CN109316819A - The filter cleaner and its cleaning method of reactive tank equipment, reactive tank equipment - Google Patents
The filter cleaner and its cleaning method of reactive tank equipment, reactive tank equipment Download PDFInfo
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- CN109316819A CN109316819A CN201811283635.1A CN201811283635A CN109316819A CN 109316819 A CN109316819 A CN 109316819A CN 201811283635 A CN201811283635 A CN 201811283635A CN 109316819 A CN109316819 A CN 109316819A
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- triple valve
- reactive tank
- outlet
- filter
- entrance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The filter cleaner and its cleaning method, reactive tank equipment, the filter cleaner of a kind of reactive tank equipment include: rinse bath；Rinse bath inlet pipe；Rinse bath outlet tube road；Reserve filter；The entrance of first triple valve, first triple valve is connected to rinse bath outlet tube road, and the first outlet of first triple valve is connected to the entrance of the reserve filter；The first outlet of second triple valve, second triple valve is connected to the entrance of the reserve filter；Third triple valve, the first entrance of the third triple valve and the outlet of the reserve filter；4th triple valve, the first entrance of the 4th triple valve and the outlet of the reserve filter, the outlet of the 4th triple valve is connected to the rinse bath inlet pipe.The present invention program may be implemented in turn to clean filter under the premise of need not shut down reactive tank equipment, improves filter effect and extends the service life of filter.
Description
Technical field
The present invention relates to the filter cleaner of semiconductor manufacturing equipment more particularly to a kind of reactive tank equipment and
Its cleaning method, reactive tank equipment.
Background technique
In semiconductor fabrication process, usually there is the spy of good uniformity and higher selection ratio using hot phosphoric acid
Property, silicon nitride is performed etching using hot phosphoric acid wet etching, and reaction product includes silica (such as SiO2), the oxygen
SiClx can be dissolved in phosphoric acid solution.
Further, in order to which the hot phosphoric acid is recycled, filter can be set in phosphoric acid groove equipment, to institute
The impurity stated in silica and phosphoric acid solution is filtered.
However as the accumulation of time, there are problems that the silica in phosphoric acid solution is excessively saturated, lead to the oxidation of silicon
Object is assembled in filter, blocks filter membrane, reduces circular flow, reduces filter effect, shortens filter service life.
In the prior art, filter can be cleaned using cleaning solution, however need first to phosphoric acid groove equipment into
Row is shut down, and causes production efficiency to decline, the production cost increases；If extending the cleaning frequency, being easily reduced filter effect causes
The quality variation of semiconductor devices, and shorten filter service life.
Summary of the invention
The technical problem to be solved by the present invention is to provide a kind of filter cleaner of reactive tank equipment and its cleaning method,
Reactive tank equipment may be implemented in turn to clean filter under the premise of need not shut down reactive tank equipment, improve filtering
Effect and the service life for extending filter.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of filter cleaner of reactive tank equipment, packet
It includes: rinse bath, for accommodating cleaning liquid；Rinse bath inlet pipe, for inputting the cleaning liquid to the rinse bath；Clearly
Washing trough outlet tube road, for exporting the cleaning liquid from the rinse bath；Reserve filter, the reserve filter have into
Mouth and outlet；First triple valve, first triple valve have an entrance and two outlets, the entrance of first triple valve
It is connected to rinse bath outlet tube road, the first outlet of first triple valve is connected to the entrance of the reserve filter；
Second triple valve, second triple valve have an entrance and two outlets, the first outlet of second triple valve and institute
State the entrance connection of reserve filter；Third triple valve, the third triple valve have two entrances and an one outlet, and described the
The outlet of the first entrance of three triple valves and the reserve filter；4th triple valve, the 4th triple valve have two
A entrance and one outlet, the first entrance of the 4th triple valve and the outlet of the reserve filter, the described 4th
The outlet of triple valve is connected to the rinse bath inlet pipe.
Optionally, the reactive tank equipment includes that reactive tank, original filter, reactive tank inlet pipe and reactive tank go out
Liquid pipeline；Wherein, the second outlet of first triple valve and the second outlet of second triple valve are used for and the original
The entrance of beginning filter is connected to, and the entrance of second triple valve with reactive tank outlet tube road for being connected to, the third
The second entrance of triple valve and the second entrance of the 4th triple valve are for the outlet with the original filter, institute
The outlet of third triple valve is stated for being connected to the reactive tank inlet pipe.
Optionally, the cleaning liquid in the rinse bath is hydrofluoric acid solution.
Optionally, the mass ratio of hydrofluoric acid and water is 1:10 to 1:1000 in the hydrofluoric acid solution.
Optionally, the filter cleaner of the reactive tank equipment further includes rinse bath pump, the rinse bath pump installation
On rinse bath outlet tube road.
