CN107389867B - Microcircuit internal atmosphere detects test fixture - Google Patents
Microcircuit internal atmosphere detects test fixture Download PDFInfo
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- CN107389867B CN107389867B CN201710630317.7A CN201710630317A CN107389867B CN 107389867 B CN107389867 B CN 107389867B CN 201710630317 A CN201710630317 A CN 201710630317A CN 107389867 B CN107389867 B CN 107389867B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
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Abstract
The invention discloses a kind of microcircuit internal atmospheres to detect test fixture, it is related to electronic product reliability and environmental test field, it is made of female clamp, sub-folder body, lid, one end centre of female clamp is equipped with the pressure chamber of indent, for placing sub-folder body, presses intracavitary equipped with perforative interface channel, for accommodating tested device, female clamp is equipped with resigning portion at the surrounding outer rim ipsilateral with pressure accent portion, and for installing sealing ring, lid is covered in pressure accent portion and covers sealing ring.Present clip provides a new approaches for tested device therein placement; design the interface channel that a diameter is slightly larger than tested device; tested device can be placed in interface channel; greatly improve the leakproofness of fixture and the protection to tested device; matched sub-folder body is designed simultaneously; the tested device can be not only fixed, the generation of additional volumes in fixture is also significantly reduced, further decreases influence of fixture atmosphere to inspection result itself.
Description
Technical field
The present invention relates to electronic product reliabilities and environmental test technical field, and in particular to a kind of microcircuit internal atmosphere
Detect test fixture.
Background technique
With space flight, aviation, the development of Marine Electronics technology, higher want is proposed to used electronic component
It asks, other than having high quality and high reliability, it is also desirable to have the long life.Largely, microelectronic component
Service life is related with microcircuit internal atmosphere content.Subtle gas leakage will admit air into device inside, cause serious key
Close lead corrosion and electrical failure.Therefore, it is just even more important for the detection of microcircuit internal atmosphere, it may be assumed that by product
Portion's atmosphere test report can provide the information that largely can be used for improving production quality with reliability；By being remained to device inside
The analysis of atmosphere historical data information can further appreciate that baking temperature and time, polymer and solid alloy material before sealing
Characteristic, when solidifying the problems such as time, fuel factor and mechanical stress, sealed environment, envelope material, internal contamination to internal atmosphere
It influences；By the way that all in depth analysis remains atmosphere data, technical process control and process materials, optimization work can be continuously improved
Skill parameter finally makes device meet internal atmosphere control and requires.Meanwhile examination certainly will be may require that for the detection of microcircuit internal atmosphere
Test furniture, however, existing circuit internal atmosphere detect test fixture there are the problem of or defect have: 1. sizes are not applicable；2.
Volume is big, vacuumizes that time-consuming；3. leakproofness is poor；4. fixture internal atmosphere itself influences testing result big.
So in place of in view of the above-mentioned deficiencies, it is necessary to for the detection examination of small cavity (< 0.01cc) circuit internal atmosphere
It tests and a kind of test fixture of auxiliary seal is provided.
Summary of the invention
In view of this, technical problem to be solved by the invention is to provide a kind of micro- electricity time saving and energy saving, work efficiency is high
Tested device can be placed in its interface channel, greatly be mentioned using this test fixture by road internal atmosphere detection test fixture
The high leakproofness of fixture, effectively prevents the generation of additional volumes and implements to protect to tested device.
In order to achieve the above objectives, the present invention provides the following technical scheme that
The present invention provides a kind of microcircuit internal atmosphere detection test fixture, it is made of female clamp, sub-folder body, lid,
One end centre of mother's clamp is equipped with the pressure chamber of indent, and for placing sub-folder body, the pressure is intracavitary to be equipped with perforative company
Road is connected, for accommodating tested device, mother's clamp is equipped with resigning portion at the surrounding outer rim ipsilateral with pressure accent portion, uses
In installation sealing ring, the lid is covered in pressure accent portion and covers sealing ring.
Further, the pressure chamber is small one and large one two of stepped distribution.
Further, biggish pressure chamber cross section is in D font, and bottom is equipped with gasket.
Further, the sealing ring, gasket are made of rubber material.
Further, the pressure chamber and sub-folder body transition fit or small interval cooperate.
