CN103630969B - It is a kind of to can customize integrated optical power shunt of splitting ratio and preparation method thereof - Google Patents
It is a kind of to can customize integrated optical power shunt of splitting ratio and preparation method thereof Download PDFInfo
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Abstract
Integrated optical power shunt of splitting ratio and preparation method thereof is can customize the invention discloses a kind of, it is related to optic communication light splitting technology field, it is intended to provide and a kind of can customize integrated optical power shunt of splitting ratio and preparation method thereof, can be needed to be manufactured according to the splitting ratio of designed, designed during fabrication, and good stability, make simple, low cost.Its step is：Selection quartz makes substrate layer, the low pure material of selective refraction rate makes under-clad layer, selective refraction rate dopant material high makes sandwich layer, sandwich layer is processed into y-shaped waveguide light path, selection makes top covering with under-clad layer refractive index identical dopant material, waveguide groove is set in the top covering of tapered one side of bifurcated section of drawing of y-shaped waveguide light path, the assistant waveguide material that selective refraction rate meets splitting ratio design requirement is injected into waveguide groove formation assistant waveguide block after solidification, and carrying out patch cover plate finally by encapsulation technology encapsulates.The present invention is primary to be applied in optic communication light splitting technology.
Description
Technical field
The present invention relates to optic communication light splitting technology field, more particularly to a kind of integrated optical power that can customize splitting ratio point
Road device and preparation method thereof.
Background technology
At present, having two kinds of technological approaches can obtain actual variable optical power distributor：One kind is y-type optical fiber fused tapered
Luminous power variable coupler, but because device size is big, and easily by such environmental effects such as stress, it is impossible to the enough light that stabilization is provided
Power-division ratios；Another kind is using electric light or thermo-optic effect, by the supplementary electrode by waveguide or thermode, to change Y
The mode of the shape waveguide light path wherein refractive index of a branch-waveguide realizes the distribution of adjustable light energy, but due to making additional electrical
The technological requirement of pole or thermode is higher, while largely increased cost.
China Patent Publication No. CN1467926, publication date is on January 14th, 2004, entitled " optical power divider "
A kind of optical power divider is disclosed in scheme, with an input waveguide and for input waveguide to be shunted into N number of light
N number of output optical waveguide of signal, including：At least two have planar lightwave circuit component structure and in one chip with pre-
If the optical branching device that is separated of distance；And for be aligned multiple optical branching devices input and output optical waveguide it is right
Quasi-Waveguide.It is disadvantageous in that, this optical power divider, light beam signal averaging can only be divided into two ways of optical signals.Due to
The decay of optical signal is relevant with transmission distance, transmits the more of distance more distance light signal attenuation, reaches the optical signal of more distant place just
It is weaker.If optical signal needs the distance of transmission distant all the way, and another road optical signal needs the distance of transmission closer,
So transmit remote that all the way optical signals in causing to reach the optical signal of remote destination by transmission distance farther out
Become very weak, it is possible to weak to the degree that can not be recognized, and then influence the long-distance transmissions of optical signal, i.e., needed at remote end
Want enhanced optical signal；And nearer this of transmission range optical signals are nearer in the distance passed through all the way, cause to reach closely
The optical signal of destination is also very strong, and optical signal is by force to the normal light letter considerably beyond required for closely destination
Number, i.e., produce unnecessary optical signal at closely end.Distal end needs to increase optical signal, and near-end truly has unnecessary light to believe
Number, this is, because optical signal allocation proportion is than bad, original this enough beam optical signal to be wasted a part.By light beam
Signal averaging is divided into the optical power divider of two ways of optical signals, and original enough a branch of optical signals can be caused to waste a part,
Seem that cost performance is relatively low.
Name Resolution：
1st, CVD (Chemical Vapor Deposition, chemical vapor deposition), to refer to and constitute film element containing
, there is chemistry in substrate surface anti-in the steam and other gases introducing reative cell needed for reaction of gaseous reactant or liquid reactants
The process of film should be generated.Many films are prepared using CVD method in super large-scale integration.By CVD treatment
Afterwards, Surface Treated Films adherence about improves 30%, prevents the scratch produced during the shapings such as the bending of high-tenacity steel, stretching.
