CN209550006U - A kind of detection device of substrate - Google Patents
A kind of detection device of substrate Download PDFInfo
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- CN209550006U CN209550006U CN201822215198.1U CN201822215198U CN209550006U CN 209550006 U CN209550006 U CN 209550006U CN 201822215198 U CN201822215198 U CN 201822215198U CN 209550006 U CN209550006 U CN 209550006U
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- microscope carrier
- substrate
- detection
- temporary
- detection device
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Abstract
The utility model relates to substrate detection technique fields, specifically disclose a kind of detection device of substrate.The detection device of substrate, for detecting substrate, including bracket, further includes: temporary microscope carrier is arranged on the bracket, for keeping in the substrate；Testing agency, including detection microscope carrier, the detection microscope carrier are arranged on the bracket, the detection substrate for the substrate；Carrying mechanism is arranged on the bracket, can will be on the board carrying to the temporary microscope carrier and the detection microscope carrier.After upstream equipment detects substrate, carrying mechanism will need the substrate detected to be placed on the detection microscope carrier of testing agency, the substrate for not needing detection is placed on temporary microscope carrier, so that detection device can either receive the substrate for needing to detect, also the substrate for not needing detection can be received, and point etc. of completing substrate improves production efficiency without upstream equipment first by substrate of discharging point etc. in detection device simultaneously.
Description
Technical field
The utility model relates to substrate detection technique field more particularly to a kind of detection devices of substrate.
Background technique
All kinds of substrates, such as liquid crystal display panel, OLED (Organic Light-Emitting Display) panel, touch surface
Plate, glass substrate etc. are needed before factory by manually being detected again to its surface, to ensure substrate as qualified product.
Due to upstream complete substrate it is not absolutely required to all detect again, may for sampling observation part non-defective unit and all not
Non-defective unit is detected, or only detects defective products, and existing testing agency, which is often only capable of receiving, had screened what needs detected
Substrate, the substrate that cannot directly complete to upstream carry out screening determining test object, and this requires upstream equipments first by discharging
Substrate point etc., causes production efficiency lower.
Utility model content
The purpose of this utility model is to provide a kind of detection devices of substrate, so that detection device can carry simultaneously to be needed
The substrate to be detected and the substrate for not needing detection, and point etc. of substrate is realized simultaneously, improve production efficiency.Substrate.
For this purpose, the utility model uses following technical scheme:
A kind of detection device of substrate, for detecting substrate, including bracket, further includes:
Temporary microscope carrier, is arranged on the bracket, for keeping in the substrate；
Testing agency, including detection microscope carrier, the detection microscope carrier are arranged on the bracket, the detection for the substrate
Substrate；
Carrying mechanism is arranged on the bracket, can be by the board carrying to the temporary microscope carrier and the detection
On microscope carrier.
Preferably, the temporary microscope carrier or the detection microscope carrier can move back and forth between position and check bit temporary, and
The temporary microscope carrier or the detection microscope carrier are liftably arranged on the bracket mutually to avoid.
Preferably, microscope carrier overturning driving assembly is additionally provided on the bracket, the microscope carrier overturning driving assembly and institute
Detection microscope carrier connection is stated, for driving the detection microscope carrier to overturn.
Preferably, the testing agency further includes liftable and the turnover flip-arm group being arranged on the bracket
Part, the overturning arm component are located at the top of the detection microscope carrier, are respectively used to the opposite of the substrate with the detection microscope carrier
The first face and the second face detection.
Preferably, the side of the temporary microscope carrier is additionally provided with transfer microscope carrier；
The carrying mechanism includes that arm component is carried in transfer, the transfer carry arm component can in the temporary microscope carrier and
It is moved back and forth between the transfer microscope carrier.
Preferably, the detection device further includes label-sticking mechanism and has labeling position and out material position, the transfer microscope carrier
It is set as to move back and forth between the labeling position and the material position out.
Preferably, the carrying mechanism includes that arm component is carried in discharging, the discharging carry arm component can will described in
The substrate on transfer microscope carrier moves away from the detection device.
Preferably, the carrying mechanism includes that pan feeding carries arm component, the pan feeding carries arm component to will be described
Substrate is placed in the detection microscope carrier or the temporary microscope carrier.
Preferably, the carrying mechanism further includes that arm component and the discharging handling arm are carried in transfer described in the component of gantry
Component is slidably disposed on gantry component.
