CN107576760A - Hermetic seal device inside atmosphere content test fixture and method - Google Patents
Hermetic seal device inside atmosphere content test fixture and method Download PDFInfo
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- CN107576760A CN107576760A CN201710800867.9A CN201710800867A CN107576760A CN 107576760 A CN107576760 A CN 107576760A CN 201710800867 A CN201710800867 A CN 201710800867A CN 107576760 A CN107576760 A CN 107576760A
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Abstract
The present invention relates to a kind of hermetic seal device inside atmosphere content test fixture and method, fixture includes puncturing bottom plate and seal cover board.The first side for puncturing bottom plate is provided with the recess of installing hermetic seal device testing sample, and is provided with the groove of installing sealing ring.The second side for puncturing bottom plate is provided with puncturing hole corresponding with recess location.Seal cover board is used to cover the first side for being located at and puncturing bottom plate, and seal cover board side is used to seal with sealing ring and coordinated.Above-mentioned hermetic seal device inside atmosphere content test fixture can be easy to install hermetic seal device testing sample, and after the recess for puncturing bottom plate is carried out encapsulation process by seal cover board, sealing ring, can be by puncturing hole by the gap vacuumize process between hermetic seal device testing sample and recess, interference of the outside atmosphere to hermetic seal device inside atmosphere can so be reduced as far as possible, also hermetic seal device inside atmosphere can be avoided to diffuse in external environment condition, so as to which internal atmosphere content measuring result accuracy is high.
Description
Technical field
The present invention relates to hermetic seal device inside atmosphere content technical field of measurement and test, more particularly to a kind of hermetic seal device
Internal atmosphere content measuring fixture and method.
Background technology
Traditional hermetic seal device inside atmosphere content method of testing is：The burnishing surface of hermetic seal device detection sample is led to
O-ring seal is crossed to be connected on internal atmosphere analyzer, then O-ring seal inner sample near surface is logical together with whole sampling
The equal vacuumize process in road, finally prick through hole on the burnishing surface of the test sample with puncture needle and be sampled test.It is however, traditional
Method of testing for the hermetic seal device that cavity volume is 0.01cc~0.03cc, or the irregular gas of case surface
Air locking, or when the frangible hermetic seal device of case surface carries out internal atmosphere content measuring, hermetic seal device inside envelope
The accuracy for filling the test result of atmosphere content is poor.
The content of the invention
Based on this, it is necessary to the defects of overcoming prior art, there is provided a kind of hermetic seal device inside atmosphere content test clip
Tool and method, it can improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
Its technical scheme is as follows：A kind of hermetic seal device inside atmosphere content test fixture, including：Bottom plate is punctured, it is described
The first side for puncturing bottom plate is provided with for installing the recess of hermetic seal device testing sample, and is provided with close for installing
The groove of seal, the groove is circumferentially disposed around the recess, and the second side for puncturing bottom plate is provided with and the recess
The corresponding puncturing hole in position, the puncturing hole run through the recess bottom wall；And seal cover board, the seal cover board are located at for lid
The first side for puncturing bottom plate, the seal cover board side are used to seal with the sealing ring and coordinated.
Above-mentioned hermetic seal device inside atmosphere content test fixture, can be 0.01cc~0.03cc's by cavity volume
Hermetic seal device testing sample, either the irregular hermetic seal device testing sample of case surface or case surface are frangible
Hermetic seal device testing sample is installed up in the recess for puncturing bottom plate, and will puncture the recessed of bottom plate by seal cover board, sealing ring
Portion carries out encapsulation process, then the puncture needle of test equipment is fitted into puncturing hole, will be airtight by puncturing hole by test equipment
The gap vacuumize process sealed between device testing sample and recess, by the shell of spike pierces hermetic seal device testing sample
Body, sampling obtain the atmosphere in hermetic seal device testing sample cavity.In this way, above-mentioned hermetic seal device inside atmosphere content is surveyed
Examination fixture can be easy to install hermetic seal device testing sample, and because seal cover board, sealing ring enter the recess for puncturing bottom plate
After row encapsulation process, the gap between hermetic seal device testing sample and recess can be taken out very by puncturing hole by test equipment
Vacancy is managed, and can so be reduced interference of the outside atmosphere to hermetic seal device inside atmosphere as far as possible, can also be avoided hermetic seal device
Part internal atmosphere is diffused in external environment condition, so as to improve the test result of hermetic seal device inside encapsulation atmosphere content
Accuracy.
