CN109530244B - Substrate detection method - Google Patents
Substrate detection method Download PDFInfo
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- CN109530244B CN109530244B CN201811610474.2A CN201811610474A CN109530244B CN 109530244 B CN109530244 B CN 109530244B CN 201811610474 A CN201811610474 A CN 201811610474A CN 109530244 B CN109530244 B CN 109530244B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/361—Processing or control devices therefor, e.g. escort memory
- B07C5/362—Separating or distributor mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
- B07C2501/0063—Using robots
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Abstract
The invention relates to the technical field of substrate detection, and particularly discloses a substrate detection method. The detection method of the substrate is used for detecting or transmitting the substrate, and comprises the following steps: step 1: the detection equipment of the substrate comprises a temporary storage carrying platform and a detection mechanism which are arranged on a support; step 2: placing the substrate on a detection mechanism or a temporary storage carrying platform; and step 3: if the substrate is positioned on the temporary storage carrying platform, entering the step 4; if the substrate is positioned on the detection mechanism, detecting the substrate, and unloading the detected substrate from the detection mechanism; and 4, step 4: and unloading the substrate from the temporary storage carrying platform. And the detection equipment places the substrate on the temporary storage carrying platform, and the substrate is classified into qualified products. The substrate detection method provided by the invention can realize grading and detection of the substrate at the same time, and improves the production efficiency of the substrate.
Description
Technical Field
The invention relates to the technical field of substrate detection, in particular to a substrate detection method.
Background
Various substrates, such as liquid crystal panels, OLED (Organic Light-Emitting Display) panels, touch panels, glass substrates, etc., need to be inspected again manually before leaving the factory to ensure that the substrates are qualified.
Because the substrates finished at the upstream do not necessarily need to be inspected again, part of good products and all of defective products may be inspected by sampling, or only defective products are inspected, the existing inspection method can only realize the inspection of the substrates which are already screened and need to be inspected again, and cannot directly screen the substrates finished at the upstream to determine the objects which need to be inspected again, which requires that the substrates are firstly graded and then inspected again, so that the production efficiency is low.
Disclosure of Invention
The invention aims to provide a method for detecting a substrate, which can realize grading and detection of the substrate at the same time and improve the production efficiency of the substrate.
In order to achieve the purpose, the invention adopts the following technical scheme:
an inspection method of a substrate for inspection or transport of the substrate, the inspection method comprising:
step 1: providing detection equipment of a substrate, wherein the detection equipment comprises a temporary storage carrying platform and a detection mechanism which are arranged on a support;
step 2: placing the substrate on the detection mechanism or the temporary storage carrying platform;
and step 3: if the substrate is positioned on the temporary storage carrying platform, entering the step 4; if the substrate is positioned on the detection mechanism, detecting the substrate, and unloading the detected substrate from the detection mechanism;
and 4, step 4: and unloading the substrate from the temporary storage carrying platform.
Preferably, the detection equipment further comprises a carrying mechanism, wherein the carrying mechanism is arranged on the support and comprises a feeding carrying arm assembly; the step 2 comprises the following steps: and driving the feeding carrying arm assembly to place the substrate on the detection mechanism or the temporary storage carrying platform.
Preferably, the conveying mechanism further comprises a transfer conveying arm assembly; the step 4 comprises the following steps: and driving the transfer carrying arm assembly to unload the substrate from the temporary storage carrying platform, or driving the transfer carrying arm assembly to unload the substrate from the detection mechanism in the step 3.
Preferably, the detection apparatus further includes a relay station, and the detection method further includes step 5: and driving the transfer carrying arm assembly to carry the substrate to the transfer carrying platform.
Preferably, the detection device further comprises a labeling mechanism, and the detection method further comprises the following steps of 6: and labeling the substrate on the transfer carrier.
Preferably, the conveying mechanism further comprises an outfeed conveying arm assembly, and the detection method further comprises step 7: and driving the discharging carrying arm assembly to unload the substrate subjected to labeling from the transfer loading platform.
Preferably, the intermediate transfer platform can reciprocate between the labeling position and the discharging position; the step 7 comprises the following steps:
step 71: driving the transfer carrier platform to move from the label sticking position to the material discharging position;
step 72: and driving the discharging carrying arm assembly to unload the substrate subjected to labeling from the transfer loading platform.
Preferably, the detection mechanism includes an overturning arm assembly and a detection stage, and the step 2 includes placing the substrate on the detection stage or the temporary storage stage in the detection mechanism.
