CN109103134A - The label streamlined Preparation equipment of chip - Google Patents
The label streamlined Preparation equipment of chip Download PDFInfo
- Publication number
- CN109103134A CN109103134A CN201811017530.1A CN201811017530A CN109103134A CN 109103134 A CN109103134 A CN 109103134A CN 201811017530 A CN201811017530 A CN 201811017530A CN 109103134 A CN109103134 A CN 109103134A
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- print head
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- 238000002360 preparation method Methods 0.000 title claims abstract description 26
- 238000007639 printing Methods 0.000 claims abstract description 56
- 230000007246 mechanism Effects 0.000 claims abstract description 41
- 238000012937 correction Methods 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 13
- 230000007717 exclusion Effects 0.000 claims description 13
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 230000033001 locomotion Effects 0.000 claims description 5
- 230000004886 head movement Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 18
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000009776 industrial production Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 208000002925 dental caries Diseases 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Specific Conveyance Elements (AREA)
- Labeling Devices (AREA)
Abstract
The present invention relates to industrial automation equipments, more specifically to a kind of Automatic Conveying and storage device for chip.The label streamlined Preparation equipment of chip, comprising: for pio chip body converge track, the receiving pipeline for receiving chip body, the rotating machine arm for arranging and carrying chip body, for chip body progress label printing printing mechanism, for the corrected adjusting mechanism in position to chip body.The label streamlined Preparation equipment of chip of the present invention, Automatic Conveying and manufacture for realizing chip.
Description
Technical field
The present invention relates to industrial automation equipments, equip more specifically to a kind of automated manufacturing for chip.
Background technique
Industrial automation is that automatic control, automatic regulating apparatus are widely used in the industrial production, to replace artificial behaviour
The trend that vertical machine and machine architecture are processed.Under the conditions of industrial production automation, people only look after indirectly and
Supervision machine is produced.Industrial automation can be divided by its developing stage: (1) semi-automatic.I.e. part is using automatic control
System and automatic device, and another part is then produced by manual operation machine.(2) full-automatic.Refer in production process all
Process, including feeding, blanking, handling etc. are all not required to very important person and directly carry out production operation (people only keeps an eye on and supervises indirectly
Machine run), and continuously, repeatedly produce one or a collection of product automatically by machine.
Industrial automation technology is a kind of with control theory, instrument and meter, computer and other information technology, to industry
Production process realize detection, control, optimization, scheduling, management and decision, reach increase yield, improve quality, reduce consumption, really
The comprehensive high-tech of the purpose of ensuring safety, including Industrial Automation Software, hardware and system three parts.Industrial automation skill
Art mainly solves production efficiency and consistency problem as one of most important technology in 20th century modern manufacturing field.No matter
Flexible, flexible and customization enterprise is still pursued by high speed high-volume manufacturing enterprise, it is necessary to by the application of automatic technology.
Automated system itself does not create benefit directly, but it plays the effect of being obviously improved to enterprise production process:
(1) safety of production process is improved；
(2) production efficiency is improved；
(3) product quality is improved；
(4) raw material, the energy loss of production process are reduced.
In process of production, the carrying and conveying of traditional chip are all manual modes, cause the consistency of product low,
The automated production that chip manufacturing operation is realized using industrial automation technology, is had important practical significance.
Summary of the invention
The object of the present invention is to provide a kind of label streamlined Preparation equipments of chip, apply the manufacture in chip
Cheng Zhong；The label streamlined Preparation equipment of chip of the present invention, the automation for realizing chip are put and are conveyed.