In one of the embodiments, the recess is adapted with the hermetic seal device testing sample.In this way, when airtight
After envelope device testing sample is fitted into recess, hermetic seal device testing sample side wall is in contact with recess sidewalls, hermetic seal device
Gap between part testing sample and recess sidewalls is smaller, can so reduce outside atmosphere as far as possible to hermetic seal device inside atmosphere
Interference, can also avoid hermetic seal device inside atmosphere from diffusing in external environment condition, so as to improve in hermetic seal device
The accuracy of the test result of portion's encapsulation atmosphere content.
In one of the embodiments, the volume V1 of the recess is with the volume V2's of the hermetic seal device testing sample
Relation is：V2≤V1≤110%V2.In this way, recess volume size is slightly larger than hermetic seal device testing sample volume size, it is airtight
Envelope device testing sample can be easy to be fitted into recess, also allow for forming recess on bottom plate is punctured.In addition, hermetic seal device
After testing sample is fitted into recess, the gap between hermetic seal device testing sample and recess sidewalls is smaller, so can be as far as possible
Reduce interference of the outside atmosphere to hermetic seal device inside atmosphere, can also avoid hermetic seal device inside atmosphere from diffusing to outside
In environment, so as to improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
In one of the embodiments, the seal cover board is provided with bottoming hole, and the bottoming hole is used to load heating rod.
Seal cover board is heated into bottoming hole in this way, heating rod is filled in, seal cover board temperature is promoted to 100 DEG C,
The ambiance that hermetic seal device testing sample shell is adsorbed can so be driven away, hermetic seal device testing sample is improved and be punctured
The accuracy of internal atmosphere content measuring during sampling.
In one of the embodiments, the bottoming hole extends to the sealing from the wherein one side of the seal cover board
Inside cover plate, the another side of the seal cover board is provided with the fastener hole communicated with the bottoming hole, and the fastener hole is used to fill
Enter fastener.In this way, after heating rod is filled in into the bottoming hole of seal cover board, then fastener is filled in into fastener hole will heating
Rod is fastened in the bottoming hole of seal cover board.
In one of the embodiments, described hermetic seal device inside atmosphere content test fixture also includes compacting machine
Structure, the hold-down mechanism are used to the seal cover board being pressed on the puncture bottom plate.In this way, hold-down mechanism causes closure
After plate is pressed on puncture bottom plate, it can ensure to seal cooperation between seal cover board and sealing ring.
In one of the embodiments, the hold-down mechanism includes mounting bracket, movable block and push rod, the mounting bracket
Provided with sliding part, the movable block can move along the sliding part, and the push rod is connected with movable block transmission, described
Movable block is used to oppress in seal cover board.In this way, after push rod promotes movable block to be moved along sliding part, it can make it that movable block is tight
Press urgent seal cover board.
In one of the embodiments, the mounting bracket is provided with rotation hole corresponding with the push rod, and the push rod is worn
Cross the rotation hole to be rotatably arranged in the mounting bracket, the push rod is screwed pipe, and the movable block is provided with and institute
The screw rod of screwed pipe relative set is stated, the screw rod is fitted into the screwed pipe., can be to live in this way, rotating push-rod
Motion block movement compressing seal cover board.After seal cover board compresses puncture bottom plate, just stop operating push rod, and movable block locks seal cover board
Fasten.
