CN109264978A - Micro-embossing device and method applied to precision glass microscopic optical structure - Google Patents
Micro-embossing device and method applied to precision glass microscopic optical structure Download PDFInfo
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- CN109264978A CN109264978A CN201710605018.8A CN201710605018A CN109264978A CN 109264978 A CN109264978 A CN 109264978A CN 201710605018 A CN201710605018 A CN 201710605018A CN 109264978 A CN109264978 A CN 109264978A
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- mold core
- minute
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- graphene layer
- glass material
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/26—Punching reheated glass
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- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
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Abstract
The invention proposes a kind of micro-embossing device and method applied to precision glass microscopic optical structure, minute-pressure printing apparatus includes the class grapheme material coating mould (3) for accommodating or supporting glass material, applies press power, the coining drive system (2) to form microscopic optical structure on glass material and the cooling system (4) for cooling down pressurizer (23) to the glass material when glass material is heated by the class graphene layer of mold core component for the mold core component by pressurizer (23) driving class grapheme material coating mould (3).Micro-embossing device and method of the invention are ingenious in design, practical.
Description
Technical field
The present invention relates to glass art more particularly to a kind of minute-pressure printing apparatus applied to precision glass microscopic optical structure
And method.
Background technique
In traditional glass forming technique, many manufacturers manufacture spherical lens using glass grinder.These spherical surfaces
Lens are widely used in some inexpensive products, but may not apply in microstructure product.For such as camera lens, height
Resolution ratio telescope, the big and high requests application field such as aspherical glass lens of high quality, and such as current plating modeling
Advanced optical articles field, the high molecular materials such as material optical material can be applied, but compared with optical glass material, in light
Learning has distinct disadvantage in performance.In this way, diffraction structure, the small light of about 0.92 μm of DVD fine definition optical reading camera lens
It learns element characteristic and micro-embossing machine is indispensable in the production of precision glass microscopic optical structure.
Further, in some high sophisticated technology countries, such as Japan and Germany use infrared heating skill with mature
The glass shaping equipment of art；Glass can be heated approximately to 1000 DEG C by these equipment, and form lens contour by molding.This
The defect of kind method is that a large amount of electric energy can be consumed, and needs to expend great effort in its cooling problem.
Summary of the invention
The present invention in view of the above technical problems, proposes a kind of micro-embossing applied to precision glass microscopic optical structure and sets
Standby and method.
The present invention proposes following technical scheme in view of the above technical problems:
The invention proposes a kind of minute-pressure printing apparatus, including for accommodating or supporting the class grapheme material packet of glass material
Mold is covered, for driving the mold core component of class grapheme material coating mould in glass material by mold core component by pressurizer
Apply press power to the glass material when class graphene layer heats, driven with the coining for forming microscopic optical structure on glass material
Dynamic system and the cooling system for cooling down pressurizer.
It further include for controlling coining drive system application press power and controlling class in the above-mentioned minute-pressure printing apparatus of the present invention
The control system of graphene layer heating.
In the above-mentioned minute-pressure printing apparatus of the present invention, coining drive system includes servo motor, for forcing in pressurizer
Vertical slide is driven with servo motor and vertical slide transmission connection, the power for being exported by servo motor respectively
The gearbox of dynamic vertical slide lifting and the pressure for acting on the amount of force of pressurizer for incuding vertical slide
Sensor.
In the above-mentioned minute-pressure printing apparatus of the present invention, class grapheme material coating mould includes that support is arranged above pressurizer
Lower die, the upper mold above lower die is set, is provided with lower mold core at the top of lower die, upper mold bottom is provided with upper mold core；Upper mold core
Surface be provided with minute-pressure and be patterned；Lower mold core and upper mold core constitute mold core component；Coining drive system is for driving lower mold core
It moves upwards, with the glass material for cooperating compacting support to be arranged in lower mold core with upper mold core.
In the above-mentioned minute-pressure printing apparatus of the present invention, upper die and lower die are made of carbide material, and upper mold core and lower mold core are equal
For three-decker, which is set and is formed by class graphene layer, silicon wafer and quartz stacking.
