CN105478415A - Full-automatic surface treatment machine - Google Patents
Full-automatic surface treatment machine Download PDFInfo
- Publication number
- CN105478415A CN105478415A CN201511011644.1A CN201511011644A CN105478415A CN 105478415 A CN105478415 A CN 105478415A CN 201511011644 A CN201511011644 A CN 201511011644A CN 105478415 A CN105478415 A CN 105478415A
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- CN
- China
- Prior art keywords
- sample
- platform
- full
- plasma cleaning
- spin coating
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/002—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the work consisting of separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Cleaning In General (AREA)
- Coating Apparatus (AREA)
Abstract
The invention provides a full-automatic surface treatment machine. The full-automatic surface treatment machine comprises an equipment platform, a sample support, a sample plasma cleaning table, a sample rotary coating table, a sample discharging mechanism, a plasma cleaning mechanism, a rotary coating glue dropping mechanism and a mechanical arm, wherein the sample support, the sample plasma cleaning table, the sample rotary coating table and the sample discharging mechanism are arranged on the equipment platform; the plasma cleaning mechanism is used for cleaning samples carried on the sample plasma cleaning table; the rotary coating glue dropping mechanism is used for conducting rotary coating surface treatment on the sample carried on the sample plasma cleaning table; and the mechanical arm is allocated to sequentially convey the sample carried on the sample plasma cleaning table to the sample plasma cleaning table, the sample rotary coating table and the sample discharging mechanism. By means of the full-automatic surface treatment machine, the functions of plasma cleaning and surface rotary coating pretreatment can be integrated, and automatic feeding and automatic discharging are achieved.
Description
Technical field
The invention belongs to automation equipment control field, particularly relate to one and the full-automatic surface treating machine of surface-treated is carried out to sample.
Background technology
The technique such as surface cleaning, pretreatment is carried out to sample, is widely used in the industries such as semiconductor, photovoltaic and electronic product.Sample surfaces is cleaned, removes organic impurities, be conducive to guaranteeing product quality, enhance product performance; Pretreatment is carried out to sample surfaces, is for next step production technology is ready, is conducive to the yield rate, properties of product etc. that improve next step technique.
At present, solvent clean, ultraviolet cleaning, ozone clean and plasma cleaning etc. are had for the method that product surface is clean.Plasma cleaning, compared with other cleaning modes, because its cleaning speed is fast, be convenient to the advantages such as automation, is more suitable for automation equipment.Spin coating proceeding, because it is to advantages such as extensively applicable, with low cost, the convenient operations of material previously treated, makes it easy to automation equipment integrated.In addition, at present for surface cleaning and the pretreatment of sample, be usually divided into different technique, step by step, subset carries out.This not only can cause sample surfaces easily to cause secondary pollution, and expends place, is unfavorable for intensive, high efficiency production.
Summary of the invention
In view of the above-mentioned defect existed in prior art, technical problem to be solved by this invention is to provide a kind of full-automatic surface treating machine integrating plasma cleaning and surperficial spin coating preprocessing function, automatic charging, automatic blanking.
In order to solve the problems of the technologies described above, the full-automatic surface treating machine of one provided by the present invention, comprising: equipment platform; Be arranged at the sample holder on described equipment platform, sample plasma cleaning platform, sample spin coating platform and sample cutting agency; For the plasma cleaning mechanism cleaned the sample be placed on described sample plasma cleaning platform; For carrying out spin coating surface-treated spin coating adhesive dripping machine structure to the sample be placed on described sample spin coating platform; Be configured to the manipulator sample be placed on described sample holder being delivered to successively described sample plasma cleaning platform, sample spin coating platform and sample cutting agency.
According to the present invention, when using this full-automatic surface treating machine, plasma cleaning and the surperficial spin coating pretreating process of sample can complete on the same device continuously, and sample can automatic charging, blanking, avoid the sample secondary pollution problem that substep carries out bringing, and automaticity is high, it is efficiently convenient to operate.And described equipment platform is for fixing, supporting each several part mechanism of full-automatic surface treating machine.
Again, in the present invention, the quantity of described sample holder can be one or more.
According to the present invention, one or more described sample holder can be used for placing one or morely treats surface-treated sample, is conducive to high efficiency production.
