CN207263720U - Hermetic seal device inside atmosphere content test fixture - Google Patents
Hermetic seal device inside atmosphere content test fixture Download PDFInfo
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- CN207263720U CN207263720U CN201721147394.9U CN201721147394U CN207263720U CN 207263720 U CN207263720 U CN 207263720U CN 201721147394 U CN201721147394 U CN 201721147394U CN 207263720 U CN207263720 U CN 207263720U
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- hermetic seal
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Abstract
A kind of hermetic seal device inside atmosphere content test fixture is the utility model is related to, fixture includes puncturing bottom plate and seal cover board.The first side for puncturing bottom plate is provided with the recess of installing hermetic seal device sample to be tested, and is provided with the groove of installing sealing ring.The second side for puncturing bottom plate is provided with puncturing hole corresponding with recess location.Seal cover board is used to cover the first side for being located at and puncturing bottom plate, and seal cover board side is used to seal with sealing ring and coordinates.Above-mentioned hermetic seal device inside atmosphere content test fixture can be easy to installing hermetic seal device sample to be tested, and after the recess for puncturing bottom plate is carried out encapsulation process by seal cover board, sealing ring, can be by puncturing hole by the gap vacuumize process between hermetic seal device sample to be tested and recess, interference of the outside atmosphere to hermetic seal device inside atmosphere can so be reduced as far as possible, also hermetic seal device inside atmosphere can be avoided to diffuse in external environment condition, so that internal atmosphere content measuring result accuracy is high.
Description
Technical field
Hermetic seal device inside atmosphere content technical field of measurement and test is the utility model is related to, more particularly to a kind of hermetic seal
Device inside atmosphere content test fixture.
Background technology
Traditional hermetic seal device inside atmosphere content test method is：The burnishing surface of hermetic seal device detection sample is led to
O-ring seal is crossed to be connected on internal atmosphere analyzer, then O-ring seal inner sample near surface is logical together with whole sampling
The equal vacuumize process in road, finally pricks through hole on the burnishing surface of the test sample with puncture needle and is sampled test.It is however, traditional
Test method for the hermetic seal device that cavity volume is 0.01cc~0.03cc, or the irregular gas of case surface
Air locking, or when the frangible hermetic seal device of case surface carries out internal atmosphere content measuring, hermetic seal device inside envelope
The accuracy for filling the test result of atmosphere content is poor.
The content of the invention
Based on this, it is necessary to the defects of overcoming the prior art, there is provided a kind of hermetic seal device inside atmosphere content test clip
Tool, it can improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
Its technical solution is as follows：A kind of hermetic seal device inside atmosphere content test fixture, including：Bottom plate is punctured, it is described
The first side for puncturing bottom plate is provided with for installing the recess of hermetic seal device sample to be tested, and is provided with close for installing
The groove of seal, the groove is circumferentially disposed around the recess, and the second side for puncturing bottom plate is provided with and the recess
The corresponding puncturing hole in position, the puncturing hole run through the recess bottom wall；And seal cover board, the seal cover board are located at for lid
The first side for puncturing bottom plate, the seal cover board side are used to seal with the sealing ring and coordinate.
Above-mentioned hermetic seal device inside atmosphere content test fixture, can be 0.01cc~0.03cc's by cavity volume
Hermetic seal device sample to be tested, either the irregular hermetic seal device sample to be tested of case surface or case surface are frangible
Hermetic seal device sample to be tested is installed up in the recess for puncturing bottom plate, and will puncture the recessed of bottom plate by seal cover board, sealing ring
Portion carries out encapsulation process, then the puncture needle of test equipment is fitted into puncturing hole, will be airtight by puncturing hole by test equipment
The gap vacuumize process between device sample to be tested and recess is sealed, by the shell of spike pierces hermetic seal device sample to be tested
Body, sampling obtain the atmosphere in hermetic seal device sample to be tested cavity.In this way, above-mentioned hermetic seal device inside atmosphere content is surveyed
Try fixture can be easy to installing hermetic seal device sample to be tested, and due to seal cover board, sealing ring by puncture bottom plate recess into
After row encapsulation process, the gap between hermetic seal device sample to be tested and recess can be taken out very by puncturing hole by test equipment
Vacancy is managed, and can so be reduced interference of the outside atmosphere to hermetic seal device inside atmosphere as far as possible, can also be avoided hermetic seal device
Part internal atmosphere is diffused in external environment condition, so as to improve the test result of hermetic seal device inside encapsulation atmosphere content
Accuracy.
