CN207380006U - Minute gas online detection instrument - Google Patents
Minute gas online detection instrument Download PDFInfo
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- CN207380006U CN207380006U CN201721426618.XU CN201721426618U CN207380006U CN 207380006 U CN207380006 U CN 207380006U CN 201721426618 U CN201721426618 U CN 201721426618U CN 207380006 U CN207380006 U CN 207380006U
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- measurement unit
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Abstract
The utility model discloses a kind of minute gas online detection instruments.The utility model is made of gas measurement unit and pedestal, and the gas measurement unit is on pedestal.The gas measurement unit, which includes passive type piston, filter, by-passing valve and fixed container, the passive type piston, includes piston body and piston cylinder.Being carried in the pedestal includes arm processor, accumulator charging module, temperature-measuring module, pressure measuring module, photosignal detection module, key-press module, LCD MODULE, thermal printer module, communication interface module and magnetic switch control.The utility model can carry out field calibration to instrument so that detection is more convenient, simultaneously because it is the real gas station in scene, has real-time, laboratory is also overcomed using error caused by gasmetry is substituted, hence measurement result is more accurate.
Description
Technical field
The utility model belongs to field of measuring techniques, is related to a kind of minute gas online detection instrument.
Background technology
The production domesticization of current large scale integrated circuit has been listed in long term growth in the Chinese government and has planned, electronics industry
There to be significant contribution in the economic growth of following country.Electronic gas is as flat panel display device, compound semiconductor device
The electronics industries such as part, solar cell, optical fiber produce indispensable raw material, are widely used in film, etching, doping, gas
Mutually in the techniques such as deposition, diffusion, micro-gas sensors is required for measure.
" blood " of the electronic gas as electronics industry, it is necessary to can just be become more meticulous with controller by minute gas flowmeter
Be fed among each technological process, once it is this supply slightly deviation, product quality can not just ensure.Oxygen, titanium dioxide
The medical gas such as carbon, ozone, nitrogen, hernia are clinically using more generally, and the precision of control with the monitoring of flow is not only
The effect of medical treatment is affected, can also be related to the life safety of patient in special circumstances, therefore associated assay devices are accurately examined
The importance of survey is unquestionable.And become more meticulous with microminaturization be product or technology development important directions, small stream
The detection technique of amount will certainly become the most there is an urgent need to one of basic technology.
Currently, minute gas detection technique is mainly the following：The pressure volume temperature time（PVTt）Method, quality time
（mt）Method, constant pressure transfiguration area method（Such as piston type, bellows-type）, method of standard table（Including sonic nozzle method）, particulate imaging method
（PIV）, digital micro-fluid method etc..
Relatively more, German federal physical technique research institute is studied in terms of minute gas flow by foreign countries（PTB）Using constant pressure
Transfiguration area method has developed a set of electric drive double-piston calibrator and laser interference formula exchange system, double-piston calibrator flow model
It encloses for 5 (mL/h)~5 (L/h), device expanded uncertainty is 0.16%.Laser interference formula exchange system, range of flow are（0.2
~200）L/h, device expanded uncertainty are 0.25%；The U.S.（NIST）, Britain（NEL）, Greece（EIM）, Italy
（INRIM）Deng gas tiny flow quantity examination criteria device of the foundation based on piston principle, expanded uncertainty is in (0.2 ~ 0.5) %；
France（LNE）, Finland（MIKES）, Czech（CMI）The examination criteria device for waiting minute gas flow is mt method gas flow standards
Device, expanded uncertainty is in (0.3 ~ 0.5) %；Japan（NMIJ）Then use PVTt methods and mt subtraction units.
The country, national institute（NIM）Early stage establishes a set of soap film type gas flow standard device, and expanded uncertainty is
0.5%.Tianjin detection supervisory detection research institute has developed a set of electronics soap-film flow standard device, by measuring soap-film
Time difference measure flow, it is but inconvenient for operation.
The content of the invention
The utility model is in view of the shortcomings of the prior art, provide a kind of minute gas online detection instrument.
The utility model technical solution adopted for solving the technical problem is：
The utility model is made of gas measurement unit and pedestal, and the gas measurement unit is on pedestal.
The gas measurement unit includes passive type piston, filter, by-passing valve and fixed container, the passive type
Piston includes piston body and piston cylinder, equipped with pressure sensor and temperature sensor wherein on the air inlet of piston cylinder, uses respectively
In the pressure and temperature of compensation gas, piston cylinder circumferentially has photoelectric tube, external for determining the position of piston body
Gas enters the air inlet with the air inlet of piston cylinder, the air inlet of by-passing valve and fixed container, bypass after filter
Gas outlet as gas measurement unit after the gas outlet of valve is connected with the gas outlet of piston cylinder.
