JP6667358B2 - Glass substrate generator - Google Patents

Description

  The present invention relates to a glass substrate generating apparatus, and more particularly, to a glass substrate generating apparatus that manufactures a glass substrate having a fine concavo-convex pattern formed on a surface by applying a voltage.

  Conventionally, forming a fine pattern on a glass substrate is performed, for example, in a photoresist process used in a semiconductor manufacturing process or the like, and requires an expensive mask, an exposure device, an etching device, and the like, resulting in high cost and low production. There was a problem with gender.

  In order to solve the above-mentioned problem, a thermal imprint method is used in which a mold on which a fine pattern is formed in advance and a glass substrate are heated to a temperature close to the glass softening point and pressed.

  However, in the thermal imprinting method, it is necessary to raise the temperature of the glass substrate to at least the glass transition point or higher (preferably, the glass softening point or higher in order to ensure appropriate viscosity and fluidity of the glass material). However, a strong pressing force was required to correspond to the viscosity of the glass.

  In order to solve these problems, there is a method in which a voltage of several hundred to several thousand kV is applied to a metal mold to perform press molding. By using this method, an alkali component (such as Na +) of the glass substrate moves inward by a voltage action, and molding at a lower temperature is possible. In addition, in the case where an etching step is performed after molding by the movement of an alkali component, selective etching can be performed, and a shape having a higher aspect can be molded.

JP-A-2000-072471 JP-A-2003-054961 JP 2007-269500 A JP 2008-266123 A

  However, in the conventional molding method in which a glass substrate is arranged between an upper mold and a lower mold and sandwiched between surfaces, when molding a small-area glass substrate, the pressing force is uniformly applied to the pressing surface. Although it is easy to apply, when the glass substrate has a large area, there is a portion where a pressure difference occurs partially, and it is difficult to uniformly apply a pressing force to a pressing surface.

  The present invention employs a roll transfer method instead of the surface pressing method. Then, a voltage applying means is applied to the roll transfer method.

The invention according to claim 1 is provided with a loading stage on which a glass substrate is placed and electrically grounded, and a fine uneven shape opposite to the fine uneven shape transferred to the glass substrate, A forming roll for forming a glass substrate with fine irregularities by being rotated while being pressed against the glass substrate mounted on the loading stage, and a support for supporting both ends of the forming roll with an insulator. A contact electrode that applies a voltage to the forming roll, and a voltage applying unit that applies a voltage between the stacking stage and the forming roll, comprising a contact electrode near the forming surface of the stacking stage and the forming roll. the reducing agent is a glass substrate generator provided with outlet blowing.

  The invention according to claim 2 is the glass substrate generating apparatus according to claim 1, wherein the forming roll is configured to be able to move up and down.

  The invention according to claim 3 is the glass substrate generating apparatus according to claim 1 or 2, wherein the loading stage moves horizontally.

According to a fourth aspect of the present invention, there is provided the glass substrate generating apparatus according to any one of the first to third aspects, wherein a heating unit is provided inside the forming roll .

According to a fifth aspect of the present invention, there is provided the glass substrate generating apparatus according to any one of the first to fourth aspects, wherein a heating unit is provided on the loading stage .

The invention according to claim 6 has a stage heater for heating the glass substrate placed on the loading stage by heating the loading stage to a predetermined temperature . A glass substrate generating apparatus according to any one of the preceding claims.

The invention according to claim 7 is the glass substrate generating apparatus according to any one of claims 1 to 6 , wherein the contact electrode is a slip ring electrode .

The invention according to claim 8, wherein the contact electrode is a leaf spring electrode in which a contact portion with the forming roll is formed in a leaf spring shape . It is a glass substrate generation device.

The invention according to claim 9 is the glass substrate according to any one of claims 1 to 6 , wherein the contact electrode is a brush electrode in which a contact portion with the forming roll is formed in a brush shape. It is a generating device.

  ADVANTAGE OF THE INVENTION According to this invention, a large-sized glass substrate can be press-formed efficiently by press-forming with the forming roll to which voltage was applied.

  By applying a voltage, it is possible to control the distribution of the alkali component such as Na + among the components of the glass substrate to a distribution corresponding to a fine pattern previously applied to the forming roll, so that no voltage is applied to the forming roll. It is possible to mold even at a lower molding temperature (below the glass transition point) than in the case of molding by the method described above, and it is possible to efficiently form a fine pattern on a glass substrate.

  In addition, since the distribution of the alkali component remains on the glass substrate even after the pressure molding, selective etching can be performed even in an etching process in a later process.

  By the above operation, it is possible to efficiently produce a functional glass substrate having a fine structure on a glass surface such as a non-reflection plate, a polarizing plate, and a sensor substrate for a touch panel.

It is a figure showing the schematic structure of glass substrate generating device 1 concerning an embodiment of the present invention. FIG. 3 is a perspective view illustrating a schematic configuration of a portion where a forming roll 3 is provided. It is a top view which shows schematic structure of a forming roll part. FIG. 4 is a view showing a section taken along line IV-IV in FIG. 3. FIG. 5 is a diagram illustrating an installation state of a calibration thermocouple 69, and is an enlarged view of a portion V in FIG. It is a figure which shows the modification of the installation state of the forming roll 3, and is a figure corresponding to FIG. FIG. 3 is a perspective view of a loading stage 5. FIG. 2 is a diagram illustrating a schematic configuration of a rod heater 17. FIG. 4 is a plan view of the loading stage 5. FIG. 4 is a side view of the loading stage 5. FIG. 3 is a view showing a forming roll 3 and a loading stage 5. FIG. 9 is a view showing a work stick 87 of the loading stage 5. 4 is a flowchart illustrating an operation of the glass substrate generation device 1. 4 is a flowchart illustrating an operation of the glass substrate generation device 1. It is a perspective view which shows the glass molded article obtained by the glass substrate production | generation apparatus 1. FIG. 4 is a diagram showing a configuration in which a load lock chamber (front chamber 89 and rear chamber 91) for loading and unloading a workpiece and gate valves 93 and 95 are provided in a molding chamber 29. It is explanatory drawing explaining the kind of contact electrode.

  FIG. 1A is a diagram illustrating a schematic configuration of a glass substrate generating apparatus (glass substrate forming apparatus) 1 according to an embodiment of the present invention.

  For convenience of description, one direction in the horizontal direction is defined as an X-axis direction, another direction in the horizontal direction that is orthogonal to the X-axis direction is defined as a Y-axis direction, and a vertical direction is defined as a Z-axis direction. And

  As shown in FIG. 1A, a glass substrate forming apparatus (roll forming apparatus) 1 softens a glass substrate W in a plate shape such as a flat plate by heating it to a predetermined temperature in advance. This is an apparatus for pressing and forming a fine uneven shape (an uneven pattern) on a substrate W (for example, one surface in the thickness direction of the glass substrate W; the upper surface of the glass substrate W in FIG. 1A). At this time, the voltage applying means (voltage applying unit) 21A applies a predetermined voltage to the glass substrate W.

