CN109361148A - A kind of solid state laser - Google Patents
A kind of solid state laser Download PDFInfo
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- CN109361148A CN109361148A CN201811479135.5A CN201811479135A CN109361148A CN 109361148 A CN109361148 A CN 109361148A CN 201811479135 A CN201811479135 A CN 201811479135A CN 109361148 A CN109361148 A CN 109361148A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
- H01S3/2391—Parallel arrangements emitting at different wavelengths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Abstract
The present embodiments relate to laser technology fields, disclose a kind of solid state laser.The solid state laser includes: first laser module, for first laser light source to be converted to first laser;First rotatable mirror is equipped with the first mirror portion, the second mirror portion and third mirror portion, and the first rotatable mirror is used for: when being located at first position, reflecting first laser by the first mirror portion, when being located at the second position, transmits first laser by the second mirror portion and third mirror portion;Second laser module, for second laser light source to be converted to second laser;Second rotatable mirror is equipped with third mirror portion and the 6th mirror portion, and the second rotatable mirror is used for: when being located at the third place, reflecting first laser by the 6th mirror portion, and transmit second laser by the 4th mirror portion;Third laser module, for first laser and second laser to be converted to third laser.In the above manner, the present embodiment can select the laser of output different wave length, and the power density of laser is high.
Description
Technical field
The present embodiments relate to laser technology fields, more particularly to a kind of solid state laser.
Background technique
Ultraviolet laser has high photon energy, and point of many nonmetallic materials can be directly destroyed in material processing
Son, with realization " cold " working process, also, ultraviolet laser hot spot is small, wavelength is short, good condensing performance, is suitble to adding for fine structure
Work.
Green solid-state lasers have many advantages, such as that high-efficient, power is big, good beam quality, small in size, the service life is long, in colour
The fields such as display, laser medicine, subsurface communication, precious metal marking have a wide range of applications.
In recent years, since the material category for needing to be carried out mark with laser is more and more abundant, it may be necessary to a laser
Device can export multi-wavelength, and two waveband or multiband solid state laser have become a hot topic of research.Moreover, in laser medicine
Requirement also is proposed to solid state laser in environmental, for example, when processing a component being made of a variety of materials, root
Situations such as according to the attribute of material, thickness, the requirement of launching spot size, power demand, it is desirable to be able to free switching different wave length
Laser.
The present inventor has found during realizing the embodiment of the present invention: current solid state laser passes through light splitting
Prism generates the laser of two kinds of wavelength simultaneously, and the power density of laser is lower.
Summary of the invention
The embodiment of the present invention can select to export different waves mainly solving the technical problems that provide a kind of solid state laser
Long laser, and the power density of laser is high.
In order to solve the above technical problems, a technical solution used in the embodiment of the present invention is: providing a kind of Solid State Laser
Device, comprising: first laser module is converted to first laser for receiving first laser light source, and by the first laser light source
Output;First rotatable mirror, set on the output end of the first laser module, the first rotatable mirror be equipped with the first mirror portion,
Second mirror portion and third mirror portion, first mirror portion and second mirror portion are set to the same side of the described first rotatable mirror, institute
The other side that third mirror portion is set to the described first rotatable mirror is stated, the first rotatable mirror is used for: when being located at first position,
The first laser is reflected by first mirror portion, makes the first laser along the first output side of the described first rotatable mirror
To output, so that the first laser is exported, it is when in the second position, saturating by second mirror portion and third mirror portion
The first laser is penetrated, exports the first laser along the second outbound course of the described first rotatable mirror;Second laser mould
Block is converted to second laser output for receiving second laser light source, and by the second laser light source;Second rotatable mirror,
Set on the second outbound course of the described first rotatable mirror and the output end of the second laser module, the second rotatable mirror
Equipped with the 4th mirror portion and the 6th mirror portion, the 4th mirror portion and the 6th mirror portion are set to opposite the two of the described second rotatable mirror
Side, the second rotatable mirror are used for: when being located at the third place, reflecting the first rotatable mirror by the 6th mirror portion
The first laser of transmission exports the first laser along the first outbound course of the described second rotatable mirror, and passes through
The 4th mirror portion transmits the second laser, keeps the second laser defeated along the first outbound course of the described second rotatable mirror
Out;Third laser module, set on the first outbound course of the described second rotatable mirror, for receiving the first laser and described
Second laser, and the first laser and the second laser are converted into the output of third laser, swash to export the third
Light.
Optionally, the described second rotatable mirror is additionally provided with the 5th mirror portion, and the 5th mirror portion and the 4th mirror portion are located at
The same side of the second rotatable mirror, the second rotatable mirror are also used to: when being located at four positions, passing through the described 5th
The second laser is reflected in mirror portion, exports the second laser along the second outbound course of the described second rotatable mirror;It is described
Solid state laser further include: reflecting mirror;The reflecting mirror is set to the second outbound course of the described second rotatable mirror, the reflection
Mirror is used for: the second laser is reflected, to export the second laser.
Optionally, the first laser module includes setting gradually: the first total reflective mirror, first laser crystal, the first sound
Light Q-switch, the first outgoing mirror;First total reflective mirror is used to penetrate the first laser light source;The first laser crystal is used
The first laser is converted in the first laser light source for penetrating first total reflective mirror;First acousto-optic Q-switching
For the continuous first laser to be modulated to the first laser of pulse;First outgoing mirror is used for through described the
One laser, so that the first laser is exported to the described first rotatable mirror;First total reflective mirror is also used to reflect described
One laser light source, first outgoing mirror are also used to reflect the first laser light source, so that first total reflective mirror and described
First outgoing mirror forms the resonant cavity of the first laser, to be not converted into the first laser light source of the first laser in institute
It states the first total reflective mirror, the first laser crystal, first acousto-optic Q-switching, vibrate between first outgoing mirror.
Optionally, the second laser module includes setting gradually: the second total reflective mirror, second laser crystal, the rising tone
Light Q-switch, two frequency-doubling crystals, the second outgoing mirror;Second total reflective mirror is used to penetrate the second laser light source;Described second
Laser crystal is used to the second laser light source that second total reflective mirror penetrates being converted to the first laser;Described second
Acousto-optic Q-switching is used to for the continuous first laser being modulated to the first laser of pulse;Two frequency-doubling crystal is used for
The first laser is converted into the second laser;Second outgoing mirror is used to penetrate the second laser, so that described
Second laser is exported to the described second rotatable mirror;Second total reflective mirror is also used to reflect the first laser light source, described
Second outgoing mirror is also used to reflect the first laser light source, so that first total reflective mirror and first outgoing mirror form institute
The resonant cavity of second laser is stated, to be not converted into the first laser of the second laser in first total reflective mirror, described
One laser crystal, first acousto-optic Q-switching vibrate between first outgoing mirror.
