CN109091135A - The miniature in-situ synchronization detection sensor of heart sound electrocardio based on MEMS technology - Google Patents
The miniature in-situ synchronization detection sensor of heart sound electrocardio based on MEMS technology Download PDFInfo
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- CN109091135A CN109091135A CN201810784684.7A CN201810784684A CN109091135A CN 109091135 A CN109091135 A CN 109091135A CN 201810784684 A CN201810784684 A CN 201810784684A CN 109091135 A CN109091135 A CN 109091135A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/316—Modalities, i.e. specific diagnostic methods
- A61B5/318—Heart-related electrical modalities, e.g. electrocardiography [ECG]
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B7/00—Instruments for auscultation
- A61B7/02—Stethoscopes
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Abstract
The present invention is a kind of miniature in-situ synchronization detection sensor of heart sound electrocardio based on MEMS technology, including shell, entrant sound cap is fixed on shell, support plate is equipped in shell, MEMS sonic transducer micro-structure is installed, MEMS sonic transducer micro-structure is made of braced frame, centroplasm gauge block, cantilever beam and four varistors in support plate；The periphery of shell is set with a circle electrocardioelectrode, and the periphery of electrocardioelectrode is set with a circle sucker；Electrocardioelectrode includes that top surface is that needle point declines the flexible conducting substrate of Array Design, and the top surface of flexible conducting substrate, which successively sputters, has metal seed layer and metal layer, backside coating to have conductive silver glue-line.Compared to traditional stethoscope or EGC sensor, heart sound, electrocardio are integrated in one by inventive sensor using MEMS technology, and then can be realized the multi-parameter Conjoint Analysis diagnosis of coronary heart disease, with high sensitivity, it is small in size, can batch machining, it is inexpensive the advantages that.
Description
Technical field
The invention belongs to a kind of novel biomedical devices, specifically a kind of heart sound electrocardio based on MEMS technology is miniature
In-situ synchronization detection sensor.
Background technique
Coronary heart disease, that is, coronary atherosclerotic heart disease, be coronary artery occur atherosclerotic lesion and
Cause intravascular space narrow or occlude, causes patient's myocardial ischemia, anoxic or the heart disease of necrosis.Coronary heart disease is to seriously threaten people
The major disease of class life and health, prevention and treatment are the great public health problems of whole world facing.Currently, coronary heart disease prevents and treats
Status allow of no optimist: the coronary heart disease being becoming increasingly rampant in the past 10 years has become many as a kind of important cardiovascular disease
Country seriously endangers one of the most important disease of people's health, is disease type relatively high in heart disease.According to
World Health Organization's statistics, about 12,000,000 people die of coronary heart disease every year, are acknowledged as worldwide " number one killer ".
Cardiac auscultation is diagnosis of coronary heart disease and a kind of most ancient one of the method for understanding cardiac function.So far this
Technology is still a kind of basic skills of diagnosis of cardiovascular diseases, and the appearance of heart sound map further improves cardiovascular disease
Diagnosis.The early stage Precise Diagnosis that the high-grade, precision and advanced Medical Devices of diagnosis of coronary heart disease existing at present can not solve coronary heart disease mostly is asked
Topic, while also all there is certain mistaken diagnosis in diagnosis of coronary heart disease and fail to pinpoint a disease in diagnosis phenomenon in single Medical Devices, it can not be from multiple angles
Degree, joint multiple parameters carry out comprehensive analysis diagnosis to coronary heart disease, can not understand the development and change process of coronary heart disease in time.It relaxes
It opens phase heart murmur and contains the pathological information of a large amount of coronary heart disease early stage, and because tradition auscultation is limited to the sensitivity of human ear hearing
The subjective experience of property and doctor, greatlys restrict effect of the heart sound played in diagnosis of coronary heart disease.In view of heart sound and electrocardio
Signal suffers from the advantages that simple, noninvasive, reliable, inexpensive, reproducible, while heart sound and electrocardiosignal can be anti-well
Coronary heart disease early symptom is reflected, electrocardio is the non-invasive means of clinically most common diagnosis of coronary heart disease again.So we are badly in need of developing
It is a kind of novel to can be used for detecting electrocardio and cardiechema signals.
