CN109361148B - Solid laser - Google Patents
Solid laser Download PDFInfo
- Publication number
- CN109361148B CN109361148B CN201811479135.5A CN201811479135A CN109361148B CN 109361148 B CN109361148 B CN 109361148B CN 201811479135 A CN201811479135 A CN 201811479135A CN 109361148 B CN109361148 B CN 109361148B
- Authority
- CN
- China
- Prior art keywords
- laser
- mirror
- laser light
- output
- rotatable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
- H01S3/2391—Parallel arrangements emitting at different wavelengths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Abstract
The embodiment of the invention relates to the technical field of laser and discloses a solid laser. The solid laser includes: the first laser module is used for converting the first laser light source into first laser; first rotatable mirror is equipped with first mirror portion, second mirror portion and third mirror portion, and first rotatable mirror is used for: when the first mirror part is located at the first position, the first laser is reflected through the first mirror part, and when the second mirror part is located at the second position, the first laser is transmitted through the second mirror part and the third mirror part; the second laser module is used for converting the second laser light source into second laser; the second rotatable mirror is provided with a third mirror part and a sixth mirror part, and the second rotatable mirror is used for: when the first laser is positioned at the third position, the first laser is reflected by the sixth mirror part, and the second laser is transmitted by the fourth mirror part; and the third laser module is used for converting the first laser and the second laser into third laser. Through the above manner, the present embodiment can selectively output laser light with different wavelengths, and the power density of the laser light is high.
Description
Technical Field
The embodiment of the invention relates to the technical field of laser, in particular to a solid laser.
Background
The ultraviolet laser has high photon energy, can directly destroy molecules of a plurality of non-metallic materials in material processing so as to realize cold processing, has small ultraviolet laser facula, short wavelength and good focusing performance, and is suitable for processing a micro-structure.
The green solid laser has the advantages of high efficiency, high power, good beam quality, small volume, long service life and the like, and is widely applied to the fields of color display, laser medical treatment, underwater communication, precious metal marking and the like.
In recent years, as the variety of materials to be marked by laser is more and more abundant, one laser may be required to output multiple wavelengths, and a dual-band or multi-band solid-state laser becomes a hot point of research. Furthermore, there is a demand for solid-state lasers in the biology of laser medical environments, for example, when a part composed of a plurality of materials is processed, it is necessary to be able to freely switch between lasers of different wavelengths depending on the properties of the materials, thickness, incident spot size requirements, power requirements, and the like.
The inventor of the invention finds out that in the process of implementing the embodiment of the invention: the existing solid laser can simultaneously generate laser with two wavelengths through a beam splitter prism, and the power density of the laser is low.
Disclosure of Invention
The technical problem mainly solved by the embodiments of the present invention is to provide a solid laser, which can selectively output laser with different wavelengths, and has high power density of the laser.
In order to solve the above technical problem, one technical solution adopted by the embodiments of the present invention is: the solid laser comprises a first laser module, a second laser module and a laser module, wherein the first laser module is used for receiving a first laser light source and converting the first laser light source into first laser output; first rotatable mirror is located the output of first laser module, first rotatable mirror is equipped with first mirror portion, second mirror portion and third mirror portion, first mirror portion with second mirror portion locates same one side of first rotatable mirror, third mirror portion locates the opposite side of first rotatable mirror, first rotatable mirror is used for: when the laser device is located at a first position, the first laser light is reflected by the first mirror part and is output along a first output direction of the first rotatable mirror, so that the first laser light is output, and when the laser device is located at a second position, the first laser light is transmitted by the second mirror part and the third mirror part, so that the first laser light is output along a second output direction of the first rotatable mirror; the second laser module is used for receiving a second laser light source and converting the second laser light source into second laser light to be output; the second rotatable mirror is located the second output direction of first rotatable mirror with the output of second laser module, the second rotatable mirror is equipped with fourth mirror portion and sixth mirror portion, fourth mirror portion with sixth mirror portion locates the relative both sides of second rotatable mirror, the second rotatable mirror is used for: when the laser device is located at the third position, the first laser light transmitted by the first rotatable mirror is reflected by the sixth mirror portion, so that the first laser light is output along the first output direction of the second rotatable mirror, and the second laser light is transmitted by the fourth mirror portion, so that the second laser light is output along the first output direction of the second rotatable mirror; and the third laser module is arranged in the first output direction of the second rotatable mirror and used for receiving the first laser and the second laser and converting the first laser and the second laser into third laser to be output, so that the third laser is output.
Optionally, the second rotatable mirror is further provided with a fifth mirror portion, the fifth mirror portion and the fourth mirror portion are located on the same side of the second rotatable mirror, and the second rotatable mirror is further configured to: when the second laser light is positioned at the fourth position, the fifth mirror part reflects the second laser light, so that the second laser light is output along the second output direction of the second rotatable mirror; the solid state laser further includes: a mirror; the reflector is arranged in a second output direction of the second rotatable mirror, and the reflector is used for: reflecting the second laser light, thereby outputting the second laser light.
Optionally, the first laser module includes, in order: the laser comprises a first total reflection mirror, a first laser crystal, a first acousto-optic Q switch and a first output mirror; the first full mirror is used for transmitting the first laser light source; the first laser crystal is used for converting the first laser light source transmitted by the first total reflection mirror into the first laser light; the first acousto-optic Q switch is used for modulating continuous first laser light into pulse first laser light; the first output mirror is used for transmitting the first laser light so as to enable the first laser light to be output to the first rotatable mirror; the first fully-reflecting mirror is further configured to reflect the first laser light source, and the first output mirror is further configured to reflect the first laser light source, so that the first fully-reflecting mirror and the first output mirror form a resonant cavity of the first laser light, and thus the first laser light source that is not converted into the first laser light oscillates among the first fully-reflecting mirror, the first laser crystal, the first acousto-optic Q-switch, and the first output mirror.
Optionally, the second laser module includes, in order: the second total reflection mirror, the second laser crystal, the second acousto-optic Q switch, the frequency doubling crystal and the second output mirror; the second full mirror is used for transmitting the second laser light source; the second laser crystal is used for converting the second laser light source transmitted by the second total reflection mirror into the first laser light; the second acousto-optic Q switch is used for modulating the continuous first laser light into the pulse first laser light; the frequency doubling crystal is used for converting the first laser into the second laser; the second output mirror is used for transmitting the second laser light so as to enable the second laser light to be output to the second rotatable mirror; the second fully-reflecting mirror is further configured to reflect the first laser light source, and the second output mirror is further configured to reflect the first laser light source, so that the first fully-reflecting mirror and the first output mirror form a resonant cavity for the second laser light, and thus the first laser light that is not converted into the second laser light oscillates among the first fully-reflecting mirror, the first laser crystal, the first acousto-optic Q-switch, and the first output mirror.
Optionally, the solid state laser further comprises: the first laser input module is arranged at the input end of the first laser module and used for generating and emitting the first laser light source; and the second laser input module is arranged at the input end of the second laser module and used for generating and transmitting the second laser light source.