Being carried in the pedestal includes arm processor, accumulator charging module, temperature-measuring module, pressure measurement mould
Block, photosignal detection module, key-press module, LCD MODULE, thermal printer module, communication interface module and magnetism are opened
Close control；For wherein accumulator charging module to battery powered, the output of battery connects after signal transformation circuit input to ARM processing
Device；Temperature-measuring module, pressure measuring module receive the signal from temperature sensor and pressure sensor respectively, and by AD
Arm processor is delivered to after sample circuit, the signal of photoelectric tube is gathered by photosignal detection module, through optical coupling isolation circuit
After be delivered to arm processor, key-press module, LCD MODULE, thermal printer module, communication interface module, magnetic switch
Control is connected with arm processor, and wherein magnetic switch controls to control the switch of by-passing valve.
The utility model has an advantageous effect in that：Field calibration can be carried out to instrument so that detection is more convenient, together
When since it is the real gas station in scene, there is real-time, also overcome laboratory and brought using gasmetry is substituted
Error, hence measurement result is more accurate.
Description of the drawings
Fig. 1 is the structure diagram of the utility model；
Fig. 2 is gas measurement unit measuring principle figure；
Fig. 3 is gas measurement unit structure diagram；
Fig. 4 is pedestal circuit structure diagram.
Specific embodiment
The utility model is described further below in conjunction with attached drawing.
As shown in Figures 1 to 4, the utility model is made of gas measurement unit 2 and pedestal 1, the gasmetry list
For member on pedestal, gas measurement unit is responsible for the acquisition and pretreatment of the detection desired signal such as volume, time, pressure, temperature
Work, pedestal is responsible for completing the analysis and arrangement of the data obtained, the control of testing process and result output, with personal computer 3
Communication etc..
The gas measurement unit includes passive type piston, filter 4, by-passing valve 8 and fixed container 9, the quilt
Dynamic formula piston includes piston body 2-1 and piston cylinder 2-2, is passed wherein on the air inlet of piston cylinder equipped with pressure sensor 5 and temperature
Sensor 6, is respectively used to the pressure and temperature of compensation gas, and piston cylinder circumferentially has photoelectric tube（By transmitting tube 7-1 and connect
Closed tube 7-2 is formed）, for determining the position of piston body, external gas enter after filter with the air inlet of piston cylinder,
The air inlet of the air inlet of by-passing valve and fixed container, the gas outlet of by-passing valve are used as gas after being connected with the gas outlet of piston cylinder
The gas outlet of bulk measurement unit.
Being carried in the pedestal includes arm processor, accumulator charging module, temperature-measuring module, pressure measurement mould
Block, photosignal detection module, key-press module, LCD MODULE, thermal printer module, communication interface module and magnetism are opened
Close control；For wherein accumulator charging module to battery powered, the output of battery connects after signal transformation circuit input to ARM processing
Device；Temperature-measuring module, pressure measuring module receive the signal from temperature sensor and pressure sensor respectively, and by AD
Arm processor is delivered to after sample circuit, the signal of photoelectric tube is gathered by photosignal detection module, through optical coupling isolation circuit
After be delivered to arm processor, key-press module, LCD MODULE, thermal printer module, communication interface module, magnetic switch
Control is connected with arm processor, and wherein magnetic switch controls to control the switch of by-passing valve.
Embodiment：
As shown in Figure 1, equipment totally uses modular design concept, main body is made of gas measurement unit and pedestal,
Gas measurement unit is responsible for the acquisition of the detection desired signal such as volume, time, pressure, temperature and pretreatment work, pedestal are responsible for
The analysis and arrangement of the data obtained, the control of testing process and result output are completed, with the communication of personal computer etc..According to market
Investigation, enterprise's minute gas measurement range is needed mainly in (0.05-5) L/min at present, therefore the measuring unit of the present embodiment
Valid analysing range also for (0.05-5) L/min, expanded uncertainty 0.5%（k=2）.It can be surveyed simultaneously by extending gas
The specification of unit is measured, extends the upper and lower bound of detectable scope, forms the one-piece pattern that a pedestal matches somebody with somebody more measuring units, is formed
A set of wide scope, high-precision gas detection equipment.
Passive type glass tube piston device has the characteristics that portable, efficient, high-precision, is set as minute gas on-line checking
Standby is with the obvious advantage, and main measuring principle is subject to the shadow of choked flow piece piston as shown in Fig. 2, when air-flow passes through the cavity of sealing
It rings, gas pressure increase promotes piston to accelerate upwards, and after final gas pressure and gravitational equilibrium, piston remains a constant speed
Rise, detect piston at this time and pass through known distancehThat is determined volumeVThe required timet, the flow of fluid can be calculatedQ= V/t.Concrete structure is as shown in figure 3, when working, and by-passing valve is in opening state first, and inlet gas is flowed out through by-passing valve, test
When, by-passing valve is closed, air-flow promotes piston upwards, and detection piston is by calibration volumeVTimet, before and after synchronous acquisition
The signal of temperature, pressure calculates normal flow after being correctedQ, by-passing valve is finally opened, single measurement is completed.
The Embedded Hardware Platform and man-machine interface using ARM as core are mainly contained in pedestal.The structure of hardware circuit
As shown in figure 4, entire circuit includes accumulator charging module, temperature detecting module, pressure measuring module, photosignal detection mould
Block, key-press module, LCD MODULE, thermal printer module, communication interface module, magnetic switch control module etc..
To sum up, the online detection instrument is easy to carry, can be applied to industry spot at any time, has and does not have to dismounting instrument,
The features such as live real time calibration, and precision is high, structure is reliable, meets the demand of current micro- gas detection.
Claims (1)
1. minute gas online detection instrument, is made of gas measurement unit and pedestal, the gas measurement unit is mounted in base
On seat, it is characterised in that：
The gas measurement unit includes passive type piston, filter, by-passing valve and fixed container, the passive type piston
Including piston body and piston cylinder, equipped with pressure sensor and temperature sensor wherein on the air inlet of piston cylinder, it is respectively used to mend
The pressure and temperature of gas is repaid, piston cylinder circumferentially has photoelectric tube, for determining the position of piston body, external gas
Enter the air inlet with the air inlet of piston cylinder, the air inlet of by-passing valve and fixed container after filter, by-passing valve
Gas outlet as gas measurement unit after gas outlet is connected with the gas outlet of piston cylinder；
Being carried in the pedestal includes arm processor, accumulator charging module, temperature-measuring module, pressure measuring module, light
Electrical signal detection module, key-press module, LCD MODULE, thermal printer module, communication interface module and magnetic switch control
System；For wherein accumulator charging module to battery powered, the output of battery connects after signal transformation circuit input to arm processor；Temperature
Degree measurement module, pressure measuring module receive the signal from temperature sensor and pressure sensor respectively, and are sampled by AD
Arm processor is delivered to after circuit, the signal of photoelectric tube is gathered by photosignal detection module, defeated after optical coupling isolation circuit
It send to arm processor, key-press module, LCD MODULE, thermal printer module, communication interface module, magnetic switch control
It is connected with arm processor, wherein magnetic switch controls to control the switch of by-passing valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721426618.XU CN207380006U (en) | 2017-10-31 | 2017-10-31 | Minute gas online detection instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721426618.XU CN207380006U (en) | 2017-10-31 | 2017-10-31 | Minute gas online detection instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207380006U true CN207380006U (en) | 2018-05-18 |
Family
ID=62333690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721426618.XU Expired - Fee Related CN207380006U (en) | 2017-10-31 | 2017-10-31 | Minute gas online detection instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207380006U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111323338A (en) * | 2020-03-04 | 2020-06-23 | 中国计量大学 | Gas viscosity measurement system, gas flow online calibration system and method |
| CN112748038A (en) * | 2020-12-10 | 2021-05-04 | 陕西科技大学 | Micro-volume metering detection device and detection method for biological hydrogen production |
| CN113607893A (en) * | 2021-08-18 | 2021-11-05 | 郑州美克盛世电子科技有限公司 | Calibration method of gas detector |
-
2017
- 2017-10-31 CN CN201721426618.XU patent/CN207380006U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111323338A (en) * | 2020-03-04 | 2020-06-23 | 中国计量大学 | Gas viscosity measurement system, gas flow online calibration system and method |
| CN111323338B (en) * | 2020-03-04 | 2022-06-10 | 中国计量大学 | Gas flow online calibration system and method |
| CN112748038A (en) * | 2020-12-10 | 2021-05-04 | 陕西科技大学 | Micro-volume metering detection device and detection method for biological hydrogen production |
| CN113607893A (en) * | 2021-08-18 | 2021-11-05 | 郑州美克盛世电子科技有限公司 | Calibration method of gas detector |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180518 Termination date: 20201031 |
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| CF01 | Termination of patent right due to non-payment of annual fee |