  That is, the glass substrate forming apparatus 1 includes the control device 21. The control device 21 includes a control unit that performs input and output, and a voltage application unit 21A that applies a voltage. The voltage is applied to the glass substrate W by the control of the voltage applying unit 21A.

  This will be described in detail with reference to FIG. A loading stage 5 on which the glass substrate W is placed and electrically grounded, and fine irregularities opposite to the fine irregularities transferred to the glass substrate W are provided on the outer periphery of the cylindrical side surface. By rotating while being pressed against the glass substrate W mounted on the stage 5, the fine unevenness is transferred to the glass substrate W mounted on the loading stage 5, and the glass substrate with fine unevenness is transferred to the glass substrate W. A cylindrical or cylindrical forming roll 3 to be formed, a forming roll support 9 supporting both ends of the forming roll 3 with insulators, a contact electrode 3A capable of applying a voltage to the forming roll 3 even during rotation, and a loading stage 5; The glass substrate forming apparatus 1 is provided with a voltage applying unit (voltage applying unit) 21A for applying a voltage between the glass roll 3 and the forming roll 3.

  Further, the forming roll 3 and the loading stage 5 are not in direct contact with each other, a glass substrate W exists between the forming roll 3 and the loading stage 5, and the forming roll 3 and the loading stage 5 are not in contact with each other. Are insulated.

  The voltage applying means 21A is provided with a molybdenum slipping electrode (contact electrode) 3A installed at a predetermined portion of the forming roll 3 (a predetermined portion having no fine unevenness opposite to the fine unevenness). And a wire connected to the loading stage 5 (see FIGS. 11 and 12).

  In the glass substrate forming apparatus 1, the forming roll 3 is configured to be able to move up and down, and the loading stage 5 is configured to be able to move horizontally, and the loading stage 5 and the forming surface of the forming roll 3 are located close to each other. It has a configuration (structure) in which an outlet for spraying the agent is provided.

  Further, inside the forming roll 3, a forming roll heater 23 for heating the forming roll 3 is provided, and inside the loading stage 5, a stage heater 7 for heating the loading stage 5 to a predetermined temperature is provided. . The stage heater 7 heats the glass substrate W loaded on the loading stage 5.

  As shown in FIG. 1 (a), the voltage may be applied to either the forming roll 3 or the loading stage 5, but in general, a desired pattern is formed on the forming roll surface and the glass is applied. Since the transfer is performed on the surface of the substrate W, a voltage is applied to the forming roll 3 and the loading stage 5 is grounded.

  When performing pressure molding while applying a voltage, a reducing agent such as hydrogen may be required. If a nozzle for blowing hydrogen gas (reducing agent) is provided in the vicinity of the roll forming surface and the glass substrate W, forming can be performed efficiently.

  The glass substrate with fine irregularities is formed by forming a fine shape at a wavelength level of light (ie, from submicron to nanometer level), thereby using a polarization splitting element utilizing refractive index anisotropy or a non-reflection structure element. It is applicable as. Specifically, the glass substrate having fine irregularities is applied to polarization separation of different wavelengths in a signal pickup optical system such as a DVD, an antireflection filter of an imaging optical system represented by a digital still camera, and the like.

  The loading stage 5 is movable in a direction perpendicular to the axis (center axis) C1 of the forming roll 3. For example, the axis C1 of the forming roll 3 extends in the horizontal direction (Y-axis direction), and the loading stage 5 is movable in the horizontal direction (X-axis direction) perpendicular to the axis C1 of the forming roll 3. It has become.

  At this time, a voltage is applied to the glass substrate W as described above.

  As shown in FIG. 1A, the upper shaft component 13 is movable in the vertical direction (Z-axis direction) with respect to the frame 15. The forming roll 3 is located above the loading stage 5, and the glass substrate placed on the loading stage 5 (the thickness direction is the Z-axis direction, the width direction is the Y-axis direction, and the longitudinal direction is the Are formed on the upper surface of the glass substrate W) so that the glass substrate W is placed in the X-axis direction from the forming roll 3 so that the glass substrate W is formed.

  By the way, instead of making the loading stage 5 movable in the X-axis direction, the loading stage 5 is provided integrally with the frame 15, and the upper shaft component 13 is moved relative to the frame 15 in the Z-axis direction and the X-axis direction. It may be configured to be movable.

  Then, under the control of the control device 21 shown in FIG. 1A, the temperature of the surface of the forming roll 3 on which the fine irregularities are formed (the outer peripheral surface having a cylindrical side surface) is measured using the radiation thermometer 27. The heating value of the forming roll heater 23 is controlled (feedback control) in accordance with the temperature measured and measured by the radiation thermometer 27, and the temperature of the surface of the forming roll 3 on which the fine unevenness is formed is controlled. It is configured as follows.

  Further, the glass substrate forming apparatus 1 is provided with a forming chamber (chamber) 29 capable of containing (positioning) at least the forming roll 3 and the glass substrate W therein.

  The inside of the molding chamber 29 is configured to be evacuated or replaced with an inert gas (for example, at least one of a rare gas such as N2 gas and argon, and a CO2 gas).

  The load cell 11 illustrated in FIG. 1A is an example of a pressing force measuring unit that measures a pressing force (pressing force) of the forming roll 3 against the glass substrate W. The load cell 11 is controlled by the control device 21. It is configured to form a glass substrate with fine irregularities while performing control (feedback control) such that the pressing force becomes substantially constant according to the measurement result of (1).

  More specifically, the glass substrate forming apparatus 1 includes a stage moving means 31 capable of moving the loading stage 5 in the X-axis direction (movable and positionable), and a moving means 3 capable of moving the forming roll 3 in the Z-axis direction (movable and positionable). A) forming roll moving means 33 is provided.

  The stage moving means 31 includes, for example, an actuator such as a stepping motor 35 and a ball screw 37. The loading stage 5 movably provided on the frame 15 via the linear guide bearing 39 is moved by a ball screw 37 which is driven to rotate by a stepping motor 35. The rotation output shaft of the stepping motor 35 and the ball screw 37 are connected via a timing belt 41, but instead of or in addition to the timing belt 41, the rotation output shaft of the stepping motor 35 is connected via a power transmission member such as a gear. The rotation output shaft and the ball screw 37 may be connected.

  The forming roll moving means 33 includes, for example, an actuator such as a servo motor (pressing motor) 43 and a ball screw 45. The upper shaft member 13 movably provided on the frame 15 via the linear guide bearing 47 is moved and positioned by a ball screw 45 which is driven to rotate by the servomotor 43.