Optionally, the solid state laser further comprises: the first focusing module is arranged between the first laser input module and the first laser module and used for focusing the first laser light source to the first laser module; and the second focusing module is arranged between the second laser input module and the second laser module and used for focusing the second laser light source to the second laser module.
Optionally, the third laser module comprises: a frequency tripling crystal and a third output mirror; the frequency tripling crystal is arranged in the first output direction of the second rotatable mirror and used for converting the first laser and the second laser into third laser; the third output mirror is configured to transmit the third laser light, thereby outputting the third laser light.
Optionally, the third laser module further comprises: a light spot shaping submodule; the light spot shaping submodule is arranged at one end, far away from the frequency tripling crystal, of the third output mirror and is used for shaping the third laser.
Optionally, the solid state laser further comprises: the first focusing lens is arranged in the second output direction of the first rotatable mirror and used for focusing the first laser light transmitted by the first rotatable mirror to the second rotatable mirror; and the second focusing lens is arranged in the first output direction of the second rotatable mirror and used for focusing the first laser light reflected by the second rotatable mirror and the second laser light transmitted by the second rotatable mirror to the third laser module.
Optionally, the solid state laser further comprises: a controller; the controller is connected with the first rotatable mirror and the second rotatable mirror respectively, and the controller is used for: when a first laser output instruction is received, controlling the first rotatable mirror to rotate to the first position; when a second laser output instruction is received, controlling the second rotatable mirror to rotate to the fourth position; and when a third laser output instruction is received, controlling the first rotatable mirror to rotate to the second position, and simultaneously controlling the second rotatable mirror to rotate to the third position.
Optionally, the first laser is a 1064nm laser, the second laser is a 532nm laser, and the third laser is a 355nm laser.
The embodiment of the invention has the beneficial effects that: different from the situation in the prior art, an embodiment of the present invention provides a solid-state laser, where a first laser module outputs first laser light, a second laser module outputs second laser light, and a first rotatable mirror and a second rotatable mirror rotate to different positions, so as to selectively output first laser light or third laser light, where the first laser light or the third laser light has different wavelengths and substantially the same power density, thereby solving the problem of low power density of fundamental frequency light and frequency doubling light, and being capable of selectively outputting laser light with different wavelengths, and the power density of laser light is high.
Drawings
One or more implementations are illustrated by way of example in the accompanying drawings, which are not to be construed as limiting the embodiments, in which elements having the same reference numerals are identified as similar elements, and in which the drawings are not to be construed as limited, unless otherwise specified.
Fig. 1 is a schematic structural diagram of a solid-state laser according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another solid-state laser provided in an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another solid-state laser according to an embodiment of the present invention;
FIG. 4a is a schematic diagram of a first rotatable mirror of the solid state laser of FIG. 1;
FIG. 4b is a schematic diagram of a second rotatable mirror of the solid state laser of FIG. 1;
FIG. 4c is a schematic diagram of the first and second rotatable mirrors of the solid state laser of FIG. 1;
fig. 5 is a schematic structural diagram of functional modules of the solid-state laser shown in fig. 1.
Detailed Description
In order to facilitate an understanding of the invention, the invention is described in more detail below with reference to the accompanying drawings and specific examples. It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may be present. As used in this specification, the terms "vertical," "horizontal," "left," "right," "up," "down," "inner," "outer," "bottom," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the invention and for simplicity in description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
Current dual wavelength lasers are typically limited to the infrared-green band or the green-ultraviolet band. The infrared-green light dual-wavelength laser performs frequency doubling through the nonlinear crystal, and then separates and outputs fundamental frequency light and frequency doubling light which are not frequency doubled through the beam splitter prism to form dual wavelengths. In addition, some infrared-green-light dual-wavelength lasers utilize polarization rotation of light to perform frequency doubling or direct infrared output (for example, the research on the 1064nm/532nm dual-wavelength free switching output laser is numbered as 1673-1255(2015) -06-0037-03), and the lasers are complex in structure, more in devices, higher in technical and capital cost and not beneficial to industrial production. The green light-ultraviolet dual-wavelength laser performs frequency multiplication through the nonlinear crystal and then performs frequency summation with the fundamental frequency light to realize ultraviolet light output, but the outside cavity sum frequency power density is low, so that the generated ultraviolet and frequency light power is also lower. Based on this, the embodiments of the present invention provide a solid-state laser, which solves the problem of low power density of fundamental light and frequency-doubled light by providing two laser modules and two rotatable mirrors, and can selectively output lasers with different wavelengths, and the power density of the lasers is high.
Specifically, the solid laser will be explained below by way of examples.
Fig. 1 is a schematic structural diagram of a solid-state laser according to an embodiment of the present invention. As shown in fig. 1, the solid-state laser 100 includes: first laser module 110, second laser module 120, third laser module 130, first rotatable mirror 141, second rotatable mirror 142, and reflector 143.
The first rotatable mirror 141 is disposed at the output end of the first laser module 110, the second rotatable mirror 142 is disposed at the output end of the second laser module 120, the second rotatable mirror 142 is located in the second output direction of the first rotatable mirror 141, the third laser module 130 is disposed in the first output direction of the second rotatable mirror 142, and the reflective mirror 143 is disposed in the second output direction of the second rotatable mirror 142. The first laser module 110 is configured to receive the first laser light source and convert the first laser light source into a first laser output. The first rotatable mirror 141 is provided with a first mirror portion 1411 and a second mirror portion 1412 (as shown in fig. 4 a), the first rotatable mirror 141 is configured to: when the first mirror portion 1411 is located at the first position, the first laser light is reflected and output in the first output direction of the first rotatable mirror 141, thereby outputting the first laser light, and when the second mirror portion 1412 is located at the second position, the first laser light is transmitted and output in the second output direction of the first rotatable mirror 141. The second laser module 120 is configured to receive the second laser light source and convert the second laser light source into a second laser output. The second rotatable mirror 142 is provided with a third mirror part 1421 and a fourth mirror part 1422 (as shown in fig. 4 b), the second rotatable mirror 142 is used for: when the first laser light is located at the third position, the first laser light transmitted by the second mirror 1412 is reflected by the third mirror 1421, so that the first laser light is output along the first output direction of the second rotatable mirror 142, and the second laser light is transmitted by the third mirror 1421, so that the second laser light is output along the first output direction of the second rotatable mirror 142; when the second laser light is located at the fourth position, the second laser light is reflected by the fourth mirror portion 1422, and is output in the second output direction of the second rotatable mirror 142. The mirror 143 is configured to reflect the second laser light, thereby outputting the second laser light. The third laser module 130 is configured to receive the first laser light and the second laser light output along the first output direction of the second rotatable mirror 142, and convert the first laser light and the second laser light into a third laser light output, thereby outputting a third laser light.