Optionally, the filter cleaner of the reactive tank equipment further includes that rinse bath infusion pipeline and rinse bath are useless
Pipe abandon road；Wherein, the rinse bath infusion pipeline inputs cleaning liquid into the rinse bath when opening；The rinse bath is useless
Liquid after the cleaning that pipe abandon road is discharged in the rinse bath when opening.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of cleaning filter dress of above-mentioned reactive tank equipment
The reserve filter cleaning method set, including above-mentioned filter cleaner, the reactive tank equipment includes: reactive tank, is used for
Accommodate reaction liquid；Reactive tank inlet pipe, for inputting the reaction liquid to the rinse bath；Reactive tank outlet tube road,
For exporting the reaction liquid from the rinse bath；Original filter, the original filter have entrance and exit；By institute
The second outlet for stating the first triple valve is connected to the entrance of the original filter, by the entrance of second triple valve with it is described
The connection of reactive tank outlet tube road, the second outlet of second triple valve is connected to the entrance of the original filter, by institute
State the second entrance of third triple valve and the outlet of the original filter, by the second entrance of the 4th triple valve with
The outlet of the third triple valve is connected to by the outlet of the original filter with the reactive tank inlet pipe；Control
The entrance of first triple valve is connected with first outlet, and controls the first entrance and outlet guide of the 4th triple valve
Logical, the entrance for controlling second triple valve is connected with second outlet, and controls the second entrance of the third triple valve and go out
Mouth conducting；Wherein, the reaction liquid in the reactive tank flows through second triple valve, the original filter and described
It is returned to after three triple valves in the reactive tank, the cleaning liquid in the rinse bath flows through first triple valve, described spare
It is returned in the rinse bath after filter and the 4th triple valve.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of cleaning filter dress of above-mentioned reactive tank equipment
The reserve filter cleaning method set, including above-mentioned filter cleaner, the reactive tank equipment includes: reactive tank, is used for
Accommodate reaction liquid；Reactive tank inlet pipe, for inputting the reaction liquid to the rinse bath；Reactive tank outlet tube road,
For exporting the reaction liquid from the rinse bath；Original filter, the original filter have entrance and exit；By institute
The second outlet for stating the first triple valve is connected to the entrance of the original filter, by the entrance of second triple valve with it is described
The connection of reactive tank outlet tube road, the second outlet of second triple valve is connected to the entrance of the original filter, by institute
State the second entrance of third triple valve and the outlet of the original filter, by the second entrance of the 4th triple valve with
The outlet of the third triple valve is connected to by the outlet of the original filter with the reactive tank inlet pipe；Control
The entrance of first triple valve is connected with second outlet, and controls the second entrance and outlet conducting of the 4th triple valve,
The entrance for controlling second triple valve is connected with first outlet, and controls the first entrance and outlet guide of the third triple valve
It is logical；Wherein, the liquid in the reactive tank flows through second triple valve, the reserve filter and the third triple valve
After return in the reactive tank, the wash liquid stream in the rinse bath through first triple valve, the original filter and
It is returned in the rinse bath after 4th triple valve.
In order to solve the above technical problems, the embodiment of the present invention provides a kind of reactive tank equipment, including reactive tank, initial filter
The filter cleaner of device, reactive tank inlet pipe, reactive tank outlet tube road and above-mentioned reactive tank equipment；Wherein, institute
The second outlet of the first triple valve and the second outlet of second triple valve are stated for the entrance with the original filter
Connection, for being connected to reactive tank outlet tube road, the second of the third triple valve enters the entrance of second triple valve
The second entrance of mouth and the 4th triple valve is used for the outlet with the original filter, the third triple valve
Outlet with the reactive tank inlet pipe for being connected to.
Optionally, the reactive tank equipment further include: heater, the heater are mounted on reactive tank outlet tube road
On.