A kind of hermetic seal device inside atmosphere content method of testing, employ described hermetic seal device inside atmosphere content
Test fixture, comprise the following steps：The hermetic seal device testing sample is fitted into the recess of the puncture bottom plate, and led to
Cross seal cover board, the recess of the puncture bottom plate is carried out encapsulation process by sealing ring；The puncture needle of test equipment is loaded to wearing
In acanthopore；The gap between the hermetic seal device testing sample and recess is taken out by the puncturing hole by the test equipment
Application of vacuum；Make the housing of hermetic seal device testing sample described in the spike pierces of the test equipment, by described
Test equipment gets the internal atmosphere of the hermetic seal device testing sample.
Above-mentioned hermetic seal device inside atmosphere content method of testing, its technique effect and above-mentioned hermetic seal device inside
The technique effect of atmosphere content test fixture is identical.
In one of the embodiments, load by the hermetic seal device testing sample to the recess of the puncture bottom plate
Also include step before middle step：By the hermetic seal device testing sample, described puncture bottom plate and described seal cover board
Heated, make the hermetic seal device testing sample, the described temperature for puncturing bottom plate and described seal cover board
Rise to more than 100 DEG C；
It is fitted into by the puncture needle of test equipment into puncturing hole after step, and makes described in the test equipment
Also include step before the housing of hermetic seal device testing sample described in spike pierces：
Seal cover board is heated, the temperature of seal cover board is risen to more than 100 DEG C.
Brief description of the drawings
Fig. 1 is the structural representation one of the hermetic seal device inside atmosphere content test fixture described in the embodiment of the present invention；
Fig. 2 is the structural representation two of the hermetic seal device inside atmosphere content test fixture described in the embodiment of the present invention；
Fig. 3 is the structural representation three of the hermetic seal device inside atmosphere content test fixture described in the embodiment of the present invention；
Fig. 4 is the structural representation of the puncture bottom plate described in the one of embodiment of the present invention；
Fig. 5 is sectional views of the Fig. 4 at A-A；
Fig. 6 is the structural representation of the puncture bottom plate described in another embodiment of the present invention；
Fig. 7 is the structural representation of the seal cover board described in the embodiment of the present invention.
Reference：
10th, bottom plate is punctured, 11, recess, 12, groove, 13, puncturing hole, 20, seal cover board, 21, bottoming hole, 22, fastening
Hole, 31,32, sealing ring, 40, hermetic seal device testing sample, 50, hold-down mechanism, 51, mounting bracket, 511, sliding part, 52,
Movable block, 521, screw rod, 53, push rod, 60, test equipment.
Embodiment
In order to facilitate the understanding of the purposes, features and advantages of the present invention, below in conjunction with the accompanying drawings to the present invention
Embodiment be described in detail.Many details are elaborated in the following description in order to fully understand this hair
It is bright.But the invention can be embodied in many other ways as described herein, those skilled in the art can be not
Similar improvement is done in the case of running counter to intension of the present invention, therefore the present invention is not limited by following public specific embodiment.
In the description of the invention, it is to be understood that term " first ", " second " are only used for describing purpose, and can not
It is interpreted as indicating or implies relative importance or imply the quantity of the technical characteristic indicated by indicating.Thus, define " the
One ", at least one this feature can be expressed or be implicitly included to the feature of " second ".In the description of the invention, " multiple "
It is meant that at least two, such as two, three etc., unless otherwise specifically defined.
In the description of the invention, it is to be understood that, can be with when an element is considered as " connection " another element
It is directly to another element or may be simultaneously present intermediary element.On the contrary, when element for be referred to as " direct " with it is another
When element connects, in the absence of intermediary element.
Any one width of Fig. 1 to Fig. 3 is referred to, and is surveyed refering to Fig. 4 and Fig. 5, a kind of hermetic seal device inside atmosphere content
Fixture is tried, including punctures bottom plate 10 and seal cover board 20.The first side for puncturing bottom plate 10 is provided with airtight for installing
The recess 11 of device testing sample 40 is sealed, and is provided with the groove 12 for installing sealing ring 31.The groove 12 is around described
Recess 11 is circumferentially disposed.The second side for puncturing bottom plate 10 is provided with puncturing hole 13 corresponding with the position of recess 11.