In the above-mentioned minute-pressure printing apparatus of the present invention, cooling system includes for guiding the continual contact pressurizer of water flow
To take away the metal cooling-pipe of its heat, and it connect with metal cooling-pipe so that water flow temperature is maintained at 15 DEG C -25 DEG C cold
But device.
The invention also provides a kind of minute-pressure impression methods using minute-pressure printing apparatus as described above, comprising the following steps:
Step S1, the class graphene layer of class grapheme material coating mould is heated to preheating temperature under absolute vacuum environment
Degree；
Step S2, press power is applied to glass material thereon using the mold core component of class grapheme material coating mould,
It is powered to the class graphene layer of mold core component simultaneously so that class graphene layer is heated to glass material, to be formed on glass material
Microscopic optical structure；
Step S3, class grapheme material coating mould is opened, the glass material for being formed with microscopic optical structure is taken out.
In the above-mentioned minute-pressure impression method of the present invention, preheating temperature is between 300 DEG C -400 DEG C.
In the above-mentioned minute-pressure impression method of the present invention, in step s 2, the temperature changing process of class graphene layer is successively divided into
Initial temperature-rise period, temperature rise sharply process and annealing stage；Wherein, class graphene layer is in initial temperature-rise period with 1 DEG C/s-
The heating rate of 2 DEG C/s is warming up to 550 DEG C -650 DEG C；Class graphene layer is during temperature rises sharply with 15 DEG C/s-20 DEG C/s's
Heating rate is warming up to 1400 DEG C -1500 DEG C；Class graphene layer natural cooling in annealing stage.
Micro-embossing device and method of the invention realize in production high quality glass microscopic optical structure product process
Forming temperature and balance cavity pressure are reduced, the processing of the glass optical components applied to many photovoltaics is significantly improved
Quality, and significantly reduce production cost.Compared with infrared heating technique, micro-embossing technology of the invention can spent more
Glass is melted under few electric power.Micro-embossing device and method of the invention are ingenious in design, practical.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 shows the schematic diagram of the minute-pressure printing apparatus of the embodiment of the present invention；
Fig. 2 shows the schematic diagrames of the control system of minute-pressure printing apparatus shown in FIG. 1；
Fig. 3 shows the structural schematic diagram of the class grapheme material coating mould of the embodiment of the present invention；
Fig. 4 shows the flow diagram of minute-pressure printing control method of the invention；
Fig. 5 shows the temperature control photo of minute-pressure printing control method shown in Fig. 4.
Specific embodiment
The invention proposes a kind of minute-pressure printing apparatus, can produce micron level using a small amount of electric energy
Microscopic optical structure component, be able to solve existing production technology, be packaged periodic process, mold cavity fusion process and mould at a slow speed
Press the critical issue in precision controlling.Minute-pressure printing apparatus of the invention is realized to be produced in production high quality glass microscopic optical structure
Forming temperature and balance cavity pressure are reduced during product, significantly improve the Glass optical group applied to many photovoltaics
The processing quality of part, and significantly reduce production cost.Compared with infrared heating technique, micro-embossing technology of the invention can
Glass is melted in the case where spending less electric power.
In order to keep technical purpose of the invention, technical solution and technical effect apparent, in order to art technology
Personnel understand and implement the present invention, and the present invention will be further described in detail below in conjunction with the accompanying drawings and the specific embodiments.
As shown in Figure 1, Fig. 1 shows the schematic diagram of the minute-pressure printing apparatus of the embodiment of the present invention.The minute-pressure printing apparatus includes
Control system 1, coining drive system 2, mechanical framework 5, class grapheme material coating mould 3 and cooling system 4.Class graphene material
For accommodating or supporting glass material, coining drive system 2 is used to drive class graphene material by pressurizer 23 material coating mould 3
Expect that the mold core component of coating mould 3 applies pressure to the glass material when glass material is heated by the class graphene layer of mold core component
Power processed, to form microscopic optical structure on glass material；Cooling system 4 is for cooling down pressurizer 23.