  Further, the forming roll support 9 is provided on the upper shaft constituent member 13 via the load cell 11. Then, under the control of the control device 21, the pressing force measured by the load cell 11 (the pressing force when pressing the glass substrate W with the forming roll 3 in order to transfer the fine irregularities onto the glass substrate W) is constant. In addition, the servo motor 43 is controlled. Further, the glass substrate forming apparatus 1 is configured such that when forming a glass substrate having fine irregularities, the glass substrate W moves at a predetermined moving speed with respect to the forming roll 3.

  Further, the glass substrate forming apparatus 1 is provided with forming roll rotating means 49 for rotating (rotating) the forming roll 3 about the axis C1. The forming roll rotating means 49 includes an actuator such as a stepping motor 51. The forming roll 3 is driven to rotate by a stepping motor 51.

  The glass substrate forming apparatus 1 will be described in more detail.

<About the molding chamber 29>
The molding chamber 29 shown in FIG. 1A is provided to be supported by the frame 15. An N 2 gas supply device 52 and a vacuum pump 55 are connected to the molding chamber 29. The vacuum pump 55 and the N 2 gas supply device 52 can be used to replace the inside of the molding chamber 29 with N 2 gas, or a vacuum pump. 55 makes it possible to make a vacuum.

  The molding chamber 29 is composed of an upper molding chamber (upper chamber) 29A and a lower molding chamber (lower chamber) 29B, and has a structure that can be divided into upper and lower parts. The molding chamber 29 can be opened and closed by raising only the upper chamber 29A using an actuator such as a chamber elevating cylinder 57 provided on the upper part. By raising the upper chamber 29A and opening the chamber 29, loading and unloading of the glass substrate W and maintenance of the internal equipment (such as replacement of the forming roll 3) can be performed.

<About the pressing mechanism of the forming roll 3>
The upper shaft component 13 is inserted into the upper chamber 29A shown in FIG. A forming roll unit including a load cell 11 for detecting the pressing force of the forming roll 3 and a forming roll 3 and a forming roll support 9 at the lower end of the upper shaft component 13 inserted into the upper chamber 29A. And are connected.

  A linear guide bearing 47 for pressing, a ball screw 45 for pressing, and a servomotor 43 for pressing provided on the frame 15 are respectively connected to the upper end side of the upper shaft component 13 to rotate the servomotor 43. By controlling, the upper shaft constituent member 13 (forming roll 3) can move up and down.

  In the present embodiment, the forming roll 3 is moved up and down by a mechanism including the servo motor 43 and the ball screw 45. However, the forming roll 3 may be moved up and down by another driving means such as a linear motor. Absent.

  The sealing structure for the upper shaft component 13 inserted into the upper chamber 29A is sealed by, for example, a cylindrical welding bellows 59. However, not only the welding bellows 59 but also a sealing structure such as an O-ring is possible. However, in the case of a sealing structure using an O-ring or the like, a sliding resistance or the like is generated when the upper shaft component 13 moves. In order to accurately control and control the pressing force of the forming roll 3, it is desirable to use a structure using the welding bellows 59.

  The vertical driving of the upper shaft component 13 controls the speed of the servomotor 43 toward a preset speed / position. However, when the forming roll 3 comes into contact with the glass substrate W, the upper shaft forming member 13 and the upper shaft The pressing force is detected by the load cell 11 disposed between the pressing force control unit and the member 13, and the servo motor 43 can be switched to the pressing force control so that the pressing force becomes a preset pressing force.

  The load cell 11 is arranged inside the upper chamber 29A, but may be arranged outside the upper chamber 29A (for example, between the upper shaft component 13 and the nut 45A of the ball screw 45). However, when the load cell 11 is disposed outside the upper chamber 29A, when the inside of the upper chamber 29A is evacuated, a force for pressing the upper shaft component 13 to the atmospheric pressure, a pressing guide portion (linear guide bearing 47), Since the sliding resistance of the vacuum seal portion and the like are also detected, when the fine pressing force is to be accurately managed and controlled, the load cell 11 is moved to the upper chamber 29A as shown in FIG. It is desirable to arrange within.

  Although not shown, a linear scale is disposed near the linear guide bearing 47 for pressing, etc., so that the position control of the forming roll 3 in the pressing axial direction (Z-axis direction) is accurately managed and controlled. Things may be performed.

  The temperature measurement (temperature measurement) of the forming roll 3 is performed by the radiation thermometer 27. By controlling the output of the infrared lamp 25 (see FIGS. 2 to 4 and the like) by feeding back the measured temperature, the forming roll 3 can be controlled to a preset temperature. I have.

  The movement of the loading stage 5 is performed by a ball screw 37 connected to the loading stage 5 and a stepping motor 35. The ball screw 37 is disposed in the chamber 29. The chamber 29 is provided with a rotation shaft support member 77 that rotatably supports the ball screw 37. The rotation shaft support member 77 is provided on the rotation shaft support member 77 in order to secure the airtightness of the chamber 29 (to maintain the sealing property). Is provided with a magnetic fluid seal.

  The loading stage 5 can be driven at an arbitrary moving speed by controlling the stepping motor 35 at a preset moving speed.

  In order to apply a voltage to the forming roll 3, it is necessary to install an electrode (contact electrode) 3A on the rotating forming roll 3. Both ends of the forming roll 3 are supported by an insulator (forming roll support 9) such as a ceramic, and a mechanism for rotating the electrode 3A while contacting an electrode such as a slip ring is required.

  Further, the glass substrate forming apparatus 1 is provided with a forming roll heater 23 for heating the forming roll 3 (the forming roll 3 itself) to a predetermined temperature. The forming roll heater 23 is provided inside the forming roll 3. The forming roll heater 23 is composed of, for example, an elongated cylindrical infrared lamp 25 (see FIG. 4) arranged along the axis C1 of the forming roll 3 inside the forming roll 3. Instead, the forming roll heater 23 may be constituted by a rod heater or the like.

<About heating of forming roll 3>
FIG. 2 is a perspective view illustrating a schematic configuration of a portion (forming roll portion) where the forming roll 3 is provided, and FIG. 3 is a plan view illustrating a schematic configuration of a portion where the forming roll 3 is provided. 4 is a diagram showing a cross section taken along line IV-IV in FIG.

  Referring to FIG. 2, the forming roll 3 is formed in a cylindrical shape and has a hollow structure, and an infrared lamp 25 is disposed inside the hollow hole. In the embodiment, the infrared lamp 25 is used, but another heating means such as a rod heater (sheath heater) or high-frequency induction heating may be used.

