CN109060931A - Vapour analysis instrument calibrating installation and calibration method - Google Patents
Vapour analysis instrument calibrating installation and calibration method Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
Abstract
The invention discloses a kind of vapour analysis instrument calibrating installation and calibration method, the vapour analysis instrument calibrating installation includes that module, vapour concentration measurement module and sampling module occur for steam；The steam occurs module and steam occurs using double pressure shunting combined techniques, including two-stage decompression valve, the 1st triple valve and mixer, the two-stage decompression valve for being depressured the gas in pipeline twice, 1st triple valve is for the gas distribution after being depressured by the two-stage decompression valve to dry gas pipeline and moisture pipeline, the mixer is used to mix the moisture in the dry gas and the moisture pipeline in the dry gas pipeline, so that steam occur；The vapour concentration measurement module is used to measure the steam and the vapour concentration that module occurs occurs, and the sampling module is used to that the steam that module occurs to occur to the steam to be sampled.The present invention can carry out accurate alignment to small inside cavity steam mass spectrometer, to ensure the accuracy of air locking internal steam analysis.
Description
Technical field
The invention belongs to measurement and calibration field, it is related to a kind of vapour analysis instrument calibrating installation and calibration method.
Background technique
Small inside cavity steam mass spectrometer is a kind of for the intracorporal steam of analysis detection electronic component seal chamber
The Analytical high resolution instrument of content is to detect only available high score to hermetically sealed electron-like component internal steam at present
Resolution analysis instrument.The equipment by automatic (manual) lancing system, mass spectrograph (including vacuum pump, ion source, mass analyzer,
Detector etc.), test data processing system composition.Its test philosophy is to puncture an aperture, sample in tested sample cavity wall
Internal atmosphere enters vacuum system by aperture, is analyzed by mass spectrograph, and the ingredient in sample ionizes in an ion source,
The positively charged ion of different charge-mass ratios is generated, the effect of accelerated electric field forms ion beam, into mass analyzer.In matter
In contents analyzer, recycles electric field or magnetic field to make the ion spatially or temporally upper separation of different mass-to-charge ratioes, they are distinguished
Detector is focused on, is finally calculated by data processing system, mass spectrogram is obtained, so that it is related to concentration (or partial pressure) to obtain quality
Map, by with concentration known to obtain the actual concentrations size of sample to be tested compared with standard sample.
Mass spectrometer is generally used standard substance and carries out transmission of quantity value, point of small inside cavity steam mass spectrometer
Analysis sample has its particularity: the small small gas flow for analysis of cavity body inner volume is few, vapour concentration is low, is sampled using puncture
Mode sample introduction, gas component are influenced etc. by material adsorption/desorption, and small cavity steam sample vapour concentration magnitude keeps very tired
Difficulty easily changes, unstable, and sample is unable to long-term preservation, therefore needs when the calibration of small inside cavity steam mass spectrometer
Small cavity steam standard sample is prepared in real time.
For the calibrating installation of small inside cavity steam mass spectrometer, firstly, it is necessary to occur in real time containing certain
The atmosphere of vapour concentration, small inside cavity steam mass spectrometer need to test moisture content in sealed electronic device, accurate electricity
Sub- device generally uses metal, ceramics, glass-encapsulated, and inside is cavity structure, filled with high pure nitrogen or other inert gases, chamber
Vapour concentration is low in body internal gas, and vapour concentration need to occur in real time for calibrating installation down to 100 × 10-6I.e. relative humidity is
The atmosphere of 0.3% (25 DEG C, 1atm), it is gas source, the humidity model of generation that existing humidity device1, which mostly uses greatly compressed air,
It encloses for (5%~10%), magnitude range is unable to satisfy needs.In addition, the stabilization moisture that humidity device1 generates is stored in survey
Try room, small inside cavity steam mass spectrometer test sample be Direct perforantes sample sealing shell sampling, sample seal chamber with
The sampling equipment of analyzer is in close contact, and cannot have gas leakage or extraneous gas (outside sample seal chamber) to enter the vacuum of analyzer
Chamber, it is clear that vapour analysis instrument can not be sampled directly from test cabinet, this requires a special load with the small cavity of sealing
Body will stablize the transmission of quantity value of moisture content in atmosphere to vapour analysis instrument.