Optionally, the solid state laser further include: first laser input module, set on the defeated of the first laser module
Enter end, for being generated and transmitted by the first laser light source;Second laser input module, set on the defeated of the second laser module
Enter end, for being generated and transmitted by the second laser light source.
Optionally, the solid state laser further include: the first focus module is set to the first laser input module and institute
It states between first laser module, is used for the first laser light-resource fousing to the first laser module;Second focus module,
Between the dual-laser input module and the second laser module, for by the second laser light-resource fousing to described
Second laser module.
Optionally, the third laser module includes: frequency tripling crystal and third outgoing mirror;The frequency tripling crystal is set to
First outbound course of the second rotatable mirror, the frequency tripling crystal are used for the first laser and the second laser
Be converted to third laser;The third outgoing mirror is used to penetrate the third laser, to export the third laser.
Optionally, the third laser module further include: spot shaping submodule;The spot shaping submodule is set to institute
The one end of third outgoing mirror far from the frequency tripling crystal is stated, the spot shaping submodule is used to carry out the third laser
Shaping.
Optionally, the solid state laser further include: the first condenser lens, second set on the described first rotatable mirror are defeated
Direction out, the first laser for penetrating the described first rotatable mirror focus to the described second rotatable mirror;Second is poly-
Focus lens, set on the first outbound course of the described second rotatable mirror, for by described the of the described second rotatable mirror reflection
The second laser that one laser and the second rotatable mirror penetrate focuses to the third laser module.
Optionally, the solid state laser further include: controller;The controller respectively with the described first rotatable mirror and
The second rotatable mirror connection, the controller are used for: when receiving first laser output order, control described first can
Revolving mirror is rotated to the first position;When receiving second laser output order, the described second rotatable mirror rotation is controlled
To the 4th position;When receiving third laser output order, controls the first rotatable mirror and rotate to described second
Position, while controlling the described second rotatable mirror and rotating to the third place.
Optionally, the first laser is 1064nm laser, and the second laser is 532nm laser, the third laser
For 355nm laser.
The beneficial effect of the embodiment of the present invention is: being in contrast to the prior art, the embodiment of the present invention provides a kind of solid
Body laser, by first laser module export first laser, second laser module export second laser, the first rotatable mirror,
Second rotatable mirror by rotation to different positions, to select output first laser or third laser, first laser or
The wavelength of person's third laser is different, power density is roughly the same, solves the problems, such as that fundamental frequency light and frequency multiplication optical power density are lower,
The laser of output different wave length can be selected, and the power density of laser is high.
Detailed description of the invention
One or more is implemented to illustrate by corresponding attached drawing, these exemplary illustrations are not constituted
Restriction to embodiment, the element in attached drawing with same reference numbers label is expressed as similar element, unless there are special Shen
Bright, composition does not limit the figure in attached drawing.
Fig. 1 is the structural schematic diagram of one of solid state laser provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of another solid state laser provided in an embodiment of the present invention;
Fig. 3 is the structural schematic diagram of another solid state laser provided in an embodiment of the present invention;
Fig. 4 a is the structural schematic diagram of the first rotatable mirror of the solid state laser of Fig. 1;
Fig. 4 b is the structural schematic diagram of the second rotatable mirror of the solid state laser of Fig. 1;
Fig. 4 c is the first rotatable mirror of the solid state laser of Fig. 1 and the structural schematic diagram of the second rotatable mirror;
Fig. 5 is the functional module structure schematic diagram of the solid state laser of Fig. 1.
Specific embodiment
To facilitate the understanding of the present invention, in the following with reference to the drawings and specific embodiments, the present invention will be described in more detail.
It should be noted that be expressed " being fixed on " another element when element, it can directly on the other element or therebetween
There may be one or more elements placed in the middle.When an element is expressed " connection " another element, it, which can be, directly connects
It is connected to another element or there may be one or more elements placed in the middle therebetween.Term used in this specification is " vertical
", " horizontal ", "left", "right", "upper", "lower", "inner", "outside", the instructions such as " bottom " orientation or positional relationship be based on
Orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than indication or suggestion institute
The device or element of finger must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to this hair
Bright limitation.In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply relatively heavy
The property wanted.
Unless otherwise defined, technical and scientific term all used in this specification is led with technology of the invention is belonged to
The normally understood meaning of the technical staff in domain is identical.It is specific to be intended merely to description for used term in the description of the invention
Embodiment purpose, be not intended to limitation the present invention.Term "and/or" used in this specification includes one or more phases
Any and all combinations of the listed item of pass.
In addition, as long as technical characteristic involved in invention described below difference embodiment is not constituted each other
Conflict can be combined with each other.
Current dual laser is generally confined within infrared-green light band or green light-ultraviolet band.Wherein, red
Outside-green light dual laser carries out frequency multiplication by nonlinear crystal, then by Amici prism by not by the fundamental frequency light of frequency multiplication and
Frequency doubled light separation output forms dual wavelength, and the power density of the laser of this laser output is lower, also, two kinds of wave band of laser
Must export simultaneously, user can not unrestricted choice export a certain wave band of laser, selectivity is poor.In addition, there are also some infrared green
Light dual laser using light polarizability rotation whether frequency multiplication or directly (such as number is 1673-1255 for infrared output
(2015) -06-0037-03, topic are as follows: the research of " 1064nm/532nm dual wavelength free switching output laser "), it is such to swash
Structure is complicated for light device, device is more, and technology and fund cost are higher, is unfavorable for industrialized production.Green light-ultraviolet double-wavelength laser
Device is by the way that, with fundamental frequency light and frequency, to realize the output of ultraviolet light, but chamber is outer and frequency power is close after nonlinear crystal progress frequency multiplication
Spend it is low so that the ultraviolet and frequency optical power generated is also relatively low.Based on this, the embodiment of the present invention provides a kind of solid state laser,
By two laser modules of setting and two rotatable mirrors, solve the problems, such as that fundamental frequency light and frequency multiplication optical power density are lower, energy
The laser of enough selection output different wave lengths, and the power density of laser is high.
Specifically, solid state laser will be illustrated by embodiment below.
Referring to Fig. 1, for the structural schematic diagram of one of solid state laser provided in an embodiment of the present invention.Such as Fig. 1 institute
Show, solid state laser 100 includes: that first laser module 110, second laser module 120, third laser module 130, first can revolve
Tilting mirror 141, the second rotatable mirror 142 and reflecting mirror 143.