A kind of label streamlined Preparation equipment of chip, comprising: converge track, for receiving core for pio chip body
The receiving pipeline of sheet body, the rotating machine arm for arranging and carrying chip body, for the carry out label printing to chip body
Printing mechanism, for the corrected adjusting mechanism in position to chip body；
The printing mechanism includes: printing support, print head up-down mechanism, pattern delivering mechanism, above and below the print head
Movement mechanism, pattern delivering mechanism are fixed on the printing support, and the print head up-down mechanism driving print head carries out
It moves up and down, the pattern delivering mechanism is used to provide pattern for the print head；The print head up-down mechanism includes:
Print head upper and lower air cylinders, print head guide rail, printing head substrate, Turbogrid plates, opposite type sensor, print head, printing head slider, it is described
The cylinder block of print head upper and lower air cylinders, printing head slider are fixed on the printing support, and the print head guide rail is movably connected on
The printing head slider, one end of the print head guide rail are fixed on the printing head substrate, the print head upper and lower air cylinders
The end of piston rod is fixed on the printing head substrate, and the print head is fixed on the lower part of the printing head substrate；The grid
Panel is fixed on the printing head substrate, and the opposite type sensor is fixed on the printing support, the Turbogrid plates and passes to penetrating
Sensor matches；The pattern delivering mechanism includes: oil can, pattern slide plate, pattern cylinder, oil can baffle, the pattern slide plate
It is movably connected on the printing support by linear guide, it is sliding that the end of the piston rod of the pattern cylinder is fixed on the pattern
Plate, the oil can are movably connected on the pattern slide plate, and the oil can baffle is fixed on the printing support, the oil can baffle
For preventing the oil can from being taken away by the pattern slide plate.
Preferably, the adjusting mechanism includes: that front limit baffle, front apron cylinder, V-type groove, side push and block plate, side push away gas
Cylinder, the end of the piston rod of the front apron cylinder are fixed on the front limit baffle, set in front of the front limit baffle
It is equipped with the V-type groove, the V-type groove and the front limit baffle match；The end of the piston rod of the side push cylinder
It is fixed on the side push and block plate, the side push and block plate is for chip body to be fitly aligned.
Preferably, the track that converges includes: track support, conveyer belt, No.1 correction cylinder, No. two corrections cylinders, three
Number correction cylinder, transmission shaft coupling, half of bracket, excludes cylinder, excludes push plate, guide pad, the track branch transmission translator
Frame is fixed on the workbench, and the conveyer belt is movably connected on the track support, and the transmission translator passes through the biography
Shaft coupling is sent to drive the conveyer belt movement；The No.1 correction gas of the position for correcting chip is provided on the track support
Cylinder, No. two correction cylinders, No. three correction cylinders；The end of the track support is provided with the half of bracket, described one side of something
Bracket holds the both ends of chip, and the centre of one side of something bracket is provided with the channel for passing through the rotating machine arm；It is described
The cylinder block of exclusion cylinder, guide pad are fixed on the track support, and the exclusion push plate is movably connected on the guide pad, institute
It states and excludes the end that push plate is fixed on the exclusion cylinder piston rod, chip can be accommodated by being provided in the exclusion push plate
Pusher cavity.
The receiving pipeline includes: to receive bracket, secondary conveyer belt, and the pair conveyer belt is movably connected on the receiving branch
On frame, the quantity of the pair conveyer belt is two, and at being arranged in juxtaposition, the centre of the pair conveyer belt is provided with the pair conveyer belt
For passing through the channel of the rotating machine arm；
The rotating machine arm includes: turning motor, Cam splitter, rotary flange, rotary support, full wind-up, described convex
The shell of wheel divider is fixed on the rotary support, and the output shaft fixed connection of the turning motor is in the defeated of the Cam splitter
Enter axis, the rotary flange is fixed on the output flange of the Cam splitter；The Cam splitter is in the revolution electricity
90 degree are rotated under the driving of machine every time；The quantity of the full wind-up is four, and radial equipartition is on the rotary flange, institute
Stating full wind-up array has vacuum chuck.
The full wind-up will be located at described from the lower part of the half of bracket to the ionized motion of the half of bracket
The chip of half of bracket is sucked；The full wind-up reaches the top of the secondary conveyer belt, and the full wind-up discharges chip, core
Piece is fallen on the secondary conveyer belt.
