CN109128533B - Method for machining taper-adjustable micropores through fluid-assisted ultrafast laser - Google Patents
Method for machining taper-adjustable micropores through fluid-assisted ultrafast laser Download PDFInfo
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- CN109128533B CN109128533B CN201811127183.8A CN201811127183A CN109128533B CN 109128533 B CN109128533 B CN 109128533B CN 201811127183 A CN201811127183 A CN 201811127183A CN 109128533 B CN109128533 B CN 109128533B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
Abstract
The invention provides a method for machining taper-adjustable micropores by fluid-assisted ultrafast laser, which comprises the following specific steps of: fixing a workpiece on an ultra-precise platform, and cleaning and drying the workpiece by using cleaning liquid and drying gas before laser processing; selecting a laser beam for processing according to the thickness of a first layer of composition material of a workpiece and the taper requirement of the micropores, processing the micropores of the first layer of material in a scanning mode, and simultaneously selecting an auxiliary fluid for processing according to the components of the material; after the micropore processing of the first layer of material is finished, the processing area is cleaned and dried, then the ultrafast laser processing system moves the laser focusing plane downwards to the surface of the next layer of material for micropore processing, and meanwhile, the fluid is adopted to assist the processing process, so that the finished product is obtained after the processing. According to the invention, a corresponding ultrafast laser scanning mode is selected according to the material thickness and the requirement of the micropore machining taper, and fluid is matched for auxiliary machining by combining the material components, so that the micropore machining taper controllability and the micropore depth-diameter ratio of the composite material can be greatly improved.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a method for processing a taper-adjustable micropore of a composite material by fluid-assisted ultrafast laser.
Background
Laser micropore processing is to focus a high-energy laser beam on a micropore processing area and interact with a material, so that the laser micropore processing area is rapidly heated to be melted or even vaporized in a short time, and then is removed. Due to the focusing and spatial distribution characteristics of the laser beam, the processed micro-holes tend to have a certain taper. With the increase of the thickness of the material, the slag processed by the laser is accumulated in the micropore and is difficult to spray, the processing depth of the micropore is limited, and the processing quality is seriously influenced. Composite materials have been widely used in the fields of aerospace, automobile industry, textile machinery, medical instruments and the like because of the combination of superior characteristics of various materials, and layered composite materials composed of multiple layers of materials are typical. Because each layer of the composite material has different components, high-quality micropores are difficult to process only by adopting one processing technology, and the processing controllability of the micropore taper is higher. Patent 201510505715.7 proposes a method for forming micro-holes and improving taper of steel foil with ultrashort pulse laser, which uses femtosecond infrared laser to process micro-holes by contour roundabout and downward feeding focusing plane, although the method can improve the taper of micro-holes to a certain extent, the applicable material is very limited, and for laminated composite material composed of multiple components, the processing method can not meet the requirement of taper adjustment. Patent CN201610350918.8 proposes a device and method for improving taper of through hole by liquid scattering, in which a taper through hole is machined by laser, and then laser beam is reflected by liquid level of liquid to gradually eliminate taper of the laser machined through hole. The method is difficult to control the stability of the liquid level and the reflection angle of the laser beam, the energy loss of the laser beam after reflection cannot be accurately calculated, and the application aspect is difficult to realize. In order to meet the processing requirements of the composite materials with increasing demands, the problem of processing the micropores with adjustable taper is urgently needed to be solved.
At present, the prior art has the following technical problems: 1. the laser micropore processing presents a certain taper, and for the layered composite material, the high-quality micropore with adjustable taper is difficult to process by only adopting one process method; 2. the components of high-temperature slag generated in the laser micropore machining process of the composite material are different, if the high-temperature slag is not removed in time, the depth of a machined micropore is limited, and impurities are introduced due to the fact that the high-temperature slag reacts with an unmachined area easily, and machining quality is seriously affected.