In this embodiment, the first laser is a 1064nm laser (infrared laser), the second laser is a 532nm laser (green laser), and the third laser is a 355nm laser (ultraviolet laser). Of course, the first laser, the second laser, and the third laser may also be lasers with other wavelengths, and may be selected according to actual needs.
Specifically, referring to fig. 1 again, the first laser module 110 includes a first total reflection mirror 111, a first laser crystal 112, a first acousto-optic Q-switch 113, and a first output mirror 114.
The first total reflection mirror 111, the first laser crystal 112, the first acousto-optic Q-switch 113, and the first output mirror 114 are sequentially disposed in a direction approaching the first rotatable mirror 141. Also, the first fully reflecting mirror 111, the first laser crystal 112, the first acousto-optic Q-switch 113 and the first output mirror 114 form a first resonator.
The first total reflection mirror 111 may be a plane mirror or a curved mirror, specifically, a front cavity plane mirror of the first resonant cavity. The side of the first total reflection mirror 111 far away from the first laser crystal 112 is coated with 808nm antireflection film (R < 0.2%), and the side of the first total reflection mirror 111 near the first laser crystal 112 is coated with 808nm antireflection film (R < 0.2%) and 1064nm high reflection film (R > 99.9%). The first total reflection mirror 111 is used for transmitting the first laser light source; the first total reflection mirror 111 is also used to reflect the first laser light source.
The first laser crystal 112 is a Nd: YVO4 laser crystal, which has a larger stimulated emission cross section and a higher absorption coefficient for the pump light. Both sides of the first laser crystal 112 are coated with 808nm (R < 0.2%) and 1064nm (R < 0.2%). In the present embodiment, the first laser crystal 112 is used to convert the first laser light source transmitted by the first all-mirror 111 into the first laser light.
The first acousto-optic Q-switch 113 enables the conversion of continuous laser power output into laser pulse output with high peak power by a Q-switching technique. Both sides of the acousto-optic crystal of the first acousto-optic Q-switch 113 are coated with anti-reflection films of 1064nm (R < 0.2%). In the present embodiment, the first acousto-optic Q-switch 113 is configured to modulate the continuous first laser light output by the first laser crystal 112 into the pulsed first laser light, and output the pulsed first laser light to the first output mirror 114.
The first output mirror 114 may be a mirror made of a flat mirror or a curved mirror. Both sides of the first output mirror 114 are coated with a 1064nm partially transmissive film (R is equal to about 80%). In the present embodiment, the first output mirror 114 is used for transmitting the first laser light, so that the first laser light is output to the first rotatable mirror 141; the first output mirror 114 is also used to reflect the first laser light source.
In this embodiment, the work process of the first laser module 110 is substantially as follows: the first laser light source is input into the first laser module 110, the first laser light source is converged to the first laser crystal 112 through the first fully reflective mirror 111, the first laser crystal 112 converts the first laser light source into first laser light, the first acousto-optic Q switch 113 modulates the first laser light, and the first output mirror 114 transmits the first laser light, so that the first laser light is output to the first rotatable mirror 141, meanwhile, part of the first laser light source which is not converted into the first laser light is reflected back into the first resonant cavity at the first output mirror 115, and the first laser light source oscillates in the first resonant cavity until the first laser light is output from the first output mirror 114.
Optionally, in some other embodiments, referring to fig. 2, the first laser module 110 further includes: a first turning mirror 115. The first steering mirror 115 is a reflecting mirror and can steer the optical path. The first steering mirror 115 is disposed between the first acousto-optic Q-switch 113 and the first output mirror 114, and is used for reflecting the first laser light output by the first acousto-optic Q-switch 113 to the first output mirror 114, so as to change the propagation direction of the first laser light. By providing the first turning mirror 115 and changing the optical path direction of the first laser light, the solid-state laser 100 can adapt to different cavity structures, for example, to an "H" shaped cavity.
Optionally, in some other embodiments, referring to fig. 3, the first laser module 110 may include a first fully-reflective mirror 111, a first laser crystal 112, a first acousto-optic Q-switch 113, a first mirror 116, a second mirror 117, and a third mirror 118. When the first laser light source enters the first laser module 110, the first total reflection mirror 111 passes through the first laser light source, the first laser crystal 112 converts the first laser light source into first laser light and outputs the first laser light to the second lens 117, the second lens 117 reflects the first laser light to the third lens 118, the third lens 118 reflects the first laser light to the first rotatable mirror 141, meanwhile, the second lens 117 reflects part of the first laser light source which is not converted into the first laser light back to the first laser crystal 112, the first laser light source which is not converted passes through the first laser crystal 112, the first total reflection mirror 111 reflects the first laser light source which is not converted to the first acousto-optic Q switch 113, the first acousto-optic Q switch 113 modulates the first laser light source and outputs the first laser light source to the first lens 116, the first lens 116 reflects the first laser light source, and the first laser light source passes through the first acousto-optic Q switch 113 and the first total reflection mirror 111 in sequence, the conversion is continued in the first laser crystal 112, the converted first laser beam sequentially passes through the second lens 117 and the third lens 118 and then is emitted, and the unconverted first laser beam continues to oscillate in the resonant cavity. In the above manner, the structure of the first laser module 110 can be diversified to accommodate different cavity structures, for example, a "Z" shaped cavity.
Specifically, referring to fig. 1 again, the second laser module 120 includes a second all-mirror 121, a second laser crystal 122, a second acousto-optic Q-switch 123, a frequency doubling crystal 124, and a second output mirror 125.
The second total reflection mirror 121, the second laser crystal 122, the second acousto-optic Q-switch 123, the frequency doubling crystal 124, and the second output mirror 125 are sequentially disposed in a direction close to the second rotatable mirror 142. The second total reflection mirror 121, the second laser crystal 122, the second acousto-optic Q-switch 123, the frequency doubling crystal 124, and the second output mirror 125 form a second resonant cavity.
The second total reflection mirror 121 may be a plane mirror or a curved mirror, specifically, a front cavity plane mirror of the second resonant cavity. The side of the second total reflection mirror 121 far away from the second laser crystal 122 is plated with an antireflection film of 808nm (R < 0.2%), and the side of the second total reflection mirror 121 near the second laser crystal 122 is plated with an antireflection film of 808nm (R < 0.2%) and a high-reflection film of 1064nm (R > 99.9%). The second total reflection mirror 121 is arranged to transmit the second laser source; the second totally reflecting mirror 121 is also used to reflect the second laser light source.
The second laser crystal 122 is a Nd: YVO4 laser crystal, which has a larger stimulated emission cross section and a higher absorption coefficient for the pump light. Both sides of the second laser crystal 122 are coated with 808nm (R < 0.2%) and 1064nm (R < 0.2%), and the side close to the second acousto-optic Q-switch 123 is further coated with 532nm (R > 99.9%). In the present embodiment, the second laser crystal 122 is used to convert the second laser light source transmitted by the second half mirror 121 into the first laser light.