Small cavity is since space is small, and sampling amount is small, magnitude is easy by environmental disturbances, and material of air-channel system itself also has
Certain adsorptivity, and material itself can also discharge interference element, how to keep calibrating gas sample magnitude accurate stable, have
Very big challenge and very big difficulty, this be also the reason of internal steam mass spectrometer is unable to get always measurement and calibration it
One.
Currently, due to lacking suitable small inside cavity steam mass spectrometer calibrating installation, it can not be to small inside cavity
Steam mass spectrometer is calibrated, and magnitude tracing can not be correctly carried out, thus the accuracy of air locking internal steam analysis
It can not ensure.
Summary of the invention
The purpose of the present invention is to provide a kind of structures it is simple, small in size it is easy to carry, easy to operate, operating cost is low
Vapour analysis instrument calibrating installation and calibration method solve the calibration problem of small inside cavity steam mass spectrometer.
To achieve the goals above, one aspect of the present invention provides a kind of vapour analysis instrument calibrating installation, and feature exists
In, including steam generation module, vapour concentration measurement module and sampling module；The steam occurs module and shunts knot using double pressures
Legal generation steam, including two-stage decompression valve, the 1st triple valve and mixer, the compressed gas cylinder is for storing and mentioning to pipeline
For compressed gas, the two-stage decompression valve for being depressured the gas in pipeline twice, and the 1st triple valve will be for that will lead to
The gas distribution after the two-stage decompression valve is depressured is crossed to dry gas pipeline and moisture pipeline, the mixer is used for the dry gas
Moisture mixing in dry gas and the moisture pipeline in pipeline, so that steam occur；The vapour concentration measurement module is used for
It measures the steam and the vapour concentration that module occurs occurs, the sampling module is used to that the water that module occurs to occur to the steam
Vapour is sampled.
Another aspect of the present invention provides a kind of vapour analysis instrument calibration method, is calibrated using above-mentioned vapour analysis instrument
Device calibrates vapour analysis instrument, comprising the following steps: mould occurs using the steam of the vapour analysis instrument calibrating installation
Steam sample occurs for block；The steam sample is sampled using the sampling module of the vapour analysis instrument calibrating installation；Benefit
The steam component of the steam sample obtained with the vapour concentration measurement module measurement sampling of the vapour analysis instrument calibrating installation contains
Amount；Utilize the steam constituent content for the steam sample that vapour analysis instrument measurement sampling obtains；Calculate the vapour analysis instrument
The error of measurement result, to be calibrated to the vapour analysis instrument.
The vapour analysis instrument calibrating installation and calibration method of above-mentioned aspect according to the present invention, can be to small inside cavity water
Vapour mass spectrometer carries out accurate alignment, to ensure the accuracy of air locking internal steam analysis.
Detailed description of the invention
Fig. 1 is that the structural representation of module occurs for the steam of the vapour analysis instrument calibrating installation of one embodiment of the present invention
Figure；
Fig. 2 is that the structure of the vapour concentration measurement module of the vapour analysis instrument calibrating installation of one embodiment of the present invention is shown
It is intended to；
Fig. 3 is the structural schematic diagram of the sampling module of the vapour analysis instrument calibrating installation of one embodiment of the present invention.
Fig. 4 is the structural schematic diagram of the sampling cavity in Fig. 3.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, below in conjunction with attached drawing to the present invention
Specific embodiment be described in further detail.
