CN109128533A - A kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous - Google Patents
A kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous Download PDFInfo
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- CN109128533A CN109128533A CN201811127183.8A CN201811127183A CN109128533A CN 109128533 A CN109128533 A CN 109128533A CN 201811127183 A CN201811127183 A CN 201811127183A CN 109128533 A CN109128533 A CN 109128533A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
- B23K26/384—Removing material by boring or cutting by boring of specially shaped holes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
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Abstract
The present invention provides a kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, comprising the following specific steps securing the workpiece against on Ultraprecise platform, before laser processing, completes workpiece cleaning and drying using cleaning liquid, dry gas；The auxiliary fluid used when requiring selection processing laser beam with the micropore of scanning mode processing first floor material according to the first floor composition material thickness of workpiece and micropore taper, while being processed according to material composition is selected；After the completion of first floor material capillary processing, machining area is washed and dried, then laser focussing plane to lower layer of material surface is moved down by ultrafast laser machining system and carries out capillary processing, while using fluid secondary process process, and then completes processing and obtains finished product.The present invention requires to select corresponding ultrafast laser scanning mode according to material thickness and capillary processing taper, and bond material ingredient is equipped with fluid secondary process, can greatly improve the capillary processing taper controllability and micropore aspect ratio of composite material.
Description
Technical field
The invention belongs to technical field of laser processing, and in particular to a kind of fluid auxiliary ultrafast laser machining composite material cone
Spend adjustable micro porous method.
Background technique
Laser micropore processing is to focus on capillary processing region by high energy laser beam and interact with material, makes it
It is brought rapidly up in a short time to fusing and is even vaporized, and then removed.Due to the focusing and spatial characteristics of laser beam,
The micropore processed is often in certain taper.As the thickness of material increases, the slag of laser processing is deposited in difficult inside micropore
To spray, the depth of capillary processing is restricted, and seriously affects processing quality.Composite material is because combining the superior of multiple material
Characteristic is widely used in fields such as aerospace, auto industry, textile machine and medical instruments, is made of multilayer material
Laminar composite is Typical Representative.It is difficult only with a kind of processing technology since each composition of layer of this kind of composite material is different
To process the micropore of high quality, and the processing controllability difficulty of its micropore taper is bigger.Patent 201510505715.7 proposes
Ultra-short pulse laser steel foil micro molding and taper ameliorative way, using femtosecond infrared laser by profile detour and at present
It is moved into and processes micropore to the mode of focussing plane, though this method can improve to a certain degree micropore taper, applicable material
Extremely limited, for the laminar composite being made of Multiple components, such processing method is unable to satisfy the adjustable need of taper
It asks.Patent CN201610350918.8 proposes a kind of device and method for improving through-hole taper by liquid-scattering, first by swashing
Light processes taper through-hole, then the liquid level reflection laser beam through liquid is with the taper of successive elimination laser processing through-hole.This method
The reflection angle of stability and laser beam to liquid level is more difficult to control, and the energy loss of laser beam after reflection is even more can not be accurate
It calculates, application aspect is difficult to realize.To meet the composite processing demand increasing to demand, urgent need solves its taper can
The capillary processing problem of tune.
Currently, there are following technical problems for the prior art: 1, laser micropore processing shows certain taper, for stratiform
For composite material, the adjustable high quality micropore of taper is difficult to out only with a kind of process；2, composite material is sharp
The high-temperature slag ingredient generated during light capillary processing is different, such as removes not in time, not only make machinable micropore depth by
Limit, and easily react with undressed region and introduce impurity, seriously affect processing quality.
Summary of the invention
In view of this, the present invention provides a kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, the present invention
It requires to select corresponding ultrafast laser scanning mode according to material thickness and capillary processing taper, and bond material ingredient is equipped with stream
Body secondary process can greatly improve the capillary processing taper controllability and micropore aspect ratio of composite material.
