher, and the biological safety of ceramic substrate is better, and intensity is also higher.So And alumina content is higher, the sintering temperature of ceramic substrate is often also higher, such as alumina content in 99% (quality For high-purity alumina ceramic score, similarly hereinafter) or more, sintering temperature is often beyond 1650 DEG C, or even close to 2000 DEG C The high temperature of left and right, at this high temperature, ceramics are difficult to be sintered together with other materials such as metal, therefore are unfavorable for high pure oxygen Change the application of aluminium ceramic substrate.
The present invention is the situation in view of the above-mentioned prior art and completes, even if its purpose is to provide one kind in low temperature Sintering (such as 1450 DEG C to 1600 DEG C) in the case where also can be improved air-tightness the ceramic substrate with feed through pole and its Manufacturing method.
An aspect of of the present present invention is related to a kind of ceramic substrate with feed through pole comprising: ceramic bases, by multiple potteries The stacking of tile material is fired, and each ceramic sheet material has multiple through-holes；Feed through pole, by the firing of the first conductive paste At each through-hole of filling；Wiring conductor is fired by the second conductive paste, the shape between each ceramic sheet material At wiring pattern, and the feed through pole for being located at the adjacent ceramic sheet material is connected via the wiring conductor；And Coating is fired by third conductive paste, and covers the feed through pole of the outermost ceramic sheet material, Ge Gesuo State ceramic sheet material and first conductive paste, second conductive paste and third conductive paste 1450 DEG C to 1600 DEG C at a temperature of Cofiring forms.
In in one aspect of the invention, by carrying out stacking firing using multiple ceramic sheet materials, and each ceramics are utilized The feed through pole and wiring conductor of sheet material form intraconnection, in this case, due to carrying out layer using multiple ceramic sheet materials Folded sintering, ceramic sheet material is easier to be burnt into, so that the binding force between feed through pole, wiring conductor and ceramic bases also can It is improved, sintering temperature can either be reduced as a result, also can be improved the air-tightness of ceramic substrate.
In addition, the size of the coating can be greater than described in ceramic substrate involved in one aspect of the invention The size of feed through pole.In this case, the air-tightness of ceramic substrate 1 is further increased.
In addition, the ceramic sheet material can be by aluminium oxide ceramics in ceramic substrate involved in one aspect of the invention It constitutes.Thereby, it is possible to improve the biological safety of constituted ceramic substrate and long-term reliability.It is highly preferred that the ceramics Sheet material can be made of content not less than the aluminium oxide ceramics of 99.99% (mass fraction, similarly hereinafter).Thereby, it is possible to further mention The biological safety and long-term reliability for the ceramic substrate that height is constituted.
In addition, involved in one aspect of the invention in ceramic substrate, adjacent each ceramic sheet material it is described Through-hole can arrange with being staggered.In this case, it can be avoided the through-hole on each adjacent ceramic sheet material It is overlapped, is conductively connected, so, it is possible so that the feed through pole between adjacent ceramic sheet material is staggered and is formed via wiring conductor The path for effectively extending air-tightness leakage, to improve the air-tightness of ceramic substrate.
In addition, in ceramic substrate involved in one aspect of the invention, first conductive paste and second conduction Slurry can be made of the material one or more of worked as selected from tungsten, molybdenum manganese, silver, gold, platinum and their alloy respectively.As a result, by Feed through pole and wiring conductor made of first conductive paste and the second conductive paste are fired, more with the performance parameters of the ceramic bases Add matching, connection structure intensity higher, the electrical property of ceramic substrate not only can be improved, further improves it reliably and with long-term Property.It is highly preferred that first conductive paste can be made of with second conductive paste platinum.In this case, the feedthrough Electrode with the wiring conductor is consistent is made of platinum, which can be improved electrical efficiency, promotes the performances such as conduction, thus Further improve the electrical property and long-term reliability of ceramic substrate.
In addition, involved in one aspect of the invention in ceramic substrate, optionally, the third conductive paste and described the One conductive paste is different, and the third conductive paste selected from tungsten, molybdenum manganese, silver, gold, platinum and their alloy by one or more of working as structure At.In this case, in such a case, it is possible to improve the air-tightness of ceramic substrate 1.
In addition, the thickness of the ceramic sheet material can be in ceramic substrate involved in one aspect of the invention 0.05mm or more and 0.35mm or less.Ceramic sheet material is more readily processed as a result, and the molding better effect of punching.
Another aspect of the present invention relates to a kind of manufacturing methods of ceramic substrate with feed through pole comprising: prepare more A ceramic sheet material, and multiple through-holes are formed on each ceramic sheet material；In each described of each ceramic sheet material The first conductive paste is filled in through-hole as feed through pole；Using the second conductive paste as wiring conductor in each ceramic sheet material Wiring pattern as defined in upper formation；It is formed on the outer surface of outermost layer ceramic sheet material using third conductive paste and covers the feedthrough The coating of electrode；Each ceramic sheet material is stacked gradually, the feed through pole of the adjacent ceramic sheet material is passed through It is connected by the wiring conductor；Also, by each ceramic sheet material and first conductive paste, second conductive paste and institute Third conductive paste is stated together in 1450 DEG C to 1600 DEG C of at a temperature of cofiring.
In another aspect of the invention, by carrying out stacking firing using multiple ceramic sheet materials, and each pottery is utilized The feed through pole and wiring conductor of tile material form intraconnection, in this case, due to being carried out using multiple ceramic sheet materials Sintering, ceramic sheet material are easier to be burnt into, and the binding force between feed through pole, wiring conductor and ceramic bases can also be mentioned Height, can either reduce sintering temperature as a result, also can be improved the air-tightness of ceramic substrate.
In addition, in the manufacturing method of ceramic substrate involved in another aspect of this invention, the ceramic sheet material can be with It is made of aluminium oxide ceramics.Thereby, it is possible to improve the biological safety of constituted ceramic substrate and long-term reliability.More preferably Ground, the ceramic sheet material can be made of content not less than the aluminium oxide ceramics of 99.99% (mass fraction, similarly hereinafter).As a result, can Enough further increase the biological safety and long-term reliability of constituted ceramic substrate.
In addition, in the manufacturing method of ceramic substrate involved in another aspect of this invention, adjacent each pottery The through-hole of tile material can arrange with being staggered.In this case, the feed through pole between adjacent ceramic substrate is staggered And formed and be conductively connected via wiring conductor, it so, it is possible the path for effectively extending air-tightness leakage, to improve ceramic substrate Air-tightness.
In addition, in another aspect of this invention involved in ceramic substrate manufacturing method in, first conductive paste and Second conductive paste can respectively by one or more of working as selected from tungsten, molybdenum manganese, silver, gold, platinum and their alloy material It constitutes.Feed through pole and wiring conductor made of being fired as a result, as the first conductive paste and the second conductive paste, with the ceramic bases Performance parameter more match, connection structure intensity it is higher, the electrical property of ceramic substrate not only can be improved, further improve Its long-term reliability.It is highly preferred that first conductive paste can be made of with second conductive paste platinum.In such case Under, the feed through pole with the wiring conductor is consistent is made of platinum, the consistency can be improved electrical efficiency, promoted it is conductive Etc. performances, to further improve the electrical property and long-term reliability of ceramic substrate.