Preferably, the two sides of the temporary microscope carrier are respectively arranged with the testing agency.
The utility model has the beneficial effects that carrying mechanism will need the substrate detected to put after upstream equipment detects substrate
It is placed on the detection microscope carrier of testing agency, with substrate is detected and classification, the substrate for not needing detection is placed in temporary
On microscope carrier, so that detection device can either receive the substrate for needing to detect, the substrate for not needing detection can be also received, and
Point etc. of completing substrate improves production efficiency without upstream equipment first by substrate of discharging point etc. in detection device simultaneously.
Detailed description of the invention
Fig. 1 is the top view of the detection device of substrate provided by the embodiment of the utility model；
Fig. 2 is the structural representation that temporary microscope carrier provided by the embodiment of the utility model, telescopic rod are connected with lifting actuator
Figure；
Fig. 3 is the structural schematic diagram of testing agency provided by the embodiment of the utility model；
Fig. 4 is the partial enlarged view in Fig. 3 at A；
Fig. 5 is the structural schematic diagram that overturning detection components provided by the embodiment of the utility model are set on bracket；
Fig. 6 is the structural schematic diagram at another visual angle of testing agency provided by the embodiment of the utility model；
Fig. 7 is the partial enlarged view in Fig. 6 at B；
Fig. 8 is the structural schematic diagram at another visual angle of the detection device of substrate provided by the embodiment of the utility model.
In figure:
1, testing agency；11, arm component is overturn；111, arm movable stand；112, flip-arm microscope carrier；113, arm overturns driving group
Part；1131, the second rotary drive；1132, connecting plate；12, microscope carrier overturns driving assembly；121, the first rotary drive；
122, driving gear；123, driven gear；124, driven shaft；13, microscope carrier overturns detection components；131, first flap；132,
One photoelectric sensor；14, arm overturns detection components；141, second flap；142, the second photoelectric sensor；15, microscope carrier is detected；
16, microscope carrier movable stand；
21, microscope carrier is kept in；22, actuator is gone up and down；23, telescopic rod；
3, carrying mechanism；31, arm component is carried in discharging；32, arm component is carried in transfer；33, pan feeding carries arm component；34,
Gantry component；
4, transfer microscope carrier；5, label-sticking mechanism；6, bracket；7, suction nozzle；200, substrate.
Specific embodiment
Further illustrate the technical solution of the utility model below with reference to the accompanying drawings and specific embodiments.It can manage
Solution, specific embodiment described herein are used only for explaining the utility model, rather than the restriction to the utility model.Separately
It is outer it should also be noted that, illustrating only part relevant to the utility model for ease of description, in attached drawing and not all.
In the description of the present invention, unless otherwise clearly defined and limited, term " being connected ", " connection " should be done
It broadly understood, for example, it may be being fixedly connected, may be a detachable connection, or is integral；It can be directly connected, it can also
Indirectly connected through an intermediary, can be the connection inside two elements or the interaction relationship of two elements.Term
" setting ", " being set to " shall be understood in a broad sense, for example, it may be being directly arranged, can also be arranged indirectly by intermediary.It is right
For those skilled in the art, can understand as the case may be above-mentioned term in the present invention specifically contain
Justice.
The detection device for present embodiments providing a kind of substrate is mainly used in the detection of substrate 200, so that detection device
The substrate 200 for needing the substrate 200 detected and not needing detection can be carried simultaneously, and realizes the classification of substrate 200 simultaneously, mentioned
High efficiency.
Fig. 1 is the top view of the detection device of substrate provided in this embodiment, as shown in Figure 1, base provided in this embodiment
The detection device of plate includes bracket 6, temporary microscope carrier 21, carrying mechanism 3 and testing agency 1.
Testing agency 1 includes detection microscope carrier 15.Detection microscope carrier 15 is set on bracket 6, the detection for substrate 200.Tool
Body, detection microscope carrier 15 are set to horizontally moveablely on bracket 6, can along first direction can splicing temporary position and substrate
It is moved back and forth between 200 detected check bits.Detection microscope carrier 15 can also be overturn, and testing staff can be to the first of substrate 200
The detection of face progress multi-angle.
Temporary microscope carrier 21 is set on bracket 6, for keeping in substrate 200.
