CN109179388A - 一种一氧化碳制备石墨烯的方法 - Google Patents
一种一氧化碳制备石墨烯的方法 Download PDFInfo
- Publication number
- CN109179388A CN109179388A CN201811288280.5A CN201811288280A CN109179388A CN 109179388 A CN109179388 A CN 109179388A CN 201811288280 A CN201811288280 A CN 201811288280A CN 109179388 A CN109179388 A CN 109179388A
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- graphene
- carbon monoxide
- hydrogen
- passed
- tube furnace
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 119
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 103
- 229910002091 carbon monoxide Inorganic materials 0.000 title claims abstract description 49
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 44
- 239000001257 hydrogen Substances 0.000 claims abstract description 39
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 39
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000010453 quartz Substances 0.000 claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 28
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000000137 annealing Methods 0.000 claims abstract description 16
- 239000011261 inert gas Substances 0.000 claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 9
- 239000012298 atmosphere Substances 0.000 claims abstract description 3
- 238000001816 cooling Methods 0.000 claims abstract description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 16
- 229910052786 argon Inorganic materials 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 235000019441 ethanol Nutrition 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 5
- 150000001336 alkenes Chemical class 0.000 claims description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000004575 stone Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- -1 graphite Alkene Chemical class 0.000 claims 1
- 230000006911 nucleation Effects 0.000 abstract description 11
- 238000010899 nucleation Methods 0.000 abstract description 11
- 238000002360 preparation method Methods 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000003708 ampul Substances 0.000 description 20
- 239000011889 copper foil Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 9
- 239000013078 crystal Substances 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 238000005086 pumping Methods 0.000 description 5
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 4
- 239000012300 argon atmosphere Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 150000001721 carbon Chemical group 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000033116 oxidation-reduction process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
- C01B32/186—Preparation by chemical vapour deposition [CVD]
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2204/00—Structure or properties of graphene
- C01B2204/02—Single layer graphene
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2204/00—Structure or properties of graphene
- C01B2204/20—Graphene characterized by its properties
- C01B2204/32—Size or surface area
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN201811288280.5A CN109179388B (zh) | 2018-10-31 | 2018-10-31 | 一种一氧化碳制备石墨烯的方法 |
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CN201811288280.5A CN109179388B (zh) | 2018-10-31 | 2018-10-31 | 一种一氧化碳制备石墨烯的方法 |
Publications (2)
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CN109179388A true CN109179388A (zh) | 2019-01-11 |
CN109179388B CN109179388B (zh) | 2020-05-08 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110203912A (zh) * | 2019-07-17 | 2019-09-06 | 西北有色金属研究院 | 一种低溶碳材料表面定维制备二维石墨烯膜层的方法 |
CN110779958A (zh) * | 2019-10-31 | 2020-02-11 | 山东交通学院 | 一种船舶尾气感测材料及其制备工艺 |
WO2021115596A1 (en) | 2019-12-11 | 2021-06-17 | Jozef Stefan Institute | Method and apparatus for deposition of carbon nanostructures |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2055673A1 (en) * | 2007-10-29 | 2009-05-06 | Samsung Electronics Co., Ltd. | Graphene sheet and method of preparing the same |
CN102092710A (zh) * | 2010-12-17 | 2011-06-15 | 中国科学院化学研究所 | 一种规则石墨烯及其制备方法 |
CN102134067A (zh) * | 2011-04-18 | 2011-07-27 | 北京大学 | 一种制备单层石墨烯的方法 |
CN102229426A (zh) * | 2011-05-25 | 2011-11-02 | 中国科学院化学研究所 | 一种单层、有序排布的等角六边形石墨烯的制备方法 |
CN104058390A (zh) * | 2013-03-19 | 2014-09-24 | 海洋王照明科技股份有限公司 | 一种石墨烯的制备方法 |
EP2942326A1 (en) * | 2014-05-05 | 2015-11-11 | Basf Se | Substrate pre-treatment for consistent graphene growth by chemical deposition |
CN106756881A (zh) * | 2015-11-23 | 2017-05-31 | 炬力奈米科技有限公司 | 通过化学气相沉积生长石墨烯的方法 |
WO2018017369A2 (en) * | 2016-07-12 | 2018-01-25 | William Marsh Rice University | Three-dimensional (3d) printing of graphene materials |
-
2018
- 2018-10-31 CN CN201811288280.5A patent/CN109179388B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2055673A1 (en) * | 2007-10-29 | 2009-05-06 | Samsung Electronics Co., Ltd. | Graphene sheet and method of preparing the same |
CN101423209A (zh) * | 2007-10-29 | 2009-05-06 | 三星电子株式会社 | 石墨烯片及其制备方法 |
CN102092710A (zh) * | 2010-12-17 | 2011-06-15 | 中国科学院化学研究所 | 一种规则石墨烯及其制备方法 |
CN102134067A (zh) * | 2011-04-18 | 2011-07-27 | 北京大学 | 一种制备单层石墨烯的方法 |
CN102229426A (zh) * | 2011-05-25 | 2011-11-02 | 中国科学院化学研究所 | 一种单层、有序排布的等角六边形石墨烯的制备方法 |
CN104058390A (zh) * | 2013-03-19 | 2014-09-24 | 海洋王照明科技股份有限公司 | 一种石墨烯的制备方法 |
EP2942326A1 (en) * | 2014-05-05 | 2015-11-11 | Basf Se | Substrate pre-treatment for consistent graphene growth by chemical deposition |
CN106756881A (zh) * | 2015-11-23 | 2017-05-31 | 炬力奈米科技有限公司 | 通过化学气相沉积生长石墨烯的方法 |
WO2018017369A2 (en) * | 2016-07-12 | 2018-01-25 | William Marsh Rice University | Three-dimensional (3d) printing of graphene materials |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110203912A (zh) * | 2019-07-17 | 2019-09-06 | 西北有色金属研究院 | 一种低溶碳材料表面定维制备二维石墨烯膜层的方法 |
CN110779958A (zh) * | 2019-10-31 | 2020-02-11 | 山东交通学院 | 一种船舶尾气感测材料及其制备工艺 |
WO2021115596A1 (en) | 2019-12-11 | 2021-06-17 | Jozef Stefan Institute | Method and apparatus for deposition of carbon nanostructures |
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Publication number | Publication date |
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CN109179388B (zh) | 2020-05-08 |
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Address after: 266045 No. 53 Zhengzhou Road, Qingdao City, Shandong Province Applicant after: QINGDAO University OF SCIENCE AND TECHNOLOGY Address before: 266042 No. 53 Zhengzhou Road, Jinan City, Shandong Province Applicant before: QINGDAO University OF SCIENCE AND TECHNOLOGY |
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Effective date of registration: 20230418 Address after: Building 17, No. 1 Liuyanghe Road, Jiaozhou Economic Development Zone, Qingdao, Shandong 266000 Patentee after: Qingdao Hailiwei Nanotechnology Co.,Ltd. Address before: 266045 No. 53 Zhengzhou Road, Qingdao City, Shandong Province Patentee before: QINGDAO University OF SCIENCE AND TECHNOLOGY |