Summary of the invention
The purpose of the invention is to provide a kind of miniature in-situ synchronization inspection of the completely new heart sound electrocardio based on MEMS technology
Survey sensor.The sensor can detect electrocardiosignal and cardiechema signals simultaneously, design a kind of sonic transducer using MEMS technology
Micro-structure is to detect cardiechema signals, and using MEMS Design Processing electrocardioelectrode, last shell is encapsulated using flexible material
Two encapsulation are fixed.Realize heart sound and electrocardiosignal synchronous acquisition.
The present invention is achieved through the following technical solutions:
A kind of miniature in-situ synchronization detection sensor of heart sound electrocardio based on MEMS technology is the shell of open design including top
The open end sealing of body, shell is fixed with entrant sound cap, and oil filler point and fairlead are offered on the shell bottom of shell, is equipped in shell
Support plate is fixed with MEMS sonic transducer micro-structure in support plate, and MEMS sonic transducer micro-structure passes through ICP by SOI silicon wafer
Plasma etching technology etches to obtain comprising braced frame and the centroplasm gauge block for being set to braced frame center,
The both ends of centroplasm gauge block pass through cantilever beam respectively and are connected and fixed with braced frame, two ends of every cantilever beam are utilized respectively etc. from
Sub- injection technique injection boron ion forms varistor, and the prevention of four varistors is equal, and four varistors pass through
Metal lead wire is connected to form the favour stone full-bridge differential circuit that can detecte heart sound and breathing sound signal；MEMS sound sensing
The conducting wire of device micro-structure output end is pierced by from fairlead, and the inner space of shell is infused by oil filler point filled with silicone oil, oil filler point and
Fairlead encapsulation process；The periphery of shell is set with a circle electrocardioelectrode, and the periphery of electrocardioelectrode is set with a circle sucker；Electrocardio
Electrode includes that top surface is that needle point declines the flexible conducting substrate of Array Design, and the top surface sputtering of flexible conducting substrate has seed metallization
Layer, sputtering has metal layer on metal seed layer, and the backside coating of flexible conducting substrate has conductive silver glue-line.
MEMS sonic transducer micro-structure in the present invention, its working principle is that: entrant sound cap is affixed on patient skin, it can be with
The free of losses projection for realizing cardiechema signals, i.e., when heart sound is transmitted on the centroplasm gauge block of MEMS sonic transducer micro-structure, can draw
The deformation of cantilever beam is played, the deformation of cantilever beam can cause the variation of varistor resistance value, such favour stone full-bridge differential circuit again
Output signal can change with the change of varistor resistance value, it is achieved that when heart sound, breathing sound signal change when,
The voltage value of MEMS sonic transducer micro-structure output can also change, and can draw out the waveform diagram of heart and lung sounds.
Electrocardioelectrode in the present invention is the microelectrode of the microneedle array based on MEMS technology design, belongs to flexible electrode,
Flexible MEMS technology and biological electronic technology, the electrocardiograph dry electrode prepared on flexible conducting substrate are utilized, and is not necessarily to lead
Electric glue has good flexibility and ductility, can fit closely with skin.Micropin therein is made by fine process
, size in the micron-scale, in the structure of tip-like, and has chemical stability and biocompatibility.In electrocardioelectrode of the present invention,
Main body of the metal layer as electrode, metal seed layer is as the adhesion layer between flexible conducting substrate and metal layer, compliant conductive
Substrate is used for the lead of electrocardiosignal, and for the lead of electrocardiosignal, conductive silver glue-line is equivalent to lead effect, and signal is transmitted
To back-end circuit.Micropin is widely used in field of biomedicine, and not only volume is small for micropin, and has often in performance
The incomparable characteristic-of rule method is accurate, painless, efficient, convenient.In use, it is different that electrocardioelectrode is placed in body
Position can measure the potential difference of body difference.Microneedle array electrode can pierce the cuticula of skin, avoid keratoderma
High-impedance behavior does not need Skin sensitization test and electrolytic gel, is conducive to long-term measurement and uses.Microneedle array electrode is convenient and reliable, tool
There is the advantages that impedance is small, and electrochemistry noise is small, generates a painless electrode-electrolyte interface in cuticula and competent cell
Ion stream is caused to be converted to electric current.
Shell and sucker in the present invention are all made of flexible conformal configuration, can fit closely with skin, can not only subtract
The sense of discomfort of few patient, and the interference of the noise signals such as joint bone can also be reduced.