2nd, photoetching and etching, the two words are the important steps in semiconductor technology.（1）" photoetching " refers to fill photoetching
The wafer of glue（Or it is silicon chip）It is upper to cover set photolithography plate, one then is carried out to wafer across photolithography plate with ultraviolet
The irradiation fixed time.Principle is exactly to make part photoetching colloidin using ultraviolet, it is easy to corroded.（2）After " etching " is photoetching, use
Corrosive liquid erodes rotten part photoresist（Positive glue）, crystal column surface just shows the figure of semiconductor devices and its connection
Shape.Then wafer is corroded with another corrosive liquid, forms semiconductor devices and its circuit.
The content of the invention
The present invention is, in order to solve existing optical power divider, light beam signal averaging can only to be divided into two ways of optical signals,
Original enough a branch of optical signals can be caused can waste a part, the relatively low deficiency of cost performance, there is provided one kind can customize light splitting
Integrated optical power shunt of ratio and preparation method thereof, the shunt and preparation method thereof during fabrication can be according to designed, designed
Splitting ratio need to be manufactured, and good stability makes simple, low cost.
To achieve these goals, the present invention uses following technical scheme：
A kind of integrated optical power shunt preparation method that can customize splitting ratio, comprises the following steps：
Step one, makes substrate layer, selection quartz as substrate layer making material, and surface to substrate layer throws
Light treatment；
Step 2, make under-clad layer, the low pure material of selective refraction rate as under-clad layer making material, in substrate layer
Upper surface, the under-clad layer for making that thickness is for 16-30 microns is deposited by CVD method；
Step 3, make sandwich layer, selective refraction rate dopant material high as sandwich layer making material, in the upper of under-clad layer
Surface deposits the sandwich layer for making that thickness is 6 microns by CVD method；
Step 4, makes y-shaped waveguide light path, and sandwich layer is processed by photoetching and etching technics, and sandwich layer is processed into
Section is 6 × 6 microns of y-shaped waveguide light path；
Step 5, makes top covering, selects the making material as top covering with under-clad layer refractive index identical dopant material
Material, in the upper surface of under-clad layer and the upper surface of y-shaped waveguide light path, it is 16-30 microns to be deposited by CVD method and make thickness
Top covering, y-shaped waveguide light path is sealed between top covering and under-clad layer in addition to input and output end；
Step 6, makes waveguide groove, and ripple is set in the top covering of tapered one side of bifurcated section of drawing of y-shaped waveguide light path
Groove is led, the bottom land of waveguide groove falls on the upper surface of under-clad layer or falls in under-clad layer, and the opening of waveguide groove is in Shang Bao
On the upper surface of layer, and waveguide groove, apart from 0.4-2.3 micron of y-shaped waveguide light path, the width of waveguide groove is 8 microns, waveguide
The length of groove will set according to the tapered bifurcated segment length of the drawing of y-shaped waveguide light path, and one end of waveguide groove will exceed
30 microns of the cone bottom of tapered bifurcated section is drawn, the other end of waveguide groove is parallel with the cone of tapered bifurcated section is drawn；
Step 7, injection solidification assistant waveguide material, selective refraction rate meets the assistant waveguide material of splitting ratio design requirement
Material is injected into waveguide groove, and allows assistant waveguide material to solidify in waveguide groove, forms assistant waveguide block；
Step 8, encapsulation carries out patch cover plate and encapsulates by encapsulation technology.
This programme finds that a branch of optical signal is input into from the input of y-shaped waveguide light path, the optical signal after testing use
It is not distributed equally by the remaining optical signal after device total losses, the optical signal is just drawing the coupling of tapered bifurcated section
Area couples with assistant waveguide block, coupling as a result, the more a part of optical signals of this beam optical signal have been directed Y shape
In the right branch light path of waveguide light path, only less than 1/2nd remaining torrent of light in left branch light path.Namely
Right branch light path near this side of assistant waveguide block has assigned to more optical signal, away from the left branch light of that side of assistant waveguide block
Less optical signal is assigned in road.To realize be needed according to the splitting ratio of designed, designed during fabrication and manufactured, and stabilization
Property it is good, make simple, low cost.
Preferably, the making material selection pure silicon dioxide film of the under-clad layer, the making material choosing of the sandwich layer
Refractive index deped silicon dioxide film high is selected, the making material selection deped silicon dioxide film of the top covering is described auxiliary
Waveguide material is helped to select macromolecular material, the making material of the patch cover plate to select ordinary glass material.