Carrying mechanism 3 is set on bracket 6, can be carried to substrate 200 on temporary microscope carrier 21 and detection microscope carrier 15.In
In the present embodiment, the substrate 200 on temporary microscope carrier 21 and detection microscope carrier 15 can also be moved out detection device by carrying mechanism 3.
As shown in Figure 1, providing in the present embodiment, first direction is direction shown in arrow W, and second direction is arrow H
Shown in direction, first direction is vertical with second direction.
After upstream equipment detects substrate 200, carrying mechanism 3 will need the substrate 200 detected to be placed in testing agency 1
It detects on microscope carrier 15, substrate 200 is detected and is classified；The substrate 200 for not needing detection is placed in temporary microscope carrier 21
On, so that detection device can either receive the substrate 200 for needing to detect, the substrate 200 for not needing detection can be also received,
And simultaneously in detection device completing substrate 200 classification, first the substrate of discharging 200 is classified without upstream equipment, is improved
Production efficiency.
Detection microscope carrier 15 be set on bracket 6 horizontally moveablely so that detection microscope carrier 15 be moved horizontally to it is temporary
Substrate 200 is placed on detection microscope carrier 15 by position, carrying mechanism 3, and detection microscope carrier 15 is reversely moved horizontally to check bit, and work people
Member can detect substrate 200.On the one hand, in detection process, detection microscope carrier 15 will not influence carrying mechanism 3 and temporary load
The work of platform 21 ensure that the working efficiency of detection device；On the other hand, when artificial detection to substrate 200 is qualified product, inspection
Temporary position can be moved again to by surveying microscope carrier 15, and carrying mechanism 3 moves out substrate 200, and qualified substrate 200 will not leave automatically
Production line avoids qualified substrate 200 contaminated.
In other embodiments, detection microscope carrier 15 can be carried with that need not move back and forth along first direction by temporary
Platform 21 moves back and forth between position and check bit along first direction temporary；Or in other embodiments, carrying mechanism 3 is along first party
It is moved back and forth between position and check bit to temporary, substrate 200 is placed on detection microscope carrier 15.
In the present embodiment, detection microscope carrier 15 is set on Working rack 6 by straight line mould group, and straight line mould group can be gas
Cylinder or motor, screw rod and nut three cooperate driving mechanism.
Carrying mechanism 3 is used to adsorb the substrate 200 after detection, and substrate 200 is placed in temporary microscope carrier 21 or detection microscope carrier
On 15, since substrate 200 is placed on temporary microscope carrier 21 or detection microscope carrier 15 by carrying mechanism 3 in same position, in order to
It is placed in carrying mechanism 3 can not only by substrate 200 on temporary microscope carrier 21, but also substrate 200 can be placed in detection microscope carrier 15
On, as shown in Fig. 2, temporary microscope carrier 21 is liftably set on bracket 6, the temporary decline of microscope carrier 21 is to avoid detection microscope carrier 15.
In other embodiments, it can also be that detection microscope carrier 15 is liftably set on bracket 6, detection microscope carrier 15 rises to avoid temporarily
Deposit microscope carrier 21.
Specifically, it keeps on microscope carrier 21 and is connected with multiple telescopic rods 23 being vertically arranged, telescopic rod 23 is connected to bracket 6.
Lifting actuator 22 is additionally provided on bracket 6, the output end of lifting actuator 22 is connect with temporary microscope carrier 21, and for driving temporarily
The length direction that microscope carrier 21 is deposited along telescopic rod 23 is gone up and down.Going up and down actuator 22 can be cylinder.
In order to improve the efficiency of detection, the two sides of temporary microscope carrier 21 are respectively arranged with testing agency 1.Specifically, two groups of inspections
It surveys mechanism 1 to be arranged along first direction interval, Liang Zu testing agency 1 is located at the opposite sides of temporary microscope carrier 21, wherein an inspection
The check bit for surveying microscope carrier 15 is located at the side of temporary microscope carrier 21, and the check bit of another detection microscope carrier 15 is located at the another of temporary microscope carrier 21
Side, so that detection device can detecte substrate 200 along the two sides of first direction.
Fig. 3 is the structural schematic diagram of testing agency provided in this embodiment.As shown in figure 3, testing agency 1 further includes overturning
Arm component 11.Overturn the top that arm component 11 is located at detection microscope carrier 15, inspection of the overturning arm component 11 for the first face of substrate 200
It surveys, detection of the detection microscope carrier 15 for the second face of substrate 200, the first face is opposite with the second face.