Embodiments of the present invention provide a kind of vapour analysis instrument calibrating installation, including module, vapour concentration occur for steam
Measurement module and sampling module.Steam occurs module and steam occurs using double pressure shunting combined techniques, and vapour concentration measurement module is adopted
Steam accurately being measured with dew point method, the vapour concentration that module occurs occurring, sampling module realizes the Dynamic sampling to steam.
Module occurs for steam
Fig. 1 is that the structural representation of module occurs for the steam of the vapour analysis instrument calibrating installation of one embodiment of the present invention
Figure.As shown in Figure 1, high pure nitrogen is stored in the compressed gas cylinder 11 (pressure-bearing steel cylinder) of 4L~8L, by pressure reducing valve 12 by pipeline
In nitrogen pressure drop to 1.5MPa~8.0MPa, at this pressure by the 1st pressure gauge 13 measure monitor, then pass through the 1st flow
Regulating valve 15 adjusts the gas flow in pipeline, and the nitrogen pressure in pipeline drops to 0.15MPa~4.0MPa, is depressured by two-stage
High pure nitrogen by the 1st triple valve 16, air-flow is divided into two strands, flows through two-stage water-vapo(u)r saturation device 22,23 by the 1st triple valve 16
Nitrogen is known as moisture, and the nitrogen for being not passed through water-vapo(u)r saturation device is known as dry gas, the 2nd flow control valve 17 and the 3rd flow control valve 18
Flow control can be carried out to dry gas and moisture respectively, there is filler 21 on the top of the first water-vapo(u)r saturation device 22, when need to add water
It opens valve and adds a small amount of water (20~80 drop left and right) from this, be in off state at this when being not required to addition water, it is full from two-stage steam
With device 22,23 come out moisture pass through 24 expansion decompression of metering valve, pressure is reduced to 0.12MPa~0.16MPa, at this pressure by
Then 3rd pressure gauge, 25 precise measurement is being mixed with the dry gas for being not passed through two-stage water-vapo(u)r saturation device 22,23 by the 2nd triple valve 26
It is sufficiently mixed in clutch 27, forms one new wet gas current later, moisture content can pass through aftermentioned steam in the wet gas current
Measurement of concetration module Accurate Determining.
It can also include: the 3rd triple valve connecting with the 1st pressure gauge 13 that module, which occurs, for the low humidity steam of present embodiment
14, the 2nd pressure gauge 19 that measures to the nitrogen pressure for flowing through the 3rd flow control valve 18 is connect with the 2nd pressure gauge 19
4th triple valve 20.
Module occurs for the low humidity steam of present embodiment steam range occurs to belong to low humidity steam, be magnitude is steam volume
Percentage composition is (10~20000) × 10-6Low humidity steam.
High-purity compressed nitrogen after decompression can be divided into two strands of air-flows by the 1st triple valve 16, one is full by two-stage steam
Mixer 27 (referred to as moisture) is entered back into device 22,23, metering valve 24, one is passed directly into mixer 27 (referred to as dry gas), leads to
It crosses the 2nd flow control valve 17 and the 3rd flow control valve 18 adjusts the uninterrupted of two strands of gas, play control moisture and dry gas stream
The principle of steam occurs according to shunting for the effect for measuring ratio, that is, plays the role of adjusting moisture content in air-flow.
In the present embodiment, when steam generation module needs to add water, the screw of filler 21 gone out on pipeline is unscrewed just
Water can be added from there, add and once add 20~80 drop left and right when water, filler 21 is located at the top of the first water-vapo(u)r saturation device 22,
The water instilled in this way flows downwardly into the first water-vapo(u)r saturation device 22 under gravity or so, is stored under the first water-vapo(u)r saturation device 22
End.
