CN115061237B - Reconfigurable power branching device based on phase change material and power branching ratio adjusting method - Google Patents
Reconfigurable power branching device based on phase change material and power branching ratio adjusting method Download PDFInfo
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12154—Power divider
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Abstract
The utility model discloses a phase change material-based reconfigurable power splitter and a power branch ratio adjusting method, belonging to the field of photonic devices, wherein the reconfigurable power splitter comprises: a substrate; a Y-branch waveguide on the substrate, the two arms of which are used as output waveguides of the reconfigurable power splitter; and phase change material sequences deposited on the upper surfaces of the two arms of the Y-branch waveguide; the period of each phase change material unit in the phase change material sequence meets the condition of sub-wavelength, and the state of each phase change material unit is independently adjustable; the states of the phase change material cell include crystalline and amorphous states. The adjusting method comprises the following steps: and adjusting states of phase change material units in the phase change material sequences on the upper surfaces of the two arms of the Y-branch waveguide to adjust equivalent refractive indexes of the two arms of the Y-branch waveguide until light output by the two arms of the Y-branch waveguide reaches a preset power branch ratio. The utility model can improve the bandwidth characteristic of the power branch ratio under the condition of ensuring that the power branch ratio of the power branch is flexible and adjustable.
Description
Technical Field
The utility model belongs to the field of photonic devices, and particularly relates to a phase change material-based reconfigurable power branching device and a power branching ratio adjusting method.
Background
In the last decades, integration technologies based on electrical interconnects have evolved at a high rate, but as the feature sizes of integration technologies gradually approach their physical limits, the world has entered the so-called "post-molar era". In order to cope with the high-speed increasing information transmission and processing demands, the on-chip optical interconnection technology becomes a powerful competitive scheme for further breaking through the bottleneck due to the characteristics of high speed, low loss, interference resistance and the like.
On-chip optical interconnects consist of a series of functionally distinct photonic device connections, with optical power splitters being one of the most basic and common photonic devices. Currently, various power splitters with different power splitting ratios have been reported, but most of the power splitters are static devices, that is, a single power splitter can only realize a specific power splitting ratio, so that the functional flexibility of an optical network is limited.
In the patent of the utility model with the publication number of CN 201903668U and the name of novel adjustable integrated optical power divider, a novel adjustable integrated optical power divider is disclosed, which comprises a Y-branch waveguide and a coupling region, wherein grooves parallel to the arms are arranged on two arms of the Y-branch as additional waveguides, the equivalent refractive index of the coupling region can be changed by injecting materials with different refractive indexes into the additional waveguides, and the power branching ratio output by the Y-branch waveguide can be changed by selecting the distance between the additional waveguides and the branch coupling region and the refractive index parameter. However, in this solution, once the power divider is manufactured, the distance between the additional waveguide and the branch coupling section is not adjustable, and the material filled in the additional waveguide is not replaced, so that the power divider with a specific structure can only realize one power branch ratio, and the power branch ratio is still not adjustable without changing the structure of the power divider.
The reported reconfigurable power splitters are mostly waveguide devices based on thermo-optical effect or electro-optical effect regulation and control, such as MMI and MZI, wherein the MZI scheme is the most representative, and the continuous adjustment of the power ratio can be realized by changing the phase shift amount on a phase shift arm through thermal regulation, but the bandwidth of the methods is difficult to reach more than 100nm and the bandwidth performance is poor because the coupler and the phase shift arm in the MZI have wavelength correlation. In addition, the schemes based on electric modulation and heat modulation all require continuous energy injection, and have higher power consumption.
Disclosure of Invention
Aiming at the defects and improvement demands of the prior art, the utility model provides a phase change material-based reconfigurable power branching device and a power branching ratio adjusting method, which aim to improve the bandwidth characteristic of the power branching ratio under the condition that the power branching ratio of the power branching device is flexibly adjustable.
The power splitter with the power splitting ratio flexibly adjustable is provided under the condition of unchanged structure, so that the flexibility and the integration level of the on-chip optical network are improved.