The puncturing hole 13 runs through the bottom wall of recess 11.The seal cover board 20 is used to cover the first side for being located at the puncture bottom plate 10
Face, the side of seal cover board 20 are used to seal with the sealing ring 31 and coordinated.
Above-mentioned hermetic seal device inside atmosphere content test fixture, can be 0.01cc~0.03cc's by cavity volume
Hermetic seal device testing sample 40, either the irregular hermetic seal device testing sample 40 of case surface or case surface are easy
Broken hermetic seal device testing sample 40 is installed up in the recess 11 for puncturing bottom plate 10, and passes through seal cover board 20, sealing ring 31
The recess 11 for puncturing bottom plate 10 is subjected to encapsulation process, then the puncture needle of test equipment 60 is fitted into puncturing hole 13, by surveying
Equipment 60 is tried by puncturing hole 13 by the gap vacuumize process between hermetic seal device testing sample 40 and recess 11, will be punctured
The housing of acupuncture relieving stagnant Qi air locking testing sample 40, sampling obtain the atmosphere in the cavity of hermetic seal device testing sample 40.Such as
This, above-mentioned hermetic seal device inside atmosphere content test fixture can be easy to install hermetic seal device testing sample 40, and by
After the recess 11 for puncturing bottom plate 10 is carried out encapsulation process by seal cover board 20, sealing ring 31, it can be passed through by test equipment 60
Puncturing hole 13 can so reduce the gap vacuumize process between hermetic seal device testing sample 40 and recess 11 outer as far as possible
Interference of portion's atmosphere to hermetic seal device inside atmosphere, hermetic seal device inside atmosphere can be also avoided to diffuse to external environment condition
In, so as to improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
In one embodiment, Fig. 4 and Fig. 6, the recess 11 and the phase of hermetic seal device testing sample 40 are referred to
Adapt to.In this way, after hermetic seal device testing sample 40 is fitted into recess 11, the side wall of hermetic seal device testing sample 40 with it is recessed
The side wall of portion 11 is in contact, and the gap between hermetic seal device testing sample 40 and the side wall of recess 11 is smaller, can so reduce as far as possible
Interference of the outside atmosphere to hermetic seal device inside atmosphere, hermetic seal device inside atmosphere can be also avoided to diffuse to external environment condition
In, so as to improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
In another embodiment, the volume V1 of the recess 11 and the hermetic seal device testing sample 40 volume V2
Relation be：V2≤V1≤110%V2.In this way, the volume size of recess 11 is slightly larger than the volume chi of hermetic seal device testing sample 40
Very little, hermetic seal device testing sample 40 can be easy to be fitted into recess 11, also allow for forming recess 11 on bottom plate 10 is punctured.
In addition, after hermetic seal device testing sample 40 is fitted into recess 11, between hermetic seal device testing sample 40 and the side wall of recess 11
Gap it is smaller, can so reduce interference of the outside atmosphere to hermetic seal device inside atmosphere as far as possible, can also avoid airtight
Envelope device inside atmosphere is diffused in external environment condition, so as to improve the test knot of hermetic seal device inside encapsulation atmosphere content
The accuracy of fruit.Such as：Certain volume size of hermetic seal device testing sample 40 is：3.20mm × 2.50mm × 0.85mm, then wear
The volume size of recess 11 for piercing bottom plate 10 can be designed as 3.25mm × 2.56mm × 0.90mm, so as to ensure V2≤V1≤
110%V2.
In addition, also referring to Fig. 7, the seal cover board 20 is provided with bottoming hole 21.The bottoming hole 21 is used to load
Heating rod.Seal cover board 20 is heated into bottoming hole 21 in this way, heating rod is filled in, makes the temperature of seal cover board 20
100 DEG C are promoted to, can so drive away the ambiance that the shell of hermetic seal device testing sample 40 is adsorbed, improves hermetic seal device
The accuracy of internal atmosphere content measuring when testing sample 40 is punctured sampling.Wherein, bottoming hole 21 can set two or more,
Heated by two or more heating rod, can preferably improve the temperature of seal cover board 20.Seal cover board 20 can be selected
Bear the indeformable aluminium sheet of 100 DEG C of high temperature, copper coin or other metallic plates.In other embodiments, can also on seal cover board 20
Be not provided with bottoming hole 21, by heating rod directly with the thermal contact conductance of seal cover board 20.