Preferably, in the step 3, the detecting the substrate includes:
step 31: overturning the detection carrying platform and detecting the first surface of the substrate;
step 32: driving the turnover arm assembly to grab the substrate;
step 33: driving the turnover arm assembly to turn over, and detecting a second surface of the substrate; wherein the first face is opposite the second face.
Preferably, the detection device has a temporary storage position where the temporary storage stage and the detection stage receive the substrate and a detection position where the detection stage detects the substrate, and the detection stage can reciprocate between the temporary storage position and the detection position; placing the substrate on the detection stage comprises:
step 21: driving the detection carrying platform to move to the temporary storage position;
step 22: placing the substrate on the detection carrying platform;
step 23: and driving the detection carrying platform to move to the detection position.
The invention has the beneficial effects that: the detection equipment places the substrate on the temporary storage carrying platform, and the substrate is classified into qualified products; if the substrate is located in the detection mechanism, the substrate is classified into unqualified products, then the substrate located in the detection mechanism is detected so as to be further classified, and finally the substrate is unloaded on the temporary storage carrying table or the detection mechanism, so that the classification and the detection of the substrate are realized at the same time, and the production efficiency of the substrate is improved.
Drawings
Fig. 1 is a top view of an apparatus for inspecting a substrate according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of connection of the temporary storage carrier, the telescopic rod and the lifting driving member according to the first embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a detecting mechanism according to an embodiment of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 3 at A;
fig. 5 is a schematic structural diagram of a turnover detecting assembly disposed on a bracket according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of another view angle of the detecting mechanism according to an embodiment of the present invention;
FIG. 7 is a partial enlarged view at B in FIG. 6;
fig. 8 is a schematic structural diagram of an apparatus for inspecting a substrate according to an embodiment of the present invention.
In the figure:
1. a detection mechanism; 11. a roll-over arm assembly; 111. an arm moving frame; 112. turning over an arm carrying platform; 113. an arm-flipping drive assembly; 1131. a second rotary drive; 1132. a connecting plate; 12. a stage overturning driving component; 121. a first rotary drive member; 122. a driving gear; 123. a driven gear; 124. a driven shaft; 13. a stage overturning detection assembly; 131. a first baffle plate; 132. a first photosensor; 14. an arm roll-over detection assembly; 141. a second baffle plate; 142. a second photosensor; 15. detecting a carrying platform; 16. a stage moving frame;
21. a temporary storage carrying platform; 22. a lifting drive member; 23. a telescopic rod;
3. a carrying mechanism; 31. a discharge carrying arm assembly; 32. a transfer arm assembly; 33. a material feeding carrying arm assembly; 34. a gantry assembly;
4. a transfer platform deck; 5. a labeling mechanism; 6. a support; 7. a suction nozzle; 200. a substrate.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.
Example one
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected" and "connected" are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, or an integral part; either directly or indirectly through intervening media, either internally or in any other relationship. The terms "disposed" and "disposed" are to be construed broadly and may include, for example, a direct disposition or an indirect disposition via an intermediary. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The embodiment provides a substrate detection device, which is mainly used for detecting a substrate 200, so that the detection device can simultaneously bear the substrate 200 needing to be detected and the substrate 200 not needing to be detected, and simultaneously realize the classification of the substrate 200 and improve the production efficiency.
Fig. 1 is a plan view of the substrate detection apparatus provided in this embodiment, and as shown in fig. 1, the substrate detection apparatus provided in this embodiment includes a support 6, a temporary storage stage 21, a conveying mechanism 3, and a detection mechanism 1.
The detection mechanism 1 includes a detection stage 15. The detection stage 15 is provided on the support 6, and is used for detecting the substrate 200. Specifically, the detection stage 15 is horizontally movably provided on the support 6, and is capable of reciprocating in the first direction between a temporary storage position where the material can be received and a detection position where the substrate 200 is detected. The detection stage 15 can also be turned over, and a detector can detect the first surface of the substrate 200 from multiple angles.
The temporary storage stage 21 is disposed on the support 6 and used for temporarily storing the substrate 200.
The transfer mechanism 3 is provided on the carriage 6, and can transfer the substrate 200 onto the temporary storage stage 21 and the detection stage 15. In the present embodiment, the transport mechanism 3 can also transport the substrate 200 on the temporary storage stage 21 and the detection stage 15 out of the detection apparatus.
As shown in fig. 1, in the present embodiment, it is defined that the first direction is a direction indicated by an arrow W, the second direction is a direction indicated by an arrow H, and the first direction is perpendicular to the second direction.
