CN107942530A - Integrated light guide super-resolution micro imaging system - Google Patents
Integrated light guide super-resolution micro imaging system Download PDFInfo
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- CN107942530A CN107942530A CN201711194922.0A CN201711194922A CN107942530A CN 107942530 A CN107942530 A CN 107942530A CN 201711194922 A CN201711194922 A CN 201711194922A CN 107942530 A CN107942530 A CN 107942530A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/421—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical component consisting of a short length of fibre, e.g. fibre stub
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- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Microscoopes, Condenser (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The present invention discloses a kind of integrated light guide super-resolution micro imaging system, including：Integrated waveguide substrate, the viewing area of micro-nano sample is is placed in middle part, and stretch out some slab waveguides for setting and being used for that different angle illumination to be carried out to wiener sample along the viewing area, and each slab waveguide has the photoswitch of control thang-kng state；Coupling light source, positioned at the incidence end of each slab waveguide, there is provided be coupled into the evanescent field illumination light of each slab waveguide；General lighting source, for the micro-nano sample described in direct illumination；Object lens, the light for general lighting source to be sent focus to micro-nano sample, and collect the sample image-forming information under different evanscent field wave vector illuminations and general lighting；Graphics processing unit, for the spectrum information under different lighting conditions to be returned to the original spatial frequency spectrum corresponding position of micro-nano sample, reconstruct obtains the true picture of micro-nano sample.The present invention couples the combination of source or LED chip by integrated light guide and micro-nano fiber, it is possible to achieve to the multi-wavelength of micro-nano sample, multi-angle illumination.
Description
Technical field
The present invention relates to integrated waveguide optical field and super-resolution micro-imaging field, more particularly, to a kind of Integrated Light
Waveguide super-resolution micro imaging system.
Background technology
Currently, biomedical, the sample size of the demand for development observation in the field such as micro-nano technology is far beyond traditional light
The theory resolution power of micro imaging system is learned, in order to promote the development of related industry, it is necessary to seek that Abbe can be broken through
The method of diffraction limit.
Since the 1990s, researcher has started in-depth study for nano-resolution technology, and first
Breakthrough is realized on Imaging-PAM, it is proposed that a variety of super-resolution microscopic methods based on fluorescent marker.First kind optics
Microscopic method utilizes the photoswitch effect of fluorescence molecule, causes the same time to only have the only a few dilute using the activation light of extremely low light intensity
Thin fluorescence molecule is activated, and possesses fluorescent emission ability.Mainly include photoactivation positioning microscopy (PALM), optical reconstruction is shown
Microtechnology (STORM).Second class is to suppress the transmitting of fluorescence based on nonlinear effect, reduces the ruler of effective fluorescence point spread function
It is very little, so as to improve the resolution ratio of system.The Stimulated Light-emission microtechnic (STED) that Stefan Hell are proposed is based on this
Principle.In addition, further include optical variation imaging method (SOFI).While fluorescence microscopy develops rapidly, researcher also opens
Begin to study the super-resolution micro-imaging technique of non-fluorescent colour group.Such as Structured Illumination microscopy, micro-sphere contacts technology, wait from
Sub- excimer surface wave, super lens technology etc., and coherent anti-stokes raman scattering (CARS) and stimulated Raman scattering
(SRS) nonlinear technology such as.Meanwhile the super-resolution microtechnic based on shift frequency method is also developed rapidly.