Described sample plasma cleaning platform moves in the horizontal direction, and the central authorities of described sample plasma cleaning platform are provided with the vacuum sucking holes for adsorbing described sample.
According to the present invention, described sample plasma cleaning platform can move in the horizontal direction, and translational speed is controlled; Described sample plasma cleaning platform central authorities also can arrange vacuum sucking holes, for being sucked by sample in plasma cleaning process, prevent sample from falling.
Again, in the present invention, also can be that described plasma cleaning mechanism comprises plasma gun, plasma gun horizontal stand and plasma gun vertical support frame; Described plasma gun horizontal stand makes described plasma gun move in the horizontal direction by stretch mode; The moving direction of described plasma gun is vertical with the moving direction of described sample plasma cleaning platform.
According to the present invention, described plasma cleaning mechanism, is made up of plasma gun, plasma gun horizontal stand and plasma gun vertical support frame; Plasma gun horizontal stand makes plasma gun move in the horizontal direction by stretch mode, and translational speed is controlled; Plasma gun moving direction is vertical with sample plasma cleaning platform moving direction.Thus guarantee that the whole surface of sample is cleaned.
After sample is sucked by the vacuum sucking holes of its central authorities by described sample spin coating platform, described sample is driven to rotate around the axle of the vertical direction of described sample spin coating platform.
According to the present invention, sample spin coating platform can be used for supporting pending sample, and spin coating platform vacuum sucking holes produces negative pressure by vacuumizing mode, is sucked by sample.
Described spin coating adhesive dripping machine structure comprises a glue head, drips glue head horizontal stand and drip glue head vertical support frame; Described glue head horizontal stand makes the described glue head that drips move in the horizontal direction by stretch mode; Described glue head vertical support frame vertically stretches.
According to the present invention, described spin coating adhesive dripping machine structure, forms by dripping glue head, dripping glue head horizontal stand and dripping glue head vertical support frame; Described glue head horizontal stand makes to drip glue head by stretch mode and moves in the horizontal direction, and translational speed is controlled; Drip glue head vertical support frame can vertically stretch; Thus be conducive to carrying out spin coating surface treatment.
Again, in the present invention, also can be that described sample cutting agency comprises blanking bench and is installed on the conveyer belt on described blanking bench.
According to the present invention, described sample cutting agency is made up of blanking bench and the conveyer belt be installed on blanking bench.Complete the sample after spin coating operation, be transferred to sample cutting agency by manipulator, the sample completing process of surface treatment is sent to subsequent processing.
Again, in the present invention, also can be that described manipulator comprises manipulator grappling fixture, manipulator grappling fixture horizontal stand and manipulator grappling fixture vertical support frame, described manipulator grappling fixture horizontal stand makes described manipulator move in the horizontal direction by stretch mode; Described manipulator vertical support frame rotates around the axle of himself vertical direction, and vertically stretches.
According to the present invention, described manipulator is made up of manipulator grappling fixture, manipulator grappling fixture horizontal stand and manipulator grappling fixture vertical support frame.Described manipulator grappling fixture horizontal stand makes manipulator move in the horizontal direction by stretch mode; Described manipulator vertical support frame can rotate around the axle of himself vertical direction, and vertically stretches.By the cooperative motion of manipulator grappling fixture vertical support frame and manipulator grappling fixture horizontal stand, Zone Full in equipment platform can be touched by driving mechanical hand grappling fixture.
Beneficial effect of the present invention:
Automatic charging, blanking, automaticity is high, and it is efficiently convenient to operate, and the design feature of cutting agency makes full-automatic surface treating machine of the present invention be easy to integrated with streamline.
Accompanying drawing explanation
Fig. 1 shows the structural representation of the full-automatic surface treating machine according to the present invention's embodiment;
Fig. 2 shows the structural representation of the manipulator in the full-automatic surface treating machine of Fig. 1;
Fig. 3 shows the structural representation of the sample plasma cleaning platform in the full-automatic surface treating machine of Fig. 1;
Fig. 4 shows the structural representation of the plasma cleaning mechanism in the full-automatic surface treating machine of Fig. 1;
Fig. 5 shows the structural representation of the sample spin coating platform in the full-automatic surface treating machine of Fig. 1;
Fig. 6 shows the structural representation of the spin coating adhesive dripping machine structure in the full-automatic surface treating machine of Fig. 1;
Fig. 7 shows the structural representation of sample cutting agency in the full-automatic surface treating machine of Fig. 1.