To achieve the above object, according to one aspect of the present utility model, there is provided a phase change material-based reconfigurable power splitter comprising:
a substrate;
a Y-branch waveguide deposited on the substrate, the two arms of which serve as output waveguides of the reconfigurable power splitter;
and phase change material sequences deposited on the upper surfaces of the two arms of the Y-branch waveguide; the period of each phase change material unit in the phase change material sequence meets the condition of sub-wavelength, and the state of each phase change material unit is independently adjustable; the states of the phase change material cell include crystalline and amorphous states.
Further, the reconfigurable power splitter provided by the utility model further comprises: and an upper cladding layer covering the Y-branch waveguide and the phase change material sequence.
Further, the states of the phase change material cell also include intermediate states between crystalline and amorphous states.
Further, the phase change material is a chalcogenide phase change material; preferably Sb 2 Se 3 Or GSST.
According to another aspect of the present utility model, there is provided a power branch ratio adjusting method of the above phase change material-based reconfigurable power branch, comprising:
and adjusting states of phase change material units in the phase change material sequences on the upper surfaces of the two arms of the Y-branch waveguide to adjust equivalent refractive indexes of the two arms of the Y-branch waveguide until light output by the two arms of the Y-branch waveguide reaches a preset power branch ratio.
Further, the state of the phase change material cell is modulated by joule heat generated by far field focused laser pulses or electrical pulses.
Further, when the state of the phase change material unit is adjusted by far field focusing laser pulse, the mode of adjusting the state of the phase change material unit includes:
each of the armsnDividing the phase change cells into a cell group;nis a positive integer;
focusing the first laser pulse on the unit group to enable the phase change material in the unit group to be switched from an amorphous state to a crystalline state;
focusing the second laser pulse on the unit group to enable the phase change material in the unit group to be switched from a crystalline state to an amorphous state;
of the two laser pulses, the first laser pulse has lower power and larger pulse width;
when the state of the phase change material unit is regulated by joule heat generated by the electric pulse, the mode of regulating the state of the phase change material unit includes:
using the first electric pulse to inject the electrode above the unit group to make the phase change material in the unit group switch from amorphous state to crystalline state;
using the second electric pulse to inject the electrode above the unit group to switch the phase change material from the crystalline state to the amorphous state;
of the two electric pulses, the first electric pulse has a lower voltage and a larger pulse width.
Further, when the state of the phase change material unit is adjusted by the far field focused laser pulse, the mode of adjusting the state of the phase change material unit further includes:
focusing the third laser pulse on the unit group to enable the phase change material in the unit group to be switched from an amorphous state to an intermediate state; the power of the third laser pulse is the same as that of the laser pulse, and the pulse width is between the first laser pulse and the second laser pulse;
when the state of the phase change material unit is regulated by joule heat generated by the electric pulse, the mode of regulating the state of the phase change material unit further comprises:
using a third electric pulse to inject an electrode above the unit group to enable the phase change material in the unit group to be switched from an amorphous state to an intermediate state; the third electrical pulse has the same pulse width as the second electrical pulse and a voltage between the first electrical pulse and the second electrical pulse.
Further, one arm with lower output power in the Y-branch waveguide is used as a driven arm and the other arm is used as a driving arm according to the target power branch ratio; in the process of adjusting the states of the phase change material units in the phase change material sequences on the upper surfaces of the two arms of the Y-branch waveguide, the states of the phase change material units on the driven arm are kept unchanged.
Further, each phase change material unit on the passive arm is in an amorphous state.
In general, through the above technical solutions conceived by the present utility model, the following beneficial effects can be obtained:
(1) The power branching device provided by the utility model comprises a Y branch and a sub-wavelength phase change material sequence deposited in the center of the upper surfaces of two arms of the Y branch, wherein phase change material units can be switched between different states; because the phase change materials are different in refractive index under different states, the control of the equivalent refractive index of the two arms of the Y branch is realized by controlling the state combination of each unit in the phase change material sequence, and further, different power branch ratios can be realized under the condition that the power branching device structure is unchanged by influencing the mode evolution process, so that the flexibility and the integration level of the on-chip optical network can be improved. Because the Y-branch waveguide realizes the power branch based on the mode evolution, the wavelength correlation of the mode evolution is lower, and therefore, the power branching device provided by the utility model has good bandwidth performance; experiments show that the power branching ratio of the power branching device provided by the utility model is not obvious in the range of 200nm, and the existing reconfigurable optical power branching device represented by the MZI structure is obviously excellent.