Further, female clamp, sub-folder body and lid are respectively an integral molding structure, rounded, oval or rectangular
Structure, material are aluminium alloy.
Further, the lid is plate, and the sub-folder body is integrated on lid to be integrally formed structure.
Further, the outer wall of the sub-folder body is equipped with anti-skid chequer.
Further, the bottom of the pressure chamber is equipped with the V-type groove for placing tested device pin, and the pin is disconnected
Face height is above V-type groove.
The beneficial effects of the present invention are:
1. no longer occupying fixture cavity volume since tested device is placed in interface channel, hence it is evident that it is empty to reduce fixture
Cavity volume can effectively reduce the gas gross inside fixture, accelerate vacuum pumping rate in internal atmosphere detection test, shorten interior
The test period of portion's atmosphere detection test.
2. alloing sub-folder body to be bonded female clamp cavity completely since tested device is no longer placed in fixture cavity inside and putting
It sets, avoids the generation of redundant space, reduce the additional gas inside fixture, reduce fixture internal gas to internal atmosphere
The influence for detecting test result greatly improves the accuracy of fine circuit internal atmosphere detection test result.
3. avoiding sub-folder body tension pressure break ceramic-like envelope since sub-folder body is no longer directly contacted with tested device ontology
The danger of the fine circuit of dress, it is ensured that the detection test of fine circuit internal atmosphere is gone on smoothly.
Other advantages, target and feature of the invention will be illustrated in the following description to a certain extent, and
And to a certain extent, based on will be apparent to those skilled in the art to investigating hereafter, Huo Zheke
To be instructed from the practice of the present invention.Target of the invention and other advantages can be realized by following specification and
It obtains.
Detailed description of the invention
To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention is made below in conjunction with attached drawing excellent
The detailed description of choosing, in which:
Fig. 1 is the structure schematic elevation view of female clamp embodiment one in this fixture；
Fig. 2 is the structure schematic elevation view of female clamp embodiment two in this fixture；
Fig. 3 is the structural schematic diagram of this fixture neutron clamp；
Fig. 4 is the structural schematic diagram of lid in this fixture.
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Other advantages and efficacy of the present invention can be easily understood for disclosed content.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also based on different viewpoints and application, without departing from
Various modifications or alterations are carried out under spirit of the invention.It should be noted that diagram provided in following embodiment is only to show
Meaning mode illustrates basic conception of the invention, and in the absence of conflict, the feature in following embodiment and embodiment can phase
Mutually combination.
Fig. 1-4 is please referred to, the element numbers in attached drawing respectively indicate: female clamp 1, sub-folder body 2, lid 3；Wherein, chamber is pressed
1A, interface channel 1B, resigning portion 1C.
Embodiment one:
Embodiment is basic as shown in attached drawing 1,3,4: the present embodiment provides a kind of microcircuit internal atmospheres to detect test fixture,
It is made of female clamp 1, sub-folder body 2, lid 3, and one end centre of mother's clamp 1 is equipped with the pressure chamber 1A of indent, is used for
Sub-folder body 2 is placed, perforative interface channel 1B is equipped in the pressure chamber 1A, it is described for accommodating tested device (not shown)
Female clamp 1 is equipped with resigning portion 1C at the surrounding outer rim ipsilateral with pressure chamber 1A oral area, described for installing sealing ring (not shown)
Lid 3 is covered in pressure chamber 1A oral area and covers sealing ring；Its female clamp 1 and sub-folder body 2 are all made of optimal circular configuration, certainly
Rectangular or ellipsoidal structure can also be used in various embodiments, and lid 3 uses slab construction, and female clamp 1, sub-folder
Body 2 and lid 3 are respectively an integral molding structure, and material is all made of metal, such as aluminium alloy.
Specifically, tested device by the way of being directly placed into interface channel by this fixture.It is i.e. useful built in fixture
In the pressure chamber 1A and interface channel 1B that tested device can be placed of fixed tested device；Sub-folder body 2 is solid, can be with
Different size of sub-folder body is designed as according to the specific size of tested device.The company of female clamp 1 is placed in tested device
After connecting road 1B, sub-folder body 2 is directly placed in the pressure chamber 1A of female clamp 1, and the pin that tested device exposes is pushed down
Fixed tested device；Lid 3 is solid metal thin slice, and size is subject to the sealing ring that female clamp 1 can be completely covered, and is fixed
After tested device, lid 3 is covered to the sealing ring of female clamp 1, is then compressed, a sealing entirety, Bian Kejin can be formed
The detection test of row internal atmosphere.
