CN109352888A - The moulding integrated device of spin coating - Google Patents
The moulding integrated device of spin coating Download PDFInfo
- Publication number
- CN109352888A CN109352888A CN201811507174.1A CN201811507174A CN109352888A CN 109352888 A CN109352888 A CN 109352888A CN 201811507174 A CN201811507174 A CN 201811507174A CN 109352888 A CN109352888 A CN 109352888A
- Authority
- CN
- China
- Prior art keywords
- dispensing
- spin coating
- spin
- light
- integrated device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004528 spin coating Methods 0.000 title claims abstract description 36
- 238000000465 moulding Methods 0.000 title claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000000016 photochemical curing Methods 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000005070 sampling Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 description 10
- 238000007711 solidification Methods 0.000 description 4
- 230000008023 solidification Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000010146 3D printing Methods 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/04—Rotational or centrifugal casting, i.e. coating the inside of a mould by rotating the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/10—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation for articles of indefinite length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/34—Component parts, details or accessories; Auxiliary operations
- B29C41/46—Heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
Abstract
The invention discloses a kind of moulding integrated device of spin coating, including spin coater, the side of spin coater is equipped with substrate mobile station and substrate mobile manipulator, and the other side is equipped with dispensing module, and dispensing module is equipped with light source module.Dispensing module includes dispenser, and dispenser is equipped with moving guide rail, and the lower end of moving guide rail is equipped with dispensing syringe, and dispensing syringe is connected with feed pipe.Light source module includes light-solidified lamp, and light-solidified lamp is located in the square lampshade above spin coater.The lower end of substrate mobile manipulator is equipped with scroll chuck.It is whole to have the characteristics that automation and pipeline system control, the processing flows such as setting-out, dispensing, spin coating, photocuring (especially for light-sensitive material), sampling are enable to automatically control completion, the pipeline system production for realizing spin coating sample, improves processing efficiency and precision.
Description
Technical field
The present invention relates to a kind of rapid moulding processing apparatus more particularly to a kind of moulding integrated devices of spin coating.
Background technique
Spin-coating equipment is a kind of by uniform film tiling to the device in flat substrate, and liquid is added dropwise by portion in a substrate
Material is spread in coating material on substrate using high-speed rotating centrifugal force.This main processing object of equipment is with not
With the rapid shaping fluent material of viscosity, minimum production precision reaches 1um.
Photosensitive resin often uses one of raw material as 3D printing, makes its solidification using the light source of specific wavelength after needing to print
Molding, formed precision and size depend on Method of printing and light source characteristic.
Conventional spin-coating equipment needs artificial progress substrate positioning, dispensing, the setting work such as revolving speed and time, sampling, has
Time-consuming and laborious disadvantage, and it is easy to produce error.When especially for photosensitive resin as spin-on material, people is needed after the completion of spin coating
Work holds light source and is irradiated to sample, and distance, time and illumination uniformity are difficult to control.
It is poor with the connectivity of other links when a link as product manufacturing is processed in spin coating, it greatly reduces
Efficiency when pipeline system being needed to produce.
Summary of the invention
The object of the present invention is to provide a kind of moulding integrated devices of spin coating.
The purpose of the present invention is what is be achieved through the following technical solutions:
The side of the moulding integrated device of spin coating of the invention, including spin coater, the spin coater is equipped with substrate mobile station
With substrate mobile manipulator, the other side is equipped with dispensing module, and the dispensing module is equipped with light source module.
As seen from the above technical solution provided by the invention, the moulding integrated dress of spin coating provided in an embodiment of the present invention
It sets, the processing flows such as setting-out, dispensing, spin coating, photocuring (especially for light-sensitive material), sampling is enable to automatically control completion, it is real
The pipeline system production of existing spin coating sample, improves processing efficiency and precision.
Detailed description of the invention
Fig. 1 is the moulding integrated apparatus structure schematic diagram of spin coating provided in an embodiment of the present invention.
Fig. 2 is the processing process schematic diagram of the embodiment of the present invention.
In figure:
1: spin coater；2: dispensing syringe；3: dispenser；4: mobile cylinder；5: photocuring lampshade (includes light-solidified lamp)；6:
Substrate mobile manipulator；7: substrate mobile station
Specific embodiment
The embodiment of the present invention will be described in further detail below.What is be not described in detail in the embodiment of the present invention is interior
Appearance belongs to the prior art well known to professional and technical personnel in the field.
The moulding integrated device of spin coating of the invention, preferable specific embodiment is:
Including spin coater, the side of the spin coater is equipped with substrate mobile station and substrate mobile manipulator, the other side are equipped with
Dispensing module, the dispensing module are equipped with light source module.
