CN109530244A - A kind of detection method of substrate - Google Patents

A kind of detection method of substrate Download PDF

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Publication number
CN109530244A
CN109530244A CN201811610474.2A CN201811610474A CN109530244A CN 109530244 A CN109530244 A CN 109530244A CN 201811610474 A CN201811610474 A CN 201811610474A CN 109530244 A CN109530244 A CN 109530244A
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CN
China
Prior art keywords
substrate
detection
microscope carrier
temporary
arm component
Prior art date
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Granted
Application number
CN201811610474.2A
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Chinese (zh)
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CN109530244B (en
Inventor
贺建腾
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Suzhou Hirose Opto Co Ltd
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Suzhou Hirose Opto Co Ltd
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Priority to CN201811610474.2A priority Critical patent/CN109530244B/en
Publication of CN109530244A publication Critical patent/CN109530244A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C2501/00Sorting according to a characteristic or feature of the articles or material to be sorted
    • B07C2501/0063Using robots

Abstract

The present invention relates to substrate detection technique fields, specifically disclose a kind of detection method of substrate.The detection method of substrate is used for the detection or transmission of substrate, and detection method includes: step 1: providing a kind of detection device of substrate, detection device includes temporary microscope carrier and the testing agency being set on bracket;Step 2: placing substrate in testing agency or temporary microscope carrier;Step 3: if substrate is located on temporary microscope carrier, entering step 4;If substrate is located at testing agency, substrate is detected, and unloads in the substrate self-test mechanism that will test;Step 4: substrate is unloaded from temporary microscope carrier.Substrate is placed on temporary microscope carrier by detection device, then substrate is classified to qualified product.The detection method of substrate provided by the invention can be achieved at the same time the classification and detection of substrate, improve the production efficiency of substrate.

Description

A kind of detection method of substrate
Technical field
The present invention relates to substrate detection technique field more particularly to a kind of detection methods of substrate.
Background technique
All kinds of substrates, such as liquid crystal display panel, OLED (Organic Light-Emitting Display) panel, touch surface Plate, glass substrate etc. are needed before factory by manually being detected again to its surface, to ensure substrate as qualified product.
Due to upstream complete substrate it is not absolutely required to all detect again, may for sampling observation part non-defective unit and all not Non-defective unit is detected, or only detects defective products, and existing detection method, which is often only able to achieve to have screened, to be needed to examine again The detection of the substrate of survey, the substrate that cannot directly complete to upstream carry out screening and determine the object for needing to detect again, this will It asks and substrate is classified first, then substrate is detected again, cause production efficiency lower.
Summary of the invention
The purpose of the present invention is to provide a kind of detection methods of substrate, can be achieved at the same time the classification and inspection of substrate It surveys, improves the production efficiency of substrate.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of detection method of substrate, for the detection or transmission of substrate, the detection method includes:
Step 1: a kind of detection device of substrate is provided, the detection device include the temporary microscope carrier that is set on bracket with Testing agency;
Step 2: placing the substrate in the testing agency or the temporary microscope carrier;
Step 3: if the substrate is located on the temporary microscope carrier, entering step 4;If the substrate is located at the detection Mechanism then detects the substrate, and the substrate that will test is unloaded from the testing agency;
Step 4: the substrate is unloaded from the temporary microscope carrier.
Preferably, the detection device further includes carrying mechanism, the carrying mechanism is arranged on the bracket, and is wrapped It includes pan feeding and carries arm component;The step 2 includes: that the driving pan feeding carries the arm component placement substrate in the detection machine On structure or the temporary microscope carrier.
Preferably, the carrying mechanism further includes that arm component is carried in transfer;The step 4 includes: the driving transfer Carrying arm component unloads the substrate from the temporary microscope carrier or the step 3 includes driving the transfer handling arm group Part unloads the substrate from the testing agency.
Preferably, the detection device further includes transfer microscope carrier, the detection method further includes step 5: described in driving Transfer carries arm component and carries the substrate to the transfer microscope carrier.
Preferably, the detection device further includes label-sticking mechanism, the detection method further includes step 6: in described The substrate reprinted on platform is labelled.
Preferably, the carrying mechanism further includes that arm component is carried in discharging, the detection method further includes step 7: being driven The discharging carrying arm component is moved to unload the substrate for completing labeling from the transfer microscope carrier.
Preferably, the transfer microscope carrier can be moved back and forth in labeling position and out between material position;The step 7 includes:
Step 71: the transfer microscope carrier being driven to be moved to the material position out from the labeling position;
Step 72: the driving discharging carries arm component and unloads the substrate for completing labeling from the transfer microscope carrier It carries.