The second acousto-optic Q-switch 123 enables the conversion of continuous laser power output into laser pulse output with high peak power through a Q-switching technique. Both sides of the end face of the acousto-optic crystal of the second acousto-optic Q-switch 123 are coated with a 1064nm antireflection film (R < 0.2%) and a 532nm antireflection film (R < 0.2%). In the present embodiment, the second acousto-optic Q-switch 123 is configured to modulate the continuous first laser light output by the second laser crystal 122 into the pulsed first laser light, and output the pulsed first laser light to the frequency doubling crystal 124.
The frequency doubling crystal 124 may be made of one of potassium dihydrogen phosphate (KDP), lithium triborate (LBO), bismuth borate (BIBO), potassium titanyl phosphate (KTP), and barium metaborate (BBO), and may convert 1064nm laser into 532nm laser with high power. Both sides of the frequency doubling crystal 124 are plated with a 1064nm antireflection film (R < 0.2%) and a 532nm antireflection film (R < 0.2%). In the present embodiment, the frequency doubling crystal 124 is used for converting the first laser light into the second laser light.
The second output mirror 125 may be a mirror made of a flat mirror or a curved mirror. The second output mirror 125 is coated on both sides with a 532nm partially transmissive film (R equal to about 80%) and a 1064nm highly reflective film (R > 99.9%). In the present embodiment, the second output mirror 125 is used for transmitting the second laser light, so that the second laser light is output to the second rotatable mirror 142; the second output mirror 125 is also used to reflect the first laser light.
In this embodiment, the work process of the second laser module 120 is roughly as follows: the second laser light source is input into the second laser module 120, the second fully-reflecting mirror 121 passes through the second laser light source, the second laser crystal 122 converts the second laser light source into first laser light, the second acousto-optic Q-switch 123 modulates the first laser light, the frequency doubling crystal 124 converts the first laser light into second laser light, and the second output mirror 125 passes through the second laser light, so that the second laser light is output to the second rotatable mirror 142, meanwhile, part of the first laser light which is not converted into the second laser light is reflected back into the second resonant cavity at the second output mirror 125, and the first laser light oscillates in the second resonant cavity until the first laser light is converted into the second laser light and then is output from the second output mirror 125.
Optionally, in some other embodiments, referring to fig. 3, the second laser module 120 further comprises: a second steering mirror 126 and a third steering mirror 127. The second steering mirror 126 and the third steering mirror 127 are both mirrors, and can steer the optical path. The second turning mirror 126 and the third turning mirror 127 are disposed between the second acousto-optic Q-switch 123 and the frequency doubling crystal 124, the second turning mirror 126 is used for reflecting the first laser light output by the second acousto-optic Q-switch 123 to the third turning mirror 127, and the third turning mirror 127 is used for reflecting the first laser light reflected by the second turning mirror 126 to the frequency doubling crystal 124, so that the propagation direction of the first laser light is changed. The solid-state laser 100 can adapt to different cavity structures, such as a 'Z' shaped cavity, by arranging the second steering mirror 126 and the third steering mirror 127 to change the optical path direction of the first laser light.
Specifically, referring back to fig. 1, the third laser module 130 includes: a frequency tripling crystal 131 and a third output mirror 132. The frequency tripling crystal 131 is disposed in the first output direction of the second rotatable mirror 142, and the third output mirror 132 is disposed on a side of the frequency tripling crystal 131 away from the second rotatable mirror 142.
The frequency tripling crystal 131 is a lithium triborate (LBO) crystal, and can output 355nm ultraviolet laser by forming 1064nm fundamental light and 532nm frequency doubled light in a mode of frequency summation outside a cavity. Both sides of frequency tripling crystal 131 are plated with 1064nm &532nm &355 antireflection film (R < 0.2%). In the present embodiment, the frequency tripling crystal 131 is used to convert the first laser light reflected by the second rotatable mirror 142 and the second laser light transmitted by the second rotatable mirror 142 into third laser light.
The third output mirror 132 may be made of a flat mirror or a curved mirror. Both ends of the third output mirror 132 are plated with 355nm anti-reflection film (R < 0.2%), 1064nm high-reflection film (R > 99.9%) and 532nm high-reflection film (R > 99.9%). The third output mirror 132 is used to transmit the third laser light, thereby outputting the third laser light. The power density ratio of the fundamental frequency light and the frequency doubling light, namely the first laser and the second laser, can be adjusted to 1:1 by optimizing and matching, so that the frequency doubling and sum frequency efficiency is improved, and conditions are provided for high-power ultraviolet laser output.
Optionally, in some other embodiments, to obtain a high quality beam, the third laser module 130 further comprises: spot shaping submodule 133. The spot-shaping submodule 133 can be a non-lens shaping system, a micro-lens array shaping system, or a birefringent lens shaping system, etc., for shaping the ultraviolet laser light. The spot shaping submodule 133 is disposed at an end of the third output mirror 132 away from the frequency tripling crystal 131, and the spot shaping submodule 133 is configured to shape the third laser light, so as to obtain high-quality third laser light.
Referring to fig. 1 and fig. 4a, the first rotatable mirror 141 is disposed on a side of the first output mirror 114 away from the first acousto-optic Q-switch 113, and is used for receiving the first laser light output by the first laser module 110. The first rotatable mirror 141 may be a rotatable plane circular mirror, the first rotatable mirror 141 is provided with a first mirror portion 1411, a second mirror portion 1412 and a third mirror portion 1413, the first mirror portion 1411 and the second mirror portion 1412 are disposed on the same side close to the first laser module 110, and the third mirror portion 1413 is disposed on a side far away from the first laser module 110, that is, on the other side opposite to the first mirror portion 1411 and the second mirror portion 1412. The area ratio of the first mirror portion 1411 to the second mirror portion 1412 may be set to a uniform ratio or other ratios. In this embodiment, the first rotatable mirror 141 is a circular mirror, and is divided into a first mirror portion 1411 and a second mirror portion 1412 in equal ratio, the first mirror portion 1411 and the second mirror portion 1412 are both semicircular, and the third mirror portion 1413 is circular. The first mirror portion 1411 is plated with a 1064nm high reflection film (R > 99.9%), the second mirror portion 1412 is plated with a 1064nm antireflection film (R < 0.2%), and the third mirror portion 1413 is plated with a 1064nm antireflection film (R < 0.2%). The first mirror 1411 is configured to reflect the first laser light, the second mirror 1412 is configured to transmit the first laser light, and the third mirror 1413 is configured to transmit the first laser light.
In the present embodiment, the first rotatable mirror 141 is used to: when the mirror portion is located at the first position, that is, the coated mirror portion with a 1064nm high reflection of the first rotatable mirror 141 is rotated into the optical path, the first laser light is reflected by the first mirror portion 1411, so that the first laser light is output along the first output direction of the first rotatable mirror 141, thereby outputting the first laser light; when the mirror portion is in the second position, that is, the coated mirror portion with the permeability of 1064nm of the first rotatable mirror 141 is rotated into the optical path, the first laser light is transmitted through the second mirror portion 1412, so that the first laser light is output along the second output direction of the first rotatable mirror 141.