Compared with prior art, the technical solution of the embodiment of the present invention has the advantages that
In embodiments of the present invention, a kind of filter cleaner of reactive tank equipment is provided, comprising: rinse bath is used for
Accommodate cleaning liquid；Rinse bath inlet pipe, for inputting the cleaning liquid to the rinse bath；Rinse bath outlet tube road,
For exporting the cleaning liquid from the rinse bath；Reserve filter, the reserve filter have entrance and exit；First
Triple valve, first triple valve have an entrance and two outlets, the entrance and the rinse bath of first triple valve
The connection of outlet tube road, the first outlet of first triple valve are connected to the entrance of the reserve filter；Second triple valve, institute
The second triple valve is stated with an entrance and two outlets, first outlet and the reserve filter of second triple valve
Entrance connection；Third triple valve, the third triple valve have two entrances and one outlet, the first of the third triple valve
The outlet of entrance and the reserve filter；There are two entrances to go out with one for 4th triple valve, the 4th triple valve
Mouthful, the outlet of the first entrance of the 4th triple valve and the reserve filter, the outlet of the 4th triple valve with
The rinse bath inlet pipe connection.It using the above scheme, can be by the way that rinse bath, rinse bath inlet pipe, rinse bath be arranged
Outlet tube road, reserve filter, first to fourth triple valve can increase a filter, to have an opportunity to realize parallel connection
Twinfilter mode, namely worked normally using filter is filtered with liquid after the reaction flowed out to reactive tank
When, another filter can also be cleaned, so as to realize under the premise of need not shut down reactive tank equipment in turn
Filter is cleaned, filter effect is improved and extends the service life of filter.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of reactive tank equipment in the prior art；
Fig. 2 is a kind of structural schematic diagram of the filter cleaner of reactive tank equipment in the embodiment of the present invention；
Fig. 3 is a kind of the first operative scenario signal of the filter cleaner of reactive tank equipment in the embodiment of the present invention
Figure；
Fig. 4 is a kind of second of operative scenario signal of the filter cleaner of reactive tank equipment in the embodiment of the present invention
Figure；
Fig. 5 is the structural schematic diagram of the filter cleaner of another reactive tank equipment in the embodiment of the present invention.
Specific embodiment
In semiconductor fabrication process, the semiconductor technologies such as deposition, etching can be realized, using reactive tank equipment in order to right
Reaction liquid is recycled, and filter can be arranged in reactive tank equipment, to the impurity in the reaction liquid or instead
By-product is answered to be filtered.
Referring to Fig.1, Fig. 1 is a kind of structural schematic diagram of reactive tank equipment in the prior art.
The reactive tank equipment may include reactive tank 110, original filter 120, reactive tank inlet pipe 112 and anti-
Answer slot outlet tube road 111.
Wherein, the entrance that the reactive tank 110 passes through reactive tank outlet tube road 111 and the original filter 120
Connection, the outlet of the original filter 120 are connected to by the reactive tank inlet pipe 112 with the reactive tank, described anti-
It is returned to after answering the reaction liquid in slot 110 to flow through the original filter 120 in the reactive tank 110.
Further, the reactive tank equipment can also include heater 130, and the heater 130 may be mounted at institute
It states on reactive tank outlet tube road 111, to heat to reaction liquid, improves the reaction effect in reactive tank 110.
Further, the reactive tank equipment can also include reactive tank pump 140, and the reactive tank pump 140 can be installed
On reactive tank outlet tube road 111, to extract the reaction liquid in the reactive tank 110 out, so that the reaction liquid exists
112 internal circulation flow of reactive tank outlet tube road 111 and reactive tank inlet pipe.
The present inventor has found after study, and with the accumulation of time, it is secondary that reaction is easy to appear in reaction liquid
The phenomenon that product and impurity are accumulated, blocks filter membrane, reduces circular flow, reduces filter effect, shortens filter and uses
Service life.
It is illustrated for being performed etching using hot phosphoric acid wet etching to silicon nitride.The reactive chemistry formula of silicon nitride is such as
Under:
In specific implementation, the by-product after the silicon nitride etch is with the oxide form of silicon (such as silica
SiO2) be dissolved in phosphoric acid, when the oxide of silicon is excessively saturated, then filter aggregation, blocking filtering can be accumulated in the time
Film reduces circular flow, reduces filter effect, shortens filter service life.
Inventor is rear it has furthermore been found that when being cleaned using cleaning solution to filter after study, needs first to phosphorus
Acid tank equipment is shut down, and production efficiency is caused to decline, and the production cost increases；If extending the cleaning frequency, it was easily reduced
Filter effect causes the quality variation of semiconductor devices, and shortens filter service life.
In embodiments of the present invention, a kind of filter cleaner of reactive tank equipment is provided, comprising: rinse bath is used for
Accommodate cleaning liquid；Rinse bath inlet pipe, for inputting the cleaning liquid to the rinse bath；Rinse bath outlet tube road,
For exporting the cleaning liquid from the rinse bath；Reserve filter, the reserve filter have entrance and exit；First
Triple valve, first triple valve have an entrance and two outlets, the entrance and the rinse bath of first triple valve
The connection of outlet tube road, the first outlet of first triple valve are connected to the entrance of the reserve filter；Second triple valve, institute
The second triple valve is stated with an entrance and two outlets, first outlet and the reserve filter of second triple valve
Entrance connection；Third triple valve, the third triple valve have two entrances and one outlet, the first of the third triple valve
The outlet of entrance and the reserve filter；There are two entrances to go out with one for 4th triple valve, the 4th triple valve
Mouthful, the outlet of the first entrance of the 4th triple valve and the reserve filter, the outlet of the 4th triple valve with
The rinse bath inlet pipe connection.It using the above scheme, can be by the way that rinse bath, rinse bath inlet pipe, rinse bath be arranged
Outlet tube road, reserve filter, first to fourth triple valve can increase a filter, to have an opportunity to realize parallel connection
Twinfilter mode, namely worked normally using filter is filtered with liquid after the reaction flowed out to reactive tank
When, another filter can also be cleaned, so as to realize under the premise of need not shut down reactive tank equipment in turn
Filter is cleaned, filter effect is improved and extends the service life of filter.