After the upstream equipment detects the substrate 200, the conveying mechanism 3 places the substrate 200 to be detected on the detection stage 15 of the detection mechanism 1 to detect and classify the substrate 200; the substrate 200 which does not need to be detected is placed on the temporary storage carrying platform 21, so that the detection equipment can receive the substrate 200 which needs to be detected and the substrate 200 which does not need to be detected, and meanwhile, the classification of the substrate 200 is completed in the detection equipment, the substrate 200 which is discharged is not required to be classified by upstream equipment, and the production efficiency is improved.
The detection stage 15 is horizontally movably arranged on the support 6, so that the detection stage 15 is horizontally moved to the temporary storage position, the carrying mechanism 3 places the substrate 200 on the detection stage 15, the detection stage 15 reversely and horizontally moves to the detection position, and the operator can detect the substrate 200. On one hand, in the detection process, the detection carrier 15 does not influence the work of the carrying mechanism 3 and the temporary storage carrier 21, so that the work efficiency of the detection equipment is ensured; on the other hand, when the substrate 200 is detected to be a non-defective product manually, the detection stage 15 may be moved to the temporary storage position again, and the conveying mechanism 3 conveys the substrate 200 out, so that the non-defective substrate 200 does not leave the automatic production line, and the non-defective substrate 200 is prevented from being contaminated.
In other embodiments, the detection stage 15 may also move back and forth along the first direction, but move back and forth between the temporary storage position and the detection position along the first direction through the temporary storage stage 21; or in other embodiments, the conveying mechanism 3 reciprocates between the temporary storage position and the detection position along the first direction, and places the substrate 200 on the detection stage 15.
In this embodiment, the detection stage 15 is disposed on the working support 6 through a linear module, which may be a cylinder or a driving mechanism combining a motor, a screw and a nut.
The transport mechanism 3 is configured to adsorb the substrate 200 after the detection, and to place the substrate 200 on the temporary storage stage 21 or the detection stage 15, and because the transport mechanism 3 places the substrate 200 on the temporary storage stage 21 or the detection stage 15 at the same position, in order to allow the transport mechanism 3 to place the substrate 200 on the temporary storage stage 21 and also place the substrate 200 on the detection stage 15, as shown in fig. 2, the temporary storage stage 21 is provided on the support 6 so as to be able to be lifted, and the temporary storage stage 21 is lowered so as to avoid the detection stage 15. In another embodiment, the detection stage 15 may be provided on the carriage 6 so as to be movable up and down, and the detection stage 15 may be moved up to avoid the temporary storage stage 21.
Specifically, be connected with the telescopic link 23 of a plurality of vertical settings on the microscope stage 21 of keeping in, telescopic link 23 is connected in support 6. The support 6 is further provided with a lifting driving member 22, and an output end of the lifting driving member 22 is connected with the temporary storage carrier 21 and used for driving the temporary storage carrier 21 to lift along the length direction of the telescopic rod 23. The lift drive 22 may be a pneumatic cylinder.
In order to improve the detection efficiency, the detection mechanisms 1 are respectively arranged on both sides of the temporary storage stage 21. Specifically, two sets of detection mechanisms 1 are arranged at intervals along the first direction, the two sets of detection mechanisms 1 are respectively located at two opposite sides of the temporary storage stage 21, the detection position of one detection stage 15 is located at one side of the temporary storage stage 21, and the detection position of the other detection stage 15 is located at the other side of the temporary storage stage 21, so that the substrate 200 can be detected by the detection device along both sides of the first direction.
Fig. 3 is a schematic structural diagram of the detection mechanism provided in this embodiment. As shown in fig. 3, the detection mechanism 1 further comprises an invert arm assembly 11. The invert arm assembly 11 is located above the detection stage 15, the invert arm assembly 11 is used for detecting a first surface of the substrate 200, and the detection stage 15 is used for detecting a second surface of the substrate 200, the first surface being opposite to the second surface.
The turnover arm assembly 11 is arranged on the support 6 in a liftable mode, the turnover arm assembly 11 descends to grab the substrate 200 on the detection carrying platform 15, and the turnover arm assembly 11 ascends to lift the substrate 200.
When the substrate 200 is placed on the detection stage 15, the first surface of the substrate 200 is a detection surface, and when the substrate 200 is located on the flip arm assembly 11, the second surface thereof is a detection surface.
