CN109444178A - Applied to the online component X-ray detection of semicon industry, counting equipment - Google Patents

Applied to the online component X-ray detection of semicon industry, counting equipment Download PDF

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Publication number
CN109444178A
CN109444178A CN201710779703.2A CN201710779703A CN109444178A CN 109444178 A CN109444178 A CN 109444178A CN 201710779703 A CN201710779703 A CN 201710779703A CN 109444178 A CN109444178 A CN 109444178A
Authority
CN
China
Prior art keywords
lead room
lead
strip
room
ray detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710779703.2A
Other languages
Chinese (zh)
Inventor
刘骏
王鹏涛
陶桔
朱海涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUXI UNICOMP TECHNOLOGY Co Ltd
Original Assignee
WUXI UNICOMP TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WUXI UNICOMP TECHNOLOGY Co Ltd filed Critical WUXI UNICOMP TECHNOLOGY Co Ltd
Priority to CN201710779703.2A priority Critical patent/CN109444178A/en
Publication of CN109444178A publication Critical patent/CN109444178A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06MCOUNTING MECHANISMS; COUNTING OF OBJECTS NOT OTHERWISE PROVIDED FOR
    • G06M7/00Counting of objects carried by a conveyor
    • G06M7/02Counting of objects carried by a conveyor wherein objects ahead of the sensing element are separated to produce a distinct gap between successive objects
    • G06M7/04Counting of piece goods, e.g. of boxes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/611Specific applications or type of materials patterned objects; electronic devices
    • G01N2223/6116Specific applications or type of materials patterned objects; electronic devices semiconductor wafer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/646Specific applications or type of materials flaws, defects

Abstract

The present invention relates to a kind of X-ray detection technologies, it is specially a kind of directly to carry out automation X-ray detection to the SMT material strip on production line, point material and rewinding are to improve the online component X-ray detection applied to semicon industry of production efficiency, counting equipment, including lead room (3), lead room (3) is equipped with radiation protection lead curtain (1), the tri coloured lantern (2) for display working condition is additionally provided on lead room (3), keyboard region (4) are additionally provided on lead room (3), display (5) and touch screen electronic control module (6), electric overhead door (7) are additionally provided on lead room (3), discharge station (18) are equipped at electric overhead door (7), discharge tray manipulator (17) and marking machine (8) are equipped at blanking discharge station (18), material strip stepping mechanism (9) be located in lead room (3) and Horizontal consistent with radiation protection lead curtain (1), X-ray light pipe (10) is located in lead room (3) and is located at below material strip (19).