It is understandable to enable above-mentioned purpose of the invention, feature and beneficial effect to become apparent, with reference to the accompanying drawing to this
The specific embodiment of invention is described in detail.
Referring to Fig. 2, Fig. 2 is a kind of structural representation of the filter cleaner of reactive tank equipment in the embodiment of the present invention
Figure.
The filter cleaner may include rinse bath 210, rinse bath inlet pipe 212, rinse bath outlet tube road
211, reserve filter 220, the first triple valve 231, the second triple valve 232, third triple valve 233 and the 4th triple valve 234.
Wherein, the rinse bath 210 can be used for accommodating cleaning liquid, and the rinse bath inlet pipe 212 can be used for
The cleaning liquid is inputted to the rinse bath 210, rinse bath outlet tube road 211 can be used for from the rinse bath 210
Export the cleaning liquid.
The reserve filter 220 has entrance and exit, and first triple valve 231 can have an entrance and two
The entrance of a outlet, first triple valve 231 is connected to rinse bath outlet tube road 211, first triple valve 231
First outlet is connected to the entrance of the reserve filter 220.
Second triple valve 232 has an entrance and two outlets, and the first outlet of second triple valve 232 can
To be connected to the entrance of the reserve filter 220.
The third triple valve 233 has two entrances and one outlet, and the first entrance of the third triple valve 233 can
With the outlet with the reserve filter 220.
4th triple valve 234 has two entrances and one outlet, and the first entrance of the 4th triple valve 234 can
With the outlet with the reserve filter 220, the outlet of the 4th triple valve 234 can be with the rinse bath inlet tube
Road 212 is connected to.
Further, the cleaning liquid in the rinse bath 210 can be hydrofluoric acid solution.
Byproduct of reaction for being performed etching using hot phosphoric acid wet etching to silicon nitride, in the reactive tank equipment
For the oxide of silicon, such as SiO2, then can be removed using hydrofluoric acid (DHF) solution by chemical reaction, reactionization
Formula is as follows:
SiO2+6HF→H2SiF6+2H2O
Further, the mass ratio of hydrofluoric acid and water is 1:10 to 1:1000 in the hydrofluoric acid solution.
Preferably, it is 1:50 to 1:200 that the mass ratio of hydrofluoric acid and water in the hydrofluoric acid solution, which can be set,.
In embodiments of the present invention, by configuring the hydrofluoric acid solution of proper proportion, reaction by-product can preferably be removed
Object improves reaction effect, and enhances the protection to filter.
Further, the capacity of the rinse bath 210 can be 10L to 15L, to better meet cleaning demand.
It is a kind of the first work of the filter cleaner of reactive tank equipment in the embodiment of the present invention referring to Fig. 3, Fig. 3
Schematic diagram of a scenario.
In the operative scenario, the filter cleaner of the reactive tank equipment is connect with the reactive tank equipment.
Wherein, the reactive tank equipment may include reactive tank 110, original filter 120, reactive tank inlet pipe 114
And reactive tank outlet tube road 113, the reactive tank equipment can also include heater 130 and reactive tank pump 140.
Wherein, the reactive tank 110 is for accommodating reaction liquid；The reactive tank inlet pipe 114 can be used for institute
It states rinse bath and inputs the reaction liquid；Reactive tank outlet tube road 113 can be used for exporting from the rinse bath described anti-
Answer liquid；The original filter 120 has entrance and exit.
It should be pointed out that the reactive tank inlet pipe 114 and reactive tank outlet tube road 113 with it is anti-in the prior art
Answer slot inlet pipe 112 and the connection type on reactive tank outlet tube road 111 different.Other of related reactive tank equipment are interior in detail
Hold, please refers to above and the description of Fig. 1, details are not described herein again.
Wherein, the second outlet of first triple valve 231 and the second outlet of second triple valve 232 be used for
The entrance of the original filter 220 is connected to, and the entrance of second triple valve 232 is used for and reactive tank outlet tube road
113 connections, the second entrance of the second entrance of the third triple valve 233 and the 4th triple valve 234 be used for it is described
The outlet of original filter 220, the outlet of the third triple valve 233 with the reactive tank inlet pipe 114 for connecting
It is logical.