Preferably, the testing agency includes overturning arm component and detection microscope carrier, the step 2 includes placing the base The detection microscope carrier or the temporary microscope carrier of the plate in the testing agency.
Preferably, carrying out detection to the substrate includes: in the step 3
Step 31: overturning the detection microscope carrier, detect the first face of the substrate;
Step 32: the driving overturning arm component grabs the substrate;
Step 33: the driving overturning arm component overturning detects the second face of the substrate;Wherein, first face with Second face is opposite.
Preferably, there is the detection device the temporary microscope carrier and the detection microscope carrier to accept the temporary of the substrate Position and the detection microscope carrier detect the check bit of the substrate, the detection microscope carrier can the temporary position and the check bit it Between move back and forth;The substrate, which is placed, in the detection microscope carrier includes:
Step 21: the driving detection microscope carrier is moved to the temporary position;
Step 22: placing the substrate on the detection microscope carrier;
Step 23: the driving detection microscope carrier is moved to the check bit.
Beneficial effects of the present invention: substrate is placed on temporary microscope carrier by detection device, then substrate is classified to qualified product; If substrate is located at testing agency, substrate is classified to rejected product, then detects to the substrate for being located at testing agency, with Just substrate is further classified, is finally unloaded substrate on temporary microscope carrier or testing agency, to realize simultaneously The classification and detection of substrate, improve the production efficiency of substrate.
Detailed description of the invention
Fig. 1 is the top view of the detection device for the substrate that the embodiment of the present invention one provides;
Fig. 2 is the structural schematic diagram that temporary microscope carrier, the telescopic rod that the embodiment of the present invention one provides are connected with lifting actuator;
Fig. 3 is the structural schematic diagram for the testing agency that the embodiment of the present invention one provides;
Fig. 4 is the partial enlarged view in Fig. 3 at A;
Fig. 5 is the structural schematic diagram that the overturning detection components that the embodiment of the present invention one provides are set on bracket;
Fig. 6 is the structural schematic diagram at another visual angle for the testing agency that the embodiment of the present invention one provides;
Fig. 7 is the partial enlarged view in Fig. 6 at B;
Fig. 8 is the structural schematic diagram of the detection device for the substrate that the embodiment of the present invention one provides.
In figure:
1, testing agency;11, arm component is overturn;111, arm movable stand;112, flip-arm microscope carrier;113, arm overturns driving group Part;1131, the second rotary drive;1132, connecting plate;12, microscope carrier overturns driving assembly;121, the first rotary drive; 122, driving gear;123, driven gear;124, driven shaft;13, microscope carrier overturns detection components;131, first flap;132, One photoelectric sensor;14, arm overturns detection components;141, second flap;142, the second photoelectric sensor;15, microscope carrier is detected; 16, microscope carrier movable stand;
21, microscope carrier is kept in;22, actuator is gone up and down;23, telescopic rod;
3, carrying mechanism;31, arm component is carried in discharging;32, arm component is carried in transfer;33, pan feeding carries arm component;34, Gantry component;
4, transfer microscope carrier;5, label-sticking mechanism;6, bracket;7, suction nozzle;200, substrate.
Specific embodiment
To further illustrate the technical scheme of the present invention below with reference to the accompanying drawings and specific embodiments.It is understood that It is that specific embodiment described herein is used only for explaining the present invention rather than limiting the invention.It further needs exist for illustrating , only the parts related to the present invention are shown for ease of description, in attached drawing and it is not all.
Embodiment one
In the description of the present invention unless specifically defined or limited otherwise, term " being connected ", " connection " should do broad sense Understand, for example, it may be being fixedly connected, may be a detachable connection, or is integral;It can be directly connected, can also lead to It crosses intermediary to be indirectly connected, can be the connection inside two elements or the interaction relationship of two elements.Term " is set Set ", " being set to " shall be understood in a broad sense, for example, it may be directly be arranged, can also be arranged indirectly by intermediary.For For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
The detection device for present embodiments providing a kind of substrate is mainly used in the detection of substrate 200, so that detection device The substrate 200 for needing the substrate 200 detected and not needing detection can be carried simultaneously, and realizes the classification of substrate 200 simultaneously, mentioned High efficiency.
Fig. 1 is the top view of the detection device of substrate provided in this embodiment, as shown in Figure 1, base provided in this embodiment The detection device of plate includes bracket 6, temporary microscope carrier 21, carrying mechanism 3 and testing agency 1.