Disclosure of Invention
In view of the above, the invention provides a method for processing a taper-adjustable micropore by using a fluid-assisted ultrafast laser, which selects a corresponding ultrafast laser scanning mode according to the requirements of material thickness and micropore processing taper, and combines material components with the fluid-assisted processing, so that the micropore processing taper controllability and the micropore depth-diameter ratio of a composite material can be greatly improved.
The technical scheme of the invention is as follows: a method for machining taper-adjustable micropores by fluid-assisted ultrafast laser is characterized by comprising the following specific steps of:
s1, fixing a workpiece on an ultra-precise platform, wherein a gas and liquid nozzle is arranged above the workpiece, the ultra-precise platform is fixed in a water tank, and the water tank is fixed on a working platform;
s2, before laser processing, respectively spraying cleaning liquid and drying gas by using a liquid and gas nozzle to complete workpiece cleaning and drying, adjusting a laser beam for focusing by using an ultrafast laser processing system to complete laser focusing, and moving an ultraprecise platform to select a micropore processing area;
s3, selecting a laser beam A or a laser beam B for processing according to the thickness of the first-layer composition material of the workpiece and the requirement of micropore taper to process micropores of the first-layer material in a scanning mode, and simultaneously selecting an auxiliary fluid for processing according to the first-layer material components of the workpiece;
s4, after the micropore processing of the first layer of material is finished, spraying liquid to clean through a liquid nozzle and spraying gas through a gas nozzle to dry a micropore processing area, and moving a laser focusing plane downwards to the surface of the second layer of material through an ultrafast laser processing system;
s5, selecting a laser beam A or a laser beam B for processing according to the requirements of the thickness of a second layer of composition material of the workpiece and the taper of the micropores, processing the micropores of the second layer of material in a scanning mode, and simultaneously selecting an auxiliary fluid for processing according to the composition of the second layer of material of the workpiece;
s6, after the micropore processing of the second layer of material is finished, carrying out fluid cleaning and drying on a micropore processing area, and then moving down a laser focusing plane to carry out micropore processing on the next layer of material;
and S7, sequentially processing the micropores of each layer of material of the workpiece according to the steps, then cleaning and drying by using a fluid, and taking down the workpiece to obtain a finished product.
Furthermore, the workpiece is made of a layered composite material, and the number of layers of the material composition is more than or equal to 2.
Furthermore, the laser pulse width of the ultrafast laser processing system is 290 fs-10 ps, the power is 0-20W, the scanning speed is 0-2000 mm/s, the repetition frequency is 1-600 kHz, and the wavelength can be adjusted to ultraviolet light, green light and infrared light.
Further, the laser beam scanning mode of the micropore machining is rotary cutting scanning or spiral scanning.
Further, the fluid is liquid or gas, the liquid is alcohol, acetone or water, the gas is nitrogen, oxygen, argon or air, the injection angle of the fluid is 10-80 degrees, the liquid injection pressure is 0-20 MPa, and the gas injection pressure is 0-1 MPa.
Further, the workpiece is a layered composite material consisting of a metal material and a ceramic material; the metal material is any one of copper, aluminum and titanium, and the ceramic material is any one of silicon nitride, aluminum oxide and aluminum nitride. It should be noted that the metal material and the ceramic material described in the present invention are not limited to the examples given in the present invention, and any metal material or ceramic material in the prior art may also be used.
The working principle of the invention is as follows: for the layered composite material, the performance of each layer of the composition material is different, the integral high-quality micropore processing of the composite material is difficult to complete by using the same laser processing technological parameters, and the micropore processing difficulty with adjustable taper is higher. According to the components of each layer of the layered composite material, corresponding fluid is selected to assist laser processing, so that the stability of the material in the processing process is improved, the chemical reaction of the material is reduced and even avoided, and the impurities in the processing area are reduced. According to the thickness of each layer of composite material and the taper requirement of the micropore, the ultra-fast laser is used for realizing high-precision taper-adjustable micropore processing in a rotary cutting or spiral scanning mode, and the depth-diameter ratio of the micropore is improved. After the micropore processing of each layer of material is finished, the lower layer of material is processed after liquid cleaning and gas drying, the processing slag can be removed, and the micropore processing quality is improved.
