CN109283617A - A kind of miniature multicolor displaying linear light source and preparation method thereof - Google Patents

A kind of miniature multicolor displaying linear light source and preparation method thereof Download PDF

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Publication number
CN109283617A
CN109283617A CN201811453637.0A CN201811453637A CN109283617A CN 109283617 A CN109283617 A CN 109283617A CN 201811453637 A CN201811453637 A CN 201811453637A CN 109283617 A CN109283617 A CN 109283617A
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China
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optical waveguide
micron
light source
miniature
linear light
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CN201811453637.0A
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CN109283617B (en
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梁定鑫
张奚宁
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Huaqiao University
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Huaqiao University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • G02B6/125Bends, branchings or intersections
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12085Integrated
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12121Laser
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083Constructional arrangements
    • G02B2006/12123Diode

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The invention discloses a kind of miniature multicolor displaying linear light sources, including micro-fluidic chip, laser diode and several microns of optical waveguides, the laser diode and micron optical waveguide are packaged in micro-fluidic chip, wherein the light-emitting surface of one described micron of optical waveguide active area is equipped with input terminal, the corresponding active area light-emitting surface for being placed in laser diode of the input terminal, it intercouples between the micron optical waveguide and remaining micron of optical waveguide and is etched with the side output end that deep mixed circular hole constitutes multicolor displaying linear light source at intervals in side, this miniature multicolor displaying linear light source can greatly compress device size, improve integrated level, in warning lamp, machine vision, there is important role in the fields such as biologic medical.