Testing agency 1 includes detection microscope carrier 15.Detection microscope carrier 15 is set on bracket 6, the detection for substrate 200.Tool Body, detection microscope carrier 15 are set to horizontally moveablely on bracket 6, can along first direction can splicing temporary position and substrate It is moved back and forth between 200 detected check bits.Detection microscope carrier 15 can also be overturn, and testing staff can be to the first of substrate 200 The detection of face progress multi-angle.
Temporary microscope carrier 21 is set on bracket 6, for keeping in substrate 200.
Carrying mechanism 3 is set on bracket 6, can be carried to substrate 200 on temporary microscope carrier 21 and detection microscope carrier 15.? In the present embodiment, the substrate 200 on temporary microscope carrier 21 and detection microscope carrier 15 can also be moved out detection device by carrying mechanism 3.
As shown in Figure 1, providing in the present embodiment, first direction is direction shown in arrow W, and second direction is arrow H Shown in direction, first direction is vertical with second direction.
After upstream equipment detects substrate 200, carrying mechanism 3 will need the substrate 200 detected to be placed in testing agency 1 It detects on microscope carrier 15, substrate 200 is detected and is classified;The substrate 200 for not needing detection is placed in temporary microscope carrier 21 On, so that detection device can either receive the substrate 200 for needing to detect, the substrate 200 for not needing detection can be also received, And simultaneously in detection device completing substrate 200 classification, first the substrate of discharging 200 is classified without upstream equipment, is improved Production efficiency.
Detection microscope carrier 15 be set on bracket 6 horizontally moveablely so that detection microscope carrier 15 be moved horizontally to it is temporary Substrate 200 is placed on detection microscope carrier 15 by position, carrying mechanism 3, and detection microscope carrier 15 is reversely moved horizontally to check bit, and work people Member can detect substrate 200.On the one hand, in detection process, detection microscope carrier 15 will not influence carrying mechanism 3 and temporary load The work of platform 21 ensure that the working efficiency of detection device;On the other hand, when artificial detection to substrate 200 is qualified product, inspection Temporary position can be moved again to by surveying microscope carrier 15, and carrying mechanism 3 moves out substrate 200, and qualified substrate 200 will not leave automatically Production line avoids qualified substrate 200 contaminated.
In other embodiments, detection microscope carrier 15 can be carried with that need not move back and forth along first direction by temporary Platform 21 moves back and forth between position and check bit along first direction temporary;Or in other embodiments, carrying mechanism 3 is along first party It is moved back and forth between position and check bit to temporary, substrate 200 is placed on detection microscope carrier 15.
In the present embodiment, detection microscope carrier 15 is set on Working rack 6 by straight line mould group, and straight line mould group can be gas Cylinder or motor, screw rod and nut three cooperate driving mechanism.
Carrying mechanism 3 is used to adsorb the substrate 200 after detection, and substrate 200 is placed in temporary microscope carrier 21 or detection microscope carrier On 15, since substrate 200 is placed on temporary microscope carrier 21 or detection microscope carrier 15 by carrying mechanism 3 in same position, in order to It is placed in carrying mechanism 3 can not only by substrate 200 on temporary microscope carrier 21, but also substrate 200 can be placed in detection microscope carrier 15 On, as shown in Fig. 2, temporary microscope carrier 21 is liftably set on bracket 6, the temporary decline of microscope carrier 21 is to avoid detection microscope carrier 15. In other embodiments, it can also be that detection microscope carrier 15 is liftably set on bracket 6, detection microscope carrier 15 rises to avoid temporarily Deposit microscope carrier 21.
Specifically, it keeps on microscope carrier 21 and is connected with multiple telescopic rods 23 being vertically arranged, telescopic rod 23 is connected to bracket 6. Lifting actuator 22 is additionally provided on bracket 6, the output end of lifting actuator 22 is connect with temporary microscope carrier 21, and for driving temporarily The length direction that microscope carrier 21 is deposited along telescopic rod 23 is gone up and down.Going up and down actuator 22 can be cylinder.
In order to improve the efficiency of detection, the two sides of temporary microscope carrier 21 are respectively arranged with testing agency 1.Specifically, two groups of inspections It surveys mechanism 1 to be arranged along first direction interval, Liang Zu testing agency 1 is located at the opposite sides of temporary microscope carrier 21, wherein an inspection The check bit for surveying microscope carrier 15 is located at the side of temporary microscope carrier 21, and the check bit of another detection microscope carrier 15 is located at the another of temporary microscope carrier 21 Side, so that detection device can detecte substrate 200 along the two sides of first direction.