In the application, through a large amount of creative labor, the inventor can independently process each layer of material by adopting ultrafast laser according to the thickness of each layer of composition material of the layered composite material workpiece and the requirement of the taper of the micropores, so that the micropore processing precision can be effectively improved, and the controllable processing of the taper of the micropores is facilitated; corresponding fluid can be selected according to the components of each layer of composition material of the composite material workpiece for auxiliary processing, so that the adverse effect of a single atmosphere environment on the material in the processing process, such as easy occurrence of chemical reaction and the like, can be effectively reduced, and the processing quality is improved; after the materials of all layers are processed, liquid cleaning and gas drying are firstly carried out, and then the materials of the lower layer are processed, so that material slag is favorably removed, the depth-diameter ratio of micropores is improved, and the processing efficiency is improved.
The invention has the beneficial effects that:
1. according to the invention, a corresponding ultrafast laser scanning mode is selected according to the material thickness and the requirement of the micropore machining taper, and fluid is matched for auxiliary machining by combining the material components, so that the micropore machining taper controllability and the micropore depth-diameter ratio of the composite material can be greatly improved;
2. the method adopts liquid cleaning and gas drying modes after each layer of material is processed, is beneficial to removing slag generated in the processing process, and effectively improves the micropore processing quality and efficiency.
Drawings
FIG. 1 is a schematic view of a processing apparatus according to the present invention;
FIG. 2 is a schematic structural view of a composite material according to the present invention;
FIG. 3 is a schematic illustration of the process of the present invention;
FIG. 4 is a schematic illustration of the process of the present invention;
FIG. 5 is a schematic illustration of the process of the present invention;
wherein, 1-a working platform; 2-a water tank; 3-ultra-precise platform; 4-a composite workpiece; 41-first layer material; 42-next layer of material; 5-a gas nozzle; 6-laser beam for machining A; 7-a laser beam for focusing; 8-processing laser beam B; 9-a liquid nozzle; 10-micro-machined area.
Detailed Description
The following provides a detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings.
Example 1
A method for machining taper-adjustable micropores by fluid-assisted ultrafast laser comprises the following specific steps: the silicon nitride copper-clad composite material workpiece 4 to be processed is fixed on the ultra-precise platform 3, the gas nozzle 5 and the liquid nozzle 9 are arranged above the workpiece 4, the ultra-precise platform 3 is fixed in the water tank 2, and the water tank 2 is fixed on the working platform 1. Before laser processing, the liquid nozzle 9 and the gas nozzle 5 are used for respectively spraying alcohol and air to complete workpiece cleaning. The alcohol injection angle is 30 degrees, the pressure is 2 MPa, the air injection angle is 30 degrees, and the pressure is 0.3 MPa. And adjusting a focusing laser beam 7 through an ultrafast laser processing system to finish laser focusing, and moving the ultraprecise platform 3 to select the micropore processing area 10. And selecting a laser beam 8 for processing according to the thickness of the copper material on the first layer of the workpiece 4 and the requirement of a positive taper hole, processing micropores in a rotary cutting scanning mode, and simultaneously spraying argon through a gas nozzle 5 to assist laser processing, wherein the spraying angle is 40 degrees, and the pressure is 0.6 MPa. The ultra-fast laser processing system has a laser pulse width of 290fs, a power of 5W, a scanning speed of 500 mm/s, a repetition frequency of 300 kHz and a wavelength of infrared light. After the micro-hole processing of the copper layer material is finished, the micro-hole processing area 10 is dried by spraying acetone