In one of the embodiments, the recess is adapted with the hermetic seal device sample to be tested.In this way, when airtight
After envelope device sample to be tested is fitted into recess, hermetic seal device sample to be tested side wall is in contact with recess sidewalls, hermetic seal device
Gap between part sample to be tested and recess sidewalls is smaller, can so reduce outside atmosphere as far as possible to hermetic seal device inside atmosphere
Interference, can also avoid hermetic seal device inside atmosphere from diffusing in external environment condition, so as to improve in hermetic seal device
The accuracy of the test result of portion's encapsulation atmosphere content.
In one of the embodiments, the volume V1 of the recess is with the volume V2's of the hermetic seal device sample to be tested
Relation is：V2≤V1≤110%V2.In this way, recess volume size is slightly larger than hermetic seal device sample to be tested volume size, it is airtight
Envelope device sample to be tested can be easy to be fitted into recess, also allow for forming recess on bottom plate is punctured.In addition, hermetic seal device
After sample to be tested is fitted into recess, the gap between hermetic seal device sample to be tested and recess sidewalls is smaller, so can be as far as possible
Reduce interference of the outside atmosphere to hermetic seal device inside atmosphere, can also avoid hermetic seal device inside atmosphere from diffusing to outside
In environment, so as to improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
In one of the embodiments, the seal cover board is equipped with bottoming hole, and the bottoming hole is used to load heating rod.
Seal cover board is heated into bottoming hole in this way, filling in heating rod, seal cover board temperature is promoted to 100 DEG C,
The ambiance that hermetic seal device sample to be tested shell is adsorbed can so be driven away, hermetic seal device sample to be tested is improved and be punctured
The accuracy of internal atmosphere content measuring during sampling.
In one of the embodiments, the bottoming hole extends to the sealing from the wherein one side of the seal cover board
Inside cover board, the another side of the seal cover board is equipped with the fastener hole communicated with the bottoming hole, and the fastener hole is used to fill
Enter fastener.In this way, after heating rod is filled in into the bottoming hole of seal cover board, then fastener is filled in into fastener hole will heating
Rod is fastened in the bottoming hole of seal cover board.
In one of the embodiments, the hermetic seal device inside atmosphere content test fixture further includes compacting machine
Structure, the hold-down mechanism are used to the seal cover board being pressed on the puncture bottom plate.In this way, hold-down mechanism causes sealing cover
After plate is pressed on puncture bottom plate, it can ensure to seal cooperation between seal cover board and sealing ring.
In one of the embodiments, the hold-down mechanism includes mounting bracket, movable block and push rod, the mounting bracket
Equipped with sliding part, the movable block can be moved along the sliding part, and the push rod is connected with movable block transmission, described
Movable block is used to oppress in seal cover board.In this way, after push rod promotes movable block to be moved along sliding part, can be so that movable block be tight
Press urgent seal cover board.
In one of the embodiments, the mounting bracket is equipped with rotation hole corresponding with the push rod, and the push rod is worn
Cross the rotation hole to be rotatably arranged in the mounting bracket, the push rod is screwed pipe, and the movable block is equipped with and institute
The screw rod that screwed pipe is accordingly set is stated, the screw rod is fitted into the screwed pipe.In this way, rotating push-rod, can be so that living
Motion block movement compressing seal cover board.After seal cover board compresses puncture bottom plate, just stop operating push rod, and movable block locks seal cover board
Fasten.
