CN114094431A - Laser beam optimizing device and laser - Google Patents
Laser beam optimizing device and laser Download PDFInfo
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/136—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
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Abstract
The utility model provides a laser beam optimizing apparatus and laser instrument, wherein, laser beam optimizing apparatus is including being used for changing frequency conversion into the frequency conversion module of frequency multiplication light output with basic frequency light frequency conversion, a detection module and the temperature control module who is connected with the frequency conversion module that are used for obtaining the first index information of frequency multiplication light, the frequency conversion module can move in presetting planar coordinate system in controllable way, in order to switch its work position point location that is used for receiving the basic frequency light, the temperature control module is used for when first index information does not reach and predetermines the requirement, can controllably adjust the temperature of frequency conversion module, in order to optimize the frequency conversion performance of frequency conversion module. The closed-loop temperature regulation and control framework formed by the frequency conversion module, the temperature control module and the first detection module is utilized, the performance of the frequency doubling light can be detected and optimized in real time after point changing, so that the influence of the point changing on output laser can be reduced or even eliminated, and the laser can stably output high-performance laser.
Description
Technical Field
The invention relates to the technical field of laser, in particular to a laser beam optimization device and a laser.
Background
Ultraviolet lasers are widely applied to the fields of industry, medical treatment, military, exploration, scientific research and the like due to the advantages of short wavelength, small facula, good aggregative property, high peak power and the like. In order to obtain high-power laser light, the laser wavelength is usually frequency-converted by means of a frequency conversion crystal material (i.e., a frequency conversion crystal or a frequency doubling crystal) in the laser, for example, 532nm light is frequency-converted to 266nm light. Under the influence of factors such as short ultraviolet laser wavelength, defects of the frequency conversion crystal material, the position of the optical path and the like, the frequency conversion crystal is easy to be damaged during long-term operation, so that the frequency conversion crystal has dead spots, and the occurrence of the dead spots can cause the quality of laser to be poor, the service life of the laser to be shortened and the like.
In view of the fact that the area damaged by the laser beam (or the area of the defective spot) only occupies a small part of the cross-sectional area of the frequency conversion crystal, in the prior art, the frequency conversion crystal is usually subjected to the spot changing treatment, so that the frequency conversion crystal or the laser can meet the requirement of long-time stable operation application. However, the change of the spot is often accompanied by the change of the beam quality and the beam power, and in the fields of precise detection measurement, precise processing and the like which have high requirements on the beam, the precision of the detection or processing and the stability of the application of a laser or equipment are directly influenced.
Disclosure of Invention
The invention mainly solves the technical problem of providing a laser beam optimization device and a laser applying the optimization device so as to reduce the influence of a change point on a beam.
According to a first aspect, there is provided in an embodiment a laser beam optimization apparatus comprising:
the frequency conversion module is used for receiving the fundamental frequency light and converting the fundamental frequency light into frequency doubling light to be output, and the frequency conversion module can controllably move in a preset plane coordinate system so as to switch the working point position of the frequency conversion module for receiving the fundamental frequency light;
the first detection module is used for receiving at least part of frequency doubling light output by the frequency conversion module so as to obtain first index information of the frequency doubling light; and
the temperature control module is connected with the frequency conversion module and used for controllably adjusting the temperature of the frequency conversion module when the first index information does not meet a first preset requirement so as to optimize the frequency conversion performance of the frequency conversion module.
In one embodiment, the first index information includes quality information and power information of the frequency doubled light, and the first preset requirement includes a preset quality requirement and a preset power requirement; the frequency conversion module is used for:
when the quality information of the frequency doubling light does not reach the preset quality requirement and/or the power information does not reach the preset power requirement, the temperature of the frequency conversion module can be controllably adjusted in a preset period until the quality information of the frequency doubling light reaches the preset quality requirement and the power information reaches the preset power requirement.
In one embodiment, the frequency conversion module is configured to: after a preset period, if the quality information of the frequency doubling light does not reach a preset quality requirement and/or the power information does not reach a preset power requirement, the current working point position can be controllably switched to the next working point position.
In one embodiment, the laser module further comprises a first optical path module arranged at the side of the frequency-doubled light of the frequency conversion module, wherein the first optical path module can reflect at least part of the frequency-doubled light to form a first laser light output along a first path and a second laser light output along a second path; the first detection module includes:
a first quality detection member for receiving the first laser light to acquire quality information of the frequency doubled light, the first quality detection member being disposed on a first path; and
and the first power detection part is used for receiving the second laser to acquire the power information of the frequency doubled light, and the first power detection part is arranged on a second path.
In one embodiment, the first optical path module comprises a first wedge-shaped mirror fixedly arranged on the side of the frequency-doubling light output end of the frequency conversion module; the first wedge mirror is used for reflecting a part of the frequency doubled light to output the first laser light and the second laser light; the first wedge mirror is also used for transmitting another part of the frequency-doubled light to form third laser light output along a third path.
In one embodiment, the method further comprises:
the second optical path module is arranged at the frequency-doubled light output end of the frequency conversion module and used for reflecting the frequency-doubled light in the output light beam of the frequency conversion module so as to form fourth laser output along a fourth path; the second optical path module is further configured to transmit fundamental frequency light in the output beam of the frequency conversion module to form fifth laser light output along a fifth path; and
and the first laser collection module is fixedly arranged on the fifth path and is used for collecting fifth laser.
In one embodiment, the frequency conversion module includes:
the frequency conversion crystal is used for receiving the fundamental frequency light and converting the fundamental frequency light into frequency doubling light to be output in a frequency conversion mode;
the point changing mechanism can controllably drive the variable frequency crystal to move in a preset plane coordinate system, and the variable frequency crystal is arranged on the point changing mechanism; and
and the temperature adjusting piece is arranged outside the frequency conversion crystal, is connected with the temperature control module and is used for heating or cooling the frequency conversion crystal under the control of the temperature control module.
In one embodiment, the frequency conversion crystal has opposing first and second ends, and the frequency conversion module further comprises:
the light reflecting piece is arranged at the first end side of the frequency conversion crystal and is used for reflecting the fundamental frequency light and the frequency doubling light output by the first end of the frequency conversion crystal so that the fundamental frequency light and the frequency doubling light are incident on the frequency conversion crystal again, and the fundamental frequency light is converted into the frequency doubling light to the maximum extent; and
a light splitting member arranged at a second end side of the frequency conversion crystal, the light splitting member being used for transmitting the fundamental frequency light so that the fundamental frequency light is incident from a second end of the frequency conversion crystal; the light splitting component is also used for reflecting the frequency doubling light output by the second end of the frequency conversion crystal, so that at least one part of the frequency doubling light is received by the first detection module.
In one embodiment, the detection device further comprises a control module, the frequency conversion module, the temperature control module and the first detection module are respectively connected to the control module, and the control module is configured to:
acquiring first index information output by the first detection module, and judging whether the first index information meets a first preset requirement; when the first index information does not meet a first preset requirement, the control module can control the temperature control module to adjust the temperature of the variable frequency crystal or control the variable frequency module to switch working point positions.
According to a second aspect, there is provided in an embodiment a laser comprising:
frequency doubling light optimization means for receiving a part of the fundamental frequency light output from the laser light source and frequency-converting the fundamental frequency light into an output of frequency doubling light, the frequency doubling light optimization means employing the laser beam optimization apparatus according to any one of claims 1 to 8; and
the fundamental frequency light detection device is used for receiving another part of the fundamental frequency light output by the laser light source so as to acquire second index information of the fundamental frequency light;
and when the second index information does not meet a second preset requirement, the fundamental frequency light detection device can controllably intercept fundamental frequency light entering the frequency conversion module, or the laser light source can controllably close the fundamental frequency light output.
In one embodiment, the fundamental frequency light detection means includes:
the second detection module is used for receiving at least part of the fundamental frequency light so as to obtain second index information of the fundamental frequency light; and
a third optical path module disposed between a fundamental light receiving end of the frequency conversion module and a laser light source, the third optical path module configured to: a sixth laser capable of transmitting a portion of the fundamental light to form a sixth laser output along a sixth path and received by the frequency conversion module; and can simultaneously reflect another portion of the fundamental light to form a seventh laser light that is output along a seventh path and received by the second detection module.