The dispensing module includes dispenser, and the dispenser is equipped with moving guide rail, and the lower end of the moving guide rail is set
There is a plastic pin cylinder, the dispensing syringe is connected with feed pipe.
The light source module includes light-solidified lamp, and the light-solidified lamp is located in the square lampshade above spin coater.
The light-solidified lamp includes but is not limited to ultraviolet lamp.
The lower end of the substrate mobile manipulator is equipped with scroll chuck.
The moulding integrated device of spin coating of the invention, device integrally have the characteristics that automation and pipeline system control, make
The processing flows such as setting-out, dispensing, spin coating, photocuring (especially for light-sensitive material), sampling can automatically control completion, realize spin coating
The pipeline system of sample produces, and improves processing efficiency and precision.
Specific embodiment:
Its overall structure is as shown in Figure 1, main component includes: commercial spin coater, dispensing module, light source module, takes sample
Manipulator and mating control software.
Commercial spin coater buying provides hard in mature supplier, the range of speeds and spin-coating time of settable needs
The control interface of part and software.
Dispensing module is made of dispenser, dispensing syringe, moving guide rail and associated pipe.Syringe is fixed on removable guide rail
One end is moved to above substrate center in dispensing operation.Feed pipe is connected to above dispensing syringe, dispenser promotes syringe real
Reveal material.
Light source module is assemblied in the bracket right above spin coater, and light-solidified lamp is located in square lampshade, cure lamp type
Including but not limited to ultraviolet lamp can be replaced as needed, and illumination zone is with no restrictions.
It puts sampling manipulator and is assemblied in removable guide rail one end, lower part is scroll chuck, for grabbing round loading substrate.
The clamp-shaped and loading substrate shape of manipulator are with no restrictions.
Fixed bracket is installed at left and right sides of spin coater, is respectively used to support and puts sampling manipulator, dispensing and light source module
(including related accessories).
Software systems can be controlled successively and put sampling manipulator, put the movement of front rail and solidify the opening and closing of lamp source, and energy
Realize the personal settings of spin coating revolving speed, spin-coating time and lighting hours.
Advantage and good effect:
The arrangement achieves the control of the pipeline system of spin coating process and productions, improve production efficiency and avoid manual behaviour
The error of work.By the movement and clamping control to manipulator, the automation for picking and placing sample is realized；By to dispensing syringe
Mobile and Solid rocket engine, realizes the automation of dispensing process；By the open and close control to fixed light source, material solidification is realized
The automation of process.
The device can realize the personal settings of spin coating parameters for different raw material, so that it is pervasive with material
Property.It is real by the setting of spin coating revolving speed, spin-coating time, dispensing push-in stroke, curing time etc. and saving relevant parameter in software
Now produce in batches.
The device is especially realized to the spin coating of sensitive liquid material (such as photosensitive resin) and solidification process control, by certainly
Dynamic dispensing control, automatic solidification control and personalizing parameters setting, so that the spin coating stability of light-sensitive material sample is guaranteed.
The device has many characteristics, such as that the complete controllable, process of process is stablized, and can integrally be used as pipeline system system of processing
Spin coating module.It, which picks and places sample manipulator, can be moved to sample substrate in specified region, with the phases such as other 3D printing methods such as FDM
In conjunction with, realize Multilayer Samples pipeline system manufacture.
The processing process of the device is as shown in Figure 2, comprising:
Spin speed, spin-coating time, dispensing push-in stroke and light needed for setting present material processing in system software
According to the time；
It picks and places sample manipulator and picks up the circular substrate on bracket, movement and manipulator behavior by guide rail, by base
Piece is placed in spin coater sample stage center, and manipulator moves back to initial position and awaits orders；
Vacuum pump startup, spin coater objective table adsorb substrate；
Dispensing syringe is moved to right above substrate by guide rail, and dispenser promotes the droplets of material of set amount to entreat in the substrate,
Syringe moves back to initial position and awaits orders；
Spin coater is started to work according to the revolving speed and time parameter of setting, until terminating；Ultraviolet curing lamp is opened, and keeps setting
Set time closing；
Manipulator is moved to above substrate, picks up substrate and movement, by sample+be placed on bracket.
Specifically, the present apparatus is suitable for different types of fluent material, and corresponding different machining parameters can be in software
Carry out personal settings.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Subject to enclosing.
Claims (5)
1. a kind of moulding integrated device of spin coating, which is characterized in that including spin coater, the side of the spin coater is moved equipped with substrate
Dynamic platform and substrate mobile manipulator, the other side are equipped with dispensing module, and the dispensing module is equipped with light source module.