(2) The utility model realizes the adjustment of the power branch ratio by regulating and controlling the state of the phase change material unit, and the power branch device can maintain the current power branch ratio without continuous energy injection after the state setting of the unit is completed because the phase change material is nonvolatile, so the power consumption can be effectively reduced.
(3) According to the reconfigurable power branching device provided by the utility model, the sub-wavelength phase change material sequences are prepared on the Y branches, different power branching ratios can be realized by using the same structure, the structure is simple, and the length of the whole device is far smaller than that of other power branching devices based on the Y branches because the refractive index of the phase change material in different states is changed greatly.
Drawings
FIG. 1 is a top view of a phase change material based reconfigurable power splitter provided in an embodiment of the utility model;
FIG. 2 is a front view of a phase change material based reconfigurable power splitter provided in an embodiment of the utility model;
FIG. 3 is a graph showing transmission spectrum simulation results at several different power branch ratios provided by an embodiment of the present utility model;
the same reference numbers are used throughout the drawings to reference like elements or structures, wherein:
1-a substrate;
a 2-Y branched waveguide; 21-input waveguide, 22-branching region, 23-output waveguide;
3-a sequence of phase change materials;
4-upper cladding.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model. In addition, the technical features of the embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
In the present utility model, the terms "first," "second," and the like in the description and in the drawings, if any, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order.
In order to solve the problems of limited power branching ratio, lower bandwidth and high power consumption caused by the requirement of continuous energy injection to maintain a working state of the existing optical power branching device, the utility model provides a phase-change material-based reconfigurable power branching device and a power branching ratio adjusting method, and the overall thought of the phase-change material-based reconfigurable power branching device is as follows: the method comprises the steps of depositing sub-wavelength phase change material sequences on two arms of a Y branch, and controlling equivalent refractive indexes of the two arms of the Y branch by changing state combinations of the phase change material sequences by utilizing refractive index differences among different states of the phase change material, so that multiple reconfigurable power branch ratios are realized under the condition of unchanged structure.
The reconfigurable optical power splitter based On the phase change material provided by the utility model can be applied to On-chip optical network construction On various material platforms such as SOI (Silicon-On-Insulator), PLC (Planar Lightwave Circuit) and the like, and the SOI platform is taken as an example in the following embodiments for convenience of description.
The following are examples.
Example 1:
a phase change material based reconfigurable power splitter, as shown in fig. 1 and 2, comprising: the phase change material comprises a substrate 1, a Y-branch waveguide 2 deposited on the substrate 1, a phase change material sequence 3 deposited on the upper surfaces of two arms of the Y-branch waveguide 2, and an upper cladding layer 4 covering the Y-branch waveguide 2 and the phase change material sequence 3.
Alternatively, in the present embodiment, the substrate 1 material is silicon dioxide (SiO 2 ）。
Referring to fig. 1, the y-branch waveguide 2 includes one input waveguide 21, a branch region 22 in which the waveguide pitch is gradually enlarged, and two output waveguides 23; optionally, in this embodiment, the waveguide layer material is silicon (Si), with a thickness of 220nm; the input waveguide 21 is 1.2um wide and the waveguide pitch of the branching region 22 increases uniformly from 0 to 200nm, then connects to the 500nm wide output waveguide 23 through two arcuate waveguides. It should be noted that the description herein of the materials and structural parameters of the Y-branch waveguide 2 is only an alternative embodiment and should not be construed as a unique limitation of the present utility model.
In order to avoid reflection and large scattering loss, in this embodiment, the period of each phase change material unit in the phase change material sequence is less than half of the wavelength of light in the waveguide material, i.e. the period Λ of the phase change material unit satisfies Λ<λ/2n eff Wherein, the method comprises the steps of, wherein,λthe wavelength is indicated as such,n eff indicating the effective refractive index. Alternatively, in this embodiment, the period of the phase change material unit is set to 200nm, and the duty cycle is set to 50%.