The metal seed layer in electrocardioelectrode uses Cu as a preferred technical solution, and metal layer uses Au, since Au has
There is good bio-compatibility, is the metal material of more appropriate contact skin.
Entrant sound cap is made using ultra-thin butyronitrile high molecular material as a preferred technical solution,.Ultra-thin butyronitrile high score
Sub- entrant sound cap has good sound translative performance to low-frequency acoustic signal, and has good oil resistivity, water resistance, air-tightness and excellent
Good adhesive property, ultra-thin butyronitrile macromolecule entrant sound cap and inner couplings liquid insulation silicone oil, the shell of flexible material, internal organs organ
Characteristic impedance matches, acoustical transimittivity with higher, is conducive to heart sound, lungs sound and is preferably transmitted to the micro- knot of MEMS sonic transducer
Structure micro-structure is convenient for medical diagnosis.
The present invention is the MEMS (Micro-Electro-Mechanical using applicant's accumulation for many years
System, MEMS) technical experience, testing equipment and process flow, it studies inexpensive, small in size, anti-dry based on MEMS technology
Immunity is strong, high sensitivity, can be with the novel sensor of synchronous acquisition heart sound and EGC parameter, and then realizes more ginsengs of coronary heart disease
Number Conjoint Analysis diagnosis.It is quasi- to be blocked by comparative analysis cardiechema signals and electrocardiosignal, announcement diastole heart murmur and coronary heart disease
Quantitative relationship between degree, and the inner link by analyzing two signals itself disclose pathogenesis, the prison of coronary heart disease
The development process of coronary heart disease, the final early discovery for realizing coronary heart disease, early diagnosis are surveyed, and then solves coronary heart disease misdiagnosis rate, the death rate
High problem.
Compared to traditional stethoscope or EGC sensor, inventive sensor utilizes MEMS technology by heart sound, electrocardio
It is integrated in one, and then can be realized the multi-parameter Conjoint Analysis diagnosis of coronary heart disease, there is high sensitivity, it is small in size, it can add in batches
Work, it is inexpensive the advantages that.Specific manifestation is as follows: (1) sonic transducer based on MEMS technology has small in size, high sensitivity, height
Integrated level, the multi-functional, advantage that can be mass, induction of signal is sensitive authentic and valid, can significantly sense second heart sound；
(2) electrocardioelectrode can not only accomplish small in size non-stimulated to patient for flexible dry electrode, and compare ordinary electrode in performance
It is more accurate, efficient, convenient；(3) sensor integrally uses flexible conformal encapsulating structure, fits closely with skin, reduces joint
Inhibition of the bone to acoustical signal processing.Part electrocardioelectrode and heart sound probe is integrated, realize electrocardio, heart sound
Synchronous in situ detection.(4) ultra-thin butyronitrile macromolecule entrant sound cap has good sound translative performance, facilitates sonic transducer and receives the heart
Sound, Lung Sounds, it helps the processing of cardiechema signals and expert consultation later.
Detailed description of the invention
Attached drawing herein is used to provide to further explanation of the invention, constitutes part of this application, of the invention shows
Meaning property embodiment and its explanation are used to explain the present invention, not constitute improper limitations of the present invention.
Fig. 1 is the structural schematic diagram of inventive sensor medial surface.
Fig. 2 is the structural schematic diagram of inventive sensor lateral surface.
Fig. 3 is the configuration schematic diagram of inventive sensor.
Fig. 4 is the structural schematic diagram of MEMS sonic transducer micro-structure in inventive sensor.
Fig. 5 is the structural schematic diagram of electrocardioelectrode in inventive sensor.
In figure: 1- shell, 2- entrant sound cap, 3- support plate, 4-MEMS sonic transducer micro-structure, 4-1- braced frame, 4-2-
Centroplasm gauge block, 4-3- cantilever beam, 4-4- varistor, 5- electrocardioelectrode, 5-1- flexible conducting substrate, 5-2- seed metallization
Layer, 5-3- metal layer, 5-4- conductive silver glue-line, 5-5- needle point decline array, 6- sucker.
Specific embodiment
In order to make those skilled in the art better understand the present invention, below in conjunction with reference attached drawing and in conjunction with the embodiments to this
Further clear, complete explanation is made in invention.It should be noted that in the absence of conflict, embodiment in the application and
Feature in embodiment can be combined with each other.