When the first rotatable mirror 141 is located at the first position, the optical path of the first laser beam and the first mirror portion 1411 are in a positional relationship as shown in fig. 4 a. When the first rotatable mirror 141 is located at the first position, the solid state laser 100 outputs first laser light.
In the present embodiment, the first output direction of the first rotatable mirror 141 is perpendicular to the second output direction of the first rotatable mirror 141.
Optionally, the first rotatable mirror 141 may be provided with a limiting device to limit the first rotatable mirror 141 to stay at the first position or the second position. For example, the limiting device may be a limiting switch, and when the first rotatable mirror 141 rotates to the first position or the second position, and the first rotatable mirror 141 touches the limiting switch, the first rotatable mirror 141 stops rotating, so that the first rotatable mirror 141 stops at the first position or the second position.
Referring to fig. 1 and fig. 4b, the second rotatable mirror 142 is disposed at an end of the second output mirror 125 away from the frequency doubling crystal 124, and is located in the second output direction of the first rotatable mirror 141. The second rotatable mirror 142 is used for receiving the second laser light output by the second laser module 120. The second rotatable mirror 142 may be a rotatable plane circular mirror, the second rotatable mirror 142 is provided with a fourth mirror portion 1421, a fifth mirror portion 1422 and a sixth mirror portion 1423, the fourth mirror portion 1412 and the fifth mirror portion 1422 are disposed on the same side close to the second laser module 120, and the sixth mirror portion 1423 is disposed on one side far away from the second laser module 120, i.e., on the other side opposite to the fourth mirror portion 1412 and the fifth mirror portion 1422. The ratio of the areas of the third mirror portion 1421 and the fourth mirror portion 1422 may be set to an equal ratio or other ratios. In the embodiment, the second rotatable mirror 142 is a circular mirror, and is divided into a fourth mirror portion 1412 and a fifth mirror portion 1422 in an equal ratio, the fourth mirror portion 1421 and the fifth mirror portion 1422 are both semicircular, and the sixth mirror portion 1423 is circular. The fourth mirror portion 1421 is coated with a 532nm antireflection film (R < 0.2%), the fifth mirror portion 1422 is coated with a 532nm high-reflection film (R > 99.9%), and the sixth mirror portion 1423 is coated with a 1064nm high-reflection film (R > 99.9%) and a 532nm antireflection film (R < 0.2%). The fourth mirror 1421 is configured to transmit the second laser light, the fifth mirror 1422 is configured to reflect the second laser light, and the sixth mirror 1423 is configured to reflect the first laser light and transmit the second laser light.
In the present embodiment, the second rotatable mirror 142 is used to: when the mirror is located at the third position, that is, when the 1064nm high-reflection coated mirror portion of the second rotatable mirror 142 is rotated to the optical path of the first laser light and the 532nm anti-reflection coated mirror portion of the second rotatable mirror 142 is rotated to the optical path of the second laser light, the sixth mirror portion 1423 reflects the first laser light transmitted by the first rotatable mirror 141, so that the first laser light is output along the first output direction of the second rotatable mirror 142, and the fourth mirror portion 1421 transmits the second laser light, so that the second laser light is output along the first output direction of the second rotatable mirror 142; when the mirror portion is located at the fourth position, that is, the 532nm high-reflection coated mirror portion of the second rotatable mirror 142 is rotated into the optical path of the second laser light, the second laser light is reflected by the fifth mirror portion 1422, so that the second laser light is output along the second output direction of the second rotatable mirror 142.
When the second rotatable mirror 142 is located at the fourth position, the position relationship between the optical path of the second laser and the fifth mirror portion 1422 is as shown in fig. 4 b. When the second rotatable mirror 142 is located at the fourth position, the solid-state laser 100 outputs second laser light; when the second rotatable mirror 142 is located at the fourth position and the first rotatable mirror 141 is located at the first position, the solid-state laser 100 can simultaneously output the second laser light and the first laser light.
When the first rotatable mirror 141 is located at the second position and the second rotatable mirror 142 is located at the third position, the positional relationship between the optical path of the first laser beam and the second mirror portion 1412 and the positional relationship between the optical path of the second laser beam and the fourth mirror portion 1421 are shown in fig. 4 c. When the second rotatable mirror 142 is located at the third position and the first rotatable mirror 141 is located at the second position, the solid-state laser 100 outputs third laser light.
In the present embodiment, the first output direction of the second rotatable mirror 142 is perpendicular to the second output direction of the second rotatable mirror 142, and the second output direction of the second rotatable mirror 142 is the same as the second output direction of the first rotatable mirror 141.
Optionally, the second rotatable mirror 142 may be provided with a limiting device to limit the second rotatable mirror 142 from staying at the third position or the fourth position. For example, the limiting device may be a limiting switch, and when the second rotatable mirror 142 rotates to the third position or the fourth position, and the second rotatable mirror 142 touches the limiting switch, the second rotatable mirror 142 stops rotating, so that the second rotatable mirror 142 stops at the third position or the fourth position.
Referring to fig. 1 again, the reflecting mirror 143 is disposed in the second output direction of the second rotatable mirror 142, and an incident surface of the reflecting mirror 143 forms an angle of 45 degrees with the second output direction of the second rotatable mirror 142, so that the second laser light is reflected by the reflecting mirror 143 and then emitted in a direction perpendicular to the second output direction of the second rotatable mirror 142. The side of the reflecting mirror 143 near the second rotatable mirror 142 is coated with a 532nm high reflection film (R > 99.9%), and the reflecting mirror 143 is used for reflecting the second laser light reflected by the second rotatable mirror 142, thereby outputting the second laser light.
The direction of the first laser light output, the direction of the second laser light output, and the direction of the third laser light output are the same.
It should be noted that, in this embodiment, the first laser, the second laser, and the third laser may be switched at will, and may output one laser (for example, output the first laser or the third laser), or output two lasers (for example, output the first laser and the second laser simultaneously), and may be freely selected according to the actual use situation of the user.
It should be noted that, in the present embodiment, the first laser module 110 and the first rotatable mirror 141 may be integrated into a 1064nm fundamental frequency light output laser module; the second laser module 120, the second rotatable mirror 142 and the reflector 143 may be integrated into a 532nm green output laser module; the third laser module 130 can be integrated into a 355nm sum frequency light path module, the product modularization degree is high, not only is the modularized production convenient, but also the fault point can be found out by respectively detecting respective light paths, and the later-stage upgrading and maintenance are convenient. Alternatively, as shown in fig. 1, the solid state laser 100 may further include: a first laser input module 151 and a second laser input module 152. The first laser input module 151 is a semiconductor laser, and the first laser input module 151 is disposed at an input end of the first laser module 110 and configured to generate and emit a first laser light source. In this embodiment, the first laser light source is 808nm laser. The second laser input module 152 is a semiconductor laser, and the second laser input module 152 is disposed at an input end of the second laser module 120 and is configured to generate and emit a second laser light source. In this embodiment, the second laser light source is 808nm laser. Of course, in some embodiments, the first laser light source and the second laser light source may be the same, and the first laser input module 151 and the second laser input module 152 are the same laser input module, and the same laser input module is divided into two paths to be output to the first laser module 110 and the second laser module 120, respectively.