In addition, second conductive paste can in the manufacturing method of ceramic substrate involved in another aspect of this invention To form the wiring pattern by silk-screen printing.In this case, wiring conductor easily efficiently more can be made, And keep the size of gained wiring conductor and structure more accurate, it is possible to prevente effectively from each wiring conductor in wiring pattern Inessential connection, so as to avoid the generation of the conductive accident such as short circuit, it is possible thereby to improve the practicability of ceramic substrate and long-term Use reliability.
The ceramics with feed through pole of air-tightness can be improved in accordance with the invention it is possible to provide and can either reduce sintering temperature again Substrate and its manufacturing method.
Detailed description of the invention
The attached drawing for constituting a part of the invention is used to provide further understanding of the present invention, schematic reality of the invention It applies mode and its explanation is used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is to show the three-dimensional structure diagram of the ceramic substrate with feed through pole involved in embodiments of the present invention.
Fig. 2 is to show the top view of the ceramic substrate shown in FIG. 1 with feed through pole.
Fig. 3 is to show the ceramic substrate shown in Fig. 2 with feed through pole to show along the cutting structure of straight line A-A ' interception It is intended to.
Fig. 4 is to show the partial enlarged view of the ceramic substrate shown in Fig. 3 with feed through pole.
Fig. 5 is to show the stream of the making step of the ceramic substrate with feed through pole involved in embodiments of the present invention Cheng Tu.
Symbol description:
1 ... ceramic substrate, 10 ... ceramic bases, 110 ... ceramic sheet materials, 111 ... through-holes, 120 ... ceramic sheet materials, 130 ... Ceramic sheet material, 140 ... ceramic sheet materials, 20 ... feed through pole, 30 ... wiring conductors.
Specific embodiment
Hereinafter, the preferred embodiment of the present invention is described in detail with reference made to the accompanying drawings.In the following description, for identical Component assigns identical symbol, and the repetitive description thereof will be omitted.Scheme in addition, attached drawing is only schematical, the mutual size of component Ratio or the shape of component etc. can be with actual difference.
Fig. 1 is to show the three-dimensional structure diagram of the ceramic substrate with feed through pole involved in embodiments of the present invention. Fig. 2 is to show the top view of the ceramic substrate shown in FIG. 1 with feed through pole.Fig. 3 is to show band feedthrough electricity shown in Fig. 2 The cutting structural schematic diagram that the ceramic substrate of pole is intercepted along straight line A-A'.Fig. 4 shows shown in Fig. 3 with feed through pole The partial enlarged view of ceramic substrate.
In the present embodiment, as shown in Figures 1 to 4, ceramic substrate 1 may include ceramic bases 10, feed through pole 20 With wiring conductor 30.Wherein, ceramic bases 10 can be laminated by multiple ceramic sheet materials and be fired.Each ceramic sheet material can have There are multiple through-holes 111.Feed through pole 20 can fill each through-hole 111, and feed through pole 20 can be burnt by the first conductive paste It makes.Wiring pattern can be formed by wiring conductor 30 between each ceramic sheet material, wiring conductor 30 can be led by second Plasma-based is fired.In addition, the feed through pole 20 for being located at adjacent ceramic sheet material is connected via wiring conductor 30.Each potsherd Material is formed with the first conductive paste and the second conductive paste in 1450 DEG C to 1600 DEG C of at a temperature of cofiring.
Ceramic substrate 1 involved in present embodiment, can by carrying out stacking firing using multiple ceramic sheet materials, and Intraconnection is formed using the feed through pole and wiring conductor of each ceramic sheet material.In this case, due to utilizing multiple potteries Tile material carries out stacking sintering, and ceramic sheet material is easier to be burnt into, the combination between feed through pole, wiring conductor and ceramic bases Power can be also improved.Sintering temperature can either be reduced as a result, also can be improved the air-tightness of ceramic substrate 1.
In addition, the feed through pole of ceramic substrate 1 involved in present embodiment can by function conducting wire (not shown) with External component such as coil and stimulation component (not shown) are attached, and are handed over to realize the processing of stimulus signal and signal Mutually.
In the present embodiment, ceramic bases 10 may include multiple ceramic sheet materials.Multiple ceramic sheet materials can successively layer It is folded to form ceramic bases 10.Wherein, in some instances, ceramic bases 10 can be made of such as four ceramic sheet materials.Such as Fig. 1 Shown, ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and ceramic sheet material 140 stack gradually to form ceramic bases 10. But present embodiment is without being limited thereto, and the quantity for constituting the ceramic sheet material of ceramic bases 10 is not particularly limited, such as can be by two The ceramic sheet material of a, three or five or more are constituted.Thus, it is possible to which according to different application demands, setting is less than or greater than Four ceramic sheet material layers, so as to meet requirement of the different implantable medical devices to 1 structure of ceramic substrate.In this implementation In mode, each ceramic sheet material can be made of bioceramic.In some instances, each ceramic sheet material can be by selected from oxidation Aluminium (chemical formula Al2O3Comprising the sapphire and ruby or polycrystalline α sapphire of monocrystalline), zirconium oxide (chemical formula ZrO2, It includes magnesia partial stabilized zirconia (Mg-PSZ)), tetragonal zirconia polycrystal (Y-TZP), the cerium oxide of stabilized with yttrium oxide At least one of stable tetragonal zirconia polycrystal (Ce-TZP) etc. is constituted.Thus, it is possible to meet implantable medical devices pair The requirement of material biological safety.
In some instances, each ceramic sheet material can be made of different types of ceramics.But present embodiment is not limited to In this, each ceramic sheet material can be made of one species ceramics.For example, each ceramic sheet material can be made of identical ceramics But each component content is different.Each ceramic sheet material can also be made of identical ceramics and each component content is identical.
In the present embodiment, each ceramic sheet material is preferably by the aluminium oxide of 96% or more (mass fraction, similarly hereinafter) (Al2O3) constitute.It is highly preferred that each ceramic sheet material can by 99% or more aluminium oxide (Al2O3) constitute.In some examples In, each ceramic sheet material 110 to ceramic sheet material 140 can by 99.99% or more aluminium oxide (Al2O3) constitute.In general, In each ceramic sheet material, with aluminium oxide (Al2O3) mass fraction increase, principal crystalline phase increases, the physics of each ceramic sheet material Performance is also gradually increased, such as degree, bending strength, elasticity modulus also correspondingly improve before resistance to compression.It is possible thereby to think, quality point Higher aluminium oxide (the Al of number2O3) better biological safety and long-term reliability can be presented.
In addition, in the present embodiment, each ceramic sheet material can be made of the identical aluminium oxide ceramics of constituent content.? In some examples, ceramic sheet material 110 to ceramic sheet material 140 preferably by constituent content be 99.99% or more aluminium oxide (Al2O3) It constitutes.But present embodiment is without being limited thereto, and each ceramic sheet material can be made of the different same ceramics of constituent content.By This, can be adjusted according to actual needs, thus to the different demands of ceramic substrate 1 under the conditions of meeting varying environment.