Description

A kind of miniature multicolor displaying linear light source and preparation method thereof
Technical field
The present invention relates to colorful display fields more particularly to a kind of miniature multicolor displaying linear light source and preparation method thereof.
Background technique
Because having many advantages, such as that energy is high, monochromaticjty is good, coherence is good, monochromatic laser light source is since the invention in communication, essence All various aspects such as close instrument manufacturing, high-acruracy survey, display illumination, medical diagnosis play an important role;And multicolor displaying Light source shows more abundant color than monochromatic source, and therefore, multicolor displaying light source is in colored screen display, biologic medical, machine Vision etc. possesses huge application prospect.
Existing multicolor displaying light source need to usually use one or more monochromatic source laser constitutions, and need exterior light The adjusting on road is integrated into same output, and overall volume is more huge and higher cost;Meanwhile monochromatic laser light source is generally with blue light Laser is core, cooperates the colour wheel of fluorescent powder to allot white light and separates required color using colour wheel, on whole Adjusted Option Also complex.And with the development of science and technology and various devices it is highly integrated, in the side such as machine vision and biological warning lamp Face, the collection for the more color display light sources for needing to be integrated in miniature scale polychromatic source, thus also recall this monochromatic light At degree and brightness regulation scheme, more stringent requirements are proposed.Obviously, the on piece multi color line light source of high integration how is obtained, is met The application of machine vision, medical diagnosis etc., become in multicolor displaying light source micromation research process one it is urgently to be resolved Problem.
Summary of the invention
It is a primary object of the present invention to overcome drawbacks described above in the prior art, a kind of high integration, coloration are proposed It can easily be accommodated, the miniature multicolor displaying linear light source and preparation method thereof of low cost.
The present invention is achieved by the following technical solutions:
A kind of miniature multicolor displaying linear light source, including micro-fluidic chip, laser diode and several microns of optical waveguides, it is described Laser diode and micron optical waveguide are packaged in micro-fluidic chip, wherein the light-emitting surface of one described micron of optical waveguide active area is set There is input terminal, the input terminal corresponds to the active area light-emitting surface for being placed in laser diode, and the micron optical waveguide is micro- with remaining It intercouples between rice optical waveguide and is etched with deep mixed circular hole at intervals in side and constitute multicolor displaying linear light source Side output end.
In a preferred embodiment, the micro-fluidic chip includes substrate and cover plate.
In a preferred embodiment, the laser diode and micron optical waveguide are installed on substrate, and the cover plate covers On substrate.
In a preferred embodiment, the micron optical waveguide diameter is 2~10 μm, and length is 2~5cm.
In a preferred embodiment, the coupling length between the micron optical waveguide is 2~5 μm.
In a preferred embodiment, the coupling angle between the micron optical waveguide is 10 °~30 °.
In a preferred embodiment, the micron optical waveguide is micron optical fiber or polymer micro wire.
In a preferred embodiment, the quantity of the micron optical waveguide is 3.
A kind of production method of miniature multicolor displaying linear light source is operated micro- by one under an optical microscope by micro-nano The input terminal correspondence of rice optical waveguide is placed in laser diode active area light-emitting surface to input monochromatic green light;Again by this micron of light wave It leads and couples and adjust coupling length respectively with the input terminal of other micron of optical waveguide, so that the side output of all microns of optical waveguides Polychromatic light;Finally, being packaged using micro-fluidic chip to the micron optical waveguide and laser diode
Beneficial effects of the present invention:
1) multicolor displaying linear light source and preparation method thereof of the invention, using several microns of optical waveguides coupling at a certain angle It closes, the branched structure that the input of composition one end, multiterminal side uniformly export, input terminal is placed in the active of green laser diode Light-emitting surface couples section length by adjusting waveguide, exports three coloured light uniformly from side in proportion, greatly have compressed device Size improves integrated level;
2) multicolor displaying linear light source and preparation method thereof of the invention, in simple branched structure only with a kind of light source just Three kinds of display light sources can be obtained, have the characteristics that structure is simple, light source utilization rate is high, colour developing is abundant, regarded in warning lamp, machine The fields such as feel, biologic medical play a significant role;
3) multicolor displaying linear light source and preparation method thereof of the invention, can by the coupling length between micron optical waveguide into The adjusting of row display brightness, regulative mode are flexible;
4) multicolor displaying linear light source and preparation method thereof of the invention carries out consolidating for micromation light source using micro-fluidic chip Fixed encapsulation, it is ensured that stable structure, reliable.
Detailed description of the invention
Fig. 1 is the perspective view of micron optical waveguide of the present invention;
Fig. 2 is the top view of micron optical waveguide of the present invention;