But using the method for fluorescent marker, it is faced with sample narrow application range；Mark fluorescent molecule has biological sample
Phototoxicity etc..In the far field super-resolution micro-imaging of non-marked, Structured Illumination resolution capability deficiency under the conditions of non-marked；
There are non-resonant background noise problem for CARS technologies；It is weak, it is necessary to the disadvantage combined with cofocus scanning technology that SRS technologies then face information
End.The existing super-resolution imaging method based on shift frequency is then all not easy to integrate, and operating process is complicated.One kind really is able to practicality
The product of change necessarily has high integration degree and the convenience used concurrently.But existing super-resolution be required for it is huger
Equipment and system, it is complicated.For this reason, we have proposed a kind of integrated light guide super-resolution micro imaging system design side
Case, this method realize the Highgrade integration of whole system by the way that integrated chip is effectively combined with technologies such as Meta Materials,
Imaging system size can be decreased to centimetres.Meanwhile the super-resolution system only needs sample being placed on workspace, by simple
Focusing and position adjustment operation can realize to the observation of the super-resolution of micro-nano sample, substantially increase the convenience used.
The content of the invention
It is an object of the invention to provide a kind of integrated light guide super-resolution micro imaging system, by modulating extraneous micro-nano
Optical fiber source or side surface coupling LED chip are coupled, different angle illumination wave vector is provided using strip optical waveguide.By selecting not
With the slab waveguide structure of topographic design, match with corresponding sample cell, can meet differing complexity micro-nano sample
Observation；By varying the input optical wavelength in coupling optical fiber or LED chip combination is provided, realizes that multi-wavelength illuminates, it is final real
Now the spectrum information of micro-nano sample is more completely reconstructed.
The concrete technical scheme of the present invention is as follows：
A kind of integrated light guide super-resolution micro imaging system design, including：
Integrated waveguide substrate, middle part stretch out setting to place the viewing area of micro-nano sample along the viewing area
For carrying out some slab waveguides of different angle illumination to wiener sample, and each slab waveguide has the light of control thang-kng state
Switch；
Extraneous coupling light source, positioned at the incidence end of each slab waveguide, there is provided be coupled into the illumination light of each slab waveguide；
General lighting source, for the micro-nano sample described in direct illumination；
Object lens, the light for general lighting source to be sent focus to micro-nano sample, and collect different wave vectors illumination and common
Sample image-forming information under light source lighting condition；
Guan Jing, for the sample image-forming information from object lens to be imaged onto image-display units.
Graphics processing unit, for the spectrum information under different lighting conditions to be returned to the original spatial frequency spectrum of micro-nano sample
Corresponding position, reconstruct obtain the true picture of micro-nano sample.
As preference, the viewing area is polygon, slab waveguide quantity is equal with polygon edge number, each bar shaped
The exit end of waveguide is respectively on the polygon difference side；Wherein, the extraneous coupling light source is optical fiber source or LED
Chip light source.
In the present invention, the bar shaped integrated optical waveguide structure of specific morphology is prepared by lithographic technique, all slab waveguides
Exit end will be located on a regular polygon difference side respectively.When slab waveguide substrate is placed in system architecture device,
The tip position of micro-nano fiber light source is adjusted by the gearshift on system architecture device, makes the exit end and bar of micro-nano fiber
The incidence end of shape waveguide can realize efficient coupling；Or LED chip is fitted into the corresponding incident end position of micro-nano waveguide, at the same time
The exciting electrode lead point of chip is got well and drawn.When the light of different wave length is coupled into different slab waveguides by timesharing,
The light of transmission will go out evanscent field in regular polygon internal excitation respectively in slab waveguide, these evanscent fields will be respectively the same as micro-nano sample
Generation interacts and is scattered to far field.By adjusting the specific location of imaging receiver unit, by integrated waveguide substrate
Micro-nano sample blur-free imaging is on the image devices such as imaging display unit, such as CCD, CMOS.Using image processing program by difference
Spectrum information under lighting condition returns to the original spatial frequency spectrum corresponding position of micro-nano sample, and reconstruct obtains the true of micro-nano sample
Real image.