In embodiments of the present invention, by the way that rinse bath 210, rinse bath inlet pipe 212, rinse bath outlet tube road is arranged
211, reserve filter 220, the first triple valve 231, the second triple valve 232, third triple valve 233 and the 4th triple valve 234,
Only have a filter in compared with the prior art, a reserve filter 220 can be further added by, to have an opportunity to realize parallel connection
Twinfilter mode, namely worked normally using one of filter, with liquid after the reaction flowed out to reactive tank into
When row filtering, another filter can also be cleaned, be taken turns under the premise of need not shut down reactive tank equipment to realize
Stream cleans filter, improves filter effect and extends the service life of two filters.
In the first operative scenario shown in Fig. 3, original filter 120 can used to flow out reactive tank 110
When liquid is filtered after reaction, reserve filter 220 is cleaned using rinse bath 210.
Specifically, the entrance for controlling first triple valve 231 is connected with first outlet, and controls the 4th triple valve
234 first entrance and outlet conducting, the entrance for controlling second triple valve 232 is connected with second outlet, and controls institute
The second entrance and outlet for stating third triple valve 233 are connected.
Wherein, the reaction liquid in the reactive tank 110 flows through second triple valve 232, the original filter 120
And returned to after the third triple valve 233 in the reactive tank 110, it may be implemented using original filter 120 to reactive tank
Liquid is filtered after the reaction of 110 outflows.
Cleaning liquid in the rinse bath 220 flow through first triple valve 231, the reserve filter 220 and
Returned in the rinse bath 220 after 4th triple valve 234, may be implemented using rinse bath 210 to reserve filter 220 into
Row cleaning.
In embodiments of the present invention, by after the reaction flowed out to reactive tank 110 using original filter 120 liquid into
When row filtering, reserve filter 220 is cleaned using rinse bath 210, may be implemented that reactive tank equipment need not be being shut down
Under the premise of reserve filter 220 is cleaned, improve reserve filter 220 filter effect and extend reserve filter 220
Service life.
Fig. 4 is a kind of second of operative scenario signal of the filter cleaner of reactive tank equipment in the embodiment of the present invention
Figure.
In the operative scenario, the filter cleaner of the reactive tank equipment is connect with the reactive tank equipment.
Wherein, the reactive tank equipment may include reactive tank 110, original filter 120, reactive tank inlet pipe 114
And reactive tank outlet tube road 113, the reactive tank equipment can also include heater 130 and reactive tank pump 140.
Specifically, the second outlet of first triple valve 231 is connected to the entrance of the original filter 120, it will
The entrance of second triple valve 232 is connected to reactive tank outlet tube road 113, by the second of second triple valve 232
Outlet is connected to the entrance of the original filter 120, by the second entrance of the third triple valve 233 and the initial filter
The outlet of device 120 will by the outlet of the second entrance of the 4th triple valve 234 and the original filter 120
The outlet of the third triple valve 233 is connected to the reactive tank inlet pipe 114.
Detailed content in relation to reactive tank equipment and its with the connection type of filter cleaner, please refer to above and
The description of Fig. 2 to Fig. 3, details are not described herein again.
In second of operative scenario shown in Fig. 4, reserve filter 220 can used to flow out reactive tank 110
When liquid is filtered after reaction, original filter 120 is cleaned using rinse bath 210.
Specifically, the entrance for controlling first triple valve 231 is connected with second outlet, and controls the 4th triple valve
234 second entrance and outlet are connected, and the entrance for controlling second triple valve 232 is connected with first outlet, and described in control
The first entrance of third triple valve 233 and outlet are connected.
Wherein, the liquid in the reactive tank 110 flow through second triple valve 232, the reserve filter 220 and
It is returned in the reactive tank after the third triple valve 233, may be implemented to flow out reactive tank 110 using reserve filter 220
Reaction after liquid be filtered.
Wash liquid stream in the rinse bath 210 is through first triple valve 231, the original filter 120 and institute
It is returned in the rinse bath 210 after stating the 4th triple valve 234, may be implemented to carry out original filter 120 using rinse bath 210
Cleaning.
In embodiments of the present invention, by after the reaction flowed out to reactive tank 110 using reserve filter 220 liquid into
When row filtering, original filter 120 is cleaned using rinse bath 210, may be implemented that reactive tank equipment need not be being shut down
Under the premise of original filter 120 is cleaned, improve original filter 120 filter effect and extend original filter 120
Service life.
It is the structural representation of the filter cleaner of another reactive tank equipment in the embodiment of the present invention referring to Fig. 5, Fig. 5
Figure.
The filter cleaner of the another kind reactive tank equipment may include rinse bath 210, rinse bath inlet pipe
212, rinse bath outlet tube road 211, reserve filter 220, the first triple valve 231, the second triple valve 232, third triple valve 233
And the 4th triple valve 234.