Detailed description of the invention
Fig. 1 is the general structure schematic diagram of the label streamlined Preparation equipment of chip of the present invention；
Fig. 2,3 be chip of the present invention label streamlined Preparation equipment printing mechanism structural schematic diagram；
Fig. 4,5,6 are the structural schematic diagrams for converging track of the label streamlined Preparation equipment of chip of the present invention；
Fig. 7 is the structural schematic diagram of the receiving pipeline of the label streamlined Preparation equipment of chip of the present invention.
Marked in the figure:
112 track supports, 113 conveyer belts, 114 No.1s correct cylinder, 115 No. two correction cylinders, 116 No. three correction gas
Cylinder, 117 transmission translators, 118 transmission shaft couplings, 119 half of brackets, 120 exclude cylinder, 121 exclusion push plates, 122
Guide pad, 123 pusher cavitys, 130 rotating machine arms, 131 turning motors, 132 harmonic speed reducers, 133 rotary flanges,
134 rotary supports, 135 full wind-ups, 140 receive pipeline, 141 to receive bracket, 142 secondary conveyer belts, 145 adjusting machines
Structure, 146 front limit baffles, 147 front apron cylinders, 148 V-type grooves, 149 side push and block plates, 150 side push cylinder, 155 prints
Brush mechanism, 156 print head up-down mechanisms, 157 pattern delivering mechanisms, 160 print head upper and lower air cylinders, 161 print heads
Guide rail, 162 printing head substrates, 163 Turbogrid plates, 164 opposite type sensors, 165 print heads, 166 printing head sliders, 167
Printing support, 170 oil cans, 171 pattern slide plates, 172 pattern cylinders.
Specific embodiment
The present invention is described in further detail below in conjunction with attached drawing, but does not constitute any limitation of the invention,
Similar element numbers represent similar element in attached drawing.As described above, the present invention provides a kind of label streamlineds of chip
Preparation equipment is applied in the manufacturing process of chip；The label streamlined Preparation equipment of chip of the present invention, for realizing chip
Automatic Conveying and manufacture.
Fig. 1 is the general structure schematic diagram of the label streamlined Preparation equipment of chip of the present invention, and Fig. 2,3 are chips of the present invention
Label streamlined Preparation equipment the structural schematic diagram for converging track, Fig. 4 be chip of the present invention label streamlined preparation set
The structural schematic diagram of standby receiving pipeline.
A kind of label streamlined Preparation equipment of chip, comprising: converge track 103, for connecing for pio chip body 7
The receiving pipeline 140 of nano chip body 7, the rotating machine arm 130 for arranging and carrying chip body 7, for chip body 7
Carry out the printing mechanism 155 of label printing, for the corrected adjusting mechanism 145 in position to chip body 7；
The printing mechanism 155 includes: printing support 167, print head up-down mechanism 156, pattern delivering mechanism 157, institute
State print head up-down mechanism 156, pattern delivering mechanism 157 is fixed on the printing support 167, fortune above and below the print head
Motivation structure 156 drives print head 165 to move up and down, and the pattern delivering mechanism 157 is used to provide for the print head 165
Pattern；The print head up-down mechanism 156 includes: print head upper and lower air cylinders 160, print head guide rail 161, printing head substrate
162, Turbogrid plates 163, opposite type sensor 164, print head 165, printing head slider 166, the gas of the print head upper and lower air cylinders 160
Cylinder body, printing head slider 166 are fixed on the printing support 167, and the print head guide rail 161 is movably connected on the print head
Sliding block 166, one end of the print head guide rail 161 are fixed on the printing head substrate 162, the print head upper and lower air cylinders 160
The end of piston rod be fixed on the printing head substrate 162, the print head 165 is fixed on the printing head substrate 162
Lower part；The Turbogrid plates 163 are fixed on the printing head substrate 162, and the opposite type sensor 164 is fixed on the printing support
167, the Turbogrid plates 163 and opposite type sensor 164 match；The pattern delivering mechanism 157 includes: oil can 170, pattern cunning
Plate 171, pattern cylinder 172, oil can baffle 173, the pattern slide plate 171 are movably connected on the printing branch by linear guide
Frame 167, the end of the piston rod of the pattern cylinder 172 are fixed on the pattern slide plate 171, and the oil can 170 is flexibly connected
In the pattern slide plate 171, the oil can baffle 173 is fixed on the printing support 167, and the oil can baffle 173 is for preventing
Only the oil can 170 is taken away by the pattern slide plate 171.