Fig. 3 is the side view of micron optical waveguide of the present invention;
Fig. 4 is the schematic diagram of internal structure of the miniature multicolor displaying linear light source of the present invention;
Fig. 5 is the package structure diagram of the miniature multicolor displaying linear light source of the present invention.
Wherein: 1- microns of output end 13- microns of optical waveguide sides of 12- microns of optical waveguide input terminal of 11- microns of optical waveguide Optical waveguide coupled area
2- laser diode 21- active area light-emitting surface 3- micro-fluidic chip substrate 4- micro-fluidic chip cover plate
Specific embodiment
In order to keep technical solution of the present invention clearer, now the present invention is done further specifically with attached drawing in conjunction with the embodiments It is bright:
The present invention provides a kind of miniature multicolor displaying linear light sources, as shown in Figs 1-4, including micro-fluidic chip 5, laser two Pole pipe 2 and three micron optical waveguides 1, laser diode 2 and micron optical waveguide 1 are packaged in micro-fluidic chip 5, wherein one micron The light-emitting surface of 1 active area of optical waveguide is equipped with input terminal 11, the corresponding active area light-emitting surface for being placed in laser diode 2 of input terminal 11 21, it intercouples between this micron of optical waveguide 1 and remaining micron of optical waveguide 1, micron optical waveguide 1 selects that diameter is uniform, surface matter Good micron optical fiber or high molecular polymer micro wire are measured, uniform diameter, the surface quality in order to realize micron optical waveguide 1 are good Good, flame drawing cone method can be used in micron optical fiber, high molecular polymer micro wire can be used solution and cone method is drawn to be prepared;Three micro- It intercouples between rice optical waveguide 1, forms one end input, the 1x3 branched structure of three end side surfaces output.
In three branches that micron optical waveguide 1 forms, wherein being located in the middle the polymerization that micron optical waveguide 1 is dyestuff doping Object micro wire, remaining two branch micron optical waveguide 1 can be undoped polymer micro wire, in addition, this three micron light waves It leads 1 side and is etched with the side output end 12 that deep mixed circular hole constitutes multicolor displaying linear light source, micron light at intervals The Circularhole diameter of 1 side of waveguide is 2 μm, and at a distance of 1 μm between circular hole, a circular hole depth nearest from input terminal 11 is 200nm, 200nm incremented by successively, most as deep as the 200nm that successively successively decreases after the depth for 1 μm, reaching most deep, until most shallow depth 200nm.
13 length of coupled zone can be operated by micro-nano, be adjusted under an optical microscope;The variation of 13 length of coupled zone, The adjusting that output intensity may be implemented is realized the energy transmission of laser by intercoupling between micron optical waveguide 1, and is led to It crosses the adjusting to coupled zone 13 and realizes that polychromatic light is uniformly exported in 1 side of micron optical waveguide, this miniature multicolor displaying linear light source Device size is greatly had compressed, integrated level is improved.
In order to guarantee to have between micron optical waveguide 1 higher coupling efficiency, the diameter of three micron optical waveguides 1 is consistent, directly Diameter range is at 2~10 μm;The length of three micron optical waveguides 1 is identical, about 2cm, for the ease of the three coloured light light of adjustment input By force, the coupling length between micron optical waveguide 1 should be between 1~5 μm, and coupling angle is 10 °~30 °.
As shown in figure 5, the stable structure in order to guarantee miniature multicolor displaying linear light source, will be assembled using micro-fluidic chip 5 Good laser is packaged, and micro-fluidic chip 5 includes substrate 3 and cover plate 4, and laser diode 2 and micron optical waveguide 1 are fixedly mounted with It covers on substrate 3, then by cover plate 4 in completing to encapsulate on substrate 3, improves miniature multicolor displaying linear light source and entire system in this way The integrated level and stability of system.
A kind of production method of miniature multicolor displaying linear light source is operated micro- by one under an optical microscope by micro-nano The correspondence of input terminal 11 of rice optical waveguide 1 is placed in 2 active area light-emitting surface 21 of laser diode to input monochromatic green light;It is again that this is micro- The input terminal 11 of rice optical waveguide 1 and other micron of optical waveguide 1 couples respectively and adjusts coupling length, so that all microns of optical waveguides 1 side exports polychromatic light;Finally, being packaged using micro-fluidic chip 5 to the micron optical waveguide 1 and laser diode 2.
Micro-nano operation in the present invention refers to: probe (the nano optical fibers cone or STM probe that draw cone) is fixed on manual three It ties up on translation stage, probe is controlled by translation stage under an optical microscope, adjusts position, coupling length of optical waveguide etc..The party Method has had pertinent literature to disclose, and please specifically be detailed in: Direct Coupling of Plasmonic and Photonic Nanowires for Hybrid Nanophotonic Components and Circuits (Nano Lett.2009) is (multiple Close the direct-coupling (nanometer flash report .2009) of phasmon nano wire and photon nano wire in nano-photon device and circuit)
The foregoing is only a preferred embodiment of the present invention, the range that the present invention that therefore, it cannot be limited according to is implemented, i.e., Equivalent changes and modifications made in accordance with the scope of the invention and the contents of the specification should still be within the scope of the present invention.