In the present embodiment, water-vapo(u)r saturation device includes two-stage water-vapo(u)r saturation device 22,23, for that will enter water-vapo(u)r saturation device
Gas water-vapo(u)r saturation, be allowed under certain temperature and pressure, equilibrium state kept between the water surface.As shown in Figure 1, the first water
There is a bit of U-shaped connecting tube between vapour saturator 22 and the second water-vapo(u)r saturation device 23, the internal diameter of saturator is much larger than connection caliber,
Air-flow flows into the first water-vapo(u)r saturation device 22 from above, by connecting tube, then flows into the second water-vapo(u)r saturation device 23 from the bottom up, passes through
Metering valve 24 flows out after being depressured.U-shaped connecting tube is in least significant end, after adding water from 22 top of the first water-vapo(u)r saturation device in this way, water
U-tube lower part can be flowed under the effect of gravity, and when drying nitrogen air-flow flows into, water enters the with air-flow together in U-tube
Two water-vapo(u)r saturation devices 23, since the caliber of the second water-vapo(u)r saturation device 23 is much larger than U-tube diameter, water not enough fills the second water-vapo(u)r saturation
Device 23, gas are saturated from a small amount of water, and water has stayed in the second water-vapo(u)r saturation device 23, conversely, working as off-test, close gas
Source, water flow return intermediate U-tube, and the first water-vapo(u)r saturation device 22 also functions to protective effect, the pipeline before preventing water from flowing to filler
In, it is therefore prevented that moisture flows into dry gas pipeline.
It is also a kind of easy steam generating device that module, which occurs, for steam, is not included in common steam generating device in device
Some gas-drying apparatus, compression device, temperature controlling instruments etc., therefore volume is relatively small, it is easy to carry.
Vapour concentration measurement module
Vapour concentration measurement module accurately measures vapour concentration using dew point method, and accurate chilled-mirror dew-point hygrometer can be used.Fig. 2
For the structural schematic diagram of the vapour concentration measurement module of the vapour analysis instrument calibrating installation of one embodiment of the present invention.Such as Fig. 2
It is shown, vapour concentration measurement module may include dew point testing display 31, dew point testing probe 32, pressure test probe 33,
Transmitter 34, flow control valve, triple valve, jointing, cutting ferrule pipe etc..
Vapour concentration measurement module with pressure test probe 33, the measurement range of pressure test probe 33 be (0~
10) MPa, it is not to be always maintained at normal pressure, pressure is dew point and vapour concentration that the pressure of gas, which has small-scale fluctuation, in pipeline
Parameter when conversion is modified pressure in reduction formula so needing to carry out real-time pressure measurement.Accurate chilled-mirror type
The measurement range of the dew point testing probe 32 of dew point hygrometer is (- 60~40) DEG C, according to dew point/steam constituent content reduction formula meter
Calculation obtains steam constituent content value, and wherein water-vapo(u)r saturation vapour pressure is calculated by Wexler formula, at one atm, right
The measurable vapour concentration range answered is (19.3~78569) × 10-6, can satisfy vapour analysis instrument needs.
Sampling module
Sampling module realizes that Dynamic sampling, Fig. 3 are the vapour analysis instrument school of one embodiment of the present invention using sampling cavity
The structural schematic diagram of the sampling module of standard apparatus.As shown in figure 3, sampling module includes sampling tracheae 51, the 5th triple valve 52, adopts
Sample chamber 53, the 6th triple valve 54, bypass duct 55.5th triple valve 52 and sampling tracheae 51,55 phase of sampling cavity 53 and bypass duct
Even, when the 5th triple valve 52 screw switch with sampling tracheae 51 it is parallel when, sampling gas circuit open, bypass closing, sample gas from
Sampling cavity 53 flows through, when the 5th triple valve 52 screw switch with sampling tracheae 51 it is vertical when, bypass open, sampling gas circuit close,
It is flowed through in sampling cavity 53 without gas.