Further, another reactive tank equipment can also include rinse bath pump 240, and the rinse bath pump 240 can
To be mounted on rinse bath outlet tube road 211.
In specific implementation, the rinse bath pump 240 can extract the cleaning liquid in the rinse bath 210 out, so that institute
Cleaning liquid is stated in 212 internal circulation flow of rinse bath outlet tube road 211 and rinse bath inlet pipe, completes cleaning behaviour
Make.
Further, another reactive tank equipment can also include rinse bath infusion pipeline and the discarded pipe of rinse bath
Road；Wherein, the rinse bath infusion pipeline inputs cleaning liquid into the rinse bath when opening；The discarded pipe of the rinse bath
Liquid after the cleaning that road is discharged in the rinse bath when opening.
More specifically, the rinse bath infusion pipeline may include rinse bath water input conduit 251 and rinse bath medical fluid
Intake line 252.
Wherein, the rinse bath water input conduit 251 open when water can be inputted into the rinse bath, such as go from
Sub- water, pure water etc.；The rinse bath medical fluid intake line 252 can input medical fluid, example when opening into the rinse bath
Such as hydrofluoric acid.
It in embodiments of the present invention, can be in rinse bath to clear by inputting cleaning liquid into the rinse bath 210
Wash liq is added or configures, and realizes long-term cleaning function.
More specifically, it may include that rinse bath waste water output pipe 261 and rinse bath are useless that the rinse bath, which discards pipeline,
Liquid output pipe 262.
Wherein, the rinse bath waste water output pipe 261 and rinse bath waste liquid output pipe 262 can be with when opening
Liquid after the cleaning in the rinse bath 210 is discharged.It in specific implementation, can be according to liquid after being cleaned in the rinse bath 210
Concentration shared by body herb liquid selects different discharge paths, is abandoned or is recycled with selection.
Specifically, can be when concentration shared by Liquid traditional Chinese medicine liquid is lower after cleaning, selection is exported using rinse bath waste water
Liquid after the cleaning in the rinse bath 210 is discharged in pipeline 261, directly to abandon；It can also Liquid traditional Chinese medicine liquid institute after cleaning
Account for concentration it is higher when, select rinse bath waste liquid output pipe 262 liquid after the cleaning in the rinse bath 210 is discharged, with recycling
It utilizes.
In embodiments of the present invention, by out of described rinse bath 210 be discharged cleaning after liquid, can be to waste liquid at
Reason, improves the cleanliness of cleaning.
In embodiments of the present invention, a kind of reactive tank equipment is additionally provided, as shown in Figure 3 or Figure 4, the reactive tank equipment
It may include reactive tank 110, original filter 120, reactive tank inlet pipe 114, reactive tank outlet tube road 113, and reaction
The filter cleaner of slot equipment.
Wherein, the second outlet of first triple valve 231 and the second outlet of second triple valve 232 be used for
The entrance of the original filter 220 is connected to, and the entrance of second triple valve 232 is used for and reactive tank outlet tube road
113 connections, the second entrance of the second entrance of the third triple valve 233 and the 4th triple valve 234 be used for it is described
The outlet of original filter 220, the outlet of the third triple valve 233 with the reactive tank inlet pipe 114 for connecting
It is logical.
Further, the reactive tank equipment can also include heater 130, and the heater 130 may be mounted at
On reactive tank outlet tube road 113.
In embodiments of the present invention, by the way that heater 130 is arranged, reaction liquid can be heated, improves reactive tank
Reaction effect in 110, and help to improve the filtering in the liquid for flowing through original filter 120 or reserve filter 220
Effect.
The pass above and shown in Fig. 2 to Fig. 5 is please referred to about the principle of the reactive tank equipment, specific implementation and beneficial effect
In the associated description of filter cleaner, details are not described herein again.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (10)
1. a kind of filter cleaner of reactive tank equipment characterized by comprising
Rinse bath, for accommodating cleaning liquid；
Rinse bath inlet pipe, for inputting the cleaning liquid to the rinse bath；
Rinse bath outlet tube road, for exporting the cleaning liquid from the rinse bath；
Reserve filter, the reserve filter have entrance and exit；
First triple valve, first triple valve have an entrance and two outlets, the entrance of first triple valve and institute
The connection of rinse bath outlet tube road is stated, the first outlet of first triple valve is connected to the entrance of the reserve filter；
Second triple valve, second triple valve have an entrance and two outlets, the first outlet of second triple valve
It is connected to the entrance of the reserve filter；
Third triple valve, the third triple valve have two entrances and one outlet, the first entrance of the third triple valve
With the outlet of the reserve filter；
4th triple valve, the 4th triple valve have two entrances and one outlet, the first entrance of the 4th triple valve
Outlet with the outlet of the reserve filter, the 4th triple valve is connected to the rinse bath inlet pipe.