Description

Applied to the online component X-ray detection of semicon industry, counting equipment
Technical field
The present invention relates to a kind of X-ray detection technology, specially a kind of online component X applied to semicon industry Ray detection, counting equipment.
Background technique
In currently available technology, gradually start to popularize using the technology that X-ray detects object, such as count, The functions of the equipments in the fields such as product control and defect inspection, the point material and detection that are related to SMT charging tray currently on the market are single, can only carry out Single point material or detection function cannot meet simultaneously, and the degree of automation is not high.
Such as Chinese patent CN201280063323.4 discloses a kind of on-line automatic X ray checking device of SMT, comprising: Platform unit, removable support inspected body, and can move and rotate along X-axis, the Y-axis in plane;X-ray vacuum tube, cloth It sets in the downside of described unit, to the inspected body X-ray irradiation being arranged on described unit;Detector, along one Side is rotatably disposed on the upside of described unit, X-ray of the detection through the inspected body, wherein the X is penetrated Line vacuum pipe is arranged to the X-ray radiation face of the rotation for the detector and synchronous rotary and the X-ray vacuum tube It is parallel with described unit, wherein described unit includes hollow shaft, and including being pivotably supported the hollow of the hollow shaft Bearing, wherein the ionized X-ray through the inspected body is transformed to electric signal by the detector, and amplifies warp The electric signal of transformation is transformed to data image signal, wherein the automatic X ray checking device further include: to from the inspection The multiple data image signals for surveying device transmission carry out executing the image processing part that 3 dimensions check after high-speed reconstruction, wherein the figure As processing unit includes at least four graphics processing unit core to execute high-speed reconstruction.
Although detection of the automation X-ray to SMT charging tray is realized in above-mentioned design, cannot achieve to after online production SMT material directly carries out detection and rewinding and the operation of stamp.
Summary of the invention
The object of the present invention is to provide one kind, and automation X-ray inspection can be directly carried out to the SMT material strip on production line It surveys, point material and rewinding are to improve setting applied to the online component X-ray detection of semicon industry, counting for production efficiency It is standby.
Solving technical solution used by its technical problem is: a kind of online component X applied to semicon industry Ray detection, counting equipment, including lead room, the lead room are equipped with radiation protection lead curtain, are additionally provided on the lead room for showing The tri coloured lantern of working condition is additionally provided with keyboard region, display and touch screen electronic control module on the lead room, also sets on the lead room There is electric overhead door, discharge station is equipped at the electric overhead door, is equipped with discharge tray manipulator at the blanking discharge station And marking machine, the material strip stepping mechanism are located in lead room and horizontal consistent with radiation protection lead curtain, the X-ray light pipe is located at lead In room and it is located at below material strip, the FPD imaging mechanism is located in lead room and is located above X-ray light pipe, the jockey pulley component It is located in lead room and is located above material strip, the tension control mechanism is also provided in lead room and is located above material strip, the rewinding Disk is located in lead room, and the mechanism that tapes is located on rewinding disk, and the sealing-tape machine is also provided in lead room and is the mechanism that tapes Adhesive tape is supplied, the empty tray feed mechanism is located in lead room and is located at rewinding disk side.
Preferably, the material strip stepping mechanism includes motor, screw rod and fixing piece, the fuselage of the motor is mounted on lead In room, the motor and screw rod link, and the fixing piece is rotatably assorted with screw rod.
Preferably, the empty tray feed mechanism includes empty tray feed frame body and telescoping mechanism, the telescoping mechanism It is located at into frame body.
Preferably, further including material strip traction mechanism, the material strip traction mechanism includes belt pulley and charging tray pawl, the material Disk pawl is set over pulleys carried, and the belt pulley is mounted in lead room and is located at radiation protection lead curtain side.
Of the invention has the advantage that applied to the online component X-ray detection of semicon industry, counting equipment It is of the invention can be to SMT material strip on production line applied to the online component X-ray detection of semicon industry, counting equipment It is done directly the X-ray detection and point material, feeding and rewinding of SMT charging tray, fully achieves Unmanned operation, equipment is realized full-automatic Change, barcode scanning ID binding, end socket is completed in automatic material strip stepping and the automatic counting and quality restriction for completing SMD (surface mount part) The attaching of adhesive tape, last automatic labeling are put in storage a whole set of process, substantially increase production efficiency.
Detailed description of the invention
Fig. 1 is that online component X-ray detection, the structure of counting equipment applied to semicon industry of the invention is shown It is intended to.
Fig. 2 is that online component X-ray detection, the structure of counting equipment applied to semicon industry of the invention is shown It is intended to.
Fig. 3 is online component X-ray detection, the main view of counting equipment applied to semicon industry of the invention Figure.
Fig. 4 is the online component X-ray detection applied to semicon industry of the invention, the right view of counting equipment Figure.
Fig. 5 is online component X-ray detection, the vertical view of counting equipment applied to semicon industry of the invention Figure.
Fig. 6 is online component X-ray detection, the internal junction of counting equipment applied to semicon industry of the invention Structure schematic diagram.
Fig. 7 is online component X-ray detection, the internal junction of counting equipment applied to semicon industry of the invention Structure top view.
Fig. 8 is online component X-ray detection, the empty tray of counting equipment applied to semicon industry of the invention The structural schematic diagram of feed mechanism.
Fig. 9 is the online component X-ray detection applied to semicon industry of the invention, the material strip step of counting equipment Into the structural schematic diagram of mechanism.
Detailed description of the invention: 1, radiation protection lead curtain, 2, tri coloured lantern, 3, lead room, 4, keyboard region, 5, display, 6, touch screen it is automatically controlled Module, 7, electric overhead door, 8, marking machine, 9, material strip stepping mechanism, 91, motor, 92, screw rod, 93, fixing piece, 10, X-ray Light pipe, 11, FPD imaging mechanism, 12, jockey pulley component, 13, material strip traction mechanism, 131, belt pulley, 132, charging tray pawl, 14, tension Control mechanism, 15, tape mechanism, 16, rewinding disk, 17, discharge tray manipulator, 18, discharge station, 19, material strip, 20, empty material Disk feed mechanism, 201, empty tray feed frame body, 202, telescoping mechanism, 21, sealing-tape machine, 22,.