The internal structure of sampling cavity 53 as shown in figure 4, tracheae 44 of the root canal inner wall Jing Guo specially treated be embedded in it is stainless
In outer steel shell 41, tracheal wall 42 is very thin, opens a circular aperture, i.e. calibration hole 46 above tracheae 44, in sampling process, calibration hole 46
The round corrector strip 45 of top patch one, the diameter of corrector strip 45 is more slightly larger than calibration hole 46, and is in close contact with tracheal wall 42, corrector strip
45 be slide plate 43 that two panels can horizontally slip above, and slide plate 43, which closes up, when sampling covers corrector strip 45, and corrector strip 45 is pressed
It closely closes, prevents gas from leaking, sampling finishes when needing test sample, and slide plate 43 is opened into half and exposes a part of corrector strip 45,
Sampling probe punctures from corrector strip 45, is vacuum in instrument sampling cavity, and closed atmosphere will be in the work of inside and outside differential pressure in sample
Enter instrument sampling cavity with lower.After being completed, left and right slide plate 43 is fully opened, the corrector strip 45 more renewed, then by slide plate
43 close up and compress.
Sampling cavity 53 is designed using left and right slide plate, and replacement corrector strip is easy to operate, and corrector strip is disposable, Ke Yigeng
It changes, sampling cavity may be reused, and save use cost.
Original gas can be replaced thoroughly in the cavity of sampling cavity 53, in real time prepare, sample preparation is quick, a large amount of under test gas from
Sampling cavity flows through, short in the intracavitary residence time, the influence amount of material for gaseous adsorption/desorption will not increase at any time and accumulate,
Material absorption, influence of deflating can be greatly reduced.
Preferably, the vapour analysis instrument calibrating installation of embodiment of the present invention can also include microthermometer, for pair
Vapour analysis instrument carries out temperature correction.Microthermometer uses measurement range for the platinum resistance thermometer of (- 200~850) DEG C, platinum
Resistance thermometer temperature change is responded it is fast, it is easy to use, with digital multimeter with the use of can continuous real-time measurement, and can deposit
Store up mass data, can feedback temperature profile figure, convenient for real time monitoring.
Three module, steam constituent content measurement module, sampling module module connections are occurred into for above-mentioned steam with tracheae
Get up, constitutes the vapour analysis instrument calibrating installation of embodiment of the present invention.
Embodiments of the present invention also provide a kind of calibration method, as a specific example, using above-mentioned calibrating installation
The vapour analysis instrument of one ORS company production is calibrated, specific calibration method is as follows:
(1) temperature measures
Temperature controller presses digital temperature indicating regulator vertification regulation, is calibrated with microthermometer, temp probe
By temperature sensor calibration method, microthermometer and temp probe are placed in instrument temperature control field simultaneously, to instrument temperature controller
After table displays temperature value is stablized, microthermometer and instrument temperature control instrument show value are read, is calculated by the temperature of school instrument
Deviation.
(2) mass range
The mass number of mass spectra peak is observed after mass spectrum tuning in the quality section of the be capable of measuring sample of vapour analysis instrument.
(3) resolution ratio
After instrument stabilizer, using air as unstripped gas, is sampled with the sampling module in calibrating installation of the invention, measure sample
Middle carbon dioxide component, record44CO2 +With45CO2 +Mass spectrum,44CO2 +Mass number be calculated as M1,45CO2 +Mass number be calculated as M2, survey
Measure between two peak centers distance b and44CO2 +Peak width a at peak height 5%, by following formula calculating resolution R.
(4) sensitivity
Module occurs with the steam in calibrating installation of the invention and prepares steam reference sample, is to survey with steam reference sample
Test agent records characteristic ion intensity of flow I1With steam constituent content c1, background ions intensity of flow is I2, high pure nitrogen (background)
Middle steam constituent content c2, c is correction coefficient, by following formula meter sensitivity S.
(5) the moisture content error of indication
The reference sample that 4 different vapour concentrations occur for module occurs with the steam in calibrating installation of the invention, uses water
Vapour analyzer measures reference sample vapour concentration, establishes the calibration curve of ion intensity of flow and gas concentration, then measures wherein
(vapour concentration in calibrating installation of the invention measures for one reference sample vapour concentration, resulting result and precise dew-point hygrometer
Module) the steam constituent content value that measures is compared, calculate the moisture content error of indication.Specific step is as follows:
A) instrument booting preheating 30min.
