CN104545794B - Wireless passive non-invasive MEMS intraocular pressure sensor and manufacturing method thereof - Google Patents
Wireless passive non-invasive MEMS intraocular pressure sensor and manufacturing method thereof Download PDFInfo
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- CN104545794B CN104545794B CN201510065578.XA CN201510065578A CN104545794B CN 104545794 B CN104545794 B CN 104545794B CN 201510065578 A CN201510065578 A CN 201510065578A CN 104545794 B CN104545794 B CN 104545794B
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Abstract
The invention discloses a non-invasive wireless passive intraocular pressure sensor and a manufacturing method thereof. The intraocular pressure sensor comprises a flexible substrate layer, a first electrode layer, an intermediate layer, a second electrode layer and a flexible substrate layer, wherein a dielectric layer of a central capacitor is formed by a part of the intermediate layer, and a polar plate of the central capacitor is formed by corresponding parts of the first electrode layer and the second electrode layer; and the flexible substrate layers are prepared by using ParyleneC thin films, and the intermediate layer is prepared by using a PDMS material. The non-invasive wireless passive intraocular pressure sensor disclosed by the invention is simple and feasible in the whole set of process; the series connection between the capacitor and an inductor can be achieved by using extra edge capacitance, and a simple structure can be achieved; and a sensor electrode is simple to manufacture, the prepared electrode is low in resistivity, the acquisition of relatively high quality factors can be facilitated, and the signal-to-noise ratio of detection signals can be improved.
Description
Technical field
The present invention relates to microsensor manufacture field, relates more specifically to a kind of wireless and passive non-intrusion type MEMS intraocular pressures and passes
Sensor and preparation method thereof.
Background technology
Glaucoma is to cause a kind of disease of characteristic optic nerve lesion and defect of visual field because pathologic intraocular pressure is raised, and is
The irreversible blinding oculopathy in the 2nd, the whole world.The rising of intraocular pressure is the important indicator for diagnosing and treating glaucoma.Some patientss exist
Detection of eyeball tension is normal in consulting hours, but still occurs in that glaucoma blinding.Analysis finds that glaucoma patient intraocular pressure is (little in 24h
When) in fluctuation it is larger, some time beyond outpatient service, for example, sleep or reach peak value during early morning.Thus accurate and continuous intraocular pressure
Detect that the diagnosis to glaucoma and treatment in time have very important significance.
Traditional tonometry, for example, refer to that survey method, direct method and tonometer detection method etc. cannot realize that intraocular pressure is continuous
Detection.And the new intraocular pressure sensor prepared using MEMS technology can realize intraocular pressure 24h continuous monitorings.
Whether new intraocular pressure sensor needs implantation ocular tissue to be divided into implanted and non-intrusion type according to sensor.
Early stage implanted intraocular pressure sensor, as substrate, by techniques such as etching, sputterings electrode structure is obtained using silicon.But
It is that on the one hand passive type implanted sensor requires to minimize device size, so as to minimize implantation infringement；On the other hand require to pass
Sensor is strong with external monitor portion coupling effect, and so as to increase the distance of detection, it is too small that this forces sensors inductance to be difficult, and promotes
Formation based on the foldable sensor construction of flexible substrate.The Origami sensor folds implantation, so as to minimize implantation infringement,
Launch after implantation, so as to maximize coupling effect.The sensor utilizes flexible material, such as conduct such as SU-8, Parylene C
Substrate, by the technique such as photoetching and sputtering electrode structure is obtained.Although accordion structure minimizes sensor implanted,
Ocular tissue is implanted into by surgical operation, still causes irreversible wound.
With the development of non-invasive sensors, it is possible to achieve without the need for the tonometry of operation implantation, it is to avoid to ocular tissue
The irreversible damage for causing.The detection of early stage non-intrusion type intraocular pressure sensor utilizes piezoresistive effect, and the transmission of signal is using wired
Mode, brings sense of discomfort during measurement.During preparation, varistor is wrapped in flexible substrate using casting method.Have to overcome
The shortcoming of line transmission, the later stage realizes signal transmission using integrated circuit.But IC design is complicated, and system power dissipation is larger,
Heating is more serious so that the comfort worn is reduced, and the size of device is larger.Occur in that in the recent period based on the wireless of L-C structures
Passive non-invasive sensors structure, but the structure has using there is the connection of realizing between inductance and electric capacity by the way of line bonding
There is certain difficulty in line bonding, and the making of electrode uses the mode of etching Copper Foil, the thickness of Copper Foil in processing technique
Spend thin, operating difficultiess.