In addition, the wherein one side of the bottoming hole 21 from the seal cover board 20 is extended in the seal cover board 20
Portion.The another side of the seal cover board 20 is provided with the fastener hole 22 communicated with the bottoming hole 21.The fastener hole 22 is used for
Load fastener.In this way, after heating rod is filled in into the bottoming hole 21 of seal cover board 20, then fastener filled in fastener hole 22
It is middle that heating rod is fastened in the bottoming hole 21 of seal cover board 20.Specifically, fastener can be screw or bolt, fastener hole 22
For mounting hole corresponding with screw or bolt.
Further, referring again to any one width of Fig. 1 to Fig. 3, described hermetic seal device inside atmosphere content test clip
Tool also includes hold-down mechanism 50.The hold-down mechanism 50 is used to the seal cover board 20 being pressed on the puncture bottom plate 10.
In this way, after hold-down mechanism 50 causes seal cover board 20 to be pressed on puncture bottom plate 10, seal cover board 20 and sealing ring 31 can be ensured
Between seal coordinate.
Specifically, the hold-down mechanism 50 includes mounting bracket 51, movable block 52 and push rod 53.The mounting bracket 51 is set
There is sliding part 511.The movable block 52 can move along the sliding part 511.The push rod 53 passes with the movable block 52
It is dynamic to be connected.The movable block 52 is used to oppress in seal cover board 20.In this way, push rod 53 promotes movable block 52 along sliding part
After 511 movements, movable block 52 can be caused tightly to oppress seal cover board 20.
In addition, the mounting bracket 51 is provided with and the 53 corresponding rotation hole of push rod.The push rod 53 turns through described
Dynamic hole is rotatably arranged in the mounting bracket 51.The push rod 53 is screwed pipe, the movable block 52 be provided with it is described
The screw rod 521 of screwed pipe relative set.The screw rod 521 is fitted into the screwed pipe., can be with this way, rotating push-rod 53
So that the movement compressing seal cover board 20 of movable block 52.After seal cover board 20 compresses puncture bottom plate 10, just stop operating push rod 53, living
Seal cover board 20 is locked by motion block 52.Wherein, mounting bracket 51 can be arranged on test platform.
Referring again to Fig. 3 and Fig. 5, after ensureing the puncture needle of test equipment 60 insertion puncturing hole 13, recess 11 and close
The sealing for the cavity that capping plate 20 surrounds, by puncture needle size and the size relative set of puncturing hole 13, or makes puncturing hole 13
The slightly larger than volume of puncture needle.Alternatively, it is also possible to set sealing ring 32 in puncturing hole 13 so that puncture needle side wall is with puncturing
The side wall sealing of hole 13 coordinates.
A kind of hermetic seal device inside atmosphere content method of testing, employ described hermetic seal device inside atmosphere content
Test fixture, comprise the following steps：
S100, the hermetic seal device testing sample 40 is fitted into the recess 11 of the puncture bottom plate 10, and passed through
The recess 11 of the puncture bottom plate 10 is carried out encapsulation process by seal cover board 20, sealing ring；
Wherein, hermetic seal device testing sample 40 is mainly：0.01cc~0.03cc cavitys SOP (also known as SOIC,
Small Outline Integrated Circuit, small-sized package) encapsulation testing sample, QFN (Quad Flat No-
LeadPackage, quad flat non-pin package) encapsulation testing sample, 0.01cc~20.00cc cavity TO (Transistor
Out-line, transistor outline package) encapsulation testing sample, or the irregular hermetic seal device testing sample 40 of case surface
And the hermetic seal device testing sample 40 that case surface is frangible.