Alternatively, as shown in fig. 1, the solid state laser 100 may further include: a first focusing module 161 and a second focusing module 162. The first focusing module 161 is disposed between the first laser input module 151 and the first laser module 110, and the first focusing module 161 is configured to focus the first laser light source emitted by the first laser input module 151 onto the first laser crystal 112 of the first laser module 110. The second focusing module 162 is disposed between the second laser input module 152 and the second laser module 120, and the second focusing module 162 is configured to focus the second laser light source emitted by the second laser input module 152 to the second laser crystal 122 of the second laser module 120. By arranging the first focusing module 161 and the second focusing module 162, the thermal lens effect of the laser crystal can be reduced, and the conversion efficiency of the crystal can be improved.
Wherein, the first focusing module 161 and the second focusing module 162 may be the same focusing module. The focusing module consists of two opposite plano-convex mirrors to focus the laser beam.
Alternatively, as shown in fig. 1, the solid state laser 100 may further include: a first focusing lens 171 and a second focusing lens 172. The first and second focusing lenses 171 and 172 may be convex lenses for focusing the light beams. Both sides of the first focusing lens 171 are coated with 1064nm antireflection films (R < 0.2%), and the first focusing lens 171 is disposed in the second output direction of the first rotatable mirror 141 and between the first rotatable mirror 141 and the second rotatable mirror 142. The first focusing lens 171 is used for focusing the first laser light transmitted by the first rotatable mirror 141 to the second rotatable mirror 142. Both sides of the second focusing lens 172 are coated with 1064nm antireflection film (R < 0.2%) and 532nm antireflection film (R < 0.2%), and the second focusing lens 172 is disposed in the first output direction of the second rotatable mirror 142 and between the second rotatable mirror 142 and the third laser module 130. The second focusing lens 172 is used for focusing the first laser light reflected by the second rotatable mirror 142 and the second laser light transmitted by the second rotatable mirror 142 to the frequency tripling crystal 131.
Alternatively, referring to fig. 1 and 5 together, the solid-state laser 100 may further include: a controller 180. A controller 180 is connected to the first rotatable mirror 141 and the second rotatable mirror 142, respectively, the controller 180 being configured to: when receiving the first laser output instruction, controlling the first rotatable mirror 141 to rotate to the first position; when receiving a second laser output instruction, controlling the second rotatable mirror 142 to rotate to a fourth position; when receiving the third laser output instruction, the first rotatable mirror 141 is controlled to rotate to the second position, and the second rotatable mirror 142 is controlled to rotate to the third position.
The controller 180 may receive the first laser output instruction and the second laser output instruction simultaneously or separately, and when the controller 180 receives the first laser output instruction and the second laser output instruction simultaneously, the controller 180 controls the first rotatable mirror 141 and the second rotatable mirror 142 simultaneously, so that the first laser and the second laser are output simultaneously; when the controller 180 receives the first laser output instruction and the second laser output instruction, respectively, the controller 180 controls the first rotatable mirror 141 and the second rotatable mirror 142, respectively, so that the first laser light and the second laser light are output, respectively.
When the controller 180 receives the first laser output command and the second laser output command simultaneously or respectively, the modulation frequency, the output power, the pulse width, the spot quality and other parameters of the light path of the first laser and the light path of the second laser are adjusted independently and are not affected.
When the controller 180 receives the third laser output instruction, the first rotatable mirror 141 is controlled to rotate to the second position, and the second rotatable mirror 142 is controlled to rotate to the third position, at this time, the positions, the rotation modes, the spatial angles and the like of the first rotatable mirror 141 and the second rotatable mirror 142 in the respective optical paths are completely consistent, and the modulation frequencies of the optical paths of the first laser and the second laser are completely the same, so that the power density ratio of each output laser is close to an ideal value (1: 1).
Optionally, the controller 180 is further configured to: the first location, the second location, the third location, and/or the fourth location are recorded. By recording the working position of the rotatable mirror as the default first position, second position, third position and/or fourth position, when the first laser output command, the second laser output command and/or the third laser output command is received again, the first rotatable mirror 141 and/or the second rotatable mirror 142 is rotated to the default first position, second position, third position and/or fourth position.
Optionally, the controller 180 is further configured to: and after the first rotatable mirror 141 and/or the second rotatable mirror 142 operate for a preset time, the solid-state laser 100 is controlled to stop operating. The preset time may be 90-110 hours, for example, 100 hours, and when the first rotatable mirror 141 and/or the second rotatable mirror 142 operate for 100 hours, the solid-state laser 100 is controlled to automatically shut down, so as to prevent the first rotatable mirror 141 and/or the second rotatable mirror 142 from being damaged due to long-term use.
Optionally, the controller 180 is further configured to: the operating point of the first rotatable mirror 141 and/or the second rotatable mirror 142 is replaced. Since the first position, the second position, the third position and the fourth position are fixed, the optical path is acted on some points of the first rotatable mirror 141 and/or the second rotatable mirror 142 for a long time, which is easy to damage the lens, so that the working point of the lens needs to be replaced to prolong the service life of the lens. The specific implementation manner of changing the working point of the first rotatable mirror 141 and/or the second rotatable mirror 142 may be: and adding a preset additional deflection angle to the first position, the second position, the third position and/or the fourth position to change the working position of the light path on the rotatable mirror. Wherein the preset additional deflection angle may be-60 ° to +60 °. For example: assuming that the preset additional deflection angle is +30 °, when the solid-state laser 100 is automatically turned off after the first rotatable mirror 141 is used for 100 hours, and the solid-state laser 100 is turned back on, the controller 180 receives the first laser output instruction, and the controller 180 controls the first rotatable mirror 141 to rotate to the first position and then rotate +30 °, so that the position of the first laser incident on the first rotatable mirror 141 is changed. Through the periodic point changing function, the service life of the solid laser 100 is prolonged to a certain extent, and certain maintenance cost is reduced for manufacturers and users.
Optionally, in some other embodiments, in order to improve automation of the solid state laser 100, please refer to fig. 5 again, the controller 180 is further connected to the first laser module 110, the second laser module 120, the third laser module 130, the first laser input module 151, and the second laser input module 152, and the controller 180 is further configured to: after the first rotatable mirror 141 rotates to the first position or the second position, the first laser input module 151 is controlled to output the first laser light source, and the first acousto-optic Q-switch 113 of the first laser module 110 is controlled to be turned on, so that the first laser light is output to the first rotatable mirror 141; after the second rotatable mirror 142 rotates to the third position, the frequency doubling crystal 124 of the second laser module 120 and the frequency tripling crystal 132 of the third laser module 130 are controlled to work, so that after the frequency doubling crystal 124 and the frequency tripling crystal 132 reach preset working temperatures, the first laser input module 151 is controlled to output the first laser light source, the second laser input module 152 is controlled to output the second laser light source, and the first acousto-optic Q switch 113 and the second acousto-optic Q switch 123 are controlled to be turned on, so that third laser light is output; after the second rotatable mirror 142 rotates to the fourth position, the frequency doubling crystal 124 of the second laser module 120 is controlled to operate, so that the frequency doubling crystal 124 reaches a preset operating temperature, the second laser input module 152 is controlled to output the second laser light source, and the second acousto-optic Q-switch 123 is controlled to be turned on, so as to output the second laser.