The technical solution of the present invention is as follows: a kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, feature
It is, comprising the following specific steps
S1. it secures the workpiece against on Ultraprecise platform, is disposed with gas and fluid injector above workpiece, Ultraprecise platform is fixed on
In sink, sink is fixed on workbench；
S2. it before laser machining, is cleaned using liquid and gas nozzle difference jet cleaning liquid, dry gas completion workpiece and dry
It is dry, then the focusing focusing of laser beam completion laser is adjusted by ultrafast laser machining system, and mobile Ultraprecise platform is selected
Capillary processing region；
S3. require selection processing laser beam A or laser beam B to sweep according to the first floor composition material thickness of workpiece and micropore taper
The mode of retouching processes the micropore of first floor material, while the auxiliary fluid used when processing selected according to the first floor material composition of workpiece；
S4. after the completion of the capillary processing of first floor material, liquid rinse is sprayed through fluid injector and gas nozzle injection gas dry is micro-
Hole machined region, then laser focussing plane is moved down to second layer material surface by ultrafast laser machining system；
S5. according to the second layer composition material thickness of workpiece and micropore taper require selection processing with laser beam A or laser beam B with
Scanning mode processes the micropore of the second layer material, while the auxiliary used when processing selected according to the second layer material composition of workpiece
Fluid；
S6. after the completion of the capillary processing of the second layer material, through fluid cleaning and dry capillary processing region, then laser focusing is moved down
Plane carries out the capillary processing of lower layer of material；
S7. it by this step successively by after the completion of the layers of material capillary processing of workpiece, then cleans through fluid and dry, removes workpiece
Obtain finished product.
Further, the workpiece is laminar composite, and material forms the number of plies >=2.
Further, the laser pulse width of the ultrafast laser machining system is the ps of 290 fs ~ 10, and power is 0 ~ 20 W, is swept
Retouching speed is 0 ~ 2000 mm/s, and repetition rate is 1 ~ 600 kHz, and Wavelength tunable section is ultraviolet light, green light, infrared light.
Further, the laser beam flying mode of the capillary processing is rotary-cut scanning or helical scanning.
Further, the fluid be liquid or gas, the liquid be alcohol, acetone or water, the gas be nitrogen,
Oxygen, argon gas or air, the spray angle of the fluid are 10 ° ~ 80 °, and liquid injection pressure is 0 ~ 20 MPa, gas injection pressure
Power is 0 ~ 1 MPa.
Further, the workpiece is the laminar composite of metal material and ceramic material composition；The metal material
For any one of copper, aluminium, titanium, ceramic material is any one of silicon nitride, aluminium oxide, aluminium nitride.It should be noted that this
The invention metal material, ceramic material be not limited to the present invention for example, in the prior art can also be used
A kind of metal material or ceramic material.
The operation principle of the present invention is that: for laminar composite, the performance of each layer composition material is different, it is difficult to use
Same laser processing technology parameter completes the high quality capillary processing of composite material entirety, and the adjustable capillary processing of taper is difficult
It spends bigger.According to each layer composition material ingredient of laminar composite, selects corresponding fluid auxiliary laser to process, be conducive to mention
The stability of high material in process reduces and even material is avoided to chemically react, reduces the impurity of machining area.Root
According to thickness and micropore the taper requirement of each layer composition material of composite material, through ultrafast laser in a manner of rotary-cut or helical scanning
It is advantageously implemented the adjustable micro porous processing of high-precision taper, and improves micropore aspect ratio.After the completion of layers of material capillary processing, warp
After liquid rinse, gas dry, then subsurface material processing is carried out, processing slag can be removed, improves capillary processing quality.