Wherein, control system 1 is the brain of minute-pressure printing apparatus, and the operation for controlling whole equipment (is included in micro-embossing
Operation in the process).Operation during micro-embossing includes to molding, mold temperature, pressure size, pressing time and cooling
The control of rate.The rate temperature change of different glass material can be accurately controlled and adjust.Control system 1 can adjust work
For the electric current and voltage of class grapheme material coating mould 3, specifically, be electric current is adjusted within the scope of 0A-30A, and
DC voltage is adjusted within the scope of 0V-100V.This scheme is the heating exclusively for class grapheme material and designs.As shown in Fig. 2,
Fig. 2 shows the schematic diagram of the control system 1 of minute-pressure printing apparatus shown in FIG. 1, control system 1 includes control cabinet 11, and setting exists
Display 12 on control cabinet, for showing the various parameters controlled by control system 1.
Coining drive system 2 is designed to generate the pressure for the mold core component for acting on class grapheme material coating mould 3
Power processed, at low temperature glass material to be suppressed to form microstructure, also realize maximum temperature be 1000 DEG C at optical microphotograph
The molding of structure.Imprinting drive system 2 includes servo motor 21, for forcing in the vertical slide 22 of pressurizer 23, respectively
With servo motor 21 and the transmission connection of vertical slide 22, the power drive vertical sliding motion for being exported by servo motor 21
Part 22 go up and down gearbox (not shown) and for incude vertical slide 22 act on pressurizer 23 active force it is big
Small pressure sensor 24.Coining drive system 2 can generate the active force of maximum 200kg during micro-embossing.
Class grapheme material coating mould 3 is important innovations point and the traditional infrared heating of minute-pressure printing apparatus of the invention
Technology is compared has more remarkable result in terms of reducing power consumption, this is because in the present invention, it is only necessary to consume for electric power
To the very small-scale class graphene layer on mold core component.Generally, many optical articles only need 25mm × 25mm's
Range.
As shown in figure 3, Fig. 3 shows the structural schematic diagram of the class grapheme material coating mould 3 of the embodiment of the present invention.It should
Class grapheme material coating mould 3 includes the lower die 31 that 23 top of pressurizer is arranged in support, and the upper of 31 top of lower die is arranged in
Mould 32 is provided with lower mold core 311 at the top of lower die 31, and 32 bottom of upper mold is provided with upper mold core 321；The surface of upper mold core 321 is arranged
There is minute-pressure to be patterned；Coining drive system 2 is for driving lower mold core 311 to move upwards, to cooperate compacting support with upper mold core 321
Glass material in lower mold core 311 is set.Upper mold 32 and lower die 31 are made of carbide material, upper mold core 321 and lower mold core
311 be three-decker, which is made of folded set of class graphene layer 33, silicon wafer 34 and quartz layer 35.Class graphene layer
It is made of folded set of several hundred a graphene layers and more Silicon Wafers.Class graphene layer is formed by chemical vapor deposition (CVD) method, energy
600 DEG C are enough heated to, is melted glass material with this, to complete the micro-embossing of the glass material.Such graphene layer is logical
It crosses conducting wire and current source is formed into a loop, fever is realized by being powered.Upper mold core 321 or lower mold core with class graphene layer
311 can make glass material have lower skin-friction force, better surface roughness, 20 times of better durabilities, higher
Young's modulus and higher conspicuous formula hardness.Silicon wafer is used as the platform of cladding class graphene layer；Quartz layer is used as insulating layer.
Cooling system 4 is for removing the heat as caused by class grapheme material coating mould 3.Cooling system 4 includes using
The metal cooling-pipe 41 of heat is taken away in the continual contact pressurizer 23 of guidance water flow, and is connected with metal cooling-pipe 41
It connects so that water flow temperature to be maintained to the cooler (not shown) of 19 DEG C or so (15 DEG C -25 DEG C).
Mechanical framework 5 is used to integrate control system 1, coining drive system 2 and cooling system 4, and it includes have
For installing or supporting class grapheme material coating mould 3, metal cooling-pipe 41, valve, pressure sensor 24, temperature sensor
With the installation part and supporting element of coining drive system 2.