2. the filter cleaner of reactive tank equipment according to claim 1, which is characterized in that the reactive tank equipment
Including reactive tank, original filter, reactive tank inlet pipe and reactive tank outlet tube road；
Wherein, the second outlet of first triple valve and the second outlet of second triple valve are used for and the original mistake
The entrance of filter is connected to, and the entrance of second triple valve with reactive tank outlet tube road for being connected to, the third threeway
The second entrance of valve and the second entrance of the 4th triple valve are for the outlet with the original filter, and described the
The outlet of three triple valves with the reactive tank inlet pipe for being connected to.
3. the filter cleaner of reactive tank equipment according to claim 1, which is characterized in that in the rinse bath
Cleaning liquid is hydrofluoric acid solution.
4. the filter cleaner of reactive tank equipment according to claim 3, which is characterized in that the hydrofluoric acid solution
The mass ratio of middle hydrofluoric acid and water is 1:10 to 1:1000.
5. the filter cleaner of reactive tank equipment according to claim 1, which is characterized in that further include rinse bath
Pump, the rinse bath pump are mounted on the rinse bath outlet tube road.
6. the filter cleaner of reactive tank equipment according to claim 1, which is characterized in that further include that rinse bath is defeated
Liquid pipeline and rinse bath discard pipeline；
Wherein, the rinse bath infusion pipeline inputs cleaning liquid into the rinse bath when opening；
The rinse bath discards liquid after the cleaning that pipeline is discharged in the rinse bath when opening.
7. a kind of reserve filter of the filter cleaner based on reactive tank equipment as claimed in any one of claims 1 to 6
Cleaning method characterized by comprising
There is provided any one of reactive tank equipment and claim 1 to 6 filter cleaner, the reactive tank equipment packet
It includes:
Reactive tank, for accommodating reaction liquid；
Reactive tank inlet pipe, for inputting the reaction liquid to the rinse bath；
Reactive tank outlet tube road, for exporting the reaction liquid from the rinse bath；
Original filter, the original filter have entrance and exit；
The second outlet of first triple valve is connected to the entrance of the original filter, by entering for second triple valve
Mouth is connected to reactive tank outlet tube road, and the entrance of the second outlet of second triple valve and the original filter is connected
It is logical, by the outlet of the second entrance of the third triple valve and the original filter, by the of the 4th triple valve
The outlet of two entrances and the original filter connects the outlet of the third triple valve and the reactive tank inlet pipe
It is logical；
The entrance for controlling first triple valve is connected with first outlet, and control the 4th triple valve first entrance and
Outlet conducting, the entrance for controlling second triple valve are connected with second outlet, and control the second of the third triple valve and enter
Mouth is connected with outlet；
Wherein, the reaction liquid in the reactive tank flows through second triple valve, the original filter and the third
It is returned to after triple valve in the reactive tank, the cleaning liquid in the rinse bath flows through first triple valve, the spare mistake
It is returned in the rinse bath after filter and the 4th triple valve.
8. a kind of original filter of the filter cleaner based on reactive tank equipment as claimed in any one of claims 1 to 6
Cleaning method characterized by comprising
There is provided any one of reactive tank equipment and claim 1 to 6 filter cleaner, the reactive tank equipment packet
It includes:
Reactive tank, for accommodating reaction liquid；
Reactive tank inlet pipe, for inputting the reaction liquid to the rinse bath；
Reactive tank outlet tube road, for exporting the reaction liquid from the rinse bath；
Original filter, the original filter have entrance and exit；
The second outlet of first triple valve is connected to the entrance of the original filter, by entering for second triple valve
Mouth is connected to reactive tank outlet tube road, and the entrance of the second outlet of second triple valve and the original filter is connected
It is logical, by the outlet of the second entrance of the third triple valve and the original filter, by the of the 4th triple valve
The outlet of two entrances and the original filter connects the outlet of the third triple valve and the reactive tank inlet pipe
It is logical；
The entrance for controlling first triple valve is connected with second outlet, and controls the second entrance of the 4th triple valve and go out
Mouth conducting, the entrance for controlling second triple valve are connected with first outlet, and control the first entrance of the third triple valve
It is connected with outlet；
Wherein, the liquid in the reactive tank flows through second triple valve, the reserve filter and the third threeway
Returned to after valve in the reactive tank, the wash liquid stream in the rinse bath through first triple valve, the original filter with
And it is returned in the rinse bath after the 4th triple valve.