Fig. 3 is the structural schematic diagram of testing agency provided in this embodiment.As shown in figure 3, testing agency 1 further includes overturning Arm component 11.Overturn the top that arm component 11 is located at detection microscope carrier 15, inspection of the overturning arm component 11 for the first face of substrate 200 It surveys, detection of the detection microscope carrier 15 for the second face of substrate 200, the first face is opposite with the second face.
Arm component 11 is liftable is set on bracket 6 for overturning, and overturning arm component 11 declines, and can grab and be located at detection and carry Substrate 200 on platform 15, overturning arm component 11 rise, can promote substrate 200.
When substrate 200 is placed on detection microscope carrier 15, the first face of substrate 200 is detection faces, is turned over when substrate 200 is located at When on tumbler assembly 11, the second face is detection faces.
When substrate 200 is placed on detection microscope carrier 15, overturning arm component 11 rises to higher position, substrate 200 First face will not be detected microscope carrier 15 and overturning arm component 11 blocks, and staff can detect the first face at this time.The After detecting on one side, overturning arm component 11 is moved downward, and grabs substrate 200, and substrate 200 is made to be transferred to overturning arm component 11 On.Due to overturning handling substrate 200 from top to bottom of arm component 11, the first face of substrate 200 is reversed the screening of arm component 11 Gear, meanwhile, and overturn after being promoted substrate 200 to higher height due to overturning arm component 11, the second of substrate 200 Facing towards staff, staff can be detected the second face.Testing agency 1 provided in this embodiment may not necessarily be right Substrate 200 carries out 180 ° and overturns the detection that 200 upper and lower surface of substrate can be realized, and effectively increases detection efficiency, avoids substrate 200 surfaces are contaminated.
In the present embodiment, it overturns and is provided with the absorbent module for capableing of sorbing substrate 200 on arm component 11, absorbent module is inhaled First face of attached substrate 200 enables substrate 200 to be carried up and down.Specifically, absorbent module can be multiple spaced Suction nozzle 7 and the vacuum pump being connected to suction nozzle 7.
Since detection microscope carrier 15 is horizontally disposed under normal circumstances, and the size of substrate 200 is larger, therefore, work Personnel are when detecting substrate 200, it is difficult to and it is relatively clear comprehensively to observe substrate 200, it causes testing result inaccurate, passes through detection The overturning of microscope carrier 15 can make testing staff more clear and check entire substrate 200 from different angles.Therefore, in order to realize The overturning of microscope carrier 15 is detected, microscope carrier overturning driving assembly 12 is additionally provided on bracket 6, microscope carrier overturns driving assembly 12 and detection carries Platform 15 connects, and for driving detection microscope carrier 15 to overturn, so that detection microscope carrier 15 is horizontal by 0 ° to 90 ° angle.
Microscope carrier overturning driving assembly 12 can drive detection microscope carrier 15 to be located at the first position before detection and the when detection Two positions.Wherein, detection 15 splicing of microscope carrier for convenience, first position can be the position that detection microscope carrier 15 is in horizontal plane, That is detection microscope carrier 15 is horizontal by 0 ° of angle;In order to facilitate staff's detection, the second position be can be at detection microscope carrier 15 In the position of vertical plane, i.e. detection microscope carrier 15 is horizontal by 90 ° of angles, or the position with vertical plane setting at an acute angle, such as should Acute angle is preferably 5 ° -20 °.
In order to avoid substrate 200 falls during detecting microscope carrier 15 and overturning, detects and be provided with and can inhale on microscope carrier 15 The absorbent module of attached substrate 200.
Detection microscope carrier 15 is connected in straight line mould group by microscope carrier movable stand 16.
Fig. 4 is the partial enlarged view in Fig. 3 at A.As shown in figure 4, microscope carrier overturning driving assembly 12 includes that the first rotation is driven Moving part 121, driving gear 122, driven gear 123 and driven shaft 124.First rotary drive 121 passes through microscope carrier movable stand 16 It is set on bracket 6, the output end and driving gear 122 of the first rotary drive 121 are sequentially connected, to drive driving gear 122 rotations.Driven gear 123 is rotatably dispose on microscope carrier movable stand 16, and is engaged with driving gear 122, driven shaft 124 with from Moving gear 123 is sequentially connected, and then realizes the rotation of driven shaft 124.Detection microscope carrier 15 is fixedly connected with driven shaft 124, driven Axis 124 drives detection microscope carrier 15 to realize overturning.In the present embodiment, the first rotary drive 121 can be servo motor.
