CN209589904U - A kind of high-precision gas sensor array detection device - Google Patents
A kind of high-precision gas sensor array detection device Download PDFInfo
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- CN209589904U CN209589904U CN201822253937.6U CN201822253937U CN209589904U CN 209589904 U CN209589904 U CN 209589904U CN 201822253937 U CN201822253937 U CN 201822253937U CN 209589904 U CN209589904 U CN 209589904U
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Abstract
The utility model discloses a kind of high-precision gas sensor array detection devices, including gas source to be measured, dilution gas source, mass flowmenter, mixed gas tank, vacuum temperature adjustment cavity, multi-channel data acquisition and processing module, flow output circuit module, flow monitoring circuit module, flow switch circuit module, computation end；The gas source to be measured, dilution gas source are connect with mixed gas tank by gas mixing pipe road respectively, and the mass flowmenter is respectively arranged in the gas mixing pipe road；The mixed gas tank is connect with the vacuum temperature adjustment cavity by ventilation pipe；It is equipped with sensor array to be detected in the vacuum temperature adjustment cavity, sensor array, multi-channel data acquisition and the processing module to be detected, computation end are sequentially connected electrically；This detection device can detect multiple gases parameter simultaneously, and test cavity temperature is adjusted, can also realize and be detected under vacuum state, and detection accuracy is high.
Description
Technical field
The utility model belongs to gas sensor test technical field, and in particular to a kind of high-precision gas sensor array
Detection device.
Background technique
Gas sensor is that a kind of be converted into the information such as the ingredient of gas, concentration can be by personnel, instrument and meter, calculating
The device for the information that machine etc. utilizes is that response characteristic is converted into electricity to the specially response of ingredient in gas by gas sensitive
Characteristics of signals, gas specific component concentration difference response characteristic is different, can reflect gas by the analysis to electric signal characteristic
The concentration of special component.Gas sensor is widely used in industry, agricultural, the fields such as medical industry and aerospace.With
The popularization of application, people are to the performance of gas sensor, and the requirement such as measurement accuracy, selectivity, stability is higher and higher, accordingly
Requirement of the ground for detection device is also harsher.
Gas sensor is influenced by temperature, and sensor response characteristic can be poor at different temperatures for same gas concentration
Not, thus temperature adjustable function be measure sensor detecting device performance an important indicator, have temperature adjustable function
Detection device, bigger to the detection calibration range of sensor, corresponding numerical value is more accurate.The sensor inspection that correspondence can not vacuumize
Device is surveyed, when detecting calibration, generally using air as zero reference point.Although testing result can react dense to a certain extent
Size is spent, detection demand is also able to satisfy for application of less demanding.But some pairs of precision and specific value are wanted
High application is asked, since gas componant is complicated in air, tested gas may be chemically reacted, and lead to tested gas
Concentration variation, test result inaccuracy.Therefore, detection is to obtain the premise of accurate data under vacuum conditions.
In recent years, it while detecting the demands of multiple gases and also constantly increases, such as breathing gas detection, automobile emission gas analyzer
And Detection of Air Quality etc., the product correspondingly occurred in the form of sensor array increase increasingly.However, to develop height
Precision, the good sensor array product of stability, it is necessary to have a set of precision height, the gas sensing that stability is good and accuracy is high
Device array detection device.But existing gas sensor detection device, often there is the gas sensor quantity of detection simultaneously
Limited or detection accuracy is not high, and temperature is uncontrollable, one or more problems such as cannot vacuumize.When Sensor array,
The mixed gas of input must include various sensors gaseous species detected, and the detection device that certain air inlet paths are few, and one
As using the normal mixture body for preparing in advance, controlled concentration is limited, can not demarcate each concentration point, is not used to detection industry
Sensor.
Therefore, it develops and develops that a kind of precision height, varying concentrations, temperature is adjustable, vacuum-pumping and can detect simultaneously a variety of
A kind of detection device of high-precision gas sensor array of gas is especially important.
Utility model content
To solve the above problems, a kind of detection device of high-precision gas sensor array of the utility model, solves existing
There is the technical problem that sensor array detection accuracy is not high in technology.
A kind of high-precision gas sensor array detection device, including it is gas source to be measured, dilution gas source, mass flowmenter, mixed
Gas tank, vacuum temperature adjustment cavity, multi-channel data acquisition and processing module, flow output circuit module, flow monitoring circuit module, stream
Measure on-off circuit module, computation end；The gas source to be measured, dilution gas source are connect with mixed gas tank by gas mixing pipe road respectively,
The mass flowmenter is respectively arranged in the gas mixing pipe road；The mixed gas tank and the vacuum temperature adjustment cavity pass through ventilation pipe
Connection；It is equipped with sensor array to be detected in the vacuum temperature adjustment cavity, the sensor array to be detected, multichannel data
Acquisition is sequentially connected electrically with processing module, computation end；The flow output circuit module, flow sensing circuit module, stream
Amount on-off circuit module both ends are electrically connected with computation end and mass flowmenter respectively.