In the application, inventor keeps the technical solution of the application multiple according to stratiform by a large amount of creative work
Thickness and micropore the taper requirement of each layer composition material of condensation material workpiece individually add to layers of material using ultrafast laser
Work can effectively improve capillary processing precision, be conducive to the controllable processing of micropore taper；It can be according to each layer group of composite material work piece
Secondary process is carried out at the corresponding fluid of component selections at material, can effectively reduce single atmosphere in process to material
The adverse effect of material, such as it is easy to happen chemical reaction, improve processing quality；It is clear that layers of material first carries out liquid after processing is completed
Wash and gas dry, then carry out subsurface material processing, be conducive to remove material slag, improved while improving micropore aspect ratio plus
Work efficiency rate.
The beneficial effects of the present invention are:
1, the present invention requires to select corresponding ultrafast laser scanning mode according to material thickness and capillary processing taper, and combines material
Material ingredient is equipped with fluid secondary process, can greatly improve the capillary processing taper controllability and micropore aspect ratio of composite material；
2, by way of often processing layer of material and using liquid rinse and gas dry, be conducive to remove in process
The slag of generation effectively improves capillary processing quality and efficiency.
Detailed description of the invention
Fig. 1 is processing unit (plant) structural schematic diagram of the present invention；
Fig. 2 is composite structure schematic diagram of the present invention；
Fig. 3 is machining sketch chart of the invention；
Fig. 4 is machining sketch chart of the invention；
Fig. 5 is machining sketch chart of the invention；
Wherein, 1- workbench；2- sink；3- Ultraprecise platform；4- composite material work piece；41- first floor material；Lower layer of 42-
Material；5- gas nozzle；6- processing laser beam A；Laser beam is used in 7- focusing；Laser beam B is used in 8- processing；9- fluid injector；10-
Capillary processing region.
Specific embodiment
Present pre-ferred embodiments are provided with reference to the accompanying drawing, in order to explain the technical scheme of the invention in detail.
Embodiment 1
A kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, comprising the following specific steps by required processing
Silicon nitride covers carbon/carbon-copper composite material workpiece 4 and is fixed on Ultraprecise platform 3, and gas nozzle 5 and fluid injector are disposed with above workpiece 4
9, Ultraprecise platform 3 is fixed in sink 2, and sink 2 is fixed on workbench 1.Before laser processing, fluid injector 9, gas are used
Body nozzle 5 sprays alcohol respectively and air completes workpiece cleaning.Alcohol spray angle is 30 °, and pressure is 2 MPa, air injection
Angle is 30 °, and pressure is 0.3 MPa.The focusing focusing of the completion laser of laser beam 7 is adjusted by ultrafast laser machining system,
And mobile Ultraprecise platform 3 selectes capillary processing region 10.Selection is required according to the copper product thickness of 4 first floor of workpiece and positive taper hole
Processing processes micropore with laser beam 8 with rotary-cut scanning mode, while spraying the processing of argon gas auxiliary laser, spray by gas nozzle 5
Firing angle degree is 40 °, and pressure is 0.6 MPa.The laser pulse width of ultrafast laser machining system is 290 fs, and power is 5 W, scanning speed
Degree is 500 mm/s, and repetition rate is 300 kHz, and wavelength is infrared light.After the completion of the capillary processing of layers of copper material, sprayed through liquid
Mouth 9 sprays acetone cleaning and the injection of gas nozzle 5 is air-dried capillary processing region 10.Acetone spray angle is 50 °, and pressure is
2 MPa, air injection angle degree are 30 °, and pressure is 0.6 MPa.Laser focussing plane is moved down extremely by ultrafast laser machining system
Silicon nitride layer material surface requires selection processing laser beam 6 according to the silicon nitride material thickness of 4 second layer of workpiece and cylindrical hole
Micropore is processed with spiral scan pattern, while the processing of nitrogen auxiliary laser is sprayed by gas nozzle 5, spray angle is 50 °, pressure
Power is 0.6 MPa.Wherein, the laser pulse width of ultrafast laser machining system is 290 fs, and power is 10 W, scanning speed 1000
Mm/s, repetition rate are 100 kHz, and wavelength is infrared light.After the completion of silicon nitride layer capillary processing, fluid injector 9 sprays alcohol
Cleaning and the injection of gas nozzle 5 are air-dried capillary processing region 10.Alcohol spray angle is 80 °, and pressure is 15 MPa, air
Spray angle is 70 °, and pressure is 0.8 MPa.It removes silicon nitride and covers carbon/carbon-copper composite material workpiece 4 and obtain finished product.