Reference numeral:
1-equipment platform, 2-sample holder, 3-sample plasma cleaning platform, 4-plasma cleaning mechanism, 5-sample spin coating platform, 6-spin coating adhesive dripping machine structure, 7-sample cutting agency, 8-manipulator, 9-manipulator grappling fixture vertical support frame, 10-manipulator grappling fixture horizontal stand, 11-manipulator grappling fixture, 12-plasma gun, 13-plasma gun horizontal stand, 14-plasma gun vertical support frame, 15-rinsing table, 16-rinsing table vacuum sucking holes, 17-drips glue head, 18-drips glue head horizontal stand, 19-drips glue head vertical support frame, 20-spin coating platform, 21-spin coating platform vacuum sucking holes, 22-blanking bench, 23-blanking conveyer belt.
Detailed description of the invention
For making object of the present invention and technical scheme obtain clearly distinct elaboration, below in conjunction with drawings and Examples, just content of the present invention and specific implementation process, be described in further detail.But following embodiment is only explained in detail the present invention, not as limitation of the present invention.Claim of the present invention is not limited to following embodiment, and all are as the criterion with claims.
The present invention is intended to design a kind of plasma clean and surperficial spin-coat process of integrating, automatic charging, automatic blanking and be easy to be integrated in the technologic full-automatic surface treating machine of production line balance.
Full-automatic surface treating machine of the present invention comprises: equipment platform; Be arranged at the sample holder on described equipment platform, sample plasma cleaning platform, sample spin coating platform and sample cutting agency; For the plasma cleaning mechanism cleaned the sample be placed on described sample plasma cleaning platform; For carrying out spin coating surface-treated spin coating adhesive dripping machine structure to the sample be placed on described sample spin coating platform; Be configured to the manipulator sample be placed on described sample holder being delivered to successively described sample plasma cleaning platform, sample spin coating platform and sample cutting agency.
Fig. 1 to Fig. 7 shows the structural representation of full-automatic surface treating machine according to an embodiment of the present invention and each several part thereof.For illustrating the attainable relative movement relation of each several part, indicating x, y, z direction in Fig. 1, the direction identified in Fig. 3, Fig. 4, Fig. 5, Fig. 6, being all as the criterion according to the direction identified in Fig. 1.
As shown in Figure 1, full-automatic surface treating machine of the present invention, comprising: equipment platform 1, sample holder 2, sample plasma cleaning platform 3, plasma cleaning mechanism 4, sample spin coating platform 5, spin coating adhesive dripping machine structure 6, sample cutting agency 7 and manipulator 9.
As shown in Figure 2, the manipulator 8 in full-automatic surface treating machine of the present invention, comprising: manipulator grappling fixture vertical support frame 9, manipulator grappling fixture horizontal stand 10 and manipulator grappling fixture 11.Manipulator grappling fixture vertical support frame 9 around its z-axis rotation, and can stretch along the z-axis direction, and driving mechanical hand grappling fixture horizontal stand 10 moves in z-axis direction, shift motion and/or speed adjustable.Manipulator grappling fixture horizontal stand 10 can stretch in horizontal plane, and driving mechanical hand grappling fixture 11 moves in the horizontal direction, shift motion and/or speed adjustable.By the cooperative motion of manipulator grappling fixture vertical support frame 9 and manipulator grappling fixture horizontal stand 10, Zone Full in equipment platform 1 can be touched by driving mechanical hand grappling fixture 11; Manipulator grappling fixture 11 can mechanically clamped sample, the mode clamped sample that also can be sucked by vacuum.
As shown in Figure 3, the sample plasma cleaning platform 3 in full-automatic surface treating machine of the present invention, comprising: rinsing table 15 and rinsing table vacuum sucking holes 16.Sample stage 15 is for supporting pending sample, and rinsing table vacuum sucking holes 16 produces negative pressure by vacuumizing mode, is sucked by sample.Whole sample plasma cleaning platform 3 can move along x-axis, shift motion and/or speed adjustable.