In addition to the difficulty in above-mentioned preparation, non-invasive sensors need to be worn on as contact lenss on cornea, this
Sample is required to sensor substrate, on the one hand needs flexible substrate, realizes that sensor is conformal with cornea；On the other hand lining is needed
Bottom material has bio-compatibility.And when the sensor adopts fluid silicone rubber as substrate, need to be realized using casting method
It is conformal with cornea, need by mould, there is higher requirement to mould.
Additionally, sensor is related to the preparation of inductance and capacitance electrode when making, in order to ensure sensor in C-L-C strings
The quality factor (Q-value) of connection circuit will not be too small, it is desirable to which electrode impedance is as far as possible little, and preparation process should try one's best simply.Due to passing
The sensing unit of sensor is electric capacity, therefore in manufacturing process, needs to consider that produced electric capacity is that presser sensor can power transformation
Hold.Necessary selection is carried out to the structure and material for making electric capacity.The preparation of sensor electrode generally uses etching
Copper Foil method, although can ensure that higher Q-value by selecting thicker Copper Foil, but be patterned on thin copper foil, Yi Zao
Into electrode open circuit, operating difficultiess are fetched, increase the difficulty of preparation process.In addition, during etching Copper Foil, needing strict control etching
Time and the concentration of etching liquid, prevented quarter and serious lateral erosion, and fracture occur in the little lines of inductance for causing sensor
Phenomenon.
The content of the invention
For one of above-mentioned multiple technical problems, the present invention adopts a kind of intraocular pressure sensor of C-L-C cascaded structures, with reality
The wireless connection of existing inductance and electric capacity；Substrate is done using flexible material, with solve non-invasive sensors it is conformal when to mould mistake
High requirement, because flexible material has good bio-compatibility, and belongs to thermoplastic, and moulding condition is simple；Using
The mode of electro-coppering prepares sensor electrode, to solve the inductance and Copper Foil in electric capacity preparation process of non-invasive sensors electrode
Cross thin caused operating difficultiess.
Thus, as one aspect of the present invention, the invention provides a kind of non-intrusion type intraocular pressure sensor, its feature exists
In using a kind of cascaded structure of C-L-C, two of which electric capacity is respectively edge capacitance with central electric capacity, the edge capacitance
Act to connect the inductance and the central electric capacity, and the capacitance of the edge capacitance much larger than the appearance of the central electric capacity
Value.
Wherein, the intraocular pressure sensor includes：Flexible substrate layer, first electrode layer, intermediate layer, the second electrode lay and flexibility
Substrate layer, and the part in the intermediate layer constitutes the dielectric layer of the central electric capacity, the first electrode layer and second electric
The corresponding part of pole layer constitutes the pole plate of the central electric capacity.
Wherein, the flexible substrate layer is made from Parylene C thin-film materials.
Wherein, the thickness of the flexible substrate layer is 5-25 μm.
Wherein, the intermediate layer is made from polydimethyl siloxane material.
Wherein, the first electrode layer and the second electrode lay are prepared by the way of electro-coppering.
Wherein, the intraocular pressure sensor is MEMS sensor, and the intraocular pressure sensor is curved surface sensor.
As another aspect of the present invention, present invention also offers a kind of non-intrusion type wireless and passive intraocular pressure sensor
Preparation method, comprises the following steps：
Using vaccum gas phase sedimentation method, one layer of flexible material with bio-compatibility is deposited on substrate；
Deposition chromium/gold seeds layer on the flexible material；
Coating photoresist and photoetching in the Seed Layer, the then copper electroplating layer on photoengraving pattern；
The photoresist in non-copper electroplating layer region is removed, etching removes the chrome gold Seed Layer in the region；
Polydimethylsiloxane is coated with the structure for obtaining as intermediate layer；
Repeat the above steps respectively obtain the chip up and down of the intraocular pressure sensor, by the use of polydimethylsiloxane as in
Interbed is bonded；
The structure for obtaining is peeled off from the substrate, continuation the structure for obtaining is carried out using pressure sintering it is moulding,
The pressure sintering is the structure being fixed in curve mold described in heat treated under vacuum, and treatment temperature is 170
DEG C, process time is no less than 30min；
By the structure for obtaining from the curve mold sur-face peeling, the product of the final intraocular pressure sensor is obtained.