Fig. 5 is that overturning detection components provided in this embodiment are set to the structural schematic diagram on bracket.As shown in figure 5, branch Microscope carrier overturning detection components 13 are additionally provided on frame 6, microscope carrier overturning detection components 13 are for detecting whether detection microscope carrier 15 overturns To first position or the second position.
Preferably, microscope carrier overturning detection components 13 include first flap 131 and two the first photoelectric sensors 132.Two The line of first photoelectric sensor 132 and the rotation center of first flap 131 is set on microscope carrier movable stand 16 in 90 ° of angles, First flap 131 is connected to the output end of the first rotary drive 121, during first flap 131 is rotated with output end It is inserted between the transmitting terminal and receiving end of the first photoelectric sensor 132, the first photoelectric sensor 132 can be detected inspection It surveys microscope carrier 15 and is located at first position or the second position.
Fig. 6 is the structural schematic diagram at another visual angle of testing agency provided in this embodiment, and Fig. 7 is the part at the B of Fig. 6 Enlarged drawing.As shown in fig. 7, overturning arm component 11 includes arm movable stand 111, arm overturning driving assembly 113 and flip-arm microscope carrier 112。
Arm movable stand 111 is liftable to be set on bracket 6.Specifically, straight line mould group, straight line mould are provided on bracket 6 Group is drivingly connected with arm movable stand 111, is pumped with actuating arm movable stand 111.Arm overturning driving assembly 113 is set to On arm movable stand 111.Flip-arm microscope carrier 112 is connected to the mobile bracket 6 of flip-arm by the way that arm overturning driving assembly 113 is turnover On.
Specifically, arm overturning driving assembly 113 includes the second rotary drive 1131 and connecting plate 1132.Second rotation is driven Moving part 1131 is set on arm movable stand 111.Second rotary drive 1131 can be servo motor.Connecting plate 1132 and second The output end of rotary drive 1131 is sequentially connected, and is fixedly connected with flip-arm microscope carrier 112, so that the second rotation driving Part 1131 drives flip-arm microscope carrier 112 to overturn.
When arm overturning driving assembly 113 can drive flip-arm microscope carrier 112 to be located at the third place and detection before detecting 4th position.It is easy to adsorb the substrate 200 detected on microscope carrier 15 to make to overturn arm component 11, the third place is flip-arm microscope carrier 112 are in the position of horizontal plane, i.e., flip-arm microscope carrier 112 is horizontal by 0 ° of angle.And in order to make staff be easy to detect Second face of substrate 200, the 4th position are the position that flip-arm microscope carrier 112 is in vertical plane, i.e. flip-arm microscope carrier 112 and level Face is in 90 ° of angles, and certain flip-arm microscope carrier 112 can also be with vertical plane setting at an acute angle.
Arm overturning detection components 14 are additionally provided on bracket 6, arm overturning detection components 14 are for detecting flip-arm microscope carrier 112 Whether overturn to the third place or the 4th position.
Preferably, arm overturning detection components 14 include second flap 141 and two the second photoelectric sensors 142.Two The line of two photoelectric sensors 142 and the rotation center of second flap 141 is set on arm movable stand 111 in 90 ° of angles, and second Baffle 141 is connected on connecting plate 1132, is inserted into during second flap 141 is rotated with connecting plate 1132 to second Between the transmitting terminal and receiving end of photoelectric sensor 142, at this point, the second photoelectric sensor 142 detects that detection microscope carrier 15 is located at The third place or the 4th position.
It is understood that angle between two the first photoelectric sensors 132 and two the second photoelectric sensors 142 it Between angle it is consistent with the flip angle of temporary microscope carrier 21 and flip-arm microscope carrier 112, and between two the first photoelectric sensors 132 Angle and two the second photoelectric sensors 142 between angle it is adjustable.
Fig. 8 is the structural schematic diagram at another visual angle of the detection device of substrate provided in this embodiment.As shown in figure 8, being Easy to carry, handling substrate 200 by way of absorption of carrying mechanism 3, carrying mechanism 3 is located at temporary microscope carrier 21, detection carries The top of platform 15, carrying mechanism 3 can move up and down, and can grab substrate 200 after decline, can be in straight line after being promoted Substrate 200 is transported under the driving effect of mould group in a second direction.Specifically, the elevating movement of carrying mechanism 3 can pass through straight line The driving of mould group.