In one embodiment, the third optical path module has a first mirror portion and a second mirror portion, and the third optical path module is movably arranged between the fundamental frequency light receiving end of the frequency conversion module and the laser light source relative to the frequency conversion module so as to be capable of alternatively switching the first mirror portion and the second mirror portion to the optical path of the fundamental frequency light;
when the first mirror part is switched to the optical path of the fundamental frequency light, the first mirror part can transmit one part of the fundamental frequency light to output sixth laser light and can simultaneously reflect the other part of the fundamental frequency light to output seventh laser light;
when the second mirror part is switched to the light path of the fundamental frequency light, the second mirror part can cut the fundamental frequency light entering the frequency conversion module.
In one embodiment, the third optical path module includes a second wedge-shaped mirror, the second wedge-shaped mirror is controllably rotatably arranged between the fundamental frequency light receiving end of the frequency conversion module and the laser light source, and a side of the second wedge-shaped mirror for receiving the fundamental frequency light has a first surface area and a second surface area; wherein:
the first surface area is plated with an antireflection film so as to form the first mirror part;
the second area is plated with a high-reflection film so as to form the second mirror part, and the second mirror part can totally reflect the fundamental frequency light to form eighth laser output along an eighth path.
In one embodiment, the fundamental frequency light detection apparatus further includes a second laser collection module fixedly disposed on the eighth path, and the second laser collection module is configured to collect eighth laser light.
In one embodiment, the second index information includes quality information and power information of the fundamental frequency light, and the second detection module includes:
the light path conversion member is arranged on the seventh path and is used for converting seventh laser light into first fundamental frequency laser light and second fundamental frequency laser light to be output;
the second quality detection piece is used for receiving the first fundamental frequency laser to acquire quality information of the fundamental frequency laser, and the second quality detection piece is arranged on the optical path of the first fundamental frequency laser; and
and the second power detection part is used for receiving the second fundamental frequency laser to acquire the power information of the fundamental frequency laser, and the second power detection part is arranged on the optical path of the second fundamental frequency laser.
In one embodiment, the optical signal processing device further comprises a control device, the frequency doubling optical optimization device and the fundamental frequency optical detection device are respectively connected to the control device, and the control device is configured to:
acquiring first index information output by the first detection module, and judging whether the first index information meets a first preset requirement; when the first index information does not meet a first preset requirement, the control device can control the temperature control module to adjust the temperature of the frequency conversion module or control the frequency conversion module to switch the working point position; and
the second index information is used for acquiring the second index information output by the fundamental frequency optical detection device and judging whether the second index information meets a second preset requirement; and when the second index information does not meet a second preset requirement, the control device can control the fundamental frequency light detection device to cut off the fundamental frequency light entering the frequency conversion module, or control the laser light source to close the fundamental frequency light output.
In one embodiment, the laser further comprises a beam stabilizing device for receiving the frequency-doubled light output by the frequency-doubled light optimizing device to monitor and regulate the pointing direction of the frequency-doubled light, so as to enable the laser to output the frequency-doubled light, and the beam stabilizing device is arranged at the output end of the frequency-doubled light optimizing device.
According to the laser beam optimization device of the embodiment, the laser beam optimization device comprises a frequency conversion module, a first detection module and a temperature control module, wherein the frequency conversion module is used for converting the frequency conversion of the fundamental frequency light into the frequency multiplication light to be output, the first detection module is used for obtaining first index information of the frequency multiplication light, the temperature control module is connected with the frequency conversion module, the frequency conversion module can controllably move in a preset plane coordinate system to switch working point positions of the frequency conversion module for receiving the fundamental frequency light, and the temperature control module is used for controllably adjusting the temperature of the frequency conversion module when the first index information does not reach the preset requirement to optimize the frequency conversion performance of the frequency conversion module. The closed-loop temperature regulation and control framework formed by the frequency conversion module, the temperature control module and the first detection module is utilized, the performance of the frequency doubling light can be detected and optimized in real time after point changing, so that the influence of the point changing on output laser can be reduced or even eliminated, the laser can stably output high-performance laser, and the high requirements of the fields such as precision detection measurement and precision machining on the laser performance can be met.
Drawings
Fig. 1 is a schematic diagram of an optical path system of a laser beam optimization apparatus according to an embodiment.
Fig. 2 is a schematic optical path diagram of a frequency conversion module in the laser beam optimization apparatus according to an embodiment.
Fig. 3 is a schematic diagram of an optical path of a first wedge mirror in the laser beam optimization apparatus according to an embodiment.
Fig. 4 is a flowchart of a method for controlling the laser beam optimization apparatus according to an embodiment.
Fig. 5 is a schematic structural distribution diagram of components in a laser according to an embodiment.
Fig. 6 is a schematic diagram of an optical path system of a laser according to an embodiment.
FIG. 7 is a schematic block diagram of a control system for a laser according to an embodiment.
FIG. 8 is a schematic structural diagram of a second wedge mirror in the laser according to an embodiment.
Fig. 9 is a schematic diagram (a) of the optical path of the second wedge mirror in the laser according to an embodiment.
Fig. 10 is a schematic diagram (two) illustrating the optical path principle of the second wedge mirror in the laser according to the embodiment.
Fig. 11 is a flowchart of a method for controlling a laser according to an embodiment.
In the figure:
A. a frequency doubling light optimizing device; 10. a frequency conversion module; 11. a frequency conversion crystal; 12. a point changing mechanism; 13. a temperature adjustment member; 14. a light reflecting member; 15. a light splitting member; 15a, a first surface; 15b, a second surface; 20. a first detection module; 21. a first mass detecting member; 22. a first power detecting element; 30. a temperature control module; 40. a first light path module; 40a, a first mirror surface; 40b, a second mirror surface; 50. a second optical path module; 60. a first laser collection module;
B. a fundamental frequency light detection device; 70. a second detection module; 71. a light path conversion member; 72. a second mass detecting member; 73. a second power detection element; 80. a third optical path module; 80a, a first area; 80b, a second area; 81. a first mirror portion; 82. a second mirror portion; 140. a second laser collection module;
C. a light beam stabilizing device; 90. a first automatically adjusting mirror; 100. a second automatically adjusting mirror; 110. a first four-quadrant detector; 120. a second four-quadrant detector; 130. a beam splitter;
D. a control device; E. a laser light source; l1, first laser; l2, second laser; l3, third laser; l4, fourth laser; l5, fifth laser; l6, sixth laser; l7, seventh laser; l8, eighth laser; l9, laser of first fundamental frequency; l10, second fundamental laser.
Detailed Description
The present invention will be described in further detail with reference to the following detailed description and accompanying drawings. Wherein like elements in different embodiments are numbered with like associated elements. In the following description, numerous details are set forth in order to provide a better understanding of the present application. However, those skilled in the art will readily recognize that some of the features may be omitted or replaced with other elements, materials, methods in different instances. In some instances, certain operations related to the present application have not been shown or described in detail in order to avoid obscuring the core of the present application from excessive description, and it is not necessary for those skilled in the art to describe these operations in detail, so that they may be fully understood from the description in the specification and the general knowledge in the art.
Furthermore, the features, operations, or characteristics described in the specification may be combined in any suitable manner to form various embodiments. Also, the various steps or actions in the method descriptions may be transposed or transposed in order, as will be apparent to one of ordinary skill in the art. Thus, the various sequences in the specification and drawings are for the purpose of describing certain embodiments only and are not intended to imply a required sequence unless otherwise indicated where such sequence must be followed.
The numbering of the components as such, e.g., "first", "second", etc., is used herein only to distinguish the objects as described, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings).
The term "fundamental frequency light" used herein refers to the original laser light output by the laser light source, and the term "frequency doubling light" used herein refers to the laser light output by the frequency-variable crystal material after the fundamental frequency light is subjected to frequency conversion (such as frequency doubling, frequency combination, etc.); for example, a 266nm laser is taken as an example, the wavelength of fundamental frequency light output by a laser light source is usually 532nm, and after frequency conversion, the wavelength of frequency doubled light output by the laser is 266nm finally; for another example, taking a 355nm laser as an example, the wavelength of the fundamental frequency light output by the laser light source is usually 1064nm, frequency doubling of the 1064nm light generates 532nm light, and then the 1064nm light and the 532nm light are combined to generate 355nm light, and the wavelength of the frequency doubled light finally output by the laser is 355 nm.