Wherein, the flexible material with bio-compatibility is Parylene C thin film, and thickness is 5-25 μm.
Wherein, also include using ammonia and dioxygen in the step of etching removes the chrome gold Seed Layer in the region
The step of water dissolution removes deposit.
Understood based on above-mentioned technical proposal, the present invention is using the good material of two kinds of bio-compatibilities of Paralyne C and PDMS
Material, due to the Young's moduluss difference of this bi-material, realizes the making of pressure-sensitive variable capacitance, and whole set process is simple；Adopt
Connecting for electric capacity and inductance, simple structure are realized with extra edge capacitance；Additional edge capacitance need to be only adopted, using the electricity
Hold upper and lower base plate to be respectively connected with central electric capacity and ring-shaped inductors, so as to realize that inductance is connected with central authorities' electric capacity.In addition,
Much larger than central electric capacity, the total capacitance after series connection depends on central electric capacity to edge capacitance, and the effect of edge capacitance is only that connection
Inductance and electric capacity；Therefore, using the structure, connecting for inductance and electric capacity can simply be realized；Sensor electrode makes simple,
Prepared electrode resistance rate is low, is conducive to obtaining higher quality factor, improves the signal to noise ratio of detection signal.
Description of the drawings
Fig. 1 is the structural representation of chip on the non-intrusion type intraocular pressure sensor of the present invention；
Fig. 2 is the structural representation of chip under non-intrusion type intraocular pressure sensor of the invention；
Fig. 3 is the first step of the non-intrusion type intraocular pressure sensor preparation process of the present invention to flow chart the step of ten steps；
Fig. 4 is the structural representation of the non-intrusion type flat surface sensor of the present invention；
Fig. 5 is the structural representation that the non-intrusion type curved surface sensor of the present invention is attached at die surface.
Description of reference numerals is as follows：
1st, edge capacitance；2nd, central electric capacity；3rd, ring-shaped inductors；4th, substrate；5th, flexible substrate layer；6th, Seed Layer；7th, photoetching
Glue；8th, electrode layer；9th, intermediate layer；10th, mould；11st, curved surface sensor.
Specific embodiment
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in further detail.
The non-intrusion type wireless and passive intraocular pressure sensor of the present invention, using a kind of cascaded structure of C-L-C, two electric capacity point
Not Wei edge capacitance 1 and central electric capacity 2, edge capacitance is used to realize the wireless connection of inductance and electric capacity.Wherein, edge capacitance 1
Play a part of to connect ring-shaped inductors and central electric capacity.The circuit total capacitance is connected by edge capacitance 1 with central electric capacity 2 and is obtained, by
In edge capacitance 1 much larger than central electric capacity 2, total capacitance is approximately equal to central electric capacity 2.Fig. 1 and Fig. 2 sets forth sensor
Upper and lower chip structure schematic diagram.Wherein, upper chip includes central electric capacity 2, ring-shaped inductors 3 and edge capacitance 1, during lower chip is included
Centre electric capacity 2 and edge capacitance 1.
For the requirement that solution wireless and passive non-invasive sensors are too high to mould when conformal, the present invention is using flexible material
Material, for example c-type Parylene (c-type of Parylene, abbreviation Parylene C) does substrate, because the material has good biology
Compatibility, and belong to thermoplastic, moulding condition is simple.Parylene is U.S. Union Carbide Co. in last century
A kind of new coating material of sixties exploitation, main component is Parylene, and according to molecular structure N-type, C can be divided into
The models such as type, HT types.Wherein, c-type has the transmitance of low-down hydrone and corrosive gas, deposition growing speed ratio N
Type is many soon, and corresponding penetrating power is worse than N-type.
Sensor of the invention mainly includes 5 layers：Ground floor is flexible substrate Parylene C thin film 5；The second layer is copper
Electrode layer 8；Third layer is the intermediate layer 9 of bonding, is also the dielectric layer of electric capacity, for example with flexible material, preferred poly dimethyl
Siloxanes (PDMS)；4th layer is copper electrode layer 8；Layer 5 is the thin layer 5 of Parylene C.Using Parylene C thin film
As substrate, electrode structure is wrapped up, play sealing function.Using PDMS as the intermediate layer 9 of bonding, the Young of PDMS is because
Modulus is far below Parylene C, and when pressurized generation deformation, intermediate layer 9 is led due to the extruding of outermost two-layer Parylene C
PDMS thickness is caused to reduce, so as to change the capacitance of sensor.Prepared to solve wireless and passive non-invasive sensors electrode
The excessively thin caused operating difficultiess of Copper Foil in journey, the present invention prepares sensor electrode by the way of electro-coppering.