As shown in Figure 4, the plasma cleaning mechanism 1 in full-automatic surface treating machine of the present invention, comprising: plasma gun 12, plasma gun horizontal stand 13 and plasma gun vertical support frame 14.Plasma gun 12 for generation of plasma, for cleaning sample surfaces.Plasma gun horizontal stand 13 can stretch in horizontal plane, drive plasma gun 12 move in y-axis direction, shift motion and/or speed adjustable.
As shown in Figure 5, the sample spin coating platform 5 in full-automatic surface treating machine of the present invention, comprising: spin coating platform 20 and spin coating platform vacuum sucking holes 21.Spin coating platform 20 is for supporting pending sample, and spin coating platform vacuum sucking holes 21 produces negative pressure by vacuumizing mode, is sucked by sample.Whole sample spin coating platform 5 can around its z-axis rotation, and rotating speed is adjustable.
As shown in Figure 6, the spin coating adhesive dripping machine structure 6 in full-automatic surface treating machine of the present invention, comprising: drip glue head 17, drips glue head horizontal stand 18 and drips glue head vertical support frame 19.Drip glue head 17 and treat spin coating sol material for dripping to the sample on spin coating sample stage 5.Drip glue head horizontal stand 18 can stretch along the x-axis direction in horizontal plane, drive drip a glue head 17 move in x direction, shift motion and/or speed adjustable.Drip glue head vertical support frame 19 stretch in z-axis direction, drive a droplet glue head horizontal stand 18 to move in z-axis direction, shift motion and/or speed adjustable.
As shown in Figure 7, the sample cutting agency 7 in full-automatic surface treating machine of the present invention, comprising: blanking bench 22 and blanking conveyer belt 23.Blanking bench 22 is for having supported surface-treated sample.Blanking conveyer belt 23 is sent to subsequent processing for completing surface-treated sample.
During work, be placed in the sample on sample holder 2, to be transferred on sample plasma cleaning platform 3 and secured via vacuum by manipulator 8, sample plasma rinsing table 3 moves in horizontal plane, plasma gun 12 and sample plasma cleaning platform 3 are planar mutually vertical mobile, guarantee that the whole surface of sample is cleaned; Complete the sample of plasma cleaning operation, be transferred to sample spin coating platform 5 and secured via vacuum by manipulator 8, spin coating adhesive dripping machine structure 6 drips glue at sample surfaces, and sample spin coating platform 5 High Rotation Speed carries out spin coating surface treatment.Complete the sample after spin coating operation, be transferred to sample cutting agency 7 by manipulator 8, by the conveyer belt 23 on cutting agency 7, the sample completing process of surface treatment is sent to subsequent processing.
The above, for easy understand one of ordinary skilled in the art, and be only preferred embodiment object of the present invention being described and implementing technical scheme, do not cause restriction to the present invention.All any distortion, the amendment made on technical solution of the present invention basis or equivalent to replace, be all included within protection scope of the present invention.
Claims (8)
1. a full-automatic surface treating machine, is characterized in that, comprising:
Equipment platform;
Be arranged at the sample holder on described equipment platform, sample plasma cleaning platform, sample spin coating platform and sample cutting agency;
For the plasma cleaning mechanism cleaned the sample be placed on described sample plasma cleaning platform;
For carrying out spin coating surface-treated spin coating adhesive dripping machine structure to the sample be placed on described sample spin coating platform; With
Be configured to the manipulator sample be placed on described sample holder being delivered to successively described sample plasma cleaning platform, sample spin coating platform and sample cutting agency.
2. full-automatic surface treating machine according to claim 1, is characterized in that, the quantity of described sample holder is one or more.
3. full-automatic surface treating machine according to claim 1 and 2, is characterized in that, described sample plasma cleaning platform moves in the horizontal direction, and the central authorities of described sample plasma cleaning platform are provided with the vacuum sucking holes for adsorbing described sample.
4. full-automatic surface treating machine according to claim 3, is characterized in that, described plasma cleaning mechanism comprises plasma gun, plasma gun horizontal stand and plasma gun vertical support frame; Described plasma gun horizontal stand makes described plasma gun move in the horizontal direction by stretch mode; The moving direction of described plasma gun is vertical with the moving direction of described sample plasma cleaning platform.