In this embodiment, the states of the phase change material units are independently adjustable; the states of the phase change material cell include crystalline and amorphous states, and intermediate states between the crystalline and amorphous states. Because the refractive indexes of the phase change materials in different states are different, the control of the equivalent refractive index difference of the two arms of the Y-branch waveguide can be realized under the condition of unchanged structure by controlling the state combination of each phase change material unit in the phase change material sequence, so that the mode evolution process of the Y-branch waveguide can be influenced, the distribution of optical power between the two arms is changed, and finally, different power branch ratios are realized. Because the Y-branch waveguide realizes power branching based on the principle of mode evolution, and the wavelength correlation is better, the power branching device provided by the embodiment has good bandwidth performance, referring to fig. 3, wherein "up" and "down" respectively correspond to the upper arm and the lower arm of the Y-branch waveguide; according to the result shown in fig. 3, in the reconfigurable power splitter provided in this embodiment, when the states of the phase change material sequences are different in the two arms of the Y-branch waveguide, the transmittance is higher in the range of 1450-1650 nm, and therefore, the power branching ratio of the reconfigurable power splitter provided in this embodiment is not obviously changed in the range of 200nm, and the reconfigurable power splitter has good bandwidth characteristics.
Optionally, in this embodiment, the phase change material is Sb2Se3 (antimony selenide), and is deposited on the silicon waveguide by thermal evaporation, with a thickness of 40nm; it should be noted that the descriptions herein of the materials and structural parameters of the phase change material unit are merely alternative embodiments and should not be construed as the only limitation of the present utility model; other phase change materials with at least two states of crystalline state and non-static state and different refractive indexes, such as GST, GSST and other chalcogenide phase change materials, can be used for realizing the same function, and the corresponding deposition process can be selected according to actual needs.
In this embodiment, the upper cladding layer functions to prevent the phase change material from being oxidized or to cause component evaporation during phase change; optionally, in this embodiment, the upper cladding material is specifically SiO 2 (silicon dioxide) deposited on the top layer by PECVD with a thickness of 2um, it should be noted that the upper cladding layer consists of pure SiO 2 The composition is thus an alternative embodiment and should not be construed as the only limitation of the present utility model.
The reconfigurable power splitter based on phase change materials provided in this embodiment may set the states of each phase change material unit in the phase change material sequence by focusing light pulses or by electrical heating.
The mode of focusing the light pulse, the corresponding principle is: the transformation (crystallization) of a phase change material from an amorphous state to a crystalline state is by heating the material above a crystallization temperature and for a period of time, while the transformation (amorphization) from a crystalline state to an amorphous state is by heating the material above a melting temperature and rapidly cooling; since the melting temperature is higher than the crystallization temperature, crystallization is achieved by low power large pulse width optical pulses and amorphization is achieved by high power narrow pulse width optical pulses.
The electric heating mode is used, and the basic principle is as follows: the electrode generates Joule heat under the applied voltage, and the phase change material reaches the temperature required by phase change by controlling the voltage and pulse width of the applied electric pulse. It is readily understood that the application of an electrical pulse is facilitated by depositing a transparent electrode, which may be ITO (indium tin oxide), IWO (tungsten doped indium oxide) or the like, followed by deposition of the upper cladding layer after the deposition of the phase change material sequence.
In general, the embodiment utilizes the combination of the characteristics of large refractive index variation and non-volatility of the phase change material in different states and good wide spectrum characteristics of the Y branch to construct the reconfigurable power divider, realizes wide spectrum optical branch ratio tuning on a single device, and simultaneously solves the problem of high power consumption caused by the fact that the conventional electric-tuning-based heat-tuning structure needs continuous power injection to keep the working state. The reconfigurable optical power splitter provided by the embodiment can improve the flexibility, the integration level and the power consumption of an on-chip optical interconnection network, and has a wide application prospect.
Example 2:
the power branch ratio adjusting method of the present embodiment is based on the phase change material-based reconfigurable power splitter provided in the above embodiment 1.