As shown in Figures 1 to 5, the miniature in-situ synchronization detection sensor of a kind of heart sound electrocardio based on MEMS technology, including
Top is the shell 1 of open design, and the open end of shell 1 is fixed with entrant sound cap 2 by polyurethane adhesive sealing, and entrant sound cap 2 uses
Ultra-thin butyronitrile high molecular material is made, and oil filler point and fairlead are offered on the shell bottom of shell 1, branch is equipped in shell 1
Fagging 3 is fixed with MEMS sonic transducer micro-structure 4 by polyurethane glue in support plate 3, and support plate 3 is to MEMS sonic transducer
Micro-structure 4 plays the fixed effect of support.
MEMS sonic transducer micro-structure 4 uses SOI silicon wafer as rapidoprint, using MEMS semiconductor microactuator processing technology
It is process, specifically: etching be supported frame 4-1, centroplasm gauge block using ICP plasma etching technology on a silicon substrate
4-2 and cantilever beam 4-3, wherein centroplasm gauge block 4-2 is located at the center in braced frame 4-1, centroplasm gauge block 4-2's
Both ends are connected and fixed by symmetrically arranged cantilever beam 4-3 and braced frame 4-1 respectively, at the both ends of every cantilever beam 4-3 point
Not Li Yong Plasma inpouring technology injection boron ion formed varistor 4-4, the prevention of four varistor 4-4 is equal, and
Four varistor 4-4 are connected to form the favour stone full-bridge that can detecte heart sound and breathing sound signal by metal lead wire
Differential circuit；After the conducting wire of 4 output end of MEMS sonic transducer micro-structure is pierced by from fairlead, pressure stabilizing, amplification with subsequent conditioning circuit,
The connection of the circuit modules such as filtering, impedance matching；It is infused by oil filler point filled with silicone oil, MEMS sonic transducer the inner space of shell 1
Micro-structure 4 is immersed in silicone oil, and silicone oil and water density are close, and acoustical coupling matches, and improves the sensitivity of sensor microstructure,
Last oil filler point and fairlead encapsulation process.
The periphery of shell 1 is set with a circle electrocardioelectrode 5, and the periphery of electrocardioelectrode 5 is set with a circle sucker 6, and sucker 6 is adopted
It is made with flexible material.
Electrocardioelectrode 5 is that the needle point based on MEMS technology and biological electronic technology declines array, is prepared on flexible substrates
The dry electrod-array of micropin shape of chemical stability and biocompatibility is provided, electrode uses flexible dry electrode, has good
Ductility and flexibility can accomplish to fit closely with patient skin, and the main body of electrode uses metal structure.Electrocardioelectrode 5 is specific
Structure include top surface be needle point decline array 5-5 design flexible conducting substrate 5-1, flexible conducting substrate 5-1 top surface sputtering
There is metal seed layer 5-2, sputtering has metal layer 5-3 on metal seed layer 5-2, and the backside coating of flexible conducting substrate 5-1 is led
Electric elargol layer 5-4, wherein 5-2 layers of seed metallization use Cu, metal layer 5-3 to use Au.
The specific preparation process flow of electrocardioelectrode 5 is as follows:
1) one layer of SiO of hot oxygen on a silicon substrate2, it is used as the mask layer of subsequent wet corrosion and deep silicon etching (DRIE)；
2) coat positive photoresist, through front baking, photoetching, development and after dry, the figure after photoetching as it is subsequent inductively grade from
The exposure mask of son etching (ICP)；
3) ICP is etched, by SiO2Buried oxide layer is cut through；
4) wet etching, TMAH corrosion corrosion cut through the silicon below buried oxide layer, form the pit of inverted pyramid row and etch stop
Only；
5) deep silicon etching etches certain depth, forms groove pinpoint array；
6) glue is removed, 60 DEG C of heating water baths remove photoresist, complete the preparation of groove pinpoint array silicon mould
7) carbon nanotube (CNT) dispersion liquid is prepared, carbon nanotube powder is mixed with organic solvent and is sufficiently stirred evenly, is made after ultrasound
At CNT dispersion；
8) CNT dispersion is added in PDMS magnetic agitation under certain temperature, after organic solvent evaporation, curing agent is added, fills
Divide and stir evenly and extract out bubble, the mixture of CNT and PDMS is made；
9) mixture prepared is cast on groove needle point silicon mould, elevated cure, takes off film and obtains the CNT- of needle point structure
PDMS flexible conducting substrate；
10) the magnetron sputtering metal seed layer Cu and metal layer A u on flexible conducting substrate；
11) in one layer of conductive silver glue-line of flexible conducting substrate backside coating, it is finally completed the preparation of flexible electrocardioelectrode.