Preferably, rolled over to y-shaped waveguide light path this lateral bending higher or lower than the waveguide groove madial wall of y-shaped waveguide light path,
The waveguide groove madial wall contour with y-shaped waveguide light path thickness is parallel with y-shaped waveguide light path lateral wall.
A kind of integrated optical power shunt that can customize splitting ratio, including, substrate layer, under-clad layer, sandwich layer, top covering and
Patch cover plate, using quartz material substrate layer, and surface to substrate layer is processed by shot blasting；In the upper surface of substrate layer,
Using the low pure material of refractive index, the under-clad layer for making that thickness is for 16-30 microns is deposited by CVD method；In the upper of under-clad layer
Surface, using refractive index dopant material high, the sandwich layer for making that thickness is 6 microns is deposited by CVD method；Using photoetching and
Etching technics is processed sandwich layer, and sandwich layer is processed into the y-shaped waveguide light path that section is 6 × 6 microns；Rolled over using with under-clad layer
Rate identical dopant material is penetrated, in the upper surface of under-clad layer and the upper surface of y-shaped waveguide light path, is deposited by CVD method and made
It is 16-30 micron of top covering to make thickness, y-shaped waveguide light path top covering is sealed in addition to input and output end with
Between covering；Waveguide groove, the groove of waveguide groove are set in the top covering of tapered one side of bifurcated section of drawing of y-shaped waveguide light path
Bottom falls on the upper surface of under-clad layer or falls in under-clad layer, and the opening of waveguide groove is on the upper surface of top covering, and waveguide
0.4-2.3 microns of groove distance y-shaped waveguide light path, the width of waveguide groove is 8 microns, and the length of waveguide groove will be according to Y shape
The tapered bifurcated segment length of drawing of waveguide light path sets, and one end of waveguide groove will exceed the cone bottom 30 for drawing tapered bifurcated section
Micron, the other end of waveguide groove is parallel with the cone of tapered bifurcated section is drawn；Selective refraction rate meets splitting ratio design requirement
Assistant waveguide material is injected into waveguide groove, and allows assistant waveguide material to solidify in waveguide groove, forms assistant waveguide block；
Patch cover plate is carried out by encapsulation technology to encapsulate.
Preferably, the making material selection pure silicon dioxide film of the under-clad layer, the making material choosing of the sandwich layer
Refractive index deped silicon dioxide film high is selected, the making material selection deped silicon dioxide film of the top covering is described auxiliary
Waveguide material is helped to select macromolecular material, the making material of the patch cover plate to select ordinary glass material.
Preferably, rolled over to y-shaped waveguide light path this lateral bending higher or lower than the waveguide groove madial wall of y-shaped waveguide light path,
It is parallel with y-shaped waveguide light path lateral wall in the waveguide groove madial wall of sustained height section with y-shaped waveguide light path thickness.
The present invention can reach following effect：
1st, shunt and preparation method thereof, can need to be manufactured during fabrication according to the splitting ratio of designed, designed, and
Reliability good stability, is simple to manufacture conveniently, low cost.
2nd, shunt and preparation method thereof, optical signal coupled zone is set in the tapered bifurcated section of the drawing of y-shaped waveguide light path,
And additional assistant waveguide is provided with coupled zone, the waveguide groove of coupled zone is arranged on total branch-waveguide of y-shaped waveguide light path
A side, change optical signal in coupled zone by the assistant waveguide material means that different refractivity is injected in waveguide groove
Equivalent refractive index distribution, finally realize that the splitting ratio of optical power divider is self-defined in designing for manufacturing.
Brief description of the drawings
Fig. 1 is a kind of structural representation that under-clad layer deposition of the invention is produced on substrate layer.
Fig. 2 is of the invention on the basis of Fig. 1, and sandwich layer deposition is produced on a kind of structural representation on under-clad layer.
Fig. 3 is of the invention on the basis of Fig. 2, after sandwich layer is processed into y-shaped waveguide light path using photoetching and etching technics
A kind of structural representation.
Fig. 4 is of the invention on the basis of Fig. 3, is sunk on the upper surface of the upper surface of under-clad layer and y-shaped waveguide light path
Product makes a kind of structural representation after top covering.