Wherein, the first rotatable mirror 141 is set to the output end of first laser module 110, and the second rotatable mirror 142 is set to the
The output end of dual-laser module 120, also, the second rotatable mirror 142 is located at the second outbound course of the first rotatable mirror 141,
Third laser module 130 is set to the first outbound course of the second rotatable mirror 142, and reflecting mirror 143 is set to the second rotatable mirror 142
The second outbound course.First laser light source is converted to first for receiving first laser light source by first laser module 110
Laser output.First rotatable mirror 141 is equipped with the first mirror portion 1411 and the second mirror portion 1412 (as shown in fig. 4 a), and first is rotatable
Mirror 141 is used for: when being located at first position, being reflected the first laser by the first mirror portion 1411, is made first laser along first
First outbound course of rotatable mirror 141 exports, to export first laser, when in the second position, passes through the second mirror portion
1412 transmission first lasers, export first laser along the second outbound course of the first rotatable mirror 141.Second laser module
120 are converted to second laser output for receiving second laser light source, and by second laser light source.Second rotatable mirror 142 is set
There are third mirror portion 1421 and the 4th mirror portion 1422 (as shown in Figure 4 b), the second rotatable mirror 142 is used for: when positioned at the third place
When, the first laser of the second mirror portion 1412 transmission is reflected by third mirror portion 1421, makes first laser along the second rotatable mirror 142
The first outbound course output, and by third mirror portion 1421 transmit second laser, make second laser along the second rotatable mirror 142
The first outbound course output;When being located at four positions, by 1422 reflected second laser of the 4th mirror portion, make second laser edge
Second outbound course of the second rotatable mirror 142 exports.Reflecting mirror 143 is used for reflected second laser, to export second laser.
The first laser and second that third laser module 130 is used to receive the first outbound course output along the second rotatable mirror 142 swashs
Light, and first laser and second laser are converted into the output of third laser, to export third laser.
Wherein, in the present embodiment, first laser is 1064nm laser (infrared laser), and second laser is 532nm laser
(green laser), third laser are 355nm laser (ultraviolet laser).Certainly, first laser, second laser, third laser may be used also
Think other wavelength lasers, can be selected according to actual needs.
Specifically, referring again to Fig. 1, first laser module 110 include the first total reflective mirror 111, first laser crystal 112,
First acousto-optic Q-switching 113, the first outgoing mirror 114.
Wherein, the first total reflective mirror 111, first laser crystal 112, the first acousto-optic Q-switching 113, the first outgoing mirror 114 according to
Direction close to the first rotatable mirror 141 is set gradually.Also, the first total reflective mirror 111, first laser crystal 112, the first acousto-optic
Q-switch 113 and the first outgoing mirror 114 form the first resonant cavity.
First total reflective mirror 111 can be plane mirror or curved mirror, the ante-chamber plane mirror of specially the first resonant cavity.First
Total reflective mirror 111 is coated with 808nm anti-reflection film (R < 0.2%) far from the side of first laser crystal 112, and the first total reflective mirror 111 is close
The side of first laser crystal 112 is coated with 808nm anti-reflection film (R<0.2%) and 1064nm high-reflecting film (R>99.9%).First is complete
Anti- mirror 111 is used to penetrate first laser light source;First total reflective mirror 111 is also used to reflect first laser light source.
First laser crystal 112 is Nd:YVO4 laser crystal, has bigger stimulated emission cross section and higher to pump light
Absorption coefficient.The two sides of first laser crystal 112 be coated with 808nm anti-reflection film (R < 0.2%) and 1064nm anti-reflection film (R <
0.2%).In the present embodiment, the first laser light source that first laser crystal 112 is used to penetrate the first total reflective mirror 111 is converted
For first laser.
First acousto-optic Q-switching 113 can be such that continuous laser power output is converted into high-peak power by Q-regulating technique
Pulsed laser output.The acousto-optic crsytal two sides of first acousto-optic Q-switching 113 are coated with 1064nm anti-reflection film (R < 0.2%).At this
In embodiment, the continuous first laser that the first acousto-optic Q-switching 113 is used to export in first laser crystal 112 is modulated to pulse
First laser, and export to the first outgoing mirror 114.
First outgoing mirror 114 can be the reflecting mirror that plane mirror or curved mirror are made.The two of first outgoing mirror 114
Side is coated with 1064nm fractional transmission film (R is approximately equal to 80%).In the present embodiment, the first outgoing mirror 114 is used to swash through first
Light, so that first laser is exported to the first rotatable mirror 141;First outgoing mirror 114 is also used to reflect first laser light source.
In the present embodiment, the work process of first laser module 110 is substantially are as follows: first laser light source inputs first laser
Module 110, first laser light source penetrate the first total reflective mirror 111 and converge to first laser crystal 112, and first laser crystal 112 will
First laser light source is converted to first laser, and the first acousto-optic Q-switching 113 modulates first laser, and the first outgoing mirror 114 penetrates first
Laser, so that first laser is exported to the first rotatable mirror 141, meanwhile, partially it is not converted into the first laser light of first laser
Source is reflected back toward in the first resonator in the first outgoing mirror 115, and first laser light source vibrates in the first resonator, until
It is exported after being converted to first laser from the first outgoing mirror 114.
Optionally, in some other embodiments, referring to Fig. 2, first laser module 110 further include: the first deviation mirror
115.First deviation mirror 115 is reflecting mirror, optical path can be made to turn to.First deviation mirror 115 is set to 113 He of the first acousto-optic Q-switching
Between first outgoing mirror 114, the first laser for exporting the first acousto-optic Q-switching 113 reflexes to the first outgoing mirror 114, from
And change the direction of propagation of first laser.By the way that the first deviation mirror 115 is arranged, change the optical path direction of first laser, energy
So that solid state laser 100 is can adapt to different cavity structures, such as adapts to " H " shape lumen type.