When the substrate 200 is placed on the detection stage 15, the overturning arm assembly 11 is lifted to a higher position, the first surface of the substrate 200 cannot be shielded by the detection stage 15 and the overturning arm assembly 11, and at this time, the worker can detect the first surface. After the first surface is detected, the turnover arm assembly 11 moves downwards to grab the substrate 200, so that the substrate 200 is transferred to the turnover arm assembly 11. Because upset arm subassembly 11 from top to bottom carries base plate 200, consequently, the first face of base plate 200 is sheltered from by upset arm subassembly 11, simultaneously, again because upset arm subassembly 11 promotes base plate 200 and overturns after higher height, consequently, the second face of base plate 200 is towards the staff, and the staff can detect the second face. The detection mechanism 1 provided by the embodiment can realize the detection of the upper surface and the lower surface of the substrate 200 without turning the substrate 200 by 180 degrees, thereby effectively improving the detection efficiency and avoiding the surface of the substrate 200 from being polluted.
In this embodiment, the inverting arm assembly 11 is provided with a suction assembly capable of sucking the substrate 200, and the suction assembly sucks the first surface of the substrate 200 so that the substrate 200 can be transported up and down. Specifically, the suction assembly may be a plurality of suction nozzles 7 arranged at intervals and a vacuum pump communicating with the suction nozzles 7.
Because the detection carrier 15 is normally horizontally arranged, and the size of the substrate 200 is large, when a worker detects the substrate 200, the worker is difficult to clearly and comprehensively observe the substrate 200, which causes inaccurate detection results, and the worker can clearly check the whole substrate 200 from different angles by turning the detection carrier 15. Therefore, in order to realize the turning of the detection stage 15, the stage turning driving assembly 12 is further arranged on the support 6, and the stage turning driving assembly 12 is connected with the detection stage 15 and is used for driving the detection stage 15 to turn, so that the detection stage 15 forms an included angle of 0 ° to 90 ° with the horizontal plane.
The stage reverse drive unit 12 can drive the detection stage 15 to be located at a first position before detection and a second position at the time of detection. In order to facilitate the material receiving of the detection carrier 15, the first position may be a position where the detection carrier 15 is located on a horizontal plane, that is, the detection carrier 15 forms an included angle of 0 ° with the horizontal plane; for the convenience of detection by the staff, the second position may be a position where the detection carrier 15 is located in a vertical plane, that is, the detection carrier 15 forms an included angle of 90 ° with the horizontal plane, or forms an acute angle with the vertical plane, for example, the acute angle is preferably 5 ° to 20 °.
In order to prevent the substrate 200 from falling down during the process of turning over the detection stage 15, an adsorption unit capable of adsorbing the substrate 200 is provided on the detection stage 15.
The detection stage 15 is connected to the linear module by a stage moving frame 16.
Fig. 4 is a partially enlarged view of a portion a in fig. 3. As shown in fig. 4, the stage-flipping driving assembly 12 includes a first rotary driving member 121, a driving gear 122, a driven gear 123, and a driven shaft 124. The first rotary driving member 121 is disposed on the support 6 through the stage moving frame 16, and an output end of the first rotary driving member 121 is in transmission connection with the driving gear 122 to drive the driving gear 122 to rotate. The driven gear 123 is rotatably disposed on the stage moving frame 16 and engaged with the driving gear 122, and the driven shaft 124 is in transmission connection with the driven gear 123, thereby realizing rotation of the driven shaft 124. Detection microscope carrier 15 and driven shaft 124 are fixed connection, and driven shaft 124 drives detection microscope carrier 15 to realize the upset. In this embodiment, the first rotary drive 121 may be a servo motor.
Fig. 5 is a schematic structural view illustrating that the turnover detecting assembly provided in this embodiment is disposed on the bracket. As shown in fig. 5, a stage overturn detection assembly 13 is further disposed on the support 6, and the stage overturn detection assembly 13 is configured to detect whether the stage 15 is overturned to the first position or the second position.
Preferably, the stage overturn detecting assembly 13 includes a first blocking piece 131 and two first photoelectric sensors 132. The connecting line of the two first photoelectric sensors 132 and the rotation center of the first blocking piece 131 forms an included angle of 90 degrees and is arranged on the carrier moving frame 16, the first blocking piece 131 is connected to the output end of the first rotary driving piece 121, and when the first blocking piece 131 rotates along with the output end, the first photoelectric sensor 132 can detect that the detection carrier 15 is located at the first position or the second position, and the transmitting end and the receiving end of the first photoelectric sensor 132 can be inserted into the space between the first blocking piece 131 and the output end.