The material of micro-nano waveguide substrate can select Si-SiO in the present invention2-Si3N4/InGaAsP/InP/TiO2/Al2O3
Deng, also can be selected polymeric material.The selection of specific material need to match with substrate material.The lithographic technique of micro-nano waveguide substrate
The technologies such as dry etching, wet etching or ion beam etching can be selected.In the present invention, the specific ruler of bar shaped integrated light guide
It is very little to need to determine optimal value by emulation and later experiments.Need exist for considering optical wavelength used, surrounding dielectric material, it is contemplated that
Polygonal shape that slab waveguide exit end is formed etc..Such as, it is contemplated that polygonal side length it is more, while target sample region
When area does not increase, the characteristic size of slab waveguide just needs to reduce.
Evanscent field coupling light source in the present invention can introduce slab waveguide in the following ways：Micro-nano fiber couples, LED
Chip couples and on piece integrated optical source.In micro-nano fiber coupled modes, can manually or micro-nano operating platform side
Formula draws cone to prepare micro-nano fiber.Micro-nano fiber can be coupled into slab waveguide by the way of end coupling, can also prepare bar
During shape waveguide, micro-nano fiber is directly placed on effective coupling that light is carried out in coupling aperture by the coupling aperture of reserved part, the later stage
Close transmission.In addition, the evanscent field coupled modes of side can also be used in micro-nano fiber, coupling source is provided for slab waveguide.Using light
The mode of fibre coupling, in that context it may be convenient to which the light for providing various available optical bands is illuminated micro-nano sample, and need not change
Become the remaining part of whole system.Using LED chip coupled modes, patch mode can be used, different chips are fitted in bar
Shape waveguide surface or end face.Afterwards, the electrode of chip is drawn by equipment such as electric welding machines.If using on piece integrated optical source,
Directly on piece light source can be desirably integrated on slab waveguide, the offer to slab waveguide evanscent field source is provided.
In fiber coupling mode, control can be passed through afterwards by being respectively that each slab waveguide configures an integrated light source
The Push And Release of each light source is made to realize the thang-kng situation of each slab waveguide.Also can by by a laser light source respectively with not
The mode of coupling optical fiber connection is corresponded to slab waveguide, realizes the control to each slab waveguide thang-kng situation.In addition, it can also be used
Fiber optic splitter, and related optical switch module is combined, realize the control to the thang-kng situation of different slab waveguides.According to
LED chip, then can directly pass through the bright thang-kng situation for secretly controlling different slab waveguides of digital control each LED chip.If
Using on piece integrated optical source, then the control to each light source luminescent state can be realized by photic or electroluminescent mode.
Ordinary light source in the present invention can select LED white light illumination sources or single wavelength LED illumination source and halogen lamp etc.
Other light sources.
Thing mirror and tube mirror in the present invention can use the ultra-thin lens group of Meta Materials or Random Curved Surface Designing processing preparation.
Lens group needs to correct the optical parameter such as astigmatism, distortion；Meanwhile object lens need to possess larger numerical aperture NA.
Imaging display unit in the present invention, can use charge coupled cell (CCD), complementary metal oxide semiconductor
(CMOS), photomultiplier (PMT) or special record by imaging reality unit.Imaging display unit is required to have enough
Imaging resolution, using the teaching of the invention it is possible to provide the image of sufficiently high pixel.According to specific application scenarios, colored or black and white can be used to show
Show device.
Used in addition, all parts unit foregoing in the present invention finally all would be integrated into the framework of system.Whole system
The framework of system will meet condition：1. it can realize the fixation to integrated waveguide substrate chip；2. can be to ultra-thin lens group
Fixed and three-dimensional space movement is provided；3. being capable of providing fixed CCD, the fixation of CMOS, PMT or special display unit connects
Mouthful；4. providing the interface of fixed micro-nano fiber coupled end, and it can realize the finely regulating to each coupled end locus；
5, using the teaching of the invention it is possible to provide the fixation to general lighting source.
The present invention provides a kind of integrated, super-resolution micro imaging system of miniaturization, by integrated light guide with it is micro-
Nano fiber couples the combination of source or LED chip, it is possible to achieve to the multi-wavelength of micro-nano sample, multi-angle illumination；And then can be real
Now to the wider reconstruct of micro-nano sample spectrum space, the shape characteristic of acquisition micro-nano sample.