Optionally, in some other embodiments, referring to Fig. 3, first laser module 110 may include the first total reflective mirror
111, first laser crystal 112, the first acousto-optic Q-switching 113, the first eyeglass 116, the second eyeglass 117 and third eyeglass 118.When
When first laser light source incidence first laser module 110, the first total reflective mirror 111 penetrates first laser light source, first laser crystal
First laser light source is converted to first laser by 112, and is exported to the second eyeglass 117, and the second eyeglass 117 reflects first laser
To third eyeglass 118, first laser is reflexed to the first rotatable mirror 141 by third eyeglass 118, meanwhile, the second eyeglass 117 is by portion
The first laser light source for not being converted to first laser is divided to be reflected back first laser crystal 112, non-switched first laser light source is saturating
First laser crystal 112 is crossed, non-switched first laser light source is reflexed to the first acousto-optic Q-switching 113 by the first total reflective mirror 111,
Output to the first eyeglass 116, the first eyeglass 116 reflects first after first acousto-optic Q-switching 113 is modulated first laser light source
Laser light source, first laser light source is successively after the first acousto-optic Q-switching 113, the first total reflective mirror 111, in first laser crystal
112 continue to convert, and the first laser being converted to successively is emitted after the second eyeglass 117, third eyeglass 118, and not
The first laser light source continuation of conversion is vibrated in resonant cavity.In the above manner, the structure of first laser module 110 can be made
Diversification to adapt to different cavity structures, such as adapts to Z-shaped lumen type.
Specifically, referring again to Fig. 1, second laser module 120 include the second total reflective mirror 121, second laser crystal 122,
Second acousto-optic Q-switching 123, two frequency-doubling crystals 124, the second outgoing mirror 125.
Wherein, the second total reflective mirror 121, second laser crystal 122, the second acousto-optic Q-switching 123, two frequency-doubling crystals 124,
Two outgoing mirrors 125 are set gradually according to the direction close to the second rotatable mirror 142.Also, the second total reflective mirror 121, second laser
Crystal 122, the second acousto-optic Q-switching 123, two frequency-doubling crystals 124, the second outgoing mirror 125 form the second resonant cavity.
Second total reflective mirror 121 can be plane mirror or curved mirror, the ante-chamber plane mirror of specially the second resonant cavity.Second
Total reflective mirror 121 is coated with 808nm anti-reflection film (R < 0.2%) far from the side of second laser crystal 122, and the second total reflective mirror 121 is close
The side of second laser crystal 122 is coated with 808nm anti-reflection film (R<0.2%) and 1064nm high-reflecting film (R>99.9%).Second is complete
Anti- mirror 121 is in through second laser light source;Second total reflective mirror 121 is also used to reflected second laser light source.
Second laser crystal 122 is Nd:YVO4 laser crystal, has bigger stimulated emission cross section and higher to pump light
Absorption coefficient.The two sides of second laser crystal 122 be coated with 808nm anti-reflection film (R < 0.2%) and 1064nm anti-reflection film (R <
0.2%), 532nm high-reflecting film (R > 99.9%) is also coated with close to the side of the second acousto-optic Q-switching 123.In the present embodiment,
Second laser crystal 122 is used to the second laser light source that the second total reflective mirror 121 penetrates being converted to first laser.
Second acousto-optic Q-switching 123 can be such that continuous laser power output is converted into high-peak power by Q-regulating technique
Pulsed laser output.The acousto-optic crsytal end face two sides of second acousto-optic Q-switching 123 are coated with 1064nm anti-reflection film (R < 0.2%)
With 532nm anti-reflection film (R < 0.2%).In the present embodiment, the second acousto-optic Q-switching 123 is for exporting second laser crystal 122
Continuous first laser be modulated to the first laser of pulse, and export to two frequency-doubling crystals 124.
Two frequency-doubling crystals 124 can be potassium dihydrogen phosphate (KDP), three lithium borates (LBO), bismuth borate (BIBO), phosphoric acid oxygen
One of titanium potassium (KTP), barium metaborate (BBO) material is prepared, and can be converted to 1064nm laser high-power
532nm laser.The two sides of two frequency-doubling crystals 124 be coated with 1064nm anti-reflection film (R < 0.2%) and 532nm anti-reflection film (R <
0.2%).In the present embodiment, two frequency-doubling crystals 124 are used to first laser being converted to second laser.
Second outgoing mirror 125 can be the reflecting mirror that plane mirror or curved mirror are made.The two of second outgoing mirror 125
Side is coated with 532nm fractional transmission film (R is approximately equal to 80%) and 1064nm high-reflecting film (R > 99.9%).In the present embodiment, second
Outgoing mirror 125 is used to penetrate second laser, so that second laser is exported to the second rotatable mirror 142;Second outgoing mirror 125 is also used
In reflection first laser.
In the present embodiment, the work process of second laser module 120 is substantially are as follows: second laser light source inputs second laser
Module 120, the second total reflective mirror 121 penetrate second laser light source, and second laser light source is converted to first by second laser crystal 122
Laser, the second acousto-optic Q-switching 123 modulate first laser, and first laser is converted to second laser by two frequency-doubling crystals 124, and second
Outgoing mirror 125 penetrates second laser, so that second laser is exported to the second rotatable mirror 142, meanwhile, partially it is not converted into second
The first laser of laser is reflected back toward in the second resonator in the second outgoing mirror 125, and first laser is in the second resonator
Oscillation, until being exported after being converted to second laser from the second outgoing mirror 125.
Optionally, in some other embodiments, referring to Fig. 3, second laser module 120 further include: the second deviation mirror
126 and third deviation mirror 127.Second deviation mirror 126 and third deviation mirror 127 are reflecting mirror, optical path can be made to turn to.Second
Deviation mirror 126, third deviation mirror 127 are set between the second acousto-optic Q-switching 123 and two frequency-doubling crystals 124, the second deviation mirror 126
First laser for exporting the second acousto-optic Q-switching 123 reflexes to third deviation mirror 127, and third deviation mirror 127 is used for the
The first laser of two deviation mirrors 126 reflection reflexes to two frequency-doubling crystals 124, so that the direction of propagation of first laser be made to change.It is logical
The second deviation mirror 126 of setting and third deviation mirror 127 are crossed, changes the optical path direction of first laser, solid state laser can be made
100 can adapt to different cavity structures, such as Z-shaped lumen type.
Specifically, referring again to Fig. 1, third laser module 130 includes: frequency tripling crystal 131 and third outgoing mirror 132.
Frequency tripling crystal 131 is set to the first outbound course of the second rotatable mirror 142, and third outgoing mirror 132 is set to frequency tripling crystal 131
Side far from the second rotatable mirror 142.
Frequency tripling crystal 131 is three lithium borates (LBO) crystal, can pass through 1064nm fundamental frequency light and 532nm frequency doubled light
Outside chamber and the mode of frequency forms the output of 355nm ultraviolet laser.The two sides of frequency tripling crystal 131 are coated with 1064nm&532nm&355 increasing
Permeable membrane (R < 0.2%).In the present embodiment, frequency tripling crystal 131 is used for the first laser for reflecting the second rotatable mirror 142
The second laser transmitted with the second rotatable mirror 142 is converted to third laser.