  The forming roll 3 is sandwiched between both sides by ceramic heat insulating shaft members 61 made of ceramic, and is inserted into bearings (rolling bearings) 63 supporting both sides. Bolts 67 (see FIG. 4) are connected to shaft members 65 provided on both sides. That is, in the Y-axis direction, one shaft member 65, one heat insulation shaft member 61, the forming roll 3, the other heat insulation shaft member 61, and the other shaft member 65 are arranged in this order, and each shaft member 65, each heat insulation shaft member is arranged. 61, the forming rolls 3 are integrally formed into a cylindrical shape as a whole.

  Silicon nitride having low thermal conductivity is used as the heat insulating shaft member 61 made of ceramic, but the material is not particularly limited as long as the material satisfies the same purpose.

  The heating is performed from the inside of the forming roll 3 using the infrared lamp 25. In the present embodiment, the temperature is raised to about 650 ° C., but the temperature can be raised to about 800 ° C. to 1500 ° C. in terms of performance.

  By heating the forming roll 3 from the central axis C1 with the infrared lamp 25, the concentric circle of the forming roll 3 can be heated uniformly. That is, it is possible to heat the forming roll 3 so that the temperature unevenness on the forming surface of the forming roll 3 is within ± 1 ° C. over the entire circumference.

<Rotation of forming roll 3>
As shown in FIG. 2, a bearing (rolling bearing) 63 is used to support the rotation of the forming roll 3. However, since the bearing is arranged in a vacuum environment and at a high temperature environment, a special lubrication type heat-resistant vacuum-compatible special bearing is used. It is desirable to use Further, a water-cooling jacket 75 is provided around the bearing (rolling bearing) 63 so that the temperature rise of the bearing (rolling bearing) 63 can be suppressed.

  More specifically, the forming roll 3 is rotatably provided on the forming roll support 9, and is configured to rotate about the axis C1. The forming roll support 9 is supported by the upper shaft component 13 via a load cell 11 for pressing. Further, as shown in FIGS. 3 and 4, the forming roll support 9 is detachably provided to the load cell 11 below the load cell 11 by a bolt BT. The loading stage 5 is provided on the frame 15 so as to be movable in the X-axis direction. Thus, the forming roll 3 moves relatively in rolling contact with the glass substrate W placed on the loading stage 5.

  The rotation output shaft of the stepping motor 51 and the forming roll 3 are connected via a gear 53 (see FIGS. 3 and 4), but instead of or in addition to the gear 53, power transmission such as a timing belt is performed. The rotation output shaft of the stepping motor 51 and the forming roll 3 may be connected via a member.

  Since the forming roll rotating means 49 shown in FIGS. 3 and 4 is provided, during the transfer, the forming roll 3 is synchronized with the movement of the loading stage 5 at a predetermined rotation speed under the control of the control device 21. It can be rotated. That is, the moving speed of the glass substrate W (the loading stage 5) and the peripheral speed of the outer periphery of the forming roll 3 can be made equal to each other.

  A configuration in which the forming roll 3 is freely rotated according to the operation (movement) of the loading stage 5 while the forming roll 3 is pressed against the glass substrate W without rotating the forming roll 3 by the forming roll rotating means 49. It may be.

  Before the chamber 29 is opened after the forming of the glass substrate W is completed, the forming roll 3 needs to be cooled to a non-oxidizing temperature (about 200 ° C.) in the atmosphere. Therefore, as shown in FIG. 73 is provided so that the forming roll 3 can be air-cooled in the cooling step.

  Also, as shown in FIGS. 3 and 4, a gear 53 and a stepping motor 51 are arranged on one side of the forming roll 3, so that the forming roll 3 is rotated. Since the stepping motor 51 is also arranged in a high-temperature, vacuum environment, special equipment that can handle vacuum is employed. Also, a motor is housed in a water-cooled jacket for heat control.

  The rotation of the forming roll 3 can be controlled by a stepping motor 51 at an arbitrary preset rotation speed. It is also possible to control the rotation speed of the forming roll 3 in accordance with (in synchronization with) the moving speed of the loading stage 5.

  Note that, without using the driving source of the stepping motor 51 (in a free state), driving by the frictional force with the loading stage 5 by pressing the forming roll is also possible. In this case, the excitation of the stepping motor 51 may be turned off, or a clutch mechanism or the like may be provided between the rotation output shaft (motor shaft) of the stepping motor 51 and the gear 53.

  As the material of the forming roll 3, a carbide or a tungsten alloy having a relatively high thermal conductivity is used in consideration of the thermal conductivity at the time of heating. However, if necessary, a forming roll of stainless steel or the like may be used.

  The cylindrical side surface of the forming roll 3 that comes into contact with the glass substrate W has a noble metal coating or DJC coating (diamond-like carbon) in order to prevent a fusion reaction even when high-temperature glass comes into contact. It is desirable that a release film such as described above is provided. 3 and 4, a balance weight 70 is provided on the shaft end side on which the stepping motor 51 and the like are not attached. Thereby, rotation, vibration, pressing force, etc. of the forming roll 3 can be stabilized.

  When the temperature is measured by the radiation thermometer 27 shown in FIG. 1A, the emissivity differs depending on the material of the forming roll 3, so that the emissivity or the like needs to be set in the radiation thermometer 27. In the glass substrate forming apparatus 1, as shown in FIG. 5, a calibration thermocouple (Type K) 69 is inserted from the center of the upper shaft component 13, and is abutted against the forming roll 3 to measure the surface of the forming roll 3. The temperature is corrected to correct the error from the measured value of the radiation thermometer 27. Further, in the glass substrate forming apparatus 1, the forming roll 3 made of a super hard material is used. However, when the material is changed to a material such as stainless steel, for example, a similar calibration operation is required separately.

  When the forming roll 3 is rotated while the calibration thermocouple 69 shown in FIGS. 5A and 5B is inserted, the tip of the calibration thermocouple 69 slides on the surface of the forming roll 3 and Therefore, it is necessary to stop the rotation of the forming roll 3 during the calibration work. Therefore, during the actual forming operation of the glass substrate W, the calibration thermocouple 69 needs to be retracted to a position where it does not come into contact with the forming roll 3.

  More specifically, a cylindrical hole 71 centered on the axis C2 is formed in the forming roll support 9 upward from the lower end of the forming roll support 9. A calibration thermocouple 69 is provided inside the hole 71. The calibration thermocouple 69 is positioned at the position shown in FIG. 5A (the position where the calibration thermocouple 69 is in contact with the forming roll 3) and at the position shown in FIG. 5B (the calibration thermocouple 69 is (A position distant upward from the roll 3). The axis C2 is an axis extending in the Z-axis direction orthogonal to the rotation center axis C1 of the forming roll 3. Thus, the hole 71 is provided directly above the forming roll 3, and the calibration thermocouple 69 is positioned directly above the forming roll 3 (just above the center of the forming roll 3).