As shown in Figure 1, carrying mechanism 3 includes, pan feeding carries arm component 33, arm component 32 is carried in transfer and discharging handling arm Component 31.Pan feeding carries arm component 33, arm component 32 is carried in transfer and arm component 31 is carried in discharging can transport in a second direction It is dynamic, and handling substrate 200 by way of absorption.Carrying mechanism 3 further includes gantry component 34, and gantry component 34 can pass through Column (not shown) is connect with bracket 6, and is located at the top of bracket 6.Pan feeding carries arm component 33, arm component is carried in transfer 32, which carry arm component 31 with discharging, is slidably disposed on gantry component 34.Pan feeding carries arm component 33 to by substrate 200 It is placed in detection microscope carrier 15 or temporary microscope carrier 21.
Detection device further includes transfer microscope carrier 4.Transfer microscope carrier 4 is set to the side of temporary microscope carrier 21, it is preferable that temporary to carry Platform 21 and transfer microscope carrier 4 are set gradually along first direction.
Detection device further includes label-sticking mechanism 5, and label-sticking mechanism 5 is used to label for the substrate 200 on transfer microscope carrier 4.Example Property, the substrate 200 in temporary microscope carrier 21 transfer to transfer microscope carrier 4 can be attached A grades of marks by label-sticking mechanism 5, will test mechanism 1 Substrate 200 in transfer to transfer microscope carrier 4 attaches B, C or D grades of marks.Specifically, label-sticking mechanism 5 is set to the one of detection microscope carrier 15 Side, detection microscope carrier 15 are set gradually in a second direction with label-sticking mechanism 5.Detection device has labeling position and out material position, middle reprinting Platform 4 is set as to move back and forth in labeling position and out between material position, so as to be labelled for the substrate 200 on transfer microscope carrier 4, and Substrate 200 after labeling is moved away from into detection device.
Transfer is carried arm component 32 and can be moved back and forth between temporary microscope carrier 21 and transfer microscope carrier 4, and by temporary microscope carrier 21 and the detection microscope carrier 15 at temporary position on substrate 200 be placed on transfer microscope carrier 4.Arm component 31 is carried in discharging can Substrate 200 after labeling on transfer microscope carrier 4 is moved away from into detection device.
In the present embodiment, it is connect in order to facilitate detection device with upstream device, arm component 32 is carried in transfer and discharging is removed Fortune arm component 31 is set gradually along first direction, labels position and material position is arranged along first direction interval out, transfer microscope carrier 4 being capable of edge First direction moves back and forth between material position in labeling position and out, and to be located at, the underface of arm component 32 is carried in transfer and discharging is carried The underface of arm component 31.
The course of work of detection device provided in this embodiment is as follows:
Pan feeding carries the substrate 200 that arm component 33 adsorbs upstream supplied materials, if substrate 200 is not required to detect, keeps in 21 liters of microscope carrier To temporary position, pan feeding carries arm component 33 and substrate 200 is placed on temporary microscope carrier 21.Transfer carries arm component 32 for temporary load Substrate 200 on platform 21 is carried to transfer microscope carrier 4, and labelling machine is 4 edge of transfer microscope carrier after the substrate 200 on transfer microscope carrier 4 labels First direction moves to the underface that arm component 31 is carried in discharging, and discharging carries arm component 31 for the substrate 200 on transfer microscope carrier 4 Move away from detection device.
If the substrate 200 of upstream supplied materials is rejected product, temporary microscope carrier 21 is down to evacuation position, detects microscope carrier 15 along first Direction moves to temporary position, and pan feeding carries arm component 33 and substrate 200 is placed on detection microscope carrier 15.Microscope carrier 15 is detected along first To check bit, microscope carrier overturns driving detection microscope carrier 15 overturning of driving assembly 12 to the second position for the counter motion in direction, manually examines Survey the first face of substrate 200.Microscope carrier overturns driving detection microscope carrier 15 overturning of driving assembly 12 to first position, overturns arm component 11 First face of sorbing substrate 200, and substrate 200 is promoted, arm overturn driving assembly 113 and overturn flip-arm microscope carrier 112 to the It is detected four positions.Counter motion of the microscope carrier 15 along first direction is detected to temporary position, transfer is carried arm component 32 and be will test Substrate 200 on microscope carrier 15 is carried to transfer microscope carrier 4, is labelled and is discharged.
Embodiment two
The detection method for present embodiments providing a kind of substrate is mainly used for the detection or transmission of substrate 200.The detection side Method can be used in the detection device of the substrate of embodiment one kind, but not limited to this, can be also used for other can be realized this reality In the detection device for applying the detection method of example offer, this method can be achieved at the same time the classification and detection of substrate 200, improve base The production efficiency of plate 200.