Third outgoing mirror 132 can be made for plane mirror or curved mirror.The both ends of third outgoing mirror 132 are coated with
355nm anti-reflection film (R < 0.2%), 1064nm high-reflecting film (R > 99.9%) and 532nm high-reflecting film (R > 99.9%).Third is defeated
Appearance 132 is used to penetrate third laser, to export third laser.It wherein, can be by Optimized Matching fundamental frequency light and frequency doubled light, i.e.,
First laser and second laser make its power density ratio 1:1, thus improve frequency multiplication with and frequency efficiency, for high power it is ultraviolet
Laser exports offer condition.
Optionally, in some other embodiments, the light beam of high quality in order to obtain, third laser module 130 further include:
Spot shaping submodule 133.Spot shaping submodule 133 can for non-lens orthopedic systems, microlens array orthopedic systems or
Birefringent lens orthopedic systems etc., for carrying out shaping to ultraviolet laser.Spot shaping submodule 133 is set to third outgoing mirror
132 one end far from frequency tripling crystal 131, spot shaping submodule 133 is used to carry out shaping to third laser, to obtain height
The third laser of quality.
Also referring to Fig. 1 and Fig. 4 a, the first rotatable mirror 141 is set to the first outgoing mirror 114 far from the first acousto-optic Q-switching
113 side, for receiving the first laser of the output of first laser module 110.First rotatable mirror 141 can be rotary type
Planar rondure mirror, the first rotatable mirror 141 be equipped with the first mirror portion 1411, the second mirror portion 1412 and third mirror portion 1413, first
Mirror portion 1411 and the second mirror portion 1412 are provided close to the same side of first laser module 110, and third mirror portion 1413 is disposed far from
The side of one laser module 110, the i.e. other side opposite with the first mirror portion 1411, the second mirror portion 1412.It can be by the first mirror portion
1411 and 1412 area ratio of the second mirror portion be set as equal equal proportion or other ratios.In the present embodiment, the first rotatable mirror 141
For circular eyeglass, ratio is waited to be divided into the first mirror portion 1411 and the second mirror portion 1412, the first mirror portion 1411 and the second mirror portion
1412 be semicircle, and third mirror portion 1413 is circle.First mirror portion 1411 is coated with 1064nm high-reflecting film (R > 99.9%), and second
Mirror portion 1412 is coated with 1064nm anti-reflection film (R < 0.2%), and third mirror portion 1413 is coated with 1064nm anti-reflection film (R < 0.2%).First
Mirror portion 1411 is for reflecting first laser, and the second mirror portion 1412 is for transmiting first laser, and third mirror portion 1413 is for transmiting the
One laser.
In the present embodiment, the first rotatable mirror 141 is used for: when being located at first position, that is, by the first rotatable mirror
When 141 1064nm high anti-mirror coating portion rotates into optical path, first laser is reflected by the first mirror portion 1411, makes first to swash
Light is exported along the first outbound course of the first rotatable mirror 141, to export first laser;When in the second position, that is, will
When the antireflective mirror coating portion 1064nm of first rotatable mirror 141 rotates into optical path, pass through the second mirror portion 1412 transmission first
Laser exports first laser along the second outbound course of the first rotatable mirror 141.
Wherein, when the first rotatable mirror 141 is located at first position, the position of the optical path of first laser and the first mirror portion 1411
Set relationship as shown in fig. 4 a.When the first rotatable mirror 141 is located at first position, solid state laser 100 exports first laser.
Wherein, in the present embodiment, the of the first outbound course of the first rotatable mirror 141 and the first rotatable mirror 141
Two outbound courses are vertical.
Optionally, limiting device can be set in the first rotatable mirror 141, rests on the to limit the first rotatable mirror 141
One position or the second position.For example, limiting device can be limit switch, when the first rotatable mirror 141 rotates to first position
Or when the second position, the first rotatable mirror 141 touches limit switch, then the first rotatable mirror 141 stops operating, and makes first
Rotatable mirror 141 stops at first position or the second position.
Also referring to Fig. 1 and Fig. 4 b, the second rotatable mirror 142 is set to the second outgoing mirror 125 far from two frequency-doubling crystals 124
One end, and be located at the first rotatable mirror 141 the second outbound course on.Second rotatable mirror 142 is for receiving second laser
The second laser that module 120 exports.Second rotatable mirror 142 can be the planar rondure mirror of rotary type, the second rotatable mirror
142 are equipped with the 4th mirror portion 1421, the 5th mirror portion 1422 and the 6th mirror portion 1423, and the 4th mirror portion 1412 and the 5th mirror portion 1422 are set to
Close to the same side of second laser module 120, the 6th mirror portion 1423 is disposed far from the side of second laser module 120, i.e., with the
The opposite other side in four mirror portions 1412, the 5th mirror portion 1422.It can be by third mirror portion 1421 and 1422 area ratio of the 4th mirror portion
It is set as equal equal proportion or other ratios.In the present embodiment, the second rotatable mirror 142 is circular eyeglass, and ratio is waited to be divided into
4th mirror portion 1412 and the 5th mirror portion 1422, the 4th mirror portion 1421, the 5th mirror portion 1422 are semicircle, and the 6th mirror portion 1423 is
It is round.4th mirror portion 1421 is coated with 532nm anti-reflection film (R < 0.2%), and the 5th mirror portion 1422 is coated with 532nm high-reflecting film (R >
99.9%), the 6th mirror portion 1423 is coated with 1064nm high-reflecting film (R > 99.9%) and 532nm anti-reflection film (R < 0.2%).4th mirror
Portion 1421 is used for reflected second laser for transmiting second laser, the 5th mirror portion 1422, and the 6th mirror portion 1423 is for reflecting first
Laser and transmission second laser.
In the present embodiment, the second rotatable mirror 142 is used for: when being located at the third place, that is, by the second rotatable mirror
142 1064nm high anti-mirror coating portion rotates to the optical path of first laser, the 532nm of the second rotatable mirror 142 is antireflective
When mirror coating portion rotates into the optical path of second laser, transmitted by the 6th mirror portion 1423 the first rotatable mirror 141 of reflection the
One laser exports first laser along the first outbound course of the second rotatable mirror 142, and passes through the 4th mirror portion 1421 transmission the
Dual-laser exports second laser along the first outbound course of the second rotatable mirror 142;When being located at four positions, that is, by the
It is anti-by the 5th mirror portion 1422 when the 532nm high of two rotatable mirrors 142 anti-mirror coating portion rotates into the optical path of second laser
Second laser is penetrated, exports second laser along the second outbound course of the second rotatable mirror 142.