In the present embodiment, as described above, ceramic bases 10 can be fired by the stacking of multiple ceramic sheet materials.But this Embodiment is without being limited thereto, can also be prepared certainly by other modes, such as can be pressed by multiple ceramic sheet materials Type forms.Thus, it is possible to meet the process requirements under the conditions of.
In the present embodiment, as shown in Figure 1, ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and potsherd Material 140 can be laminated firing and form ceramic bases 10.In some instances, each ceramic sheet material (ceramic sheet material 110 to ceramics Sheet material 140) it can stack gradually, and cofiring forms ceramic bases 10, feedthrough electricity together with the first conductive paste and the second conductive paste Pole 20 (being described later on) and wiring conductor 30 (being described later on).It, can be by ceramic sheet material 110 to potsherd in other examples Material 140 stacks gradually, and the at a temperature of cofiring together with the first conductive paste and the second conductive paste at 1450 DEG C to 1600 DEG C forms pottery Porcelain substrate 10, feed through pole 20 (being described later on) and wiring conductor 30 (being described later on).Preferably, the temperature of cofiring can be 1550 DEG C to 1600 DEG C.
In general, the firing temperature needs of existing high-purity type aluminium oxide ceramics (content is 99.9% or more) are up to 1680 DEG C to 1990 DEG C.In contrast, in the present embodiment, by as described above by the firing temperature control of ceramic bases 10 System is at 1450 DEG C to 1600 DEG C, preferably under conditions of 1550 DEG C to 1600 DEG C, on the one hand, be both able to satisfy metal (feed through pole 20 and wiring conductor 30) form by a firing, and can ensure that ceramic (ceramic bases 10) can form by a firing；It on the other hand, can be with Realize the low temperature co-fired of ceramic sheet material (formed ceramic bases 10) and conductive slurries (formation feed through pole 20 and wiring conductor 30), To improve the bond strength of ceramic bases 10 and feed through pole 20 and wiring conductor 30 made of firing, and effectively increase pottery The preparation efficiency of porcelain substrate 1 thereby reduces the production cost of ceramic substrate 1.
Furthermore, it is contemplated that the difference of the expansion index of ceramic sheet material and metal material can also wrap in the present embodiment Include low-temperature prewarming step.In some instances, (such as 500 DEG C or less) ceramic (ceramic bases can be completed at a lower temperature 10) with the pre- combination of metal (feed through pole 20 and wiring conductor 30), to prevent co-fired temperature excessively high or cofiring rate is too fast draws Generation phenomena such as sticking up layer, fracture risen.
In general, heating ramp rate is too fast, it is easy in ceramic substrate there are gas or is sintered incomplete phenomenon；Add Hot rate is excessively slow, will extend the time of sintering process, reduces producing efficiency, increases cost of manufacture.Therefore, in present embodiment In, it can also include the heating rate during control cofiring.Thus, it is possible to prevent gas or sintering in ceramic substrate 1 endless Full phenomenon, guarantees the consistency of ceramic substrate 1, and can effectively improve the preparation efficiency of ceramic substrate 1, thereby reduces The production cost of ceramic substrate 1.
Furthermore, it is contemplated that a certain amount of organic principle and Binder Phase can be added in the preparation process of ceramic substrate 1. It in the present embodiment, can also include thermal debinding process.In some instances, thermal debinding process is complete under wet hydrogen atmosphere At.Thus, it is possible to the generation for the phenomenon that removing is incomplete caused by effectivelying prevent organic principle to react too fast, there are residual carbons, The generation of the defects of to effectively prevent stomata in molding ceramic substrate 1, cracking, deformation.
In addition, can also include burning to guarantee the air-tightness of sintered ceramic substrate 1 in the present embodiment Insulating process after knot.And it is possible to enhance ceramic bases 10 and feedthrough in ceramic substrate 1 by the way that soaking time is appropriately extended The bond strength of electrode feed through pole 20 and wiring conductor 30 improves the densified sintering product of ceramic substrate 1.
In addition, in the present embodiment, can also prepare by other means and form ceramic substrate 1, for example, vacuum at Type.Thus, it is possible to the process requirements under meeting different condition.
In addition, in the present embodiment, the thickness of each ceramic sheet material such as ceramic sheet material 110 to ceramic sheet material 140 does not have There is special limitation.In some instances, the thickness of ceramic sheet material 110 to ceramic sheet material 140 can be respectively 0.05mm or more and 0.35mm is hereinafter, so as to easy to process and punching good forming effect.Under normal conditions, when the thickness of ceramic sheet material is too small, such as When less than 0.05mm, because the smaller processing of its thickness is inconvenient；When the thickness of ceramic sheet material is excessive, when being greater than 0.35mm, because The larger punching molding effect of its thickness is poor.
In addition, in some instances, as shown in Figure 1, ceramic bases 10 can be in the shape of generally cylindrical body.In this implementation In mode, the shape of ceramic bases 10 is not particularly limited, and can also be Else Rule shape such as cube, cylindroid Body, triangulo column etc. are also possible to irregular shape (shape being combined into including regular shape and irregular shape).By This, can satisfy requirement of the different implantable medical devices to 1 shape of ceramic substrate.
In the present embodiment, constituting can have multiple through-holes 111 on each ceramic sheet material of ceramic bases 10.Such as figure Shown in 1 and Fig. 2, ceramic sheet material 110 can have multiple through-holes 111.In addition, ceramic sheet material 120, ceramic sheet material 130 or ceramics Sheet material 140 can have multiple through-holes 111.In order to facilitate expression, ceramic sheet material 120, ceramic sheet material 130 or ceramics are omitted The signal of the through-hole 111 of sheet material 140.
In the present embodiment, the arrangement mode of each through-hole 111 can be different on each ceramic sheet material.In some examples In, each through-hole 111 between adjacent ceramic sheet material can arrange with being staggered.Thus, it is possible to fill adjacent ceramics Each feed through pole 20 (being described later on) of each through-hole between sheet material arranges with being staggered, to effectively obstruct or extend The walking path of air-tightness leakage, can effectively improve the air-tightness of ceramic substrate 1.
In addition, in the present embodiment, the spread geometry of through-hole 111 is not particularly limited.In some instances, such as Fig. 2 Shown, through-hole 111 can be arranged in the shape such as octagon array of rule.In other examples, through-hole 111 can also be arranged Arrange into other regular shapes, such as square, circle etc., may be arranged in irregular shape (including regular shape and The shape that irregular shape is combined into).
In addition, in the present embodiment, the shape of through-hole 111 is not particularly limited.In some instances, as shown in Fig. 2, The shape of through-hole 111 can be the shape such as cylindrical body of rule.In other examples, the shape of through-hole 111 can also be Else Rule shape such as cube, Elliptic Cylinder, triangulo column etc., or irregular shape (including regular shape and The shape that irregular shape is combined into).
In addition, in the present embodiment, aperture and the pitch of holes of through-hole 111 are not particularly limited.In some instances, lead to The aperture in hole 111 can be 50 μm to 500 μm, and the spacing (pitch of holes) between through-hole 111 can be not less than 25 μm to 500 μm. In this case, made ceramic substrate 1 can meet miniaturization and the requirement of high density of integration, can be used for example and planting Enter formula medical instrument ceramic substrate.