The detection method of substrate 200 provided in this embodiment includes:
Step 1: providing a kind of detection device of substrate 200, the detection device includes the temporary load being set on bracket 6 Platform 21 and testing agency 1;
Step 2: placing the substrate 200 in the testing agency 1 or the temporary microscope carrier 21;
Step 3: if the substrate 200 is located on the temporary microscope carrier 21, entering step 4;If the substrate 200 is located at The substrate 200 that the testing agency 1 then detects the substrate 200, and will test is from the testing agency 1 Upper unloading;
Step 4: the substrate 200 is unloaded from the temporary microscope carrier 21.
Illustratively, substrate 200 is placed on temporary microscope carrier 21 by detection device, then substrate 200 is classified to A grades of product. If the substrate 200 is located at the testing agency 1, substrate 200 is classified to the product of other grades, then manually to being located at The substrate 200 of the testing agency 1 is detected, to be further classified to substrate 200, finally by substrate 200 in It is unloaded in temporary microscope carrier 21 or testing agency 1, to realize the classification and detection of substrate 200 simultaneously, improves substrate 200 Production efficiency.
The detection device further includes carrying mechanism 3, and the carrying mechanism 3 is set on the bracket 6, and including pan feeding Carry arm component 33.The step 2 includes: that the driving pan feeding carrying arm component 33 places the substrate 200 in the detection On microscope carrier 15 or the temporary microscope carrier 21.
The testing agency 1 includes overturning arm component 11 and detection microscope carrier 15.Specifically, the step 2 includes placing institute State the detection microscope carrier 15 or the temporary microscope carrier 21 of the substrate 200 in the testing agency 1.
There is the detection device the temporary microscope carrier 21 and the detection microscope carrier 15 to accept the temporary position of the substrate 200 The check bit of the substrate 200 is detected with the detection microscope carrier 15, the detection microscope carrier 15 can be in the temporary position and the inspection It is moved back and forth between location.
The substrate 200, which is placed, in the detection microscope carrier 15 includes:
Step 21: the driving detection microscope carrier 15 is moved to the temporary position;
Step 22: placing the substrate 200 on the detection microscope carrier 15;
Step 23: the driving detection microscope carrier 15 is moved to the check bit.
In the step 3, carrying out detection to the substrate 200 includes:
Step 31: the overturning detection microscope carrier 15 detects the first face of the substrate 200.Overturn the detection microscope carrier 15 To make substrate 200 be located at suitable angle, the first face of substrate 200 is detected convenient for staff.
Step 32: the driving overturning arm component 11 grabs the substrate 200, so that the load of substrate 200 is being overturn On arm component 11, so that the second face of substrate 200 is not blocked, it can be detected.Wherein, first face and second face Relatively.
Step 33: the driving overturning arm component 11 is overturn, and detects the second face of the substrate 200.Drive the overturning Arm component 11 is overturn, so that substrate 200 is in suitable angle, the second face of substrate 200 is detected convenient for staff.
The carrying mechanism 3 further includes that arm component 32 is carried in transfer.The step 4 includes: the driving transfer handling arm Component 32 unloads the substrate 200 from the temporary microscope carrier 21;Or the substrate 200 that will test in the step 3 It is unloaded from the testing agency 1, including the driving transfer carries arm component 32 for the substrate 200 from the testing agency It is unloaded on 1.Specifically, driving the transfer to carry arm component 32 will unload on the 200 self-test microscope carrier 15 of substrate.
Driving the transfer to carry arm component 32 will further include walking as follows before unloading on the 200 self-test microscope carrier 15 of substrate Rapid: detection microscope carrier 15 is moved to temporary position by check bit.
The detection device further includes transfer microscope carrier 4, and the detection method further includes step 5: the transfer being driven to carry Arm component 32 carries the substrate 200 to the transfer microscope carrier 4.
Specifically, when substrate 200 is located at temporary microscope carrier 21, transfer carries arm component 32 and carries the institute kept on microscope carrier 21 Substrate 200 is stated to the transfer microscope carrier 4;When substrate 200 is located at detection microscope carrier 15, detection microscope carrier 15 is moved to temporarily by check bit Position is deposited, then transfer carries the substrate 200 on the carrying detection microscope carrier 15 of arm component 32 to the transfer microscope carrier 4.
The detection device further includes label-sticking mechanism 5, and the detection method further includes step 6: on the transfer microscope carrier 4 The substrate 200 labelled, by classification complete substrate 200 attach corresponding label.