Present clip devises round hole connection of the diameter slightly larger than tested device size by female clamp 1 and leads to
Road 1B, so as to which tested device to be placed directly in interface channel 1B, no longer occupancy fixture presses chamber 1A volume, hence it is evident that
Reduce fixture and press cavity volume, the gas gross inside fixture can be effectively reduced, accelerates to vacuumize speed in internal atmosphere detection test
Degree shortens the test period of internal atmosphere detection test.Simultaneously as tested device is no longer placed in fixture cavity inside,
The pressure chamber 1A for alloing sub-folder body 2 to be bonded female clamp 1 completely is placed, and is avoided the generation of redundant space, is reduced inside fixture
Additional gas, reduce fixture internal gas to internal atmosphere detection test result influence, greatly improve small electric
The accuracy of road internal atmosphere detection test result.Also, sub-folder body 2 is no longer directly contacted with tested device ontology, is avoided
The danger of the fine circuit of sub-folder body tension pressure break ceramic-like encapsulation, it is ensured that the detection test of fine circuit internal atmosphere it is smooth
It carries out.
The specifically used mode of test fixture of the invention under illustrating in detail below:
Firstly, fine circuit device is placed in the interface channel 1B of female clamp 1 according to its cover board principle directed downwardly,
Sub-folder body 2 is put into the pressure chamber 1A of female clamp 1, and pushes down the pin of tested device with fixation；Then, lid 3 is placed in
On the sealing ring of the resigning portion 1C of female clamp 1 and pressure chamber 1A is covered, forms the entirety of a sealing.Then, fixture is integrally put
It is placed on the device placement platform of internal atmosphere detection device, wherein interface channel 1B and internal atmosphere detection device air inlet phase
It is corresponding.Finally, the locking device locking fixture carried using internal atmosphere detection device, can carry out internal atmosphere detection examination
It tests.
Pressure chamber 1A and 2 transition fit of sub-folder body or small interval in the present embodiment cooperate.In this way, being conducive to reduce pressure chamber 1A
Interior space reduces fixture internal gas and detects test knot to internal atmosphere to reduce the additional gas inside fixture
The influence of fruit greatly improves the accuracy of fine circuit internal atmosphere detection test result.
Embodiment two:
The present embodiment and embodiment one the difference is that: the pressure chamber 1A be stepped distribution small one and large one two
A, the biggish pressure cross section chamber 1A is in D font, and bottom is equipped with gasket (not shown).In this way, sub-folder tool 2 also have with compared with
The big cross section pressure chamber 1A identical D font cross section can make sub-folder tool 2 not rotate in pressure chamber 1A, and biggish
The pressure bottom chamber 1A, which is equipped with gasket, can further seal the interface channel 1B of female clamp 1, conducive to the internal atmosphere of tested device
Detection test.
Embodiment three:
The present embodiment with embodiment one, two the difference is that: the sub-folder body 2 is integrated on lid 3 to be integrally formed
Structure；In this way, being arranged convenient for test operation and fixture.Meanwhile the outer wall of sub-folder body 2 is equipped with anti-skid chequer, is formed with pressure chamber 1A
It is full of cooperation, the additional gas inside fixture can be further decreased and generated.
Example IV:
The present embodiment place unlike the embodiments above is: the bottom of the pressure chamber 1A is equipped with for placing device to be tested
The V-type groove (not shown) of part pin, and the profile height of the pin is above V-type groove.In this way, tested device can be made to exist
It is placed in interface channel more firm when simultaneously acceptor clamp is pushed down.
Finally, it is stated that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting, although referring to compared with
Good embodiment describes the invention in detail, those skilled in the art should understand that, it can be to skill of the invention
Art scheme is modified or replaced equivalently, and without departing from the objective and range of the technical program, should all be covered in the present invention
Scope of the claims in.