Specific embodiment
As shown, a kind of applied to the online component X-ray detection of semicon industry, counting equipment, including lead Room 3, the lead room 3 are equipped with radiation protection lead curtain 1, the tri coloured lantern 2 for display working condition, institute are additionally provided on the lead room 3 It states and is additionally provided with keyboard region 4, display 5 and touch screen electronic control module 6 on lead room 3, be additionally provided with electric overhead door 7 on the lead room 3, It is equipped with discharge station 18 at the electric overhead door 7, is equipped with discharge tray manipulator 17 and mark at the blanking discharge station 18 Machine 8, the material strip stepping mechanism 9 are located in lead room 3 and horizontal consistent with radiation protection lead curtain 1, and the X-ray light pipe 10 is located at lead In room 3 and it is located at 19 lower section of material strip, the FPD imaging mechanism 11 is located in lead room 3 and is located at 10 top of X-ray light pipe, described Jockey pulley component 12 is located in lead room 3 and is located at 19 top of material strip, and the tension control mechanism 14 is also provided in lead room 3 and is located at material 19 top of band, the rewinding disk 16 are located in lead room 3, and the mechanism 15 that tapes is located on rewinding disk 16, the sealing-tape machine 21 It is also provided in lead room 3 and supplies adhesive tape for the mechanism 15 that tapes, the empty tray feed mechanism 20 is located in lead room 3 and is located at and receives 16 side of charging tray.
The material strip stepping mechanism 9 includes motor 91, screw rod 92 and fixing piece 93, and the fuselage of the motor 91 is mounted on lead In room 3, the motor 91 links with screw rod 92, and the fixing piece 93 is rotatably assorted with screw rod 92.
The empty tray feed mechanism 20 includes empty tray feed frame body 201 and telescoping mechanism 202, the telescoping mechanism 202 are located at into frame body 201.
It further include material strip traction mechanism, the material strip traction mechanism includes belt pulley and charging tray pawl, and the charging tray pawl is located at On belt pulley, the belt pulley is mounted in lead room and is located at radiation protection lead curtain side.
The whole series are applied to the online component X-ray detection of semicon industry, counting equipment is divided into feeding area, tears automatically Taped region, adhesive tape towing area, X-ray detection zone, material strip feeding area, charging tray winding and the adhesion zone of end socket adhesive tape, charging tray are beaten Mark and manipulator discharging area.
In the specific implementation, barcode scanning component carries out barcode scanning to charging tray to be measured, completes ID binding;Electric overhead door is opened, material Charging tray is sent into from the charging tray to be measured of feeding area by lead room, electric overhead door by the cooperation of charging tray pawl and belt pulley with traction mechanism It closes;CCD determines adhesive tape position automatically, and tear tape mechanism is exactly to use contact and cylinder, by Telescopic-cylinder contact is reached The operation of frictioning band is carried out to web surface gold, to complete removing for adhesive tape;The stepping of material strip stepping mechanism completion material strip;Sky material The telescoping mechanism ejection that disk feed mechanism passes through, empty tray is fixed on rewinding disc mechanism, and sealing-tape machine is mechanism confession of taping Adhesive tape is answered, and the material strip of traction is affixed in empty tray, jockey pulley component, tension inductive component are pushed by telescopic cylinder, right Material strip carries out righting;Material strip starts to be unreeled, winding movement, and strip is passed through X-ray light pipe, and X-ray light pipe opens ray, Picture being received according to FPD imaging mechanism, material and a quality restriction being carried out to material strip, rewinding packing is fed back according to tension inductive component Information carry out rewinding, after the completion of rewinding, the mechanism that tapes is that charging tray end after rewinding is completed adhesive tape and attached again;Electrically operated gate It opens, discharge tray manipulator takes out the charging tray detected, receives picture by FPD imaging mechanism and carries out operation, calculates SMD The coordinate of final quantity and unqualified SMD, the charging tray after discharge tray manipulator first will test are sent to marking machine progress mark, beat Target data are the detection data of final output, and rewinding disk is placed into discharge station, whole flow process by last discharge tray manipulator Circulation carries out.
The whole series are applied to the online component X-ray detection of semicon industry, counting equipment is divided into material strip stepping area, X- Ray detection zone, material strip feed area, empty tray feeding area, charging tray winding and material strip fixed area, charging tray mark and manipulator blanking Area.
In the specific implementation, material strip is sent at radiation protection lead curtain by preceding road producing line, and material strip stepping mechanism will pass through motor band It is mobile to be further driven to fixing piece for dynamic screw rod, and fixing piece fixes material strip, by the drive of motor so that fixing piece is toward rewinding Disk direction is mobile, while X-ray light pipe is opened, and the picture received according to FPD imaging mechanism successively carries out the SMD on material strip Point material and quality restriction, sealing-tape machine are mechanism supply adhesive tape of taping, and the mechanism that tapes includes cutting blade, lower air cylinder and rolling It takes turns, the adhesive tape in sealing-tape machine is sent out by idler wheel, the material strip that adhesive tape is pushed, and then will kept well on rewinding disk by lower air cylinder Fracture goes out to be bonded, while lower air cylinder is during the depression process, and adhesive tape can be cut off by cutting blade, jockey pulley component and tension control machine Structure (cylinder) push, to material strip carry out righting, material strip stepping mechanism carry out feeding, according to tension control mechanism feedback data into Row rewinding.
When material strip transport reaches setting quantity, stopping feeding carrying out cutting off and consolidating to material strip end progress adhesive tape for material strip Fixed, electric overhead door is opened, and discharge tray manipulator removes and places the charging tray of winding in mark station, and marking machine is according to survey The information such as defective products, coordinate, SMD type number, the quantity of examination carry out mark on charging tray, and charging tray is placed on by discharge tray manipulator again Discharge station, empty tray feed mechanism carry out the feeding of empty tray, and whole flow process circulation carries out.
It is enlightenment with the above-mentioned desirable embodiment according to invention, through the above description, relevant staff is complete Can without departing from the scope of the technological thought of the present invention', carry out various changes and amendments, this invention it is technical Range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.