Brief description of the drawings
Fig. 1 is integrated light guide super-resolution micro imaging system scheme according to the present invention.Wherein, 11 be support and folder
Device is held, 12 be slot, and 13 be integrated waveguide substrate, and 14 be the viewing area on integrated waveguide substrate, and 15 be extraneous coupling light
The mounting hole in source, 16 be three-D displacement fine adjusting device, and 17 be photoswitch in integrated slab waveguide, and 18 be object lens, and 19 be outer
Boundary obtains the general lighting source of fundamental frequency information, and 20 be semi-transparent semi-reflecting lens, and 21 be Guan Jing, and 22 plug cylinder for circular optical component, and 23
It is three-D displacement fine adjusting device for display device, 24,25 be image processing unit.
Fig. 2 is integrated light guide super-resolution micro imaging system scheme according to the present invention.Wherein, 31 be support and folder
Device is held, 32 be slot, and 33 be integrated waveguide substrate, and 34 be the viewing area on integrated waveguide substrate, and 35 be extraneous coupling light
The mounting hole in source, 36 be three-D displacement fine adjusting device, and 37 be photoswitch in integrated slab waveguide, and 38 be object lens, and 39 be outer
Boundary obtains the general lighting source of fundamental frequency information, and 40 be semi-transparent semi-reflecting lens, and 41 be Guan Jing, and 42 plug cylinder for square optical component, and 43
It is three-D displacement fine adjusting device for display device, 44,45 be image processing unit.
Fig. 3 is integrated light guide super-resolution micro imaging system scheme according to the present invention.Wherein, 51 be support frame
Frame, 52 be slot, and 53 be integrated waveguide substrate, and 54 slab waveguide photoswitches, 55 be the viewing area on micro-nano sample, and 56 be outer
The mounting hole of boundary's coupling light source, 57 be three-D displacement fine adjusting device, and 58 be white light source entrance port, and 59 be fixed lens barrel,
60 be object lens, and 61 be semi-transparent semi-reflecting lens, and 62 be Guan Jing, and 63 be image display and tape deck (CCD, CMOS etc.), and 64 be lens barrel
Three-D displacement fine adjusting device, 65 be graphics processing unit.
Fig. 4 is the alternative side for providing evanescent field illumination source in the present invention using micro-nano fiber light source couples strip optical waveguide
Case.Wherein, 71 be integrated waveguide substrate, and 72 couple optical fiber source fixing device for micro-nano, and 73 micro-nano fibers coupling source, 74 be collection
The slab waveguide etched on into optical waveguide substrates, 75 be photoswitch in optic fibre light path, and 76 be three-D displacement fine adjusting device, and 77 are
Viewing area on integrated waveguide substrate.
Fig. 5 is to provide evanescent field illumination source schematic diagram using LED chip light source coupling strip optical waveguide in the present invention.Its
In, 81 be the integrated light guide substrate after etching, and 82 be LED chip, and 83 be LED chip pin, and 84 is on integrated waveguide substrates
Slab waveguide, 85 be viewing area on integrated light guide substrate.
Embodiment
With reference to embodiment and attached drawing, the present invention will be described in detail, but the present invention is not limited to this.
Integrated light guide super-resolution micro imaging system as shown in Figure 1, including for placing integrated light guide substrate
Support and clamping device 11, for placing the slot 12 of integrated waveguide chip, for providing evanescent field illumination for micro-nano sample
Integrated light guide substrate 13, for placing the viewing area 14 of micro-nano sample, for fixed world micro-nano fiber coupling light source
Mounting hole 15, for adjusting the three-D displacement fine adjusting device 16 of micro-nano fiber coupling source outgoing end position, for control strip
The photoswitch 17 of shape waveguide thang-kng state, for collecting the object lens 18 of image-forming information, the common of fundamental frequency information is obtained for providing
Light source 19, semi-transparent semi-reflecting lens 20, for by the image formation from object lens 18 to the ultra-thin of image collection unit receiving plane
Microscope group 21, for fixing the lens barrel 22 of the optical modules such as ultra-thin lens group semi-transparent semi-reflecting lens, for believing from ultra-thin lens group
The display device 23 being imaged is ceased, for the three-D displacement fine adjusting device 24 that integrated waveguide substrate is adjusted, is used
In the image processing unit 25 to obtaining figure progress frequency spectrum processing from display device.