Fig. 5 is of the invention on the basis of Fig. 4, is set in the top covering that y-shaped waveguide light path draws tapered one side of bifurcated section
Waveguide groove is put, and assistant waveguide material solidification in waveguide groove, forms a kind of structural representation after assistant waveguide block.
Fig. 6 is a kind of oblique overlooking the structure diagram of the present invention from optical signal input viewing.
Fig. 7 is a kind of positive structure diagram of the present invention from optical signal input viewing.
Fig. 8 is a kind of oblique overlooking the structure diagram of the present invention from light signal output end viewing.
Fig. 9 is the assistant waveguide block of present invention solidification and a kind of overlooking the structure diagram of y-shaped waveguide light path spacing arrangement.
Figure 10 is a kind of hierarchical structure schematic diagram when assistant waveguide block of present invention solidification does not have a bending segment.
Figure 11 is a kind of hierarchical structure schematic diagram when there is a bending segment assistant waveguide block upper end of present invention solidification.
Figure 12 is a kind of hierarchical structure schematic diagram when assistant waveguide block upper and lower side of present invention solidification has a bending segment.
In figure：Substrate layer 1, under-clad layer 2, sandwich layer 3, y-shaped waveguide light path 4, top covering 5, assistant waveguide block 6, input 7,
Right branch light path 8, right branch lens combination light path output 9, left branch light path 10, left branch lens combination light path output 11 draws tapered bifurcated section
12, bore bottom 13, second segment assistant waveguide block 14, cone 16, first paragraph assistant waveguide block 15, coupled zone 17, epimere assistant waveguide
Block 18, stage casing assistant waveguide block 19, hypomere assistant waveguide block 20, waveguide groove 21.
Specific embodiment
Below by embodiment, and with reference to accompanying drawing, technical scheme is described in further detail.
Embodiment：A kind of to can customize integrated optical power shunt of splitting ratio and preparation method thereof, its step is as follows:
Step one, it is shown in Figure 1, substrate layer 1 is made, quartz is selected as the making material of substrate layer, and to substrate
The surface of layer is processed by shot blasting.Can according to the size of equipment choice substrate layer, such as silicon chip have 4 cun, six cun and eight
Very little waits different size.
Step 2, it is shown in Figure 1, under-clad layer 2 is made, the low pure silicon dioxide thin-film material of selective refraction rate is under
The making material of covering, in the upper surface of substrate layer, the under-clad layer for making that thickness is 16 microns is deposited by CVD method.Lower bag
Layer thickness be greater than more than 10 microns, if under-clad layer thickness is too thin, flashlight when coupled zone is coupled, Y shape ripple
Guide path draws the flashlight in tapered bifurcated section easily to pass through under-clad layer, larger to optical signal loss, therefore, the thickness of under-clad layer will
More than more than 10 microns, to ensure that device performance is not influenceed by substrate layer refractive index.But the thickness of under-clad layer also should not be excessively
Thickness, the thickness of under-clad layer is advisable no more than 30 millimeters, the excessively thick cost for not only increasing making material of under-clad layer, produces wave
Take, also make the component size made larger, cause, using inconvenience, also to increase the cost of making material.
Step 3, it is shown in Figure 2, sandwich layer 3 is made, selective refraction rate deped silicon dioxide film material high is used as core
The making material of layer, the sandwich layer for making that thickness is 6 microns is deposited in the upper surface of under-clad layer by CVD method.Due to single-mode optics
Fine core size is general less than 10 microns, so core layer thickness is made 6 microns, can be matched with optical fiber, reduces as far as possible
Coupling loss.The thickness of sandwich layer is also unsuitable blocked up, blocked up to cause the degree of coupling to be deteriorated.Referring to shown in Fig. 9, Figure 10, due to thickness
Sandwich layer, makes the y-shaped waveguide light path of sandwich layer coupled zone draw tapered bifurcated section cross section larger, between left and right in larger distance, due to away from
From limitation, be located at coupled zone side assistant waveguide block effective coupling cannot be carried out to the optical signal of coupled zone opposite side and inhale
Draw, and then influence the effect of the self-defined splitting ratio of optical signal.