Brief description of the drawings
Fig. 1 is the structure diagram of the hermetic seal device inside atmosphere content test fixture described in the utility model embodiment
One；
Fig. 2 is the structure diagram of the hermetic seal device inside atmosphere content test fixture described in the utility model embodiment
Two；
Fig. 3 is the structure diagram of the hermetic seal device inside atmosphere content test fixture described in the utility model embodiment
Three；
Fig. 4 is the structure diagram of the puncture bottom plate described in the one of embodiment of the utility model；
Fig. 5 is sectional views of the Fig. 4 at A-A；
Fig. 6 is the structure diagram of the puncture bottom plate described in the utility model another embodiment；
Fig. 7 is the structure diagram of the seal cover board described in the utility model embodiment.
Reference numeral：
10th, bottom plate is punctured, 11, recess, 12, groove, 13, puncturing hole, 20, seal cover board, 21, bottoming hole, 22, fastening
Hole, 31,32, sealing ring, 40, hermetic seal device sample to be tested, 50, hold-down mechanism, 51, mounting bracket, 511, sliding part, 52,
Movable block, 521, screw rod, 53, push rod, 60, test equipment.
Embodiment
To enable the above-mentioned purpose of the utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings to this
The embodiment of utility model is described in detail.Elaborate many details in order to abundant in the following description
Understand the utility model.But the utility model can be much to implement different from other manner described here, this area
Technical staff can do similar improvement in the case of without prejudice to the utility model connotation, therefore the utility model is from following public affairs
The limitation for the specific embodiment opened.
In the description of the utility model, it is to be understood that term " first ", " second " are only used for description purpose, and
It is not intended that instruction or hint relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, define
At least one this feature can be expressed or be implicitly included to the feature of " first ", " second ".In the description of the utility model,
" multiple " are meant that at least two, such as two, three etc., unless otherwise specifically defined.
In the description of the utility model, it is to be understood that when an element is considered as " connection " another element,
It can be directly to another element or may be simultaneously present intermediary element.On the contrary, when element for be referred to as " direct " and
During another element connection, there is no intermediary element.
Any one width is please referred to Fig.1 to Fig.3, and is surveyed refering to Fig. 4 and Fig. 5, a kind of hermetic seal device inside atmosphere content
Fixture is tried, including punctures bottom plate 10 and seal cover board 20.The first side for puncturing bottom plate 10 is provided with airtight for installing
The recess 11 of device sample to be tested 40 is sealed, and is provided with the groove 12 for installing sealing ring 31.The groove 12 is around described
Recess 11 is circumferentially disposed.The second side for puncturing bottom plate 10 is provided with puncturing hole 13 corresponding with 11 position of recess.
The puncturing hole 13 runs through 11 bottom wall of recess.The seal cover board 20 is used to cover the first side for being located at the puncture bottom plate 10
Face, 20 side of seal cover board are used to seal with the sealing ring 31 and coordinate.