Wherein, when the second rotatable mirror 142 is located at four positions, the position of the optical path of second laser and the 5th mirror portion 1422
It is as shown in Figure 4 b to set relationship.When the second rotatable mirror 142 is located at four positions, solid state laser 100 exports second laser;When
Second rotatable mirror 142 is located at the 4th position, the first rotatable mirror 141 is located at first position, and solid state laser 100 can be defeated simultaneously
Second laser and first laser out.
Wherein, when the first rotatable mirror 141 is located at the second position, the second rotatable mirror 142 is located at the third place, first
The positional relationship of the optical path of laser and the positional relationship in the second mirror portion 1412, the optical path of second laser and the 4th mirror portion 1421 is as schemed
Shown in 4c.When the second rotatable mirror 142 is located at the third place, the first rotatable mirror 141 is located at the second position, solid state laser
100 output third laser.
Wherein, in the present embodiment, the of the first outbound course of the second rotatable mirror 142 and the second rotatable mirror 142
Two outbound courses are vertical, also, the second output of the second outbound course of the second rotatable mirror 142 and the first rotatable mirror 141
Direction is identical.
Optionally, limiting device can be set in the second rotatable mirror 142, rests on the to limit the second rotatable mirror 142
Three positions or the 4th position.For example, limiting device can be limit switch, when the second rotatable mirror 142 rotates to the third place
Or when four positions, the second rotatable mirror 142 touches limit switch, then the second rotatable mirror 142 stops operating, and making second can
Revolving mirror 142 stops at the third place or the 4th position.
Referring again to Fig. 1, reflecting mirror 143 is set to the second outbound course of the second rotatable mirror 142, and reflecting mirror 143
The plane of incidence and the second rotatable mirror 142 the second outbound course at 45 degree so that second laser by reflecting mirror 143 reflect
It is emitted afterwards along the direction vertical with the second outbound course of the second rotatable mirror 142.Reflecting mirror 143 is close to the second rotatable mirror
142 side is coated with 532nm high-reflecting film (R > 99.9%), and reflecting mirror 143 is used to reflect second that the second rotatable mirror 142 reflects
Laser, to export the second laser.
It should be noted that first laser output direction, second laser output direction, third laser output direction
It is identical.
It should be noted that in the present embodiment, first laser, second laser and third laser can arbitrarily switch, both
Exportable laser all the way (such as output first laser or third laser) can also export two-way laser simultaneously and (such as while export
First laser and second laser), it can be according to the actual use situation unrestricted choice of user.
It should be noted that in the present embodiment, first laser module 110 and the first rotatable mirror 141 can be integrated into
1064nm fundamental frequency light output laser module;Second laser module 120, the second rotatable mirror 142 and reflecting mirror 143 can be integrated into
532nm green light exports laser module;Third laser module 130 can be integrated into 355nm and frequency light path module, product modular degree
Height is not only convenient for modularized production, and can find out fault point by detecting respective optical path respectively, upgrades convenient for the later period and ties up
It repairs.Optionally, as shown in Figure 1, solid state laser 100 can also include: first laser input module 151 and second laser input
Module 152.First laser input module 151 is semiconductor laser, and first laser input module 151 is set to first laser module
110 input terminal, for being generated and transmitted by first laser light source.In the present embodiment, first laser light source is 808nm laser.
Second laser input module 152 is semiconductor laser, and second laser input module 152 is set to the defeated of second laser module 120
Enter end, for being generated and transmitted by second laser light source.In the present embodiment, second laser light source is 808nm laser.Certainly, exist
In some embodiments, first laser light source and second laser light source can be identical, first laser input module 151 and second laser
Input module 152 is same laser input module, and same laser input module is divided into two-way and is exported respectively to first laser module
110 and second laser module 120.
Optionally, as shown in Figure 1, solid state laser 100 can also include: that the first focus module 161 and second focuses mould
Block 162.First focus module 161 is set between first laser input module 151 and first laser module 110, and first focuses mould
Block 161 is used to swash first laser light-resource fousing that first laser input module 151 emits to the first of first laser module 110
Luminescent crystal 112.Second focus module 162 is set between second laser input module 152 and second laser module 120, and second is poly-
Burnt module 162 is used for the second laser light-resource fousing that emits second laser input module 152 to the of second laser module 120
Dual-laser crystal 122.By the first focus module 161 of setting and the second focus module 162, the heat penetration of laser crystal can be reduced
Mirror effect improves the transfer efficiency of crystal.
Wherein, the first focus module 161 and the second focus module 162 can be identical focus module.Focus module by
Two planoconvex lens compositions being oppositely arranged, to be focused to laser beam.
Optionally, as shown in Figure 1, solid state laser 100 can also include: that the first condenser lens 171 and second focuses thoroughly
Mirror 172.First condenser lens 171 and the second condenser lens 172 can be convex lens, for being focused to light beam.First is poly-
The two sides of focus lens 171 are coated with 1064nm anti-reflection film (R < 0.2%), and the first condenser lens 171 is set to the first rotatable mirror
141 the second outbound course, and between the first rotatable mirror 141 and the second rotatable mirror 142.First condenser lens 171
First laser for penetrating the first rotatable mirror 141 focuses to the second rotatable mirror 142.Second condenser lens, 172 two sides
It is coated with 1064nm anti-reflection film (R < 0.2%) and 532nm anti-reflection film (R < 0.2%), the second condenser lens 172 is set to second can
First outbound course of revolving mirror 142, and between the second rotatable mirror 142 and third laser module 130.Second focuses thoroughly
Mirror 172 is for focusing to the first laser that the second rotatable mirror 142 reflects and the second laser that the second rotatable mirror 142 penetrates
Frequency tripling crystal 131.
Optionally, also referring to Fig. 1 and Fig. 5, solid state laser 100 can also include: controller 180.Controller 180
It connect with the first rotatable mirror 141 and the second rotatable mirror 142, controller 180 is used for: being exported when receiving first laser respectively
When instruction, the rotatable rotation of mirror 141 of control first to first position;When receiving second laser output order, control second
Rotatable mirror 142 is rotated to the 4th position;When receiving third laser output order, the rotatable mirror 141 of control first rotates
To the second position, while the second rotatable rotation of mirror 142 is controlled to the third place.
Wherein, controller 180 can receive first laser output order and second laser output order simultaneously or respectively,
When controller 180 receives first laser output order and second laser output order simultaneously, controller 180 controls first simultaneously
Rotatable mirror 141 and the second rotatable mirror 142, so that first laser and second laser export simultaneously;When controller 180 connects respectively
When receiving first laser output order and second laser output order, controller 180 controls the first rotatable mirror 141 and second respectively
Rotatable mirror 142, so that first laser and second laser export respectively.