Embodiment 2
A kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, comprising the following specific steps by required processing
Aluminium oxide covers aluminium composite material workpiece 4 and is fixed on Ultraprecise platform 3, and gas nozzle 5 and fluid injector are disposed with above workpiece 4
9, Ultraprecise platform 3 is fixed in sink 2, and sink 2 is fixed on workbench 1.Before laser processing, fluid injector 9, gas are used
Body nozzle 5 sprays alcohol respectively and air completes workpiece cleaning.Alcohol spray angle is 20 °, and pressure is 1 MPa, air injection
Angle is 30 °, and pressure is 0.2 MPa.The focusing focusing of the completion laser of laser beam 7 is adjusted by ultrafast laser machining system,
And mobile Ultraprecise platform 3 selectes capillary processing region 10.Selection is required according to the aluminum material thickness of 4 first floor of workpiece and cylindrical hole
Processing processes micropore with laser beam 6 with spiral scan pattern, while spraying the processing of argon gas auxiliary laser, spray by gas nozzle 5
Firing angle degree is 50 °, and pressure is 0.8 MPa.The laser pulse width of ultrafast laser machining system is 10 ps, and power is 3 W, scanning speed
Degree is 500 mm/s, and repetition rate is 100 kHz, and wavelength is ultraviolet light.After the completion of the capillary processing of aluminium layer material, sprayed through liquid
Mouth 9 sprays acetone cleaning and the injection of gas nozzle 5 is air-dried capillary processing region 10.Acetone spray angle is 60 °, and pressure is
2 MPa, air injection angle degree are 40 °, and pressure is 0.7 MPa.Laser focussing plane is moved down extremely by ultrafast laser machining system
Alumina layer material surface requires selection processing laser beam 6 according to the alumina material thickness of 4 second layer of workpiece and cylindrical hole
Micropore is processed with rotary-cut scanning mode, while the processing of oxygen auxiliary laser is sprayed by gas nozzle 5, spray angle is 70 °, pressure
Power is 0.8 MPa.Wherein, the laser pulse width of ultrafast laser machining system is 290 fs, power 5W, scanning speed 700
Mm/s, repetition rate are 500 kHz, and wavelength is infrared light.After the completion of alumina layer capillary processing, fluid injector 9 sprays alcohol
Cleaning and the injection of gas nozzle 5 are air-dried capillary processing region 10.Alcohol spray angle is 80 °, and pressure is 10 MPa, air
Spray angle is 80 °, and pressure is 0.8 MPa.It removes aluminium oxide and covers aluminium composite material workpiece 4 and obtain finished product.