The laser beam optimization device provided by the application aims at the problem that laser output by a laser cannot meet application requirements due to poor beam quality, reduced beam power and the like because the beam quality, the power and the like of the laser are different from those before point changing or preset standards due to the change of laser performance after the point changing of the laser; the performance index of the laser beam output after the point of the laser is changed is detected, and the laser beam is automatically optimized and regulated according to the detection result, so that the laser can be ensured to stably output the high-quality laser beam, and the strict requirements of the fields such as semiconductor and the like on the laser performance in the aspects of precision detection, measurement and processing are met.
Example one
Referring to fig. 1 to 4, a first embodiment of the present application provides a laser beam optimization apparatus, which includes a frequency conversion module 10, a first detection module 20, and a temperature control module 30; the following are described separately.
Referring to fig. 1 and 2, the frequency conversion module 10 is mainly used for receiving the fundamental frequency light output by the laser light source and converting the fundamental frequency light into the frequency-doubled light output, for example, converting the 532nm fundamental frequency light into the 266nm frequency-doubled light output; in order to describe the overall structural function of the laser beam optimization device more clearly and in detail, the following description mainly takes 532nm fundamental frequency light and 266nm frequency doubling light as examples; however, the fundamental light and the frequency-doubled light output by the frequency conversion module may have other wavelengths according to actual needs, which depends on the specific selection of the laser light source and the frequency conversion module 10. The frequency conversion module 10 is constructed and configured to be controllably movable in the preset planar coordinate system, so that the working point position of the frequency conversion module 10 for receiving the fundamental frequency light can be switched by regulating and controlling the position of the frequency conversion module in the preset planar coordinate system.
It should be noted that the working point of the frequency conversion module 10 refers to a point where the fundamental frequency light can irradiate on the frequency conversion module 10 (specifically, the frequency conversion crystal material playing a role of frequency conversion), and the working point is usually multiple and has a corresponding coordinate position in a preset planar coordinate system.
In one embodiment, referring to fig. 1 and 2, the frequency conversion module 10 includes a frequency conversion crystal 11, a point changing mechanism 12, and a temperature adjusting member 13; wherein, the frequency conversion crystal 11 can adopt a frequency doubling crystal, a frequency quadrupling crystal and the like according to actual conditions; the frequency doubling crystal can be combined by BBO crystal, CLBO crystal and the like in a single or cascade mode; the frequency conversion crystal 11 can convert the fundamental frequency light into the frequency doubled light output, and the working point of the frequency conversion module 10 is the point on the frequency conversion crystal 11 where the fundamental frequency light can irradiate. The point changing mechanism 12 is mainly a mechanical structure capable of driving the frequency conversion crystal 11 to perform two-dimensional movement (such as up-down direction or left-right direction) in a preset plane coordinate system, and may be constructed by combining a moving platform for bearing the frequency conversion crystal 11, a power output device for driving the moving platform to perform two-dimensional movement to drive the frequency conversion crystal 11 to perform synchronous dimensional movement, and other components existing as required; the frequency conversion crystal 11 can be driven to move and stay at a preset position in a preset plane coordinate system by the point changing mechanism 13, so that the switching of the working point positions of the frequency conversion crystal 11 is realized, and one of the working point positions of the frequency conversion crystal 11 is positioned in the optical path of the fundamental frequency light or used for receiving the fundamental frequency light. The temperature adjusting part 13 is arranged outside the frequency conversion control crystal 11, can be formed by combining and building a semiconductor heating/refrigerating element, a heat preservation element and the like, and is mainly used for realizing temperature adjustment of the frequency conversion crystal 11, such as heating, refrigerating, heat preservation and the like; in specific implementation, the main body of the temperature adjusting element 13 may be a cylindrical structure, which has an inner space for housing the inverter crystal 11 and light inlets and outlets respectively located on the light emitting side and the light incident side of the inverter crystal 11, and the light inlets and outlets can provide structural convenience for the incident of the fundamental frequency light to the inverter crystal 11 and the output of the frequency doubled light from the inverter crystal 11.
The temperature of the frequency conversion crystal 11 and the conversion performance of the frequency conversion crystal to the fundamental frequency light have a corresponding relation; therefore, the temperature of the frequency conversion crystal 11 can be adjusted and maintained in a proper temperature value or temperature range by the temperature adjusting element 13, so that the performance of the frequency-doubled light converted and output by the frequency conversion crystal 11 is correspondingly changed.
Referring to fig. 1, the first detecting module 20 is mainly used for detecting the frequency-doubled light output by the frequency conversion module 10 to obtain index information of the frequency-doubled light (such as quality information, power information, or other performance information of the frequency-doubled light; for convenience of description, the index information is defined as first index information), the first detecting module 20 is disposed at the frequency-doubled light output end side of the frequency conversion module 10, and can obtain the first index information by receiving at least a part of the frequency-doubled light (such as a small amount of frequency-doubled light).
In one embodiment, referring to fig. 1, the first detecting module 20 includes a first quality detecting element 21 and a first power detecting element 22; the first quality detecting element 21 may adopt an energy measuring device including CDD and other components, and is configured to detect and obtain quality information (i.e., quality information of the frequency doubled light) in the first index information; the first power detecting element 22 may employ a power measuring element such as a photodetector for detecting and acquiring the power information (i.e., the power information of the frequency-doubled light) in the first index information. In specific implementation, a first optical path module 40 is disposed on the side of the frequency-doubled light output end of the frequency conversion module 10 (specifically, on the light-emitting side of the frequency conversion crystal 11), where the first optical path module 40 may be an optical element such as a spectroscope or a collection of optical elements, and the first optical path module 40 is used to perform a light-splitting process on the frequency-doubled light output by the frequency conversion module 10, so as to reflect a part of the frequency-doubled light, and form a first laser light L1 output along a first path and a second laser light L2 output along a second path; the first quality detection member 21 is disposed on the first path so as to acquire quality information of the frequency-doubled light by receiving the first laser light L1; and the first power detecting element 22 is disposed on the second path so as to acquire power information of the frequency-doubled light by receiving the second laser light L2.
It should be noted that the first path and the second path may be understood as a laser propagation path that is naturally formed when the first optical path module 40 reflects the light beam in two different directions or at two different angles.
In other embodiments, the first quality detecting element 21 and the first power detecting element 22 may be alternatively configured according to actual requirements, or a functional element capable of detecting other performance indexes of the frequency doubled light may be used instead of the first quality detecting element 21 and the first power detecting element 22.
Referring to fig. 1, the temperature control module 30 is mainly used for adjusting and controlling the temperature of the frequency conversion module 10, and implementing automatic optimization of the temperature of the frequency conversion module 10 (specifically, the frequency conversion crystal 11), so as to implement the frequency conversion performance of the frequency conversion crystal 11, and further implement the performance optimization adjustment of the frequency doubled light. In this embodiment, the temperature control module 30 is mainly constructed by combining related functional elements including a data processing device, and has functions of information/data analysis, comparison, judgment, temperature instruction output and the like, and the frequency conversion module 10 (specifically, the temperature adjustment device 13) and the first detection module 20 are respectively in signal connection with the temperature control module 30, so that the frequency conversion module 10, the first detection module 20 and the temperature control module 30 form a closed-loop temperature regulation and control system together; the temperature control module 30 may monitor the performance of the frequency-doubled light in real time through the first detection module 20, and after the temperature control module 30 receives the first index information detected by the first detection module 20, determine whether the first index information meets a first preset requirement by analyzing the first index information and comparing the first index information with the preset requirement (for convenience of description, the requirement is defined as a first preset requirement); when the first index information does not meet a first preset requirement (for example, quality deterioration, power reduction, and the like of the frequency doubling light), the temperature of the frequency conversion module 10 can be regulated and controlled, and when the first index information meets the first preset requirement, the temperature regulation of the frequency conversion module 10 is stopped, so that the frequency conversion module 10 is kept at the current temperature, and thus, the performance optimization of the frequency doubling light is completed.
In specific implementation, the temperature control module 30 may be connected to a background device (e.g., a PC end), and in the performance optimization process of the frequency doubling light, the temperature control module 30 transmits data, such as the first index information acquired by the first detection module 20 in real time and the temperature information of the frequency conversion module 10, to the background device in the form of a log; if the first index information cannot meet the first preset requirement all the time within a certain adjustment period, it indicates that the current working point location of the frequency conversion module 10 is too long in service time and is close to the service life of the frequency conversion module, and at this time, the background device may control the frequency conversion module 10 to perform a point switching action, so as to switch the frequency conversion module 10 from the current working point location to the next working point location.