Claims (9)

1. a kind of miniature multicolor displaying linear light source, including micro-fluidic chip, laser diode and several microns of optical waveguides, feature Be: the laser diode and micron optical waveguide are packaged in micro-fluidic chip, wherein one described micron of optical waveguide active area Light-emitting surface be equipped with input terminal, the corresponding active area light-emitting surface for being placed in laser diode of the input terminal, the micron light wave It leads to intercouple between remaining micron of optical waveguide and be etched with deep mixed circular hole composition polychrome at intervals in side and show The side output end of timberline light source.
2. a kind of miniature multicolor displaying linear light source as described in claim 1, it is characterised in that: the micro-fluidic chip includes base Piece and cover plate.
3. a kind of miniature multicolor displaying linear light source as claimed in claim 2, it is characterised in that: the laser diode and micron Optical waveguide is installed on substrate, and the cover plate is covered on substrate.
4. a kind of miniature multicolor displaying linear light source as described in claim 1, it is characterised in that: the micron optical waveguide diameter is 2~10 μm, length is 2~5cm.
5. a kind of miniature multicolor displaying linear light source as described in claim 1, it is characterised in that: between the micron optical waveguide Coupling length is 2~5 μm.
6. a kind of miniature multicolor displaying linear light source as described in claim 1, it is characterised in that: between the micron optical waveguide Coupling angle is 10 °~30 °.
7. a kind of miniature multicolor displaying linear light source as claimed in claim 3, it is characterised in that: the micron optical waveguide is micron Optical fiber or polymer micro wire.
8. a kind of miniature multicolor displaying linear light source as described in claim 1, it is characterised in that: the quantity of the micron optical waveguide It is 3.
9. a kind of production method of miniature multicolor displaying linear light source, it is characterised in that: under an optical microscope, operated by micro-nano The input terminal correspondence of one micron optical waveguide is placed in laser diode active area light-emitting surface to input monochromatic green light;Again should Micron optical waveguide and the input terminal of other micron of optical waveguide couple respectively and adjust coupling length, so that all microns of optical waveguides Side exports polychromatic light;Finally, being packaged using micro-fluidic chip to the micron optical waveguide and laser diode.
CN201811453637.0A 2018-11-30 2018-11-30 Miniature multicolor display line light source and manufacturing method thereof Active CN109283617B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109946004A (en) * 2019-04-29 2019-06-28 华侨大学 A kind of micro pressure discoloration sensor and preparation method thereof

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CN205899069U (en) * 2016-08-18 2017-01-18 河南仕佳光子科技股份有限公司 Device is decorated to MN type optical divider visible light
CN107942530A (en) * 2017-11-24 2018-04-20 浙江大学 Integrated light guide super-resolution micro imaging system
CN107994460A (en) * 2017-11-20 2018-05-04 华侨大学 A kind of miniature white light laser and preparation method thereof
CN209086471U (en) * 2018-11-30 2019-07-09 华侨大学 A kind of miniature multicolor displaying linear light source

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Publication number Priority date Publication date Assignee Title
KR20110076412A (en) * 2009-12-29 2011-07-06 전자부품연구원 Multicolored-optical laser module
CN102081194A (en) * 2010-11-05 2011-06-01 中山大学 Method for realizing micronano all-optical color
CN103344615A (en) * 2013-06-09 2013-10-09 华侨大学 Application of tapered nanometer optical fiber, and micro-fluidic chip and preparation method thereof
US20160367836A1 (en) * 2015-06-19 2016-12-22 The Regents Of The University Of Michigan Multicolor neural optoelectrode
CN105699294A (en) * 2016-02-29 2016-06-22 中国工程物理研究院材料研究所 Micro-nano optical sensor system capable of achieving concentration measurement of various gases
CN205899069U (en) * 2016-08-18 2017-01-18 河南仕佳光子科技股份有限公司 Device is decorated to MN type optical divider visible light
CN106207743A (en) * 2016-08-25 2016-12-07 武汉光迅科技股份有限公司 A kind of for grating coupled laser structure and method for packing
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109946004A (en) * 2019-04-29 2019-06-28 华侨大学 A kind of micro pressure discoloration sensor and preparation method thereof
CN109946004B (en) * 2019-04-29 2024-02-02 华侨大学 Miniature pressure color-changing sensor and preparation method thereof

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