The above is that technical solution in the embodiment of the present invention is clearly and completely described, described embodiment
Only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, the common skill in this field
Art personnel all other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
Claims (3)
1. a kind of miniature in-situ synchronization detection sensor of heart sound electrocardio based on MEMS technology, it is characterised in that: be including top
The open end sealing of the shell (1) of open design, shell (1) is fixed with entrant sound cap (2), offers note on the shell bottom of shell (1)
Oilhole and fairlead, shell (1) is interior to be equipped with support plate (3), and MEMS sonic transducer micro-structure (4) is fixed in support plate (3),
MEMS sonic transducer micro-structure (4) is etched to obtain by SOI silicon wafer by ICP plasma etching technology comprising braced frame
(4-1) and the centroplasm gauge block (4-2) for being set to the center braced frame (4-1), the both ends point of centroplasm gauge block (4-2)
Not Tong Guo cantilever beam (4-3) be connected and fixed with braced frame (4-1), two ends of every cantilever beam (4-3) are utilized respectively plasma
Injection technique injects boron ion and forms varistor (4-4), and the prevention of four varistors (4-4) is equal, and four pressure-sensitive
Resistance (4-4) is connected to form the differential electricity of favour stone full-bridge that can detecte heart sound and breathing sound signal by metal lead wire
Road；The conducting wire of MEMS sonic transducer micro-structure (4) output end is pierced by from fairlead, and the inner space of shell (1) passes through oil filler point
Note is filled with silicone oil, oil filler point and fairlead encapsulation process；The periphery of shell (1) is set with a circle electrocardioelectrode (5), electrocardioelectrode
(5) periphery is set with a circle sucker (6)；Electrocardioelectrode (5) include top surface be needle point decline array (5-5) design flexibility lead
The top surface sputtering of electric substrate (5-1), flexible conducting substrate (5-1) has metal seed layer (5-2), splashes on metal seed layer (5-2)
It has penetrated metal layer (5-3), the backside coating of flexible conducting substrate (5-1) has conductive silver glue-line (5-4).
2. the miniature in-situ synchronization detection sensor of the heart sound electrocardio according to claim 1 based on MEMS technology, feature
Be: for seed metallization (5-2) layer in electrocardioelectrode (5) using Cu, metal layer (5-3) uses Au.
3. the miniature in-situ synchronization detection sensor of heart sound electrocardio according to claim 1 or 2, it is characterised in that: entrant sound cap
(2) it is made using ultra-thin butyronitrile high molecular material.
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| CN201810784684.7A CN109091135B (en) | 2018-07-17 | 2018-07-17 | MEMS technology-based miniature in-situ synchronous heart sound and electrocardiogram detection sensor |
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Cited By (6)
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| CN110226944A (en) * | 2019-06-24 | 2019-09-13 | 大连理工大学 | Miniature heart sound transducer and its application based on MEMS technology |
| CN110269607A (en) * | 2019-07-15 | 2019-09-24 | 刘阳 | A kind of combination electrode measuring electrocardio and heart sound |
| CN110693519A (en) * | 2019-11-12 | 2020-01-17 | 中北大学 | Mortise and tenon type heart sound probe based on MEMS sensor |
| CN111870275A (en) * | 2020-07-24 | 2020-11-03 | 中北大学 | Magnetic induction type electronic stethoscope probe based on MEMS technology |
| CN112957066A (en) * | 2021-02-10 | 2021-06-15 | 中北大学 | Electronic stethoscope based on n-type cantilever beam type one-dimensional MEMS (micro-electromechanical systems) acoustic sensor |
| CN113397586A (en) * | 2021-07-28 | 2021-09-17 | 嘉兴芯感智医疗科技有限公司 | Super stethoscope |
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| CN109091135B (en) | 2021-09-14 |
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