Fig. 6 is a schematic structural view of another view angle of the detection mechanism provided in the present embodiment, and fig. 7 is a partial enlarged view of a portion B in fig. 6. As shown in fig. 7, the invert arm assembly 11 includes an arm moving frame 111, an arm invert drive assembly 113, and an invert arm stage 112.
The arm moving frame 111 is provided on the stand 6 so as to be capable of ascending and descending. Specifically, the bracket 6 is provided with a linear module, and the linear module is drivingly connected with the arm moving frame 111 to drive the arm moving frame 111 to reciprocate up and down. The arm-flipping driving assembly 113 is disposed on the arm moving frame 111. Flip arm stage 112 is connected to stand 6 in a flip-over manner via arm flip drive assembly 113.
Specifically, the arm inversion drive assembly 113 includes a second rotary drive 1131 and a coupling plate 1132. The second rotation driving member 1131 is disposed on the arm moving frame 111. The second rotary drive 1131 may be a servo motor. The connecting plate 1132 is in transmission connection with the output end of the second rotation driving element 1131, and is fixedly connected to the flip arm carrier 112, so that the second rotation driving element 1131 drives the flip arm carrier 112 to flip.
The arm-flipping drive unit 113 can drive the flipping arm stage 112 to be located at the third position before detection and the fourth position at the time of detection. In order to make the tilt arm assembly 11 easily adsorb the substrate 200 on the detection stage 15, the third position is a position where the tilt arm stage 112 is in a horizontal plane, that is, the tilt arm stage 112 forms an angle of 0 ° with the horizontal plane. And in order to make it easy for the operator to detect the second surface of the substrate 200, the fourth position is a position where the tilt arm carrier 112 is located on the vertical surface, that is, the tilt arm carrier 112 forms an included angle of 90 ° with the horizontal surface, but the tilt arm carrier 112 may also form an acute angle with the vertical surface.
The support 6 is further provided with an arm overturning detection assembly 14, and the arm overturning detection assembly 14 is used for detecting whether the overturning arm carrier 112 is overturned to the third position or the fourth position.
Preferably, the arm-overturn detecting assembly 14 includes a second flap 141 and two second photosensors 142. The connecting line between the two second photosensors 142 and the rotation center of the second stopper 141 forms an included angle of 90 ° with each other and is disposed on the arm moving frame 111, the second stopper 141 is connected to the connecting plate 1132, and when the second stopper 141 rotates along with the connecting plate 1132, the second stopper 141 can be inserted between the transmitting end and the receiving end of the second photosensor 142, and at this time, the second photosensor 142 detects that the detection carrying platform 15 is located at the third position or the fourth position.
It is understood that the angle between the two first photosensors 132 and the angle between the two second photosensors 142 are the same as the tilt angle of the staging stage 21 and the tilt arm stage 112, and the angle between the two first photosensors 132 and the angle between the two second photosensors 142 are both adjustable.
Fig. 8 is a schematic structural diagram of another view angle of the substrate detection apparatus provided in this embodiment. As shown in fig. 8, for the convenience of transportation, the transportation mechanism 3 transports the substrate 200 by suction, the transportation mechanism 3 is located above the temporary storage stage 21 and the detection stage 15, the transportation mechanism 3 can move up and down, and can grab the substrate 200 after descending, and can transport the substrate 200 in the second direction under the driving action of the linear module after lifting. In particular, the lifting movement of the handling mechanism 3 can be driven by a linear module.
As shown in fig. 1, the carrying mechanism 3 includes an in-feed carrying arm assembly 33, an in-transit carrying arm assembly 32, and an out-feed carrying arm assembly 31. The feeding carrying arm assembly 33, the transferring carrying arm assembly 32 and the discharging carrying arm assembly 31 can move along the second direction and carry the substrate 200 in an adsorption mode. The handling mechanism 3 further comprises a gantry assembly 34, the gantry assembly 34 being connectable to the frame 6 via a column (not shown) and located above the frame 6. The incoming material handling arm assembly 33, the intermediate handling arm assembly 32 and the outgoing material handling arm assembly 31 are slidably disposed on the gantry assembly 34. The input transfer arm assembly 33 is used to place the substrate 200 on the inspection stage 15 or the buffer stage 21.
The detection apparatus further comprises an intermediate transfer stage 4. The relay stage 4 is disposed on one side of the temporary storage stage 21, and preferably, the temporary storage stage 21 and the relay stage 4 are disposed in sequence along the second direction.
