CN109402636B - 一种具有废屑回收结构并可控温的智能蚀刻设备 - Google Patents
一种具有废屑回收结构并可控温的智能蚀刻设备 Download PDFInfo
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- CN109402636B CN109402636B CN201811585318.5A CN201811585318A CN109402636B CN 109402636 B CN109402636 B CN 109402636B CN 201811585318 A CN201811585318 A CN 201811585318A CN 109402636 B CN109402636 B CN 109402636B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
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CN201811585318.5A CN109402636B (zh) | 2018-12-24 | 2018-12-24 | 一种具有废屑回收结构并可控温的智能蚀刻设备 |
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CN201811585318.5A CN109402636B (zh) | 2018-12-24 | 2018-12-24 | 一种具有废屑回收结构并可控温的智能蚀刻设备 |
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CN109402636A CN109402636A (zh) | 2019-03-01 |
CN109402636B true CN109402636B (zh) | 2020-11-13 |
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CN110106504B (zh) * | 2019-04-04 | 2021-03-23 | Tcl华星光电技术有限公司 | 一种蚀刻设备 |
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JP2004136148A (ja) * | 2002-10-15 | 2004-05-13 | Fuji Photo Film Co Ltd | 排ガス処理装置 |
CN103628068A (zh) * | 2012-08-24 | 2014-03-12 | 成都虹华环保科技有限公司 | 微蚀废液再生回收系统 |
CN104846377A (zh) * | 2015-06-02 | 2015-08-19 | 成都虹华环保科技股份有限公司 | 一种全自动蚀刻液回收装置 |
CN108004545A (zh) * | 2017-12-25 | 2018-05-08 | 李婉清 | 一种电路板腐蚀液再生装置及其方法 |
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Effective date of registration: 20201023 Address after: 221300 No. 88 Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Applicant after: SU Normal University Semiconductor Materials and Equipment Research Institute (Pizhou) Co.,Ltd. Address before: 310018 Hangzhou Vocational and Technical College, Xiasha School Park, 68, Zhejiang, Hangzhou Applicant before: Chen Zhenlong |
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Effective date of registration: 20220512 Address after: 221300 506, block B, electronic industrial park, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee after: Xuzhou Bochuang Construction Development Group Co.,Ltd. Address before: No.88 Liaohe West Road, Pizhou Economic Development Zone, Xuzhou City, Jiangsu Province Patentee before: SU Normal University Semiconductor Materials and Equipment Research Institute (Pizhou) Co.,Ltd. |
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