In another embodiment, the related functions of the background device may also be integrated on the temperature control module 30, so that the temperature control module 30 has functions of data storage and control instruction output, and the like, and by connecting the temperature adjusting part 13 and the point changing mechanism 12 of the frequency conversion module 10 with the temperature control module 30, the temperature control module 30 can have the capability of temperature regulation and control on the frequency conversion module 10, and can also directly perform point changing control on the frequency conversion module 10. In this embodiment, although the complexity of the system structure and the operation method of the temperature control module 30 is increased, it is advantageous to design the temperature control module 30 and the entire laser beam optimization apparatus intelligently and integrally.
In other embodiments, the temperature control module 30 may also adopt a switch module capable of controlling the temperature of the frequency conversion module 10 by receiving an external control instruction; at this time, a control module independent of the temperature control module 30 may be provided, and the control module may be formed by combining functional devices such as a data processor, and the frequency conversion module 10, the first detection module 20 and the temperature control module 20 are combined by the control module to form a closed-loop temperature regulation control system; the control module is used for controlling the first detection module 20 to monitor the frequency doubled light in real time, and analyzing and comparing first index information output by the first detection module 20 with a first preset requirement; when the first index information does not meet a first preset requirement (for example, quality deterioration, power reduction, and the like of the frequency doubling light), the control module may issue a temperature adjustment instruction to the temperature control module 30, adjust the temperature of the frequency conversion module 10 by means of the temperature control module 30, and control the temperature control module 30 to stop temperature adjustment and control of the frequency conversion module 10 until the first index information meets the first preset requirement, so that the frequency conversion module 10 is kept at the current temperature, thereby completing performance optimization of the frequency doubling light. Similar to the foregoing embodiment, when the first index information cannot meet the first preset requirement all the time, the external control device or the control module itself may control the frequency conversion module 10 to switch the working point location.
In an embodiment, referring to fig. 4 in combination with fig. 1 to 3, the laser beam optimization apparatus can perform the optimized regulation of the laser beam by referring to the following method; the method includes steps 100 through 500, which are described separately below.
Usually, the laser source may be controlled to turn off the output of the fundamental frequency light by automatic control or manual control, or an optical path switching device such as an optical shutter may be disposed at the fundamental frequency light receiving end of the frequency conversion module 10, so as to block the fundamental frequency light output by the laser source by the optical path switching device, so that the fundamental frequency light cannot enter the frequency conversion module 10.
And 200, controlling the frequency conversion module 10 to switch the working point positions.
Based on the difference of the function configuration of the temperature control module 30 in the optimization device, the temperature control module 30, or the configured control module, or the external control device, drives the point changing mechanism 12 to move according to a preset program, so that the point changing mechanism drives the main body portion (i.e., the frequency conversion crystal 11) of the frequency conversion module 10 to move in a preset planar coordinate system, so as to switch one working point location of the frequency conversion crystal 11 to a preset coordinate location (the location is on the optical path of the fundamental frequency light), and regard the working point location at this time as the current working point location of the frequency conversion crystal 11.
And restarting the laser light source or removing the truncation of the light path switching device on the fundamental frequency light to enable the fundamental frequency light to enter the frequency conversion crystal through the current working point position of the frequency conversion crystal 11, so that the received frequency conversion light is converted into the frequency doubling light to be output by utilizing the frequency conversion crystal 11.
The first optical path module 40 disposed at the side of the frequency doubling light output end of the frequency conversion crystal 11 is used to split the frequency doubling light, so that a part of the frequency doubling light is incident to the first quality detection element 21 and the first power detection element 22, respectively, and thereby the frequency doubling light quality information and the frequency doubling light power information in the first index information are obtained. The temperature control module 30, the control module or the external control element and the like acquire the frequency doubling light quality information output by the first quality detection element 21 and the frequency doubling light power information output by the first power detection element 20; judging whether the frequency doubling light quality information and the frequency doubling light power information meet a first preset requirement, wherein the first preset requirement comprises a preset quality requirement of the frequency doubling light and a preset power requirement of the frequency doubling light, and the preset quality requirement is a preset quality target range and comprises a lower limit quality value and an upper limit quality value; accordingly, the preset power requirement is also a preset power target range, which includes a lower power limit value and an upper power limit value.
And 500, when the first index information does not meet the first preset requirement, regulating and controlling the temperature of the frequency conversion crystal 11.
When the quality information of the frequency doubling light does not meet the preset quality requirement in the first preset requirement and/or the power information of the frequency doubling light does not meet the preset power requirement in the first preset requirement, the temperature of the frequency conversion crystal 11 is adjusted through the temperature control module 30 within a preset period until the quality information of the frequency doubling light meets the preset quality requirement and the power information of the frequency doubling light meets the preset power requirement, the temperature adjustment of the frequency conversion crystal 11 is stopped and the temperature of the frequency conversion crystal 11 is kept at the current temperature value, so that the optimized adjustment of the performance of the frequency doubling light is realized. Of course, there may be a case where the quality information of the frequency doubled light first reaches the preset quality requirement or the power information of the frequency doubled light first reaches the preset power requirement, and at this time, the temperature of the frequency conversion crystal 11 may be continuously adjusted until the quality information and the power information of the frequency doubled light simultaneously reach the corresponding requirements in the first preset requirement.
It should be noted that the mentioned "preset period" refers to a period for adjusting the temperature of the frequency conversion crystal 11, and the period may be a temperature range, and when adjusting the temperature of the frequency conversion crystal 11, the actual temperature value of the frequency conversion crystal 11 traverses each preset temperature value in the temperature range; for example, the lower limit of the temperature range is 30 ℃, the upper limit is 70 ℃, and the temperature values set in the range are 35 ℃, 40 ℃, 50 ℃, 55 ℃, 60 ℃ and 65 ℃; in this way, adjusting the temperature of the inverter crystal 11 within the preset period means adjusting the temperature of the inverter crystal 11 to one or more preset temperature values within the temperature range. The period may also be a time period, in which the frequency conversion crystal 11 is gradually heated or cooled according to a quantitative temperature value.
After the preset period, if the quality information and the power information of the frequency doubled light cannot simultaneously meet the preset requirement, the steps 100 to 400 are executed again.
In summary, by using the closed-loop temperature regulation and control system formed by the frequency conversion module 10, the first detection module 20 and the temperature control module 30, the performance of the frequency doubling light output by the frequency conversion module 10 can be detected in real time after the laser or the frequency conversion module 10 is switched, and once the conditions of quality reduction, power reduction and the like of the frequency doubling light occur after the switching, the temperature of the frequency conversion crystal 10 can be timely regulated and controlled, so that the performance of the frequency doubling light such as quality and power is optimized, the influence of the switching on the output laser is reduced or even eliminated, and the laser can be effectively ensured to stably output high-performance laser, thereby creating conditions for the application of the laser in the fields of precision detection, measurement, processing and the like.
Because the frequency conversion crystal 11 is a nonlinear optical crystal, the fundamental frequency light is focused and then enters the frequency conversion crystal 11, and under the condition of meeting the phase matching, the residual fundamental frequency light after the nonlinear process and the frequency conversion-generated frequency doubling light exist in the laser beam emitted from the frequency conversion crystal 11; in other words, the frequency conversion crystal 11 is generally unable to convert all of the fundamental frequency light into the doubled frequency light at one time, so that the doubled frequency light and the fundamental frequency light are both present in the laser beam output from the frequency conversion crystal 11. In view of this, how to increase the frequency conversion efficiency of the frequency conversion module 10 to convert the fundamental frequency light into the frequency-doubled light to the maximum extent to realize the full utilization of the fundamental frequency light has become a technical problem to be faced and solved in the present application or industry.