cleaning through the liquid nozzle 9 and spraying air through the gas nozzle 5. The acetone injection angle is 50 degrees, the pressure is 2 MPa, the air injection angle is 30 degrees, and the pressure is 0.6 MPa. The laser focusing plane is moved downwards to the surface of the silicon nitride layer material by an ultrafast laser processing system, a laser beam 6 for processing is selected according to the thickness of the silicon nitride material on the second layer of the workpiece 4 and the requirements of a cylindrical hole, a micropore is processed in a spiral scanning mode, nitrogen is sprayed by a gas nozzle 5 to assist laser processing, the spraying angle is 50 degrees, and the pressure is 0.6 MPa. The ultra-fast laser processing system has a laser pulse width of 290fs, a power of 10W, a scanning speed of 1000 mm/s, a repetition frequency of 100 kHz and a wavelength of infrared light. After the micro-hole processing of the silicon nitride layer is completed, the liquid nozzle 9 sprays alcohol cleaning and the gas nozzle 5 sprays air to dry the micro-hole processing region 10. The alcohol injection angle is 80 degrees, the pressure is 15MPa, the air injection angle is 70 degrees, and the pressure is 0.8 MPa. And taking down the silicon nitride copper-clad composite material workpiece 4 to obtain a finished product.
Example 2
A method for machining taper-adjustable micropores by fluid-assisted ultrafast laser comprises the following specific steps: an aluminum oxide-coated composite material workpiece 4 to be processed is fixed on the ultra-precise platform 3, a gas nozzle 5 and a liquid nozzle 9 are arranged above the workpiece 4, the ultra-precise platform 3 is fixed in the water tank 2, and the water tank 2 is fixed on the working platform 1. Before laser processing, the liquid nozzle 9 and the gas nozzle 5 are used for respectively spraying alcohol and air to complete workpiece cleaning. The alcohol injection angle is 20 degrees, the pressure is 1MPa, the air injection angle is 30 degrees, and the pressure is 0.2 MPa. And adjusting a focusing laser beam 7 through an ultrafast laser processing system to finish laser focusing, and moving the ultraprecise platform 3 to select the micropore processing area 10. And selecting a laser beam 6 for processing according to the thickness of the aluminum material of the first layer of the workpiece 4 and the requirements of a cylindrical hole, processing a micropore in a spiral scanning mode, and simultaneously spraying argon through a gas nozzle 5 to assist laser processing, wherein the spraying angle is 50 degrees, and the pressure is 0.8 MPa. The ultra-fast laser processing system has the laser pulse width of 10ps, the power of 3W, the scanning speed of 500 mm/s, the repetition frequency of 100 kHz and the wavelength of ultraviolet light. After the micro-hole processing of the aluminum layer material is finished, the micro-hole processing area 10 is cleaned by spraying acetone through the liquid nozzle 9 and dried by spraying air through the gas nozzle 5. The acetone injection angle is 60 degrees, the pressure is 2 MPa, the air injection angle is 40 degrees, and the pressure is 0.7 MPa. The laser focusing plane is moved downwards to the surface of the alumina layer material through an ultrafast laser processing system, a processing laser beam 6 is selected according to the thickness of the alumina material of the second layer of the workpiece 4 and the requirements of a cylindrical hole, micropores are processed in a rotary cutting scanning mode, meanwhile, oxygen is sprayed through a gas nozzle 5 to assist laser processing, the spraying angle is 70 degrees, and the pressure is 0.8 MPa. The ultra-fast laser processing system has a laser pulse width of 290fs, a power of 5W, a scanning speed of 700 mm/s, a repetition frequency of 500 kHz and a wavelength of infrared light. After the micro-hole processing of the alumina layer is completed, the liquid nozzle 9 sprays alcohol cleaning and the gas nozzle 5 sprays air to dry the micro-hole processing area 10. The alcohol injection angle is 80 degrees, the pressure is 10 MPa, the air injection angle is 80 degrees, and the pressure is 0.8 MPa. And taking down the aluminum oxide coated composite material workpiece 4 to obtain a finished product.