The carrying mechanism 3 further includes that arm component 31 is carried in discharging, and the detection method further includes step 7: described in driving Discharging carries arm component 31 and unloads the substrate 200 for completing labeling from the transfer microscope carrier 4.
Preferably, the transfer microscope carrier 4 can be moved back and forth in labeling position and out between material position;The step 7 includes:
Step 71: the transfer microscope carrier 4 being driven to be moved to the material position out from the labeling position;
Step 72: arm component 31 is carried in the driving discharging will complete the substrate 200 labelled from the transfer microscope carrier 4 Upper unloading.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating examples made by the present invention, and being not is pair The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention Protection scope within.

Claims (10)

1. a kind of detection method of substrate is used for the detection or transmission of substrate (200), which is characterized in that the detection method packet It includes:
Step 1: providing a kind of detection device of substrate, the detection device includes the temporary microscope carrier being set on bracket (6) (21) with testing agency (1);
Step 2: placing on the substrate (200) Yu Suoshu testing agency (1) or the temporary microscope carrier (21);
Step 3: if the substrate (200) is located on the temporary microscope carrier (21), entering step 4;If substrate (200) position The substrate (200) that in the testing agency (1), then detects, and will test to the substrate (200) is from the inspection It surveys on mechanism (1) and unloads;
Step 4: the substrate (200) is unloaded from the temporary microscope carrier (21).
2. the detection method of substrate according to claim 1, which is characterized in that the detection device further includes carrying mechanism (3), the carrying mechanism (3) is set on the bracket (6), and carries arm component (33) including pan feeding;Step 2 packet It includes: driving the pan feeding to carry arm component (33) and place substrate (200) the Yu Suoshu testing agency (1) or the temporary microscope carrier (21) on.
3. the detection method of substrate according to claim 2, which is characterized in that the carrying mechanism (3) further includes transfer It carries arm component (32);The step 4 includes: to drive transfer carrying arm component (32) by the substrate (200) described in Unloaded on temporary microscope carrier (21) or the step 3 include drive the transfer carry arm component (32) by the substrate (200) from It is unloaded on the testing agency (1).
4. the detection method of substrate according to claim 3, which is characterized in that the detection device further includes transfer microscope carrier (4), the detection method further includes step 5: driving the transfer to carry arm component (32) and carries the substrate (200) described in Transfer microscope carrier (4).
5. the detection method of substrate according to claim 4, which is characterized in that the detection device further includes label-sticking mechanism (5), the detection method further includes step 6: being labelled to the substrate (200) on the transfer microscope carrier (4).
6. the detection method of substrate according to claim 5, which is characterized in that the carrying mechanism (3) further includes discharging Carry arm component (31), the detection method further includes step 7: arm component (31) are carried in the driving discharging will complete labeling The substrate (200) unloads from the transfer microscope carrier (4).
7. the detection method of substrate according to claim 6, which is characterized in that the transfer microscope carrier (4) can label It position and moves back and forth between material position out;The step 7 includes:
Step 71: the transfer microscope carrier (4) being driven to be moved to the material position out from the labeling position;
Step 72: arm component (31) are carried in the driving discharging will complete the substrate (200) labelled from the transfer microscope carrier (4) it is unloaded on.
8. the detection method of substrate according to claim 1, which is characterized in that the testing agency (1) includes flip-arm Component (11) and detection microscope carrier (15), the step 2 include the institute placed in substrate (200) the Yu Suoshu testing agency (1) State detection microscope carrier (15) or the temporary microscope carrier (21).
9. the detection method of substrate according to claim 8, which is characterized in that in the step 3, to the substrate (200) carrying out detection includes:
Step 31: the overturning detection microscope carrier (15) detects the first face of the substrate (200);
Step 32: the driving overturning arm component (11) grabs the substrate (200);
Step 33: driving overturning arm component (11) overturning detects the second face of the substrate (200);Wherein, described first Face is opposite with second face.
10. the detection method of substrate according to claim 8, which is characterized in that the detection device has described temporary Microscope carrier (21) and detection microscope carrier (15) are accepted described in temporary position and the detection microscope carrier (15) detection of the substrate (200) The check bit of substrate (200), the detection microscope carrier (15) can move back and forth between the temporary position and the check bit;It places The substrate (200) includes: in the detection microscope carrier (15)
Step 21: the driving detection microscope carrier (15) is moved to the temporary position;
Step 22: placing the substrate (200) on the detection microscope carrier (15);
Step 23: the driving detection microscope carrier (15) is moved to the check bit.
CN201811610474.2A 2018-12-27 2018-12-27 Substrate detection method Active CN109530244B (en)

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