CN109212621A - 电子部件输送装置以及电子部件检查装置 - Google Patents

电子部件输送装置以及电子部件检查装置 Download PDF

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Publication number
CN109212621A
CN109212621A CN201810674961.9A CN201810674961A CN109212621A CN 109212621 A CN109212621 A CN 109212621A CN 201810674961 A CN201810674961 A CN 201810674961A CN 109212621 A CN109212621 A CN 109212621A
Authority
CN
China
Prior art keywords
electronic component
image
equipment
unit
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810674961.9A
Other languages
English (en)
Chinese (zh)
Inventor
实方崇仁
石田浩和
石田大辅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North Star Technology Co ltd
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN109212621A publication Critical patent/CN109212621A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00—Prospecting or detecting by optical means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0008—Industrial image inspection checking presence/absence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
    • G06F3/147—Digital output to display device ; Cooperation and interconnection of the display device with other functional units using display panels
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H10P72/0608—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/16—Trays for chips
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/32—Indexing scheme for image data processing or generation, in general involving image mosaicing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20212—Image combination
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Environmental & Geological Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
CN201810674961.9A 2017-06-29 2018-06-27 电子部件输送装置以及电子部件检查装置 Pending CN109212621A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017127044A JP6903270B2 (ja) 2017-06-29 2017-06-29 電子部品搬送装置および電子部品検査装置
JP2017-127044 2017-06-29

Publications (1)

Publication Number Publication Date
CN109212621A true CN109212621A (zh) 2019-01-15

Family

ID=64734417

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810674961.9A Pending CN109212621A (zh) 2017-06-29 2018-06-27 电子部件输送装置以及电子部件检查装置

Country Status (4)

Country Link
US (1) US10679334B2 (https=)
JP (1) JP6903270B2 (https=)
CN (1) CN109212621A (https=)
TW (1) TWI673502B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112230028A (zh) * 2019-06-27 2021-01-15 东京毅力科创株式会社 探测器和探针卡的预热方法
CN113819848A (zh) * 2020-06-19 2021-12-21 胜美达集团株式会社 电子部件的检查装置以及电子部件的检查方法

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Publication number Priority date Publication date Assignee Title
JP2019128289A (ja) * 2018-01-25 2019-08-01 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
TWI808357B (zh) * 2020-11-19 2023-07-11 鏵友益科技股份有限公司 半導體元件的檢測方法
CN112786509B (zh) * 2021-01-26 2024-02-23 江苏优普纳科技有限公司 一种定位系统、定位方法及计算设备
CN114821526B (zh) * 2022-04-14 2024-11-15 重庆长安汽车股份有限公司 基于4d毫米波雷达点云的障碍物三维边框检测方法
DE102023136425A1 (de) * 2022-12-22 2024-06-27 Mitutoyo Corporation Prüfverfahren, prüfvorrichtung und prüfprogramm für eine scheibenförmige massteilungsplatte

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CN102263926A (zh) * 2010-05-31 2011-11-30 鸿富锦精密工业（深圳）有限公司 电子设备及其图像处理方法
JP2014196908A (ja) * 2013-03-29 2014-10-16 セイコーエプソン株式会社 ハンドラーおよび検査装置
CN109997049A (zh) * 2016-11-29 2019-07-09 精工爱普生株式会社 电子元件输送装置以及电子元件检查装置

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JP3206658B2 (ja) 1999-02-23 2001-09-10 日本電気株式会社 半導体装置の製造方法
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CN102263926A (zh) * 2010-05-31 2011-11-30 鸿富锦精密工业（深圳）有限公司 电子设备及其图像处理方法
JP2014196908A (ja) * 2013-03-29 2014-10-16 セイコーエプソン株式会社 ハンドラーおよび検査装置
CN109997049A (zh) * 2016-11-29 2019-07-09 精工爱普生株式会社 电子元件输送装置以及电子元件检查装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112230028A (zh) * 2019-06-27 2021-01-15 东京毅力科创株式会社 探测器和探针卡的预热方法
CN113819848A (zh) * 2020-06-19 2021-12-21 胜美达集团株式会社 电子部件的检查装置以及电子部件的检查方法

Also Published As

Publication number Publication date
JP2019011960A (ja) 2019-01-24
JP6903270B2 (ja) 2021-07-14
US10679334B2 (en) 2020-06-09
TWI673502B (zh) 2019-10-01
US20190005639A1 (en) 2019-01-03
TW201905472A (zh) 2019-02-01

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PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right
TA01 Transfer of patent application right

Effective date of registration: 20210702

Address after: Nagano, Japan

Applicant after: North Star Technology Co.,Ltd.

Address before: Tokyo, Japan

Applicant before: Seiko Epson Corp.

AD01 Patent right deemed abandoned
AD01 Patent right deemed abandoned

Effective date of abandoning: 20220118