Embodiment 3
A kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, comprising the following specific steps by required processing
Aluminium nitride covers titanium composite material workpiece 4 and is fixed on Ultraprecise platform 3, and gas nozzle 5 and fluid injector are disposed with above workpiece 4
9, Ultraprecise platform 3 is fixed in sink 2, and sink 2 is fixed on workbench 1.Before laser processing, fluid injector 9, gas are used
Body nozzle 5 sprays acetone respectively and air completes workpiece cleaning.Acetone spray angle is 30 °, and pressure is 1 MPa, air injection
Angle is 30 °, and pressure is 0.2 MPa.The focusing focusing of the completion laser of laser beam 7 is adjusted by ultrafast laser machining system,
And mobile Ultraprecise platform 3 selectes capillary processing region 10.Selection is required according to the titanium material thickness of 4 first floor of workpiece and cylindrical hole
Processing processes micropore with laser beam 6 with spiral scan pattern, while spraying the processing of argon gas auxiliary laser, spray by gas nozzle 5
Firing angle degree is 30 °, and pressure is 0.7 MPa.The laser pulse width of ultrafast laser machining system is 10 ps, and power is 3 W, scanning speed
Degree is 400 mm/s, and repetition rate is 100 kHz, and wavelength is green light.After the completion of the capillary processing of titanium layer material, through fluid injector
9 injection alcohol washes and the injection of gas nozzle 5 are air-dried capillary processing region 10.Alcohol spray angle is 50 °, pressure 3
MPa, air injection angle degree are 50 °, and pressure is 0.4 MPa.Laser focussing plane is moved down to nitrogen by ultrafast laser machining system
Change aluminium layer material surface, according to the aluminium nitride material thickness of 4 second layer of workpiece and reverse taper holes require selection processing with laser beam 8 with
Rotary-cut scanning mode processes micropore, while spraying the processing of nitrogen auxiliary laser by gas nozzle 5, and spray angle is 70 °, pressure
For 0.8 MPa.Wherein, the laser pulse width of ultrafast laser machining system is 290 fs, and power 8W, scanning speed is 700 mm/
S, repetition rate are 100 kHz, and wavelength is infrared light.After the completion of aln layer capillary processing, fluid injector 9 sprays alcohol washes
And the injection of gas nozzle 5 is air-dried capillary processing region 10.Alcohol spray angle is 80 °, and pressure is 10 MPa, air injection
Angle is 70 °, and pressure is 0.7 MPa.It removes aluminium nitride and covers titanium composite material workpiece 4 and obtain finished product.
Embodiment 4
The present embodiment provides a kind of method that fluid auxiliary ultrafast laser processing taper same as Example 1 is adjustable micro porous, institutes
Unlike, the workpiece is the laminar composite of metal material and ceramic material composition；The metal material is titanium, ceramics
Material is aluminium oxide.
Embodiment 5
The present embodiment provides a kind of method that fluid auxiliary ultrafast laser processing taper same as Example 2 is adjustable micro porous, institutes
Unlike, the workpiece is the laminar composite of metal material and ceramic material composition；The metal material is copper, ceramics
Material is aluminium nitride.
Embodiment 6
The present embodiment provides a kind of method that fluid auxiliary ultrafast laser processing taper same as Example 3 is adjustable micro porous, institutes
Unlike, the workpiece is the laminar composite of metal material and ceramic material composition；The metal material is aluminium, ceramics
Material is silicon nitride.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment only includes one
A independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should will say
As a whole, the technical solutions in the various embodiments may also be suitably combined for bright book, and forming those skilled in the art can be with
The other embodiments of understanding.It, can be any existing by this field for the technical detail of not detailed descriptions all in the present invention
There is technology realization.
Claims (7)
1. a kind of method that fluid auxiliary ultrafast laser processing taper is adjustable micro porous, which is characterized in that comprising the following specific steps
S1. it secures the workpiece against on Ultraprecise platform, is disposed with gas and fluid injector above workpiece, Ultraprecise platform is fixed on
In sink, sink is fixed on workbench；
S2. it before laser machining, is cleaned using liquid and gas nozzle difference jet cleaning liquid, dry gas completion workpiece and dry
It is dry, then the focusing focusing of laser beam completion laser is adjusted by ultrafast laser machining system, and mobile Ultraprecise platform is selected
Capillary processing region；
S3. require selection processing laser beam A or laser beam B to sweep according to the first floor composition material thickness of workpiece and micropore taper
The mode of retouching processes the micropore of first floor material, while the auxiliary fluid used when processing selected according to the material composition of workpiece；
S4. after the completion of the capillary processing of first floor material, liquid rinse is sprayed through fluid injector and gas nozzle injection gas dry is micro-
Hole machined region, then laser focussing plane is moved down to second layer material surface by ultrafast laser machining system；
S5. according to the second layer composition material thickness of workpiece and micropore taper require selection processing with laser beam A or laser beam B with
Scanning mode processes the micropore of the second layer material, while the auxiliary used when processing selected according to the second layer material composition of workpiece
Fluid；
S6. after the completion of the capillary processing of the second layer material, through fluid cleaning and dry capillary processing region, then laser focusing is moved down
Plane carries out the capillary processing of lower layer of material；
S7. it by this step successively by after the completion of the layers of material capillary processing of workpiece, then cleans through fluid and dry, removes workpiece
Obtain finished product.