In this embodiment, the first rotatable mirror 141 and the second rotatable mirror 142 may be square mirrors, and the switching of the mirror portions is realized by two-dimensional translation, so as to realize the functions of the first rotatable mirror 141 and the second rotatable mirror 142 in this embodiment.
In this embodiment, when an antireflection film and a high-reflection film, or two antireflection films with different wavelengths, or two high-reflection films with different wavelengths are simultaneously plated, two films or one film with two functions may be used, and the film may be selected according to actual situations.
In this embodiment, the solid laser 100 outputs the first laser through the first laser module 110, the second laser module 120 outputs the second laser, the first rotatable mirror 141 and the second rotatable mirror 142 rotate to different positions, so as to selectively output the first laser or the third laser, the wavelengths of the first laser or the third laser are different, the power density is approximately the same, the problem of low power density of fundamental frequency light and frequency doubling light is solved, one machine can selectively output lasers with different wavelengths, the power density of the lasers is high, and the utilization rate and the cost performance of the product are improved.
It should be noted that the description of the present invention and the accompanying drawings illustrate preferred embodiments of the present invention, but the present invention may be embodied in many different forms and is not limited to the embodiments described in the present specification, which are provided as additional limitations to the present invention, and the present invention is provided for understanding the present disclosure more fully. Furthermore, the above-mentioned technical features are combined with each other to form various embodiments which are not listed above, and all of them are regarded as the scope of the present invention described in the specification; further, modifications and variations will occur to those skilled in the art in light of the foregoing description, and it is intended to cover all such modifications and variations as fall within the true spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A solid laser is characterized in that the solid laser is used for outputting one path of laser or outputting two paths of laser simultaneously, and the solid laser comprises:
the first laser module is used for receiving a first laser light source and converting the first laser light source into first laser output;
first rotatable mirror is located the output of first laser module, first rotatable mirror is equipped with first mirror portion, second mirror portion and third mirror portion, first mirror portion with second mirror portion locates same one side of first rotatable mirror, third mirror portion locates the opposite side of first rotatable mirror, first rotatable mirror is used for: when the laser device is located at a first position, the first laser light is reflected by the first mirror part and is output along a first output direction of the first rotatable mirror, so that the first laser light is output, and when the laser device is located at a second position, the first laser light is transmitted by the second mirror part and the third mirror part, so that the first laser light is output along a second output direction of the first rotatable mirror;
the second laser module is used for receiving a second laser light source and converting the second laser light source into second laser light to be output;
the second rotatable mirror is located the second output direction of first rotatable mirror with the output of second laser module, the second rotatable mirror is equipped with fourth mirror portion and sixth mirror portion, fourth mirror portion with sixth mirror portion locates the relative both sides of second rotatable mirror, the second rotatable mirror is used for: when the laser device is located at the third position, the first laser light transmitted by the first rotatable mirror is reflected by the sixth mirror portion, so that the first laser light is output along the first output direction of the second rotatable mirror, and the second laser light is transmitted by the fourth mirror portion, so that the second laser light is output along the first output direction of the second rotatable mirror, the second rotatable mirror is further provided with a fifth mirror portion, the fifth mirror portion and the fourth mirror portion are located on the same side of the second rotatable mirror, and the second rotatable mirror is further configured to: when the second laser light is positioned at the fourth position, the fifth mirror part reflects the second laser light, so that the second laser light is output along the second output direction of the second rotatable mirror;
and the third laser module is arranged in the first output direction of the second rotatable mirror and used for receiving the first laser and the second laser and converting the first laser and the second laser into third laser to be output, so that the third laser is output.
2. The solid state laser of claim 1, further comprising: a mirror; the reflector is arranged in a second output direction of the second rotatable mirror, and the reflector is used for: reflecting the second laser light, thereby outputting the second laser light.
3. A solid state laser as claimed in claim 2 wherein the first laser module comprises, in sequence: the laser comprises a first total reflection mirror, a first laser crystal, a first acousto-optic Q switch and a first output mirror;
the first full mirror is used for transmitting the first laser light source; the first laser crystal is used for converting the first laser light source transmitted by the first total reflection mirror into the first laser light; the first acousto-optic Q switch is used for modulating continuous first laser light into pulse first laser light; the first output mirror is used for transmitting the first laser light so as to enable the first laser light to be output to the first rotatable mirror;
the first fully-reflecting mirror is further configured to reflect the first laser light source, and the first output mirror is further configured to reflect the first laser light source, so that the first fully-reflecting mirror and the first output mirror form a resonant cavity of the first laser light, and thus the first laser light source that is not converted into the first laser light oscillates among the first fully-reflecting mirror, the first laser crystal, the first acousto-optic Q-switch, and the first output mirror.
4. A solid state laser as claimed in claim 2 wherein the second laser module comprises, in sequence: the laser comprises a second full-reflecting mirror, a second laser crystal, a second acousto-optic Q switch, a frequency doubling crystal and a second output mirror.
5. The solid state laser of claim 2, further comprising:
the first laser input module is arranged at the input end of the first laser module and used for generating and emitting the first laser light source;
and the second laser input module is arranged at the input end of the second laser module and used for generating and transmitting the second laser light source.
6. The solid state laser of claim 5, further comprising:
the first focusing module is arranged between the first laser input module and the first laser module and used for focusing the first laser light source to the first laser module;
and the second focusing module is arranged between the second laser input module and the second laser module and used for focusing the second laser light source to the second laser module.
7. The solid state laser of claim 2, wherein the third laser module comprises: a frequency tripling crystal and a third output mirror;
the frequency tripling crystal is arranged in the first output direction of the second rotatable mirror and used for converting the first laser and the second laser into third laser;
the third output mirror is configured to transmit the third laser light, thereby outputting the third laser light.
8. The solid state laser of claim 7, wherein the third laser module further comprises: a light spot shaping submodule;
the light spot shaping submodule is arranged at one end, far away from the frequency tripling crystal, of the third output mirror and is used for shaping the third laser.
9. The solid state laser of claim 7, further comprising:
the first focusing lens is arranged in the second output direction of the first rotatable mirror and used for focusing the first laser light transmitted by the first rotatable mirror to the second rotatable mirror;
and the second focusing lens is arranged in the first output direction of the second rotatable mirror and used for focusing the first laser light reflected by the second rotatable mirror and the second laser light transmitted by the second rotatable mirror to the third laser module.