  In the glass substrate forming apparatus 1, the radiation thermometer 27 is used for measuring the temperature of the forming roll 3 shown in FIG. 5, but a thermocouple is embedded in the forming roll 3 and a slip ring corresponding to the rotation of the forming roll 3 is used. The temperature may be measured via a current terminal or the like.

  Further, as shown in FIG. 6, when the forming roll 3 is sandwiched between each heat-insulating shaft member 61 and each shaft member 65 by using a bolt 67, heat of the forming roll 3 is applied to each shaft member 65 via the bolt 67. A collar 68 may be provided to prevent transmission. The collar 68 is made of the same material as the heat insulating shaft member 61.

  As described above, in the glass substrate forming apparatus 1 shown in FIG. 1A, as shown in FIG. 7, for example, the loading stage 5 on which the glass substrate W is loaded and placed, and the stage heater 7 Are provided. The stage heater 7 includes a plurality of rod heaters 17 and is provided to be embedded inside the loading stage 5. Further, instead of or in addition to the rod heater 17, the stage heater 7 may be constituted by an infrared lamp or the like. Then, by heating the loading stage 5 (the loading stage 5 itself) to a predetermined temperature by the stage heater 7, the glass substrate W placed on the loading stage 5 can be pressed and formed by the forming roll 3. Is heated to the temperature.

<About the movement of the loading stage 5>
7 to 12 show the details of the loading stage 5. FIG. 7 is a perspective view of the loading stage 5, and FIG. 8 is a diagram illustrating a schematic configuration of the rod heater 17. 9 is a plan view of the loading stage 5, FIG. 10 is a side view of the loading stage 5 (a view as viewed from the direction of the arrow X in FIG. 9), and FIG. FIG. 12 is a view showing a work drill (plate) 87 for holding the work of the loading stage 5.

  Referring to FIGS. 7 to 12, the loading stage 5 is supported by the frame 15 via a linear guide bearing 39 disposed at a lower portion in the chamber 29, and the loading stage 5 is connected to the axis C <b> 1 of the forming roll 3. Is movable in the vertical direction (X-axis direction).

<About heating of loading stage 5>
The loading stage 5 shown in FIG. 7 is provided with a SUS water cooling plate (SUS water cooling plate having a water cooling mechanism inside) 79 on a linear guide bearing 39 (see FIG. 1A), and a ceramic heat insulating plate thereon. A plate 81 is provided, a heater block 83 in which six rod heaters 17 are inserted is provided thereon, a die plate 85 made of tungsten alloy is provided thereon, and a glass substrate W is mounted on a horizontal upper surface thereof. is there.

  Note that the arrangement of the heat insulating plate 81, the heater block 83, the die plate 85, and the like is not necessarily limited to the above. For example, a configuration in which the glass substrate W is directly mounted on the heater block 83 may be employed. Good.

  The ceramic heat insulating plate 81 uses silicon nitride as a material having a particularly low thermal conductivity. Heater block 83 uses silicon carbide as a material having particularly high thermal conductivity and low specific heat capacity.

  The die plate 85 and the plate 87 use a tungsten alloy as a material having high thermal conductivity and the like. The contact surface between the die plate 85 and the plate 87 (the contact surface with the glass substrate W) is made of a noble metal based coating or DLC (DLC) to prevent a fusion reaction even when the high temperature glass substrate W comes into contact. It is desirable that a release film such as diamond-like carbon) be provided.

  The rod heater 17 inserted into the heater block 83 of the loading stage 5 divides the output of the rod heater 17 into three zones Z1, Z2, and Z3 as shown in FIG. The uniform heating in the insertion direction of the heater 17 (Y-axis direction) is achieved.

  As shown in FIG. 9, a plurality of temperature measuring elements (for example, thermocouples) 19 are provided in the glass substrate forming apparatus 1, and each of the temperature measuring elements 19 performs measurement under the control of the control device 21. The heating amount of the stage heater 7 is controlled (feedback control) in accordance with the temperature inside the loading stage 5, and the temperature of a plurality of areas of the loading stage 5 is zone-controlled. The plurality of temperature measuring elements 19 are embedded inside the loading stage 5.

  In the longitudinal direction (X-axis direction) of the loading stage 5, as shown in FIG. 9, six rod heaters 17 are inserted at substantially equal intervals. Then, zone control is performed for each of the two corresponding rod heaters 17 (temperature control is performed for each of the zones Z4, Z5, and Z6), and the loading stage 5 is uniformly heated.

  More specifically, referring to FIG. 9, the rod heater 17 is embedded in the heater block 83 so that the elongated heating portion of the rod heater 17 extends in the Y-axis direction (see FIG. 7). The rod heaters 17 are located at the same height in the Z-axis direction, and are provided at predetermined intervals in the X-axis direction. A thermocouple (thermocouple provided in zone Z4, zone Z5, and zone Z6) 19 is provided between two rod heaters 17 adjacent to each other and inside heater block 83. . The thermocouples 19 are not provided between the rod heaters 17 but provided every other one between the rod heaters 17. Then, according to the temperature measured by each thermocouple 19, the output of each of the two rod heaters 17 facing each thermocouple 19 is controlled to control the temperature of the loading stage 5. .

  Specifically, when the temperature measured by the thermocouple 19 provided in the zone Z4 in FIG. 9 is lower than the temperature measured by the other two thermocouples 19, the two rod heaters 17 in the zone Z4 are used. (The leftmost rod heater 17 and the second rod heater 17 from the left).

  With this structure, the temperature distribution on the loading surface of the glass substrate W of the loading stage 5 is heated within ± 1 ° C.

  In the glass substrate forming apparatus 1 of the present embodiment, the loading stage 5 is heated to about 600 ° C., but it is possible to raise the temperature to about 800 ° C. to 1500 ° C. in terms of performance. The output distribution of the rod heater 17, the number of insertions, the number of temperature measurement points by the thermocouple 19, and the like may be changed depending on the size of the glass substrate W to be formed without departing from the same purpose.

  The glass substrate W to be formed is heated by heat conduction by heating the loading stage 5 and is heated to a predetermined forming temperature.

  Referring to FIG. 10, after the molding is completed and before the chamber 29 is opened, the loading stage 5 needs to be cooled to a non-oxidizing temperature (about 200 ° C.) in the atmosphere. The loading stage 5 is cooled by flowing a nitrogen gas through the provided cooling grooves. The flow of the cooling nitrogen gas is indicated by an arrow A1. In this case, a relief valve (not shown) is provided in the chamber 29 to prevent the pressure of the nitrogen gas in the chamber 29 from excessively increasing.