2. a kind of adjustable micro porous method of fluid auxiliary ultrafast laser processing taper according to claim 1, feature exist
In the workpiece is laminar composite, and material forms the number of plies >=2.
3. a kind of adjustable micro porous method of fluid auxiliary ultrafast laser processing taper according to claim 1, feature exist
In the laser pulse width of the ultrafast laser machining system is the ps of 290 fs ~ 10, and power is 0 ~ 20 W, and scanning speed is 0 ~ 2000
Mm/s, repetition rate are 1 ~ 600 kHz, and Wavelength tunable section is ultraviolet light, green light, infrared light.
4. a kind of adjustable micro porous method of fluid auxiliary ultrafast laser processing taper according to claim 1, feature exist
In the laser beam flying mode of the capillary processing is rotary-cut scanning or helical scanning.
5. a kind of adjustable micro porous method of fluid auxiliary ultrafast laser processing taper according to claim 1, feature exist
In the fluid is liquid or gas, and the liquid is alcohol, acetone or water, and the gas is nitrogen, oxygen, argon gas or sky
Gas, the spray angle of the fluid are 10 ° ~ 80 °, and liquid injection pressure is 0 ~ 20 MPa, and gas jet pressure is 0 ~ 1 MPa.
6. a kind of adjustable micro porous method of fluid auxiliary ultrafast laser processing taper according to claim 2, feature exist
In the workpiece is the laminar composite of metal material and ceramic material composition.
7. metal material according to claim 6 is any one of copper, aluminium, titanium, ceramic material is silicon nitride, oxidation
Any one of aluminium, aluminium nitride.
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| CN111943499A (en) * | 2020-07-17 | 2020-11-17 | 中国航空工业集团公司北京长城航空测控技术研究所 | Ultrafast laser precision cutting method based on ultrasonic nitrogen jet |
| CN111992876A (en) * | 2020-08-31 | 2020-11-27 | 北京理工大学重庆创新中心 | Complex three-dimensional micropore machining method based on laser and liquid interaction regulation and control |
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| CN112824004A (en) * | 2019-11-20 | 2021-05-21 | 中国科学院宁波材料技术与工程研究所 | Composite water-assisted laser processing system and processing method thereof |
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| CN113909709A (en) * | 2020-07-07 | 2022-01-11 | 大族激光科技产业集团股份有限公司 | Method and device for processing micropores of thrombus removal catheter and thrombus removal catheter |
| CN111943499A (en) * | 2020-07-17 | 2020-11-17 | 中国航空工业集团公司北京长城航空测控技术研究所 | Ultrafast laser precision cutting method based on ultrasonic nitrogen jet |
| CN111992876A (en) * | 2020-08-31 | 2020-11-27 | 北京理工大学重庆创新中心 | Complex three-dimensional micropore machining method based on laser and liquid interaction regulation and control |
| CN111992876B (en) * | 2020-08-31 | 2022-05-20 | 北京理工大学重庆创新中心 | Complex three-dimensional micropore processing method based on laser and liquid interaction regulation and control |
| CN113146074A (en) * | 2021-02-25 | 2021-07-23 | 贵阳航发精密铸造有限公司 | Machining method of air film hole in turbine blade |
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