Wherein, when controller 180 receives first laser output order and second laser output order simultaneously or respectively,
The parameter regulations such as modulating frequency, output power, pulsewidth, the optical quality of optical path of optical path and second laser of first laser are mutual
It is independent, it is unaffected each other.
Wherein, when controller 180 receives third laser output order, the rotatable rotation of mirror 141 of control first to second
Position, while the second rotatable rotation of mirror 142 is controlled to the third place, at this point, the first rotatable mirror 141 and the second rotatable mirror
142 position, rotation mode, the space angle in the respective optical path etc. is completely the same, and the optical path of first laser and the
The modulating frequency of the optical path of dual-laser is identical, so that the power density ratio of each output laser is close to ideal value
(1:1).
Optionally, controller 180 is also used to: record first position, the second position, the third place and/or the 4th position.It is logical
The position of the rotatable mirror work of overwriting, as the first position of default, the second position, the third place and/or the 4th
It sets, when receiving first laser output order, second laser output order and/or third laser output order again, by first
Rotatable mirror 141 and/or the second rotatable rotation of mirror 142 are to the first position of default, the second position, the third place and/or the
Four positions.
Optionally, controller 180 is also used to: when the first rotatable mirror 141 and/or the second rotatable work of mirror 142 are preset
Between after, control solid state laser 100 stop working.Wherein, preset time can be 90-110 hours, such as 100 hours, when the
After one rotatable mirror 141 and/or the second rotatable mirror 142 work 100 hours, 100 automatic shutdown of solid state laser is controlled, to prevent
It is only used for a long time and the first rotatable mirror 141 and/or the second rotatable mirror 142 is damaged.
Optionally, controller 180 is also used to: the work of the first rotatable mirror 141 of replacement and/or the second rotatable mirror 142
Point.Fixed when due to first position, the second position, the third place, four positions so that optical path act on first for a long time can
On certain points of revolving mirror 141 and/or the second rotatable mirror 142, it is easily damaged eyeglass, therefore, it is necessary to replace the work of eyeglass
Point, to extend the service life of eyeglass.The operating point of the first rotatable mirror 141 and/or the second rotatable mirror 142 is replaced, specifically
Embodiment can be with are as follows: default additional deflection angle is added into first position, the second position, the third place and/or the 4th position, with
Change operating position of the optical path on rotatable mirror.Wherein, presetting additional deflection angle can be -60 ° to+60 °.Such as: assuming that
Default additional deflection angle is+30 °, when the first rotatable mirror 141 is small using 100 after, 100 automatic shutdown of solid state laser, Gu
When body laser 100 turns back on, controller 180 receives first laser output order, and the control first of controller 180 is rotatable
+ 30 ° are rotated again after the rotation to first position of mirror 141, so that the position that first laser is injected on the first rotatable mirror 141 changes
Become.It is producer to extend the service life of solid state laser 100 to a certain extent by periodically changing a function
Reduce certain maintenance cost with user.
Optionally, in some other embodiments, in order to improve the automation of solid state laser 100, referring again to Fig. 5,
Controller 180 also with first laser module 110, second laser module 120, third laser module 130, first laser input module
151 and second laser input module 152 connect, controller 180 is also used to: in the first rotatable rotation of mirror 141 to first position
Or after the second position, control first laser input module 151 exports first laser light source, and controls first laser module 110
The first acousto-optic Q-switching 113 open, to export first laser to the first rotatable mirror 141;It is revolved in the second rotatable mirror 142
It goes to after the third place, the frequency tripling of two frequency-doubling crystals 124, third laser module 130 that control second laser module 120 is brilliant
Body 132 works, and after so that two frequency-doubling crystals 124, frequency tripling crystal 132 is reached default operating temperature, control first laser inputs mould
Block 151 exports first laser light source, second laser input module 152 exports second laser light source, and controls the first acousto-optic Q-switching
113, the second acousto-optic Q-switching 123 is opened, to export third laser;The second rotatable mirror 142 rotation to the 4th position it
Afterwards, two frequency-doubling crystals 124 work for controlling second laser module 120, after so that two frequency-doubling crystals 124 is reached default operating temperature,
It controls second laser input module 152 and exports second laser light source, and control the second acousto-optic Q-switching 123 and open, thus output the
Dual-laser.
It should be noted that in the present embodiment, the first rotatable mirror 141, the second rotatable mirror 142 can be rectangular mirror
Piece, realizes the switching in mirror portion by way of two-dimension translational, to realize that the first rotatable mirror 141, second can in this example
The function of revolving mirror 142.
It should be noted that in the present embodiment, when the increasing for being coated with anti-reflection film and high-reflecting film or two kinds of different wave lengths simultaneously
It can be the film that two films or one are provided simultaneously with two kinds of functions, Ke Yigen when the high-reflecting film of permeable membrane or two kinds of different wave lengths
It is selected according to actual conditions.
In the present embodiment, solid state laser 100 exports first laser, second laser mould by first laser module 110
Block 120 exports second laser, and the first rotatable mirror 141, the second rotatable mirror 142 are by rotating to different positions, to select
Selecting output first laser, perhaps the wavelength of third laser first laser or third laser is different, power density is roughly the same, solution
Fundamental frequency light of having determined and the lower problem of frequency multiplication optical power density, a machine can select the laser of output different wave length, laser
Power density it is high, improve the utilization rate and cost performance of product.
It should be noted that preferable embodiment of the invention is given in specification and its attached drawing of the invention, but
It is that the present invention can be realized by many different forms, however it is not limited to embodiment described in this specification, these realities
Mode is applied not as the additional limitation to the content of present invention, the purpose of providing these embodiments is that making in disclosure of the invention
The understanding of appearance is more thorough and comprehensive.Also, above-mentioned each technical characteristic continues to be combined with each other, and forms the various realities not being enumerated above
Mode is applied, the range of description of the invention record is accordingly to be regarded as;Further, for those of ordinary skills, Ke Yigen
It is improved or converted according to above description, and all these modifications and variations all should belong to the protection of appended claims of the present invention
Range.