Example 3
A method for machining taper-adjustable micropores by fluid-assisted ultrafast laser comprises the following specific steps: the aluminum nitride titanium-coated composite material workpiece 4 to be processed is fixed on the ultra-precise platform 3, the gas nozzle 5 and the liquid nozzle 9 are arranged above the workpiece 4, the ultra-precise platform 3 is fixed in the water tank 2, and the water tank 2 is fixed on the working platform 1. Before laser processing, the liquid nozzle 9 and the gas nozzle 5 are respectively used for spraying acetone and air to complete workpiece cleaning. The acetone injection angle is 30 degrees, the pressure is 1MPa, the air injection angle is 30 degrees, and the pressure is 0.2 MPa. And adjusting a focusing laser beam 7 through an ultrafast laser processing system to finish laser focusing, and moving the ultraprecise platform 3 to select the micropore processing area 10. And selecting a laser beam 6 for processing according to the thickness of the titanium material on the first layer of the workpiece 4 and the requirements of a cylindrical hole, processing a micropore in a spiral scanning mode, and simultaneously spraying argon through a gas nozzle 5 to assist laser processing, wherein the spraying angle is 30 degrees, and the pressure is 0.7 MPa. The ultra-fast laser processing system has the laser pulse width of 10ps, the power of 3W, the scanning speed of 400 mm/s, the repetition frequency of 100 kHz and the wavelength of green light. After the micropore processing of the titanium layer material is finished, the micropore processing area 10 is cleaned by spraying alcohol through the liquid nozzle 9 and dried by spraying air through the gas nozzle 5. The alcohol injection angle is 50 degrees, the pressure is 3 MPa, the air injection angle is 50 degrees, and the pressure is 0.4 MPa. The laser focusing plane is moved downwards to the surface of the aluminum nitride layer material by an ultrafast laser processing system, a processing laser beam 8 is selected according to the thickness of the aluminum nitride material on the second layer of the workpiece 4 and the requirement of an inverted taper hole to process a micropore in a rotary cutting scanning mode, and nitrogen is sprayed by a gas nozzle 5 to assist laser processing, wherein the spraying angle is 70 degrees, and the pressure is 0.8 MPa. The ultra-fast laser processing system has a laser pulse width of 290fs, a power of 8W, a scanning speed of 700 mm/s, a repetition frequency of 100 kHz and a wavelength of infrared light. After the micro-hole processing of the aluminum nitride layer is completed, the liquid nozzle 9 sprays alcohol cleaning and the gas nozzle 5 sprays air to dry the micro-hole processing area 10. The alcohol injection angle is 80 degrees, the pressure is 10 MPa, the air injection angle is 70 degrees, and the pressure is 0.7 MPa. And taking down the aluminum nitride titanium-clad composite material workpiece 4 to obtain a finished product.
Example 4
The embodiment provides a method for machining a taper-adjustable micropore by using a fluid-assisted ultrafast laser, which is the same as that in embodiment 1, except that a workpiece is a layered composite material consisting of a metal material and a ceramic material; the metal material is titanium, and the ceramic material is alumina.
Example 5
The embodiment provides a method for machining a taper-adjustable micropore by using a fluid-assisted ultrafast laser, which is the same as that in embodiment 2, except that the workpiece is a layered composite material consisting of a metal material and a ceramic material; the metal material is copper, and the ceramic material is aluminum nitride.
Example 6
The embodiment provides a method for machining a taper-adjustable micropore by using a fluid-assisted ultrafast laser, which is the same as that in embodiment 3, except that the workpiece is a layered composite material consisting of a metal material and a ceramic material; the metal material is aluminum, and the ceramic material is silicon nitride.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art. All technical details which are not described in detail in the present invention can be implemented by any prior art in the field.