More specifically, the adjusting mechanism 145 include: front limit baffle 146, front apron cylinder 147, V-type groove 148,
Side push and block plate 149, side push cylinder 150, the end of the piston rod of the front apron cylinder 147 are fixed on the front limit baffle
146, the front of the front limit baffle 146 is provided with the V-type groove 148, the V-type groove 148 and the front limit
Baffle 146 matches；The end of the piston rod of the side push cylinder 150 is fixed on the side push and block plate 149, the side push and block plate
149 for chip body 7 to be fitly aligned.
More specifically, the track 103 that converges includes: track support 112, conveyer belt 113, No.1 correction cylinder 114, two
Number correction 115, No. three correction cylinders 116 of cylinder, transmission translator 117, transmission shaft coupling 118, half of bracket 119, exclusion gas
Cylinder 120 excludes push plate 121, guide pad 122, and the track support 112 is fixed on the workbench 65, and the conveyer belt 113 is living
Dynamic to be connected to the track support 112, the transmission translator 117 drives the conveyer belt by the transmission shaft coupling 118
113 movements；It is provided on the track support 112 and corrects 114, No. two schools of cylinder for the No.1 of the position of correcting chip body 7
115, No. three correction cylinders 116 of positive cylinder；The end of the track support 112 is provided with the half of bracket 119, described half
Side bracket 119 holds the both ends of chip body 7, and the centre of one side of something bracket 119 is provided with for by the rotating machine arm
130 channel；The cylinder block for excluding cylinder 120, guide pad 122 are fixed on the track support 112, the exclusion push plate
121 are movably connected on the guide pad 122, and the exclusion push plate 121 is fixed on the end for excluding 120 piston rod of cylinder,
The pusher cavity 123 that can accommodate chip body 7 is provided in the exclusion push plate 121.
The receiving pipeline 140 includes: to receive bracket 141, secondary conveyer belt 142, and the pair conveyer belt 142 is flexibly connected
In on the receiving bracket 141, the quantity of the pair conveyer belt 142 is two, and the pair conveyer belt 142 is at being arranged in juxtaposition, institute
The centre for stating secondary conveyer belt 142 is provided with for the channel by the rotating machine arm 130；
The rotating machine arm 130 include: turning motor 131, Cam splitter 132, rotary flange 133, rotary support 134,
Full wind-up 135, the shell of the Cam splitter 132 are fixed on the rotary support 134, the turning motor 131 it is defeated
Shaft is fixed on the input shaft of the Cam splitter 132, and the rotary flange 133 is fixed on the Cam splitter 132
On output flange；The Cam splitter 132 rotates 90 degree under the driving of the turning motor 131 every time；The rotation
The quantity of arm 135 is four, and for radial equipartition on the rotary flange 133,135 array of full wind-up has vacuum suction
Disk.
The full wind-up 135 from the lower part of the half of bracket 119 to the ionized motion of the half of bracket 119, and
The chip body 7 for being located at the half of bracket 119 is sucked；The full wind-up 135 reaches the top of the secondary conveyer belt 142,
The full wind-up 135 discharges chip body 7, and chip body 7 is fallen on the secondary conveyer belt 142.