Step 4, it is shown in Figure 3, y-shaped waveguide light path 4 is made, sandwich layer is processed by photoetching and etching technics,
Sandwich layer is processed into the y-shaped waveguide light path that section is 6 × 6 microns.Y-shaped waveguide light path is made the pros that section is 6 × 6 microns
Shape face, the degree of coupling of such coupled zone is preferable.
Step 5, it is shown in Figure 4, top covering 5 is made, select thin with under-clad layer refractive index identical doping silicon dioxide
Membrane material as top covering making material, in the upper surface of under-clad layer and the upper surface of y-shaped waveguide light path, by CVD side
Method deposition makes the top covering that thickness is 16 microns, makes y-shaped waveguide light path that upper bag is sealed in addition to input and output end
Between layer and under-clad layer.The role of top covering and under-clad layer role are identical, and it is micro- that the thickness of top covering is greater than 10
More than rice, if top covering thickness is too thin, when coupled zone is coupled, y-shaped waveguide light path draws tapered bifurcated section to flashlight
Interior flashlight easily passes through top covering, larger to optical signal loss, therefore, the thickness of top covering is greater than more than 10 microns.But
The thickness of top covering is also gone up easily excessively thick, the thickness of top covering is advisable no more than 30 millimeters, and top covering excessively thickness not only increases
The cost of making material, produces waste, also makes the component size made larger, causes, using inconvenience, also to increase and make material
The cost of material.Top covering and under-clad layer can not only be protected to assistant waveguide block, and top covering and under-clad layer can also be to Y shape ripples
Guide path is protected.Top covering is the silica membrane of doping, and the doping inside top covering has stream relative to under-clad layer
Dynamic property, under-clad layer can not flow, and the refraction coupling effect of optical signal is preferable.
Step 6, referring to shown in Fig. 5, Fig. 9, Figure 12, makes waveguide groove 21, in the tapered bifurcated of the drawing of y-shaped waveguide light path
Waveguide groove is set in the top covering of one side of section, ICP etchings specifically are carried out to top covering, the waveguide groove figure that will be designed
The same layer height of sandwich layer is transferred to, waveguide groove is ultimately formed, the bottom land of its waveguide groove falls on the upper surface of under-clad layer or falls
In under-clad layer, the opening of waveguide groove is on the upper surface of top covering, and waveguide groove is apart from 0.4 micron of y-shaped waveguide light path,
The width of waveguide groove is 8 microns, and the length of waveguide groove will set according to tapered bifurcated 12 length of section of the drawing of y-shaped waveguide light path
It is fixed, and one end of waveguide groove will exceed 30 microns of cone bottom for drawing tapered bifurcated section, and the other end of waveguide groove is tapered with drawing
The cone of bifurcated section is parallel.
Just determine position and the shape size of assistant waveguide block due to the position of waveguide groove and shape, and assistant waveguide
The position of block and shape can determine the degree of coupling size of optical signal, and degree of coupling size can influence the self-defined splitting ratio of optical signal
Effect.Firstly the need of the design simulation waveguide groove figure in reticle in technique, waveguide groove pattern will be simulated by photoetching
It is transferred on top plate or lower plywood.
The position of waveguide groove is if too small be unsuitable for making with a distance from y-shaped waveguide light path, and spacing distance is big
The degree of coupling can be caused poor, the degree of coupling effect of the position of waveguide groove with a distance from y-shaped waveguide light path at 0.4 micron is good.
8 microns of the width of waveguide groove is most suitable.Due to assistant waveguide block and light in the waveguide groove remote more than 8 microns
The degree of coupling of signal can be rapidly decreased to minimum, and even without coupling, therefore the width of waveguide groove just must not more than 8 microns
Want, it appears waste, also taken up space, material has been lost, improved cost of manufacture.
The length of waveguide groove will set according to tapered bifurcated 12 length of section of the drawing of y-shaped waveguide light path.For different ripples
Transmission optical signal long, the tapered bifurcated segment length of drawing of its y-shaped waveguide light path is different, and the degree of coupling is also subject to y-shaped waveguide light
The influence of the length of coupled zone 17 of the tapered bifurcated section of drawing on road.Coupled zone coupling effect more long is better, otherwise then coupling effect becomes
Difference.The coupling section length of the present embodiment is 350 microns.