Arm component 11 is liftable is set on bracket 6 for overturning, and overturning arm component 11 declines, and can grab and be located at detection and carry
Substrate 200 on platform 15, overturning arm component 11 rise, can promote substrate 200.
When substrate 200 is placed on detection microscope carrier 15, the first face of substrate 200 is detection faces, is turned over when substrate 200 is located at
When on tumbler assembly 11, the second face is detection faces.
When substrate 200 is placed on detection microscope carrier 15, overturning arm component 11 rises to higher position, substrate 200
First face will not be detected microscope carrier 15 and overturning arm component 11 blocks, and staff can detect the first face at this time.The
After detecting on one side, overturning arm component 11 is moved downward, and grabs substrate 200, and substrate 200 is made to be transferred to overturning arm component 11
On.Due to overturning handling substrate 200 from top to bottom of arm component 11, the first face of substrate 200 is reversed the screening of arm component 11
Gear, meanwhile, and overturn after being promoted substrate 200 to higher height due to overturning arm component 11, the second of substrate 200
Facing towards staff, staff can be detected the second face.Testing agency 1 provided in this embodiment may not necessarily be right
Substrate 200 carries out 180 ° and overturns the detection that 200 upper and lower surface of substrate can be realized, and effectively increases detection efficiency, avoids substrate
200 surfaces are contaminated.
In the present embodiment, it overturns and is provided with the absorbent module for capableing of sorbing substrate 200 on arm component 11, absorbent module is inhaled
First face of attached substrate 200 enables substrate 200 to be carried up and down.Specifically, absorbent module can be multiple spaced
Suction nozzle 7 and the vacuum pump being connected to suction nozzle 7.
Since detection microscope carrier 15 is horizontally disposed under normal circumstances, and the size of substrate 200 is larger, therefore, work
Personnel are when detecting substrate 200, it is difficult to and it is relatively clear comprehensively to observe substrate 200, it causes testing result inaccurate, passes through detection
The overturning of microscope carrier 15 can make testing staff more clear and check entire substrate 200 from different angles.Therefore, in order to realize
The overturning of microscope carrier 15 is detected, microscope carrier overturning driving assembly 12 is additionally provided on bracket 6, microscope carrier overturns driving assembly 12 and detection carries
Platform 15 connects, and for driving detection microscope carrier 15 to overturn, so that detection microscope carrier 15 is horizontal by 0 ° to 90 ° angle.
Microscope carrier overturning driving assembly 12 can drive detection microscope carrier 15 to be located at the first position before detection and the when detection
Two positions.Wherein, detection 15 splicing of microscope carrier for convenience, first position can be the position that detection microscope carrier 15 is in horizontal plane,
That is detection microscope carrier 15 is horizontal by 0 ° of angle；In order to facilitate staff's detection, the second position be can be at detection microscope carrier 15
In the position of vertical plane, i.e. detection microscope carrier 15 is horizontal by 90 ° of angles, or the position with vertical plane setting at an acute angle, such as should
Acute angle is preferably 5 ° -20 °.
In order to avoid substrate 200 falls during detecting microscope carrier 15 and overturning, detects and be provided with and can inhale on microscope carrier 15
The absorbent module of attached substrate 200.
Detection microscope carrier 15 is connected in straight line mould group by microscope carrier movable stand 16.
Fig. 4 is the partial enlarged view in Fig. 3 at A.As shown in figure 4, microscope carrier overturning driving assembly 12 includes that the first rotation is driven
Moving part 121, driving gear 122, driven gear 123 and driven shaft 124.First rotary drive 121 passes through microscope carrier movable stand 16
It is set on bracket 6, the output end and driving gear 122 of the first rotary drive 121 are sequentially connected, to drive driving gear
122 rotations.Driven gear 123 is rotatably dispose on microscope carrier movable stand 16, and is engaged with driving gear 122, driven shaft 124 with from
Moving gear 123 is sequentially connected, and then realizes the rotation of driven shaft 124.Detection microscope carrier 15 is fixedly connected with driven shaft 124, driven
Axis 124 drives detection microscope carrier 15 to realize overturning.In the present embodiment, the first rotary drive 121 can be servo motor.