Additionally, the non-intrusion type wireless and passive intraocular pressure sensor of the present invention can make MEMS sensor, so as to realize body
The efficient purpose of the little, preparation process is simple of product.In order to conformal with eye sphere, the MEMS sensor can be fabricated to curved surface sensing
Device, is described in detail with reference to its preparation technology.
As shown in the step (1) to (10) in Fig. 3, the non-intrusion type wireless and passive plane MEMS intraocular pressure sensor of the present invention
Preparation technology it is as described below：
The first step：By the use of silicon/glass as substrate 4, and through cleaning treatment, rotary coating remover, it is easy to the later stage
Strippings of the Parylene C from substrate；
Second step：Using vacuum vapor deposition method, one layer of Parylene with bio-compatibility is deposited on substrate
C thin film 5, thickness is 5-25 μm, is preferably, for example, 20 μm；
3rd step：By the way of electron beam transpiration, one layer of Seed Layer chrome gold (Cr/Au) 6 is deposited, thickness is
4th step：Rotary coating photoresist AZ4620 and photoetching, glue thickness is not less than 15 μm；
5th step：Electroplated in the electroplate liquid of copper sulfate and sulphuric acid, electroplating current is about 45mA, electrodeposited coating copper (Cu)
Thickness be not more than the thickness of photoresist 7.Fig. 3 gives the electrode figure after plating；
6th step：Photoresist 7 is removed using immersion acetone method, can be suitably ultrasonic, but power can not be too high；
7th step：Etching Cr/Au, in etching process, can generate one layer of grey black deposit in electrode surface, need to utilize
Ammonia adds a little dioxygen water dissolution deposit；
8th step：The ratio of rotary coating PDMS, PDMS and firming agent is 12: 1, obtains flexible bigger intermediate layer 9.Gu
After change, PDMS thickness is 20 μm.
9th step：Above-mentioned 8 step can obtain up/down chip, be bonded as intermediate layer 9 by the use of PDMS；
Tenth step：Thin film is peeled off from substrate 4, flat surface sensor is obtained.
In order to further be fabricated to curved surface, as shown in figure 5, the system of the non-intrusion type wireless and passive intraocular pressure sensor of the present invention
Standby technique also includes：
11st step：Flat surface sensor is carried out using pressure sintering moulding.Pressure sintering process is：Device is adhered to first
With the die surface of cornea same curvature；Under vacuum, 170 DEG C are heated to, pressurization is not less than 1Kpa, process time is many
In 30min；Mould is finally taken out, and device is peeled off from die surface.
Through above-mentioned steps, curved surface sensor just can be obtained.Fig. 4 gives the structure of flat surface sensor, and Fig. 5 gives modeling
The sensor construction on the surface of mould 10 is adhered to during shape, it is peeled off from mould 10 and just obtain curved surface sensor 11.
By substantial amounts of test, sensor of the invention simple structure, sensor electrode makes simple, prepared
Electrode resistance rate is low, is conducive to obtaining higher quality factor, the signal to noise ratio of detection signal is improved, additionally, using Paralyne
The good material of C and two kinds of bio-compatibilities of PDMS, realizes the making of pressure-sensitive variable capacitance, and whole set process is simple.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, it should be understood that the foregoing is only the specific embodiment of the present invention, be not limited to the present invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention
Within the scope of.
Claims (10)
1. a kind of non-intrusion type wireless and passive intraocular pressure sensor, it is characterised in that using a kind of cascaded structure of C-L-C, i.e. electricity
Sense is connected respectively with a pole plate of two electric capacity, and another pole plate of two electric capacity is connected by wire, two of which electric capacity
Respectively edge capacitance and central electric capacity, the edge capacitance plays the connection inductance and the central electric capacity, and institute
State the capacitance of the capacitance much larger than the central electric capacity of edge capacitance.