The power branch ratio adjusting method provided by the embodiment comprises the following steps: the states of phase change material units in the phase change material sequences 3 on the upper surfaces of the two arms of the Y-branch waveguide 2 are adjusted to adjust the equivalent refractive indexes of the two arms of the Y-branch waveguide 2 until the light output by the two arms of the Y-branch waveguide 2 reaches a preset power branch ratio;
considering that in the reconfigurable power splitter based on the phase change material, the period of the phase change material unit is of the order of sub-wavelength, the unit size is smaller, and if the phase change material unit is used for adjustment, the requirements on the focal spot diameter of the laser pulse are higher in order not to influence the states of other surrounding phase change material units; in order to reduce the requirement on laser pulse, in the embodiment, the plurality of phase change material units on each arm are divided into a unit group, and the unit group is taken as an adjusting unit to uniformly adjust the phase change material units in each unit group; the number of the units in the unit groups can be correspondingly determined according to the focal spot diameter of the selected laser pulse, so that the states of the phase change material units in adjacent unit groups can not be influenced when the states of the phase change material units in one unit group are regulated. It is easy to understand that in case the laser pulses meet the respective requirements, the individual cells can also be adjusted directly as adjustment objects, which corresponds to dividing the individual cells into a group of cells.
Optionally, in this embodiment, the state of the phase change material unit is adjusted by far field focusing laser pulse, and the specific adjustment manner includes:
focusing the first laser pulse on the unit group to enable the phase change material in the unit group to be switched from an amorphous state to a crystalline state;
focusing the second laser pulse on the unit group to enable the phase change material in the unit group to be switched from a crystalline state to an amorphous state;
focusing the third laser pulse on the unit group to enable the phase change material in the unit group to be switched from an amorphous state to an intermediate state;
of the two laser pulses, the first laser pulse has lower power and larger pulse width; the power of the third laser pulse is the same as that of the laser pulse, and the pulse width is between the first laser pulse and the second laser pulse;
through the above steps, the state of the phase change material unit can be set to a crystalline state, an amorphous state, or an intermediate state.
In order to further simplify the adjustment process of the power branching ratio, in this embodiment, two arms of the Y-branch waveguide are divided into a driving arm and a driven arm, specifically, one arm with lower output power in the Y-branch waveguide is used as the driven arm and the other arm is used as the driving arm according to the target power branching ratio, so as to ensure a larger adjustment range of the power branching ratio; after the state of each phase change material unit on the driven arm is preset, the state of each phase change material unit on the driven arm is maintained unchanged in the adjusting process; considering that the phase change material itself has an absorption effect on light, the optical loss in the amorphous state is smaller, so in this embodiment, the state of each phase change material unit remains amorphous during the adjustment of the power branch ratio.
Different power branch ratios are realized by controlling the state combination of the phase change material units on the driving arm. According to the simulation result, the embodiment can realize a plurality of different power branch ratios from 1:1 to 1:0. The partial simulation results are as follows: when the phase change material unit on the driving arm is in a crystalline state, 97.5% of power is output from the driving arm, and 1% of power is output from the driven arm; when the 1/3 unit on the driving arm is amorphous and the 2/3 unit is crystalline, 79.2% of power is output from the driving arm, and 9.4% of power is output from the driven arm; when the 2/3 unit on the driving arm is amorphous and the 1/3 unit is crystalline, 62.9% of power is output from the driving arm and 25.9% of power is output from the driven arm; when the drive arm upper unit is all, 49.7% of power is output from the drive arm, and 49.7% of power is output from the driven arm.
It should be noted that, in other embodiments, in order to achieve more power branching ratios, the phase change material states in both arms may be adjusted, and for each arm, reference may be made to the adjustment of the driving arm in this embodiment.
Example 3:
a power branch ratio adjustment method according to the present embodiment is similar to the above embodiment 2, except that the state of the phase change material unit is adjusted by joule heat generated by an electric pulse according to the present embodiment, specifically includes:
using the first electric pulse to inject the electrode above the unit group to make the phase change material in the unit group switch from amorphous state to crystalline state;
using the second electric pulse to inject the electrode above the unit group to switch the phase change material from the crystalline state to the amorphous state;
using a third electric pulse to inject an electrode above the unit group to enable the phase change material in the unit group to be switched from an amorphous state to an intermediate state;
of the two electric pulses, the first electric pulse has lower voltage and larger pulse width; the third electrical pulse has the same pulse width as the second electrical pulse and a voltage between the first electrical pulse and the second electrical pulse.