The detection apparatus further includes a labeling mechanism 5, and the labeling mechanism 5 is configured to label the substrate 200 on the intermediary carrying stage 4. For example, the labeling mechanism 5 may attach a label of class a to the substrate 200 transferred from the temporary storage stage 21 to the intermediate stage 4, and attach B, C or a label of class D to the substrate 200 transferred from the detection mechanism 1 to the intermediate stage 4. Specifically, the labeling mechanism 5 is disposed on one side of the detection carrier 15, and the detection carrier 15 and the labeling mechanism 5 are sequentially disposed along the second direction. The detection device is provided with a labeling position and a discharging position, the transfer platform 4 is arranged to move back and forth between the labeling position and the discharging position, so that the substrate 200 on the transfer platform 4 can be labeled, and the labeled substrate 200 can be moved away from the detection device.
The relay transfer arm assembly 32 is capable of reciprocating between the temporary storage stage 21 and the relay stage 4, and places the temporary storage stage 21 and the substrate 200 on the detection stage 15 at the temporary storage position on the relay stage 4. The discharge transport arm assembly 31 can transport the substrate 200 after the labeling on the relay stage 4 away from the detection apparatus.
In this embodiment, in order to facilitate the connection of the detection device and the downstream device, the transfer carrying arm assembly 32 and the discharge carrying arm assembly 31 are sequentially arranged along the first direction, the labeling positions and the discharge positions are arranged at intervals along the first direction, and the transfer carrier 4 can reciprocate between the labeling positions and the discharge positions along the first direction so as to be located under the transfer carrying arm assembly 32 and under the discharge carrying arm assembly 31.
The working process of the detection device provided by the embodiment is as follows:
the material feeding and conveying arm assembly 33 sucks the substrate 200 coming upstream, and if the substrate 200 does not need to be detected, the temporary storage platform 21 is lifted to the temporary storage position, and the material feeding and conveying arm assembly 33 places the substrate 200 on the temporary storage platform 21. The intermediary transfer arm assembly 32 transfers the substrate 200 on the temporary storage stage 21 to the intermediary transfer stage 4, after the labeling machine labels the substrate 200 on the intermediary transfer stage 4, the intermediary transfer stage 4 moves to a position right below the discharge transfer arm assembly 31 in the first direction, and the discharge transfer arm assembly 31 transfers the substrate 200 on the intermediary transfer stage 4 away from the detection device.
If the substrate 200 coming upstream is a defective product, the temporary storage stage 21 is lowered to the avoidance position, the detection stage 15 moves to the temporary storage position in the first direction, and the feeding transport arm assembly 33 places the substrate 200 on the detection stage 15. The detection stage 15 moves in the reverse direction of the first direction to the detection position, the stage overturning driving assembly 12 drives the detection stage 15 to overturn to the second position, and the first surface of the substrate 200 is manually detected. The stage flip driving assembly 12 drives the detection stage 15 to flip to the first position, the flip arm assembly 11 adsorbs the first surface of the substrate 200 and lifts the substrate 200, and the arm flip driving assembly 113 flips the flip arm stage 112 to the fourth position for detection. The detection carrier 15 moves to the temporary storage position in the reverse direction of the first direction, and the transfer carrying arm assembly 32 carries the substrate 200 on the detection carrier 15 to the transfer carrier 4 for labeling and discharging.
Example two
The embodiment provides a method for detecting a substrate, which is mainly used for detecting or transmitting the substrate 200. The detection method can be used in the detection equipment for the substrate in the embodiment, but is not limited thereto, and can also be used in other detection equipment capable of realizing the detection method provided by the embodiment, and the method can simultaneously realize the classification and detection of the substrate 200, thereby improving the production efficiency of the substrate 200.
The method for detecting the substrate 200 provided by the embodiment comprises the following steps:
step 1: the detection equipment for the substrate 200 is provided, and comprises a temporary storage carrier 21 arranged on a support 6 and a detection mechanism 1;
step 2: placing the substrate 200 on the detection mechanism 1 or the temporary storage carrier 21;
and step 3: if the substrate 200 is located on the temporary storage carrier 21, go to step 4; if the substrate 200 is located in the detection mechanism 1, detecting the substrate 200, and unloading the detected substrate 200 from the detection mechanism 1;
and 4, step 4: and unloading the substrate 200 from the temporary storage carrier 21.
For example, the inspection apparatus places the substrate 200 on the temporary storage stage 21, and the substrate 200 is classified as a class a product. If the substrate 200 is located in the detection mechanism 1, the substrate 200 is classified into products of other grades, then the substrate 200 located in the detection mechanism 1 is manually detected so as to further classify the substrate 200, and finally the substrate 200 is unloaded on the temporary storage carrier 21 or the detection mechanism 1, so that the classification and detection of the substrate 200 are simultaneously realized, and the production efficiency of the substrate 200 is improved.
The detection equipment further comprises a carrying mechanism 3, wherein the carrying mechanism 3 is arranged on the support 6 and comprises a feeding carrying arm assembly 33. The step 2 comprises the following steps: the pan carrying arm assembly 33 is driven to place the substrate 200 on the detection stage 15 or the temporary storage stage 21.
The detection mechanism 1 comprises an overturning arm assembly 11 and a detection carrier 15. Specifically, the step 2 includes placing the substrate 200 on the detection stage 15 or the temporary storage stage 21 of the detection mechanism 1.
The detection apparatus has a temporary storage position where the temporary storage stage 21 and the detection stage 15 receive the substrate 200 and a detection position where the detection stage 15 detects the substrate 200, and the detection stage 15 is capable of reciprocating between the temporary storage position and the detection position.
Placing the substrate 200 on the inspection stage 15 includes:
step 21: driving the detection carrying platform 15 to move to the temporary storage position;
step 22: placing the substrate 200 on the detection stage 15;
step 23: and driving the detection carrier 15 to move to the detection position.
In the step 3, the detecting the substrate 200 includes:
step 31: the detection stage 15 is turned over, and the first surface of the substrate 200 is detected. The detection stage 15 is turned over so that the substrate 200 is positioned at an appropriate angle, which facilitates the detection of the first surface of the substrate 200 by the worker.
Step 32: the invert arm assembly 11 is driven to grab the substrate 200, so that the substrate 200 is loaded on the invert arm assembly 11, and the second side of the substrate 200 is not blocked and can be detected. Wherein the first face is opposite the second face.
Step 33: and driving the turnover arm assembly 11 to turn over, and detecting the second surface of the substrate 200. The turnover arm assembly 11 is driven to turn over, so that the base plate 200 is at a proper angle, and a worker can conveniently detect the second side of the base plate 200.
The handling mechanism 3 further comprises a transit handling arm assembly 32. The step 4 comprises the following steps: driving the transfer arm assembly 32 to unload the substrate 200 from the temporary storage stage 21; or the step 3 of unloading the detected substrate 200 from the detection mechanism 1 includes driving the transfer arm assembly 32 to unload the substrate 200 from the detection mechanism 1. Specifically, the intermediary transfer arm assembly 32 is driven to unload the substrate 200 from the inspection stage 15.
Before the transfer arm assembly 32 is driven to unload the substrate 200 from the detection stage 15, the method further includes the following steps: the detection carrier 15 moves from the detection position to the temporary storage position.
The detection equipment further comprises a transfer platform 4, and the detection method further comprises the following steps of 5: the intermediary transfer arm assembly 32 is driven to transfer the substrate 200 to the intermediary stage 4.
Specifically, when the substrate 200 is positioned on the temporary storage stage 21, the intermediate transfer arm assembly 32 transfers the substrate 200 on the temporary storage stage 21 to the intermediate transfer stage 4; when the substrate 200 is located on the detection stage 15, the detection stage 15 moves from the detection position to the temporary storage position, and then the relay transport arm assembly 32 transports the substrate 200 on the detection stage 15 to the relay stage 4.
The detection device further comprises a labeling mechanism 5, and the detection method further comprises the following steps of 6: labeling the substrate 200 on the intermediate transfer stage 4 to attach a corresponding label to the classified substrate 200.
The conveying mechanism 3 further comprises a discharging conveying arm assembly 31, and the detection method further comprises the following steps of 7: the discharging and carrying arm assembly 31 is driven to unload the substrate 200 subjected to the labeling from the intermediate transfer stage 4.
Preferably, the transfer platform 4 can reciprocate between the labeling position and the discharging position; the step 7 comprises the following steps:
step 71: driving the transfer carrier 4 to move from the labeling position to the discharging position;
step 72: the discharging and carrying arm assembly 31 is driven to unload the substrate 200 subjected to the labeling from the intermediate transfer stage 4.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (8)
1. A method for inspecting a substrate, the method comprising:
step 1: the detection equipment for the substrate comprises a temporary storage carrying platform (21) arranged on a support (6), a detection mechanism (1) and a carrying mechanism (3), wherein the detection mechanism (1) comprises a turnover arm assembly (11) and a detection carrying platform (15);
step 2: placing a substrate (200) on the detection mechanism (1) or the temporary storage carrying platform (21); after the upstream equipment detects the substrate (200), the conveying mechanism (3) places the substrate (200) to be detected on the detection stage (15) of the detection mechanism (1); placing a substrate (200) which does not need to be detected on the temporary storage carrying platform (21);
and step 3: if the substrate (200) is positioned on the temporary storage carrying platform (21), entering step 4; if the substrate (200) is positioned on the detection mechanism (1), detecting the substrate (200), and unloading the detected substrate (200) from the detection mechanism (1);
and 4, step 4: unloading the substrate (200) from the temporary storage carrier (21);
the step 2 comprises placing the substrate (200) on the detection stage (15) or the temporary storage stage (21) in the detection mechanism (1);
the detection device is provided with a temporary storage position where the temporary storage carrier (21) and the detection carrier (15) bear the substrate (200) and a detection position where the detection carrier (15) detects the substrate (200), and the detection carrier (15) can move back and forth between the temporary storage position and the detection position; placing the substrate (200) on the inspection stage (15) comprises:
step 21: driving the detection carrying platform (15) to move to the temporary storage position;
step 22: placing the substrate (200) on the detection stage (15);
step 23: and driving the detection carrying platform (15) to move to the detection position.
2. The method for inspecting a substrate according to claim 1, wherein the inspection apparatus further comprises a carrying mechanism (3), the carrying mechanism (3) being disposed on the rack (6) and comprising an inlet carrying arm assembly (33); the step 2 comprises the following steps: and driving the feeding and carrying arm assembly (33) to place the substrate (200) on the detection mechanism (1) or the temporary storage carrying platform (21).
3. The method for inspecting a substrate according to claim 2, wherein the carrying mechanism (3) further comprises a relay carrying arm assembly (32); the step 4 comprises the following steps: driving the transfer arm assembly (32) to unload the substrate (200) from the temporary storage stage (21), or the step 3 comprises driving the transfer arm assembly (32) to unload the substrate (200) from the detection mechanism (1).
4. The method for inspecting a substrate according to claim 3, wherein the inspecting apparatus further comprises an intermediary stage (4), and the inspecting method further comprises the step 5: and driving the transfer arm assembly (32) to transfer the substrate (200) to the transfer platform (4).
5. The method for inspecting a substrate according to claim 4, wherein the inspection apparatus further comprises a labeling mechanism (5), the method further comprising the step 6 of: labeling the substrate (200) on the intermediate transfer carrier (4).
6. The method for inspecting a substrate according to claim 5, wherein the carrying mechanism (3) further comprises an outfeed carrying arm assembly (31), the method further comprising the step 7: and driving the discharging and conveying arm assembly (31) to unload the substrate (200) subjected to labeling from the transfer platform (4).
7. The method for inspecting a substrate according to claim 6, wherein the relay stage (4) is capable of reciprocating between a labeling position and a discharging position; the step 7 comprises the following steps:
step 71: driving the transfer carrier (4) to move from the labeling position to the discharging position;
step 72: and driving the discharging and conveying arm assembly (31) to unload the substrate (200) subjected to labeling from the transfer platform (4).
8. The method of claim 1, wherein the step 3 of inspecting the substrate (200) comprises:
step 31: overturning the detection carrying platform (15) and detecting the first surface of the substrate (200);
step 32: driving the turnover arm assembly (11) to grab the substrate (200);
step 33: driving the overturning arm assembly (11) to overturn and detecting the second surface of the substrate (200); wherein the first face is opposite the second face.
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| CN201004127Y (en) * | 2007-01-09 | 2008-01-09 | 巧安自动化机电系统有限公司 | LCD panel detection and automatic glue painting device |
| CN101566752A (en) * | 2008-04-25 | 2009-10-28 | 深超光电（深圳）有限公司 | System for conveying and inspecting liquid crystal panels |
| JP5508583B2 (en) * | 2013-06-27 | 2014-06-04 | 東レエンジニアリング株式会社 | Mounting apparatus and mounting method |
| CN208043695U (en) * | 2018-03-30 | 2018-11-02 | 昆山精讯电子技术有限公司 | A kind of detection device of panel |
| CN108325871B (en) * | 2018-04-18 | 2024-05-17 | 昆山精讯电子技术有限公司 | Detection device of panel |
| CN108535270B (en) * | 2018-06-27 | 2024-03-26 | 苏州精濑光电有限公司 | Substrate appearance detector |
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