Finally it is pointed out that above embodiments be only chip of the present invention label streamlined Preparation equipment it is more representative
Example.Obviously, the label streamlined Preparation equipment of chip of the present invention is not limited to the above embodiments, and acceptable there are many deformations.
The technical spirit of the label streamlined Preparation equipment of all chips according to the present invention is to the above embodiments any simply to repair
Change, equivalent variations and modification, is considered as belonging to the protection scope of the label streamlined Preparation equipment of chip of the present invention.
Claims (5)
1. a kind of label streamlined Preparation equipment of chip characterized by comprising for pio chip body converge track,
For receive the receiving pipeline of chip body, the rotating machine arm for arranging and carrying chip body, for chip body into
Row label printing printing mechanism, for the corrected adjusting mechanism in position to chip body；
The printing mechanism includes: printing support, print head up-down mechanism, pattern delivering mechanism, above and below the print head
Movement mechanism, pattern delivering mechanism are fixed on the printing support, and the print head up-down mechanism driving print head carries out
It moves up and down, the pattern delivering mechanism is used to provide pattern for the print head；The print head up-down mechanism includes:
Print head upper and lower air cylinders, print head guide rail, printing head substrate, Turbogrid plates, opposite type sensor, print head, printing head slider, it is described
The cylinder block of print head upper and lower air cylinders, printing head slider are fixed on the printing support, and the print head guide rail is movably connected on
The printing head slider, one end of the print head guide rail are fixed on the printing head substrate, the print head upper and lower air cylinders
The end of piston rod is fixed on the printing head substrate, and the print head is fixed on the lower part of the printing head substrate；The grid
Panel is fixed on the printing head substrate, and the opposite type sensor is fixed on the printing support, the Turbogrid plates and passes to penetrating
Sensor matches；The pattern delivering mechanism includes: oil can, pattern slide plate, pattern cylinder, oil can baffle, the pattern slide plate
It is movably connected on the printing support by linear guide, it is sliding that the end of the piston rod of the pattern cylinder is fixed on the pattern
Plate, the oil can are movably connected on the pattern slide plate, and the oil can baffle is fixed on the printing support, the oil can baffle
For preventing the oil can from being taken away by the pattern slide plate.
2. the label streamlined Preparation equipment of chip according to claim 1, which is characterized in that the adjusting mechanism packet
It includes: front limit baffle, front apron cylinder, V-type groove, side push and block plate, side push cylinder, the end of the piston rod of the front apron cylinder
End is fixed on the front limit baffle, is provided with the V-type groove in front of the front limit baffle, the V-type groove and
The front limit baffle matches；The end of the piston rod of the side push cylinder is fixed on the side push and block plate, the side push and block
Plate is for chip body to be fitly aligned.
3. the label streamlined Preparation equipment of chip according to claim 1, which is characterized in that described to converge track packet
It includes: track support, conveyer belt, No.1 correction cylinder, No. two correction cylinders, No. three correction cylinders, transmission translator, transmission shaft coupling
Device, excludes cylinder, excludes push plate, guide pad half of bracket, and the track support is fixed on the workbench, the conveyer belt
It is movably connected on the track support, the transmission translator drives the conveyer belt movement by the transmission shaft coupling；Institute
State No.1 the correction cylinder, No. two correction cylinders, No. three correction cylinders that the position for correcting chip is provided on track support；
The end of the track support is provided with the half of bracket, one side of something bracket holds the both ends of chip, the half of branch
The centre of frame is provided with the channel for passing through the rotating machine arm；The cylinder block for excluding cylinder, guide pad are fixed on
The track support, the exclusion push plate are movably connected on the guide pad, and the exclusion push plate is fixed on the exclusion cylinder
The end of piston rod is provided with the pusher cavity that can accommodate chip in the exclusion push plate.