Above-mentioned hermetic seal device inside atmosphere content test fixture, can be 0.01cc~0.03cc's by cavity volume
Hermetic seal device sample to be tested 40, either the irregular hermetic seal device sample to be tested 40 of case surface or case surface are easy
Broken hermetic seal device sample to be tested 40 is installed up in the recess 11 for puncturing bottom plate 10, and passes through seal cover board 20, sealing ring 31
The recess 11 for puncturing bottom plate 10 is subjected to encapsulation process, then the puncture needle of test equipment 60 is fitted into puncturing hole 13, by surveying
Equipment 60 is tried by puncturing hole 13 by the gap vacuumize process between hermetic seal device sample to be tested 40 and recess 11, will be punctured
The housing of acupuncture relieving stagnant Qi air locking sample to be tested 40, sampling obtain the atmosphere in 40 cavity of hermetic seal device sample to be tested.Such as
This, above-mentioned hermetic seal device inside atmosphere content test fixture can be easy to installing hermetic seal device sample to be tested 40, and by
After the recess 11 for puncturing bottom plate 10 is carried out encapsulation process by seal cover board 20, sealing ring 31, it can be passed through by test equipment 60
Puncturing hole 13 can so reduce the gap vacuumize process between hermetic seal device sample to be tested 40 and recess 11 outer as far as possible
Interference of portion's atmosphere to hermetic seal device inside atmosphere, can also avoid hermetic seal device inside atmosphere from diffusing to external environment condition
In, so as to improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
In one embodiment, Fig. 4 and Fig. 6, the recess 11 and 40 phase of hermetic seal device sample to be tested are referred to
Adapt to.In this way, after hermetic seal device sample to be tested 40 is fitted into recess 11,40 side wall of hermetic seal device sample to be tested with it is recessed
11 side wall of portion is in contact, and the gap between 11 side wall of hermetic seal device sample to be tested 40 and recess is smaller, can so reduce as far as possible
Interference of the outside atmosphere to hermetic seal device inside atmosphere, can also avoid hermetic seal device inside atmosphere from diffusing to external environment condition
In, so as to improve the accuracy of the test result of hermetic seal device inside encapsulation atmosphere content.
In another embodiment, the volume V2 of the volume V1 of the recess 11 and the hermetic seal device sample to be tested 40
Relation be：V2≤V1≤110%V2.In this way, 11 volume size of recess is slightly larger than 40 volume ruler of hermetic seal device sample to be tested
Very little, hermetic seal device sample to be tested 40 can be easy to be fitted into recess 11, also allow for forming recess 11 on bottom plate 10 is punctured.
In addition, after hermetic seal device sample to be tested 40 is fitted into recess 11, between 11 side wall of hermetic seal device sample to be tested 40 and recess
Gap it is smaller, can so reduce interference of the outside atmosphere to hermetic seal device inside atmosphere as far as possible, can also avoid airtight
Envelope device inside atmosphere is diffused in external environment condition, so as to improve the test knot of hermetic seal device inside encapsulation atmosphere content
The accuracy of fruit.Such as：Certain 40 volume size of hermetic seal device sample to be tested is：3.20mm × 2.50mm × 0.85mm, then wear
The volume size of recess 11 for piercing bottom plate 10 can be designed as 3.25mm × 2.56mm × 0.90mm, thus ensure V2≤V1≤
110%V2.
In addition, also referring to Fig. 7, the seal cover board 20 is equipped with bottoming hole 21.The bottoming hole 21 is used to load
Heating rod.Seal cover board 20 is heated into bottoming hole 21 in this way, filling in heating rod, makes 20 temperature of seal cover board
100 DEG C are promoted to, can so drive away the ambiance that 40 shell of hermetic seal device sample to be tested is adsorbed, improves hermetic seal device
The accuracy of internal atmosphere content measuring when sample to be tested 40 is punctured sampling.Wherein, bottoming hole 21 can set two or more,
Heated by two or more heating rod, can preferably improve the temperature of seal cover board 20.Seal cover board 20 can be selected
Bear the indeformable aluminium sheet of 100 DEG C of high temperature, copper coin or other metallic plates.In other embodiments, can also on seal cover board 20
Be not provided with bottoming hole 21, by heating rod directly with 20 thermal contact conductance of seal cover board.
In addition, the wherein one side of the bottoming hole 21 from the seal cover board 20 is extended in the seal cover board 20
Portion.The another side of the seal cover board 20 is equipped with the fastener hole 22 communicated with the bottoming hole 21.The fastener hole 22 is used for
Load fastener.In this way, after heating rod is filled in into the bottoming hole 21 of seal cover board 20, then fastener filled in fastener hole 22
It is middle that heating rod is fastened in the bottoming hole 21 of seal cover board 20.Specifically, fastener can be screw or bolt, fastener hole 22
For mounting hole corresponding with screw or bolt.