In one embodiment, referring to fig. 2, the frequency conversion module 10 further includes a light reflecting member 14 and a light splitting member 15; wherein, the frequency conversion crystal 11 has two opposite ends, and for the convenience of description, one end is defined as a first end of the frequency conversion crystal 11, and the other end opposite to the first end is defined as a second end; the reflecting member 14 is an optical element having a high reflectance for both the fundamental light and the frequency doubled light, such as a concave mirror or a flat mirror; the reflector 14 is disposed at the first end side of the frequency conversion crystal 11, and is configured to reflect the frequency-doubled light output by the first end of the frequency conversion crystal 11 and the remaining unconverted fundamental light, so that the frequency-doubled light and the unconverted fundamental light are incident again on the frequency conversion crystal 11 from the first end of the frequency conversion crystal 11, and thus the unconverted fundamental light is subjected to a frequency conversion process again, and finally the fundamental light is converted into the frequency-doubled light to the maximum. The light splitting element 15 is an optical element having a high transmittance for the fundamental frequency light and a high reflectance for the frequency doubled light, such as a light splitter having corresponding properties; in a specific selection of the configuration of the light-splitting member 15, the first mirror 15a and the second mirror 15b can be made to have a higher transmittance for the fundamental light and the second mirror 15b can be made to have a higher reflectance for the frequency doubled light by treating (e.g., plating a film layer of a material having a corresponding function on) two opposite surfaces of the light-splitting member 15 (one of the surfaces is defined as the first mirror 15a and the other surface is defined as the second mirror 15b for convenience of description).
In this way, the light splitting element 15 is arranged at the second end side of the frequency conversion crystal 11 (e.g., between the laser light source and the frequency conversion crystal 11), the fundamental frequency light emitted by the laser light source is transmitted through the first mirror surface 15a and the second mirror surface 15b of the light splitting element 15, and is incident to the frequency conversion crystal 11 from the second end of the frequency conversion crystal 11, so that the fundamental frequency light is subjected to the primary frequency conversion; under the cooperation of the reflector 14, the unconverted fundamental light and the unconverted doubled light enter the frequency conversion crystal 11 again for secondary frequency conversion, so that the fundamental light is converted into the doubled light to the maximum, and all the doubled light is output from the second end side of the frequency conversion crystal 11, at this time, the optical path of the doubled light is changed by the reflection of the second mirror 15b of the light splitter 15 to enable at least a part of the doubled light to enter the first detection module 20. Therefore, the conversion efficiency of the frequency conversion module 10 can be effectively improved through the configured light splitting piece 15 and the light reflecting piece 14, so that the fundamental frequency light can be fully or maximally converted into the frequency doubling light, and the utilization rate of the fundamental frequency light is improved.
In one embodiment, referring to fig. 1 and 3, the first optical path module 40 includes a wedge mirror for reflecting a portion of the frequency doubled light to directly output the first laser light L1 and the second laser light L2 along different paths, so as to provide for the first quality detecting element 21 and the first power detecting element 22 to acquire quality information and power information of the frequency doubled light, respectively, and at the same time, to transmit another portion of the frequency doubled light to provide for the application or final output of the frequency doubled light; the first wedge-shaped mirror is fixedly arranged at the side of the frequency doubling light output end of the frequency conversion module 10, and is provided with a first mirror surface 40a and a second mirror surface 40b which are distributed in an inclined manner and are respectively arranged at the front side and the rear side of the first wedge-shaped mirror; in terms of the whole first wedge-shaped mirror, at least one of the first mirror surface 40a and the second mirror surface 40b should be an inclined surface that is obliquely arranged, so that the first wedge-shaped mirror has a certain wedge angle (that is, the first mirror surface 40a and the second mirror surface 40b are in a non-parallel distribution state, and a certain included angle exists between the first mirror surface and the second mirror surface, and the included angle is the wedge angle of the first wedge-shaped mirror), and according to the distribution situation of the first quality detection part 21 and the first power detection part 22 in the whole device or according to the actual requirements such as the space environment where the whole device is applied, the wedge angle of the first wedge-shaped mirror can be selected as required, for example, 3 °; thus, when the frequency-doubled light is incident on the first wedge-shaped mirror, a part of the frequency-doubled light can be reflected by the first mirror surface 40a to form a first light beam; a portion of the frequency-doubled light entering the first wedge through the first mirror 40a may be reflected at the second mirror 40b, so that the portion of the frequency-doubled light is output through the first mirror 40a again to form a second light beam, and due to the existence of the wedge angle, the optical paths of the first light beam and the second light beam may be shifted, so that the first light beam and the second light beam may be divided into the first laser light L1 and the second laser light L2. Meanwhile, the frequency-doubled light transmitted through the second mirror 40b may form a third light beam, and the third light beam may serve as the third laser light L3 (accordingly, its optical path or output direction may be defined as a third path).
The outputs of the first laser L1, the second laser L2 and the third laser L3 can be realized simultaneously through the configured first wedge-shaped mirror, so that the requirements of the first quality detection piece 21 and the first power detection piece 22 for detecting the frequency doubling light and acquiring first index information simultaneously are met, and structural support is provided for the output of most of the frequency doubling light and subsequent calibration, application and the like; in view of the structural and functional characteristics of the first wedge-shaped mirror, the overall structural complexity of the optimization device can be effectively reduced, and the configuration number of optical elements can be reduced; in practice, the first wedge-shaped mirror may be made of Compressed Asbestos fiber (CaF) or fused silica.
In one embodiment, referring to fig. 1, the laser beam optimization apparatus further includes a second light path module 50 and a first laser collecting module 60; the second optical path module 50 is fixedly disposed at the side of the frequency-doubled light output end of the frequency conversion module 10, and is configured to separate the frequency-doubled light and the fundamental frequency light in the output light beam of the frequency conversion module 10, so as to enhance the purity or the singleness of the frequency-doubled light; the second optical path module 50 may be configured with reference to the form of the light splitting component 15 in the foregoing embodiments or adopt other forms of beam splitters or reflectors, and the main points are that: the second optical path module 50 is ensured to be capable of reflecting the frequency doubled light in the output beam of the frequency conversion module 10 to form the fourth laser light L4 output along the fourth path, and simultaneously capable of transmitting the fundamental frequency light in the output beam of the frequency conversion module 10 to form the fifth laser light L5 output along the fifth path. The first laser collecting module 60 is disposed on the fifth path, and is configured to absorb the fifth laser light L5 to shield the unconverted fundamental light, so as to prevent the fundamental light from irradiating other components in the optimization apparatus or causing interference with the finally applied doubled light. In general, the first laser collecting module 60 refers to a device or a material, such as a laser beam absorber, which can collect laser light and prevent the laser light from escaping.
In practical implementation, the second optical path module 50 and the first laser collecting module 60 may be sequentially disposed on the third path, where the third laser light L3 output along the third path is not substantially pure frequency-doubled light, and includes the remaining fundamental frequency light without being frequency-converted; therefore, the second optical path module 50 can separate the frequency-doubled light from the third laser light L3 and the fundamental frequency light, and the first laser collection module 60 can collect the remaining fundamental frequency light in a shielding manner; of course, the aforementioned first optical path module 40 may also be disposed on the fourth path, so as to satisfy the requirement of the first detection module 20 for detecting the frequency doubled light and outputting the frequency doubled light by reflecting and transmitting the fourth laser light L4 (the fourth laser light L4 is a pure frequency doubled light due to the separation effect of the second optical path module 50 on the fundamental frequency light and the frequency doubled light).
In fig. 1, 2 and 3, a dotted line with arrows represents a fundamental light beam, a dotted line with arrows represents an frequency doubling light beam, a solid line with arrows represents a laser beam (the laser usually includes frequency doubling light and fundamental light that is not frequency-converted) output by the frequency conversion crystal, and a thick solid line without arrows represents a signal connection line; in fig. 3, in order to distinguish propagation principles of fundamental light, frequency-doubled light, and the like, fundamental light beams, frequency-converted light beams, laser beams output from a frequency-converted crystal, and the like are illustrated as being separated in parallel, and it does not necessarily mean that the respective beams propagate along different paths.
Example two
Referring to fig. 5 to 11 in combination with fig. 1 to 4, a second embodiment of the present application provides a laser, such as a 266nm laser; the laser comprises a frequency doubling light optimization device A, a fundamental frequency light detection device B, a light beam stabilizing device C and a control device D; the following are described separately.
Referring to fig. 1 to 7, the frequency doubling light optimization device a is a laser beam optimization device provided in the first embodiment, and is mainly configured to receive fundamental frequency light output by a laser light source E and convert the fundamental frequency light into frequency doubling light for output; meanwhile, the device is used for optimizing and regulating the performance of frequency doubling light; the specific structure and regulation principle are described above, and therefore will not be described repeatedly.
Referring to fig. 5 to 7, the fundamental frequency light detection device B is mainly configured to receive at least a portion of the fundamental frequency light (e.g., a small amount of fundamental frequency light) output by the laser light source E, and obtain index information (e.g., quality information, power information, or other information of the fundamental frequency light, which is defined as second index information for convenience of description) of the fundamental frequency light by detecting the fundamental frequency light.