2. the moulding integrated device of spin coating according to claim 1, which is characterized in that the dispensing module includes dispensing
Machine, the dispenser are equipped with moving guide rail, and the lower end of the moving guide rail is equipped with dispensing syringe, and the dispensing syringe is connected with
Feed pipe.
3. the moulding integrated device of spin coating according to claim 2, which is characterized in that the light source module includes photocuring
Lamp, the light-solidified lamp are located in the square lampshade above spin coater.
4. the moulding integrated device of spin coating according to claim 3, which is characterized in that the light-solidified lamp includes ultraviolet
Lamp.
5. the moulding integrated device of spin coating according to any one of claims 1 to 4, which is characterized in that the substrate is mobile
The lower end of manipulator is equipped with scroll chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811507174.1A CN109352888A (en) | 2018-12-10 | 2018-12-10 | The moulding integrated device of spin coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811507174.1A CN109352888A (en) | 2018-12-10 | 2018-12-10 | The moulding integrated device of spin coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109352888A true CN109352888A (en) | 2019-02-19 |
Family
ID=65331916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811507174.1A Pending CN109352888A (en) | 2018-12-10 | 2018-12-10 | The moulding integrated device of spin coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109352888A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113333235A (en) * | 2021-04-28 | 2021-09-03 | 西安交通大学 | Digital photocuring spin coating instrument for preparing sterile wound dressing with controllable shape |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101494068A (en) * | 2009-03-04 | 2009-07-29 | 苏州新海博数码科技有限公司 | Method for manufacturing blue light optical disc reading layer |
| CN101657854A (en) * | 2007-04-11 | 2010-02-24 | 株式会社理光 | Spin coater, temperature controlling method of the same, optical disc production apparatus, and optical disc production method |
| CN102262885A (en) * | 2010-05-28 | 2011-11-30 | 上海拓引数码技术有限公司 | Gradient heating device of improving bluray disc (BD) 0.1mm cover layer uniformity and method thereof |
| CN203018272U (en) * | 2012-11-28 | 2013-06-26 | 深圳市策维科技有限公司 | Double-station curing dispenser |
| KR20130119145A (en) * | 2012-04-23 | 2013-10-31 | 한국프린티드일렉트로닉스연구조합 | A photolithography device for spin coating combined with uv curing technology |
| CN203465936U (en) * | 2013-08-28 | 2014-03-05 | 江西华文光电股份有限公司 | Blue-ray disc UV curing device |
| CN105478415A (en) * | 2015-12-30 | 2016-04-13 | 中国科学院上海硅酸盐研究所 | Full-automatic surface treatment machine |
| CN106918857A (en) * | 2017-04-18 | 2017-07-04 | 仇凯弘 | A kind of apparatus and method for preparing nanometer grating |
| CN209888004U (en) * | 2018-12-10 | 2020-01-03 | 中国科学技术大学 | Spin coating forming integrated device |
-
2018
- 2018-12-10 CN CN201811507174.1A patent/CN109352888A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101657854A (en) * | 2007-04-11 | 2010-02-24 | 株式会社理光 | Spin coater, temperature controlling method of the same, optical disc production apparatus, and optical disc production method |
| CN101494068A (en) * | 2009-03-04 | 2009-07-29 | 苏州新海博数码科技有限公司 | Method for manufacturing blue light optical disc reading layer |
| CN102262885A (en) * | 2010-05-28 | 2011-11-30 | 上海拓引数码技术有限公司 | Gradient heating device of improving bluray disc (BD) 0.1mm cover layer uniformity and method thereof |
| KR20130119145A (en) * | 2012-04-23 | 2013-10-31 | 한국프린티드일렉트로닉스연구조합 | A photolithography device for spin coating combined with uv curing technology |
| CN203018272U (en) * | 2012-11-28 | 2013-06-26 | 深圳市策维科技有限公司 | Double-station curing dispenser |
| CN203465936U (en) * | 2013-08-28 | 2014-03-05 | 江西华文光电股份有限公司 | Blue-ray disc UV curing device |
| CN105478415A (en) * | 2015-12-30 | 2016-04-13 | 中国科学院上海硅酸盐研究所 | Full-automatic surface treatment machine |
| CN106918857A (en) * | 2017-04-18 | 2017-07-04 | 仇凯弘 | A kind of apparatus and method for preparing nanometer grating |
| CN209888004U (en) * | 2018-12-10 | 2020-01-03 | 中国科学技术大学 | Spin coating forming integrated device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113333235A (en) * | 2021-04-28 | 2021-09-03 | 西安交通大学 | Digital photocuring spin coating instrument for preparing sterile wound dressing with controllable shape |
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