  In the glass substrate forming apparatus 1, a plurality of cooling grooves having a width of 4 mm and a depth of 0.5 mm for flowing a coolant such as nitrogen gas are provided at a contact interface between the ceramic heat insulating plate 81 and the heater block 83. I have. However, the shape and the number of the cooling grooves may be changed without departing from the similar purpose.

  As shown in FIG. 11, a loading stage 5 on which the glass substrate W is mounted and electrically grounded, and fine unevenness opposite to the fine unevenness transferred to the glass substrate W are provided. A forming roll 3 for forming a glass substrate with fine irregularities by rotating while being pressed against a glass substrate W mounted on a loading stage 5, and a forming roll for supporting both ends of the forming roll 3 with insulators. The support 9, a contact electrode 3 </ b> A capable of applying a voltage to the forming roll 3 even during rotation, and voltage applying means 21 </ b> A for applying a voltage between the loading stage 5 and the forming roll 3 (see FIG. 1A). Have.

  Referring to FIG. 12, plates 87 for holding a work are arranged on both sides of the glass substrate W. By holding the glass substrate W with the plate 87, the glass substrate W is formed. So that it does not float or move. The work is held down by holding both ends in the width direction of the glass substrate W by the plate 87.

  On the other hand, as shown in FIG. 1B, a forming roll (first forming roll) 3 provided with fine irregularities opposite to the fine irregularities transferred to the glass substrate W; A first support (not shown) for supporting both ends of the forming roll 3 with an insulator, a contact electrode (first contact electrode) 3A for applying a voltage to the first forming roll 3, and a first forming roll A second forming roll 4 for forming a glass substrate with fine irregularities by sandwiching the glass substrate W in cooperation with the first forming roll 3 and rotating together with the first forming roll 3, and both ends of the second forming roll 4 Support (which is not shown) that supports the second forming electrode with an insulator, a second contact electrode 3B that electrically grounds the second forming roll, and the forming rolls 3 and 4 sandwich the glass substrate W therebetween. When rotating, the first forming roll 3 and the second forming roll 4 A voltage applying means 21 for applying a voltage (see FIG. 1 (a)) between, it may be configured to have a. That is, in FIG. 1A, the second forming roll 4 is not described, but as shown in FIG. 1B, the second forming roll 4 can be additionally provided.

  Each of the forming rolls 3 and 4 is provided with a heating unit and a temperature measuring unit (temperature measuring unit), and the heating units are configured to be controlled in accordance with the measurement results of the temperature measuring unit.

<About the molding process>
Next, a forming example in which the glass substrate W is actually formed using the glass substrate forming apparatus 1 will be described.

  Hereinafter, a series of operations from the beginning to the end of molding will be described with reference to FIGS.

  Please refer to FIG.

Step S1
The glass substrate forming apparatus 1 is set in an initial state. The initial state of the glass substrate forming apparatus 1 is a state shown below.

  (1) The upper chamber 29A is raised, and the chamber 29 is opened to the atmosphere. (2) The forming roll 3 has moved to the rising end. (3) The rotation of the forming roll 3 is stopped. (4) The heater (infrared lamp 25) of the forming roll 3 is turned off. (5) The loading stage 5 has moved to the preheating position (the right end in FIG. 1A). (6) The rod heater 17 of the loading stage 5 is off.

Step S2
The glass material (glass substrate W) to be formed is set on the loading stage 5. As the glass material, for example, the following glass materials are used. (1) Refractive index nd: 1.51633. (2) Abbe number γd: 64.1. (3) Strain point: Stp: 532 ° C. (4) Slow cooling point AP: 563 ° C. (5) Transition point Tg: 576 ° C. (6) Yield point At: 625 ° C. (7) Softening point SP: 718 ° C. (8) Linear expansion coefficient α: 86 × 10 −7 / ° C. (9) Size: 100 mm x 30 mm x t3 mm.

Step S3
The automatic sequence of the glass substrate forming apparatus 1 is started. Hereinafter, the operation sequence of the automatic sequence of the glass substrate forming apparatus 1 by the control device 21 will be described.

Step S4
The upper chamber 29A is lowered to seal the inside of the chamber 29.

Step S5
The valve of the vacuum pump 55 is opened, and the inside of the chamber 29 is evacuated to a predetermined degree of vacuum. For example, evacuation is performed to 0.5 Pa.

Step S6
After closing the vacuum valve, a nitrogen gas (N2 gas) is introduced to make the inside of the chamber 29 a nitrogen atmosphere. In the glass substrate forming apparatus 1, the pressure in the chamber 29 was set to 101325 Pa (atmospheric pressure) by introducing nitrogen gas.

Step S7
The infrared lamp 25 for heating the forming roll 3 and the rod heater 17 for heating the loading stage 5 are turned on to start heating the forming roll 3 and the loading stage 5. At the same time, the forming roll 3 is rotated at 10 rpm in order to uniformly heat the forming roll 3. In addition, in the glass substrate forming apparatus 1, the predetermined temperature of each part was set as follows. (1) Forming roll 3: 640 ° C. (2) Loading stage 5: 610 ° C. (same setting for all three zones). The output adjustment to the set temperature to the rod heater 17 is automatically controlled by a temperature controller and a power controller (thyristor regulator).

Step S8
After the temperatures of the forming roll 3 and the loading stage 5 reach a predetermined temperature, the vacuum valve of the vacuum pump 55 is opened to evacuate to a predetermined degree of vacuum. For example, evacuation was performed to 0.5 Pa or less.

Step S9
The loading stage 5 is moved at a high speed to a predetermined position below the forming roll 3. Then, a voltage is applied to the glass substrate W by the voltage applying unit 21A.

Step S10
After the rotation of the forming roll 3 is once stopped, the forming roll 3 is lowered and pressed against the glass substrate W with a predetermined pressure. For example, the pressing force was pressed at 20 N (Newton).

  Please refer to FIG.

Step S11
At the same time as the forming roll 3 reaches a predetermined pressing force, the loading stage 5 is moved at a predetermined speed, and at the same time, the forming roll 3 is rotated according to (synchronized with) the moving speed of the loading stage 5. That is, the forming roll 3 travels on the glass substrate W while the forming roll 3 is pressed against the glass substrate W with a predetermined force. In the glass substrate molding apparatus 1, the moving speed of the loading stage 5 during molding was set to 0.01 mm / sec.

Step S12
When the loading stage 5 reaches a predetermined position, the loading stage 5 is stopped. At the same time, the rotation of the forming roll 3 is stopped in synchronization with the operation of the loading stage 5.

Step S13
The forming roll 3 is moved to the rising end, and the pressing of the forming roll 3 against the glass substrate W is released.