Shown in Figure 9, one end of waveguide groove 21 will exceed 30 microns of cone bottom for drawing tapered bifurcated section, that is, aid in
The cone bottom 13 that the second segment assistant waveguide block 14 of guide blocks 6 exceedes the tapered bifurcated section of drawing wants 30 microns, and such coupling effect is best.
The other end of waveguide groove is usually no more than the cone 16 for drawing tapered bifurcated section, parallel at most with the cone of tapered bifurcated section is drawn.
Namely the first paragraph assistant waveguide block 15 of assistant waveguide block 6 is usually no more than the cone 16 for drawing tapered bifurcated section, at most with drawing
The cone of tapered bifurcated section is parallel, and such coupling effect is best.
As shown in Figure 10, waveguide groove towards the waveguide groove madial wall of this side of y-shaped waveguide light path can be set as vertically to
On straight wall so that the section of assistant waveguide block 6 is constituted by one section, and this section is straight up.This structure is easy to add
Work makes.
As shown in figure 11, waveguide groove towards this side of y-shaped waveguide light path waveguide groove madial wall by epimere side wall and in
Section side wall composition, and stage casing side wall is parallel with y-shaped waveguide light path lateral wall, and epimere side wall to y-shaped waveguide light path, roll over by this lateral bending.
So that the section of assistant waveguide block 6 is made up of stage casing assistant waveguide block 19 and epimere assistant waveguide block 18, and stage casing aids in
Guide blocks are parallel with y-shaped waveguide light path lateral wall, and epimere assistant waveguide block to y-shaped waveguide light path, roll over by this lateral bending.So design
Assistant waveguide block can couple greatly optical signal, better, and the self-defined splitting ratio effect of optical signal is preferable.
As shown in figure 12, waveguide groove towards the waveguide groove madial wall of this side of y-shaped waveguide light path by epimere side wall, stage casing
Side wall and hypomere side wall are constituted, and stage casing side wall is parallel with y-shaped waveguide light path lateral wall, and epimere side wall is to y-shaped waveguide light path
This lateral bending is rolled over, and hypomere side wall also to y-shaped waveguide light path, roll over by this lateral bending.Waveguide namely higher or lower than y-shaped waveguide light path is recessed
Groove madial wall to y-shaped waveguide light path, roll over by this lateral bending, and y-shaped waveguide light path thickness contour waveguide groove madial wall and y-shaped waveguide
Light path lateral wall is parallel.This structure makes the section of assistant waveguide block 6 by hypomere assistant waveguide block 20, stage casing assistant waveguide block 19
Constituted with epimere assistant waveguide block 18, and stage casing assistant waveguide block is parallel with y-shaped waveguide light path lateral wall, epimere assistant waveguide
Block to y-shaped waveguide light path, roll over by this lateral bending, and hypomere assistant waveguide block also to y-shaped waveguide light path, roll over by this lateral bending.The auxiliary for so designing
Guide blocks can couple farthest optical signal, and more preferably, the self-defined splitting ratio effect of optical signal is preferable for its coupling effect.
Step 7, shown in Figure 5, injection solidification assistant waveguide material, selective refraction rate meets splitting ratio design requirement
Macromolecular material as assistant waveguide material, and macromolecular material is injected into waveguide groove, and allow the height of assistant waveguide
Molecular material solidifies in waveguide groove, forms assistant waveguide block 6.Macromolecular material（If UV glue is exactly a kind of macromolecular material,
It has certain refractive index）Refractive index be easy to configuration, the refractive index size of macromolecular material is according to design splitting ratio
Calculate.Assistant waveguide block draws anaplasia of the distance of tapered bifurcated section coupled zone at 0.4-2.3 μm with y-shaped waveguide light path
Change, the refractive index of assistant waveguide material changes between 1.451-1.471.According to analog result, by selecting different distances
And refractive index parameter, branch's light path output intensity of the close assistant waveguide block side of y-shaped waveguide light path can be caused
Between 0.03-0.82 candelas change, and away from assistant waveguide block side another branch's light path output intensity in 0.06-
Change (assuming that input optical signal energy is 1 candela) between 0.72, device overall loss is less than 10%.Using macromolecular material
Make refractive index and meet splitting ratio assistant waveguide block, cheap, process is simple, it is easy to make.