In addition, the quantity of through-hole 111 is not particularly limited, can determine according to specific needs, such as the quantity of through-hole It can be 1, or 2 or more.
In the present embodiment, as shown in Figure 3 and Figure 4, feedback can be filled in the through-hole being arranged on each ceramic sheet material Energization pole 20.Specifically, as described in Figure 4, feed through pole 20 may include feed through pole 21, ceramics in ceramic sheet material 110 The feed through pole 24 in the feed through pole 23 and ceramic sheet material 140 in feed through pole 22, ceramic sheet material 130 in sheet material 120.
In some instances, feed through pole 20 can penetrate through the upper and lower surface of ceramic sheet material.Specifically, as described in Figure 4, Feed through pole 21 can penetrate through the upper and lower surface of ceramic sheet material 110.Feed through pole 22 can penetrate through the upper following table of ceramic sheet material 120 Face.Feed through pole 23 can penetrate through the upper and lower surface of ceramic sheet material 130.Feed through pole 24 can penetrate through the upper of ceramic sheet material 140 Lower surface.
In some instances, feed through pole 20 can be connected to via wiring conductor 30 (being described later on), formed conducting and be electrically connected It connects.Thereby, it is possible to improve the electrical property of ceramic substrate 1.Specifically, as described in Figure 4, wiring conductor 30 may include that wiring is led Body 31, wiring conductor 32 and wiring conductor 33.Feed through pole 21, feed through pole 22, feed through pole 23 and feed through pole 24 can be with Successively conducting electrical connection is formed via wiring conductor 31, wiring conductor 32 and wiring conductor 33.
In the present embodiment, ceramic bases 10 can have upper surface 10a and lower surface 10b (referring to fig. 4).Some In example, the upper surface 10a and the lower surface 10b of ceramic bases 10 of ceramic bases 10 can be relatively parallel.In present embodiment In, the upper surface 10a of ceramic bases 10 and the lower surface 10b of ceramic bases 10 can be via feed through pole 20 and wiring conductor 30 And it is electrically connected.That is, the upper surface 10a and lower surface 10b of ceramic bases 10 can be via feed through pole 20 and wiring conductor 30 And form conductive path.The electronic component positioned at the side upper surface 10a can be with the electronics positioned at the side lower surface 10b as a result, Component can be electrically connected via feed through pole 20 and wiring conductor 30.
Hereinafter, being formed by the one of conductive path in conjunction with Fig. 4 upper surface 10a and lower surface 10b for describing ceramic bases 10 A example.As shown in Figure 4, by way of example, ceramic bases 10 can be by four ceramic sheet materials 110, ceramic sheet material 120, potsherd Material 130 and ceramic sheet material 140 are constituted.Wherein, the upper surface 10a of ceramic bases 10 is the upper surface of ceramic sheet material 110.Ceramics The lower surface 10b of substrate 10 is the lower surface of ceramic sheet material 140.Feed through pole 20 may include feed through pole 21, feedthrough electricity Pole 22, feed through pole 23 and feed through pole 24.Wiring conductor 30 may include wiring conductor 31, wiring conductor 32 and wiring conductor 33。
Specifically, feed through pole 21 can be connect via wiring conductor 31 with feed through pole 22 in ceramic bases 10, To make ceramic sheet material 110 and ceramic sheet material 120 be conductively connected.In addition, feed through pole 22 can be via wiring conductor 32 and feedback Energization pole 23 connects, so that ceramic sheet material 120 and ceramic sheet material 130 be made to be conductively connected.In addition, feed through pole 23 can be via cloth Line conductor 33 is connect with feed through pole 24, so that ceramic sheet material 130 and ceramic sheet material 140 be made to be conductively connected.Pass through feedthrough as a result, Electrode 21, feed through pole 22, feed through pole 23, feed through pole 24, wiring conductor 31, wiring conductor 32 and wiring conductor 33, make The upper surface 10a and lower surface 10b of ceramic bases 10, which are formed, to be conductively connected.
In the present embodiment, feed through pole 20 can be fired by the first conductive paste.In some instances, it first leads Plasma-based can be formed with ceramic sheet material 110 to 140 in 1450 DEG C to 1600 DEG C of at a temperature of cofiring.The feedback of formation is fired as a result, Energization pole 20 can be bonded as one with ceramic bases 10, avoided the technologies such as ceramics and the welding of metal, simplified technique, and Further improve the air-tightness and long-term reliability of ceramic substrate 1.
In the present embodiment, the first conductive paste that firing forms feed through pole 20 can be made of metal slurries.One In a little examples, the first conductive paste can be by one of working as selected from tungsten slurries, molybdenum manganese slurries, silver paste liquid, gold paste liquid or platinum slurries Or more constitute.Preferably, the first conductive paste can be made of platinum slurries.Feed through pole 20 made of firing as a result, can have There is lesser resistance, more matched with the performance parameter of ceramic bases 10, thus the company between feed through pole 20 and ceramic bases 10 It connects that intensity is higher, the long-term reliability of ceramic substrate 1 can be effectively improved.
In addition, in the present embodiment, constitute feed through pole 20 the first conductive paste can also include inorganic component (such as Frit) and organic media ingredient.Thus, it is possible to be allowed to be formed convenient for the sintering behavior of control metal slurries such as platinum slurries Closer to the sintering behavior of ceramic bases 10, and then avoid the generation in fault of construction such as crack or layering.
In addition, in the present embodiment, the first conductive paste for constituting feed through pole 20 can pass through silk-screen printing, transfer etc. Method is filled into the through-hole of each ceramic sheet material.In this case, feed through pole easily efficiently more can be made, And keep the size of gained feed through pole and structure more accurate.
In addition, in the present embodiment, the first conductive paste for constituting feed through pole 20 can be by the logical of each ceramic sheet material Hole is filled up completely, and can also be partially filled with, as long as ensuring that feed through pole 20 can penetrate through the upper and lower surface of each ceramic sheet material.By This, can be adjusted, to meet different condition according to parameter requirements such as the shrinkages of ceramic sheet material or the first conductive paste Under different demands.
In addition, in the present embodiment, shape, size, arrangement mode of feed through pole 20 etc. can be kept with through-hole 111 Unanimously.Therefore, the ceramic substrate 1 with feed through pole can be formed, to improve the air-tightness of ceramic substrate 1.
In the present embodiment, wiring conductor 30 can form wiring pattern between each ceramic sheet material, and be located at Feed through pole 20 on adjacent ceramic sheet material is connected via wiring conductor 30.It is possible thereby to form the ceramic base of conducting electrical connection Plate 1, to improve the electrical property of ceramic substrate 1.
In addition, in the present embodiment, the shape of wiring pattern is not particularly limited.In some instances, wiring pattern The shape such as linear type, S type, U-shaped etc. that can be rule are also possible to irregular shape (including regular shape and irregular Shape made of shape cooperation).Thus, it is possible to meet the different demands of different application environment.