Claims (4)

1. a kind of applied to the online component X-ray detection of semicon industry, counting equipment, including lead room (3), the lead Room (3) is equipped with radiation protection lead curtain (1), and the tri coloured lantern (2) for display working condition is additionally provided on the lead room (3), described It is additionally provided with keyboard region (4), display (5) and touch screen electronic control module (6) on lead room (3), is additionally provided on the lead room (3) electronic Overhead door (7) is equipped with discharge station (18) at the electric overhead door (7), and blanking is equipped at the blanking discharge station (18) Disk manipulator (17) and marking machine (8), it is interior and horizontal with radiation protection lead curtain (1) that the material strip stepping mechanism (9) is located at lead room (3) Unanimously, the X-ray light pipe (10) is located in lead room (3) and is located at below material strip (19), and the FPD imaging mechanism (11) is located at In lead room (3) and it is located above X-ray light pipe (10), the jockey pulley component (12) is located in lead room (3) and is located at material strip (19) Top, the tension control mechanism (14) are also provided in lead room (3) and are located above material strip (19), and the rewinding disk (16) is located at In lead room (3), the mechanism that tapes (15) is located on rewinding disk (16), the sealing-tape machine (21) be also provided in lead room (3) and Adhesive tape is supplied for the mechanism that tapes (15), the empty tray feed mechanism (20) is located in lead room (3) and is located at rewinding disk (16) Side.
2. the online component X-ray detection according to claim 1 applied to semicon industry, counting equipment, Be characterized in that: the material strip stepping mechanism (9) includes motor (91), screw rod (92) and fixing piece (93), the motor (91) Fuselage is mounted in lead room (3), and the motor (91) and screw rod (92) are linked, and the fixing piece (93) is matched with screw rod (92) rotation It closes.
3. the online component X-ray detection according to claim 1 applied to semicon industry, counting equipment, Be characterized in that: the empty tray feed mechanism (20) includes that empty tray is fed frame body (201) and telescoping mechanism (202), described to stretch Contracting mechanism (202) is located at into frame body (201).
4. the online component X-ray detection according to claim 1 applied to semicon industry, counting equipment, It is characterized in that: further including material strip traction mechanism (13), the material strip traction mechanism (13) includes belt pulley (131) and charging tray pawl (132), the charging tray pawl (132) is located on belt pulley (131), and the belt pulley (131) is mounted in lead room (3) and is located at anti- Radiate lead curtain (1) side.
CN201710779703.2A 2017-09-01 2017-09-01 Applied to the online component X-ray detection of semicon industry, counting equipment Pending CN109444178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710779703.2A CN109444178A (en) 2017-09-01 2017-09-01 Applied to the online component X-ray detection of semicon industry, counting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710779703.2A CN109444178A (en) 2017-09-01 2017-09-01 Applied to the online component X-ray detection of semicon industry, counting equipment

Publications (1)

Publication Number Publication Date
CN109444178A true CN109444178A (en) 2019-03-08

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Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110031488A (en) * 2019-05-07 2019-07-19 深圳市伟铭光电有限公司 A kind of the three-dimensional perspective material testing apparatus and its method of smart X-ray
CN110575968A (en) * 2019-09-11 2019-12-17 深圳市卓茂科技有限公司 x-ray point material equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110031488A (en) * 2019-05-07 2019-07-19 深圳市伟铭光电有限公司 A kind of the three-dimensional perspective material testing apparatus and its method of smart X-ray
CN110575968A (en) * 2019-09-11 2019-12-17 深圳市卓茂科技有限公司 x-ray point material equipment
CN110575968B (en) * 2019-09-11 2022-03-25 深圳市卓茂科技有限公司 X-ray point material equipment

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