In one embodiment, referring to fig. 5 and 6, the fundamental frequency light detection apparatus B includes a second detection module 70 and a third optical path module 80; the third optical path module 80 may be an optical element or a set of optical elements such as a beam splitter, which is disposed between the fundamental frequency light receiving end of the frequency conversion module 10 and the laser light source E, and configured to split the laser light beam, so that when the fundamental frequency light passes through the third optical path module 80, a part of the fundamental frequency light (e.g., most of the fundamental frequency light) can be transmitted out to form a sixth laser L6 that is output along a sixth path and received by the frequency conversion module 10, so as to convert the sixth laser L6 into an doubled light output by means of the frequency conversion module 10; and another part of the fundamental frequency light (e.g., a small amount of fundamental frequency light) is reflected by the third optical path module 80 to form a seventh laser light L7 output along a seventh path; the second detection module 70 is disposed on the seventh path and is configured to receive the first laser light L7, so as to finally acquire the second index information of the fundamental frequency light through detection of the seventh laser light L7.
Referring to fig. 5 to 7, the beam stabilizing device C is mainly used for monitoring and controlling the frequency doubled light by receiving the frequency doubled light finally output by the frequency doubled light optimizing device a, so as to ensure the execution performance and stability of the laser output by the laser; in one embodiment, the beam stabilizing device C includes a first self-adjusting mirror 90, a second self-adjusting mirror 100, a first four-quadrant detector 110, a second four-quadrant detector 120, and a beam splitter 130; wherein, the first automatically adjusting reflector 90 is disposed at the output end of the frequency doubling light optimization device a (for example, in the optical path of the third laser L3; at this time, it can be understood that the first automatically adjusting reflector 90 is the second optical path module 50 of the frequency doubling light optimization device a, and the fourth laser L1 is equivalent to the laser whose directivity needs to be stably adjusted by the beam stabilizer C, that is, the laser finally output by the laser); the second automatic adjusting mirror 100 is disposed in the optical path of the fourth laser light L4, and is configured to transmit a part of the fourth laser light L1 to the first four-quadrant detector 110, and reflect another part of the fourth laser light L1 to the beam splitter 130, so that the beam splitter 130 splits a part of the fourth laser light L1 to the second four-quadrant detector 120, and the other part is output from the laser body. In specific implementation, the first automatically-adjusting mirror 90, the second automatically-adjusting mirror 100, the first four-quadrant detector 110 and the second four-quadrant detector 120 may be combined to form a closed-loop system, and the beam stabilizing device C may be used to adjust the directivity of the fourth laser L1 (i.e., the laser finally output by the laser), so that the laser may change points and optimize the directivity of the output laser. The adjustment of the beam directivity by the beam stabilizer C belongs to the prior art and is not described herein.
Referring to fig. 7, the control device D may adopt existing functional devices or a set of functional devices such as a microcontroller and a data processor according to actual situations, and mainly performs coordinated management and control on the frequency doubling light optimization device a, the fundamental frequency light detection device B, the light beam stabilization device C, and the laser light source E, including but not limited to on-off control of each device, reception and feedback of signals, and storage, analysis, comparison, and the like of data information. The control device D can acquire the first index information output by the first detection module 10, and determine whether the first index information meets a first preset requirement; when the first index information does not meet the first preset requirement, the control device D may output a temperature adjustment instruction to the temperature control module 30, so that the temperature control module 30 adjusts the temperature of the frequency conversion module 10 to optimize the performance of the frequency doubled light; if the first index information can not meet the first preset requirement all the time in the preset period, the laser source E can be controlled to turn off the output of the fundamental frequency light (or the fundamental frequency light entering the frequency conversion module 10 is cut off by the third optical path module 80, then the frequency conversion module 10 is controlled to switch the working point position, meanwhile, the control device D obtains the second index information output by the second detection module 70, and judging whether the second index information meets a second preset requirement (the second preset requirement can be a preset numerical value or a numerical range based on the performances of the quality, the power and the like of the fundamental frequency light); when the second index information does not meet the second preset requirement, the laser light source C can be judged to be unstable in operation, the fundamental frequency light output by the laser light source C cannot meet the requirement of frequency conversion, and the like; at this time, the control device D can control the laser light source C to turn off the fundamental frequency light output.
Of course, in some embodiments, the control device D may be omitted, and the cooperation and coordination among the devices may be realized by configuring the functional performance of each device itself, or the function of the control device D may be replaced by one of the devices, for example, by configuring the function of the temperature control module 30 of the frequency doubling light optimization device a, and connecting it with the fundamental frequency light detection device B, the light beam stabilization device C and the laser light source E, so as to realize the functional cooperation among the devices.
In summary, when the laser is in a normal operating state, the first detection module 20 in the frequency doubling light optimization device a may be used to monitor the frequency doubling light in real time, the beam stabilizing device C may be used to detect the directivity of the laser output by the laser in real time, and the second detection module 80 in the fundamental frequency light detection device B may be used to monitor the fundamental frequency light in real time; on one hand, the device can achieve the purpose of mutual monitoring, and once the laser fails or the output laser can not meet the use requirement, the fault point of the laser can be accurately and rapidly checked; on the other hand, after the laser device is switched, if the power of the output laser is reduced, the quality is deteriorated, the beam directivity is changed and the like, the optimization and the control of the laser beam performance and the directivity can be automatically completed through the linkage control of each device, and the stability of the laser device is effectively improved.
In one embodiment, referring to fig. 8 to 10, the third light path module 80 has a first mirror portion 81, a second mirror portion 82 and a driving member (not shown); the first mirror 81 may be an optical element or a functional structure capable of splitting the fundamental light, such as a beam splitter, and when the fundamental light output from the laser light source E passes through the first mirror 81, the first mirror 81 can transmit a part of the fundamental light to output the sixth laser light L6, and can reflect another part of the fundamental light to output the seventh laser light L7. The second mirror portion 82 may adopt an optical element or a functional structure, such as a mirror, which can totally reflect the fundamental frequency light, and the reflection angle (or direction) of the fundamental frequency light by the first mirror portion 81 and the reflection angle (or direction) of the fundamental frequency light by the second mirror portion 82 have a certain deviation, so as to avoid that the fundamental frequency light reflected by the two propagates along the same path, so that the second mirror portion 82 can reflect all the fundamental frequency light to output the eighth laser light L8 along the eighth path; the second mirror portion 82 may also adopt a device or material that collects laser light, such as a laser beam absorber, and makes the laser light unable to escape, so as to be able to intercept fundamental frequency light entering the frequency conversion module 80; the power output end of the driving element is coupled to the first mirror portion 81 and the second mirror portion 82, and the third optical path module 80 (or the first mirror portion 81 and the second mirror portion 82) can be arranged on the fundamental frequency light receiving end of the frequency conversion module 10 in a movable manner (such as a translational manner, a rotational manner, and the like) relative to the frequency conversion module 10 by means of the driving element, so that the first mirror portion 81 and the second mirror portion 82 can be alternatively switched into the optical path of the fundamental frequency light.
Before the frequency conversion module 10 in the frequency doubling light optimization device a needs to perform point changing, the driving part is controlled to drive the third optical path module 80 to move so as to switch the second mirror part 82 to the optical path of the fundamental frequency light (namely, between the fundamental frequency light receiving end of the frequency conversion module 10 and the laser light source E), so that the fundamental frequency light entering the frequency conversion crystal 10 is cut off by means of the total reflection effect of the second mirror part 82 on the fundamental frequency light or the collection effect on the fundamental frequency light; so that the frequency conversion module 10 can perform subsequent point changing. When the switching is completed or the laser needs to output laser light, the driving element can be used to switch the first mirror 81 to the optical path of the fundamental frequency light, so that the fundamental frequency light can be detected by the second detecting module 70 and received and converted by the frequency conversion module 10. In this way, the third optical path module 80 can be structurally configured to perform a dual function similar to that of a shutter and a beam splitter; on one hand, when the laser is switched, the laser light source A does not need to be turned off, so that the switching efficiency of the laser can be improved, and the laser light source A can be prevented from being damaged or shortened in service life due to frequent turning on and off; on the other hand, the configuration cost and the structural complexity of the laser are reduced, and particularly, the cost increased by the introduction of the optical shutter can be reduced.