Control system 1 includes main control module and class grapheme material control module.For this micro-embossing process, need
Control the temperature, the mold temperature of class grapheme material coating mould 3, the pressing time for imprinting drive system 2 of class graphene layer
With press power size, act on the electric current of class grapheme material coating mould 3 and the size of voltage.Fig. 4 and Fig. 5 show this hair
Bright minute-pressure printing control method comprising there are three steps, i.e. preheating step, micro-embossing step and step of removal.
Specifically, minute-pressure printing control method of the invention, comprising the following steps:
Step S1, the class graphene layer of class grapheme material coating mould 3 is heated to preheat under absolute vacuum environment
Temperature；
In this step, if heating process does not carry out under absolute vacuum environment, class graphene layer can be lost by burning.
Step S2, press power is applied to glass material thereon using the mold core component of class grapheme material coating mould 3,
It is powered to the class graphene layer of mold core component simultaneously so that class graphene layer is heated to glass material, to be formed on glass material
Microscopic optical structure；
As shown in figure 5, Fig. 5 show class grapheme material coating mould 3 in minute-pressure printing control method of the invention plus
Thermal process control parameter changes schematic diagram.In the present embodiment, preheating temperature is between 300 DEG C -400 DEG C.Meanwhile in step S2
In, the temperature changing process of class graphene layer is successively divided into initial temperature-rise period, temperature rises sharply process and annealing stage；Its
In, class graphene layer is warming up to 550 DEG C -650 DEG C in initial temperature-rise period with the heating rate of 1 DEG C/s-2 DEG C/s；Class graphite
Alkene layer is warming up to 1400 DEG C -1500 DEG C during temperature rises sharply with the heating rate of 15 DEG C/s-20 DEG C/s；Class graphene layer exists
Natural cooling in annealing stage.
Step S3, class grapheme material coating mould 3 is opened, glass material is taken out.
Micro-embossing device and method of the invention realize in production high quality glass microscopic optical structure product process
Forming temperature and balance cavity pressure are reduced, the processing of the glass optical components applied to many photovoltaics is significantly improved
Quality, and significantly reduce production cost.Compared with infrared heating technique, micro-embossing technology of the invention can spent more
Glass is melted under few electric power.Micro-embossing device and method of the invention are ingenious in design, practical.
It should be understood that for those of ordinary skills, it can be modified or changed according to the above description,
And all these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (9)
1. a kind of minute-pressure printing apparatus, which is characterized in that including for accommodating or supporting the class grapheme material of glass material to coat
Mold (3), for the mold core component by pressurizer (23) driving class grapheme material coating mould (3) in glass material by mould
Apply press power, to the glass material when class graphene layer heating of core assembly to form microscopic optical structure on glass material
Coining drive system (2) and cooling system (4) for cooling down pressurizer (23).
2. minute-pressure printing apparatus according to claim 1, which is characterized in that further include for controlling coining drive system (2)
Apply press power and controls the control system (1) of class graphene layer heating.
3. minute-pressure printing apparatus according to claim 1, which is characterized in that coining drive system (2) includes servo motor
(21), for forcing in the vertical slide (22) of pressurizer (23), respectively with servo motor (21) and vertical slide (22)
The gearbox and use that transmission connection, the power drive vertical slide (22) for being exported by servo motor (21) are gone up and down
The pressure sensor (24) of the amount of force of pressurizer (23) is acted in induction vertical slide (22).
4. minute-pressure printing apparatus according to claim 1, which is characterized in that class grapheme material coating mould (3) includes branch
The lower die (31) that support is arranged above pressurizer (23), the upper mold (32) being arranged above lower die (31), lower die (31) top are set
It is equipped with lower mold core (311), upper mold (32) bottom is provided with upper mold core (321)；The surface of upper mold core (321) is provided with minute-pressure impression
Case；Lower mold core (311) and upper mold core (321) constitute mold core component；Coining drive system (2) for drive lower mold core (311) to
Upper movement, with the glass material for cooperating compacting support to be arranged on lower mold core (311) with upper mold core (321).