Step 8, encapsulation carries out patch cover plate and encapsulates by encapsulation technology, and the making material for pasting cover plate selects simple glass material
Material.The mechanical performance and environmental stability of encapsulated device are good.Ordinary glass material is easily obtained, and cheap, and then
Reduce cost of manufacture.
All it is device with the splitting ratio of right branch light path due to the left branch light path of y-shaped waveguide light path as being usually
Remaining optical signal after part total losses is distributed equally, i.e., remaining optical signal has 1/2nd and is flowed into left branch light path
In, have 1/2nd and be flowed into right branch light path.
The present embodiment we found after testing use, referring to shown in Fig. 6, Fig. 9, in the optical signal overall loss of device
It is in the case of equal to 0.08 candela, the optical signal that a beam energy is 1 candela is defeated from the input 7 of y-shaped waveguide light path 4
Enter, the optical signal is just drawing the coupled zone of tapered bifurcated section 12 to be coupled with assistant waveguide block 6.Its coupling result be：Have
The optical signal of 0.73 candela has been flowed into the right branch light path 8 of y-shaped waveguide light path, and only 0.19 candela optical signal is flowed into
Arrive in left branch light path 10.Namely the right branch light path near this side of assistant waveguide block has assigned to more optical signal, right
Branch's light path should get the optical signal of 0.46 candela, but get the optical signal of 0.73 candela, obtain 0.27 more
The optical signal of candela；And assigned to less optical signal, left branch light path away from the left branch light path of that side of assistant waveguide block
The original optical signal that should also get 0.46 candela, but only gets 0.19 candela optical signal, can does without 0.27 candela
Optical signal.The 0.27 candela optical signal obtained right branch light path is just the 0.27 candela light that left branch light path is obtained less more
Signal.The reason for this result occur learn after analysis, is just proximate to the left branch light path of this side of assistant waveguide block by light
The result that signal is coupled with assistant waveguide block, this result illustrates our the tapered bifurcated section design systems of drawing in y-shaped waveguide light path
Change of the assistant waveguide block of work to the splitting ratio of optical signal has better effects.Therefore, we are in manufacture integrated optical power
During shunt, can according to the splitting ratio of designed, designed need into the self-defined of traveling optical signal and manufacture, and splitting ratio effect compared with
Good, stability is high, makes simple, low cost.
When in use, referring to shown in Fig. 6, Fig. 7, Fig. 8, distal end needs to increase light signal strength, just long transmission distance
That intelligent acess near this side of assistant waveguide block right branch lens combination light path output 9 on.And near-end need not increase light letter
Number intensity, just that near intelligent acess of transmission range to the left branch lens combination light path output 11 away from this side of assistant waveguide block
On.
It is not to be distributed equally into two ways of optical signals by a branch of optical signal, increased that optical power divider uses is flexible
Property.Original enough a branch of optical signals is not wasted as far as possible, and then seem that sexual valence is also higher.
The embodiments of the present invention above in conjunction with Description of Drawings, but do not limited by above-described embodiment when realizing, this area
Those of ordinary skill can within the scope of the appended claims make a variety of changes or change.
Claims (3)
1. a kind of integrated optical power shunt preparation method that can customize splitting ratio, it is characterised in that comprise the following steps：
Step one, makes substrate layer (1), selection quartz as substrate layer making material, and surface to substrate layer throws
Light treatment；
Step 2, make under-clad layer (2), the low pure material of selective refraction rate as under-clad layer making material, in substrate layer
Upper surface, the under-clad layer for making that thickness is for 16-30 microns is deposited by CVD method；
Step 3, make sandwich layer (3), selective refraction rate dopant material high as sandwich layer making material, in the upper of under-clad layer
Surface deposits the sandwich layer for making that thickness is 6 microns by CVD method；
Step 4, makes y-shaped waveguide light path (4), and sandwich layer is processed by photoetching and etching technics, sandwich layer is processed into and is cut
Face is 6 × 6 microns of y-shaped waveguide light path；
Step 5, makes top covering (5), selects the making material as top covering with under-clad layer refractive index identical dopant material
Material, in the upper surface of under-clad layer and the upper surface of y-shaped waveguide light path, it is 16-30 microns to be deposited by CVD method and make thickness
Top covering, y-shaped waveguide light path is sealed between top covering and under-clad layer in addition to input and output end；
Step 6, makes waveguide groove (21), and ripple is set in the top covering of tapered one side of bifurcated section of drawing of y-shaped waveguide light path
Groove is led, the bottom land of waveguide groove falls on the upper surface of under-clad layer or falls in under-clad layer, and the opening of waveguide groove is in Shang Bao
On the upper surface of layer, and waveguide groove, apart from 0.4-2.3 micron of y-shaped waveguide light path, the width of waveguide groove is 8 microns, waveguide
The length of groove will set according to tapered bifurcated section (12) length of the drawing of y-shaped waveguide light path, and one end of waveguide groove will
More than 30 microns of cone bottom for drawing tapered bifurcated section, the other end of waveguide groove is parallel with the cone of tapered bifurcated section is drawn；
Step 7, injection solidification assistant waveguide material, selective refraction rate meets the assistant waveguide material note of splitting ratio design requirement
Enter in waveguide groove, and allow assistant waveguide material to solidify in waveguide groove, form assistant waveguide block (6)；
Step 8, encapsulation carries out patch cover plate and encapsulates by encapsulation technology.