B) module occurs magnitude successively occurs to be about 1000 × 10 with the steam in calibrating installation of the invention-6Steam sample
Product, device magnitude to be calibrated use vapour analysis instrument to measure reference sample vapour concentration after stablizing.
C) magnitude successively occurs with calibrating installation of the invention is about 4000 × 10-6、7000×10-6、10000×10-6Deng
The reference sample of different vapour concentrations, device magnitude to be calibrated use vapour analysis instrument to measure reference sample vapour concentration after stablizing.
D) calibration curve of ion intensity of flow and gas concentration is established.
E) magnitude about 5000 × 10 occurs with calibrating installation of the invention-6Steam sample, continuous measurement 3 times is resulting
As a result the steam constituent content value measured with precise dew-point hygrometer is compared, and calculates the moisture content error of indication.
F) relative error (RE) of measurement result is calculated.
In formula: xiSingle measurements；
Measure average value；
N- pendulous frequency, n=3.
In formula: RE- relative error；
xrReference value.
(6) measurement reproducibility
In the case where instrument is in normal operating conditions, steam reference sample 6 times of concentration of the same race are continuously measured, calculate 6 surveys
Measure the standard deviation (RSD) of result average value, the as measurement reproducibility of instrument.
In formula: RSD- relative standard deviation, %；
xiSingle measurements；
Measure average value；
N- pendulous frequency, n=6.
(7) calibration result is expressed
After calibration, calibration certificate is provided.Calibration certificate is made of cover and calibration data page.Cover is determined by correcting mechanism
Unified format, calibration data is according to the case where being tested instrument and calibrating situation and filled in.
Resume classes time interval: prover time interval is voluntarily determined by user according to service condition, is recommended as 1 year.Repair or
After adjustment, answering calibrated could be used.
As described above, the vapour analysis instrument calibrating installation and calibration method of embodiment of the present invention, for small inside cavity
The composed structure and feature of steam mass spectrometer, to the parameters such as the temperature being related to of mass spectrometer, steam constituent content into
It has gone calibration, the calibrating installation and method strong operability, has improved the accuracy of small inside cavity vapour atmosphere analysis, solve
The calibration problem and its magnitude tracing problem of small inside cavity steam mass spectrometer, provides skill for air locking vapour analysis
Art guarantee.
The foregoing is merely preferable embodiments of the invention, are not intended to limit the invention, all in the present invention
Spirit and principle within made any modification, equivalent replacement, improvement etc., should be included in protection scope of the present invention it
It is interior.
Claims (12)
1. a kind of vapour analysis instrument calibrating installation, which is characterized in that module, vapour concentration measurement module occurs including steam and adopts
Egf block；
The steam occurs module and steam, including two-stage decompression valve, the 1st triple valve and mixing occurs using double pressure shunting combined techniques
Device, for storing and providing compressed gas to pipeline, the two-stage decompression valve is used for the gas in pipeline the compressed gas cylinder
It is depressured twice, the 1st triple valve is for the gas distribution after being depressured by the two-stage decompression valve to dry gas pipeline
With moisture pipeline, the mixer is used to mix the moisture in the dry gas and the moisture pipeline in the dry gas pipeline, from
And steam occurs；
The vapour concentration measurement module is used to measure the steam and the vapour concentration that module occurs occurs,
The sampling module is used to that the steam that module occurs to occur to the steam to be sampled.
2. vapour analysis instrument calibrating installation according to claim 1, which is characterized in that
Module occurs for the steam further include: compressed gas cylinder and water-vapo(u)r saturation device, the compressed gas cylinder is for storing and to pipeline
Compressed gas is provided；The water-vapo(u)r saturation device includes two-stage water-vapo(u)r saturation device, for making the gas steam into water-vapo(u)r saturation device
Saturation, wherein the dry gas pipeline is connected with the mixer, the moisture pipeline by the water-vapo(u)r saturation device with it is described
Mixer is connected.