In this example, the implementation of the remaining steps may be described with reference to example 2 above, and will not be repeated here.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the utility model and is not intended to limit the utility model, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the utility model are intended to be included within the scope of the utility model.
Claims (8)
1. A phase change material based reconfigurable power splitter comprising:
a substrate;
a Y-branch waveguide deposited on the substrate, the two arms of which serve as output waveguides of the reconfigurable power splitter;
and phase change material sequences deposited on the upper surfaces of the two arms of the Y-branch waveguide; the period of each phase change material unit in the phase change material sequence is less than half of the wavelength of light in the waveguide material, and the state of each phase change material unit is independently adjustable; the states of the phase change material cell include crystalline and amorphous states;
adjusting the state of the phase change material unit by using joule heat generated by far-field focused laser pulses or electric pulses;
when the state of the phase change material unit is regulated by far-field focusing laser pulse, the mode of regulating the state of the phase change material unit comprises the following steps:
each of the armsnDividing the phase change cells into a cell group;nis a positive integer;
focusing the first laser pulse on the unit group to enable the phase change material in the unit group to be switched from an amorphous state to a crystalline state;
focusing the second laser pulse on the unit group to enable the phase change material in the unit group to be switched from a crystalline state to an amorphous state;
of the two laser pulses, the first laser pulse has lower power and larger pulse width;
when the state of the phase change material unit is regulated by joule heat generated by the electric pulse, the mode of regulating the state of the phase change material unit includes:
using the first electric pulse to inject the electrode above the unit group to make the phase change material in the unit group switch from amorphous state to crystalline state;
using the second electric pulse to inject the electrode above the unit group to switch the phase change material from the crystalline state to the amorphous state;
of the two electric pulses, the first electric pulse has a lower voltage and a larger pulse width.
2. The phase change material based reconfigurable power splitter of claim 1, further comprising: and an upper cladding layer covering the Y-branch waveguide and the phase change material sequence.
3. The phase change material-based reconfigurable power splitter of claim 2, wherein the state of the phase change material cell further comprises an intermediate state between crystalline and amorphous states.
4. A phase change material based reconfigurable power splitter as claimed in any one of claims 1 to 3 wherein said phase change material is a chalcogenide phase change material.
5. The method for adjusting the power branch ratio of a phase change material-based reconfigurable power branch as claimed in any one of claims 1 to 4, comprising:
and adjusting states of phase change material units in the phase change material sequences on the upper surfaces of the two arms of the Y-branch waveguide to adjust equivalent refractive indexes of the two arms of the Y-branch waveguide until light output by the two arms of the Y-branch waveguide reaches a preset power branch ratio.
6. The power branch ratio adjustment method as defined in claim 5, wherein when adjusting the state of the phase change material unit by far field focused laser pulses, the manner of adjusting the state of the phase change material unit further comprises:
focusing the third laser pulse on the unit group to enable the phase change material in the unit group to be switched from an amorphous state to an intermediate state; the power of the third laser pulse is the same as that of the laser pulse, and the pulse width is between the first laser pulse and the second laser pulse;
when the state of the phase change material unit is regulated by joule heat generated by the electric pulse, the mode of regulating the state of the phase change material unit further comprises:
using a third electric pulse to inject an electrode above the unit group to enable the phase change material in the unit group to be switched from an amorphous state to an intermediate state; the third electrical pulse has the same pulse width as the second electrical pulse and a voltage between the first electrical pulse and the second electrical pulse.
7. The power branching ratio adjusting method according to claim 5 or 6, wherein one arm of the Y-branch waveguide having a lower output power is used as a passive arm and the other arm is used as a driving arm in accordance with a target power branching ratio; and in the process of adjusting the states of the phase change material units in the phase change material sequences on the upper surfaces of the two arms of the Y-branch waveguide, the states of the phase change material units on the driven arm are kept unchanged.
8. The power branch ratio adjustment method as defined in claim 7, wherein each phase change material unit on the passive arm is in an amorphous state.
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