More preferably, a kind of high-precision gas sensor array detection device, it is characterised in that: the dilution gas source
There is 1 group, the gas source to be measured has 1~7 group.
More preferably, the gas source to be measured includes one of CO, CO2, NO, NO2, NH3, CH3OH, CH2O or a variety of gas
Body.
More preferably, the dilution gas source includes O2, N2, H2, is used for simulated air, dilutes the gas source to be measured, reaches institute
The test concentrations needed.
More preferably, the vacuum temperature adjustment cavity is the organic glass cavity of the round and smooth drying in inner cavity.
More preferably, temperature-controlling module and vacuum control component degree, the temperature control are equipped in the vacuum temperature adjustment cavity
Component temperature-adjustable range processed are as follows: 25 DEG C to 1500 DEG C.
Working principle of the utility model is:
The working principle of the utility model is by circuit module and software control mass flowmenter, so that into vacuum
The mixed gas of temperature adjustment cavity reaches required matched proportion density, while by setting vacuum temperature adjustment cavity temperature control assembly and very
Empty control assembly, thus temperature and gas purity needed for obtaining, acquired finally by multi-channel data acquisition and processing module and
The signal for handling sensor array response, to reach test request.
The application method of the utility model:
Gas sensor array is set in vacuum temperature adjustment cavity, and temperature-controlling module and vacuum control component are set,
Vacuum temperature adjustment cabinet is adjusted to required temperature and vacuum state；Then, all modular power sources are opened, computation end is set, if
Set required gas mixing ratio concentration and purity；Then gas source to be measured and dilution gas source are opened, the output of standard gas sample is all the way or more
Road gas source to be measured and dilution gas source, so that the mixed gas into vacuum temperature adjustment cavity reaches required matched proportion density and purity.
Finally by the signal of multi-channel data acquisition and processing module acquisition sensor array response, and obtained response message is transmitted
Data processing and data analysis are carried out to computer end, goes on smoothly test gas inlet, response signal acquisition with data processing.
In the testing result of computation end observation sensor array, it will test result and the intracorporal actual value of vacuum temperature adjustment chamber done pair
Than can accurately obtain the testing result of sensor array.
Compared with prior art, the utility model has the beneficial effects that
(1) the utility model can detect multiple gases parameter simultaneously, obtain accurate test result；
(2) the utility model can test cavity temperature it is adjustable, improve the accuracy of testing result；
(3) the test cavity of the utility model can vacuumize, and can be detected under vacuum conditions；
(4) the utility model infrastructure cost is low, practical, have a good application prospect.
Detailed description of the invention
It, below will be to required in embodiment description in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing to be used is briefly described, it should be apparent that, the accompanying drawings in the following description is only the preferred reality of the utility model
Example is applied, the scope of the utility model is not limited.Attached drawing not to scale (NTS) (in addition to regulation), and be intended to combine following detailed
Explanation in thin description uses.
Fig. 1 is the structural block diagram of the utility model.
In figure, 1: gas source to be measured；2: dilution gas source；3: mass flowmenter；4: mixed gas tank；5: vacuum temperature adjustment cavity；6: more
Circuit-switched data acquisition and processing module；7: flow output circuit module；8: flow sensing circuit module；9: flow switch circuit mould
Block；10: computation end.
Specific embodiment
In order to be best understood from the utility model technology contents, below in conjunction with the attached drawing in the utility model, provide specific
Embodiment, and the utility model is described further in conjunction with attached drawing.