S110, the puncture needle of test equipment 60 is fitted into puncturing hole 13；
S120, by the test equipment 60 by the puncturing hole 13 by the hermetic seal device testing sample 40 and recess
Gap vacuumize process between 11；
S130, the housing for making hermetic seal device testing sample 40 described in the spike pierces of the test equipment 60,
The internal atmosphere of the hermetic seal device testing sample 40 is got by the test equipment 60.
Above-mentioned hermetic seal device inside atmosphere content method of testing, its technique effect and above-mentioned hermetic seal device inside
The technique effect of atmosphere content test fixture is identical.
In addition, also include step S90 before S100：By the hermetic seal device testing sample 40, described puncture bottom
Plate 10 is heated with described seal cover board 20, makes the hermetic seal device testing sample 40, described puncture bottom
The temperature of plate 10 and described seal cover board 20 rises to more than 100 DEG C；Specifically, the hermetic seal device testing sample 40,
Described puncture bottom plate 10 toasts 16h~24h with described seal cover board 20 at 100 DEG C.
In addition, after S110 steps, and also include step S115 before S130 steps：Seal cover board 20 is carried out
Heat, the temperature of seal cover board 20 is risen to more than 100 DEG C.Step S115 and step S120 order can exchange.
In this way, it can so drive away the hermetic seal device testing sample 40, described puncture bottom plate 10 and described sealing
The ambiance that cover plate 20 is adsorbed, improve internal atmosphere content measuring when hermetic seal device testing sample 40 is punctured sampling
Accuracy.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses the several embodiments of the present invention, and its description is more specific and detailed, but simultaneously
Can not therefore it be construed as limiting the scope of the patent.It should be pointed out that come for one of ordinary skill in the art
Say, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Scope.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
- A kind of 1. hermetic seal device inside atmosphere content test fixture, it is characterised in that including：Bottom plate is punctured, the first side for puncturing bottom plate is provided with the recess for installing hermetic seal device testing sample, with And the groove for installing sealing ring is provided with, the groove is circumferentially disposed around the recess, second side for puncturing bottom plate Face is provided with puncturing hole corresponding with the recess location, and the puncturing hole runs through the recess bottom wall；AndSeal cover board, the seal cover board are used to cover the first side for being located at the puncture bottom plate, and the seal cover board side is used Coordinate in being sealed with the sealing ring.
- 2. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that the recess with The hermetic seal device testing sample is adapted.
- 3. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that the recess Volume V1 and the volume V2 of the hermetic seal device testing sample relation is：V2≤V1≤110%V2.
- 4. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that the closure Plate is provided with bottoming hole, and the bottoming hole is used to load heating rod.
- 5. hermetic seal device inside atmosphere content test fixture according to claim 4, it is characterised in that the bottoming hole Extended to from the wherein one side of the seal cover board inside the seal cover board, the another side of the seal cover board be provided with The fastener hole that the bottoming hole communicates, the fastener hole are used to load fastener.
- 6. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that also include compressing Mechanism, the hold-down mechanism are used to the seal cover board being pressed on the puncture bottom plate.
- 7. hermetic seal device inside atmosphere content test fixture according to claim 6, it is characterised in that the compacting machine Structure includes mounting bracket, movable block and push rod, and the mounting bracket is provided with sliding part, and the movable block can be along the slip Portion moves, and the push rod is connected with movable block transmission, and the movable block is used to oppress in seal cover board.
- 8. hermetic seal device inside atmosphere content test fixture according to claim 7, it is characterised in that the installation branch Erection has rotation hole corresponding with the push rod, and the push rod is rotatably arranged in the mounting bracket through the rotation hole On, the push rod is screwed pipe, and the movable block is provided with the screw rod with the screwed pipe relative set, and the screw rod loads to institute State in screwed pipe.