Claims (3)
1. A method for machining taper-adjustable micropores by fluid-assisted ultrafast laser is characterized by comprising the following specific steps of:
s1, fixing a workpiece on an ultra-precise platform, wherein a gas and liquid nozzle is arranged above the workpiece, the ultra-precise platform is fixed in a water tank, and the water tank is fixed on a working platform;
s2, before laser processing, respectively spraying cleaning liquid and drying gas by using a liquid and gas nozzle to complete workpiece cleaning and drying, adjusting a laser beam for focusing by using an ultrafast laser processing system to complete laser focusing, and moving an ultraprecise platform to select a micropore processing area;
s3, selecting a laser beam A or a laser beam B for processing according to the thickness of the first-layer composition material of the workpiece and the requirement of micropore taper to process micropores of the first-layer material in a scanning mode, and simultaneously selecting an auxiliary fluid for processing according to the material components of the workpiece;
s4, after the micropore processing of the first layer of material is finished, spraying liquid to clean through a liquid nozzle and spraying gas through a gas nozzle to dry a micropore processing area, and moving a laser focusing plane downwards to the surface of the second layer of material through an ultrafast laser processing system;
s5, selecting a laser beam A or a laser beam B for processing according to the requirements of the thickness of a second layer of composition material of the workpiece and the taper of the micropores, processing the micropores of the second layer of material in a scanning mode, and simultaneously selecting an auxiliary fluid for processing according to the composition of the second layer of material of the workpiece;
s6, after the micropore processing of the second layer of material is finished, carrying out fluid cleaning and drying on a micropore processing area, and then moving down a laser focusing plane to carry out micropore processing on the next layer of material;
s7, sequentially processing the micropores of each layer of material of the workpiece according to the steps, then cleaning and drying by using a fluid, and taking down the workpiece to obtain a finished product;
the ultra-fast laser processing system has the advantages that the laser pulse width is 290 fs-10 ps, the power is 0-20W, the scanning speed is 0-2000 mm/s, the repetition frequency is 1-600 kHz, and the wavelength can be adjusted to ultraviolet light, green light and infrared light;
the fluid is liquid or gas, the liquid is alcohol, acetone or water, the gas is nitrogen, oxygen, argon or air, the injection angle of the fluid is 10-80 degrees, the liquid injection pressure is 0-20 MPa, and the gas injection pressure is 0-1 MPa;
the workpiece is a layered composite material consisting of a metal material and a ceramic material; the metal material is any one of copper, aluminum and titanium, and the ceramic material is any one of silicon nitride, aluminum oxide and aluminum nitride.
2. The method of claim 1, wherein the workpiece is a layered composite material and the number of layers of material is greater than or equal to 2.
3. The method of claim 1, wherein the laser beam scanning for micro-via machining is rotational cut scanning or helical scanning.
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| DE102019134004A1 (en) * | 2019-12-11 | 2021-06-17 | Rogers Germany Gmbh | Process for processing a metal-ceramic substrate, system for such a process and metal-ceramic substrates produced with such a process |
| CN111045120B (en) * | 2020-01-02 | 2021-10-26 | 北京理工大学重庆创新中心 | High-pressure gas-assisted CO-based gas turbine2Laser melting microlens manufacturing method |
| CN113909709A (en) * | 2020-07-07 | 2022-01-11 | 大族激光科技产业集团股份有限公司 | Method and device for processing micropores of thrombus removal catheter and thrombus removal catheter |
| CN111943499B (en) * | 2020-07-17 | 2023-04-25 | 中国航空工业集团公司北京长城航空测控技术研究所 | Ultra-fast laser precision cutting method based on ultrasonic nitrogen jet |
| CN111992876B (en) * | 2020-08-31 | 2022-05-20 | 北京理工大学重庆创新中心 | Complex three-dimensional micropore processing method based on laser and liquid interaction regulation and control |
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