2. a kind of integrated optical power shunt preparation method that can customize splitting ratio according to claim 1, its feature
It is that the making material selection pure silicon dioxide film of the under-clad layer, the making material selective refraction rate of the sandwich layer is high
Deped silicon dioxide film, the making material selection deped silicon dioxide film of the top covering, the assistant waveguide material choosing
Macromolecular material is selected, the making material of the patch cover plate selects ordinary glass material.
3. a kind of integrated optical power shunt preparation method that can customize splitting ratio according to claim 1, its feature
It is that the waveguide groove madial wall higher or lower than y-shaped waveguide light path is rolled over to y-shaped waveguide light path this lateral bending, and y-shaped waveguide light path
The contour waveguide groove madial wall of thickness is parallel with y-shaped waveguide light path lateral wall.
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| CN106125198A (en) * | 2014-02-21 | 2016-11-16 | 杭州天野通信设备有限公司 | For full communication wave band being carried out light shunt structure and the preparation method of light splitting optimization |
| CN105116491B (en) * | 2015-09-22 | 2018-04-24 | 东南大学 | A kind of silicon substrate groove waveguides integrated-type optical power distributor |
| CN115793136A (en) * | 2021-09-10 | 2023-03-14 | 中兴通讯股份有限公司 | Optical connector and manufacturing method |
| CN115061237B (en) * | 2022-06-30 | 2024-02-06 | 华中科技大学 | Reconfigurable power branching device based on phase change material and power branching ratio adjusting method |
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| CN1713008A (en) * | 2005-07-05 | 2005-12-28 | 奥普为光子科技(无锡)有限公司 | Adjustable waveguide optical attenuator of planar light and production thereof |
| CN1963577A (en) * | 2005-11-10 | 2007-05-16 | 日本碍子株式会社 | Optical waveguide devices |
| CN202306053U (en) * | 2011-11-09 | 2012-07-04 | 孙其琴 | Optical attenuator capable of being modulated |
| CN203287558U (en) * | 2013-05-21 | 2013-11-13 | 杭州天野通信设备有限公司 | Integrated optical power splitter capable of customizing splitting ratio |
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| JP2006208518A (en) * | 2005-01-26 | 2006-08-10 | Seikoh Giken Co Ltd | Thermo-optical effect type optical waveguide element and its manufacturing method |
| JP4976030B2 (en) * | 2006-03-22 | 2012-07-18 | 古河電気工業株式会社 | Waveguide-type polarization splitter / synthesizer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1713008A (en) * | 2005-07-05 | 2005-12-28 | 奥普为光子科技(无锡)有限公司 | Adjustable waveguide optical attenuator of planar light and production thereof |
| CN1963577A (en) * | 2005-11-10 | 2007-05-16 | 日本碍子株式会社 | Optical waveguide devices |
| CN202306053U (en) * | 2011-11-09 | 2012-07-04 | 孙其琴 | Optical attenuator capable of being modulated |
| CN203287558U (en) * | 2013-05-21 | 2013-11-13 | 杭州天野通信设备有限公司 | Integrated optical power splitter capable of customizing splitting ratio |
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