In one embodiment, referring to fig. 8 to 10, the third optical path module 80 includes a second wedge-shaped mirror, which has a similar overall structure to the first wedge-shaped mirror; the difference is that a first area 80a and a second area 80b are formed on the surface of the second wedge mirror for receiving the fundamental frequency light in an equal area proportion or other proportions; wherein, the first surface area 80a is provided with an anti-reflection film, and the anti-reflection film is arranged to cover the first surface area 80a in a plating or attaching manner, etc. to form a first mirror part 81; by selecting antireflection films with different performance parameters (such as light transmittance and light reflectivity), the first mirror 81 can transmit most of the fundamental frequency light to output the sixth laser light L6 received and frequency-converted by the frequency conversion module 10, and a small portion of the fundamental frequency light can be reflected by the first mirror 81 to output the seventh laser light L7 received by the second detection module 70; for example, the reflection reducing film of 532nm (R < 0.01) is selected such that 1% of the fundamental frequency light of 532nm is reflected by the reflection reducing film (or the first mirror 81) to output the seventh laser light L7, and 99% of the fundamental frequency light of 532nm is transmitted to output the sixth laser light L6. Suitably, the second face area 80b is provided with a high-reflection film, which is provided in the form of plating or attachment or the like, covering the second face area 80b to configure to form a second mirror portion 82; by selecting high reflection films with different performance parameters (such as reflection rate), the total reflection can be carried out on the fundamental frequency light to the maximum extent, so that the fundamental frequency light entering the frequency conversion module 10 is thoroughly shielded or blocked; for example, selecting a 532nm highly reflective film (R > 99.9) may result in approximately 100% of the 532nm fundamental frequency light being reflected by the highly reflective film (or second mirror portion 82).
In specific implementation, the second wedge-shaped mirror may be obliquely disposed between the fundamental frequency light receiving end of the frequency conversion module 10 and the laser light source E, and the power end of the driving element is coupled to the second wedge-shaped mirror, while ensuring that the optical axis of the fundamental frequency light does not pass through the center point of the second wedge-shaped mirror. In this way, the second wedge-shaped mirror can be driven to perform a rotational motion around a preset rotation axis (e.g. a central line of the second wedge-shaped mirror) by the driving element, so as to switch the first mirror portion 81 and the second mirror portion 82 to the optical path of the fundamental frequency light alternatively, and due to the existence of the wedge angle of the second wedge-shaped mirror, there is a direction or an angle difference between the optical path of the seventh laser light L7 reflected and output by the first mirror portion 81 and the optical path of the eighth laser light L8 reflected and output by the second mirror portion 82, so as to create conditions for the spatial arrangement of the second detection module 70 and other associated components. Based on this, the first mirror part 81 and the second mirror part 82 are respectively formed by the antireflection film and the high reflection film, which not only can effectively enhance the integrity of the main body part (i.e. the second wedge-shaped mirror) of the third optical path module 80, reduce the size of the third optical path module 80 and the occupied space in the laser, but also create conditions for reducing the structural complexity and the configuration cost of the laser.
In one embodiment, referring to fig. 8 to 10, a surface of the second wedge-shaped mirror for transmitting the fundamental frequency light (which may be defined as a light emitting surface of the second wedge-shaped mirror) is a plane, the light emitting surface is perpendicular to a central line of the second wedge-shaped mirror, and a surface of the second wedge-shaped mirror for receiving the fundamental frequency light (which may be defined as a light incident surface of the second wedge-shaped mirror) is inclined with respect to the light emitting surface, such that the second wedge-shaped mirror forms a wedge angle with a certain angle between the light emitting surface and the light incident surface, such as 3 °; at this time, the first area 80a and the second area 80b can be formed by dividing along the inclined direction of the light incident surface of the second wedge-shaped mirror, so that the antireflection film and the high reflection film (or the first mirror portion 81 and the second mirror portion 82) are arranged along the inclined direction of the light incident surface. Thus, when the first mirror 81 and the second mirror 82 are switched to the optical paths of the fundamental light, it is possible to ensure that the reflection angles of the fundamental light are deviated.
In an embodiment, referring to fig. 5 and fig. 6, the fundamental frequency light detection device B further includes a second laser collection module 140 fixedly disposed on the eighth path, and the second laser collection module 140 can be selectively disposed with reference to the first laser collection module 130 in the first embodiment, and is mainly used for collecting the eighth laser light L8; in the process of switching points of the laser, all fundamental frequency light output by the laser light source E can be shielded, and the intercepted fundamental frequency light is prevented from irradiating other parts of the laser or leaking to the outside of the laser.
In one embodiment, referring to fig. 5 and 6, the second detecting module 70 includes a light path conversion member 71, a second quality detecting member 72 and a second power detecting member 73; the light path conversion member 71 is an existing light splitting device, such as a spectroscope; the optical path conversion member 71 is disposed on the seventh path, and is configured to split-convert the seventh laser light L7 into the first fundamental laser light L9 and the second fundamental laser light L10 and output them in different directions, such that a part of the seventh laser light L7 is reflected and the first fundamental laser light L9 is obtained, and another part of the seventh laser light L7 is transmitted and the second fundamental laser light L10 is obtained; the second quality detecting element 72 can be selectively configured with reference to the first quality detecting element 21 in the first embodiment, and the second quality detecting element 72 is disposed on the optical path of the first fundamental laser light L9 to detect and acquire the quality information of the fundamental light by receiving the first fundamental laser light L9; the second power detecting element 73 can be selectively configured with reference to the first power detecting element 22 according to the first embodiment, and the second power detecting element 73 is disposed on the optical path of the second fundamental laser light L10 to detect and acquire the power information of the fundamental light by receiving the second fundamental laser light L10. Suitably, the second preset requirement includes a preset quality requirement of the fundamental frequency light and a preset power requirement of the fundamental frequency light.
In other embodiments, the second quality detecting element 72 and the second power detecting element 73 may be alternatively disposed, in which case, the light path converting element 71 may be omitted, the second quality detecting element 72 or the second power detecting element 73 is disposed on the seventh path, and the seventh laser L7 is directly received to detect and obtain the performance index related to the fundamental frequency light, so as to meet different application requirements.
In fig. 5, 6, 9 and 10, the dotted line with arrows represents a fundamental frequency light beam, the dotted line with arrows represents an frequency doubling light beam, the solid line with arrows represents a laser beam output by the frequency conversion crystal (the laser usually includes frequency doubling light and fundamental frequency light which is not frequency-converted), and the thick solid line without arrows represents a signal connection line; in addition, in fig. 9 and 10, a dashed line represents a rotation axis of the second wedge mirror, and a solid line of a double arrow represents a rotation direction of the second wedge mirror.
Based on the overall structure architecture of the laser provided by the present application, once the laser fails, and when it is determined that the fundamental frequency light output by the laser light source E is stable and meets the preset requirement according to the second index information of the fundamental frequency light acquired by the fundamental frequency light detection device B, the laser may be regulated and controlled by referring to the following method, please refer to fig. 11 in combination with fig. 4, where the method includes steps 600 to 900; this will be explained in detail below.
When the fundamental frequency light output by the laser light source E is judged to be unstable or cannot meet the preset requirement according to the second index information of the fundamental frequency light acquired by the fundamental frequency light detection device B, the laser light source E is controlled to close the fundamental frequency light output, so that the whole laser stops running, and the laser light source E is maintained or replaced conveniently.
It should be noted that, the description of the laser light source E is introduced in the embodiments of the present application only for understanding the structural architecture of the laser, and the laser light source E does not necessarily represent a component of the laser; namely: in some implementations, the laser light source E may be an integral part of the laser; in other embodiments, the laser source E is not an integral part of the laser, but is an accessory for laser applications.
The present invention has been described in terms of specific examples, which are provided to aid understanding of the invention and are not intended to be limiting. For a person skilled in the art to which the invention pertains, several simple deductions, modifications or substitutions may be made according to the idea of the invention.
Claims (17)
1. A laser beam optimization apparatus, comprising:
the frequency conversion module is used for receiving the fundamental frequency light and converting the fundamental frequency light into frequency doubling light to be output, and the frequency conversion module can controllably move in a preset plane coordinate system so as to switch the working point position of the frequency conversion module for receiving the fundamental frequency light;
the first detection module is used for receiving at least part of frequency doubling light output by the frequency conversion module so as to obtain first index information of the frequency doubling light; and
the temperature control module is connected with the frequency conversion module and used for controllably adjusting the temperature of the frequency conversion module when the first index information does not meet a first preset requirement so as to optimize the frequency conversion performance of the frequency conversion module.
