CN109119531A - 柔性传感器的制造方法 - Google Patents
柔性传感器的制造方法 Download PDFInfo
- Publication number
- CN109119531A CN109119531A CN201810917285.3A CN201810917285A CN109119531A CN 109119531 A CN109119531 A CN 109119531A CN 201810917285 A CN201810917285 A CN 201810917285A CN 109119531 A CN109119531 A CN 109119531A
- Authority
- CN
- China
- Prior art keywords
- manufacturing
- flexible sensor
- etching
- boss
- sensor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 56
- 238000005530 etching Methods 0.000 claims abstract description 42
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 28
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 17
- 239000010703 silicon Substances 0.000 claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 16
- 239000012528 membrane Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000000151 deposition Methods 0.000 claims abstract description 12
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 8
- 239000011248 coating agent Substances 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims abstract description 4
- 210000000452 mid-foot Anatomy 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 7
- 238000001259 photo etching Methods 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229960002050 hydrofluoric acid Drugs 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- VDGJOQCBCPGFFD-UHFFFAOYSA-N oxygen(2-) silicon(4+) titanium(4+) Chemical compound [Si+4].[O-2].[O-2].[Ti+4] VDGJOQCBCPGFFD-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810917285.3A CN109119531B (zh) | 2018-08-13 | 2018-08-13 | 柔性传感器的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810917285.3A CN109119531B (zh) | 2018-08-13 | 2018-08-13 | 柔性传感器的制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109119531A true CN109119531A (zh) | 2019-01-01 |
CN109119531B CN109119531B (zh) | 2020-01-07 |
Family
ID=64853274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810917285.3A Active CN109119531B (zh) | 2018-08-13 | 2018-08-13 | 柔性传感器的制造方法 |
Country Status (1)
Country | Link |
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CN (1) | CN109119531B (zh) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101866880A (zh) * | 2009-04-16 | 2010-10-20 | 先进开发光电股份有限公司 | 分离基板与半导体层的方法 |
US20150224324A1 (en) * | 2014-02-12 | 2015-08-13 | Korea Advanced Institute Of Science And Technology | Method for separating nanogenerator and method for manufacturing nanogenerator using the same |
US20150349136A1 (en) * | 2014-05-30 | 2015-12-03 | Electronics And Telecommunications Research Institute | Semiconductor device and method for manufacturing the same |
CN107968109A (zh) * | 2017-11-21 | 2018-04-27 | 武汉华星光电半导体显示技术有限公司 | 柔性oled显示面板及其制备方法、显示装置 |
-
2018
- 2018-08-13 CN CN201810917285.3A patent/CN109119531B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101866880A (zh) * | 2009-04-16 | 2010-10-20 | 先进开发光电股份有限公司 | 分离基板与半导体层的方法 |
US20150224324A1 (en) * | 2014-02-12 | 2015-08-13 | Korea Advanced Institute Of Science And Technology | Method for separating nanogenerator and method for manufacturing nanogenerator using the same |
US20150349136A1 (en) * | 2014-05-30 | 2015-12-03 | Electronics And Telecommunications Research Institute | Semiconductor device and method for manufacturing the same |
CN107968109A (zh) * | 2017-11-21 | 2018-04-27 | 武汉华星光电半导体显示技术有限公司 | 柔性oled显示面板及其制备方法、显示装置 |
Also Published As
Publication number | Publication date |
---|---|
CN109119531B (zh) | 2020-01-07 |
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Effective date of registration: 20220412 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University |
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Effective date of registration: 20220826 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |
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