Further, referring again to any one width of Fig. 1 to Fig. 3, the hermetic seal device inside atmosphere content test clip
Tool further includes hold-down mechanism 50.The hold-down mechanism 50 is used to the seal cover board 20 being pressed on the puncture bottom plate 10.
In this way, after hold-down mechanism 50 causes seal cover board 20 to be pressed on puncture bottom plate 10, it can ensure seal cover board 20 and sealing ring 31
Between seal coordinate.
Specifically, the hold-down mechanism 50 includes mounting bracket 51, movable block 52 and push rod 53.The mounting bracket 51 is set
There is sliding part 511.The movable block 52 can be moved along the sliding part 511.The push rod 53 is passed with the movable block 52
It is dynamic to be connected.The movable block 52 is used to oppress in seal cover board 20.In this way, push rod 53 promotes movable block 52 along sliding part
, can be so that movable block 52 tightly oppresses seal cover board 20 after 511 movements.
In addition, the mounting bracket 51 is equipped with and the 53 corresponding rotation hole of push rod.The push rod 53 turns through described
Dynamic hole is rotatably arranged in the mounting bracket 51.The push rod 53 is screwed pipe, the movable block 52 be equipped with it is described
The screw rod 521 that screwed pipe is accordingly set.The screw rod 521 is fitted into the screwed pipe.In this way, rotating push-rod 53, can
So that the movement compressing seal cover board 20 of movable block 52.After seal cover board 20 compresses puncture bottom plate 10, just stop operating push rod 53, living
Seal cover board 20 is locked by motion block 52.Wherein, mounting bracket 51 can be arranged on test platform.
Referring again to Fig. 3 and Fig. 5, after ensureing the puncture needle of test equipment 60 insertion puncturing hole 13, recess 11 and close
The leakproofness of cavity that capping plate 20 surrounds, is set puncture needle size is corresponding to 13 size of puncturing hole, or makes puncturing hole 13
The slightly larger than volume of puncture needle.Alternatively, it is also possible to set sealing ring 32 in puncturing hole 13 so that puncture needle side wall is with puncturing
Hole 13 side wall sealing coordinates.
A kind of hermetic seal device inside atmosphere content test method, employs the hermetic seal device inside atmosphere content
Test fixture, includes the following steps：
The hermetic seal device sample to be tested 40, be fitted into the recess 11 of the puncture bottom plate 10 by S100, and passes through
The recess 11 of the puncture bottom plate 10 is carried out encapsulation process by seal cover board 20, sealing ring；
Wherein, hermetic seal device sample to be tested 40 is mainly：0.01cc~0.03cc cavitys SOP (also known as SOIC,
Small Outline Integrated Circuit, small-sized package) encapsulation sample to be tested, QFN (Quad Flat No-
LeadPackage, quad flat non-pin package) encapsulation sample to be tested, 0.01cc~20.00cc cavity TO (Transistor
Out-line, transistor outline package) encapsulation sample to be tested, or the irregular hermetic seal device sample to be tested 40 of case surface
And the hermetic seal device sample to be tested 40 that case surface is frangible.
The puncture needle of test equipment 60, be fitted into puncturing hole 13 by S110；
S120, by the test equipment 60 by the puncturing hole 13 by the hermetic seal device sample to be tested 40 and recess
Gap vacuumize process between 11；
S130, the housing for making hermetic seal device sample to be tested 40 described in the spike pierces of the test equipment 60,
The internal atmosphere of the hermetic seal device sample to be tested 40 is got by the test equipment 60.
Above-mentioned hermetic seal device inside atmosphere content test method, its technique effect and above-mentioned hermetic seal device inside
The technique effect of atmosphere content test fixture is identical.
In addition, step S90 is further included before S100：By the hermetic seal device sample to be tested 40, the puncture bottom
Plate 10 is heated with the seal cover board 20, makes the hermetic seal device sample to be tested 40, the puncture bottom
Plate 10 and the temperature of the seal cover board 20 rise to more than 100 DEG C；Specifically, the hermetic seal device sample to be tested 40,
The puncture bottom plate 10 toasts 16h~24h with the seal cover board 20 at 100 DEG C.