In addition, in the present embodiment, wiring conductor 30 can design to form a variety of wirings between each ceramic sheet material Pattern.To realize a variety of different connection types of feed through pole 20, the electrical property of ceramic substrate 1 is further increased, using model It encloses more extensively, is able to satisfy the functional requirement increasingly promoted in such as medical implantable medical instrument to ceramic substrate 1, can also keep away Exempt to access outer lead etc. to the adverse effect of the air-tightness of ceramic substrate 1.
In addition, in the present embodiment, the preparation method of wiring pattern can for either physically or chemically, such as coating or It deposits (such as physical deposition or chemical deposition).In some instances, wiring pattern can be prepared by the method for silk-screen printing It obtains.Thereby, it is possible to more efficiently easily be patterned, and keep the structure of gained wiring pattern more accurate, thus The accuracy of wiring pattern setting is improved, the practicability of ceramic substrate 1 is promoted.
In addition, in the present embodiment, the size of wiring conductor 30 is not particularly limited.In some instances, wiring is led The size of body 30 can be 0.01mm to 0.1mm, and wiring conductor 30 thus both may be implemented and led with being electrically connected for feed through pole 20 It is logical, and it is possible to prevente effectively from the damage such as rupture caused by stress is excessive.
In the present embodiment, wiring conductor 30 can be fired by the second conductive paste.In some instances, it second leads Plasma-based can be formed with the first conductive paste, ceramic sheet material 110 to 140 in 1450 DEG C to 1600 DEG C of at a temperature of cofiring.It burns as a result, The wiring conductor 30 that system is formed can be bonded as one with ceramic bases 10, avoid the technologies such as ceramics and the welding of metal, letter Change technique, and further improves the air-tightness and long-term reliability of ceramic substrate 1.
In the present embodiment, the second conductive paste that firing forms wiring conductor 30 can be made of metal slurries.One In a little examples, the second conductive paste can be by one of working as selected from tungsten slurries, molybdenum manganese slurries, silver paste liquid, gold paste liquid or platinum slurries Or more constitute.Preferably, the second conductive paste can be made of platinum slurries.Wiring conductor 30 made of firing as a result, can have There is lesser resistance, more matched with the performance parameter of ceramic bases 10, thus the company between wiring conductor 30 and ceramic bases 10 It connects that intensity is higher, the electrical property of ceramic substrate 1 can be effectively improved, further improve its long-term reliability.
In addition, in the present embodiment, constitute wiring conductor 30 the second conductive paste can also include inorganic component (such as Frit) and organic media ingredient.Thus, it is possible to be allowed to be formed convenient for the sintering behavior of control metal slurries such as platinum slurries Closer to the sintering behavior of ceramic bases 10, and then avoid the generation in fault of construction such as crack or layering.
In some instances, feed through pole and wiring conductor made of being fired as the first conductive paste and the second conductive paste, with The performance parameter of the ceramic bases more matches, connection structure intensity is higher, and the electrical property of ceramic substrate not only can be improved, Further improve its long-term reliability.First conductive paste can be made of with the second conductive paste platinum.In this case, feedthrough Electrode with wiring conductor is consistent is made of platinum, which can be improved electrical efficiency, promotes the performances such as conduction, thus more into One step improves the electrical property and long-term reliability of ceramic substrate.
In addition, in the present embodiment, ceramic substrate 1 may include coating (not shown).Coating can be set Ceramic bases 10 outer surface (such as ceramic bases 10 upper surface 10a or ceramic bases 10 lower surface 10b).Coating can To be covered on feed through pole 20.Based on foregoing description it is found that ceramic bases 10 may include multiple ceramic sheet materials, therefore cover Layer can be set on the feed through pole of outermost ceramic sheet material.Thereby, it is possible to be easy by external electronic component via Coating in conjunction with ceramic substrate (such as welding together), to form electrical connection.
In addition, in some instances, the size of coating is greater than the size of feed through pole 20.Namely the cross section of coating Product is greater than the cross-sectional area of feed through pole 20.It in this case, can between coating and feed through pole 20 and ceramic bases 10 It is combined closely with being formed, so as to further increase the air-tightness of ceramic substrate 1.Of course, the size of coating can also be with Less than or equal to the size of feed through pole 20, so as to meet the different demands under different condition.
In some instances, feed through pole 20 can be completely covered in coating.Coating and feed through pole 20 and pottery as a result, It can be formed and be combined closely between porcelain substrate 10, so as to further increase the air-tightness of ceramic substrate 1.In other examples In, coating can partially cover feed through pole 20.It equally can be with shape between coating and feed through pole 20 and ceramic bases 10 At reliable electrical connection.
In the present embodiment, coating can be formed by third conductive paste.In some instances, third conductive paste and the One conductive paste is different, and third conductive paste can be by one or more of working as structure selected from tungsten, molybdenum manganese, silver, gold, platinum and their alloy At.In such a case, it is possible to improve the air-tightness of ceramic substrate 1.
In some instances, the composition of third conductive paste can be the mixing of ceramic material and metal material.Wherein, ceramic Material is to constitute identical material (example with each ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and ceramic sheet material 140 Such as aluminium oxide), metal material be by tungsten, molybdenum manganese, silver, gold, platinum and their alloy one or more of work as material constitute (such as Platinum).In this case, the coating formed by third conductive paste, the performance parameter phase of one side and ceramic bases 10 Match, so that it is higher with 10 bonding strength of ceramic bases；On the other hand, coating again with 20 performance parameter phase of feed through pole Matching, so that it is higher with 20 bonding strength of feed through pole.In such a case, it is possible to further increase ceramic substrate 1 Air-tightness, further improve the electrical property and long-term reliability of ceramic substrate 1.
In some instances, the composition of third conductive paste can be include metal material and inorganic component.Metal material is Material one or more of is worked as by tungsten, molybdenum manganese, silver, gold, platinum and their alloy and constitutes (such as platinum).Inorganic component such as glass Material and organic media ingredient.
Wherein, the mixed proportion of ceramic material and metal material is not particularly limited in coating, it can according to product The ratio of actual needs adjustment ceramic material and metal material.In some instances, the ratio of ceramic material can be greater than metal The ratio of material, it is possible thereby to the matching degree of coating Yu ceramic bases 10 is improved, so that the power intensity of the two connection is improved, with Further increase the air-tightness of ceramic substrate 1.
In addition, in the present embodiment, third conductive paste can be with each ceramic sheet material (such as ceramic sheet material 110, ceramics Sheet material 120, ceramic sheet material 130 and ceramic sheet material 140), the first conductive paste, the second conductive paste one arise from 1450 DEG C to 1600 DEG C At a temperature of cofiring form.Thereby, it is possible to improve the knot between coating, ceramic bases 10, feed through pole 20 and wiring conductor 30 Intensity is closed, to improve the air-tightness of ceramic substrate 1.
In addition, in the present embodiment, ceramic substrate 1 may include articulamentum (not shown).Its plating mode include but It is not limited to weld.Connection (such as welding) performance of ceramic substrate 1, enhancing pottery can be further enhanced by articulamentum as a result, The reliability of electrical connection of porcelain substrate 1 and external electronic.Articulamentum is referred to as protective layer.