Fig. 5 is that overturning detection components provided in this embodiment are set to the structural schematic diagram on bracket.As shown in figure 5, branch
Microscope carrier overturning detection components 13 are additionally provided on frame 6, microscope carrier overturning detection components 13 are for detecting whether detection microscope carrier 15 overturns
To first position or the second position.
Preferably, microscope carrier overturning detection components 13 include first flap 131 and two the first photoelectric sensors 132.Two
The line of first photoelectric sensor 132 and the rotation center of first flap 131 is set on microscope carrier movable stand 16 in 90 ° of angles,
First flap 131 is connected to the output end of the first rotary drive 121, during first flap 131 is rotated with output end
It is inserted between the transmitting terminal and receiving end of the first photoelectric sensor 132, the first photoelectric sensor 132 can be detected inspection
It surveys microscope carrier 15 and is located at first position or the second position.
Fig. 6 is the structural schematic diagram at another visual angle of testing agency provided in this embodiment, and Fig. 7 is the part at the B of Fig. 6
Enlarged drawing.As shown in fig. 7, overturning arm component 11 includes arm movable stand 111, arm overturning driving assembly 113 and flip-arm microscope carrier
112。
Arm movable stand 111 is liftable to be set on bracket 6.Specifically, straight line mould group, straight line mould are provided on bracket 6
Group is drivingly connected with arm movable stand 111, is pumped with actuating arm movable stand 111.Arm overturning driving assembly 113 is set to
On arm movable stand 111.Flip-arm microscope carrier 112 is connected to the mobile bracket 6 of flip-arm by the way that arm overturning driving assembly 113 is turnover
On.
Specifically, arm overturning driving assembly 113 includes the second rotary drive 1131 and connecting plate 1132.Second rotation is driven
Moving part 1131 is set on arm movable stand 111.Second rotary drive 1131 can be servo motor.Connecting plate 1132 and second
The output end of rotary drive 1131 is sequentially connected, and is fixedly connected with flip-arm microscope carrier 112, so that the second rotation driving
Part 1131 drives flip-arm microscope carrier 112 to overturn.
When arm overturning driving assembly 113 can drive flip-arm microscope carrier 112 to be located at the third place and detection before detecting
4th position.It is easy to adsorb the substrate 200 detected on microscope carrier 15 to make to overturn arm component 11, the third place is flip-arm microscope carrier
112 are in the position of horizontal plane, i.e., flip-arm microscope carrier 112 is horizontal by 0 ° of angle.And in order to make staff be easy to detect
Second face of substrate 200, the 4th position are the position that flip-arm microscope carrier 112 is in vertical plane, i.e. flip-arm microscope carrier 112 and level
Face is in 90 ° of angles, and certain flip-arm microscope carrier 112 can also be with vertical plane setting at an acute angle.
Arm overturning detection components 14 are additionally provided on bracket 6, arm overturning detection components 14 are for detecting flip-arm microscope carrier 112
Whether overturn to the third place or the 4th position.
Preferably, arm overturning detection components 14 include second flap 141 and two the second photoelectric sensors 142.Two
The line of two photoelectric sensors 142 and the rotation center of second flap 141 is set on arm movable stand 111 in 90 ° of angles, and second
Baffle 141 is connected on connecting plate 1132, is inserted into during second flap 141 is rotated with connecting plate 1132 to second
Between the transmitting terminal and receiving end of photoelectric sensor 142, at this point, the second photoelectric sensor 142 detects that detection microscope carrier 15 is located at
The third place or the 4th position.
It is understood that angle between two the first photoelectric sensors 132 and two the second photoelectric sensors 142 it
Between angle it is consistent with the flip angle of temporary microscope carrier 21 and flip-arm microscope carrier 112, and between two the first photoelectric sensors 132
Angle and two the second photoelectric sensors 142 between angle it is adjustable.
Fig. 8 is the structural schematic diagram at another visual angle of the detection device of substrate provided in this embodiment.As shown in figure 8, being
Easy to carry, handling substrate 200 by way of absorption of carrying mechanism 3, carrying mechanism 3 is located at temporary microscope carrier 21, detection carries
The top of platform 15, carrying mechanism 3 can move up and down, and can grab substrate 200 after decline, can be in straight line after being promoted
Substrate 200 is transported under the driving effect of mould group in a second direction.Specifically, the elevating movement of carrying mechanism 3 can pass through straight line
The driving of mould group.