In addition, after S110 steps, and step S115 is further included before S130 steps：Seal cover board 20 is carried out
Heat, the temperature of seal cover board 20 is risen to more than 100 DEG C.The order of step S115 and step S120 can exchange.
In this way, it can so drive away the hermetic seal device sample to be tested 40, the puncture bottom plate 10 and the sealing
The ambiance that cover board 20 is adsorbed, improves internal atmosphere content measuring when hermetic seal device sample to be tested 40 is punctured sampling
Accuracy.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses the several embodiments of the utility model, its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (8)
- A kind of 1. hermetic seal device inside atmosphere content test fixture, it is characterised in that including：Bottom plate is punctured, the first side for puncturing bottom plate is provided with the recess for installing hermetic seal device sample to be tested, with And the groove for installing sealing ring is provided with, the groove is circumferentially disposed around the recess, second side for puncturing bottom plate Face is provided with puncturing hole corresponding with the recess location, and the puncturing hole runs through the recess bottom wall；AndSeal cover board, the seal cover board are used to cover the first side for being located at the puncture bottom plate, and the seal cover board side is used Coordinate in being sealed with the sealing ring.
- 2. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that the recess with The hermetic seal device sample to be tested is adapted.
- 3. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that the recess Volume V1 and the relation of the volume V2 of the hermetic seal device sample to be tested are：V2≤V1≤110%V2.
- 4. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that the sealing cover Plate is equipped with bottoming hole, and the bottoming hole is used to load heating rod.
- 5. hermetic seal device inside atmosphere content test fixture according to claim 4, it is characterised in that the bottoming hole Extended to from the wherein one side of the seal cover board inside the seal cover board, the another side of the seal cover board be equipped with The fastener hole that the bottoming hole communicates, the fastener hole are used to load fastener.
- 6. hermetic seal device inside atmosphere content test fixture according to claim 1, it is characterised in that further include compression Mechanism, the hold-down mechanism are used to the seal cover board being pressed on the puncture bottom plate.
- 7. hermetic seal device inside atmosphere content test fixture according to claim 6, it is characterised in that the compacting machine Structure includes mounting bracket, movable block and push rod, and the mounting bracket is equipped with sliding part, and the movable block can be along the slip Portion moves, and the push rod is connected with movable block transmission, and the movable block is used to oppress in seal cover board.
- 8. hermetic seal device inside atmosphere content test fixture according to claim 7, it is characterised in that the installation branch Rotation hole corresponding with the push rod is provided with, the push rod is rotatably arranged in the mounting bracket through the rotation hole On, the push rod is screwed pipe, and the movable block is equipped with the screw rod set corresponding to the screwed pipe, and the screw rod loads to institute State in screwed pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721147394.9U CN207263720U (en) | 2017-09-07 | 2017-09-07 | Hermetic seal device inside atmosphere content test fixture |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721147394.9U CN207263720U (en) | 2017-09-07 | 2017-09-07 | Hermetic seal device inside atmosphere content test fixture |
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| Publication Number | Publication Date |
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| CN207263720U true CN207263720U (en) | 2018-04-20 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107576760A (en) * | 2017-09-07 | 2018-01-12 | 中国电子产品可靠性与环境试验研究所 | Hermetic seal device inside atmosphere content test fixture and method |
| CN114323818A (en) * | 2021-11-17 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for sampling internal atmosphere of ceramic airtight component and application |
-
2017
- 2017-09-07 CN CN201721147394.9U patent/CN207263720U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107576760A (en) * | 2017-09-07 | 2018-01-12 | 中国电子产品可靠性与环境试验研究所 | Hermetic seal device inside atmosphere content test fixture and method |
| CN114323818A (en) * | 2021-11-17 | 2022-04-12 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for sampling internal atmosphere of ceramic airtight component and application |
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