Claims (10)
1. a kind of solid state laser characterized by comprising
First laser module is converted to first laser output for receiving first laser light source, and by the first laser light source;
First rotatable mirror, set on the output end of the first laser module, the first rotatable mirror is equipped with the first mirror portion, the
Two mirror portions and third mirror portion, first mirror portion and second mirror portion are set to the same side of the described first rotatable mirror, described
Third mirror portion is set to the other side of the described first rotatable mirror, and the first rotatable mirror is used for: when being located at first position, leading to
It crosses first mirror portion and reflects the first laser, make the first laser along the first outbound course of the described first rotatable mirror
Output when in the second position, is transmitted to export the first laser by second mirror portion and third mirror portion
The first laser exports the first laser along the second outbound course of the described first rotatable mirror;
Second laser module is converted to second laser output for receiving second laser light source, and by the second laser light source;
Second rotatable mirror, set on the second outbound course of the described first rotatable mirror and the output of the second laser module
End, the second rotatable mirror are equipped with the 4th mirror portion and the 6th mirror portion, and the 4th mirror portion and the 6th mirror portion are set to described
The opposite sides of second rotatable mirror, the second rotatable mirror are used for: when being located at the third place, passing through the 6th mirror portion
The first laser for reflecting the described first rotatable mirror transmission, makes the first laser along the first of the described second rotatable mirror
Outbound course output, and the second laser is transmitted by the 4th mirror portion, revolve the second laser can along described second
First outbound course of tilting mirror exports;
Third laser module, set on the first outbound course of the described second rotatable mirror, for receiving the first laser and institute
Second laser is stated, and the first laser and the second laser are converted into the output of third laser, to export the third
Laser.
2. solid state laser according to claim 1, which is characterized in that the second rotatable mirror is additionally provided with the 5th mirror
Portion, the 5th mirror portion and the 4th mirror portion are located at the same side of the described second rotatable mirror, and the second rotatable mirror is also
For: when being located at four positions, the second laser is reflected by the 5th mirror portion, makes the second laser along described the
Second outbound course of two rotatable mirrors exports;
The solid state laser further include: reflecting mirror;The reflecting mirror is set to the second outbound course of the described second rotatable mirror,
The reflecting mirror is used for: the second laser is reflected, to export the second laser.
3. solid state laser according to claim 2, which is characterized in that the first laser module includes setting gradually
: the first total reflective mirror, first laser crystal, the first acousto-optic Q-switching, the first outgoing mirror;
First total reflective mirror is used to penetrate the first laser light source;The first laser crystal by described first for being all-trans
The first laser light source that mirror penetrates is converted to the first laser;First acousto-optic Q-switching is used for will be continuous described
First laser is modulated to the first laser of pulse;First outgoing mirror is used to penetrate the first laser, so that described
First laser is exported to the described first rotatable mirror;
First total reflective mirror is also used to reflect the first laser light source, and first outgoing mirror is also used to reflect described first
Laser light source, so that first total reflective mirror and first outgoing mirror form the resonant cavity of the first laser, to not turn
The first laser light source of the first laser is changed into first total reflective mirror, the first laser crystal, the first acousto-optic Q
It is vibrated between switch, first outgoing mirror.
4. solid state laser according to claim 2, which is characterized in that the second laser module includes setting gradually
: the second total reflective mirror, second laser crystal, the second acousto-optic Q-switching, two frequency-doubling crystals, the second outgoing mirror;
Second total reflective mirror is used to penetrate the second laser light source;The second laser crystal by described second for being all-trans
The second laser light source that mirror penetrates is converted to the first laser;Second acousto-optic Q-switching is used for will be continuous described
First laser is modulated to the first laser of pulse;Two frequency-doubling crystal is used to being converted to the first laser into described the
Dual-laser;Second outgoing mirror is used to penetrate the second laser, so that the second laser, which is exported to described second, to revolve
Tilting mirror;
Second total reflective mirror is also used to reflect the first laser light source, and second outgoing mirror is also used to reflect described first
Laser light source, so that first total reflective mirror and first outgoing mirror form the resonant cavity of the second laser, to not turn
The first laser for changing the second laser into is opened in first total reflective mirror, the first laser crystal, the first acousto-optic Q
It closes, vibrated between first outgoing mirror.
5. solid state laser according to claim 2, which is characterized in that the solid state laser further include:
First laser input module, set on the input terminal of the first laser module, for being generated and transmitted by the first laser
Light source;
Second laser input module, set on the input terminal of the second laser module, for being generated and transmitted by the second laser
Light source.
6. solid state laser according to claim 5, which is characterized in that the solid state laser further include:
First focus module is set between the first laser input module and the first laser module, for by described the
One laser light source focuses to the first laser module;
Second focus module is set between the dual-laser input module and the second laser module, is used for described second
Laser light source focuses to the second laser module.
7. solid state laser according to claim 2, which is characterized in that the third laser module includes: frequency tripling crystalline substance
Body and third outgoing mirror;
The frequency tripling crystal is set to the first outbound course of the described second rotatable mirror, and the frequency tripling crystal is used for will be described
First laser and the second laser are converted to third laser;
The third outgoing mirror is used to penetrate the third laser, to export the third laser.
8. solid state laser according to claim 7, which is characterized in that the third laser module further include: hot spot is whole
Shape submodule;
The spot shaping submodule is set to the one end of the third outgoing mirror far from the frequency tripling crystal, the spot shaping
Submodule is used to carry out shaping to the third laser.
9. solid state laser according to claim 7, which is characterized in that the solid state laser further include:
First condenser lens, set on the second outbound course of the described first rotatable mirror, for the described first rotatable mirror is saturating
The first laser crossed focuses to the described second rotatable mirror;
Second condenser lens, set on the first outbound course of the described second rotatable mirror, for the described second rotatable mirror is anti-
The second laser that the first laser and the second rotatable mirror penetrated penetrate focuses to the third laser module.
10. according to the described in any item solid state lasers of claim 2-9, which is characterized in that the solid state laser further include:
Controller;
The controller is connect with the described first rotatable mirror and the second rotatable mirror respectively, and the controller is used for: when
When receiving first laser output order, controls the first rotatable mirror and rotate to the first position;When receiving second
When laser output order, controls the second rotatable mirror and rotate to the 4th position;Refer to when receiving the output of third laser
When enabling, controls the first rotatable mirror and rotate to the second position, while controlling the described second rotatable mirror and rotating to institute
State the third place.
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WO2020114468A1 (en) * | 2018-12-05 | 2020-06-11 | 苏州创鑫激光科技有限公司 | Solid laser device |
CN114094431A (en) * | 2021-10-30 | 2022-02-25 | 深圳中科飞测科技股份有限公司 | Laser beam optimizing device and laser |
CN114094430A (en) * | 2021-10-30 | 2022-02-25 | 深圳中科飞测科技股份有限公司 | Laser regulation and control method based on frequency conversion crystal point changing and storage medium |
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