In addition, in the present embodiment, articulamentum is formed by the 4th conductive paste, the 4th conductive paste can be by being selected from tungsten, molybdenum The material that manganese, silver, gold, platinum, nickel and their alloy one or more of are worked as is constituted.Thus, it is possible to improve the conduction of articulamentum Property, to promote the electrical property of ceramic substrate 1.In some instances, articulamentum can be nickel layer and layer gold.Thus, it is possible to full The different application requirement of sufficient implantable medical devices.
In addition, in the present embodiment, as shown in Figure 1, the input and output side of ceramic substrate 1 can be via connecting wire (not shown) connect with other components, and connecting wire can connect ceramic substrate 1 by modes such as welding (such as soldering).By This, ceramic substrate 1 can be realized the signal interaction with other functional components.
Fig. 5 is to show the stream of the making step of the ceramic substrate with feed through pole involved in embodiments of the present invention Cheng Tu.Hereinafter, explaining the manufacturer of the ceramic substrate 1 with feed through pole involved in present embodiment in detail with reference to Fig. 5 Method.
In the present embodiment, the manufacturing method of the ceramic substrate with feed through pole includes the multiple ceramic sheet materials of preparation, and And multiple through-holes (step S10) are formed on each ceramic sheet material；Filling first is led in each through-hole of each ceramic sheet material Plasma-based is as feed through pole (step S20)；Then, it is formed on each ceramic sheet material using the second conductive paste as wiring conductor Defined wiring pattern (step S30)；Each ceramic sheet material is stacked gradually, make the feed through pole of adjacent ceramic sheet material via Wiring conductor connects (step S40).After the step s 40, by each ceramic sheet material and the first conductive paste and the second conductive paste one Rise 1450 DEG C to 1600 DEG C at a temperature of cofiring (step S50), S10 to step S50 can form pottery through the above steps Porcelain substrate 1.
In the present embodiment, in step slo, may include prepare for make each ceramic sheet material have it is multiple The mold and ceramic powder of guide post.In some instances, mold can be more than two, and multiple guide posts on different molds Distribution can be different, such as are in staggered distribution.Thus, it is possible to arrange the through-hole 111 on the different ceramic sheet materials being prepared Difference, for example, it is staggered.
In addition, in some instances, mold can be in the shape of generally cylindrical body, but there is no special for the shape of mold Limitation, can also be Else Rule shape such as cube, Elliptic Cylinder, triangulo column etc., is also possible to irregular shape (shape being combined into including regular shape and irregular shape).Thus, it is possible to form each ceramic sheet material of different shapes (such as ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and ceramic sheet material 140), to meet different implantable medicals Requirement of the instrument to 1 shape of ceramic substrate.In addition, mold can be two or more, it is possible thereby to which it is (namely more that multilayer is prepared A or multi-disc) ceramic sheet material, such as four layers of ceramic sheet material, that is, ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and pottery Tile material 140.But present embodiment is without being limited thereto, i.e., it can of course be formed for the ceramic sheet material of other quantity.Thus, it is possible to According to different application demands, setting is less than or greater than four layers of ceramic sheet material layer, so as to meet different implantable medicals Requirement of the instrument to 1 structure of ceramic substrate.
In the present embodiment, in step slo, mold can be distributed for two or more and with different guide posts, and And the size of guide post can be different.It is possible thereby to the ceramic sheet material with the distribution of different through-holes be prepared, to realize adjacent The through-hole of ceramic sheet material is in staggered distribution；Also the available ceramic sheet material with different pore size and pitch of holes, so as to meet To the different demands of ceramic sheet material under different condition.
In addition, in the present embodiment, in step slo, although the shape of guide post is cylindrical body, the shape of guide post does not have There is special limitation.It can also be Else Rule shape such as cube, Elliptic Cylinder, triangulo column etc., be also possible to not Regular shape (shape being combined into including regular shape and irregular shape), so as to form through-hole of different shapes.
In addition, in the present embodiment, in step slo, the diameter of guide post is not particularly limited, such as its diameter is minimum It can be 0.05mm, guide post spacing minimum can be 0.25mm, and the through-hole being consequently formed is directly and pitch of holes is best, so that Manufactured ceramic substrate 1 can meet miniaturization and the requirement of high density of integration, alternative existing implantable medical devices pottery Porcelain substrate, and lower production costs.
In addition, in the present embodiment, in step slo, the arrangement mode of guide post is not particularly limited.It can arrange At regular shape as shown in Figure 2 such as octagon array, other irregular shapes such as hollow type battle array can also be arranged into Column.
In addition, in the present embodiment, in step slo, the sum of guide post is 267, but the quantity of guide post does not have Special limitation, the quantity of guide post can be according to ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and ceramic sheet material 140 On number of openings it is specific needs to determine, such as through-hole quantity can be 1, or 2 or more.
It in the present embodiment, in step slo, may include that ceramic powder is filled into mold.In some examples In, aluminium oxide ceramics of the ceramic powder by content not less than 99.99% is constituted.Thus, it is possible to make each ceramics being prepared Aluminium oxide ceramics of the sheet material by content not less than 99.99% is constituted.In general, in each ceramic sheet material, with aluminium oxide (Al2O3) mass fraction increase, principal crystalline phase increases, and the physical property of each ceramic sheet material is also gradually increased, such as before resistance to compression Degree, bending strength, elasticity modulus also correspondingly improve, it is possible thereby to think to present better biological safety and reliably and with long-term Property.
In the present embodiment, in step slo, it can use mold for ceramic powder compression moulding, form each pottery Tile material, and there are multiple through-holes on each ceramic sheet material.In some instances, on ceramic sheet material 110 to ceramic sheet material 140 Through-hole 111 between adjacent ceramic sheet material is staggered.Thus, it is possible to make the feed through pole 20 for filling adjacent ceramic sheet layer wrong Begin to rehearse column.In such a case, it is possible to obstruct or extend the walking path of air-tightness leakage, effectively so as to effectively improve The air-tightness of ceramic substrate 1.But present embodiment is without being limited thereto, such as can also for example be fired by other methods, is formed Each ceramic sheet material (such as ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and ceramic sheet material 140).
In other examples, ceramic powder can also be partially filled with mold with filled up completely with mould, so as to full To formed each ceramic sheet material (such as ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and pottery under sufficient different condition Tile material 140) different demands.
It in the present embodiment, may include filling first in each through-hole of each ceramic sheet material in step S20 Conductive paste is as feed through pole.In some instances, the first conductive paste can by selected from tungsten, molybdenum manganese, silver, gold, platinum and they The material that alloy one or more of is worked as is constituted.Preferably, the first conductive paste can be made of platinum slurries.It is led as a result, by first Feed through pole 20 made of plasma-based is fired can have lesser resistance, more match with the performance parameter of ceramic bases 10, thus Bonding strength between feed through pole 20 and ceramic bases 10 is higher, can effectively improve the long-term reliability of ceramic substrate 1.
In addition, in the present embodiment, in step S20, the first conductive paste can pass through the methods of silk-screen printing, transfer It is filled into the through-hole of each ceramic sheet material.In this case, feed through pole 20 more efficiently can be easily made, and Keep size and the structure of gained feed through pole 20 more accurate.