3. vapour analysis instrument calibrating installation according to claim 2, which is characterized in that further include the 2nd triple valve, flow through institute
The gas stating the gas in the moisture pipeline of water-vapo(u)r saturation device and being not passed through in the dry gas pipeline of the water-vapo(u)r saturation device
Body is mixed in the mixer by the 2nd triple valve.
4. vapour analysis instrument calibrating installation according to claim 2 or 3, which is characterized in that it further include metering valve, the meter
Amount valve is set between the water-vapo(u)r saturation device and the mixer, swollen for carrying out to the gas for flowing through the water-vapo(u)r saturation device
Swollen decompression.
5. vapour analysis instrument calibrating installation described in any one of -4 according to claim 1, which is characterized in that further include the 2nd
Flow control valve and the 3rd flow control valve are respectively used to the gas in the gas and the moisture pipeline in the dry gas pipeline
Body carries out flow control.
6. vapour analysis instrument calibrating installation described in any one of -5 according to claim 1, which is characterized in that the steam is dense
Degree measurement module includes dew point testing probe and pressure test probe, is respectively used to the dew point and pressure of gas in test pipeline.
7. vapour analysis instrument calibrating installation described in any one of -6 according to claim 1, which is characterized in that the sampling mould
Block includes sampling tracheae and sampling cavity, and the sampling tracheae is connected to the sampling cavity.
8. vapour analysis instrument calibrating installation according to claim 7, which is characterized in that the sampling cavity includes sampling cavity sheet
Body, the sampling cavity ontology is interior to have sampling cavity, the calibration that the sampling cavity ontology is equipped with and the sampling cavity is connected to
Hole.
9. vapour analysis instrument calibrating installation according to claim 8, which is characterized in that place the upper surface of the calibration hole
There are corrector strip and two panels slide plate, the two panels slide plate is for compressing the corrector strip.
10. vapour analysis instrument calibrating installation described in any one of -9 according to claim 1, which is characterized in that further include essence
Close thermometer, for carrying out temperature correction to vapour analysis instrument.
11. a kind of vapour analysis instrument calibration method, which is characterized in that utilize steam described in any one of claim 1-10
Analyzer calibrating installation calibrates vapour analysis instrument, comprising the following steps:
Module occurs using the steam of the vapour analysis instrument calibrating installation, steam sample occurs；
The steam sample is sampled using the sampling module of the vapour analysis instrument calibrating installation；
Utilize the steam for the steam sample that the vapour concentration measurement module measurement sampling of the vapour analysis instrument calibrating installation obtains
Constituent content；
Utilize the steam constituent content for the steam sample that vapour analysis instrument measurement sampling obtains；
The error of the vapour analysis instrument measurement result is calculated, to calibrate to the vapour analysis instrument.
12. vapour analysis instrument calibration method according to claim 11, which is characterized in that further comprising the steps of: utilizing
Microthermometer carries out temperature correction to the vapour analysis instrument.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111983142A (en) * | 2020-07-28 | 2020-11-24 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Testing device and method for atmosphere detection device |
| CN113899509A (en) * | 2021-09-17 | 2022-01-07 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method and system for detecting moisture influence resistance of packaging device |
| CN116448508A (en) * | 2023-06-15 | 2023-07-18 | 北京朗时云帆科技有限公司 | Laser puncture semiconductor water vapor content sampling method and sampling device |
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| CN113899509B (en) * | 2021-09-17 | 2024-03-26 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method and system for detecting moisture influence resistance of packaging device |
| CN116448508A (en) * | 2023-06-15 | 2023-07-18 | 北京朗时云帆科技有限公司 | Laser puncture semiconductor water vapor content sampling method and sampling device |
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