2. The laser beam optimization apparatus according to claim 1, wherein the first index information includes quality information and power information of the frequency-doubled light, and the first preset requirement includes a preset quality requirement and a preset power requirement; the frequency conversion module is used for:
when the quality information of the frequency doubling light does not reach the preset quality requirement and/or the power information does not reach the preset power requirement, the temperature of the frequency conversion module can be controllably adjusted in a preset period until the quality information of the frequency doubling light reaches the preset quality requirement and the power information reaches the preset power requirement.
3. The laser beam optimization apparatus of claim 2, wherein the frequency conversion module is configured to: after a preset period, if the quality information of the frequency doubling light does not reach a preset quality requirement and/or the power information does not reach a preset power requirement, the current working point position can be controllably switched to the next working point position.
4. The laser beam optimization apparatus of claim 2, further comprising a first optical path module disposed at an end side of the frequency conversion module at which the frequency-doubled light is multiplied, the first optical path module being capable of reflecting at least a part of the frequency-doubled light to form a first laser light output along a first path and a second laser light output along a second path; the first detection module includes:
a first quality detection member for receiving the first laser light to acquire quality information of the frequency doubled light, the first quality detection member being disposed on a first path; and
and the first power detection part is used for receiving the second laser to acquire the power information of the frequency doubled light, and the first power detection part is arranged on a second path.
5. The laser beam optimization apparatus according to claim 4, wherein the first optical path module includes a first wedge mirror fixedly disposed on the side of the frequency-doubled light output end of the frequency conversion module; the first wedge mirror is used for reflecting a part of the frequency doubled light to output the first laser light and the second laser light; the first wedge mirror is also used for transmitting another part of the frequency-doubled light to form third laser light output along a third path.
6. The laser beam optimization apparatus of claim 1, further comprising:
the second optical path module is arranged at the frequency-doubled light output end of the frequency conversion module and used for reflecting the frequency-doubled light in the output light beam of the frequency conversion module so as to form fourth laser output along a fourth path; the second optical path module is further configured to transmit fundamental frequency light in the output beam of the frequency conversion module to form fifth laser light output along a fifth path; and
and the first laser collection module is fixedly arranged on the fifth path and is used for collecting fifth laser.
7. The laser beam optimization apparatus of claim 1, wherein the frequency conversion module comprises:
the frequency conversion crystal is used for receiving the fundamental frequency light and converting the fundamental frequency light into frequency doubling light to be output in a frequency conversion mode;
the point changing mechanism can controllably drive the variable frequency crystal to move in a preset plane coordinate system, and the variable frequency crystal is arranged on the point changing mechanism; and
and the temperature adjusting piece is arranged outside the frequency conversion crystal, is connected with the temperature control module and is used for heating or cooling the frequency conversion crystal under the control of the temperature control module.
8. The laser beam optimization apparatus of claim 7, wherein the frequency conversion crystal has opposing first and second ends, the frequency conversion module further comprising:
the light reflecting piece is arranged at the first end side of the frequency conversion crystal and is used for reflecting the fundamental frequency light and the frequency doubling light output by the first end of the frequency conversion crystal so that the fundamental frequency light and the frequency doubling light are incident on the frequency conversion crystal again, and the fundamental frequency light is converted into the frequency doubling light to the maximum extent; and
a light splitting member arranged at a second end side of the frequency conversion crystal, the light splitting member being used for transmitting the fundamental frequency light so that the fundamental frequency light is incident from a second end of the frequency conversion crystal; the light splitting component is also used for reflecting the frequency doubling light output by the second end of the frequency conversion crystal, so that at least one part of the frequency doubling light is received by the first detection module.
9. The laser beam optimization apparatus according to claim 1, further comprising a control module, wherein the frequency conversion module, the temperature control module and the first detection module are respectively connected to the control module, and the control module is configured to:
acquiring first index information output by the first detection module, and judging whether the first index information meets a first preset requirement; when the first index information does not meet a first preset requirement, the control module can control the temperature control module to adjust the temperature of the variable frequency crystal or control the variable frequency module to switch working point positions.
10. A laser, comprising:
frequency doubling light optimization means for receiving a part of the fundamental frequency light output from the laser light source and frequency-converting the fundamental frequency light into an output of frequency doubling light, the frequency doubling light optimization means employing the laser beam optimization apparatus according to any one of claims 1 to 8; and
the fundamental frequency light detection device is used for receiving another part of the fundamental frequency light output by the laser light source so as to acquire second index information of the fundamental frequency light;
and when the second index information does not meet a second preset requirement, the fundamental frequency light detection device can controllably intercept fundamental frequency light entering the frequency conversion module, or the laser light source can controllably close the fundamental frequency light output.
11. The laser of claim 10, wherein the fundamental frequency light detection means comprises:
the second detection module is used for receiving at least part of the fundamental frequency light so as to obtain second index information of the fundamental frequency light; and
a third optical path module disposed between a fundamental light receiving end of the frequency conversion module and a laser light source, the third optical path module configured to: a sixth laser capable of transmitting a portion of the fundamental light to form a sixth laser output along a sixth path and received by the frequency conversion module; and can simultaneously reflect another portion of the fundamental light to form a seventh laser light that is output along a seventh path and received by the second detection module.
12. The laser of claim 11, wherein the third optical path module has a first mirror portion and a second mirror portion, the third optical path module being movably disposed between the fundamental frequency light receiving end of the frequency conversion module and the laser light source to enable alternatively switching the first mirror portion and the second mirror portion to the optical path of the fundamental frequency light;
when the first mirror part is switched to the optical path of the fundamental frequency light, the first mirror part can transmit one part of the fundamental frequency light to output sixth laser light and can simultaneously reflect the other part of the fundamental frequency light to output seventh laser light;
when the second mirror part is switched to the light path of the fundamental frequency light, the second mirror part can cut the fundamental frequency light entering the frequency conversion module.
13. The laser of claim 12, wherein the third optical path module comprises a second wedge-shaped mirror, the second wedge-shaped mirror being controllably rotatably disposed between the fundamental light receiving end of the frequency conversion module and the laser light source, a side of the second wedge-shaped mirror for receiving the fundamental light having a first area and a second area; wherein:
the first surface area is plated with an antireflection film so as to form the first mirror part;
the second area is plated with a high-reflection film so as to form the second mirror part, and the second mirror part can totally reflect the fundamental frequency light to form eighth laser output along an eighth path.
14. The laser of claim 13, wherein the fundamental light detection device further comprises a second laser collection module fixedly disposed on the eighth path, the second laser collection module being configured to collect eighth laser light.
15. The laser of claim 11, wherein the second index information includes quality information and power information of the fundamental light, and the second detection module includes:
the light path conversion member is arranged on the seventh path and is used for converting seventh laser light into first fundamental frequency laser light and second fundamental frequency laser light to be output;
the second quality detection piece is used for receiving the first fundamental frequency laser to acquire quality information of the fundamental frequency laser, and the second quality detection piece is arranged on the optical path of the first fundamental frequency laser; and
and the second power detection part is used for receiving the second fundamental frequency laser to acquire the power information of the fundamental frequency laser, and the second power detection part is arranged on the optical path of the second fundamental frequency laser.
16. The laser of claim 10, further comprising a control means, wherein the frequency doubling light optimization means and the fundamental light detection means are respectively connected to the control means, and wherein the control means is configured to:
acquiring first index information output by the first detection module, and judging whether the first index information meets a first preset requirement; when the first index information does not meet a first preset requirement, the control device can control the temperature control module to adjust the temperature of the frequency conversion module or control the frequency conversion module to switch the working point position; and
the second index information is used for acquiring the second index information output by the fundamental frequency optical detection device and judging whether the second index information meets a second preset requirement; and when the second index information does not meet a second preset requirement, the control device can control the fundamental frequency light detection device to cut off the fundamental frequency light entering the frequency conversion module, or control the laser light source to close the fundamental frequency light output.
17. The laser of claim 10, further comprising a beam stabilizing device for receiving the frequency-doubled light output by the frequency-doubled light optimizing device to monitor and control the direction of the frequency-doubled light, so as to achieve the output of the frequency-doubled light from the laser, wherein the beam stabilizing device is disposed at the output end of the frequency-doubled light optimizing device.
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