10. A solid state laser according to any one of claims 2-9, further comprising: a controller;
the controller is connected with the first rotatable mirror and the second rotatable mirror respectively, and the controller is used for: when a first laser output instruction is received, controlling the first rotatable mirror to rotate to the first position; when a second laser output instruction is received, controlling the second rotatable mirror to rotate to the fourth position; and when a third laser output instruction is received, controlling the first rotatable mirror to rotate to the second position, and simultaneously controlling the second rotatable mirror to rotate to the third position.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811479135.5A CN109361148B (en) | 2018-12-05 | 2018-12-05 | Solid laser |
| PCT/CN2019/123419 WO2020114468A1 (en) | 2018-12-05 | 2019-12-05 | Solid laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811479135.5A CN109361148B (en) | 2018-12-05 | 2018-12-05 | Solid laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109361148A CN109361148A (en) | 2019-02-19 |
| CN109361148B true CN109361148B (en) | 2020-11-24 |
Family
ID=65331345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811479135.5A Active CN109361148B (en) | 2018-12-05 | 2018-12-05 | Solid laser |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109361148B (en) |
| WO (1) | WO2020114468A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109361148B (en) * | 2018-12-05 | 2020-11-24 | 深圳市创鑫激光股份有限公司 | Solid laser |
| CN110277726B (en) * | 2019-07-11 | 2024-05-03 | 长春新产业光电技术有限公司 | Acousto-optic Q-switched ultraviolet laser |
| CN114094431A (en) * | 2021-10-30 | 2022-02-25 | 深圳中科飞测科技股份有限公司 | Laser beam optimizing device and laser |
| CN114094430A (en) * | 2021-10-30 | 2022-02-25 | 深圳中科飞测科技股份有限公司 | Laser regulation and control method based on frequency conversion crystal point changing and storage medium |
| CN118315902B (en) * | 2024-03-25 | 2024-10-01 | 华南理工大学 | Ultrafast time delay wavelength scanning ultraviolet femtosecond laser pulse train generating device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280807A (en) * | 2011-07-13 | 2011-12-14 | 山东瑞华同辉光电科技有限公司 | Medical multi-wavelength laser |
| CN202373841U (en) * | 2011-12-02 | 2012-08-08 | 合肥安恒光电有限公司 | Outside-cavity frequency-doubling neodymium-doped yttrium aluminum garnet laser device |
| CN105846305A (en) * | 2016-05-20 | 2016-08-10 | 中国人民解放军军事医学科学院 | Two-channel multi-wavelength pulse laser capable of realizing multi-working-mode switching control |
| CN106299996A (en) * | 2016-04-08 | 2017-01-04 | 上海瑞柯恩激光技术有限公司 | Laser device and the method obtaining multi-wavelength's laser |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7016103B2 (en) * | 2000-09-06 | 2006-03-21 | Time-Bandwith Products Ag | Multiwavelength light source using an optical parametric oscillator |
| CN201054458Y (en) * | 2007-05-28 | 2008-04-30 | 北京光电技术研究所 | Medical multi-wavelength laser device |
| CN104201545B (en) * | 2014-08-06 | 2016-06-15 | 深圳大学 | Based on the ultra broadband super continuum source of two waveband optical fiber laser |
| US9647771B2 (en) * | 2015-09-30 | 2017-05-09 | The United States Of America, As Represented By The Secretary Of The Navy | Wavelength optimization for underwater optical communications |
| CN105552697A (en) * | 2016-02-04 | 2016-05-04 | 长春光机医疗仪器有限公司 | Sum frequency laser and laser therapeutic instrument |
| CN109361148B (en) * | 2018-12-05 | 2020-11-24 | 深圳市创鑫激光股份有限公司 | Solid laser |
-
2018
- 2018-12-05 CN CN201811479135.5A patent/CN109361148B/en active Active
-
2019
- 2019-12-05 WO PCT/CN2019/123419 patent/WO2020114468A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102280807A (en) * | 2011-07-13 | 2011-12-14 | 山东瑞华同辉光电科技有限公司 | Medical multi-wavelength laser |
| CN202373841U (en) * | 2011-12-02 | 2012-08-08 | 合肥安恒光电有限公司 | Outside-cavity frequency-doubling neodymium-doped yttrium aluminum garnet laser device |
| CN106299996A (en) * | 2016-04-08 | 2017-01-04 | 上海瑞柯恩激光技术有限公司 | Laser device and the method obtaining multi-wavelength's laser |
| CN105846305A (en) * | 2016-05-20 | 2016-08-10 | 中国人民解放军军事医学科学院 | Two-channel multi-wavelength pulse laser capable of realizing multi-working-mode switching control |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109361148A (en) | 2019-02-19 |
| WO2020114468A1 (en) | 2020-06-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109361148B (en) | Solid laser | |
| US5446749A (en) | Diode pumped, multi axial mode, intracavity doubled laser | |
| JP4984104B2 (en) | Passive mode-locked picosecond laser | |
| US6347102B1 (en) | Wavelength conversion laser and a machining device using the same | |
| CN101777724B (en) | End-pumped dual-wavelength coaxial switching output Q-switched base-frequency and double-frequency laser | |
| CN110277726B (en) | Acousto-optic Q-switched ultraviolet laser | |
| CN107046222B (en) | Inner cavity optical parametric oscillator for realizing similar dual-wavelength output | |
| CN103618205A (en) | Full-solid-state single longitudinal mode yellow light laser | |
| US6287298B1 (en) | Diode pumped, multi axial mode intracavity doubled laser | |
| CN104953461A (en) | Solid laser based on twisted mode cavity and volume grating | |
| CN103715593A (en) | Single-frequency intermediate infrared light source system of 2-micron fiber laser pump | |
| CN210379758U (en) | Acousto-optic Q-switched ultraviolet laser | |
| CN202695966U (en) | Double-end-pumped intracavity sum-frequency 355nm-wavelength ultraviolet solid-state laser | |
| CN102570268A (en) | Intermediate infrared laser | |
| CN100438232C (en) | Quasi-continuous high power red, green double-wavelength laser with LD side pumping | |
| CN104409957B (en) | A kind of 2 μm of laser devices of narrow linewidth | |
| CN107946891B (en) | A kind of high-power ultraviolet solid-state laser | |
| CN115084980A (en) | High-power nanosecond extra-cavity quintupling frequency laser | |
| CN213212648U (en) | Dual-wavelength laser | |
| CN115498492A (en) | Single-frequency diamond single crystal ultraviolet laser | |
| CN211404996U (en) | Ultraviolet laser based on bicrystal structure | |
| CN202749676U (en) | End-pumped dual-wavelength coaxial switching output laser device | |
| CN217789031U (en) | Laser device | |
| CN110880670A (en) | High-efficiency optical parametric oscillator with adjustable threshold value | |
| WO2020093245A1 (en) | Solid laser device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |