CN201289958Y - Near-infrared-green laser transition module with temperature control and light control function - Google Patents
Near-infrared-green laser transition module with temperature control and light control function Download PDFInfo
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- CN201289958Y CN201289958Y CNU2008202025817U CN200820202581U CN201289958Y CN 201289958 Y CN201289958 Y CN 201289958Y CN U2008202025817 U CNU2008202025817 U CN U2008202025817U CN 200820202581 U CN200820202581 U CN 200820202581U CN 201289958 Y CN201289958 Y CN 201289958Y
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Abstract
The utility model discloses a near infrared green laser conversion module with temperature control and light control functions. The near infrared green laser conversion module comprises an 808 nm semiconductor laser, a silicon photo detector, YVO4 mixed with Nd, PPLN mixed with MgO, an optoisolator, an optical filter, a micro lens, a self-focusing lens, a freezer, a thermistor and a metal case; and the components are assembled and encapsulated to be a bubble-tight optical module through the processes of splicing, welding, line welding, coupling, commissioning and the like, inside the metal case provided with a tail pipe. The utility model ensures that the 808 nm laser emitting by LD is converted to be 1064 nm laser through the laser crystal Nd: YVO4, and then converted to be 532 nm green laser to be output by mixing periodically polarized LiNbO3 of MgO; the utility model has functions of power conversion and temperature an light control, has the characteristics of good reliability and compact structure and the like, and can serve as green laser source in a miniaturized laser image display.
Description
Technical field
The utility model relates to a kind of near-infrared-green laser convert light module with temperature control and light control functionality, and it is a kind of green laser source that can be used in the miniaturization laser image display.
Background technology
Visual image shows several different methods.As cathode ray tube (CRT), liquid crystal, plasma display etc., all can carry out COLOUR IMAGE VISUALIZATION OF HE, but volume is big, power consumption big, color is very not bright-coloured, image is very fineless and smooth.The appearance of laser is because its high density, small divergence angle, spectroscopic pure, relevant characteristics such as good related to sex provide a laser image demonstration way that makings is rich and varied, image is fine and smooth to people.And then, utilize semiconductor laser and device for non-linear optical to make the research that superior performance, cheap visible laser image show in recent years, more and more gradually.The low-power laser image shows that (or laser television) is exactly a tangible example.Its appearance has remedied big, the expensive shortcoming of Solid State Laser television indicator volume, and has kept advantages such as laser is bright in luster, clear picture, color is soft, the life-span is long.
The middle low power laser image shows, needs red, green, blue tricolor laser source.Produce tricolor laser multiple distinct methods is arranged.Usually, wavelength is that the semiconductor laser of 650nm (redness) is convenient to make, and is cheap, can be directly used in visible laser and show; And to green, the blue look laser of semiconductor, owing to material growth and element manufacturing difficulty, cost an arm and a leg, usually directly do not adopt green, blue look semiconductor laser, and adopt Wavelength conversion method to obtain green, blue laser, promptly the near-infrared semiconductor laser with big or middle power, two kinds of suitable wavelength is a pumping source, come pumped solid-state laser material and nonlinear optical material, change out green, blue laser.
Green generation of Laser has many documents and document announcement, but the overwhelming majority all is the research paper in the laboratory.Its experimental rig volume is big, and stability, reliability and the cost of device or system are not generally considered.Realize production practicability, also have a quite big segment distance.
The utility model content
First technical problem underlying to be solved in the utility model is: how to provide a kind of and realize light wavelength conversion, compact conformation, stable performance, price is relatively cheap and have temperature control and the green laser source of light control functionality.
In order to solve this technical problem underlying, the utility model adopts following technical scheme: a kind of near-infrared-green laser modular converter with temperature control and light control functionality, comprise solid laser crystal, nonlinear optical crystal, laser, wherein the laser launched of laser carries out wavelength Conversion successively in fixed laser crystal, nonlinear optical crystal; Described solid laser crystal is the vanadic acid yttrium Nd:YVO that mixes Nd
4, nonlinear optical crystal is the periodic polarized lithium niobate PPLN that mixes MgO, laser is a Strained Quantum Well Lasers; Also comprise the silicon back light detector that is arranged on the laser shady face; Above-mentioned components and parts are encapsulated in the Can, and the Can base is provided with the electrothermal semiconductor refrigerator, post thermistor near the laser, and the Can tail pipe is provided with the light-emitting window of aiming at the output light path of nonlinear optical crystal.
Above-mentioned silicon back light detector detects the emission light of pumping source, converts thereof into photovoltage with nominal voltage compares by light-operated circuit, according to the Output optical power of comparison error signal adjusting pumping source, thereby makes this module have the luminous power controlled function; The Can base is provided with thermistor and the temperature-adjusting circuit on electrothermal semiconductor refrigerator and the refrigerator, with the working temperature of detection and control laser, thereby makes module have the temperature controlled function.
In technique scheme, wherein first order wavelength Conversion is: adopting wavelength of transmitted light is the GaAs/AlGaAs Strained Quantum Well Lasers (SQW-LD) of 808nm, during input (300-500) mA drive current, owing to the wavelength selection of laser LD gain of light spectrum and optical resonator, can obtain the near infrared light of (200-300) mW, 808nm; This infrared light incides the vanadic acid yttrium YVO that mixes Nd
4In, absorbed by the Nd ion in the material, cause in the ion suitably the optical transition that makes progress of the electronics of energy level, and be in upper state; According to the lowest potential energy principle, the electronics of upper state is unsettled, will produce spontaneous radiation or stimulated radiation, thus the infrared laser of emission 1064nm.And second level wavelength Conversion is: adopt height to mix the periodic polarized lithium niobate PPLN of (doping level is 0.48-0.52%) MgO, realize the optical frequency-doubling of 1064nm laser, promptly change and export the green laser of 532nm.At pure nonlinear optical crystal LiNbO
3In, for improving optical characteristics, make 2 important process, wherein one is treated to: at growth LiNbO
3During optical crystal, mix simultaneously and account for LiNbO
3The MgO of molecule sum 0.48-0.52% is taken this to reduce the coercive field of crystal and is improved the anaclasis damage threshold; Another is treated to: by applying high electric field pulse, fabrication cycle, the permanent ferroelectric domain of self poling, realizing the fundamental frequency light refractive index identical, thereby realize the accurate phase matched of fundamental frequency light and frequency doubled light in the crystal with frequency doubled light.Can improve conversion efficiency so greatly from fundamental frequency light to frequency doubled light.
In technique scheme, adopt electrothermal semiconductor refrigerator (TEC), thermistor and Can, Si-PD photo-detector backlight, optical isolator, working temperature and the Output optical power of emphasis control laser LD reach power stability and Wavelength stabilized purpose.Electric heating refrigerator TEC, thermistor and temperature-adjusting circuit can make the working temperature of shell inner laser device LD be controlled at (22-30) ℃ scope; Si-PD detector backlight, control circuit then by adjusting the drive current of laser LD, reach the purpose of stablizing the LD optical output power.
Second technical problem underlying to be solved in the utility model is: how a kind of optical transmission efficiently and coupled system are provided.In order to solve this technical problem, the utility model is on the solution of aforementioned first technical problem underlying, in advancing of solid laser crystal and nonlinear optical crystal anti-reflection film is set rightly on light face and the exiting surface, and the GRIN Lens of optically focused lenticule and magnetic tape trailer fibre is set on the output light path of nonlinear optical crystal, by precise and tiny aligning, accurate location, Stress Control/release tech, improve light utilization efficiency, reduce light dissipation and light reflection, reach the purpose of efficiency light transmission and coupling.
The 3rd technical problem underlying to be solved in the utility model is: how a kind of do not have clutter, the pure green laser source of spectrum are provided.In order to solve this technical problem, the utility model is on the basis of aforementioned techniques scheme, at crystal YVO
4With PPLN advance the deielectric-coating (be high-reflecting film) of light face and exiting surface plating with suitable reflectivity, and the 532nm filter is installed on the output light path of PPLN.
The utility model patent relates to the modular converter of GaAs/AlGaAs Strained Quantum Well Lasers near infrared light-green laser, its mainly by semiconductor laser LD, the silicon photo-detector of 808nm, mix the YVO of Nd
4, mix compositions such as the PPLN of MgO and optical isolator, optical filter, lenticule, self-focusing lens, refrigerator, thermistor, Detection ﹠ Controling circuit board, Can.In the Can of magnetic tape trailer pipe, by the weldering of bonding, welding, line, coupling, transfer technology such as surveys, it is fast that a bubble-tight optical mode is assembled and be packaged into to above-mentioned device and element.The 808nm laser that the utility model is launched semiconductor laser LD is by laser crystal Nd:YVO
4Be transformed to the laser of 1064nm, mix the periodic polarized LiNbO of MgO again by nonlinear optical crystal
3Be transformed to the green laser output of 532nm.For light stable power and wavelength, adopted semiconductor heat electric refrigerator, temperature-adjusting circuit and bulk silicon back light detector, thereby realized temperature control and light-operated.This optical module has characteristics such as near-infrared-green laser wavelength and power transfer, temperature control and light control functionality, good reliability, compact conformation, can be used as the green laser source in the miniaturization laser image display.
Description of drawings
Fig. 1 is the overall construction drawing of near-infrared-green laser modular converter with temperature control and light control functionality;
Fig. 2 is green laser two-stage light wavelength conversion configuration schematic diagram;
Fig. 3 is a Nd:YOV4 habit structure chart;
Fig. 4 is a PPLN habit structure chart.
Embodiment
The utlity model has the near-infrared-green laser modular converter of temperature control and light control functionality, comprise device and elements such as the optical crystal material of 2 opto-electronic devices, 2 wavelength Conversion and optical isolator, optical filter, lenticule, refrigerator, thermistor, self-focusing lens.These components and parts of the present utility model all are encapsulated in the Can 6 of magnetic tape trailer pipe 61.
As the near-infrared with temperature control and light control functionality-green laser modular converter, at first be to make to stablize superior optical pumping source and monitoring photo-detector.As shown in Figure 1, the utility model pump light source is the Strained Quantum Well Lasers 2 (SQW-LD) of dress in transition heat sink 63, and its output wavelength is 808nm, and operating current is (300-500) mA, Output optical power (200-300) mW.Shady face at SQW-LD laser 2, one bulk silicon back light detector 9 (Si-PD) is housed, its optical responsivity is (0.4-0.5) A/W, and it surveys the back side emission light that is directly proportional with laser LD front end face emission luminous power, and becomes corresponding light voltage through circuit conversion.This photovoltage and nominal voltage compare, and provide error signal, and nationality is to realize the preceding section Output optical power control (APC) to laser 2.
As shown in Figure 3,2 material for transformation of wave length in the wavelength Conversion optical module, one is solid laser crystal 1, promptly mixes the vanadic acid yttrium (Nd:YVO of Nd
4), its overall dimension is 1.5mm * 1.5mm * 2.0mm.When the 808nm near-infrared laser by semiconductor laser 2 emissions incides crystal Nd:YVO
4When middle, the electron institute of the outer suitably energy level of the Nd ion that is mixed in the crystal absorbs, thereby produces the optical transition to high level; But the high level state is unsettled, produces the optical transition to more stable low-lying level immediately, and to follow emission wavelength be the laser of 1064nm.This has just realized first order wavelength Conversion, as shown in Figure 2.For preventing the influence of reverberation to 808nm laser 2, the laser plating that to advance 11 pairs of wavelength of light face be 808nm of solid laser crystal 1 is 0.5% anti-reflection film 41, is the high-reflecting film 42 of the laser plating of 1064nm with reflectivity 99% to wavelength with reflectivity; And the laser that 12 pairs of wavelength of exiting surface are 1064nm plating is with reflectivity 0.2% anti-reflection film 43.
As shown in Figure 4, another material for transformation of wave length in the wavelength Conversion module is a nonlinear optical crystal 3---mix the PPLN of MgO, its overall dimension is 1.0mm * 3.0mm * 3.0mm.Lithium niobate 3 inside at highly doped (0.48-0.52%) MgO, by the high electric field pulse fabrication cycle is the positive and negative ferroelectric domain (being PPLN) of 6.5m, make fundamental frequency light and frequency doubled light have identical refractive index, nationality to be realizing the accurate phase matched of fundamental frequency light and frequency doubled light, thereby obtains higher frequency doubled light conversion efficiency.Like this, from crystal Nd:YVO
4Be injected into the 1064nm laser of crystal PPLN, by the optical frequency-doubling process, being converted to Output optical power is the green laser of 532nm for (5-15) mA, optical wavelength.This has just realized second level wavelength conversion, as shown in Figure 2; Thereby the laser that Strained Quantum Well Lasers 2 is sent is through Nd:YVO
4Behind crystal 1 and the MgO:PPLN crystal 3 two-stage wavelength conversion, be converted into the green laser that wavelength is 532nm, emit from the light-emitting window 62 of Can 6.For preventing that reverberation is to crystal Nd:YVO
4Influence, the plating of laser that it advances 31 pairs of wavelength of light face is 1064nm is the high-reflecting film 52 of the laser plating of 532nm with reflectivity 99% with reflectivity 0.5% anti-reflection film 51, to wavelength; Is that the laser plating of 532nm is with reflectivity 0.2% anti-reflection film 53 32 of exiting surfaces to wavelength.
In addition, laser 2 just below and the next door respectively device thermoelectric refrigerating unit 7 (TEC) and thermistor 8 are arranged, with realization laser LD at (22-30) ℃ following steady operation.Wherein the TEC maximum voltage range is ± 2.0V, and the maximum current scope is ± 1.5A; The resistance of thermistor 8 is (10-15) K Ω.
Further, (be Nd:YVO at pump laser 2 and solid laser crystal 1
4) between the output light path on, optical isolator 10 is installed, with the influence of the reverberation that advances light face 11 that prevents solid laser crystal 1, so that make output pumping light power and wavelength more stable to pump laser 2.
The GRIN Lens 40 that optical filter 20, optically focused lenticule 30 and magnetic tape trailer fibre preferably, are arranged between crystal PPLN and Can tail pipe 61.They can address the problem better:
A) the high-purity problem of green laser, i.e. filtering are mingled in 808nm in the green glow and the veiling glare of 1064nm;
B) efficient, high density optical coupling problem promptly by the GRIN Lens of optically focused lenticule and magnetic tape trailer fibre, transfers out the green laser after the wavelength Conversion of the second level better.
C) LD integrity problem promptly by sealing of shell tail pipe and the sealing of pipe lid, is hedged off from the outer world the set of data/device in the shell, has exempted harmful effects such as extraneous dust, steam.
Near-infrared-green laser convert light the modular design and the manufacturing process that the utlity model has temperature control and light control functionality are as follows:
1, design and make the magnetic tape trailer pipe, overall dimension is the Can of 12mm * 15mm * 30mm;
2, select the Strained Quantum Well Lasers (SQW-LD) of proper property, its major parameter is: output wavelength is 808nm, and operating current is (300-500) mA, Output optical power (200-300) mW.
3, select TEC, optical isolator, optical filter, lenticule and the GRIN Lens of proper property.
4, design and making solid laser crystal Nd:YVO
4In, its overall dimension is 1.5mm * 1.5mm * 2.0mm.For preventing the influence of reverberation to the 808nm laser, advance light in the face of 808nm plating with reflectivity be 0.5% high transmittance film, to the high-reflecting film of 1064nm plating with reflectivity 99%; And exiting surface plates with reflectivity 0.2% high transmittance film 1064nm.Its schematic diagram as shown in Figure 3.
5, nonlinear optical crystal---mix the PPLN of MgO, its overall dimension is 1.0mm * 3.0mm * 3.0mm for design and making.Lithium niobate (LN) inside of highly doped (0.48-0.52%) MgO, by the positive and negative ferroelectric domain of high electric field pulse fabrication cycle (being PPLN), make fundamental frequency light and frequency doubled light have identical refractive index, nationality is to realize the accurate phase matched of fundamental frequency light and frequency doubled light, thereby obtain higher frequency doubled light conversion efficiency, it is the key technology of PPLN that the green laser power of 532nm is made for the periodically positive and negative ferroelectric domain of (5-15) mW., the technology more complicated, required precision is very high
And the insulation environmental requirement of the pulse that adds high pressure is very high.Its main technique step is as follows:
A) be foundation with 1064nm fundamental wavelength, the opposite polarity cycle size of design magnetic domain;
B) according to the cycle size (6.5 μ m) of magnetic domain polarity, make the photoetching electrode template;
C) adopt the optical semiconductor lithography, make litho pattern mixing on the LN of MgO;
D) adopt plasma evaporation technology, depositing metal film on LN;
E) be formed by etching periodically metal electrode;
F) adopt suitable anchor clamps, (2.2-2.5KV) electric pulse adds high pressure on the periodicity metal electrode under height insulation environment;
G) remove metal electrode, and make clean; Then the LN wafer is at high temperature carried out stabilization processes;
H) PPLN is cut into little wafer, and carry out the end face polishing;
I) make the end face optical coating by specific wavelength (1064nm, 532nm) reflectance/transmittance requirement.
6, adopt the H74 epoxy glue, at Can bottom adhesive pad and TEC, (85 ± 5) ℃ down baking 60 minutes in baking oven then;
7, adopt the transition that bond on TEC of H74 epoxy glue heat sink, ℃ toasted 60 minutes down (85 ± 5) in baking oven then;
8, adopt H20E epoxy glue bond 808nm LD and Si-PD on transition is heat sink, ℃ toasted 60 minutes down (85 ± 5) in baking oven then;
9, adopt ultrasonic thermocompression soldered ball/wedge bonding machine to carry out metal connecting line for 808nm LD and Si-PD, and make preliminary photoelectricity test;
10, adopt H74 epoxy glue bond respectively thermistor, optical isolator and solid laser crystal Nd:YVO
4, (85 ± 5) ℃ baking 60 minutes down in baking oven then, and make preliminary photoelectricity test;
11, adopt H74 epoxy glue bond respectively PPLN and optical filter, and carry out the photoelectricity fine setting, (85 ± 5) ℃ down baking 60 minutes in baking oven then;
12. adopt bond respectively lenticule and of 353ND glue, and carry out the photoelectricity fine setting from focus lens; (100 ± 10) ℃ baking (30-60) minute down in baking oven then;
13. the device of having assembled is carried out photoelectricity test;
14. the device of having assembled is carried out cover plate soldering and sealing;
15. the device of having assembled is carried out burn-in screen.
Claims (8)
1, a kind of near-infrared-green laser modular converter with temperature control and light control functionality, comprise solid laser crystal, nonlinear optical crystal, laser, wherein the laser launched of laser carries out wavelength Conversion successively in fixed laser crystal, nonlinear optical crystal, and it is characterized in that: described solid laser crystal is the vanadic acid yttrium Nd:YVO that mixes Nd
4, nonlinear optical crystal is the periodic polarized lithium niobate PPLN that mixes MgO, laser is a Strained Quantum Well Lasers; Also comprise the silicon back light detector that is arranged on the laser shady face; Above-mentioned components and parts are encapsulated in the Can, and the Can base is provided with the electrothermal semiconductor refrigerator, post thermistor near the laser, and the Can tail pipe is provided with the light-emitting window of aiming at the output light path of nonlinear optical crystal.