Step S14
The loading stage 5 is moved to the cooling retreat position (the left end in FIG. 1A).

Step S15
The infrared lamp 25 for heating the forming roll 3 and the rod heater 17 for heating the loading stage 5 are turned off, and the heating of the forming roll 3 and the loading stage 5 are completed.

Step S16
The vacuum valve of the vacuum pump 55 is closed, and the evacuation of the chamber 29 ends.

Step S17
The forming roll 3 and the loading stage 5 are forcibly air-cooled using a nitrogen gas for cooling, and are cooled until a predetermined temperature is reached. For example, each is cooled to 200 ° C. as a temperature at which oxidation is difficult in air. In addition, the forming roll 3 performs forced air cooling while rotating the forming roll 3 at 10 rpm so that nitrogen gas is evenly applied. At the same time, the inside of the chamber 29 is replaced with a nitrogen atmosphere again, and the pressure returns to the atmospheric pressure.

Step S18
After confirming the temperature decrease, the rotation of the forming roll 3 is stopped, the upper chamber 29A is raised, and the automatic sequence of the glass substrate forming apparatus 1 ends.

Step S19
Thereafter, the glass substrate W (glass molded product) on the loading stage 5 is taken out by the operator, and the process is terminated.

<Molded product shape>
FIG. 15 shows a glass molded product (glass substrate W) obtained by the glass substrate molding apparatus 1.

  As shown in FIG. 15, a line and space having a groove width of 250 nm and a groove depth of 750 nm was formed as a fine uneven shape, and it was possible to obtain a good glass molded product W.

  As described above, the material size of the glass substrate W is 100 mm × 30 mm × t3 mm, and the shape can be obtained in an area of 90 mm × 20 mm.

  The fine lines and spaces of the glass substrate W have a two-dimensional structure and extend in the width direction (Y-axis direction) of the glass substrate W. (X-axis direction). Further, the fine unevenness may be a cylindrical fine unevenness such as φ250 nm × depth 300 nm or the like on the glass substrate W, or the fine unevenness may be a three-dimensional structure.

  In the present embodiment, the glass substrate W has the size shown in FIG. 15, but may have a larger size such as A4 size or A3 size.

  By the way, in the above-described embodiment, the chamber 29 is opened and the operation of the apparatus is stopped for taking out the glass substrate material and the molded product in each automatic sequence of the glass substrate molding apparatus 1. However, as shown in FIG. In addition, a glass substrate W may be continuously supplied by providing a load lock chamber (front chamber 89, rear chamber 91) for loading and unloading a workpiece into and out of the chamber 29, and gate valves 93 and 95. .

  With such a configuration, the glass material W can be supplied and formed with higher productivity without opening the chamber 29 or lowering the temperature in the forming roll 3, the loading stage 5, and the chamber 29. Is possible.

  FIG. 16 is a view showing that a load lock chamber (front chamber 89 and rear chamber 91) for loading and unloading a workpiece into and from the molding chamber 29 and gate valves 93 and 95 are provided. Glass substrate loading stages 99, 101, 103, and 105 to be loaded and glass substrate feeding actuators (for example, air cylinders) 107, 109, and 111 for feeding the glass substrate W are provided. The glass substrate W is heated, and the glass substrate W is cooled on the glass substrate mounting stage 103. Note that a configuration in which the glass substrate W is heated by the glass substrate loading stage 99 and the glass substrate W is cooled by the glass substrate loading stage 105 may be employed.

  According to the glass substrate forming apparatus 1 of the present embodiment, the cylindrical roll-shaped forming roll 3 is used as a mold used for press-molding the glass substrate W. It has an uneven shape. In addition, by moving the forming roll 3 while rotating the forming roll 3 in a state where the forming roll 3 is pressed against the glass substrate W which has been softened in advance by heating, the fine irregular shape is formed on the glass substrate W. Is transferred and molded.

  Accordingly, it is possible to efficiently press-mold a fine uneven shape on the glass substrate W having a relatively large area, and mass production becomes easy.

  That is, when the glass substrate forming apparatus 1 is used, the number of steps by heating and pressing is relatively small and simple as compared with the photolithography technique and the vacuum evaporation technique, and therefore, in terms of productivity, manufacturing equipment price, and the like. This is advantageous.

  Further, as compared with a conventional molding method in which a pair of upper and lower flat molds are used to perform press molding, the mode of contact between the glass substrate W and the mold (the molding roll 3) is changed from surface contact to line contact, and the pressing force is efficiently reduced. Thus, the glass substrate W can be efficiently formed with a small pressing force and a short pressing time. In addition, it is possible to form a fine uneven shape in a relatively large area. If it is possible to manufacture a glass substrate with a fine unevenness having a large area, a glass substrate may be used for a non-reflection filter on a display typified by an FPD or the like, a condenser lens for solar power generation, and the like. W can be applied.

  Further, the glass substrate W enters into the fine irregularities formed on the surface of the forming roll 3 which is a mold from the tangential direction of the forming roll 3 and is released in the tangential direction. Molding and release properties are improved as compared with the case of contact.

  In configuring the glass substrate forming apparatus 1, it is desirable to consider the following points (1) to (6).

  (1) To control the heating temperature of the glass substrate W accurately and with good reproducibility. (2) The molding temperature of the molding roll 3 is accurately and reproducibly controlled uniformly. (3) The pressing force for pressing the forming roll 3 against the glass substrate W is accurately and reproducibly controlled. (4) The rotation speed of the forming roll 3 and the traveling speed of the forming roll 3 (moving speed of the loading stage 5) are accurately and reproducibly controlled. Alternatively, the forming roll 3 is rotated in a free state according to the traveling speed of the forming roll 3. (5) The molding environment can be maintained in an environment replaced with an inert gas atmosphere so that the structure such as the molding roll 3 and the glass substrate W are not oxidized. In addition, if necessary, it can be maintained in a vacuum atmosphere environment at an arbitrary timing so that gas is not caught in the fine irregularities. (6) Cool the glass substrate W after molding efficiently and uniformly.

  As shown in FIG. 16, if the glass substrate W is continuously supplied to the glass substrate forming apparatus 1 and discharged from the glass substrate forming apparatus 1, the heating and cooling of the mold as the forming roll 3 is performed. It is possible to mass-produce continuously and efficiently by eliminating loss time.

  Further, according to the glass substrate forming apparatus 1 of the present application, the glass substrate forming apparatus 1 has the loading stage 5 on which the glass substrate W is placed, and the loading stage 5 is heated to a predetermined temperature by the stage heater 7 and placed on the loading stage 5. Since the glass substrate W is heated, the glass substrate W can be accurately and uniformly heated with good reproducibility as compared with the case where the glass substrate W is directly heated by a heater, and the glass substrate W is prevented from cracking. Accurate transcription can be performed.