Claims (7)
1. a kind of microcircuit internal atmosphere detects test fixture, which is characterized in that it is by female clamp (1), sub-folder body (2), lid
(3) it forms, one end centre of mother's clamp is equipped with the pressure chamber (1A) of indent, and for placing sub-folder body, the pressure is intracavitary
Equipped with perforative interface channel (1B), for accommodating tested device, mother's clamp is outside the surrounding ipsilateral with pressure accent portion
It is equipped with resigning portion (1C) at edge, for installing sealing ring, the lid is covered in pressure accent portion and covers sealing ring；The pressure chamber
It is small one and large one two of stepped distribution, biggish pressure chamber cross section is in D font, and bottom is equipped with gasket.
2. microcircuit internal atmosphere according to claim 1 detects test fixture, which is characterized in that the sealing ring, close
Packing is made of rubber material.
3. microcircuit internal atmosphere according to claim 1 or 2 detects test fixture, which is characterized in that the pressure chamber and
Sub-folder body transition fit or the cooperation of small interval.
4. microcircuit internal atmosphere according to claim 1 detects test fixture, which is characterized in that the mother clamp, son
Clamp and lid are respectively an integral molding structure, and rounded, oval or square structure, material is aluminium alloy.
5. microcircuit internal atmosphere according to claim 1 detects test fixture, which is characterized in that the lid is flat
Plate, the sub-folder body are integrated on lid to be integrally formed structure.
6. microcircuit internal atmosphere according to claim 5 detects test fixture, which is characterized in that outside the sub-folder body
Wall is equipped with anti-skid chequer.
7. microcircuit internal atmosphere according to claim 1 detects test fixture, which is characterized in that the bottom of the pressure chamber
Equipped with the V-type groove for placing tested device pin, and the profile height of the pin is above V-type groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710630317.7A CN107389867B (en) | 2017-07-28 | 2017-07-28 | Microcircuit internal atmosphere detects test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710630317.7A CN107389867B (en) | 2017-07-28 | 2017-07-28 | Microcircuit internal atmosphere detects test fixture |
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| Publication Number | Publication Date |
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| CN107389867A CN107389867A (en) | 2017-11-24 |
| CN107389867B true CN107389867B (en) | 2019-11-12 |
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ID=60342808
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710630317.7A Active CN107389867B (en) | 2017-07-28 | 2017-07-28 | Microcircuit internal atmosphere detects test fixture |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109060931A (en) * | 2018-09-10 | 2018-12-21 | 广州赛宝计量检测中心服务有限公司 | Vapour analysis instrument calibrating installation and calibration method |
| CN109581191B (en) * | 2018-12-06 | 2021-11-30 | 中国电子科技集团公司第二十四研究所 | Double-cavity structure for comparing detection results of atmosphere inside micro-cavity circuit |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201589720U (en) * | 2009-05-25 | 2010-09-22 | 北京圣涛平试验工程技术研究院有限责任公司 | Sampling clamp of sampling device of mass spectrometer |
| CN102749179A (en) * | 2012-06-19 | 2012-10-24 | 赛龙通信技术（深圳）有限公司 | Clamp, system and method for testing air tightness |
| CN104849509A (en) * | 2014-12-03 | 2015-08-19 | 重庆东登科技有限公司 | Portable test circuit board fixing clamp |
| CN105842020A (en) * | 2016-06-21 | 2016-08-10 | 北京航空航天大学 | Auxiliary clamp for water vapor content test in small-size sealing device |
-
2017
- 2017-07-28 CN CN201710630317.7A patent/CN107389867B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201589720U (en) * | 2009-05-25 | 2010-09-22 | 北京圣涛平试验工程技术研究院有限责任公司 | Sampling clamp of sampling device of mass spectrometer |
| CN102749179A (en) * | 2012-06-19 | 2012-10-24 | 赛龙通信技术（深圳）有限公司 | Clamp, system and method for testing air tightness |
| CN104849509A (en) * | 2014-12-03 | 2015-08-19 | 重庆东登科技有限公司 | Portable test circuit board fixing clamp |
| CN105842020A (en) * | 2016-06-21 | 2016-08-10 | 北京航空航天大学 | Auxiliary clamp for water vapor content test in small-size sealing device |
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| Publication number | Publication date |
|---|---|
| CN107389867A (en) | 2017-11-24 |
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