5. minute-pressure printing apparatus according to claim 4, which is characterized in that upper mold (32) and lower die (31) are by carbide material
It is made, upper mold core (321) and lower mold core (311) are three-decker, and the three-decker is by class graphene layer (33), silicon wafer (34)
It is folded with quartz layer (35) and sets composition.
6. minute-pressure printing apparatus according to claim 1, which is characterized in that cooling system (4) includes for guiding water flow to hold
Continuous continuous contact pressurizer (23) to take away the metal cooling-pipe (41) of its heat, and connect with metal cooling-pipe (41) with
Water flow temperature is maintained to 15 DEG C -25 DEG C of cooler.
7. a kind of minute-pressure impression method using minute-pressure printing apparatus as described in claim 1, which is characterized in that including following step
It is rapid:
Step S1, the class graphene layer of class grapheme material coating mould (3) is heated to preheating temperature under absolute vacuum environment
Degree；
Step S2, press power is applied to glass material thereon using the mold core component of class grapheme material coating mould (3), together
When to mold core component class graphene layer be powered so that class graphene layer give glass material heat, to form light on glass material
Learn microstructure；
Step S3, class grapheme material coating mould (3) are opened, the glass material for being formed with microscopic optical structure is taken out.
8. minute-pressure impression method according to claim 7, which is characterized in that preheating temperature is between 300 DEG C -400 DEG C.
9. minute-pressure impression method according to claim 7, which is characterized in that in step s 2, the temperature of class graphene layer becomes
Change process is successively divided into initial temperature-rise period, temperature rises sharply process and annealing stage；Wherein, class graphene layer is initially heating up
550 DEG C -650 DEG C are warming up in the process with the heating rate of 1 DEG C/s-2 DEG C/s；Class graphene layer is during temperature rises sharply with 15
DEG C/heating rate of s-20 DEG C/s is warming up to 1400 DEG C -1500 DEG C；Class graphene layer natural cooling in annealing stage.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710605018.8A CN109264978B (en) | 2017-07-18 | 2017-07-18 | Micro-imprinting equipment and method applied to precise glass optical microstructure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710605018.8A CN109264978B (en) | 2017-07-18 | 2017-07-18 | Micro-imprinting equipment and method applied to precise glass optical microstructure |
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| Publication Number | Publication Date |
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| CN109264978A true CN109264978A (en) | 2019-01-25 |
| CN109264978B CN109264978B (en) | 2021-10-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114685033A (en) * | 2022-04-02 | 2022-07-01 | 深圳技术大学 | Method for moulding by obtaining a calibration curve of temperature |
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| JP2003095672A (en) * | 2001-09-25 | 2003-04-03 | Toshiba Mach Co Ltd | Method and apparatus for molding glass element |
| CN101633550A (en) * | 2008-07-23 | 2010-01-27 | 佳能株式会社 | Molding method for an optical element and optical element molding apparatus |
| CN104635422A (en) * | 2014-09-10 | 2015-05-20 | 苏州大学 | Nanoimprinting method and device of array micro structure |
| CN205616774U (en) * | 2015-12-31 | 2016-10-05 | 华南理工大学 | Micro -structure carbide die |
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| JP2003095672A (en) * | 2001-09-25 | 2003-04-03 | Toshiba Mach Co Ltd | Method and apparatus for molding glass element |
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| US20030056542A1 (en) * | 2001-09-27 | 2003-03-27 | Hiroshi Murakoshi | Apparatus and method for forming silica glass elements |
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| CN104635422A (en) * | 2014-09-10 | 2015-05-20 | 苏州大学 | Nanoimprinting method and device of array micro structure |
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| CN114685033A (en) * | 2022-04-02 | 2022-07-01 | 深圳技术大学 | Method for moulding by obtaining a calibration curve of temperature |
| CN114685033B (en) * | 2022-04-02 | 2023-11-03 | 深圳技术大学 | Method for molding by obtaining a calibration curve of temperature |
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| CN109264978B (en) | 2021-10-22 |
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