  Further, since the loading stage 5 is divided into a plurality of areas (zones Z4, Z5, Z6) and the zones Z4 to Z6 are zone-controlled, the glass substrate W can be more accurately and reproducibly uniform. Can be heated.

  In addition, since a forming roll heater 23 for heating the forming roll 3 to a predetermined temperature is provided, a temperature difference between the glass substrate W and the forming roll 3 during press forming can be eliminated, and accurate transfer can be performed efficiently. Can do well.

  Further, according to the glass substrate forming apparatus 1 of the present application, the calorific value of the forming roll heater 23 is controlled by using the radiation thermometer 27, and the temperature of the surface of the forming roll 3 on which the fine irregularities are formed is controlled. Therefore, the temperature of the forming roll 3 can be accurately maintained, and accurate transfer can be efficiently performed.

  Further, by evacuating the inside of the chamber 29, it is possible to eliminate the entrapment of air at the time of press molding, and it is possible to avoid occurrence of transfer failure. Alternatively, by filling the inside of the chamber 29 with an inert gas, it is possible to prevent oxidation of the forming roll 3, the loading stage 5, and the like.

  In the above embodiment, the slip ring electrode 3A (see FIG. 17A) in which a gap is formed without contact between the forming roll 3 and the electrode has been described.

  Instead of the slip ring electrode 3A (see FIG. 17 (a)), as shown in FIG. 17 (b), a leaf spring electrode 3C whose contact point with the forming roll 3 is formed in a leaf spring shape may be used. That is, since the plate spring electrode 3C is formed by a spring itself, the voltage is applied since the electrode is always in contact with the forming roll 3 by the elastic force of the plate spring.

  Further, as shown in FIG. 17C, a brush electrode 3D in which a contact portion with the forming roll 3 is formed in a brush shape may be used. The brush electrode 3D is applied with a voltage since the brush is in constant contact with the forming roll 3 because the electrode itself is formed in a brush shape.

  The second contact electrode 3B shown in FIG. 1B includes a slip ring electrode 3A shown in FIG. 17A, a leaf spring electrode 3C shown in FIG. 17B, and a brush electrode 3D shown in FIG. Can be used.

  Incidentally, the above-described embodiment may be understood as a glass substrate forming method (roll forming method). That is, in a method of forming a glass substrate by heating a plate-like glass substrate and press-forming the fine irregularities on the glass substrate, the fine irregularities opposite to the fine irregularities transferred to the glass substrate are formed. The method may be grasped as a method of forming a glass substrate for forming a glass substrate having fine irregularities by rotating a cylindrical forming roll having the same while pressing it against the glass substrate.

  In this method of forming a glass substrate, the glass substrate is placed on a loading stage, and the loading stage is heated to a predetermined temperature by a stage heater embedded inside the loading stage. May be heated.

  In the method for forming a glass substrate, the stage heater may be at least one of a plurality of rod heaters disposed inside the loading stage, and a plurality of infrared lamps disposed inside the loading stage. A plurality of temperature measuring elements are embedded in the loading stage, and a heating value of the stage heater or the infrared lamp is controlled in accordance with a temperature measured by each of the temperature measuring elements. May be zone-controlled.

  In the method of forming a glass substrate, the forming roll may be heated to a predetermined temperature by a forming roll heater.

  Further, in the method for forming a glass substrate, the forming roll heater may include an infrared lamp disposed along the axis of the forming roll inside the forming roll, and along an axis of the forming roll inside the forming roll. Constituted by at least one of the rod heaters arranged in the same manner, using a radiation thermometer, measuring the temperature of the surface of the forming roll on which the fine irregularities are formed, and setting the temperature to the temperature measured by the radiation thermometer. Accordingly, the amount of heat generated by the infrared lamp or the heater for the forming roll may be controlled to control the temperature of the surface of the forming roll on which the fine irregularities are formed.

  Further, in the method for forming a glass substrate, the pressure forming may be performed by evacuating or replacing the inside of a forming chamber capable of containing the forming roll and the glass substrate with an inert gas. Good.

  Further, in the glass substrate forming apparatus 1, a fine uneven shape is formed on the glass substrate W. However, instead of the glass substrate W, a fine material (for example, resin or metal material) which is softened by heating is used. An uneven shape may be formed.

1 Glass substrate generation device (Glass substrate forming device)
3 Forming roll (first forming roll)
3A contact electrode (first contact electrode, slip ring electrode)
3B 2nd contact electrode 3C leaf spring electrode 3D brush electrode 4 2nd forming roll 5 loading stage 7 stage heater 9 forming roll support 11 load cell 13 upper shaft constituent member 15 frame 17 rod heater 19 temperature measuring element 21 controller Reference Signs List 21A Voltage applying means 23 Heater for forming roll 25 Infrared lamp 27 Radiation thermometer 29 Forming chamber 31 Stage moving means 33 Forming roll moving means 49 Forming roll rotating means W Glass substrate Z4, Z5, Z6 zone

Claims (9)

A loading stage on which a glass substrate is placed and electrically grounded,
A fine concavo-convex shape opposite to the fine concavo-convex shape transferred to the glass substrate is provided, and by rotating while being pressed against the glass substrate placed on the loading stage, the fine concavo-convex shape A forming roll for forming an attached glass substrate;
A support for supporting both ends of the forming roll with an insulator,
A contact electrode for applying a voltage to the forming roll;
Voltage applying means for applying a voltage between the loading stage and the forming roll ,
The loading stage, wherein the to Ruga glass substrate generating device in that a blowing opening blowing the reducing agent in the vicinity of the molding surface of the molding roll.   The glass substrate generating apparatus according to claim 1, wherein the forming roll is configured to be able to move up and down.   The glass substrate generating apparatus according to claim 1, wherein the loading stage moves horizontally. The glass substrate generating apparatus according to any one of claims 1 to 3 , wherein a heating unit is provided inside the forming roll . The glass substrate generating apparatus according to any one of claims 1 to 4 , wherein a heating unit is provided on the loading stage . The heating apparatus according to claim 1, further comprising a stage heater configured to heat the glass substrate placed on the loading stage by heating the loading stage to a predetermined temperature. 6. 3. The glass substrate generating apparatus according to 1. The said contact electrode is a slip ring electrode, The glass substrate production | generation apparatus of any one of Claims 1-6 characterized by the above-mentioned. The glass substrate generating apparatus according to any one of claims 1 to 6 , wherein the contact electrode is a leaf spring electrode whose contact point with the forming roll is formed in a leaf spring shape. . The glass substrate generating apparatus according to any one of claims 1 to 6 , wherein the contact electrode is a brush electrode having a contact portion with the forming roll formed in a brush shape .

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