In this example, the material of integrated light guide can select Si-SiO2-Si3N4、InGaAsP、InP、TiO2、Al2O3
Deng.High refractive index material layer Si among these3N4、InGaAsP、InP、TiO2、Al2O3Etc. will use dry etching, wet etching or
The lithographic techniques such as person's ion beam etching are prepared into the slab waveguide of specific trait, as shown in Fig. 2, but being not limited to the shape shown in Fig. 2
Looks.The size of slab waveguide needs to be determined according to the emulation of actual conditions, such as the information such as optical wavelength, adjacent material refractive index.
As shown in Figure 1, micro-nano fiber by by the mounting hole 15 of micro-nano fiber and three-D displacement fine adjusting device with
Slab waveguide carries out efficient coupling, the thang-kng state of different slab waveguides is controlled using photoswitch 17, so as to fulfill to wiener sample
The different angle illumination of product.By varying optical fiber input light source, in that context it may be convenient to change evanescent field illumination source wavelength.
When micro-nano sample is illuminated in the evanscent field from different slab waveguides and general lighting source respectively, using in Fig. 1
Object lens 18 are collected the Far Field Scattering field from micro-nano sample, here in order to obtain the blur-free imaging of micro-nano sample,
Need to focus by the three-D displacement fine adjusting device 24 in Fig. 1, blur-free imaging is on display device 23 afterwards, and protects
Deposit.The requirement of ultra-thin lens group is corrected related optical aberration, astigmatism.Also, optical numerical aperture should be as big as possible, so as to
It can realize the larger range of acquisition to the spatial spectral information of micro-nano sample, while be also beneficial to later stage frequency spectrum splicing
The convergence of Program., will be right afterwards by the shift frequency imaging results under the conditions of the illumination of algorithm process difference wave vector and white-light illuminating
The spectrum information answered returns to micro-nano sample spectrum space correspondence position.Eventually through the iterative reconstruction of frequency spectrum, realize to micro-nano
The wide scope of sample frequency spectrum obtains, so as to reduce the shape characteristic of micro-nano sample.
It is illustrated in figure 2 the designing scheme 2 of integrated light guide super-resolution micro imaging system, compared with scheme 1, scheme
Optical module plug cylinder in 2 employs squared design.The squared design can be overall square tube, or pass through cage construction etc.
The square structure built.
As shown in figure 3, the designing scheme 3 of integrated light guide super-resolution micro imaging system, compares with scheme 1,2, should
All components in system are all integrated in inside a big support frame 51 by scheme, overall dimensions bigger, but can be more preferable
Protection associated component.
As shown in figure 4, substitute coupled modes, different slab waveguides for slab waveguide and a kind of of micro-nano fiber coupling light source
It is completely respective individual transmission on integrated waveguide chip, is fine-tuned by different coupling interfaces 72 and three-D displacement
Device 76 realizes the efficient coupling with slab waveguide.In addition, the thang-kng situation of different slab waveguides can pass through extraneous photoswitch
75 controls.
As shown in figure 5, the evanescent field illumination source of strip optical waveguide can also be provided by LED chip 82.At this moment.As long as by difference
The pin 83 of LED chip is connected to corresponding control circuit, can easily realize the luminance control of different LED chips.
Here LED chip can use the multi-disc laminating type of different wave length LED chip, there is provided the evanescent field illumination source of different wave length.
The foregoing is merely the preferable implementation example of the present invention, be not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on, should all be included in the protection scope of the present invention.