As shown in Figure 1, carrying mechanism 3 includes, pan feeding carries arm component 33, arm component 32 is carried in transfer and discharging handling arm
Component 31.Pan feeding carries arm component 33, arm component 32 is carried in transfer and arm component 31 is carried in discharging can transport in a second direction
It is dynamic, and handling substrate 200 by way of absorption.Carrying mechanism 3 further includes gantry component 34, and gantry component 34 can pass through
Column (not shown) is connect with bracket 6, and is located at the top of bracket 6.Pan feeding carries arm component 33, arm component is carried in transfer
32, which carry arm component 31 with discharging, is slidably disposed on gantry component 34.Pan feeding carries arm component 33 to by substrate 200
It is placed in detection microscope carrier 15 or temporary microscope carrier 21.
Detection device further includes transfer microscope carrier 4.Transfer microscope carrier 4 is set to the side of temporary microscope carrier 21, it is preferable that temporary to carry
Platform 21 and transfer microscope carrier 4 are set gradually along first direction.
Detection device further includes label-sticking mechanism 5, and label-sticking mechanism 5 is used to label for the substrate 200 on transfer microscope carrier 4.Example
Property, the substrate 200 in temporary microscope carrier 21 transfer to transfer microscope carrier 4 can be attached A grades of marks by label-sticking mechanism 5, will test mechanism 1
Substrate 200 in transfer to transfer microscope carrier 4 attaches B, C or D grades of marks.Specifically, label-sticking mechanism 5 is set to the one of detection microscope carrier 15
Side, detection microscope carrier 15 are set gradually in a second direction with label-sticking mechanism 5.Detection device has labeling position and out material position, middle reprinting
Platform 4 is set as to move back and forth in labeling position and out between material position, so as to be labelled for the substrate 200 on transfer microscope carrier 4, and
Substrate 200 after labeling is moved away from into detection device.
Transfer is carried arm component 32 and can be moved back and forth between temporary microscope carrier 21 and transfer microscope carrier 4, and by temporary microscope carrier
21 and the detection microscope carrier 15 at temporary position on substrate 200 be placed on transfer microscope carrier 4.Arm component 31 is carried in discharging can
Substrate 200 after labeling on transfer microscope carrier 4 is moved away from into detection device.
In the present embodiment, it is connect in order to facilitate detection device with upstream device, arm component 32 is carried in transfer and discharging is removed
Fortune arm component 31 is set gradually along first direction, labels position and material position is arranged along first direction interval out, transfer microscope carrier 4 being capable of edge
First direction moves back and forth between material position in labeling position and out, and to be located at, the underface of arm component 32 is carried in transfer and discharging is carried
The underface of arm component 31.
The course of work of detection device provided in this embodiment is as follows:
Pan feeding carries the substrate 200 that arm component 33 adsorbs upstream supplied materials, if substrate 200 is not required to detect, keeps in 21 liters of microscope carrier
To temporary position, pan feeding carries arm component 33 and substrate 200 is placed on temporary microscope carrier 21.Transfer carries arm component 32 for temporary load
Substrate 200 on platform 21 is carried to transfer microscope carrier 4, and labelling machine is 4 edge of transfer microscope carrier after the substrate 200 on transfer microscope carrier 4 labels
First direction moves to the underface that arm component 31 is carried in discharging, and discharging carries arm component 31 for the substrate 200 on transfer microscope carrier 4
Move away from detection device.
If the substrate 200 of upstream supplied materials is rejected product, temporary microscope carrier 21 is down to evacuation position, detects microscope carrier 15 along first
Direction moves to temporary position, and pan feeding carries arm component 33 and substrate 200 is placed on detection microscope carrier 15.Microscope carrier 15 is detected along first
To check bit, microscope carrier overturns driving detection microscope carrier 15 overturning of driving assembly 12 to the second position for the counter motion in direction, manually examines
Survey the first face of substrate 200.Microscope carrier overturns driving detection microscope carrier 15 overturning of driving assembly 12 to first position, overturns arm component 11
First face of sorbing substrate 200, and substrate 200 is promoted, arm overturn driving assembly 113 and overturn flip-arm microscope carrier 112 to the
It is detected four positions.Counter motion of the microscope carrier 15 along first direction is detected to temporary position, transfer is carried arm component 32 and be will test
Substrate 200 on microscope carrier 15 is carried to transfer microscope carrier 4, is labelled and is discharged.