In the present embodiment, in step s 30, the second conductive paste can be used as wiring conductor in each potsherd Wiring pattern as defined in being formed on material.In some instances, the second conductive paste can by selected from tungsten, molybdenum manganese, silver, gold, platinum and it The material one or more of worked as of alloy constitute.Preferably, the second conductive paste can be made of platinum slurries.As a result, by Wiring conductor 30 made of two conductive pastes are fired can have lesser resistance, more match with the performance parameter of ceramic bases 10, To keep the bonding strength between wiring conductor 30 and ceramic bases 10 higher, ceramic substrate 1 can be effectively improved reliably and with long-term Property.
In addition, in the present embodiment, it, can also be including inorganic component for example in the first conductive paste and the second conductive paste Frit and organic media ingredient.Thus, it is possible to control the sintering behavior of metal slurries such as platinum slurries, it is allowed to be formed close to pottery The sintering behavior of porcelain substrate 10, and then avoid the generation in fault of construction such as crack or layering.
In addition, in the present embodiment, in step s 30, the shape of wiring pattern is not particularly limited.In some examples In, wiring pattern can be the shape such as linear type, S type, U-shaped etc. of rule, be also possible to irregular shape (including regular shape The shape that shape and irregular shape are combined into).Thus, it is possible to meet the different demands of different application environment.
In addition, in the present embodiment, in step s 30, wiring conductor 30 can also be set between each ceramic sheet material Meter is formed simultaneously a variety of wiring patterns.To realize a variety of different connection types of feed through pole 20, ceramic base is further increased The electrical property of plate 1, application range is more extensive, is able to satisfy the function increasingly promoted in medical implantable medical instrument to ceramic substrate 1 It can require, access outer lead etc. can also be avoided to the adverse effect of the air-tightness of ceramic substrate 1.
In addition, in the present embodiment, in step s 30, the preparation method of wiring pattern can be physically or chemically side Method, such as coating, deposition or etching (etch) (such as physical deposition or chemical deposition).In some instances, wiring pattern can To be prepared by the method for silk-screen printing.Thereby, it is possible to more efficiently easily be patterned, and it is routed gained The structure of pattern is more accurate, to improve the accuracy of wiring pattern setting, promotes the practicability of ceramic substrate 1.
In addition, in the present embodiment, in step s 30, the size of wiring conductor 30 is not particularly limited.Show some In example, the size of wiring conductor 30 can be 0.01mm, and being electrically connected for wiring conductor 30 and feed through pole 20 thus both may be implemented Connect conducting, and it is possible to prevente effectively from the damage such as rupture caused by stress is excessive.
It in the present embodiment, in step s 40, may include stacking gradually each ceramic sheet material.In some examples In, ceramic sheet material may include four, for example, ceramic sheet material 110 to ceramic sheet material 140.But present embodiment is without being limited thereto, The quantity of ceramic sheet material for constituting ceramic bases 10 is not particularly limited, such as can be by two, three or five or more potteries Tile material is constituted.Thus, it is possible to setting is less than or greater than four ceramic sheet material layers according to different application demands, so as to To meet requirement of the different implantable medical devices to 1 structure of ceramic substrate.
It in the present embodiment, in step s 40, may include making the feed through pole of adjacent ceramic sheet material via wiring Conductor connection.It is possible thereby to the ceramic substrate 1 of conducting electrical connection be formed, to improve the electrical property of ceramic substrate 1.
It in the present embodiment, in step s 50, may include leading each ceramic sheet material and the first conductive paste and second Plasma-based is together in 1450 DEG C to 1600 DEG C of at a temperature of cofiring.In some instances, each ceramic sheet material 110 is to ceramic sheet material 140 can be at 1450 DEG C to 1600 DEG C, at a temperature of preferably 1550 DEG C to 1600 DEG C, with the first conductive paste and the second conductive paste one Act the ceramic substrate 1 for firing and being formed and there are ceramic bases 10, feed through pole 20 and wiring conductor 30.
In general, the firing temperature needs of existing high-purity type aluminium oxide ceramics (content is 99.9% or more) are up to 1680 DEG C to 1990 DEG C.In contrast, in the present embodiment, by as described above controlling firing temperature at 1450 DEG C extremely 1600 DEG C, preferably under conditions of 1550 DEG C to 1600 DEG C, on the one hand, be both able to satisfy metal (feed through pole 20 and wiring conductor 30) form by a firing, and can ensure that ceramic (ceramic bases 10) can form by a firing；On the other hand, ceramic sheet material can also be realized (formed ceramic bases 10) and conductive slurries (formation feed through pole 20 and wiring conductor 30) it is low temperature co-fired, to improve firing Made of ceramic bases 10 and feed through pole 20 and wiring conductor 30 bond strength, and effectively increase the system of ceramic substrate 1 Standby efficiency, thereby reduces the production cost of ceramic substrate 1.
Furthermore, it is contemplated that the difference of the expansion index of ceramic sheet material and metal material, in the present embodiment, in step It can also include low-temperature prewarming step in S50.In some instances, it (such as 500 DEG C or less) can complete at a lower temperature The pre- combination of ceramic (ceramic bases 10) and metal (feed through pole 20 and wiring conductor 30), to prevent co-fired temperature excessively high or be total to Burn the generation of rate too fast caused phenomena such as sticking up layer, fracture.
In general, heating ramp rate is too fast, it is easy in ceramic substrate there are gas or is sintered incomplete phenomenon；Add Hot rate is excessively slow, will extend the time of sintering process, reduces producing efficiency, increases cost of manufacture.Therefore, in present embodiment In, it can also include the heating rate during control cofiring in step s 50.Thus, it is possible to prevent gas in ceramic substrate 1 Body or the incomplete phenomenon of sintering, guarantee the consistency of ceramic substrate 1, and can effectively improve the preparation effect of ceramic substrate 1 Rate thereby reduces the production cost of ceramic substrate 1.
Furthermore, it is contemplated that a certain amount of organic principle and Binder Phase can be added in the preparation process of ceramic substrate 1. It in the present embodiment, in step s 50, can also include thermal debinding process.In some instances, thermal debinding process is in wet hydrogen It is completed under gas atmosphere.Thus, it is possible to which removing caused by effectivelying prevent organic principle to react too fast is incomplete, showing there are residual carbon The generation of elephant, thus the generation for the defects of effectively preventing stomata in molding ceramic substrate 1, cracking, deformation.
In addition, in the present embodiment, in step s 50, in order to guarantee the air-tightness of sintered ceramic substrate 1, It can also include sintered insulating process.And it is possible to enhance ceramics in ceramic substrate 1 by the way that soaking time is appropriately extended The bond strength of substrate 10 and feed through pole feed through pole 20 and wiring conductor 30 improves the densified sintering product of ceramic substrate 1.
In addition, in the present embodiment, in step s 50, can also prepare by other means and form ceramic substrate 1, such as vacuum forming.Thus, it is possible to the process requirements under meeting different condition.