Claims (10)
- A kind of 1. integrated light guide super-resolution micro imaging system, it is characterised in that including：Integrated waveguide substrate, middle part are used for place the viewing area of micro-nano sample along the viewing area setting that stretches out Some slab waveguides of different angle illumination are carried out to wiener sample, and the light that each slab waveguide has control thang-kng state is opened Close；Extraneous coupling light source, positioned at the incidence end of each slab waveguide, there is provided be coupled into the illumination light of each slab waveguide；General lighting source, for the micro-nano sample described in direct illumination；Object lens, the light for light source to be sent focus to micro-nano sample, and collect under different wave vector illuminations and direct illumination Sample image-forming information；Graphics processing unit, corresponds to for the spectrum information under different lighting conditions to be returned to the original spatial frequency spectrum of micro-nano sample At position, reconstruct obtains the true picture of micro-nano sample.
- 2. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that the viewing area For polygon, slab waveguide quantity is equal with polygon edge number, and the exit end of each slab waveguide is different positioned at the polygon respectively Bian Shang.
- 3. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that every slab waveguide pair An extraneous coupling light source should be provided with, or same extraneous coupling light source connects each slab waveguide by corresponding coupling optical fiber.
- 4. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that the extraneous coupling Light source is optical fiber source or LED chip light source.
- 5. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that further include a support and Clamping device, inside sets the assembly cavity for accommodating the integrated waveguide substrate, and side is equipped with integrated waveguide substrate and loads inserting in cavity Groove.
- 6. integrated light guide super-resolution micro imaging system as claimed in claim 5, it is characterised in that the support and clamping The side of device is equipped with the mounting hole for being passed through the assembly cavity and the fixed coupling light source.
- 7. integrated light guide super-resolution micro imaging system as claimed in claim 6, it is characterised in that the mounting hole can To adjust the relative position of coupling source and slab waveguide by three-D displacement fine adjusting device, and then improve the coupling effect of light source Rate.
- 8. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that further include a support frame Frame, integrated waveguide substrate, light source and object lens are arranged in the support frame；The adjusting of relative position can be carried out to integrated waveguide substrate by three-D displacement fine adjusting device.
- 9. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that the integrated waveguide lining The material at bottom is Si-SiO2-Si3N4、InGaAsP、InP、TiO2Or Al2O3, the bar shaped ripple is prepared into using lithographic technique Lead.
- 10. integrated light guide super-resolution micro imaging system as claimed in claim 1, it is characterised in that the common photograph Bright source is white light illumination source or single wavelength LED illumination source.
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| CN109683082A (en) * | 2018-12-26 | 2019-04-26 | 上海先方半导体有限公司 | A kind of test macro and test method for optical chip |
| CN112213865A (en) * | 2020-09-04 | 2021-01-12 | 浙江大学 | High-speed evanescent field frequency shift super-resolution microscopic imaging system and imaging method |
| CN112763417A (en) * | 2020-12-10 | 2021-05-07 | 中国科学院深圳先进技术研究院 | Digital pathological section panoramic scanning system |
| CN114236801A (en) * | 2021-10-25 | 2022-03-25 | 北京京东方技术开发有限公司 | Light sheet generating device and microscope system with same |
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| CN112213865B (en) * | 2020-09-04 | 2022-01-04 | 浙江大学 | High-speed evanescent field frequency shift super-resolution microscopic imaging system and imaging method |
| CN112763417A (en) * | 2020-12-10 | 2021-05-07 | 中国科学院深圳先进技术研究院 | Digital pathological section panoramic scanning system |
| CN114236801A (en) * | 2021-10-25 | 2022-03-25 | 北京京东方技术开发有限公司 | Light sheet generating device and microscope system with same |
| CN114236801B (en) * | 2021-10-25 | 2024-01-05 | 北京京东方技术开发有限公司 | Light sheet generating device and microscope system with same |
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