A kind of high-precision gas sensor array detection device as shown in Figure 1 include: gas source 1 to be measured, dilution gas source 2,
Mass flowmenter 3, mixed gas tank 4, vacuum temperature adjustment cavity 5, gas sensor array, multi-channel data acquisition and processing module 6, flow
Output circuit module 7, flow monitoring circuit module, flow switch circuit module 9, computation end 10.Gas source 1 to be measured, dilution
Gas source 2 is connect with mixed gas tank 4 by gas mixing pipe road respectively, and mass flowmenter 3 is respectively arranged in gas mixing pipe road；Mixed gas tank 4 with it is true
Air-conditioning temperature cavity 5 is connected by ventilation pipe；Gas sensor array to be detected is equipped in vacuum temperature adjustment cavity 5, it is to be detected
Gas sensor array, multi-channel data acquisition and processing module 6, computation end 10 is sequentially connected electrically；Flow output circuit
Module 7 is connect with computation end 10 and mass flowmenter 3, has the function of controlling flow output；Flow output circuit module 8
It is connect with computation end 10 and mass flowmenter 3, has the function of the real-time output flow of monitoring；Flow switch circuit module 9
It is connect with computation end 10 and mass flowmenter 3, has the function of that controlling mass flowmenter 3 switchs.Data acquisition with
Processing module 6 is existing data acquisition and procession module 6, for signal acquisition and signal processing.Signal acquisition is by gas
Body sensor array is converted into electric signal to the response of the under test gas in the vacuum temperature adjustment cavity 5.Signal processing is to pass through
Analog-signal transitions are digital signal by data processing circuit, and collected sensor signal is turned by normalized
Become required standard signal.
The dilution gas source 2 has 1 group, and the gas source 1 to be measured has 1~7 group.The gas source to be measured 1 includes CO, CO2、NO、
NO2、NH3、CH3OH、CH2One of O or multiple gases.The vacuum temperature adjustment cavity 5 is organic glass of the round and smooth drying in inner cavity
Glass cavity.It is equipped with temperature-controlling module and vacuum control component degree in the vacuum temperature adjustment cavity 5, the temperature-controlling module can
Adjust temperature range are as follows: 25 DEG C to 1500 DEG C.
Gas sensor array to be measured can be CO sensor, CO2Sensor, NO sensor, NO2Sensor, NH3It passes
Sensor, CH3OH sensor, CH2The sensor array of the compositions such as O sensor.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of high-precision gas sensor array detection device, it is characterised in that: including gas source to be measured, dilution gas source, quality
Flowmeter, mixed gas tank, vacuum temperature adjustment cavity, multi-channel data acquisition and processing module, flow output circuit module, flow monitoring electricity
Road module, flow switch circuit module, computation end；The gas source to be measured, dilution gas source are respectively with mixed gas tank by mixing gas
Pipeline connection, the mass flowmenter are respectively arranged in the gas mixing pipe road；The mixed gas tank and the vacuum temperature adjustment cavity are logical
Cross ventilation pipe connection；Sensor array to be detected, the sensor array to be detected are equipped in the vacuum temperature adjustment cavity
Column, multi-channel data acquisition and processing module, computation end are sequentially connected electrically；The flow output circuit module, flow detection
Circuit module, flow switch circuit module both ends are electrically connected with computation end and mass flowmenter respectively.
2. a kind of high-precision gas sensor array detection device according to claim 1, it is characterised in that: the dilution
Gas source has 1 group, and the gas source to be measured has 1~7 group.
3. a kind of high-precision gas sensor array detection device according to claim 1, it is characterised in that: described to be measured
Gas source includes CO, CO2、NO、NO2、NH3、CH3OH、CH2One of O or multiple gases.
4. a kind of high-precision gas sensor array detection device according to claim 1 to 3, it is characterised in that: institute
Stating dilution gas source includes O2、N2、H2, it is used for simulated air.
5. a kind of high-precision gas sensor array detection device according to claim 4, it is characterised in that: the vacuum
Temperature adjustment cavity is the organic glass cavity of the round and smooth drying in inner cavity.
6. a kind of high-precision gas sensor array detection device according to claim 1 or 5, it is characterised in that: described
Temperature-controlling module and vacuum control component, the temperature-controlling module temperature-adjustable range are equipped in vacuum temperature adjustment cavity
Are as follows: 25 DEG C to 1500 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822253937.6U CN209589904U (en) | 2018-12-29 | 2018-12-29 | A kind of high-precision gas sensor array detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822253937.6U CN209589904U (en) | 2018-12-29 | 2018-12-29 | A kind of high-precision gas sensor array detection device |
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| CN209589904U true CN209589904U (en) | 2019-11-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113607776A (en) * | 2021-07-21 | 2021-11-05 | 广州德芯半导体科技有限公司 | Method for realizing array type MEMS multi-gas sensor |
-
2018
- 2018-12-29 CN CN201822253937.6U patent/CN209589904U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113607776A (en) * | 2021-07-21 | 2021-11-05 | 广州德芯半导体科技有限公司 | Method for realizing array type MEMS multi-gas sensor |
| CN113607776B (en) * | 2021-07-21 | 2023-03-10 | 广州德芯半导体科技有限公司 | Method for realizing array type MEMS multi-gas sensor |
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