In addition, in some instances, the manufacturing method of the ceramic substrate with feed through pole can also be included in step S30 it Afterwards, the coating of covering feed through pole is formed using third conductive paste on the outer surface of outermost layer ceramic sheet material.In this implementation In mode, the coating of covering feed through pole is formed using third conductive paste on the outer surface of outermost layer ceramic sheet material.Namely Third conductive paste is set on the outer surface (such as ceramic sheet material 110 or ceramic sheet material 140) of outermost layer ceramic sheet material, and makes the In first conductive paste of the through-hole that the covering of three conductive pastes is filled in ceramic sheet material, coating is formed.Thereby, it is possible to be easy will be outer The electronic component in portion is combined (such as welding together) with ceramic substrate 1 via coating, to form electrical connection.Show some In example, feed through pole 20 can be completely covered in the coating that third conductive paste is formed.Coating and feed through pole 20 and pottery as a result, It can be formed and be combined closely between porcelain substrate 10, so as to further increase the air-tightness of ceramic substrate 1.
In some instances, the size of the coating of formation can be greater than the size of feed through pole 20, in this case, It can be formed and be combined closely between coating and feed through pole 20 and ceramic bases 10, so as to further increase ceramic substrate 1 air-tightness.Of course, the size of coating might be less that or equal to feed through pole 20 size, so as to meet not Different demands under the conditions of.
In some instances, the composition of third conductive paste can be the mixing of ceramic material and metal material.Wherein, ceramic Material be and each ceramic sheet material (such as ceramic sheet material 110, ceramic sheet material 120, ceramic sheet material 130 and ceramic sheet material 140) structure At identical material (such as aluminium oxide), metal material be one of worked as by tungsten, molybdenum manganese, silver, gold, platinum and their alloy with Upper material constitutes (such as platinum).In this case, the coating formed by third conductive paste, one side and ceramic bases 10 Performance parameter match so that it is higher with 10 bonding strength of ceramic bases；On the other hand, coating is again electric with feedthrough 20 performance parameter of pole matches, so that it is higher with 20 bonding strength of feed through pole.In such a case, it is possible to further The air-tightness for improving ceramic substrate 1, further improves the electrical property and long-term reliability of ceramic substrate 1.In addition, third is led The mixed proportion of ceramic material and metal material is not particularly limited in plasma-based, it can adjustment ceramics are actually needed according to product The ratio of material and metal material.
It in some instances, can be by each ceramic sheet material and the first conductive paste, the second conductive paste and third conductive paste one Play the at a temperature of cofiring at 1450 DEG C to 1600 DEG C.In some instances, each ceramic sheet material 110 to ceramic sheet material 140 can be with It is conductive with the first conductive paste, the second conductive paste and third at a temperature of preferably 1550 DEG C to 1600 DEG C at 1450 DEG C to 1600 DEG C Slurry fires the ceramic substrate 1 for being formed and having ceramic bases 10, feed through pole 20 and wiring conductor 30 together.Thus, it is possible to improve Bond strength between coating, ceramic bases 10, feed through pole 20 and wiring conductor 30, to improve the gas of ceramic substrate 1 Close property.
In addition, in some instances, the manufacturing method of the ceramic substrate with feed through pole can also include on the cover layer Articulamentum is formed using the 4th conductive paste plating.Its plating mode includes but is not limited to weld.It as a result, can be by articulamentum One step enhances connection (such as welding) performance of ceramic substrate 1, enhances ceramic substrate 1 and being electrically connected for external electronic is reliable Property.Wherein, the 4th conductive paste can be by the material one or more of worked as selected from tungsten, molybdenum manganese, silver, gold, platinum, nickel and their alloy Material is constituted.Thus, it is possible to the electric conductivity of articulamentum be improved, to promote the electrical property of ceramic substrate 1.
Although being illustrated in conjunction with the accompanying drawings and embodiments to the present invention above, it will be appreciated that above description The invention is not limited in any way.Those skilled in the art without departing from the true spirit and scope of the present invention may be used To deform and change to the present invention as needed, these deformations and variation are within the scope of the present invention.

Claims (10)

1. a kind of ceramic substrate with feed through pole, it is characterised in that:
Include:
Ceramic bases are fired by the stacking of multiple ceramic sheet materials, and each ceramic sheet material has multiple through-holes；
Feed through pole is fired by the first conductive paste, fills each through-hole；
Wiring conductor is fired by the second conductive paste, forms wiring pattern, and position between each ceramic sheet material It is connected in the feed through pole of the adjacent ceramic sheet material via the wiring conductor；And
Coating is fired by third conductive paste, and covers the feed through pole of the outermost ceramic sheet material,
Each ceramic sheet material and first conductive paste, second conductive paste and third conductive paste are at 1450 DEG C to 1600 Cofiring forms at a temperature of DEG C.
2. ceramic substrate as described in claim 1, it is characterised in that:
The size of the coating is greater than the size of the feed through pole.
3. ceramic substrate as described in claim 1, it is characterised in that:
Aluminium oxide of the ceramic sheet material by content not less than 99.99% is constituted.
4. ceramic substrate as described in claim 1, it is characterised in that:
The through-hole of adjacent each ceramic sheet material arranges with being staggered.
5. ceramic substrate as claimed in claim 2, it is characterised in that:
First conductive paste and second conductive paste are respectively by tungsten, molybdenum manganese, silver, gold, platinum and their alloy More than one material constitute.
6. ceramic substrate as described in claim 1, it is characterised in that:
The third conductive paste is different from first conductive paste, the third conductive paste by selected from tungsten, molybdenum manganese, silver, gold, platinum and Their alloy, which one or more of is worked as, to be constituted.
7. a kind of manufacturing method of the ceramic substrate with feed through pole, it is characterised in that:
Include:
Prepare multiple ceramic sheet materials, and forms multiple through-holes on each ceramic sheet material；
The first conductive paste is filled as feed through pole in each through-hole of each ceramic sheet material；
Form defined wiring pattern on each ceramic sheet material as wiring conductor using the second conductive paste；
The coating for covering the feed through pole is formed using third conductive paste on the outer surface of outermost layer ceramic sheet material；
Each ceramic sheet material is stacked gradually, makes the feed through pole of the adjacent ceramic sheet material via the wiring Conductor connection；And
By each ceramic sheet material together with first conductive paste, second conductive paste and the third conductive paste Cofiring at a temperature of 1450 DEG C to 1600 DEG C.
8. manufacturing method as claimed in claim 7, it is characterised in that:
Aluminium oxide ceramics of the ceramic sheet material by content not less than 99.99% is constituted.
9. manufacturing method as claimed in claim 7, it is characterised in that:
The through-hole of adjacent each ceramic sheet material arranges with being staggered.
10. manufacturing method as claimed in claim 7, it is characterised in that:
First conductive paste and second conductive paste are respectively by tungsten, molybdenum manganese, silver, gold, platinum and their alloy More than one material constitute.
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CN113068298A (en) 2021-07-02
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CN113068298B (en) 2022-06-21
CN113099603A (en) 2021-07-09
CN108966491A (en) 2018-12-07
CN209748985U (en) 2019-12-06
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CN113099603B (en) 2022-06-21
CN109688695B (en) 2021-04-23

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