9. a kind of reactive tank equipment, which is characterized in that go out including reactive tank, original filter, reactive tank inlet pipe, reactive tank
Liquid pipeline, and the filter cleaner such as reactive tank equipment as claimed in any one of claims 1 to 6；
Wherein, the second outlet of first triple valve and the second outlet of second triple valve are used for and the original mistake
The entrance of filter is connected to, and the entrance of second triple valve with reactive tank outlet tube road for being connected to, the third threeway
The second entrance of valve and the second entrance of the 4th triple valve are for the outlet with the original filter, and described the
The outlet of three triple valves with the reactive tank inlet pipe for being connected to.
10. reactive tank equipment according to claim 9, which is characterized in that further include:
Heater, the heater are mounted on the reactive tank outlet tube road.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811283635.1A CN109316819A (en) | 2018-10-30 | 2018-10-30 | The filter cleaner and its cleaning method of reactive tank equipment, reactive tank equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811283635.1A CN109316819A (en) | 2018-10-30 | 2018-10-30 | The filter cleaner and its cleaning method of reactive tank equipment, reactive tank equipment |
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| CN109316819A true CN109316819A (en) | 2019-02-12 |
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| CN201811283635.1A Pending CN109316819A (en) | 2018-10-30 | 2018-10-30 | The filter cleaner and its cleaning method of reactive tank equipment, reactive tank equipment |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101940853A (en) * | 2009-07-06 | 2011-01-12 | 中芯国际集成电路制造(上海)有限公司 | Filter cleaning device, method and wafer cleaning device |
| CN202876512U (en) * | 2012-10-11 | 2013-04-17 | 中芯国际集成电路制造(北京)有限公司 | Circulating device of cleaning filter |
| CN103846250A (en) * | 2014-03-27 | 2014-06-11 | 上海华力微电子有限公司 | Filter liquid discharging device and liquid discharging method of ultrasonic washing trough |
| CN203683727U (en) * | 2014-01-26 | 2014-07-02 | 常州时创能源科技有限公司 | Device for filtering chromium sludge |
| CN204138821U (en) * | 2014-10-14 | 2015-02-04 | 中芯国际集成电路制造(北京)有限公司 | A kind of Wet-method etching device |
| CN104511446A (en) * | 2013-09-30 | 2015-04-15 | 英飞凌科技股份有限公司 | Method and device cleaning washing and especially semiconductor module |
| JP2016128156A (en) * | 2015-01-09 | 2016-07-14 | 東京エレクトロン株式会社 | Treatment liquid filtration apparatus, chemical liquid supply device, treatment liquid filtration method, and storage medium |
| CN106881058A (en) * | 2017-04-06 | 2017-06-23 | 山东泰邦生物制品有限公司 | A kind of full-automatic solid-liquid separation system and preparation method thereof |
| US20170216767A1 (en) * | 2014-03-06 | 2017-08-03 | Applied Materials, Inc. | Plasma abatement of compounds containing heavy atoms |
| CN206924491U (en) * | 2017-07-04 | 2018-01-26 | 京东方科技集团股份有限公司 | Purging system and the wet-method etching equipment with the purging system |
-
2018
- 2018-10-30 CN CN201811283635.1A patent/CN109316819A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101940853A (en) * | 2009-07-06 | 2011-01-12 | 中芯国际集成电路制造(上海)有限公司 | Filter cleaning device, method and wafer cleaning device |
| CN202876512U (en) * | 2012-10-11 | 2013-04-17 | 中芯国际集成电路制造(北京)有限公司 | Circulating device of cleaning filter |
| CN104511446A (en) * | 2013-09-30 | 2015-04-15 | 英飞凌科技股份有限公司 | Method and device cleaning washing and especially semiconductor module |
| CN203683727U (en) * | 2014-01-26 | 2014-07-02 | 常州时创能源科技有限公司 | Device for filtering chromium sludge |
| US20170216767A1 (en) * | 2014-03-06 | 2017-08-03 | Applied Materials, Inc. | Plasma abatement of compounds containing heavy atoms |
| CN103846250A (en) * | 2014-03-27 | 2014-06-11 | 上海华力微电子有限公司 | Filter liquid discharging device and liquid discharging method of ultrasonic washing trough |
| CN204138821U (en) * | 2014-10-14 | 2015-02-04 | 中芯国际集成电路制造(北京)有限公司 | A kind of Wet-method etching device |
| JP2016128156A (en) * | 2015-01-09 | 2016-07-14 | 東京エレクトロン株式会社 | Treatment liquid filtration apparatus, chemical liquid supply device, treatment liquid filtration method, and storage medium |
| CN106881058A (en) * | 2017-04-06 | 2017-06-23 | 山东泰邦生物制品有限公司 | A kind of full-automatic solid-liquid separation system and preparation method thereof |
| CN206924491U (en) * | 2017-07-04 | 2018-01-26 | 京东方科技集团股份有限公司 | Purging system and the wet-method etching equipment with the purging system |
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