5. full-automatic surface treating machine according to any one of claim 1 to 4, is characterized in that, after sample is sucked by the vacuum sucking holes of its central authorities by described sample spin coating platform, drives described sample to rotate around the axle of the vertical direction of described sample spin coating platform.
6. full-automatic surface treating machine according to claim 5, is characterized in that, described spin coating adhesive dripping machine structure comprises a glue head, drips glue head horizontal stand and drip glue head vertical support frame; Described glue head horizontal stand makes the described glue head that drips move in the horizontal direction by stretch mode; Described glue head vertical support frame vertically stretches.
7. full-automatic surface treating machine according to any one of claim 1 to 6, is characterized in that, described sample cutting agency comprises blanking bench and is installed on the conveyer belt on described blanking bench.
8. full-automatic surface treating machine according to any one of claim 1 to 7, it is characterized in that, described manipulator comprises manipulator grappling fixture, manipulator grappling fixture horizontal stand and manipulator grappling fixture vertical support frame, and described manipulator grappling fixture horizontal stand makes described manipulator move in the horizontal direction by stretch mode; Described manipulator vertical support frame rotates around the axle of himself vertical direction, and vertically stretches.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511011644.1A CN105478415B (en) | 2015-12-30 | 2015-12-30 | A kind of full-automatic surface treating machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511011644.1A CN105478415B (en) | 2015-12-30 | 2015-12-30 | A kind of full-automatic surface treating machine |
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| CN105478415A true CN105478415A (en) | 2016-04-13 |
| CN105478415B CN105478415B (en) | 2017-11-10 |
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| CN201511011644.1A Active CN105478415B (en) | 2015-12-30 | 2015-12-30 | A kind of full-automatic surface treating machine |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106583188A (en) * | 2017-01-06 | 2017-04-26 | 欧托凯勃汽车线束（太仓）有限公司 | Method for protecting welding spots |
| CN108296751A (en) * | 2018-02-11 | 2018-07-20 | 珠海市华亚机械科技有限公司 | The wire type self calibration camera that flows back assembles equipment |
| CN108499985A (en) * | 2018-05-02 | 2018-09-07 | 信义汽车玻璃(深圳)有限公司 | Glass surface cleaning equipment |
| CN109352888A (en) * | 2018-12-10 | 2019-02-19 | 中国科学技术大学 | The moulding integrated device of spin coating |
| CN109746208A (en) * | 2019-01-28 | 2019-05-14 | 安徽新利清洁用品有限公司 | A kind of cleaning device of efficient removal dust |
| CN110369400A (en) * | 2018-04-12 | 2019-10-25 | 津伦（天津）精密机械股份有限公司 | A kind of Full-automatic plasma cleaning equipment |
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| CN109352888A (en) * | 2018-12-10 | 2019-02-19 | 中国科学技术大学 | The moulding integrated device of spin coating |
| CN109746208A (en) * | 2019-01-28 | 2019-05-14 | 安徽新利清洁用品有限公司 | A kind of cleaning device of efficient removal dust |
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| CN105478415B (en) | 2017-11-10 |
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Effective date of registration: 20170630 Address after: 201800 Shanghai City, north of the city of Jiading District Road No. 215 Applicant after: Research and Design center, Shanghai Institute of Ceramics Applicant after: Shanghai Silicates Institute, the Chinese Academy of Sciences Address before: 200050 Dingxi Road, Shanghai, Changning District, No. 1295 Applicant before: Shanghai Silicates Institute, the Chinese Academy of Sciences |
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Effective date of registration: 20210223 Address after: 200050 No. 1295 Dingxi Road, Shanghai, Changning District Patentee after: SHANGHAI INSTITUTE OF CERAMICS, CHINESE ACADEMY OF SCIENCES Address before: 201800 No. 215 Chengbei Road, Shanghai, Jiading District Patentee before: R&D CENTER OF SHANGHAI INSTITUTE OF CERAMICS Patentee before: SHANGHAI INSTITUTE OF CERAMICS, CHINESE ACADEMY OF SCIENCES |