- 9. a kind of hermetic seal device inside atmosphere content method of testing, it is characterised in that employ as claim 1 to 8 is any Hermetic seal device inside atmosphere content test fixture described in one, comprises the following steps：The hermetic seal device testing sample is fitted into the recess of the puncture bottom plate, and passes through seal cover board, sealing ring The recess of the puncture bottom plate is subjected to encapsulation process；The puncture needle of test equipment is fitted into puncturing hole；The gap between the hermetic seal device testing sample and recess is taken out very by the puncturing hole by the test equipment Manage in vacancy；Make the housing of hermetic seal device testing sample described in the spike pierces of the test equipment, set by the test The standby internal atmosphere for getting the hermetic seal device testing sample.
- 10. hermetic seal device inside atmosphere content method of testing according to claim 9, it is characterised in that by described in Hermetic seal device testing sample is fitted into also includes step into the recess of the puncture bottom plate before step：By the hermetic seal device Part testing sample, described puncture bottom plate are heated with described seal cover board, make the hermetic seal device to be measured Sample, the temperature of described puncture bottom plate and described seal cover board rise to more than 100 DEG C；Specifically, the hermetic seal device Part testing sample, described puncture bottom plate and described seal cover board toast 16h~24h at 100 DEG C；It is fitted into by the puncture needle of test equipment into puncturing hole after step, and makes the puncture of the test equipment Acupuncture also includes step before breaking the housing of the hermetic seal device testing sample：Seal cover board is heated, the temperature of seal cover board is risen to more than 100 DEG C.
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| CN201710800867.9A CN107576760A (en) | 2017-09-07 | 2017-09-07 | Hermetic seal device inside atmosphere content test fixture and method |
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| CN201710800867.9A CN107576760A (en) | 2017-09-07 | 2017-09-07 | Hermetic seal device inside atmosphere content test fixture and method |
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| CN107576760A true CN107576760A (en) | 2018-01-12 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108844787A (en) * | 2018-07-10 | 2018-11-20 | 中国工程物理研究院化工材料研究所 | Self feed back seal chamber gas sampling device and its application |
| CN109060931A (en) * | 2018-09-10 | 2018-12-21 | 广州赛宝计量检测中心服务有限公司 | Vapour analysis instrument calibrating installation and calibration method |
| CN112763652A (en) * | 2020-12-08 | 2021-05-07 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Automatic positioning puncture clamp, internal atmosphere content analyzer and testing method thereof |
| CN112763651A (en) * | 2020-12-08 | 2021-05-07 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Positioning puncture clamp, internal atmosphere content analyzer and testing method thereof |
| CN114034524A (en) * | 2021-10-21 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sample gas sampling device and gas-tight seal component internal atmosphere analysis equipment |
| CN114323818A (en) * | 2021-11-17 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for sampling internal atmosphere of ceramic airtight component and application |
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| CN108844787A (en) * | 2018-07-10 | 2018-11-20 | 中国工程物理研究院化工材料研究所 | Self feed back seal chamber gas sampling device and its application |
| CN108844787B (en) * | 2018-07-10 | 2024-02-13 | 中国工程物理研究院化工材料研究所 | Self-feedback sealed cavity gas sampling device and application thereof |
| CN109060931A (en) * | 2018-09-10 | 2018-12-21 | 广州赛宝计量检测中心服务有限公司 | Vapour analysis instrument calibrating installation and calibration method |
| CN112763652A (en) * | 2020-12-08 | 2021-05-07 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Automatic positioning puncture clamp, internal atmosphere content analyzer and testing method thereof |
| CN112763651A (en) * | 2020-12-08 | 2021-05-07 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Positioning puncture clamp, internal atmosphere content analyzer and testing method thereof |
| CN114034524A (en) * | 2021-10-21 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sample gas sampling device and gas-tight seal component internal atmosphere analysis equipment |
| CN114034524B (en) * | 2021-10-21 | 2023-09-01 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sample gas sampling device and gas-tight seal component internal atmosphere analysis equipment |
| CN114323818A (en) * | 2021-11-17 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for sampling internal atmosphere of ceramic airtight component and application |
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