2. non-intrusion type wireless and passive intraocular pressure sensor according to claim 1, wherein the intraocular pressure sensor includes：The
One flexible substrate layer, first electrode layer, intermediate layer, the second electrode lay and the second flexible substrate layer, and the one of the intermediate layer
Part constitutes the corresponding part structure of the dielectric layer of the central electric capacity and edge capacitance, the first electrode layer and the second electrode lay
Into the central electric capacity and the pole plate of edge capacitance, a part for the first electrode layer also forms the inductance.
3. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein first flexible substrate layer and
Second flexible substrate layer is made from Parylene C thin-film materials.
4. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein first flexible substrate layer and
The thickness of the second flexible substrate layer is 5-25 μm.
5. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein poly- diformazan is selected in the intermediate layer
Radical siloxane material makes.
6. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein being prepared by the way of electro-coppering
The first electrode layer and the second electrode lay.
7. non-intrusion type wireless and passive intraocular pressure sensor according to claim 2, wherein the intraocular pressure sensor is MEMS
Sensor, and the intraocular pressure sensor is curved surface sensor.
8. a kind of preparation method of non-intrusion type wireless and passive intraocular pressure sensor, comprises the following steps：
Using vaccum gas phase sedimentation method, one layer of flexible material with bio-compatibility is deposited on substrate；
Deposition chromium/gold seeds layer on the flexible material；
Coating photoresist and photoetching in the Seed Layer, the then copper electroplating layer on photoengraving pattern；
The photoresist in non-copper electroplating layer region is removed, etching removes the chrome gold Seed Layer in the region；
Polydimethylsiloxane is coated with the structure of above-mentioned preparation as intermediate layer；
Repeat the above steps respectively obtain the chip up and down of the intraocular pressure sensor, by the use of polydimethylsiloxane as intermediate layer
It is bonded；
The structure for obtaining is peeled off from the substrate, continuation the structure for obtaining is carried out using pressure sintering it is moulding, it is described
Pressure sintering is the structure that under vacuum heat treated is fixed in curve mold, and treatment temperature is 170 DEG C, during process
Between be no less than 30min；
By the structure for obtaining from the curve mold sur-face peeling, the product of the final intraocular pressure sensor is obtained.
9. the preparation method of non-intrusion type wireless and passive intraocular pressure sensor according to claim 8, wherein described with life
The flexible material of thing compatibility is Parylene C thin film, and thickness is 5-25 μm.
10. the preparation method of non-intrusion type wireless and passive intraocular pressure sensor according to claim 8, wherein in the etching
Also include the step of deposit is removed using ammonia and dioxygen water dissolution in the step of removing the chrome gold Seed Layer in the region.
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| CN105962887B (en) * | 2016-04-13 | 2017-09-12 | 华中科技大学 | A kind of non-intrusion type detection of eyeball tension sensor based on micro-fluidic technologies |
| CN108056755B (en) * | 2017-12-08 | 2020-05-19 | 华中科技大学 | Preparation method of curved-surface conformal microfluidic device |
| CN110407161B (en) * | 2019-07-12 | 2022-02-15 | 华中科技大学 | Manufacturing method of soft curved surface microfluidic device based on conformal bonding process |
| CN111115556A (en) * | 2019-12-30 | 2020-05-08 | 青岛歌尔智能传感器有限公司 | Packaging method and packaging structure of micro-electro-mechanical system sensor |
| TWI811092B (en) * | 2022-09-06 | 2023-08-01 | 國立高雄科技大學 | Implantable rotator cuff muscle suture spacer with pressure sensing |
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| US6939299B1 (en) * | 1999-12-13 | 2005-09-06 | Kurt Petersen | Implantable continuous intraocular pressure sensor |
| US8926524B2 (en) * | 2008-06-02 | 2015-01-06 | California Institute Of Technology | System, apparatus and method for biomedical wireless pressure sensing |
| CN102423258B (en) * | 2011-09-20 | 2013-12-25 | 上海交通大学 | MEMS (Micro Electro Mechanical System) technology-based wireless transmission implantable symmetrical structure pressure sensor |
| CN103148977B (en) * | 2013-02-27 | 2016-01-20 | 东南大学 | Based on the passive and wireless pressure transducer had from encapsulation function of flexible base, board |
| CN103293337B (en) * | 2013-05-15 | 2015-07-29 | 中北大学 | Wireless and passive capacitive accelerometer |
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