2, the near-infrared-green laser modular converter with temperature control and light control functionality according to claim 1, it is characterized in that: described silicon back light detector detects the emission light of pumping source, convert thereof into photovoltage and compare by light-operated circuit with nominal voltage, regulate the Output optical power of pumping source according to comparison error signal, thereby make this module have the luminous power controlled function; The Can base is provided with thermistor and the temperature-adjusting circuit on electrothermal semiconductor refrigerator and the refrigerator, with the working temperature of detection and control laser, thereby makes module have the temperature controlled function.
3, the near-infrared-green laser modular converter with temperature control and light control functionality according to claim 2 is characterized in that: described vanadic acid yttrium Nd:YVO
4The light that advances be that the laser plating of 808nm be (0.2-0.5) % anti-reflection film with reflectivity in the face of centre wavelength, exiting surface is that the laser of 1064nm plates with reflectivity 0.2% anti-reflection film to centre wavelength; Described lithium niobate PPLN advance light in the face of centre wavelength be the laser plating of 1064nm with the anti-reflection film of reflectivity for (0.2-0.5) %, exiting surface is that the laser plating of 532nm is with reflectivity (0.2-0.5) % anti-reflection film to centre wavelength.
4, according to claim 2 or 3 described near-infrared-green laser modular converters, it is characterized in that: on the output light path of nonlinear optical crystal, be provided with the GRIN Lens of optically focused lenticule and magnetic tape trailer fibre with temperature control and light control functionality.
5, the near-infrared-green laser modular converter with temperature control and light control functionality according to claim 2 is characterized in that: described vanadic acid yttrium Nd:YVO
4The light that advances be that the laser plating of 1064nm is 99% high-reflecting film with reflectivity in the face of centre wavelength; The light that advances of described lithium niobate PPLN is that the laser plating of 532nm is 99% high-reflecting film with reflectivity in the face of centre wavelength.
6, according to claim 2 or 5 described near-infrared-green laser modular converters, it is characterized in that: on the output light path of nonlinear optical crystal, be provided with optical filter with temperature control and light control functionality.
7, according to the near-infrared-green laser modular converter with temperature control and light control functionality according to claim 1 and 2, it is characterized in that: on the light path between laser and the solid laser crystal, be provided with optical isolator.
8, the near-infrared-green laser modular converter with temperature control and light control functionality according to claim 1 and 2 is characterized in that: described periodic polarized lithium niobate PPLN inside, evenly mix with the MgO of concentration for (0.48-0.52) %.
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| CNU2008202025817U CN201289958Y (en) | 2008-10-28 | 2008-10-28 | Near-infrared-green laser transition module with temperature control and light control function |
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| CNU2008202025817U CN201289958Y (en) | 2008-10-28 | 2008-10-28 | Near-infrared-green laser transition module with temperature control and light control function |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103545700A (en) * | 2012-07-16 | 2014-01-29 | 徐卫文 | Integrated single-platform miniature laser |
| CN109602491A (en) * | 2018-12-19 | 2019-04-12 | 威海威高激光医疗设备股份有限公司 | Prostate laser ablation dual-wavelength high-power surgery apparatus |
-
2008
- 2008-10-28 CN CNU2008202025817U patent/CN201289958Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103545700A (en) * | 2012-07-16 | 2014-01-29 | 徐卫文 | Integrated single-platform miniature laser |
| CN109602491A (en) * | 2018-12-19 | 2019-04-12 | 威海威高激光医疗设备股份有限公司 | Prostate laser ablation dual-wavelength high-power surgery apparatus |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090812 Termination date: 20091130 |