Obviously, the above embodiments of the present invention is used for the purpose of clearly illustrating examples for clearly illustrating the present invention, and
It is not limitations of the embodiments of the present invention.For those of ordinary skill in the art, in above description
On the basis of can also make other variations or changes in different ways.There is no need and unable to give all embodiments
Exhaustion.Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention etc., should be included in
Within the protection scope of the utility model claims.
Claims (10)
1. a kind of detection device of substrate, for detecting substrate (200), including bracket (6), which is characterized in that further include:
Temporary microscope carrier (21), are set on the bracket (6), for keeping in the substrate (200)；
Testing agency (1), including detection microscope carrier (15), the detection microscope carrier (15) are set on the bracket (6), for described
The detection substrate of substrate (200)；
Carrying mechanism (3) is set on the bracket (6), and the substrate (200) can be carried to the temporary microscope carrier (21)
On the detection microscope carrier (15).
2. the detection device of substrate according to claim 1, which is characterized in that the temporary microscope carrier (21) or the detection
Microscope carrier (15) can move back and forth between position and check bit temporary, and the temporary microscope carrier (21) or the detection microscope carrier (15) can
It is set on the bracket (6) up and down mutually to avoid.
3. the detection device of substrate according to claim 1, which is characterized in that be additionally provided with microscope carrier on the bracket (6)
It overturns driving assembly (12), microscope carrier overturning driving assembly (12) connect with the detection microscope carrier (15), described for driving
Detect microscope carrier (15) overturning.
4. the detection device of substrate according to claim 1, which is characterized in that the testing agency (1) further includes that can rise
It drops and the turnover overturning arm component (11) being set on the bracket (6), the overturning arm component (11) is located at the inspection
The top for surveying microscope carrier (15) is respectively used to opposite the first face and second of the substrate (200) with detection microscope carrier (15)
The detection in face.
5. the detection device of substrate according to claim 1, which is characterized in that the side of the temporary microscope carrier (21) is also set
It is equipped with transfer microscope carrier (4)；
The carrying mechanism (3) includes that arm component (32) are carried in transfer, and arm component (32) are carried in the transfer can be described temporary
It deposits and is moved back and forth between microscope carrier (21) and the transfer microscope carrier (4).
6. the detection device of substrate according to claim 5, which is characterized in that the detection device further includes label-sticking mechanism
(5) and there is labeling position and out material position, the transfer microscope carrier (4) is set as can be past between the labeling position and the material position out
It is multiple mobile.
7. the detection device of substrate according to claim 5, which is characterized in that the carrying mechanism (3) includes that discharging is removed
It transports arm component (31), the discharging carries arm component (31) and can move away from the substrate (200) on the transfer microscope carrier (4)
The detection device.
8. the detection device of substrate according to claim 6, which is characterized in that the carrying mechanism (3) includes that pan feeding is removed
Transport arm component (33), the pan feeding carry arm component (33) to by the substrate (200) be placed in the detection microscope carrier (15) or
The temporary microscope carrier (21).
9. the detection device of substrate according to claim 7, which is characterized in that the carrying mechanism (3) further includes gantry
Arm component (32) are carried in component (34) transfer and the discharging carries arm component (31) and is slidably disposed in described gantry
On component (34).
10. the detection device of substrate described in -9 any one according to claim 1, which is characterized in that the temporary microscope carrier
(21) two sides are respectively arranged with the testing agency (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822215198.1U CN209550006U (en) | 2018-12-27 | 2018-12-27 | A kind of detection device of substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822215198.1U CN209550006U (en) | 2018-12-27 | 2018-12-27 | A kind of detection device of substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209550006U true CN209550006U (en) | 2019-10-29 |
Family
ID=68303928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822215198.1U Active CN209550006U (en) | 2018-12-27 | 2018-12-27 | A kind of detection device of substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209550006U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109513622A (en) * | 2018-12-27 | 2019-03-26 | 苏州精濑光电有限公司 | A kind of detection device of substrate |
-
2018
- 2018-12-27 CN CN201822215198.1U patent/CN209550006U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109513622A (en) * | 2018-12-27 | 2019-03-26 | 苏州精濑光电有限公司 | A kind of detection device of substrate |
| CN109513622B (en) * | 2018-12-27 | 2024-04-16 | 苏州精濑光电有限公司 | Detection equipment of base plate |
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