4. the label streamlined Preparation equipment of chip according to claim 1, which is characterized in that the receiving pipeline packet
It includes: receiving bracket, secondary conveyer belt, the pair conveyer belt is movably connected on the receiving bracket, the quantity of the pair conveyer belt
It is two, at being arranged in juxtaposition, the centre of the pair conveyer belt is provided with for by the rotating machine arm pair conveyer belt
Channel.
5. the label streamlined Preparation equipment of chip according to claim 1, which is characterized in that the rotating machinery handbag
Include: the shell of turning motor, Cam splitter, rotary flange, rotary support, full wind-up, the Cam splitter is fixed on
The rotary support, for the output shaft fixed connection of the turning motor in the input shaft of the Cam splitter, the rotary flange is solid
It is connected on the output flange of the Cam splitter；The Cam splitter rotates nine under the driving of the turning motor every time
Ten degree；The quantity of the full wind-up is four, and for radial equipartition on the rotary flange, the full wind-up array has vacuum
Sucker.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811017530.1A CN109103134B (en) | 2018-09-01 | 2018-09-01 | Chip label streamlined preparation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811017530.1A CN109103134B (en) | 2018-09-01 | 2018-09-01 | Chip label streamlined preparation equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109103134A true CN109103134A (en) | 2018-12-28 |
| CN109103134B CN109103134B (en) | 2021-07-30 |
Family
ID=64864785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811017530.1A Active CN109103134B (en) | 2018-09-01 | 2018-09-01 | Chip label streamlined preparation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109103134B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040121493A1 (en) * | 2002-12-24 | 2004-06-24 | Eo Technics Co., Ltd. | Chip scale marker and method of calibrating marking position |
| KR20090012977A (en) * | 2007-07-31 | 2009-02-04 | 킹 유안 일렉트로닉스 코포레이션 리미티드 | Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment |
| CN101409240A (en) * | 2008-03-21 | 2009-04-15 | 北京德鑫泉科技发展有限公司 | Intelligent label capable of using chip and equipment for producing flip-chip module |
| CN102419822A (en) * | 2010-09-24 | 2012-04-18 | 株式会社日立高新技术仪器 | Tool management method of die bonder and die bonder |
| US20150082620A1 (en) * | 2010-09-15 | 2015-03-26 | Mycronic AB | Methods and apparatuses for generating patterns on workpieces |
| CN105826225A (en) * | 2016-05-10 | 2016-08-03 | 刘宁 | Electronic tag packaging equipment |
| CN108447806A (en) * | 2018-03-30 | 2018-08-24 | 杭州旗捷科技有限公司 | Chip automated production equipment, system and method |
-
2018
- 2018-09-01 CN CN201811017530.1A patent/CN109103134B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040121493A1 (en) * | 2002-12-24 | 2004-06-24 | Eo Technics Co., Ltd. | Chip scale marker and method of calibrating marking position |
| KR20090012977A (en) * | 2007-07-31 | 2009-02-04 | 킹 유안 일렉트로닉스 코포레이션 리미티드 | Method for marking wafer, method for marking failed die, method for aligning wafer and wafer test equipment |
| CN101409240A (en) * | 2008-03-21 | 2009-04-15 | 北京德鑫泉科技发展有限公司 | Intelligent label capable of using chip and equipment for producing flip-chip module |
| US20150082620A1 (en) * | 2010-09-15 | 2015-03-26 | Mycronic AB | Methods and apparatuses for generating patterns on workpieces |
| CN102419822A (en) * | 2010-09-24 | 2012-04-18 | 株式会社日立高新技术仪器 | Tool management method of die bonder and die bonder |
| CN105826225A (en) * | 2016-05-10 | 2016-08-03 | 刘宁 | Electronic tag packaging equipment |
| CN108447806A (en) * | 2018-03-30 | 2018-08-24 | 杭州旗捷科技有限公司 | Chip automated production equipment, system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109103134B (en) | 2021-07-30 |
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